CN108692855B - Multi-chamber pressure sensing equipment - Google Patents

Multi-chamber pressure sensing equipment Download PDF

Info

Publication number
CN108692855B
CN108692855B CN201810293527.6A CN201810293527A CN108692855B CN 108692855 B CN108692855 B CN 108692855B CN 201810293527 A CN201810293527 A CN 201810293527A CN 108692855 B CN108692855 B CN 108692855B
Authority
CN
China
Prior art keywords
base
housing
base cover
sensor
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810293527.6A
Other languages
Chinese (zh)
Other versions
CN108692855A (en
Inventor
T·S·汉纳
N·帕帕迪斯
C·J·丰塔纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensata Technologies Inc
Original Assignee
Sensata Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensata Technologies Inc filed Critical Sensata Technologies Inc
Publication of CN108692855A publication Critical patent/CN108692855A/en
Application granted granted Critical
Publication of CN108692855B publication Critical patent/CN108692855B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24Housings ; Casings for instruments
    • G01D11/245Housings for sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0038Fluidic connecting means being part of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings
    • G01L19/143Two part housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature

Abstract

The present invention provides a pressure sensing device having a plurality of isolated pressure sensors. The apparatus includes a base cover portion having a plurality of segments, and each segment defines an opening. A sensor is positioned in each base cover portion and a portion of each sensor is exposed to a respective opening. The flange base is coupled to the base cover portion to define a plurality of separate chambers, and a housing is disposed about the base cover portion and the base and has a plurality of conduits fluidly connected with respective cover openings.

Description

Multi-chamber pressure sensing equipment
Technical Field
The invention relates to a multi-chamber pressure sensing device.
Background
In recent years, the amount of sensors and controllers used in automotive applications has increased dramatically. This has created a need for multiple transducers or sensors that need to be contained within a small stenosis. In one example, the close proximity of pressure outlets in automotive applications has presented a challenge to transducer suppliers to provide a solution to such configurations.
What is needed is a pressure sensor that can meet the construction requirements of the industry while providing the desired level of performance.
Disclosure of Invention
In one aspect of the present disclosure, a sensing device includes: a base cover defining a plurality of segments, each segment having a respective base cover opening; and a plurality of sensors, each sensor positioned in a respective base cover section, wherein a portion of each sensor is exposed in a respective base cover opening (evidence). The base is coupled to the base cover and configured to define a plurality of chambers, each chamber corresponding to a respective base cover portion; and providing a housing having a bottom surface with a plurality of inlets defined therein. The base and base cover are positioned in the housing such that the base extends through an opening defined in the housing, and each inlet is fluidly connected with a respective base cover opening, and an edge of the housing is configured to be coupled to a portion of the base.
In another aspect of the present disclosure, a pressure sensing apparatus includes: an oblong (oblong) base cover portion comprising first and second base cover sections, wherein each of the first and second base cover sections has an opening defined therein; and first and second sensors are positioned in the first and second base cover sections, respectively, with a portion of each sensor exposed in a respective opening. An oblong base including a flange portion is coupled to the base cover portion to define first and second separation chambers corresponding to the first and second base cover sections, respectively; and an oblong housing disposed about the base cover portion and the base, the housing having first and second inlets fluidly connected with respective first and second base openings, and the housing defining an oblong opening through which the base extends, wherein an edge of the oblong opening of the housing is crimped to couple to the flange portion of the base.
Drawings
Various aspects of at least one embodiment of the disclosure are discussed below with reference to the figures. It will be appreciated that for simplicity and clarity of illustration, elements illustrated in the figures have not necessarily been drawn accurately or to scale. For example, the dimensions of some of the elements may be exaggerated relative to other elements for clarity or several physical components may be included in one functional block or element. Further, where considered appropriate, reference numerals may be repeated among the figures to indicate corresponding or analogous elements. For purposes of clarity, not every component may be labeled in every drawing. The drawings are provided for purposes of illustration and explanation and are not to be construed as limiting the invention. In the figure:
FIG. 1 is a perspective view of a pressure sensing device according to one aspect of the present disclosure;
FIG. 2 is a bottom view of the pressure sensing device of FIG. 1;
FIGS. 3A and 3B are views of a housing portion of the pressure sensing device of FIG. 1;
FIG. 4 is a perspective view of a base cover portion of the pressure sensing device of FIG. 1;
5A-5C are perspective views of a pressure sensor assembly disposed in the pressure sensing device of FIG. 1;
FIGS. 6 and 7 are perspective views of the pressure sensing assembly of FIGS. 5A-5C placed in the base cover portion of FIG. 4;
FIG. 8 is a perspective view of the placement of the base and base cover portions into the housing portion of FIGS. 3A and 3B;
FIG. 9 is a close-up view of the curled geometry of the housing around the base;
FIG. 10 is a partially transparent view of the pressure sensing device of FIG. 1;
FIG. 11 is a cross-sectional view of the pressure sensing device of FIG. 1; and
figures 12A and 12B are perspective views of an alternative embodiment of a pressure sensing device.
Detailed Description
In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of embodiments of the disclosure. It will be understood by those of ordinary skill in the art that the embodiments may be practiced without some of these specific details. In other instances, well-known methods, procedures, components, and structures may not have been described in detail so as not to obscure the described embodiments.
Before explaining at least one embodiment in detail, it is to be understood that they are not limited in their application to the details of construction and the arrangement of the components set forth in the following description or illustrated in the drawings. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting.
As shown in fig. 1, the pressure sensing device 100 includes an oblong housing 102 and an associated base 104. In one embodiment, base 104 includes a plug portion 105 for coupling to a cable interface in an automotive application, such as device 100. In one embodiment, the housing 102 may include one or more mounting apertures 106. In one embodiment, the housing 102 is made of aluminum and the base 104 is made of plastic.
Referring to fig. 2, the housing 102 includes a bottom surface 202 having two inlets 204 defined to fluidly couple with an interior space 302 (see fig. 3A) of the housing 102. An external seal 206, such as a rubber O-ring, is provided on the bottom surface 202 around each inlet 204.
The housing 102 defines an interior space 302 bounded by a wall portion 304 having an upper section defined as a vertical lip 306. As shown in FIG. 3B, the spacing of the inlets 206 is determined by the geometry of the location where the sensing device 100 is to be placed.
As shown in fig. 4, an oblong base cover portion 402 is provided and configured for coupling to the base 104 and placement within the space 302. The base cover portion 402 defines two sections 404-1, 404-2, each having a respective opening 406-1, 406-2. The base cover portion 402 includes two fingers 407-1, 407-2 for coupling the base cover portion 402 to respective openings in the base 104. Base cover portion 402 is configured such that when base cover portion 402 is disposed within housing 102, inlets 204 are visible in respective openings 406.
As shown in FIGS. 5A-5C, two pressure sensing assemblies 502-1, 502-2 are provided. Each pressure sensing assembly 502 includes a sensing element 504 (e.g., a parallel plate capacitor), a flexible circuit 506, support circuitry and components 508 mounted on the flexible circuit 506, and an inner seal 510. Each flexible circuit 506 includes two ground clips or tails 512 coupled to the housing 102 to provide a ground connection for those applications requiring such a feature. The Pressure sensing assembly may be similar to the Pressure sensing assembly described in U.S. patent 6,487,911 entitled "Pressure Sensor Apparatus," the entire contents of which are incorporated herein by reference for all purposes.
Each opening 406 in base cover portion 402 is configured to receive a respective sensing assembly 502, as shown in fig. 6 and 7, and hold sensing assembly 502 in place. The base cap portion 402 is also configured such that the inner seal 510 extends from the bottom of the base cap portion 402 sufficiently to couple with the bottom of the chamber 302 of the housing 102.
As shown in fig. 8, the base 104 includes a flange 902 and a lower structural portion 904 configured to couple with the base cover portion 402. The base 104 is placed over the base cover portion 402, i.e., snap-fit onto the base cover portion 402, by manipulating the fingers 407-1, 407-2 and corresponding openings in the lower structural portion 904. The combined base cover portion 402 and base 104 are then positioned in the housing 102. Each sensing component 502 is sealed and isolated from the other sensing component. As a result, each sensing assembly 502 is fluidly coupled to a respective inlet 204 and isolated from the other inlet 204.
As shown in fig. 9, the base 104 is set in place and the isolated integrity of the sensing assembly 502 is maintained by crimping the upper lip 306 over the flange 904 for the entire perimeter of the oval opening. Once crimped, each sensing assembly 502 is fluidly coupled to a respective inlet 204, as shown in fig. 10. Advantageously, the base cover portion 402 and the base 104, when held in place by the crimped housing 102, allow the respective sensing assembly 502 to measure the pressure of the fluid passing through the respective inlet 204. Further, the ground clip 512 is coupled to the housing 102 during the crimping operation.
In one embodiment, the housing 102 is made of extruded aluminum. In order to provide the strongest curl, the grains of the extruded aluminum should be aligned in the G direction as shown in fig. 8.
Each sensing assembly 502 needs to receive power and have a mechanism to output a corresponding pressure measurement. In one embodiment, referring to fig. 11, the base 104 (not shown) includes a plurality of leads 1202 that are coupled to the flexible circuit 506 to provide common power and ground to the sensing assembly 502 and to communicate the measurement signals to a central system, such as an automobile control system.
Alternatively, a cap 1302 including, for example, a battery and a wireless communication means (not shown) as shown in fig. 12A and 12B may be provided. The cap 1302 would be configured to couple (not shown) with the fingers 407-1, 407-2 of the base cover portion 402, similar to what has been described above.
Advantageously, the pressure sensing device of the present disclosure may be implemented to provide differential, redundant, or independent fluid pressure measurements, depending on the functionality provided in the support circuitry. Further, while an exemplary embodiment of two sensors is presented, one of ordinary skill in the art will appreciate that more than two sensors may be provided in the device without undue experimentation.
It is appreciated that certain features of the invention, which are, for clarity, described in the context of separate embodiments, may also be provided in combination in a single embodiment. Conversely, various features of the invention which are, for brevity, described in the context of a single embodiment, may also be provided separately or in any suitable subcombination.
Whereas many alterations and modifications of the present disclosure will no doubt become apparent to a person of ordinary skill in the art after having read the foregoing description, it is to be understood that the particular embodiments shown and described by way of illustration are in no way intended to be considered limiting. Furthermore, the subject matter has been described with reference to specific embodiments, but variations within the spirit and scope of the disclosure will occur to those skilled in the art. It should be noted that the foregoing embodiments have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present disclosure.
Although the present disclosure has been described herein with reference to particular embodiments, the disclosure is not intended to be limited to the details disclosed herein; rather, the present disclosure extends to all functionally equivalent structures, methods and uses, such as are within the scope of the appended claims.

Claims (12)

1. A sensing apparatus, comprising:
a base cover defining a plurality of sections, each section having a respective base cover opening;
a plurality of sensors, each sensor positioned in a respective base cover section, wherein a portion of each sensor is positioned in a respective base cover opening;
a base including a flange portion, the base coupled to the base cover and configured to define a plurality of chambers, each chamber corresponding to a respective base cover opening; and
a housing having a wall portion and a bottom surface, the bottom surface having a plurality of inlets defined therein, the wall portion having an upper section,
wherein the base and base cover are positioned in the housing such that the base extends through an opening defined by a wall portion of the housing,
wherein each inlet is in fluid connection with a respective base cap opening,
wherein the housing comprises a material having grains with a first grain direction, wherein the first grain direction is transverse to the bottom surface;
wherein the upper section of the housing is crimped to couple to the flange portion of the base; and is
Wherein after the upper section of the housing is crimped, the crimped upper section has a second grain direction that is angled relative to the first grain direction in the uncrimped portion of the housing.
2. The sensing device of claim 1, wherein each of the housing, the base, and the base cap comprises an obround shape.
3. The sensing device of claim 1, wherein each sensor comprises a pressure sensor.
4. The sensing device of claim 1, wherein each sensor comprises processing circuitry.
5. The sensing apparatus of claim 1, wherein the housing comprises aluminum.
6. The sensing device of claim 1, wherein each sensor comprises a capacitive sensing element assembly.
7. A pressure sensing apparatus, comprising:
an oblong base cover portion comprising first and second base cover sections, each of the first and second base cover sections having an opening defined therein;
first and second sensors located in the first and second base cover sections, respectively, a portion of each sensor positioned in a respective opening;
an oblong base including a flange portion, the base coupled to the base cover portion to define first and second separation chambers corresponding to first and second base cover openings, respectively; and
an oblong housing disposed about the base cover portion and base, the housing having first and second inlets defined in a bottom surface in fluid connection with respective first and second base openings, the housing defining an oblong opening through which the base extends, the housing having a wall portion comprising an upper section;
wherein the wall portion comprises a material having grains with a first grain direction, wherein the first grain direction is transverse to the bottom surface,
wherein the upper section of the housing is crimped to couple to the flange portion of the base; and is
Wherein after the upper section of the housing is crimped, the crimped upper section has a second grain direction that is angled relative to the first grain direction in the uncrimped portion of the housing.
8. The pressure sensing device according to claim 7, wherein each sensor comprises a pressure sensor.
9. The pressure sensing apparatus of claim 7, further comprising:
first and second processing circuits coupled to the first and second sensors, respectively.
10. The pressure sensing device of claim 7, wherein each of the first and second base cover sections of the base cover portion are configured to receive and hold a respective sensor in place.
11. The pressure sensing device of claim 7, wherein the housing comprises aluminum.
12. The pressure sensing apparatus of claim 7, wherein each sensor comprises a capacitive sensing element assembly.
CN201810293527.6A 2017-04-04 2018-04-04 Multi-chamber pressure sensing equipment Active CN108692855B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/478,750 US10295427B2 (en) 2017-04-04 2017-04-04 Multi-chamber pressure sensing apparatus
US15/478,750 2017-04-04

Publications (2)

Publication Number Publication Date
CN108692855A CN108692855A (en) 2018-10-23
CN108692855B true CN108692855B (en) 2022-04-26

Family

ID=62017856

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810293527.6A Active CN108692855B (en) 2017-04-04 2018-04-04 Multi-chamber pressure sensing equipment

Country Status (6)

Country Link
US (1) US10295427B2 (en)
JP (1) JP7032972B2 (en)
KR (1) KR102466069B1 (en)
CN (1) CN108692855B (en)
DE (1) DE102018106813A1 (en)
GB (1) GB2562831B (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101078658A (en) * 2006-05-24 2007-11-28 株式会社电装 Pressure sensor
CN101981425A (en) * 2008-04-03 2011-02-23 罗斯蒙德公司 Industrial pressure sensor having enhanced dielectric fill fluid
CN102124313A (en) * 2008-06-19 2011-07-13 埃尔特克有限公司 Pressure sensor device
CN102401715A (en) * 2010-08-23 2012-04-04 霍尼韦尔国际公司 Pressure sensor
CN102980711A (en) * 2011-09-06 2013-03-20 霍尼韦尔国际公司 Packaged sensor with multiple sensors elements
CN103091031A (en) * 2011-10-31 2013-05-08 罗斯蒙德公司 Coplanar process fluid pressure sensor module
CN103759884A (en) * 2014-01-29 2014-04-30 中国商用飞机有限责任公司 Device and method for measuring static pressure of high-speed fluid in high-pressure pipeline

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564642B1 (en) 2000-11-02 2003-05-20 Kavlico Corporation Stable differential pressure measuring system
US6487911B1 (en) 2000-11-21 2002-12-03 Texas Instruments Incorporated Pressure sensor apparatus
DE10061153A1 (en) * 2000-12-08 2002-06-27 Lucas Varity Gmbh Sensor arrangement for a vacuum brake booster and a vacuum brake booster equipped with it
DE202006003446U1 (en) * 2006-03-02 2006-05-18 Eto Sensoric Kg Pressure sensor device
US8037770B2 (en) * 2008-05-21 2011-10-18 Honeywell International Inc. Pressure-sensor apparatus
US9146170B2 (en) * 2012-07-31 2015-09-29 Freescale Semiconductor, Inc. Capacitive pressure sensor in an overmolded package
FR3030725B1 (en) * 2014-12-22 2017-01-27 Valeo Systemes De Controle Moteur SENSOR FOR PRESSURE MEASUREMENT
EP3128305B1 (en) * 2015-08-07 2019-07-31 Sensata Technologies, Inc. A hermetic pressure sensor
US9638559B1 (en) 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101078658A (en) * 2006-05-24 2007-11-28 株式会社电装 Pressure sensor
CN101981425A (en) * 2008-04-03 2011-02-23 罗斯蒙德公司 Industrial pressure sensor having enhanced dielectric fill fluid
CN102124313A (en) * 2008-06-19 2011-07-13 埃尔特克有限公司 Pressure sensor device
CN102401715A (en) * 2010-08-23 2012-04-04 霍尼韦尔国际公司 Pressure sensor
CN102980711A (en) * 2011-09-06 2013-03-20 霍尼韦尔国际公司 Packaged sensor with multiple sensors elements
CN103091031A (en) * 2011-10-31 2013-05-08 罗斯蒙德公司 Coplanar process fluid pressure sensor module
CN103759884A (en) * 2014-01-29 2014-04-30 中国商用飞机有限责任公司 Device and method for measuring static pressure of high-speed fluid in high-pressure pipeline

Also Published As

Publication number Publication date
DE102018106813A1 (en) 2018-10-04
GB2562831A (en) 2018-11-28
KR102466069B1 (en) 2022-11-10
GB201804222D0 (en) 2018-05-02
JP7032972B2 (en) 2022-03-09
CN108692855A (en) 2018-10-23
KR20180112712A (en) 2018-10-12
GB2562831B (en) 2020-01-22
US10295427B2 (en) 2019-05-21
JP2018179979A (en) 2018-11-15
US20180283974A1 (en) 2018-10-04

Similar Documents

Publication Publication Date Title
US4942383A (en) Low cost wet-to-wet pressure sensor package
RU2567179C2 (en) Sealed element for pressure measurement
EP2390641A3 (en) Pressure Sensor
JP2006208383A (en) Device for sensing hermetic pressure
US20150114129A1 (en) Diaphragm piezoresistive pressure sensor
US7426868B2 (en) Sensor module
US20170343395A1 (en) Sensor device, in particular for use in a motor vehicle
US8893567B2 (en) Fluid conduit element
US8196474B2 (en) Pressure sensor
CN111351608A (en) Micromechanical component for a capacitive pressure sensor device
CN101184977A (en) Transducer
CN108692855B (en) Multi-chamber pressure sensing equipment
KR20180122954A (en) Integrated pressure and temperature sensor
US20170268938A1 (en) Force sensor device
US20160209286A1 (en) Pressure sensor module and method for manufacturing the same
CN203811316U (en) Pressure sensor
US20230058515A1 (en) Differential pressure sensor and method of using the same
US10184812B2 (en) Sensor assembly
CN106461485B (en) For sensing the pressure sensor of the fluid medium pressure in measuring chamber
EP1394521A1 (en) Small capacitive pressure sensor with insert molding, moving electrode and diaphragm
US9778129B2 (en) Universal hermetically sealed button pressure sensor
US11841283B2 (en) Pressure sensor with improved diaphragm seal
US11125639B2 (en) Pressure sensor for measuring a pressure of a fluid and method for producing a pressure sensor for measuring a pressure of a fluid
JP4952271B2 (en) Pressure sensor
KR20230060961A (en) Pressure sensor equipped with airbags

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant