CN108682696A - Compound antireflective coating enhancing solar cell of a kind of plasmon and preparation method thereof - Google Patents

Compound antireflective coating enhancing solar cell of a kind of plasmon and preparation method thereof Download PDF

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CN108682696A
CN108682696A CN201810360846.4A CN201810360846A CN108682696A CN 108682696 A CN108682696 A CN 108682696A CN 201810360846 A CN201810360846 A CN 201810360846A CN 108682696 A CN108682696 A CN 108682696A
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solar cell
antireflective coating
plasmon
metal nanoparticle
compound
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李国强
张曙光
温雷
徐珍珠
黎翊君
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South China University of Technology SCUT
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Priority to PCT/CN2018/110980 priority patent/WO2019200861A1/en
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    • H01L31/02Details
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    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/07Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the Schottky type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

The invention belongs to the technical field of solar cell, a kind of compound antireflective coating enhancing solar cell of plasmon and preparation method thereof is disclosed.The compound antireflective coating of plasmon enhances solar cell, includes solar cell, metal nanoparticle layer and antireflection film layer successively from the bottom to top;Metal nanoparticle is Nano silver grain, gold nanoparticle or platinum nanoparticles in the metal nanoparticle layer;The antireflection film layer is titanium dioxide;The solar cell is schottky junction solar cell.The present invention realizes the high photoelectric conversion efficiency of battery by solar battery surface spin coating metal nanoparticle, enhancing the light absorption of the scattering effect and solar cell to sunlight;By spin coating titanium dioxide antireflective coating, it is effectively reduced the reflection of light, enhances absorption of the solar cell for light, improves the size of solar cell photoelectric current, finally improves the photoelectric conversion efficiency of solar cell.

Description

Compound antireflective coating enhancing solar cell of a kind of plasmon and preparation method thereof
Technical field
The invention belongs to solar cell field, more particularly to a kind of compound antireflective coating of plasmon enhances solar cell And preparation method thereof.
Background technology
Solar cell is that we mainly utilize solar energy as a kind of direct device for carrying out energy conversion using sunlight Mode.How to be emphasis of people's attention to its further photoelectric conversion efficiency that promoted.The table of most solar cell The reflectivity in face is higher, and weaker for the ability of the capture and absorption of light, the energy source that this allows for solar cell is big Big dissipation.Traditionally we enhance absorption of the solar cell for light using antireflective coating as optical gain structure. However it is limited to optical principle, single antireflection film can only have maximum anti-reflective effect for the light of single wavelength, for it The light of his wavelength is then without maximum anti-reflective effect.Although double-layer reflection reducing coating can have anti-reflection effect for the light of multiple wavelength Fruit, however solar spectral is continuous, and the problems such as double-layer reflection reducing coating itself there is the interface loss between film and film.Cause The anti-reflective effect how this research is obtained on broader solar spectral preferably for sunlight is very necessary.
Invention content
In order to overcome the disadvantages mentioned above and deficiency of the prior art, it is multiple that the purpose of the present invention is to provide a kind of plasmons Antireflective coating is closed, the photoelectric conversion efficiency of solar cell can be improved.
Another object of the present invention is to provide the preparation methods of the compound antireflective coating of above-mentioned phasmon.
The purpose of the present invention is achieved through the following technical solutions:
A kind of compound antireflective coating enhancing solar cell of plasmon, includes solar cell, metal successively from the bottom to top Nanoparticle layers and antireflection film layer.
Metal nanoparticle is Nano silver grain, gold nanoparticle or platinum nanoparticle in the metal nanoparticle layer Son, preferably Nano silver grain;
The antireflection film layer is preferably titanium dioxide.
Metal nanoparticle layer is completely covered in the antireflection film layer.
The solar cell is schottky junction solar cell, preferably graphene schottky junction solar cell, the Xiao Te Base junction solar cell includes hearth electrode, GaAs substrates, graphene layer and top electrode successively from top to bottom.
The metal nanoparticle layer is arranged in the surface of solar cell, especially electrode and the stone not being partially covered by the electrodes On black alkene layer.
The thickness of the antireflective coating is 30~300nm.The thickness of antireflection film layer is preferably greater than metal nanoparticle layer Thickness.
The preparation method of the compound antireflective coating solar cell of plasmon, includes the following steps:
(1) sol solution of metal nanoparticle is configured;
(2) sol solution of antireflective coating layer material is configured;
(3) sol solution of the sol solution of metal nanoparticle and antireflective coating layer material is spin-coated on to sun electricity successively The surface in pond obtains the compound antireflective coating solar cell of plasmon.
The sol solution of metal nanoparticle is preferably nano silver colloidal sol, and nano silver colloidal sol is prepared into using conventional method It arrives.The specific preparation method of nano silver colloidal sol is:Using water as solvent, sodium citrate is buffer, using reducing agent also orthonitric acid Silver obtains colloidal sol stoste;Colloidal sol stoste is centrifuged, supernatant liquor is removed, lower layer adds water-dispersed, centrifuges again, disperses, so It repeats, after last time centrifuges, nano silver is mixed with organic solvent, obtain nano silver colloidal sol solution.The reducing agent is anti- Bad hematic acid;The reducing agent is added in the form of being added dropwise, and when being restored, the pH of solution is 6.
The sol solution of the antireflective coating layer material is preferably TiO 2 sol;The TiO 2 sol is using normal The preparation method of rule obtains.
For the sol solution of metal nanoparticle when carrying out spin coating, the rotating speed of spin coating is 2500~4500r/min, spin coating Time is 20~100 seconds;For the sol solution of antireflective coating layer material when carrying out spin coating, the rotating speed of spin coating is 2500~4500r/ The time of min, spin coating are 50~100 seconds.
Compared with prior art, the present invention has the following advantages and beneficial effect:
(1) present invention by solar battery surface spin coating metal nanoparticle (such as:Ag nano particles), utilize alloy The scattering section of grain enhances the scattering effect to sunlight, while utilizing Localized field enhancement solar cell strong around nano particle Light absorption, the final photoelectric conversion efficiency for realizing that battery is high;
(2) present invention is effectively reduced the reflection of light, enhances solar-electricity by spin coating titanium dioxide antireflective coating Absorption of the pond for light, improves the size of solar cell photoelectric current, finally improves the photoelectric conversion efficiency of solar cell;
(3) preparation method of the invention is simple and effective, and cell photoelectric transfer efficiency enhancing effect is apparent.
Description of the drawings
Fig. 1, which is the compound antireflective coating of plasmon of the embodiment of the present invention, enhances the structural schematic diagram of solar cell;
Fig. 2, which is the compound antireflective coating of plasmon of the embodiment of the present invention 1, enhances nano-Ag particles in solar cell Scanning electron microscope diagram;
Fig. 3, which is the compound antireflective coating of plasmon of the embodiment of the present invention 1, enhances the light microscope of solar cell Figure;
Fig. 4 is solar cell (no antireflection film layer and metal nanoparticle layer) (i.e. intrinsic electricity of the embodiment of the present invention 1 Pond) and plasmon compound antireflective coating enhancing solar cell (i.e. compound antireflective coating battery) current-voltage relation Curve graph.
Specific implementation mode
With reference to embodiment and attached drawing, the present invention is described in further detail, but embodiments of the present invention are not It is limited to this.
The structural schematic diagram of the compound antireflective coating enhancing solar cell of plasmon of the present invention is as shown in Figure 1, under Supreme includes solar cell, metal nanoparticle layer 5 and antireflection film layer 6 successively.
Metal nanoparticle is Nano silver grain, gold nanoparticle or platinum nanoparticle in the metal nanoparticle layer Son, preferably Nano silver grain;
The antireflection film layer is preferably titanium dioxide.
Metal nanoparticle layer is completely covered in the antireflection film layer.
The solar cell is schottky junction solar cell, preferably graphene schottky junction solar cell, the Xiao Te Base junction solar cell includes hearth electrode 1, GaAs substrates 2, graphene layer 3 and top electrode 4 successively from top to bottom.
The metal nanoparticle layer is arranged in the surface of solar cell, especially electrode and the stone not being partially covered by the electrodes On black alkene layer.
Embodiment 1
As shown in Figure 1, the compound antireflective coating of the plasmon of the present embodiment enhances solar cell, wrap successively from the bottom to top Include hearth electrode 1 (Au), GaAs substrates 2, graphene film 3, top electrode 4, metal nanoparticle layer 5, titanium dioxide antireflective film 6.
Hearth electrode 1 (Au), GaAs substrates 2, graphene film 3 and top electrode 4 form graphene schottky junction sun electricity Pond.Graphene schottky junction solar cell is obtained using conventional method.
The preparation method of the compound antireflective coating of plasmon of the present embodiment, includes the following steps:
(1) preparation of nano silver colloidal sol:The silver nitrate solution for first taking a concentration of 0.01mol/L of 100ml, is then added The 1wt% sodium citrate solutions of 2ml are as buffer, under stirring conditions (rotating speed 900r/min), are added dropwise 1ml's dropwise The ascorbic acid solution of a concentration of 1.4mg/ml is used in combination sodium hydroxide solution to adjust pH to 6, after maintaining 1 hour of stirring, stops Stirring, obtains nano silver colloidal sol stoste;Taking 10ml colloidal sol stostes to be centrifuged, (rotating speed 7200r/min, centrifugation time are 10 points Clock), supernatant liquor is removed, leaving again will be in each centrifuge tube with deionized water after bottom precipitation and turbid (being about 1 milliliter) Liquid level be supplemented to 10 milliliters, ultrasonic disperse 15 minutes is then centrifuged for, dispersion, after being so repeated 3 times, with 8000r/min turn Speed centrifugation 10 minutes is added acetone supplement liquid level to 5 milliliters after removing supernatant liquor, obtains nano silver colloidal sol;
(2) preparation of TiO 2 sol:The ethyl acetate of the absolute ethyl alcohol of 23ml and 0.5ml are mixed, are then added The butyl titanate of 10ml forms the precursor solution of titania gel;By the absolute ethyl alcohol of 12ml, the deionization of 1.5ml The 65wt% salpeter solutions of water and 1.5ml mix, and obtain hydrolysis mixed solution;(rotating speed 900r/ under stirring conditions Min), drip to the speed of 1.5 drops with per second 1 and hydrolysis mixed solution be added dropwise dropwise in the precursor solution of stirring, After hydrolysis mixed solution is added dropwise in precursor solution completely, stirring is maintained 2 hours, aluminium-foil paper is used after the completion of stirring Sealed beaker mouth is covered, and stands 24 hours of aging at room temperature, to obtain TiO 2 sol;
(3) spin coating of compound antireflective coating:Coating machine rotating speed is set as 3000r/min, preliminary operation 5 seconds shows if there is film flying As then adjusting the position of solar cell until film flying does not occur, Schilling spin coater works (2500r/min) under lower-speed state, and The nano silver colloidal sol of 100 μ l is drawn with liquid-transfering gun and toward dripping on solar cell, later into high speed spin coating, rotating speed is afterwards 3000r/min is often 60 seconds, then draws the TiO 2 sol of 100 μ l with liquid-transfering gun again, and Schilling coating machine is in low speed Under state, then drip on two drop TiO 2 sols to solar cell, high speed rotation can obtain nano silver particles after one minute Composite titanium dioxide antireflective coating enhances solar cell to get to the compound antireflective coating of plasmon.
The thickness of titanium dioxide antireflection layer is 120nm.
Fig. 2, which is the compound antireflective coating of plasmon of the present embodiment, enhances the scanning electricity of silver nano-grain in solar cell Sub- microscope photo, as can be seen from the figure the distribution of silver nano-grain is fewer, and grain size is about 80 rans.Fig. 3 is real Apply the optical microscope of the compound antireflective coating enhancing solar cell of plasmon of example 1;Fig. 4 is the sun electricity of embodiment 1 The electric current-of pond (no antireflection film layer and metal nanoparticle layer) and the compound antireflective coating enhancing solar cell of plasmon Voltage curve figure.The pattern on the surface of nano silver particles composite titanium dioxide antireflective coating as can be seen from Figure 3.Fig. 4 is Solar cell current-voltage relation curve, it can be seen that the photoelectric current of solar cell improves about 27.33%
The present invention introduces silver nano-grain and titanium dioxide antireflective coating in solar cell, due to the local of nano particle On the one hand surface plasma bulk effect can enhance the scattering process to incident sunlight, improve sunlight inside active area Propagation distance to improve light absorption.Meanwhile after the local surface phasmon of silver nano-grain is excited, around particle Strong local electric field can be formed, according to Fermi's Golden-rule, this strong local electric field can improve the suction of battery incident photon Receive rate.Simultaneously additionally by antireflective coating is introduced, less capable of being reflected of light is allowed, increase incident solar cell The quantity of light, to increase the luminous point efficiency of battery.
Embodiment 2
The compound antireflective coating of plasmon of the present embodiment enhances solar cell, includes hearth electrode successively from the bottom to top (Au), GaAs substrates, graphene film, top electrode, metal nanoparticle layer, titanium dioxide antireflective film.
Hearth electrode (Au), GaAs substrates, graphene film and top electrode form graphene schottky junction solar cell.Stone Black alkene schottky junction solar cell is obtained using conventional method.
The preparation method of the compound antireflective coating of plasmon of the present embodiment, includes the following steps:
(1) preparation of nano silver colloidal sol:The silver nitrate solution for first taking a concentration of 0.01mol/L of 100ml, is then added The 1wt% sodium citrate solutions of 2ml are as buffer, under stirring conditions (rotating speed 900r/min), are added dropwise 1ml's dropwise The ascorbic acid solution of a concentration of 1.4mg/ml is used in combination sodium hydroxide solution to adjust pH to 6, after maintaining 1 hour of stirring, stops Stirring, obtains nano silver colloidal sol stoste;Taking 10ml colloidal sol stostes to be centrifuged, (rotating speed 7200r/min, centrifugation time are 10 points Clock), supernatant liquor is removed, leaving again will be in each centrifuge tube with deionized water after bottom precipitation and turbid (being about 1 milliliter) Liquid level be supplemented to 10 milliliters, ultrasonic disperse 15 minutes is then centrifuged for, dispersion, after being so repeated 3 times, with 8000r/min turn Speed centrifugation 10 minutes is added acetone supplement liquid level to 5 milliliters after removing supernatant liquor, obtains nano silver colloidal sol;
(2) preparation of TiO 2 sol:The ethyl acetate of the absolute ethyl alcohol of 23ml and 0.5ml are mixed, are then added The butyl titanate of 10ml forms the precursor solution of titania gel;By the absolute ethyl alcohol of 12ml, the deionization of 1.5ml The 65wt% salpeter solutions of water and 1.5ml mix, and obtain hydrolysis mixed solution;(rotating speed 900r/ under stirring conditions Min), drip to the speed of 1.5 drops with per second 1 and hydrolysis mixed solution be added dropwise dropwise in the precursor solution of stirring, After hydrolysis mixed solution is added dropwise in precursor solution completely, stirring is maintained 2 hours, aluminium-foil paper is used after the completion of stirring Sealed beaker mouth is covered, and stands 24 hours of aging at room temperature, to obtain TiO 2 sol;
(3) spin coating of compound antireflective coating:Coating machine rotating speed is set as 3000r/min, preliminary operation 5 seconds shows if there is film flying As then adjusting the position of solar cell until film flying does not occur, Schilling spin coater works (2500r/min) under lower-speed state, and The nano silver colloidal sol of 100 μ l is drawn with liquid-transfering gun and toward dripping on solar cell, later into high speed spin coating, rotating speed is afterwards 3000r/min is often 60 seconds, then draws the TiO 2 sol of 100 μ l with liquid-transfering gun again, and Schilling coating machine is in low speed Under state, then drip on 1 drop TiO 2 sol to solar cell, high speed rotation can obtain nano silver particles after one minute multiple Close titanium dioxide antireflective coating enhances solar cell to get to the compound antireflective coating of plasmon.
The thickness of titanium dioxide antireflection layer is 100nm.
Embodiment 3
The compound antireflective coating of plasmon of the present embodiment enhances solar cell, includes hearth electrode successively from the bottom to top (Au), GaAs substrates, graphene film, top electrode, metal nanoparticle layer, titanium dioxide antireflective film.
Hearth electrode (Au), GaAs substrates, graphene film and top electrode form graphene schottky junction solar cell.Stone Black alkene schottky junction solar cell is obtained using conventional method.
The preparation method of the compound antireflective coating of plasmon of the present embodiment, includes the following steps:
(1) preparation of nano silver colloidal sol:The silver nitrate solution for first taking a concentration of 0.01mol/L of 100ml, is then added The 1wt% sodium citrate solutions of 2ml are as buffer, under stirring conditions (rotating speed 900r/min), are added dropwise 1ml's dropwise The ascorbic acid solution of a concentration of 1.4mg/ml is used in combination sodium hydroxide solution to adjust pH to 6, after maintaining 1 hour of stirring, stops Stirring, obtains nano silver colloidal sol stoste;Taking 10ml colloidal sol stostes to be centrifuged, (rotating speed 7200r/min, centrifugation time are 10 points Clock), supernatant liquor is removed, leaving again will be in each centrifuge tube with deionized water after bottom precipitation and turbid (being about 1 milliliter) Liquid level be supplemented to 10 milliliters, ultrasonic disperse 15 minutes is then centrifuged for, dispersion, after being so repeated 3 times, with 8000r/min turn Speed centrifugation 10 minutes is added acetone supplement liquid level to 5 milliliters after removing supernatant liquor, obtains nano silver colloidal sol;
(2) preparation of TiO 2 sol:The ethyl acetate of the absolute ethyl alcohol of 23ml and 0.5ml are mixed, are then added The butyl titanate of 10ml forms the precursor solution of titania gel;By the absolute ethyl alcohol of 12ml, the deionization of 1.5ml The 65wt% salpeter solutions of water and 1.5ml mix, and obtain hydrolysis mixed solution;(rotating speed 900r/ under stirring conditions Min), drip to the speed of 1.5 drops with per second 1 and hydrolysis mixed solution be added dropwise dropwise in the precursor solution of stirring, After hydrolysis mixed solution is added dropwise in precursor solution completely, stirring is maintained 2 hours, aluminium-foil paper is used after the completion of stirring Sealed beaker mouth is covered, and stands 24 hours of aging at room temperature, to obtain TiO 2 sol;
(3) spin coating of compound antireflective coating:Coating machine rotating speed is set as 3000r/min, preliminary operation 5 seconds shows if there is film flying As then adjusting the position of solar cell until film flying does not occur, Schilling spin coater works (2500r/min) under lower-speed state, and The nano silver colloidal sol of 100 μ l is drawn with liquid-transfering gun and toward dripping on solar cell, later into high speed spin coating, rotating speed is afterwards 3000r/min is often 60 seconds, then draws the TiO 2 sol of 100 μ l with liquid-transfering gun again, and Schilling coating machine is in low speed Under state, then drip on 4 drop TiO 2 sols to solar cell, high speed rotation can obtain nano silver particles after one minute multiple Close titanium dioxide antireflective coating enhances solar cell to get to the compound antireflective coating of plasmon.
The thickness of titanium dioxide antireflection layer is 200nm.
A concentration of 0.001-10mol/L of the sol solution of the metal nanoparticle of the present invention, metal nanoparticle layer Thickness is 30-100 nanometers, and the grain size of metal nanoparticle is 10~80nm.
The thickness of the metal nanoparticle layer is 30-100 nanometers, and the grain size of metal nanoparticle is 10~80nm.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by the embodiment Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications, Equivalent substitute mode is should be, is included within the scope of the present invention.

Claims (8)

1. a kind of compound antireflective coating of plasmon enhances solar cell, it is characterised in that:Include the sun successively from the bottom to top Battery, metal nanoparticle layer and antireflection film layer.
2. the compound antireflective coating of plasmon enhances solar cell according to claim 1, it is characterised in that:The metal Metal nanoparticle is Nano silver grain, gold nanoparticle or platinum nanoparticles in nanoparticle layers;
The antireflection film layer is titanium dioxide.
3. the compound antireflective coating of plasmon enhances solar cell according to claim 2, it is characterised in that:The metal Metal nanoparticle is Nano silver grain in nanoparticle layers.
4. the compound antireflective coating of plasmon enhances solar cell according to claim 1, it is characterised in that:The sun Battery is schottky junction solar cell.
5. the compound antireflective coating of plasmon enhances solar cell according to claim 4, it is characterised in that:The Xiao Te Base junction solar cell includes hearth electrode, GaAs substrates, graphene layer and top electrode successively from top to bottom.
6. enhance the preparation method of solar cell according to the compound antireflective coating of any one of Claims 1 to 5 plasmon, It is characterized in that:Include the following steps:
(1) sol solution of metal nanoparticle is configured;
(2) sol solution of antireflective coating layer material is configured;
(3) sol solution of the sol solution of metal nanoparticle and antireflective coating layer material is spin-coated on solar cell successively Surface obtains the compound antireflective coating solar cell of plasmon.
7. the preparation method of the compound antireflective coating enhancing solar cell of plasmon, feature exist according to claim 6 In:The solar cell is schottky junction solar cell, and the sol solution of metal nanoparticle is nano silver colloidal sol;
The sol solution of the antireflective coating layer material is TiO 2 sol.
8. the preparation method of the compound antireflective coating enhancing solar cell of plasmon, feature exist according to claim 6 In:For the sol solution of metal nanoparticle when carrying out spin coating, the rotating speed of spin coating is 2500~4500r/min, the time of spin coating It is 20~100 seconds;For the sol solution of antireflective coating layer material when carrying out spin coating, the rotating speed of spin coating is 2500~4500r/min, The time of spin coating is 50~100 seconds.
CN201810360846.4A 2018-04-20 2018-04-20 Compound antireflective coating enhancing solar cell of a kind of plasmon and preparation method thereof Pending CN108682696A (en)

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CN201810360846.4A CN108682696A (en) 2018-04-20 2018-04-20 Compound antireflective coating enhancing solar cell of a kind of plasmon and preparation method thereof
PCT/CN2018/110980 WO2019200861A1 (en) 2018-04-20 2018-10-19 Plasmon composite anti-reflection film enhanced solar cell and preparation method therefor

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