CN108716928A - A kind of three glistening light of waves fibre laser self-mixing interference measuring systems - Google Patents

A kind of three glistening light of waves fibre laser self-mixing interference measuring systems Download PDF

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CN108716928A
CN108716928A CN201810424298.7A CN201810424298A CN108716928A CN 108716928 A CN108716928 A CN 108716928A CN 201810424298 A CN201810424298 A CN 201810424298A CN 108716928 A CN108716928 A CN 108716928A
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fiber
light
frequency
optical
laser
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谢芳
王韵致
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Beijing Jiaotong University
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Beijing Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35316Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Bragg gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

The invention discloses a kind of three glistening light of waves fibre laser self-mixing interference measuring systems, belong to field of optical measuring technologies.The system is by pump light source, five fiber couplers, three wavelength division multiplexers, three sections of Er-doped fibers, seven fiber optical circulators, seven fiber gratings, one FC/PC connector, three detectors, two frequency shifters, one outgoing head, two driving powers, a frequency mixer, signal processing circuit 1, signal processing circuit 2, signal processing circuit 3, signal processing circuit 4, signal processing circuit 5, computer and output result composition.Optical fiber and optical fibre device constitute three laser resonators, and three sections of Er-doped fibers are respectively three laser resonator gain medias, and fiber grating is wavelength selective elements, constitute three-wavelength laser.Three wavelength lasers are referenced object or measured objects is reflected back respective laser resonator and the light of intracavitary generates heterodyne self-mixing interference after shift frequency.This signal is handled, is realized to each parameter measurement.

Description

A kind of three glistening light of waves fibre laser self-mixing interference measuring systems
Technical field
The present invention relates to field of optical measurements, more particularly to a kind of three glistening light of waves fibre laser self-mixing interference measuring systems.
Background technology
The existing document being close with this technology has following two:
[1]D.P.Hand,T.A.Carolan,J.S.Barton,and J.D.C.Jones.“Profile measurement of optically rough surfaces by fiber-optic interferometry”, Opt.Lett., Vol.18, No.16,1993, and P.1361-1363. (Optics Letters (optics letter), volume 18, the 16th Phase, P.1361-1363)
The technical principle of document [1] is as shown in Figure 1.
The light that semiconductor laser is sent out reaches measurement head after faraday isolator and optical fiber three-dB coupler, measures Head is a Feisuo interferometer, and a part of light passes through GRIN Lens by fiber end face reflection as light, another part light is referred to It after focusing, projects on measured surface, come back in system by measured surface reflection and is interfered with reference light, interference letter It number is detected by detector, the phase decision of interference signal is in longitudinal height of measured surface measured point;Change the drive of the laser Streaming current measures same point with the light of four kinds of different frequencies with changing the glow frequency of laser, obtains four interference Signal, since incident light wave frequency is different, the position of four interference signals is mutually just different, adjusts driving current, makes two neighboring dry The phase difference pi/2 for relating to signal, passes through the following formula, you can demodulates the optical path difference D of the point, that is, completes the measurement of single-point:
In(n=1,2,3,4) is the intensity of n-th interference signal, and c is the light velocity, and ν is incident light frequency.
Stepper motor drives measurement head transversal scanning measured surface again, that is, completes the measurement to measured surface.
[2]Dejiao Lin,Xiangqian Jiang,Fang Xie,Wei Zhang,Lin Zhang and Ian Bennion.“High stability multiplexed fibre interferometer and its application On absolute displacement measurement and on-line surface metrology ", Optics Express, Vol.12, Issue 23,2004, P.5729-5734. (Optics Express (optics is express), 2004, the Volume 12, the 23rd phase, P.5729-5734)
The technical schematic diagram of document [2] is as shown in Figure 2.
This system includes the Michelson's interferometer that two light paths almost overlap.One Michelson's interferometer is to utilize survey The fiber grating and reference mirror measured on arm are constituted as speculum, for completing steady operation;Another Michelson's interferometer It is to be constituted as speculum using measurement mirror and reference mirror, work is measured for completing.Because the reference arm of two interferometers is total It is completely superposed with the reference arm light path of a speculum, two interferometers, and since the measuring arm of two interferometers almost overlaps, So as soon as an interferometer stabilizes, another interferometer also stabilizes.
It is λ to send out wavelength by semiconductor laser0Light be divided into two-way after two three-dB couplers, all the way by light Fine optical grating reflection, another way are referenced speculum reflection.Two-way reflected light is met and is done again after three-dB coupler It relating to, interference signal is reflected after circulator by another fiber grating, again passes by circulator, is then detected by detector, The signal that this detector detects moves the reference arm of piezoelectric ceramic tube adjusting fibre optic interferometer by servo circuit processing rear-guard Length, makes two interfere arms for stablizing interferometer be in quadrature (phase difference is pi/2) always, stablizes the interference to realize The purpose of instrument.
The wavelength X that tunable laser is sent outmVariable light is divided into two-way after two optical fiber three-dB couplers, and one Road is turned again to by the reflection of measurement mirror in interferometer again after optical fiber self-focus lens, and another way passes through optical fiber self-focus lens It is turned again in interferometer by reference mirror reflection again afterwards, two-way light meets after three-dB coupler, forms interference signal, this is dry Signal is related to after circulator and fiber grating, is detected by detector, is to measure the displacement for measuring mirror using phase analysis.
Above-mentioned two problem and shortage of the existing technology is:
1, it is difficult to measure the object of antiradar reflectivity.
2, the parameters such as the speed of object, vibration, step height cannot be measured.
Invention content
The present invention constitutes three optical fiber laser resonant cavities independent but that light-emitting surface is coplanar using optical fiber and optical fibre device, 980nm pump light sources (S) are used as pump light source, increasings of three sections of Er-doped fiber EDF respectively as these three optical fiber laser resonant cavities Beneficial medium, wavelength selections of the different fiber grating FBG of three bragg wavelengths respectively as these three optical fiber laser resonant cavities Element.Meet these three optical fiber laser resonant cavity condition of resonance and three in corresponding fiber grating FBG reflectance spectrums respectively The laser of wavelength passes through two frequency shifter AOM1 and AOM2 shift frequencies, wherein the laser of a wavelength is by the light before outgoing head G Fine optical grating reflection returns corresponding optical fiber laser resonant cavity and heterodyne self-mixed interference occurs for the light of intracavitary;Other two wavelength swashs Light projects on testee after being emitted head G and reflects or be scattered back respective optical-fiber laser resonance by testee Chamber occurs heterodyne self-mixed interference with the light of respective intracavitary, forms three tunnel heterodyne self-mixing interferences.Tri- tunnel heterodynes of Dui Zhe are certainly Mixed interference signal is handled, and is realized to parameter measurements such as the displacement of testee, speed, vibration, step heights.Optical fiber swashs Optical cavity has amplification to the light for feeding back to intracavitary, so this system can measure the object of antiradar reflectivity.Optical fiber Laser is both sensor and interferometer, and all -fiber light path is simple and compact for structure without adjusting, and is easy to carry about with one.
The present invention is achieved by the following technical solutions.
A kind of three glistening light of waves fibre laser self-mixing interference measuring systems, by 980nm pump light sources (S), five fiber couplers N1, N2, N3, N4, N5, three wavelength division multiplexer WDM1, WDM2, WDM3, three sections of Er-doped fibers EDF1, EDF2, EDF3, seven light Fine circulator C1, C2, C3, C4, C5, C6, C7, seven fiber grating FBG11, FBG21, FBG31, FBG12, FBG22, FBG32, FBG13, a FC/PC connector, three detector PD1, PD2, PD3, two frequency shifter AOM1, AOM2, an outgoing head G, two A driving power RF1, RF2, a frequency mixer, signal processing circuit 1 (B1), signal processing circuit 2 (B2), signal processing circuit 3 (B3), signal processing circuit 4 (B4), signal processing circuit 5 (B5), computer (B6) and output result (B7) form.Wherein, The bragg wavelength of fiber grating FBG11, fiber grating FBG12 and fiber grating FBG13 are identical, fiber grating FBG21 and The bragg wavelength of fiber grating FBG22 is identical, and fiber grating FBG31 is identical with the bragg wavelength of fiber grating FBG32. The part reflectance coating of 1550nm wave bands is plated in one end face of FC/PC connectors.The light that 980nm pump light sources (S) are sent out passes through light Fine coupler N1 is divided into three road light, and first via light is coupled into first optical fiber laser resonant cavity by wavelength division multiplexer WDM1, By Er-doped fiber EDF1, the fluorescence of 1550nm wave bands is inspired, this fluorescence reaches fiber grating after fiber optical circulator C1 FBG11, the light for meeting fiber grating FBG11 Bragg conditions are reflected by fiber grating FBG11, and reflected light again passes by fiber optic loop Row device C1 reaches FC/PC connectors by fiber coupler N2 and fiber optical circulator C7, and a part of light intensity is anti-by FC/PC connectors It penetrates, this part light intensity is along backtracking optical fiber laser resonant cavity;Another part light intensity penetrates FC/PC connectors, by two shift frequencies After device AOM1 and AOM2 shift frequency, fiber grating FBG13 is reached, and by fiber grating FBG13 reflections along backtracking optical-fiber laser Resonant cavity.The light that optical fiber laser resonant cavity is reflected back by FC/PC connectors passes through fiber optical circulator C7, fiber optical circulator C6, penetrates Fiber grating FBG32 reaches optical fiber light through fiber grating FBG22 by fiber optical circulator C5 by fiber optical circulator C4 Grid FBG12, and reflected by fiber grating FBG12, fiber optical circulator C4 is again passed by, by fiber coupler N3, wavelength-division multiplex Device WDM1, by Er-doped fiber EDF1, light intensity is amplified by Er-doped fiber EDF1, and the light intensity of amplification passes through fiber optical circulator C1, arrives It up to fiber grating FBG11, is reflected by fiber grating FBG11, again passes by fiber optical circulator C1, fiber coupler N2, fiber optic loop Row device C7 reaches FC/PC connectors, and a part of light intensity is reflected by FC/PC connectors, this part light intensity is humorous along backtracking optical-fiber laser Shake chamber, and another part light intensity penetrates FC/PC connectors.It so moves in circles, when gain is more than loss, is emitted from FC/PC connectors Wavelength is the laser of the bragg wavelength of fiber grating FBG11.
The second road light from fiber coupler N1 is coupled into second optical-fiber laser resonance by wavelength division multiplexer WDM2 Chamber inspires the fluorescence of 1550nm wave bands by Er-doped fiber EDF2, this fluorescence reaches optical fiber light after fiber optical circulator C2 Grid FBG21, the light for meeting fiber grating FBG21 Bragg conditions are reflected by fiber grating FBG21, and reflected light again passes by optical fiber Circulator C2 reaches FC/PC connectors by fiber coupler N2 and fiber optical circulator C7, and a part of light intensity is anti-by FC/PC connectors It penetrates, this part light intensity is along backtracking optical fiber laser resonant cavity;Another part light intensity penetrates FC/PC connectors, by two shift frequencies After device AOM1 and AOM2 shift frequency, and outgoing head G, project on testee.Optical fiber laser resonance is reflected back by FC/PC connectors The light of chamber is arrived through fiber grating FBG32 by fiber optical circulator C5 by fiber optical circulator C7 by fiber optical circulator C6 It is reflected up to fiber grating FBG22, and by fiber grating FBG22, again passes by fiber optical circulator C5, by fiber coupler N4, Wavelength division multiplexer WDM2, by Er-doped fiber EDF2, light intensity is amplified by Er-doped fiber EDF2, and the light intensity of amplification passes through optical fiber ring Device C2 reaches fiber grating FBG21, is reflected by fiber grating FBG21, again pass by fiber optical circulator C2, fiber coupler N2, Fiber optical circulator C7 reaches FC/PC connectors, and a part of light intensity is reflected by FC/PC connectors, this part light intensity is along backtracking optical fiber Laser resonator, another part light intensity penetrate FC/PC connectors, so move in circles, and when gain is more than loss, are connect from FC/PC The laser of the bragg wavelength of a length of fiber grating FBG21 of head outgoing wave.
Third road light from fiber coupler N1 is coupled into third optical-fiber laser resonance by wavelength division multiplexer WDM3 Chamber inspires the fluorescence of 1550nm wave bands by Er-doped fiber EDF3, this fluorescence reaches optical fiber light after fiber optical circulator C3 Grid FBG31, the light for meeting fiber grating FBG31 Bragg conditions are reflected by fiber grating FBG31, and reflected light again passes by optical fiber Circulator C3 reaches FC/PC connectors by fiber coupler N2 and fiber optical circulator C7, and a part of light intensity is anti-by FC/PC connectors It penetrates, this part light intensity is along backtracking optical fiber laser resonant cavity;Another part light intensity penetrates FC/PC connectors, by two shift frequencies After device AOM1 and AOM2 shift frequency, and outgoing head G, project on testee.Optical fiber laser resonance is reflected back by FC/PC connectors The light of chamber passes through fiber optical circulator C7, fiber optical circulator C6, reaches fiber grating FBG32, and reflected by fiber grating FBG32, Fiber optical circulator C6 is again passed by, by fiber coupler N5, wavelength division multiplexer WDM3, by Er-doped fiber EDF3, light intensity quilt Er-doped fiber EDF3 amplifications, the light intensity of amplification pass through fiber optical circulator C3, fiber grating FBG31 are reached, by fiber grating FBG31 Reflection again passes by fiber optical circulator C3, fiber coupler N2, fiber optical circulator C7, reaches FC/PC connectors, a part of light intensity It being reflected by FC/PC connectors, this part light intensity penetrates FC/PC connectors along backtracking optical fiber laser resonant cavity, another part light intensity, It so moves in circles, when gain is more than loss, from the bragg wavelength of a length of fiber grating FBG31 of FC/PC connector outgoing waves Laser.
The laser for three wavelength being emitted from FC/PC connectors passes through two frequency shifter AOM1 and AOM2 shift frequencies, wherein one The light of wavelength is reflected before outgoing head G as the fiber grating with reference to object, and the light of this wavelength is just contained to be connect from FC/PC Head is to the light path between fiber grating FBG13 by the information of environmental disturbances;The light of other two wavelength is thrown after being emitted head G It is mapped on testee.The light of three wavelength is reflected or scattered by reference substance or testee to swash along the respective optical fiber of backtracking Heterodyne self-mixed interference occurs for optical cavity and the light of intracavitary, and three tunnel heterodyne self-mixing interferences pass through fiber coupler respectively After N3, fiber coupler N4 and fiber coupler N5, detected respectively by detector PD1, detector PD2 and by detector PD3.From Testee reflects or the information such as the light displacement containing testee of scattering, speed, vibration, the signal that detector PD1 is detected It is handled by signal processing circuit 1 (B1), the signal that detector PD2 is detected is handled by signal processing circuit 2 (B2), detection The signal that device PD3 is detected is handled by signal processing circuit 3 (B3), meanwhile, the letter that two driving powers RF1 and RF2 are sent out Number one side is added in respectively on frequency shifter AOM1 and AOM2, and frequency shifter AOM1 and AOM2 is made to work;Another aspect input mixer Mixing, the output signal of frequency mixer after signal processing circuit 4 (B4) processing, believe by the output with signal processing circuit 1 (B1) Number, the output signal of the output signal of signal processing circuit 2 (B2) and signal processing circuit 1 (B1) is simultaneously at input signal Reason circuit 5 (B5) is handled.The output signal input computer (B6) of signal processing circuit 5 (B5), by computer (B6) journey After sequence is for data processing, it has been eliminated and has been measured from FC/PC connectors to the light path fiber grating FBG13 by environmental disturbances As a result, being exported by output result (B7).
Further, preferably, three light independent but that light-emitting surface is coplanar are constituted using optical fiber and optical fibre device Fine laser resonator, waves of the different fiber grating FBG of three bragg wavelengths respectively as these three optical fiber laser resonant cavities Long selection element, three sections of Er-doped fiber EDF are respectively as the gain media of these three optical fiber laser resonant cavities, three optical-fiber lasers Resonant cavity generates all stable laser of frequency and power respectively.
Further, preferably, a wavelength is referenced object (fiber grating FBG13) reflection, for compensating environment Interference;Remaining two wavelength projects on testee, is reflected by testee, for being measured to testee.Three Wavelength is reflected back toward respective optical fiber laser resonant cavity, with the light self-mixed interference in respective optical fiber laser resonant cavity, generates Self-mixing interference.
Further, preferably, it is carried out using the laser frequency of two frequency shifter AOM1 and AOM2 pairs of three wavelength Shift frequency is reflected back respective optical fiber laser resonant cavity respectively by the laser of three wavelength of shift frequency, and respective Light in optical fiber laser resonant cavity generates three tunnel heterodyne self-mixing interferences, by the processing to three road heterodyne interference signals, Realize the high-acruracy survey to parameters such as the displacement of object, speed, vibration, step heights.
There are five beneficial effects of the present invention are main:
1. the present invention constitutes three optical fiber laser resonant cavities independent but that light-emitting surface is coplanar using optical fiber and optical fibre device, The different fiber grating FBG of three bragg wavelengths respectively as these three optical fiber laser resonant cavities wavelength selective elements, three Section Er-doped fiber EDF generates power and frequency are all stablized three respectively as the gain media of these three optical fiber laser resonant cavities The laser of a wavelength.
2. a wavelength is referenced object (fiber grating FBG13) reflection, for compensating environmental disturbances;Remaining two wavelength is thrown It is mapped on testee, is reflected by testee, for being measured to testee.Three wavelength are reflected back toward respective light Light self-mixed interference in fine laser resonator, with respective optical fiber laser resonant cavity generates self-mixing interference.
3. the laser frequency using two frequency shifters pair, three wavelength carries out shift frequency, the heterodyne for generating three wavelength mixes certainly Interference signal handles the heterodyne self-mixing interference of these three wavelength, realize to the displacement of testee, speed, The measurement of the parameters such as vibration, step height.
4. the present invention is using the gain media in three optical fiber laser resonant cavities to returning to the light in optical fiber laser resonant cavity There is amplification, realizes the measurement to antiradar reflectivity object.
5. three glistening light of waves fibre lasers itself integrate sensor and interferometer in the present invention, all -fiber light path is without adjusting Section, it is simple and compact for structure to be easy to carry about with one.
Description of the drawings
Fig. 1 is the schematic diagram of existing technical literature [1];
Fig. 2 is the schematic diagram of existing technical literature [2];
Fig. 3 is principle of the invention figure.
Specific implementation mode
Below in conjunction with the accompanying drawings 3 and specific implementation mode the invention will be further described.
As shown in figure 3, by 980nm pump light sources (S), five fiber couplers N1, N2, N3, N4, N5, three wavelength-divisions are answered With device WDM1, WDM2, WDM3, three sections of Er-doped fiber EDF1, EDF2, EDF3, seven fiber optical circulator C1, C2, C3, C4, C5, C6, C7, seven fiber gratings FBG11, FBG21, FBG31, FBG12, FBG22, FBG32, FBG13, a FC/PC connector, three A detector PD1, PD2, PD3, two frequency shifter AOM1, AOM2, an outgoing head G, two driving powers RF1, RF2, one Frequency mixer, signal processing circuit 1 (B1), signal processing circuit 2 (B2), signal processing circuit 3 (B3), signal processing circuit 4 (B4), signal processing circuit 5 (B5), computer (B6) and output result (B7) form.
This measuring system constitutes three optical-fiber laser resonance independent but that light-emitting surface is coplanar using optical fiber and optical fibre device Chamber, the different fiber grating FBG of three bragg wavelengths respectively as these three optical fiber laser resonant cavities wavelength selective elements, Three sections of Er-doped fiber EDF send out the laser of three wavelength respectively as these three optical fiber laser resonant cavity gain medias.These three The laser of wavelength is referenced object or testee reflection or is scattered back respectively after two frequency shifter AOM1 and AOM2 shift frequencies Optical fiber laser resonant cavity in the light of intracavitary generate heterodyne self-mixed interference, to the heterodyne of the laser of these three wavelength from mixing Interference signal obtains the measurement result of the parameters such as measured object displacement, speed, vibration, step height after being handled.Fiber grating FBG11, fiber grating FBG12 are identical with the bragg wavelength of fiber grating FBG13, fiber grating FBG21 and fiber grating The bragg wavelength of FBG22 is identical, and fiber grating FBG31 is identical with the bragg wavelength of fiber grating FBG32.FC/PC connectors An end face plated the part reflectance coatings of 1550nm wave bands.
The light that 980nm pump light sources (S) are sent out is divided into three road light by fiber coupler N1, and first via light passes through wavelength-division Multiplexer WDM1 is coupled into first optical fiber laser resonant cavity, and the light of 980nm encourages Er-doped fiber by Er-doped fiber EDF1 EDF1 generates 1550nm wave band fluorescence, this fluorescence reaches fiber grating FBG11 after fiber optical circulator C1, meets fiber grating The light of FBG11 Bragg conditions is reflected by fiber grating FBG11, and reflected light again passes by fiber optical circulator C1, by optical fiber coupling Clutch N2, fiber optical circulator C7 reach FC/PC connectors, and a part of light intensity is reflected back optical fiber laser resonant cavity by FC/PC connectors, Another part light intensity transmits.The light for being reflected back toward optical fiber laser resonant cavity again passes by fiber optical circulator C7, by optical fiber ring Device C6, by fiber optical circulator C5, is arrived through fiber grating FBG22 by fiber optical circulator C4 through fiber grating FBG32 Up to fiber grating FBG12.Since fiber grating FBG12 is identical with the bragg wavelength of fiber grating FBG11, so reaching optical fiber The light of grating FBG 12 is reflected by fiber grating FBG12.Fiber optical circulator C4 is again passed by by the fiber grating FBG12 light reflected, By fiber coupler N3, wavelength division multiplexer WDM1, Er-doped fiber EDF1 is reached, light intensity is amplified by Er-doped fiber EDF1, is passed through Fiber grating FBG11 is reached after fiber optical circulator C1, and is reflected by fiber grating FBG11, fiber optical circulator C1 is again passed by, and is passed through It crosses fiber coupler N2, after fiber optical circulator C7, reaches FC/PC connectors, a part of light intensity is reflected back optical fiber by FC/PC connectors and swashs Optical cavity, the transmission of another part light intensity.It so moves in circles, meets optical fiber laser resonant cavity condition of resonance and in fiber grating Wavelength in FBG11 reflectance spectrums generates resonance, generates laser when gain is more than loss, is exported by FC/PC connectors, and output swashs Light frequency is f01.For laser after two frequency shifters AOM1 and AOM2, frequency will generate fYFrequency displacement, laser frequency become f01+ fY, this light reaches fiber grating FBG13, and is reflected by fiber grating FBG13, and frequency shifter AOM1 and AOM2, laser are again passed by Frequency becomes f01+2fY.The light of this frequency passes through FC/PC connectors, meets with the light of optical fiber laser resonant cavity, and generation frequency is 2fY Heterodyne self-mixing interference.This heterodyne self-mixing interference passes through fiber optical circulator C7, fiber optical circulator C6, through optical fiber Grating FBG 32 reaches fiber grating through fiber grating FBG22 by fiber optical circulator C5 by fiber optical circulator C4 FBG12 is simultaneously reflected by fiber grating FBG12, again passes by fiber optical circulator C4, after fiber coupler N3, reaches detector PD1 is detected by detector PD1.The heterodyne self-mixing interference input signal processing circuit 1 (B1) that detector PD1 is detected It is handled.
The second road light from fiber coupler N1 is coupled into second optical-fiber laser resonance by wavelength division multiplexer WDM2 The light of chamber, 980nm generates 1550nm wave band fluorescence by Er-doped fiber EDF2 excitation Er-doped fibers EDF2, this fluorescence passes through optical fiber Fiber grating FBG21 is reached after circulator C2, the light for meeting fiber grating FBG21 Bragg conditions is anti-by fiber grating FBG21 It penetrates, reflected light again passes by fiber optical circulator C2, by fiber coupler N2, fiber optical circulator C7, reaches FC/PC connectors, and one Part light intensity is reflected back optical fiber laser resonant cavity, another part transmission by FC/PC connectors.It is reflected back toward optical fiber laser resonant cavity Light again passes by fiber optical circulator C7, by fiber optical circulator C6, fiber grating FBG32, fiber optical circulator C5, reaches optical fiber light Grid FBG22.Since fiber grating FBG22 is identical with the bragg wavelength of fiber grating FBG21, so reaching fiber grating The light of FBG22 is reflected by fiber grating FBG22.Fiber optical circulator C5 is again passed by by the fiber grating FBG22 light reflected, is passed through Fiber coupler N4, wavelength division multiplexer WDM2 reach Er-doped fiber EDF2, and light intensity is amplified by Er-doped fiber EDF2, by optical fiber Fiber grating FBG21 is reached after circulator C2, and is reflected by fiber grating FBG21, fiber optical circulator C2 is again passed by, by light After fine coupler N2, fiber optical circulator C7, FC/PC connectors are reached, it is humorous that a part of light intensity by FC/PC connectors is reflected back optical-fiber laser Shake chamber, the transmission of another part light intensity.It so moves in circles, meets optical fiber laser resonant cavity condition of resonance and in fiber grating Wavelength in FBG21 reflectance spectrums generates resonance, generates laser when gain is more than loss, is exported by FC/PC connectors.Output swashs Light frequency is f02.For laser after two frequency shifters AOM1 and AOM2, frequency will generate fYFrequency displacement, laser frequency become f02+ fY, this light projects after being emitted head G on testee, is reflected by testee or be scattered back optical fiber laser resonant cavity. Since testee is moving, projects on testee and the light for being reflected or being scattered will generate Doppler frequency shift fD2, institute With the frequency by the light that testee reflects or scatters is f02+fY±fD2.This light again passes by two after being emitted head G Frequency shifter AOM1 and AOM2, laser frequency will generate fYFrequency displacement, laser frequency become f02+2fY±fD2.The light of this frequency passes through FC/PC connectors meet with the light of optical fiber laser resonant cavity, and generation frequency is 2fY±fD2Heterodyne self-mixing interference.This heterodyne Self-mixing interference passes through fiber optical circulator C7, fiber optical circulator C6, through fiber grating FBG32, by fiber optical circulator After C5, reaches fiber grating FBG22 and reflected by fiber grating FBG22, fiber optical circulator C5 is again passed by, by fiber coupling After device N4, detector PD2 is reached, is detected by detector PD2.The heterodyne self-mixing interference input that detector PD2 is detected Signal processing circuit 2 (B2) is handled.
Third road light from fiber coupler N1 is coupled into third optical-fiber laser resonance by wavelength division multiplexer WDM3 The light of chamber, 980nm generates 1550nm wave band fluorescence by Er-doped fiber EDF3 excitation Er-doped fibers EDF3, this fluorescence passes through optical fiber Fiber grating FBG31 is reached after circulator C3, the light for meeting fiber grating FBG31 Bragg conditions is anti-by fiber grating FBG31 It penetrates, reflected light again passes by fiber optical circulator C3, by fiber coupler N2, fiber optical circulator C7, reaches FC/PC connectors, and one Part light intensity is reflected back optical fiber laser resonant cavity, another part transmission by FC/PC connectors.It is reflected back toward optical fiber laser resonant cavity Light again passes by fiber optical circulator C7, by fiber optical circulator C6, reaches fiber grating FBG32.Due to fiber grating FBG32 and The bragg wavelength of fiber grating FBG31 is identical, so the light for reaching fiber grating FBG32 is reflected by fiber grating FBG32.Quilt The light of fiber grating FBG32 reflections again passes by fiber optical circulator C6, is arrived by fiber coupler N5, wavelength division multiplexer WDM3 Up to Er-doped fiber EDF3, light intensity is amplified by Er-doped fiber EDF3, fiber grating FBG31 is reached after fiber optical circulator C3, again It is reflected by fiber grating FBG31, again passes by fiber optical circulator C3, by fiber coupler N2, after fiber optical circulator C7, reached FC/PC connectors, a part of light intensity are reflected back optical fiber laser resonant cavity, the transmission of another part light intensity by FC/PC connectors.So cycle Back and forth, meet optical fiber laser resonant cavity condition of resonance and the wavelength in fiber grating FBG31 reflectance spectrums generates resonance, work as gain Laser is generated when more than loss, is exported by FC/PC connectors.The laser frequency of output is f03.Laser passes through two frequency shifter AOM1 F will be generated with its frequency after AOM2YFrequency displacement, laser frequency become f03+fY, this light projects testee after being emitted head G On, reflected by testee or be scattered back optical fiber laser resonant cavity.Since testee is moving, project on testee And the light for being reflected or being scattered will generate Doppler frequency shift fD3, so, by the frequency for the light that testee reflects or scatters For f03+fY±fD3.This light again passes by two frequency shifters AOM1 and AOM2 after being emitted head G, and laser frequency will generate fYFrequently It moves, laser frequency becomes f03+2fY±fD3.The light of this frequency passes through FC/PC connectors, meets with the light of optical fiber laser resonant cavity, produces Raw frequency is 2fY±fD3Heterodyne self-mixing interference.This heterodyne self-mixing interference passes through fiber optical circulator C7, fiber optic loop Row device C6 reaches fiber grating FBG32 and is reflected by fiber grating FBG32, fiber optical circulator C6 again passed by, by optical fiber coupling After clutch N5, detector PD3 is reached, is detected by detector PD3.The heterodyne self-mixing interference that detector PD3 is detected is defeated Enter signal processing circuit 3 (B3) to be handled.
On the one hand the signal that driving power RF1 and driving power RF2 are sent out is added in frequency shifter AOM1 and frequency shifter respectively On AOM2, make frequency shifter AOM1 and frequency shifter AOM2 work;Another aspect input mixer is mixed, the output signal warp of frequency mixer After crossing signal processing circuit 4 (B4) processing, with the output signal of signal processing circuit 1 (B1), signal processing circuit 2 (B2) it is defeated Go out signal and the output signal signal processing of input signal processing circuit 5 (B5) progress simultaneously of signal processing circuit 3 (B3), The output signal of signal processing circuit 5 (B5) obtains measurement result after the program in computer (B6) is for data processing, by Result (B7) is exported to export.
Realization in order to demonstrate the invention, describes above-mentioned specific example, but other variations of the present invention and repaiies Change, it will be apparent to those skilled in the art that, appointing within the scope of essence and basic principle of the present invention without disclosure What modification/variation imitates transformation to belong to claims of the invention.

Claims (3)

1. a kind of three glistening light of waves fibre laser self-mixing interference measuring systems, it is characterised in that be five by 980nm pump light sources (S) Fiber coupler N1, N2, N3, N4, N5, three wavelength division multiplexer WDM1, WDM2, WDM3, three sections of Er-doped fiber EDF1, EDF2, EDF3, seven fiber optical circulator C1, C2, C3, C4, C5, C6, C7, seven fiber grating FBG11, FBG21, FBG31, FBG12, FBG22, FBG32, FBG13, a FC/PC connector, three detector PD1, PD2, PD3, two frequency shifter AOM1, AOM2, one A outgoing head G, two driving powers RF1, RF2, signal processing circuit 1 (B1), signal processing circuit 2 (B2), signal processing electricity Road 3 (B3), signal processing circuit 4 (B4), signal processing circuit 5 (B5), computer (B6) and output result (B7) form;Optical fiber The bragg wavelength of grating FBG 11, fiber grating FBG12 and fiber grating FBG13 is identical, fiber grating FBG21 and optical fiber The bragg wavelength of grating FBG 22 is identical, and fiber grating FBG31 is identical with the bragg wavelength of fiber grating FBG32;FC/PC The part reflectance coating of 1550nm wave bands is plated in one end face of connector;The light that 980nm pump light sources (S) are sent out passes through fiber coupling Device N1 is divided into three road light, and first via light is coupled into first optical fiber laser resonant cavity by wavelength division multiplexer WDM1,980nm's Light generates 1550nm wave band fluorescence by Er-doped fiber EDF1 excitation Er-doped fibers EDF1, this fluorescence is after fiber optical circulator C1 Fiber grating FBG11 is reached, the light for meeting the wavelength of fiber grating FBG11 Bragg conditions is reflected by fiber grating FBG11, instead It penetrates light and again passes by fiber optical circulator C1, by fiber coupler N2, fiber optical circulator C7, reach FC/PC connectors, a part of light Optical fiber laser resonant cavity, the transmission of another part light intensity are reflected back by FC/PC connectors by force;It is reflected back toward the light of optical fiber laser resonant cavity Fiber optical circulator C7 is again passed by, by fiber optical circulator C6, is penetrated by fiber optical circulator C5 through fiber grating FBG32 Fiber grating FBG22 reaches fiber grating FBG12 by fiber optical circulator C4;Due to fiber grating FBG12 and fiber grating The bragg wavelength of FBG11 is identical, so the light for reaching fiber grating FBG12 is reflected by fiber grating FBG12;By fiber grating The light of FBG12 reflections again passes by fiber optical circulator C4, by fiber coupler N3, wavelength division multiplexer WDM1, reaches er-doped light Fine EDF1, light intensity are amplified by Er-doped fiber EDF1, fiber grating FBG11 are reached after fiber optical circulator C1, and by optical fiber light Grid FBG11 reflection, again passes by fiber optical circulator C1, by fiber coupler N2, after fiber optical circulator C7, reaches FC/PC and connects Head, a part of light intensity are reflected back optical fiber laser resonant cavity, the transmission of another part light intensity by FC/PC connectors;So move in circles, it is full Sufficient optical fiber laser resonant cavity condition of resonance and the wavelength generation resonance in fiber grating FBG11 reflectance spectrums, when gain is more than damage It takes and generates laser, exported by FC/PC connectors, the laser frequency of output is f01;Laser passes through two frequency shifters AOM1 and AOM2 Afterwards, frequency will generate fYFrequency displacement, laser frequency become f01+fY, this light arrival fiber grating FBG13, and by fiber grating FBG13 reflects, and again passes by frequency shifter AOM1 and AOM2, laser frequency becomes f01+2fY, the light of this frequency connects by FC/PC Head meets with the light of optical fiber laser resonant cavity, and generation frequency is 2fYHeterodyne self-mixing interference;This heterodyne self-mixed interference Signal passes through fiber optical circulator C7, fiber optical circulator C6, through fiber grating FBG32, by fiber optical circulator C5, through optical fiber Grating FBG 22 reaches fiber grating FBG12 and is reflected by fiber grating FBG12, again pass by light by fiber optical circulator C4 Fine circulator C4 reaches detector PD1, is detected by detector PD1, detector PD1 is detected after fiber coupler N3 Heterodyne self-mixing interference input signal processing circuit 1 (B1) is handled;The second road light warp from fiber coupler N1 It crosses wavelength division multiplexer WDM2 and is coupled into second optical fiber laser resonant cavity, the light of 980nm encourages er-doped by Er-doped fiber EDF2 Optical fiber EDF2 generates 1550nm wave band fluorescence, this fluorescence reaches fiber grating FBG21 after fiber optical circulator C2, meets optical fiber The light of 21 Bragg condition of grating FBG is reflected by fiber grating FBG21, and reflected light again passes by fiber optical circulator C2, by light Fine coupler N2, fiber optical circulator C7, reach FC/PC connectors, and a part of light intensity is reflected back optical fiber laser resonance by FC/PC connectors Chamber, the transmission of another part light intensity;The light for being reflected back toward optical fiber laser resonant cavity again passes by fiber optical circulator C7, by fiber optic loop Row device C6, fiber grating FBG32, fiber optical circulator C5 reach fiber grating FBG22;Due to fiber grating FBG22 and optical fiber light The bragg wavelength of grid FBG21 is identical, so the light for reaching fiber grating FBG22 is reflected by fiber grating FBG22;By optical fiber light The light of grid FBG22 reflections again passes by fiber optical circulator C5, by fiber coupler N4, wavelength division multiplexer WDM2, reaches er-doped Optical fiber EDF2, light intensity are amplified by Er-doped fiber EDF2, fiber grating FBG21 are reached after fiber optical circulator C2, and by optical fiber Grating FBG 21 reflects, and again passes by fiber optical circulator C2, by fiber coupler N2, after fiber optical circulator C7, reaches FC/PC Connector, a part of light intensity are reflected back optical fiber laser resonant cavity, the transmission of another part light intensity by FC/PC connectors;So move in circles, Meet optical fiber laser resonant cavity condition of resonance and the wavelength in fiber grating FBG21 reflectance spectrums generates resonance, when gain is more than Laser is generated when loss, is exported by FC/PC connectors, and the laser frequency of output is f02;Laser by two frequency shifter AOM1 and After AOM2, frequency will generate fYFrequency displacement, laser frequency become f02+fY, this light projects testee after being emitted head G On, reflected by testee or be scattered back optical fiber laser resonant cavity;Since testee is moving, project on testee And the light for being reflected or being scattered will generate Doppler frequency shift fD2, so, by the frequency for the light that testee reflects or scatters For f02+fY±fD2;This light is after being emitted head G, and after again passing by two frequency shifters AOM1 and AOM2, laser frequency will generate fY Frequency displacement, laser frequency become f02+2fY±fD2;The light of this frequency passes through FC/PC connectors, meets with the light of optical fiber laser resonant cavity, Generation frequency is 2fY±fD2Heterodyne self-mixing interference;This heterodyne self-mixing interference passes through fiber optical circulator C7, optical fiber After circulator C6, fiber grating FBG32, fiber optical circulator C5, reaches fiber grating FBG22 and is reflected by fiber grating FBG22, Fiber optical circulator C5 is again passed by, after fiber coupler N4, detector PD2 is reached, is detected by detector PD2;Detector The heterodyne self-mixing interference input signal processing circuit 2 (B2) that PD2 is detected is handled;From fiber coupler N1's Third road light is coupled into third optical fiber laser resonant cavity by wavelength division multiplexer WDM3, and the light of 980nm passes through Er-doped fiber EDF3 encourages Er-doped fiber EDF3 to generate 1550nm wave band fluorescence, this fluorescence reaches fiber grating after fiber optical circulator C3 FBG31, the light for meeting fiber grating FBG31 Bragg conditions are reflected by fiber grating FBG31, and reflected light again passes by fiber optic loop Row device C3 reaches FC/PC connectors by fiber coupler N2, fiber optical circulator C7, and a part of light intensity is reflected by FC/PC connectors Back into optical fibers laser resonator, the transmission of another part light intensity;The light for being reflected back toward optical fiber laser resonant cavity again passes by optical fiber ring Device C7 reaches fiber grating FBG32 by fiber optical circulator C6;Due to the cloth of fiber grating FBG32 and fiber grating FBG31 Glug wavelength is identical, so the light for reaching fiber grating FBG32 is reflected by fiber grating FBG32;It is reflected by fiber grating FBG32 Light again pass by fiber optical circulator C6, by fiber coupler N5, wavelength division multiplexer WDM3, reach Er-doped fiber EDF3, light Amplified by Er-doped fiber EDF3 by force, fiber grating FBG31 is reached after fiber optical circulator C3, and anti-by fiber grating FBG31 It penetrates, again passes by fiber optical circulator C3, by fiber coupler N2, after fiber optical circulator C7, reach FC/PC connectors, a part Light intensity is reflected back optical fiber laser resonant cavity, the transmission of another part light intensity by FC/PC connectors;It so moves in circles, meets optical fiber and swash Optical cavity condition of resonance and the wavelength generation resonance in fiber grating FBG31 reflectance spectrums, generate when gain is more than loss Laser is exported by FC/PC connectors, and the laser frequency of output is f03;Laser is after two frequency shifters AOM1 and AOM2, frequency F will be generatedYFrequency displacement, laser frequency become f03+fY, this light projects after being emitted head G on testee, anti-by testee Penetrate or be scattered back optical fiber laser resonant cavity;Since testee is moving, projects on testee and reflected or dissipated The light penetrated will generate Doppler frequency shift fD3, so, the frequency by the light that testee reflects or scatters is f03+fY±fD3;This Light again passes by two frequency shifters AOM1 and AOM2 after being emitted head G, and laser frequency will generate fYFrequency displacement, laser frequency become For f03+2fY±fD3;The light of this frequency passes through FC/PC connectors, meets with the light of optical fiber laser resonant cavity, and generation frequency is 2fY± fD3Heterodyne self-mixing interference;This heterodyne self-mixing interference passes through fiber optical circulator C7, fiber optical circulator C6, reaches light Fine grating FBG 32 is simultaneously reflected by fiber grating FBG32, again passes by fiber optical circulator C6, after fiber coupler N5, is reached Detector PD3 is detected by detector PD3;The heterodyne self-mixing interference input signal processing circuit that detector PD3 is detected 3 (B3) are handled;On the one hand the signal that driving power RF1 and driving power RF2 are sent out is added in frequency shifter AOM1 and shifting respectively On frequency device AOM2, make frequency shifter AOM1 and frequency shifter AOM2 work;Another aspect input mixer is mixed, the output letter of frequency mixer Number by signal processing circuit 4 (B4) processing after, output signal, signal processing circuit 2 (B2) with signal processing circuit 1 (B1) Output signal and signal processing circuit 3 (B3) output signal simultaneously input signal processing circuit 5 (B5) carry out signal at Reason, the output signal of signal processing circuit 5 (B5) obtain measuring knot after the program in computer (B6) is for data processing Fruit is exported by output result (B7).
2. a kind of three glistening lights of waves fibre laser self-mixing interference measuring system according to claim 1, it is characterised in that:Utilize light Fine and optical fibre device constitutes three optical fiber laser resonant cavities independent but that light-emitting surface is coplanar, the different light of three bragg wavelengths Fine grating FBG is respectively as the wavelength selective elements of these three optical fiber laser resonant cavities, and three sections of Er-doped fiber EDF are respectively as this The gain media of three optical fiber laser resonant cavities generates the laser for three wavelength that power and frequency are all stablized.
3. a kind of three glistening lights of waves fibre laser self-mixing interference measuring system according to claim 1, it is characterised in that:Utilize two The laser frequency of three wavelength of a frequency shifter pair carries out shift frequency, generates the heterodyne self-mixing interference of three wavelength, to this three The heterodyne self-mixing interference of a wavelength is handled, and is realized to the displacement of testee, speed, vibration, step height etc. The measurement of parameter.
CN201810424298.7A 2017-08-10 2018-05-07 A kind of three glistening light of waves fibre laser self-mixing interference measuring systems Pending CN108716928A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111486939A (en) * 2020-04-24 2020-08-04 中山大学 Ultrasonic measuring device for realizing optical path and polarization state regulation and control based on SAGNAC principle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111486939A (en) * 2020-04-24 2020-08-04 中山大学 Ultrasonic measuring device for realizing optical path and polarization state regulation and control based on SAGNAC principle
CN111486939B (en) * 2020-04-24 2021-02-12 中山大学 Ultrasonic measuring device for realizing optical path and polarization state regulation and control based on SAGNAC principle

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