CN108698405B - 流体喷射装置 - Google Patents

流体喷射装置 Download PDF

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Publication number
CN108698405B
CN108698405B CN201680082235.7A CN201680082235A CN108698405B CN 108698405 B CN108698405 B CN 108698405B CN 201680082235 A CN201680082235 A CN 201680082235A CN 108698405 B CN108698405 B CN 108698405B
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China
Prior art keywords
membrane
fluid
nozzle
layer
channel
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CN201680082235.7A
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English (en)
Chinese (zh)
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CN108698405A (zh
Inventor
C.门泽尔
D.伊麦
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Fujifilm Dimatix Inc
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Fujifilm Dimatix Inc
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Priority to CN202110060536.2A priority Critical patent/CN112895718B/zh
Publication of CN108698405A publication Critical patent/CN108698405A/zh
Application granted granted Critical
Publication of CN108698405B publication Critical patent/CN108698405B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Nozzles (AREA)
CN201680082235.7A 2015-12-31 2016-12-30 流体喷射装置 Active CN108698405B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110060536.2A CN112895718B (zh) 2015-12-31 2016-12-30 流体喷射装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562273891P 2015-12-31 2015-12-31
US62/273,891 2015-12-31
PCT/US2016/069462 WO2017117518A1 (en) 2015-12-31 2016-12-30 Fluid ejection devices

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202110060536.2A Division CN112895718B (zh) 2015-12-31 2016-12-30 流体喷射装置

Publications (2)

Publication Number Publication Date
CN108698405A CN108698405A (zh) 2018-10-23
CN108698405B true CN108698405B (zh) 2021-02-02

Family

ID=59225466

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201680082235.7A Active CN108698405B (zh) 2015-12-31 2016-12-30 流体喷射装置
CN202110060536.2A Active CN112895718B (zh) 2015-12-31 2016-12-30 流体喷射装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202110060536.2A Active CN112895718B (zh) 2015-12-31 2016-12-30 流体喷射装置

Country Status (5)

Country Link
US (4) US10315421B2 (https=)
EP (1) EP3397493B1 (https=)
JP (3) JP6883042B2 (https=)
CN (2) CN108698405B (https=)
WO (1) WO2017117518A1 (https=)

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CN108698405B (zh) 2015-12-31 2021-02-02 富士胶卷迪马蒂克斯股份有限公司 流体喷射装置
EP3330329B1 (en) * 2016-12-02 2022-06-08 Ricoh Company, Ltd. Inkjet recording apparatus, printer, and method for manufacturing cured product
US10611144B2 (en) 2017-06-09 2020-04-07 Fujifilm Dimatix, Inc. Fluid ejection devices with reduced crosstalk
JP7031376B2 (ja) * 2018-03-04 2022-03-08 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
JP7106917B2 (ja) * 2018-03-23 2022-07-27 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
WO2019244227A1 (ja) * 2018-06-19 2019-12-26 コニカミノルタ株式会社 インクジェットヘッド及びインクジェット記録装置
US20210245151A1 (en) * 2018-08-10 2021-08-12 Hewlett-Packard Development Company, L.P. Dual direction dispensers
JP2020100136A (ja) * 2018-12-21 2020-07-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び液体噴射システム
US11007789B2 (en) 2018-12-21 2021-05-18 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US11104128B2 (en) * 2018-12-21 2021-08-31 Seiko Epson Corporation Liquid ejecting head and liquid ejecting system
JP7287042B2 (ja) * 2018-12-21 2023-06-06 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射システム
JP7293670B2 (ja) * 2019-01-29 2023-06-20 ブラザー工業株式会社 液体吐出ヘッド
IT201900005808A1 (it) * 2019-04-15 2020-10-15 St Microelectronics Srl Dispositivo mems a micropompa per la movimentazione o eiezione di un fluido, in particolare microsoffiante o flussimetro
IT201900007196A1 (it) * 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
JP7302385B2 (ja) * 2019-08-29 2023-07-04 セイコーエプソン株式会社 液体吐出ヘッドユニットおよび液体吐出装置
KR102778272B1 (ko) * 2019-12-16 2025-03-12 현대자동차주식회사 이젝터 노즐과 이를 포함한 이젝터
JP7413864B2 (ja) 2020-03-19 2024-01-16 セイコーエプソン株式会社 液体噴射ヘッドの製造方法、及び、流路部品の製造方法
US12042991B2 (en) * 2021-02-25 2024-07-23 Xerox Corporation Energy dissipative nozzles for drop-on-demand printing and methods thereof

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CN108698405B (zh) 2015-12-31 2021-02-02 富士胶卷迪马蒂克斯股份有限公司 流体喷射装置

Also Published As

Publication number Publication date
JP6883042B2 (ja) 2021-06-02
US11001059B2 (en) 2021-05-11
CN112895718A (zh) 2021-06-04
JP2023093768A (ja) 2023-07-04
WO2017117518A1 (en) 2017-07-06
US11904610B2 (en) 2024-02-20
EP3397493A1 (en) 2018-11-07
US12447743B2 (en) 2025-10-21
US20240157699A1 (en) 2024-05-16
US20210245508A1 (en) 2021-08-12
EP3397493B1 (en) 2025-04-30
JP7723465B2 (ja) 2025-08-14
CN108698405A (zh) 2018-10-23
CN112895718B (zh) 2022-09-13
JP2019505411A (ja) 2019-02-28
US10315421B2 (en) 2019-06-11
US20190248138A1 (en) 2019-08-15
JP7277508B2 (ja) 2023-05-19
EP3397493A4 (en) 2019-08-14
JP2021175609A (ja) 2021-11-04
US20170190179A1 (en) 2017-07-06

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