CN108731927B - Method for monitoring air door of loading area of diffusion furnace tube - Google Patents
Method for monitoring air door of loading area of diffusion furnace tube Download PDFInfo
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- CN108731927B CN108731927B CN201810361818.4A CN201810361818A CN108731927B CN 108731927 B CN108731927 B CN 108731927B CN 201810361818 A CN201810361818 A CN 201810361818A CN 108731927 B CN108731927 B CN 108731927B
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- control module
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- diffusion furnace
- furnace tube
- oxygen concentration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method, e.g. intermittent, or the display, e.g. digital
- G01N33/0063—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method, e.g. intermittent, or the display, e.g. digital using a threshold to release an alarm or displaying means
Abstract
The invention discloses a method for monitoring a loading area air door of a diffusion furnace tube, which belongs to the technology in the field of semiconductors and comprises the following steps: step S1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module; step S2, determining whether the oxygen concentration value is less than the threshold: if yes, the control module controls the alarm module to give an alarm; if not, go to step S3; step S3, determining whether the loading area damper is closed according to the status information: if yes, the control module controls the alarm module to give an alarm; if not, the process returns to step S1. The technical scheme has the beneficial effects that: the invention can detect the oxygen concentration in the diffusion furnace tube in real time, judge whether to give an alarm or not according to the closing or opening state of the air door of the loading area, effectively monitor the air door of the loading area and give an alarm in time to remind a user of timely processing, thereby reducing the scrapping risk of products.
Description
Technical Field
The invention relates to the technology in the field of semiconductors, in particular to a method for monitoring a loading area air door of a diffusion furnace tube.
Background
The diffusional motion is caused by molecular motion, which is a random thermal motion of a substance that tends to reduce its concentration gradient, i.e., there is a net shift from high to low concentration.
The diffusion process is to incorporate a desired impurity into a silicon substrate by utilizing diffusion movement of the impurity and to make it have a specific concentration distribution.
The diffusion furnace is one of the important process devices in the front process of the integrated circuit production line, and is mainly used for doping semiconductors, namely diffusing doping materials into silicon wafers under the high-temperature condition so as to change and control the types, concentrations and distribution of impurities in the semiconductors and establish different electrical characteristic regions. Although some processes may use ion-implanted doping methods, diffusion is still the predominant, most prevalent doping method.
The diffusion furnace tube is provided with a loading area air door, and the loading area air door has the main function of realizing the convection between the loading area in the diffusion furnace and the outside air, so that the pressure and the oxygen concentration in the loading area are ensured.
An abnormal loading zone damper, i.e., not open or at a critical point of opening and closing (open state when closed), can cause environmental anomalies in the loading zone, creating turbulence and over-pressure problems. So that unknown particles such as organic particles, water vapor or microparticle charges are adsorbed on the surface of the wafer.
Engineers cannot know the closing condition of the air door of the loading area, and the traditional detection mode is periodic spot inspection. Regular spot inspection cannot be carried out on the furnace door of the loading area in real time, and when the furnace door of the loading area is abnormal, a large quantity of products are affected.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the method for monitoring the air door of the loading area of the diffusion furnace tube, which can detect the oxygen concentration in the diffusion furnace tube in real time, judge whether to give an alarm or not according to the closing or opening state of the air door of the loading area, effectively monitor the air door of the loading area and give an alarm in time to remind a user of timely processing, thereby reducing the rejection risk of products.
The invention is realized by the following technical scheme:
the invention relates to a method for monitoring a loading area air door of a diffusion furnace tube, wherein,
arranging a detection module for detecting the oxygen concentration in the diffusion furnace tube;
the detection module is connected with a control module, and the control module is connected with the loading area air door;
the control module is connected with an alarm module;
the method for monitoring the air door of the loading area specifically comprises the following steps:
step S1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module;
step S2, the control module compares the oxygen concentration value with a preset threshold value, and determines whether the oxygen concentration value is smaller than the threshold value:
if yes, the control module controls the alarm module to give an alarm;
if not, go to step S3;
step S3, the control module obtains the status information of the loading zone damper from the loading zone damper, and determines whether the loading zone damper is closed according to the status information:
if yes, the control module controls the alarm module to give an alarm;
if not, the process returns to step S1.
Preferably, the method for monitoring the loading zone damper of the diffusion furnace tube, wherein the control module controls the loading zone damper to open and close through a control process, and the control process includes:
step A1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module;
step a2, the control module compares the oxygen concentration value with a preset trigger point setting value to determine whether the oxygen concentration value is less than the trigger point setting value:
if yes, the control module controls the air door of the loading area to be closed;
if not, the control module controls the load zone damper to open and then returns to step A1.
Preferably, in the method for monitoring a loading zone damper of a diffusion furnace tube, in step S2, when the oxygen concentration value is smaller than the threshold, the control module obtains status information of the loading zone damper and determines whether the loading zone damper is closed according to the status information:
if yes, the control module controls the alarm module to give an alarm;
if not, the control module controls the alarm module to give an alarm and generates abnormal information for indicating that the loading area air door is in an abnormal state.
Preferably, in the method for monitoring a load zone damper of a diffusion furnace tube, in step S3, when the load zone damper is closed, the control module controls the alarm module to issue an alarm and generates abnormality information indicating that the load zone damper is in an abnormal state.
Preferably, the method for monitoring the loading zone damper of the diffusion furnace tube is characterized in that a storage module for storing the state information is arranged in the loading zone damper.
Preferably, the method for monitoring the loading zone damper of the diffusion furnace tube, wherein the storage module is a register, the register is set to 0 when the loading zone damper is closed, and the register is set to 1 when the loading zone damper is opened.
Preferably, the method for monitoring the loading zone damper of the diffusion furnace tube, wherein the threshold value is smaller than the set trigger point value.
Preferably, the method for monitoring the damper of the loading zone of the diffusion furnace tube, wherein an interlock editing unit is arranged in the control module, and the user sets the threshold value through the interlock editing unit.
Preferably, the method for monitoring the loading zone damper of the diffusion furnace tube, wherein the set trigger point is 19.5%.
Preferably, the method for monitoring the damper of the loading zone of the diffusion furnace tube, wherein the detection module is an oxygen detector.
The beneficial effects of the above technical scheme are:
the invention can detect the oxygen concentration in the diffusion furnace tube in real time, judge whether to give an alarm or not according to the closing or opening state of the air door of the loading area, effectively monitor the air door of the loading area and give an alarm in time to remind a user of timely processing, thereby reducing the scrapping risk of products.
Drawings
FIG. 1 is a flow chart of a method for monitoring a load zone damper of a diffusion furnace according to a preferred embodiment of the present invention;
FIG. 2 is a flow chart illustrating a control process of the control module according to the preferred embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
The embodiment relates to a method for monitoring a loading area air door of a diffusion furnace tube.
And a detection module for detecting the oxygen concentration in the diffusion furnace tube is arranged in the diffusion furnace tube.
The detection module can be an oxygen detector. The oxygen concentration value in the diffusion furnace tube is detected in real time through a detection module, namely an oxygen detection meter, so as to be used in the subsequent process.
The detection module is connected with a control module, and the control module is connected with the loading area air door.
The control module is simultaneously connected with the detection module and the loading area air door, can acquire the oxygen concentration value in the detection module, and controls the loading area air door according to the oxygen concentration value. The control module is also connected with the control system of the whole diffusion furnace tube at the same time and can receive the instruction of the control system.
The loading area air door is provided with a storage module for storing the state information of the loading area air door, and the state information represents whether the loading area air door is in an open state or a closed state, namely the control module can judge whether the loading area air door is in the open state or the closed state according to the state information in the storage module, so that further processing is carried out.
The control module is connected with an alarm module. The control module can send out alarm through the alarm module after logic judgment.
As shown in fig. 1, the load zone damper monitoring method of the present embodiment includes:
step S1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module.
Step S2, the control module compares the oxygen concentration value with a preset threshold value, and determines whether the oxygen concentration value is smaller than the threshold value:
if yes, the control module controls the alarm module to give an alarm;
if not, the process goes to step S3.
The preset threshold must be less than the trigger point set point. The threshold value here may be 19% or 18.5%.
The control unit compares the oxygen concentration value obtained from the detection module with a preset threshold value, and further judges whether the oxygen concentration value is smaller than the threshold value.
When the oxygen concentration value is smaller than the threshold value, the control module acquires the state information of the air door of the loading area and judges whether the air door of the loading area is closed or not according to the state information:
if yes, the control module controls the alarm module to give an alarm;
if not, the control module controls the alarm module to give an alarm and generates abnormal information for indicating that the loading area air door is in an abnormal state.
When the oxygen concentration value is less than the threshold value and the loading zone damper is open, the control module not only controls the alarm module to give an alarm, but also generates abnormal information for indicating that the loading zone damper is in an abnormal state. At this time, the loading area damper is in an abnormal state, which often indicates that the loading area damper is damaged, and the user needs to be prompted to deal with the abnormal state in time.
Step S3, the control module obtains the status information of the loading zone damper from the loading zone damper, and determines whether the loading zone damper is closed according to the status information:
if yes, the control module controls the alarm module to give an alarm;
if not, the process returns to step S1.
In the step S3, the control module controls the alarm module to issue an alarm when the load zone damper is closed, and generates abnormality information indicating that the load zone damper is in an abnormal state.
As shown in fig. 2, the control module controls the loading area damper to open or close through a control process, and the control module is also responsible for opening or closing the loading area damper according to the information of the detection module, and adjusting the gas pressure and the oxygen concentration in the diffusion furnace tube by opening or closing the loading area damper, so that the environment in the tube is suitable for production.
The control process comprises the following steps:
step A1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module;
step a2, the control module compares the oxygen concentration value with a preset trigger point setting value to determine whether the oxygen concentration value is less than the trigger point setting value:
if yes, the control module controls the air door of the loading area to be closed;
if not, the control module controls the load zone damper to open and then returns to step A1.
The trigger point setting is greater than the threshold and may be 19.5% or 20%.
An interlocking editing unit is arranged in the control module, and a user sets the threshold value through the interlocking editing unit. The user may also program through the interlock editing unit to implement the above-described steps S1 to S3. The interlock editing unit is also connected to the alarm module, and the user can program the interlock editing unit to implement the above steps S1 to S3 and control the alarm module to give an alarm if necessary.
In a preferred embodiment, the memory module is a register, the register is set to 0 when the load zone damper is closed, and the register is set to 1 when the load zone damper is open. The state information read by the control module is the value in the register, the loading area air door is judged to be closed when the numerical value is 0, and the loading area air door is judged to be opened when the numerical value is 1.
Compared with the prior art, the method for monitoring the air door of the loading area of the diffusion furnace tube comprises the following steps:
while the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.
Claims (8)
1. A method for monitoring a loading area air door of a diffusion furnace tube is characterized in that a detection module for detecting the oxygen concentration in the diffusion furnace tube is arranged in the diffusion furnace tube;
the detection module is connected with a control module, and the control module is connected with the loading area air door;
the control module is connected with an alarm module;
the method for monitoring the air door of the loading area specifically comprises the following steps:
step S1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module;
step S2, the control module compares the oxygen concentration value with a preset threshold value, and determines whether the oxygen concentration value is smaller than the threshold value:
if yes, the control module controls the alarm module to give an alarm;
if not, go to step S3;
step S3, the control module obtains the status information of the loading zone damper from the loading zone damper, and determines whether the loading zone damper is closed according to the status information:
if yes, the control module controls the alarm module to give an alarm;
if not, go back to step S1;
wherein the control module controls the opening and closing of the loading zone damper through a control process, the control process comprising:
step A1, the control module obtains the oxygen concentration value in the diffusion furnace tube through the detection module;
step a2, the control module compares the oxygen concentration value with a preset trigger point setting value, and determines whether the oxygen concentration value is less than the trigger point setting value:
if yes, the control module controls the air door of the loading area to be closed;
if not, the control module controls the load zone damper to open, then returns to step A1;
the threshold is less than the trigger point set value.
2. The method for monitoring the load zone damper of the diffusion furnace tube of claim 1, wherein in step S2, when the oxygen concentration value is less than the threshold, the control module obtains status information of the load zone damper and determines whether the load zone damper is closed according to the status information:
if yes, the control module controls the alarm module to give an alarm;
if not, the control module controls the alarm module to give an alarm and generates abnormal information for indicating that the loading area air door is in an abnormal state.
3. The method for monitoring the load zone damper of the diffusion furnace tube of claim 1, wherein in step S3, when the load zone damper is closed, the control module controls the alarm module to issue an alarm and generates abnormality information indicating that the load zone damper is in an abnormal state.
4. The method as claimed in claim 1, wherein a storage module is disposed in the load zone damper for storing the status information.
5. The method of claim 4, wherein the storage module is a register, the register is set to 0 when the load zone damper is closed, and the register is set to 1 when the load zone damper is open.
6. The method of claim 1, wherein the control module comprises an interlock editor unit, and the user sets the threshold value via the interlock editor unit.
7. The method of claim 1, wherein the trigger point setting is 19.5%.
8. The method of claim 1, wherein the detection module is an oxygen sensor.
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| CN201810361818.4A CN108731927B (en) | 2018-04-20 | 2018-04-20 | Method for monitoring air door of loading area of diffusion furnace tube |
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| CN201810361818.4A CN108731927B (en) | 2018-04-20 | 2018-04-20 | Method for monitoring air door of loading area of diffusion furnace tube |
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| CN108731927B true CN108731927B (en) | 2020-04-28 |
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| JP3697814B2 (en) * | 1997-01-31 | 2005-09-21 | 株式会社デンソー | Inside / outside air switching device for vehicle |
| CN104675435A (en) * | 2013-12-02 | 2015-06-03 | 林南 | Coal mine safety monitoring and controlling system |
| CN104879155B (en) * | 2015-04-30 | 2017-05-31 | 中国有色集团抚顺红透山矿业有限公司 | Mine air quality monitoring and warning system and its method based on Controlability Recirculating Air |
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| 矿井环境安全监测监控系统实验装置的设计与实现;毛永红 等;《长治学院学报》;20071031;第24卷(第5期);第61-62页 * |
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