CN108709515A - Pivoting angle measurement method - Google Patents
Pivoting angle measurement method Download PDFInfo
- Publication number
- CN108709515A CN108709515A CN201810813992.8A CN201810813992A CN108709515A CN 108709515 A CN108709515 A CN 108709515A CN 201810813992 A CN201810813992 A CN 201810813992A CN 108709515 A CN108709515 A CN 108709515A
- Authority
- CN
- China
- Prior art keywords
- angle
- autocollimator
- shaft
- measurement method
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of pivoting angle measurement methods, speculum is installed in mechanism to be measured, and autocollimator is set up immediately ahead of speculum, its surface is collimated using autocollimator, then shaft is adjusted separately again, read X and Y direction angle component of the cross hair picture point on auto-collimation CCD, it must be mutually perpendicular to the one-dimensional shaft adjusted further according to the picture point line after the picture point and adjustment collimated and trigonometric function relationship can find out the one-dimensional shaft adjusted and autocollimator X-direction angle, similarly, find out the angle of another dimension shaft and autocollimator X-direction, the angle of the bidimensional shaft can be acquired by finally subtracting each other this bidimensional shaft and autocollimator X-direction included angle value.Using contactless measurement method, the measurement to multiple dimension pivoting angles more than two dimension or two dimension of mechanism to be measured is realized, measurement accuracy and versatility are high, and operability is good, and at low cost, easy to operate.
Description
Technical field
The invention belongs to ray machine assembly, field of measuring technique, and in particular to a kind of pivoting angle measurement method.
Background technology
Angle-adjusting mechanism is often used in optical-mechanical, it is desirable that the mechanical rotary shaft angle of adjustment mechanism is one
Within the scope of fixed allowable error.If overproof, adjustment mechanism just will appear connected effect.Such as frequency-doubling crystal in China's God Light device
Angle between module and the beat shaft and pitching shaft of transmission magnifier module etc. requires to be 90 °, and error requirements are better than 1 °.
If error is excessive, adjust times frequency module or magnifier module shaft it is wherein one-dimensional when, monitor at spatial filter anti-
Laser bidimensional can all change, and influence live laser alignment.
It is illustrated in figure 3 beat shaft deviation effect schematic diagram in two-dimensional adjusting mechanism, cathetus AB indicates that beat turns
Axis 1, straight line CD indicates pitching shaft, and dotted line EF indicates that the ideal position of beat shaft 1, origin O are observation point, it is assumed that known
Misalignment angle between beat shaft 1 and ideal position is α, if the angle of adjustment beat shaft 1 is Ф, origin O reflection
Point is moved at N, then with the presence of following relationship：
X-direction angle variable quantity：
Y direction angle variable quantity：
By 1. formula and 2. formula it is found that the misalignment angle α between beat shaft 1 and ideal position is bigger, adjustment beat shaft 1
When X-axis angle component it is smaller, the angle component of Y direction is bigger, then in actual use to these optical devices
It is required that being when adjusting certain dimension, another dimension angle should keep being basically unchanged, therefore during production or use, it needs to exchange
The pivoting angle of complete machine structure measures, and to ensure in accuracy rating, ensures being accurately positioned for element attitude.
Currently, well known mechanical adjusting mechanism pivoting angle merely by mechanical processing, assemble and ensure, typically no progress
It measures.By above-mentioned principle analysis it is found that mechanical adjusting mechanism pivoting angle can be measured by three coordinate measuring machine, but it is
It is measured indirectly by being fitted shaft cylinder table top to construct spindle central axis, therefore its measurement accuracy is easily by machine to be measured
Structure shaft geometric tolerance influences, and precision is limited, cannot be satisfied to there is the measurement of the adjustment mechanism pivoting angle of accurate adjustment requirement.It removes
In addition, three coordinate measuring machine is of high cost, contact survey is substantially using having working space requirement, existing measurement method
Amount, easily interferes with mechanism to be measured, and operability is poor, and it is mostly enclosed construction especially to assemble complete adjustment mechanism, hands over
Crunode is in enclosure space, even if also being difficult to touch shaft using three coordinate bulbs or laser tracker target, it is difficult to
It measures, it is larger to measure difficulty.
Invention content
In order to solve the above technical problems, the present invention provides a kind of pivoting angle measurement method, measurement accuracy is improved and can
Operability.
To achieve the above object, technical solution of the present invention is as follows：
A kind of pivoting angle measurement method, it is critical that its step are as follows：
S1：Speculum is installed in mechanism to be measured, and the surface of speculum is collimated using autocollimator；
S2：After the completion of collimation, the wherein one-dimensional shaft of mechanism to be measured is adjusted, and picture point is read in X, Y on auto-collimation CCD
The angle component of axis direction, and find out the angle of the one-dimensional shaft and autocollimator X-direction that are adjusted；
S3：Speculum is collimated again, makes the one-dimensional shaft adjusted in step S2 being restored to initial bit, adjustment is another
Outer one-dimensional shaft equally reads picture point at this time on auto-collimation CCD and finds out in addition one-dimensional turn in X, the angle component of Y direction
Axis and autocollimator X-direction angle
S4：It calculates, angle calculated in step S2 and S3 is subtracted each other, the absolute value for obtaining numerical value is two adjusted
The angle value of shaft.
Using above scheme, monitored using autocollimator part to be measured shaft drive execution unit rotary course reflected light at
The movement locus of picture, and application picture point movement locus must this principle vertical with shaft and plane and spheric reflection far field be imaged
Principle, high certainty of measurement, error is minimum, ensures the lens axis accuracy made, and has higher versatility and application, leads to
The measurement of rotary shaft angle of two dimension and the above dimension can be realized by crossing the above thinking, and use contactless measurement method,
Operability is good.
To further increase testing result precision, the autocollimator is photoelectric auto-collimator.
As preferred：The autocollimator carries out absolute reference point location using pyramid, and the measurement error of the pyramid is small
In 3 〃.Using above scheme, the accuracy of autocollimator absolute reference point can be improved, further increase measurement result precision.
As preferred：The measurement error of the autocollimator is less than 0.5 〃.It is total with the synthesis of pyramid using above scheme
Measurement accuracy is then better than 0.001 °, advantageously reduces overall measurement error.
Compared with prior art, the beneficial effects of the invention are as follows：
It is realized to machine to be measured using contactless measurement method using pivoting angle measurement method provided by the invention
The measurement of the two dimension of structure or multiple dimension pivoting angles more than two dimension, measurement accuracy and versatility are high, operability
Well.
Description of the drawings
Fig. 1 is mechanism beat rotation to be measured in the present invention and auto-collimation X-direction angle instrumentation plan；
Fig. 2 is mechanism pitching rotation to be measured and auto-collimation X-direction angle instrumentation plan in the present invention；
Fig. 3 is beat shaft deviation effect schematic diagram in mechanism to be measured.
Specific implementation mode
The invention will be further described with attached drawing with reference to embodiments.
With reference to figure 1 and Fig. 2, there are two the dimensions of dimension to adjust shaft, cathetus AB tables for mechanism to be measured tool in the present embodiment
Show beat shaft 1, straight line CD indicates pitching shaft 2, when measuring, by the installation to mechanism to be measured of speculum 3, works as beat
When shaft 1 and pitching shaft 2 rotate, you can speculum 3 is driven to rotate synchronously together.
Autocollimator, wherein position O are set up after in the installation to mechanism to be measured of speculum 3, then in the front of speculum 3
Point is the auto-collimation absolute reference point of autocollimator, adjusts auto-collimation posture and carries out its collimation to speculum, makes the fork being reflected back
Silk picture point is overlapped with position O.
Then it carrying out as follows, adjusts the beat rotary shaft 1 of mechanism to be measured, cross hair picture point moves to P points by O points,
Read on autocollimator P points X, the angle component in Y direction be respectively β0、θ0, the OP ⊥ AB known to movement relation,
It can be found out according to trigonometric function relationship：
The angle of beat rotary shaft 1 and X-axis：α0=arctan (tan β0/tanθ0).........③
Similarly, as shown in figure 3, after beat shaft 1 is resetted, adjust the pitching shaft 2 of mechanism to be measured, cross hair picture point by
Position O moves to Q points, read Q points X, the angle component β in Y direction1、θ1, the OQ ⊥ CD known to movement relation, according to
Trigonometric function relationship can be found out：
The angle α of pitching rotary shaft 2 and X-axis1=arctan (tan β1/tanθ1)...............④
By angular relationship in figure it is found that beat shaft 1 and autocollimator X-direction angle α0With pitching shaft 2 and autocollimatic
The difference of straight instrument X-direction angle is exactly the angle α of the beat and pitching rotary shaft of part to be measured1, therefore, according to 3. and 4. formula can be asked
Obtain the angle ψ of beat shaft 1 and pitching shaft：
ψ=s |α0-α1|=|arctan(tanβ0/tanθ0)-arctan(tanβ1/tanθ1)|
Similarly, according to above-mentioned method, you can the angle carried out between the shaft of any two dimension measures, and determines successively
Whether angle meets design requirement, inclined to God Light device part Final optical assembly times frequency module using above-mentioned measurement method
Pendulum, pitching two dimension pivoting angle are sampled measurement, and measurement result is as shown in Table 1：
Table one
As seen from the above table, the pivoting angle that multiple samples can be normally measured by above-mentioned measurement method, fully demonstrates
The operability of this measurement method, the angle between the beat and pitching shaft of extracted sample are satisfied by design requirement, measure
As a result it is accurate to 0.001 °, shows its high certainty of measurement, further demonstrates the accuracy of this measurement method measurement result, is being surveyed
During amount, it should be noted that after the angle for completing a shaft and X-direction measures, need to collimate again, by it
It resets, then carries out down the measurement of one-dimensional shaft and X-direction angle again.
Among the present invention, it is better than for measurement accuracy to improve measurement accuracy and its operability, used autocollimator
The photoelectric auto-collimator of 0.5 〃, and the pyramid using measurement accuracy better than 3 〃 carries out the positioning of absolute reference point, further increases
Measurement accuracy, and letter is operated, implementation cost is low, especially as the Automatic manual transmission process inspection of early period, so as to not
The mechanical rotating shaft of assembly in place carries out timely adjustment, improves the qualification rate of Related product.
In addition, the salient point of the application also resides in, autocollimator can only survey plane where its optical axis under normal conditions
The angle (i.e. beat, pitch angle) of (XZ, YZ), and using it, " picture point after the picture point collimated and adjustment connects in the application
Line must be mutually perpendicular to the one-dimensional shaft adjusted " this feature, and by trigonometric function relationship, surveyed using autocollimator
Autocollimator optical axis where plane (XZ, YZ) angle value, the pivoting angle of plane, method are simply easy where calculating XY
Row, it is at low cost.
Secondly, what this method measured is the final execution unit on rotating shaft mechanism, includes intermediate all mechanical transfer rings
Section, measure result can it is more accurate, true, reliably the mechanical movement performance for adjusting structure is surveyed in reaction.
Finally, it should be noted that foregoing description is only the preferred embodiment of the present invention, the ordinary skill people of this field
Member under the inspiration of the present invention, without prejudice to the purpose of the present invention and the claims, can make table as multiple types
Show, such transformation is each fallen within protection scope of the present invention.
Claims (4)
1. a kind of pivoting angle measurement method, which is characterized in that include the following steps：
S1：Speculum (3) is installed in mechanism to be measured, and the surface of speculum (3) is collimated using autocollimator；
S2：After the completion of collimation, the wherein one-dimensional shaft of mechanism to be measured is adjusted, and picture point is read in X, Y-axis side on auto-collimation CCD
To angle component, and find out the angle of the one-dimensional shaft and autocollimator X-direction that are adjusted；
S3：Speculum (3) is collimated again, makes the one-dimensional shaft adjusted in step S2 being restored to initial bit, adjustment is another
Outer one-dimensional shaft equally reads picture point at this time on auto-collimation CCD and finds out in addition one-dimensional turn in X, the angle component of Y direction
Axis and autocollimator X-direction angle；
S4：It calculates, angle calculated in step S2 and S3 is subtracted each other, the absolute value for obtaining numerical value is two shafts adjusted
Angle value.
2. pivoting angle measurement method according to claim 1, it is characterised in that：The autocollimator is photoelectric auto-collimation
Instrument.
3. pivoting angle measurement method according to claim 1, it is characterised in that：The autocollimator is carried out using pyramid
The measurement error of absolute reference point location, the pyramid is less than 3 〃.
4. pivoting angle measurement method according to claim 3, it is characterised in that：The measurement error of the autocollimator is small
In 0.5 〃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810813992.8A CN108709515B (en) | 2018-07-23 | 2018-07-23 | Method for measuring included angle of rotating shaft |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810813992.8A CN108709515B (en) | 2018-07-23 | 2018-07-23 | Method for measuring included angle of rotating shaft |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108709515A true CN108709515A (en) | 2018-10-26 |
| CN108709515B CN108709515B (en) | 2020-05-12 |
Family
ID=63875364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810813992.8A Active CN108709515B (en) | 2018-07-23 | 2018-07-23 | Method for measuring included angle of rotating shaft |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108709515B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
| CN113587845A (en) * | 2021-07-29 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture lens contour detection device and detection method |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111403A (en) * | 1980-12-29 | 1982-07-10 | Fujitsu Ltd | Measuring method of virtual intersection distance and inclined angle of hole |
| CN1862222A (en) * | 2005-05-10 | 2006-11-15 | 北京航空航天大学 | Laser self-collimation zero reference error angle measuring method |
| CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN102538713A (en) * | 2011-12-19 | 2012-07-04 | 北京卫星环境工程研究所 | System for measuring final-assembly high-precision angle of spacecraft |
| CN204027529U (en) * | 2014-07-07 | 2014-12-17 | 中国电子科技集团公司第五十三研究所 | Based on the biaxial stabilization turntable error of perpendicularity pick-up unit of autocollimator |
| CN104697472A (en) * | 2015-02-17 | 2015-06-10 | 中国科学院西安光学精密机械研究所 | Three-dimensional rotating angle measurement method and device adopted by same |
| CN105423957A (en) * | 2015-11-17 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Rotation shaft rotation angle measuring method restraining shafting dip angle rotation error |
| CN106017404A (en) * | 2016-06-22 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Detection device and method for included angle of visual axis of camera-shooting measurement camera and optical axis of assisted laser |
| CN106595638A (en) * | 2016-12-26 | 2017-04-26 | 哈尔滨工业大学 | Three-axis air floating platform attitude measuring device based on photoelectric tracking technology and measuring method |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal Double balance staff for laser machining is demarcated, debugged and speculum Method of Adjustment |
-
2018
- 2018-07-23 CN CN201810813992.8A patent/CN108709515B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111403A (en) * | 1980-12-29 | 1982-07-10 | Fujitsu Ltd | Measuring method of virtual intersection distance and inclined angle of hole |
| CN1862222A (en) * | 2005-05-10 | 2006-11-15 | 北京航空航天大学 | Laser self-collimation zero reference error angle measuring method |
| CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN102538713A (en) * | 2011-12-19 | 2012-07-04 | 北京卫星环境工程研究所 | System for measuring final-assembly high-precision angle of spacecraft |
| CN204027529U (en) * | 2014-07-07 | 2014-12-17 | 中国电子科技集团公司第五十三研究所 | Based on the biaxial stabilization turntable error of perpendicularity pick-up unit of autocollimator |
| CN104697472A (en) * | 2015-02-17 | 2015-06-10 | 中国科学院西安光学精密机械研究所 | Three-dimensional rotating angle measurement method and device adopted by same |
| CN105423957A (en) * | 2015-11-17 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Rotation shaft rotation angle measuring method restraining shafting dip angle rotation error |
| CN106017404A (en) * | 2016-06-22 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Detection device and method for included angle of visual axis of camera-shooting measurement camera and optical axis of assisted laser |
| CN106595638A (en) * | 2016-12-26 | 2017-04-26 | 哈尔滨工业大学 | Three-axis air floating platform attitude measuring device based on photoelectric tracking technology and measuring method |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal Double balance staff for laser machining is demarcated, debugged and speculum Method of Adjustment |
Non-Patent Citations (2)
| Title |
|---|
| 尚鸿雁: "《激光自准直测角系统安装误差分析》", 《应用激光》 * |
| 简卫平: "《转轴角位置定位精度的测量》", 《计量与测试技术》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
| CN108759723B (en) * | 2018-07-23 | 2020-01-31 | 中国工程物理研究院激光聚变研究中心 | Optical angle measuring method |
| CN113587845A (en) * | 2021-07-29 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture lens contour detection device and detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108709515B (en) | 2020-05-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106873122B (en) | A kind of device and method for large-diameter non-spherical reflecting mirror centering adjustment | |
| US7231081B2 (en) | Stereoscopic three-dimensional metrology system and method | |
| CN105414957B (en) | A kind of coaxial assembly method of shaft componentses and coaxiality detecting method | |
| KR102469816B1 (en) | 3D reconstruction system and 3D reconstruction method | |
| CN103557802B (en) | A kind of method of non-cpntact measurement space curved surface micro hole diameter and coordinate position | |
| CN111982019B (en) | High-precision blade section contour detection method based on line-structured light sensor | |
| CN107144248B (en) | A kind of scaling method of numerically-controlled machine tool turntable error | |
| CN101922923B (en) | Method for detecting perpendicularity and true position of normal axis | |
| CN102554710B (en) | Device and method for measuring rotation angle error of rotary table of machine tool | |
| CN208968469U (en) | Industrial robot repetitive positioning accuracy analysis system | |
| WO2013044677A1 (en) | Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking | |
| CN102519510B (en) | Calibration device and calibration method of position sensitive sensor | |
| CN101430196A (en) | High-precision vision angle-measurement apparatus based on lattice | |
| CN105180819A (en) | Laser displacement sensor-based shaft diameter measurement device and measurement method thereof | |
| CN105509702A (en) | Photoelectric inertia harmonization system three-dimensional space angle measuring instrument | |
| CN102798357A (en) | Device and method for double-barrelled angle measurement | |
| CN104515481B (en) | Measure the device and method of large diameter circle facial plane degree | |
| CN204177358U (en) | The accurate resetting equipment of a kind of imaging system detector chip | |
| CN108709515A (en) | Pivoting angle measurement method | |
| CN103712572A (en) | Structural light source-and-camera-combined object contour three-dimensional coordinate measuring device | |
| DE112015004528B4 (en) | Form measuring device and form measuring method | |
| TWI413755B (en) | Automated optical inspection system for the runout tolerance of circular saw blades | |
| CN109141868A (en) | The measuring device and measuring method of precision bearing system error motion | |
| JPS608701A (en) | Portable inspecting and measuring device inspecting tooth form and tooth race of gear and inspecting and measuring method | |
| CN110640546B (en) | Measured gear rotation axis measuring method for large gear measurement beside machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |