CN108680098B - Flatness detection device for high-precision machining plane - Google Patents
Flatness detection device for high-precision machining plane Download PDFInfo
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- CN108680098B CN108680098B CN201810521456.0A CN201810521456A CN108680098B CN 108680098 B CN108680098 B CN 108680098B CN 201810521456 A CN201810521456 A CN 201810521456A CN 108680098 B CN108680098 B CN 108680098B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention discloses a novel flatness detection device for a high-precision machining plane, which comprises a shell, wherein a mounting groove with a downward opening is formed in the side wall of one side of the shell, first grooves with opposite openings are symmetrically formed in the side walls of the two sides of the mounting groove, fixed blocks are arranged in the first grooves, the side wall of one side of each of the two fixed blocks is connected with a transversely arranged bearing sleeve through a moving device, a rotating shaft matched with the bearing sleeve is inserted in the bearing sleeve, a transversely arranged roller is connected between the two rotating shafts, the other side of each fixed block is rotatably connected with a gear, a rack matched with the gear is arranged on the side wall of one side of each first groove, and two L-shaped mounting cavities are symmetrically formed in the shell. According to the flatness detection device for the high-precision machining plane, the flatness of the surface of the furniture can be detected, the positions with deviations can be clearly reflected, and the degree of the deviations can be roughly judged.
Description
Technical Field
The invention relates to the technical field of detection devices, in particular to a novel flatness detection device for a high-precision machining plane.
Background
Flatness means that when some things are processed or produced, the surface is not absolutely flat, and the difference between the flat and the absolute level is flatness (the smaller the value is, the better the flatness is). In the furniture industry, flatness refers to the local flatness of a surface of a product (part) in the range of 0-150 mm. When an operator processes the surface of furniture, the flatness of the surface of the furniture needs to be measured after the furniture is planed, so as to judge whether the furniture is reasonable or not. Nowadays, for the detection of roughness, the operation workman can laminate through standard tooth to the surface of furniture, if find that there is standard tooth and furniture's surface not laminate, comes the rough judgement according to own experience simultaneously, but can not remember exactly which places have the deviation on furniture surface, and the degree size of deviation. This can seriously affect the yield of furniture.
Therefore, we propose a flatness detecting apparatus for a high-precision machining plane to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems in the prior art, and provides a novel flatness detection device for a high-precision machining plane.
In order to achieve the purpose, the invention adopts the following technical scheme:
a flatness detection device for a high-precision machining plane comprises a shell, wherein a mounting groove with a downward opening is formed in the side wall of one side of the shell, first grooves with opposite openings are symmetrically formed in the side walls of the two sides of the mounting groove, fixed blocks are arranged in the first grooves, the side walls of one side of the two fixed blocks are connected with a bearing sleeve which is transversely arranged through a moving device, a rotating shaft matched with the bearing sleeve is inserted in the bearing sleeve, a roller which is transversely arranged is connected between the two rotating shafts, the other side of the fixed block is rotatably connected with a gear, a rack matched with the gear is arranged on the side wall of one side of the first groove, two L-shaped mounting cavities are symmetrically arranged in the shell and communicated with the first grooves, a linear module motor is arranged on the side wall of one side of the shell, and the moving end of the linear module motor is abutted against the side wall of one of, the L-shaped installation cavity is abutted against the rack through a zero calibration device, a U-shaped block is arranged on the upper side wall of the bearing sleeve, a conductor bar is arranged on the upper side wall of the U-shaped block, a coil is wound on the outer side wall of the conductor bar, a third groove with a downward opening is arranged on the lower side wall of the shell, two permanent magnets with opposite polarities are symmetrically arranged on the two side walls of the third groove, a cavity is further arranged on one side wall of the shell and is internally provided with an electromagnet, the conductor bar and the electromagnet form a closed loop through the coil, a support is arranged on the upper side wall of the shell and is connected with a transversely arranged swinging rod through a torsional spring in a rotating manner, an installation pipe is arranged at one end of the swinging rod, which is far away from the torsional spring, a vertically arranged recording pen is inserted in the installation pipe, an electric sliding rail is further arranged on the upper side wall of the shell, and a sliding block matched with, the side wall of the electric sliding rail is rotatably connected with a winding wheel, the winding wheel is sleeved with a roll paper, one side of the sliding block is provided with a fixing clamp, and the fixing clamp and one side of the roll paper are clamped and fixed.
Preferably, the mobile device includes the sleeve pipe of vertical setting, be equipped with the second recess on the lateral wall of one side of fixed block, and be equipped with the dead lever of vertical setting in the lateral wall of second recess, the cover is equipped with the spring of vertical setting in the dead lever, the sleeve pipe cover is established in the dead lever and rather than sliding connection, one side and the sheathed tube lateral wall fixed connection of spring, connecting rod and bearing housing fixed connection are passed through to sheathed tube one side.
Preferably, a laser lamp is arranged on the side wall of one side of the conductor bar, a through hole which is transversely arranged is arranged on the side wall of one side of the shell, and the through hole is flush with the notch of the third groove.
Preferably, zero calibration device includes the vertical setting at the board of supporting of the vertical end of L type installation cavity, and supports and be equipped with the screw thread chamber on the downside lateral wall of board, be equipped with the spacing groove of vertical setting on the lateral wall of one side of L type installation cavity, support one side lateral wall of board be equipped with spacing groove assorted stopper, rotate in the lateral wall of L type installation cavity and be connected with the screw rod of vertical setting, and one side of screw rod insert establish in the screw thread chamber and rather than threaded connection, the cover is equipped with first helical gear on the outside lateral wall of screw rod, the horizontal end of L type installation cavity is equipped with the bull stick of horizontal setting, the one end of bull stick be equipped with first helical gear assorted second helical gear, and the opposite side of bull stick runs through the lateral wall of L type installation cavity and is connected with the knob.
Preferably, the side wall of one side of the roll paper is provided with scale marks.
Preferably, the lateral wall of the outer side of the knob is sleeved with a cotton sleeve, and the opening of the cotton sleeve is fastened and connected by an elastic band.
Preferably, the swinging rod is made of a magnetic material.
Preferably, the outer side wall of the conductor bar is wound with a plurality of turns of coils.
Compared with the prior art, the invention has the beneficial effects that: this novel roughness detection device of high accuracy machined surface utilizes the gyro wheel at furniture surface's roll situation, meet protruding back, make the conductor bar cut the magnetic induction line in magnetic field, produce the electromotive force, thereby form the return circuit, make the electromagnet attract the swinging arms, thereby make the swinging arms drive the recording pen and scratch in the stock form that is driven by electronic slide rail, thereby produce the mar on its surface, thereby can judge that certain section exists protrudingly, its depth according to the mar roughly judges bellied degree.
Drawings
Fig. 1 is a schematic structural diagram of a flatness detecting apparatus for a high-precision machining plane according to the present invention;
FIG. 2 is a schematic cross-sectional view of a flatness detecting apparatus for high-precision machining of a plane according to the present invention;
fig. 3 is a schematic top sectional view of a sliding rail of the flatness detecting apparatus for high precision machining of a plane according to the present invention;
FIG. 4 is a schematic view of the structure at A in FIG. 2;
fig. 5 is a schematic structural diagram at B in fig. 2.
In the figure: the device comprises a shell 1, a fixed block 2, a gear 3, a first groove 4, a bearing sleeve 5, a rotating shaft 6, a rolling wheel 7, a support 8, a mounting groove 9, a torsion spring 10, a swinging rod 11, a recording pen 12, a mounting pipe 13, an electric sliding rail 14, a permanent magnet 15, a conductor bar 16, a laser lamp 17, a coil 18, a U-shaped block 19, a through hole 20, a linear module motor 21, a winding wheel 22, a paper winding 23, a fixing clamp 24, a sliding block 25, a knob 26, a rotating rod 27, a second bevel gear 28, a first bevel gear 29, a screw 30, a rack 31, a support plate 32, a fixing rod 33, a spring 34, a second groove 35, a connecting rod 36, a sleeve 37, an electromagnet 38 and a third groove 39.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1-5, a flatness detecting device for a high-precision machining plane comprises a housing 1, a mounting groove 9 with a downward opening is provided on a side wall of one side of the housing 1, first grooves 4 with opposite openings are symmetrically provided on side walls of two sides of the mounting groove 9, fixed blocks 2 are provided in the first grooves 4, a bearing sleeve 5 with a transverse arrangement is connected to a side wall of one side of each of the two fixed blocks 2 through a moving device, the moving device comprises a vertically arranged sleeve 37, a second groove 35 is provided on a side wall of one side of each of the fixed blocks 2, a vertically arranged fixed rod 33 is provided in a side wall of the second groove 35, a vertically arranged spring 34 is sleeved in the fixed rod 33, the sleeve 37 is sleeved in the fixed rod 33 and slidably connected with the fixed rod 33, one side of the spring 34 is fixedly connected with a side wall of the sleeve 37, one side of the sleeve 37 is fixedly connected with the bearing sleeve 5, the conductor bar 16 can be driven by the roller 7 to move upwards, the rotating shafts 6 matched with the roller are inserted in the bearing sleeve 5, the roller 7 transversely arranged is connected between the two rotating shafts 6, the other side of the fixed block 2 is rotatably connected with the gear 3, the side wall of one side of the first groove 4 is provided with the rack 31 matched with the gear 3, two L-shaped installation cavities are symmetrically arranged in the shell 1 and communicated with the first groove 4, the side wall of one side of the shell 1 is provided with the linear module motor 21, the moving end of the linear module motor 21 is abutted against the side wall of one of the fixed blocks 2, the L-shaped installation cavities are abutted against the rack 31 through a zero calibration device, the zero calibration device comprises a support plate 32 vertically arranged at the vertical end of the L-shaped installation cavity, the side wall of the lower side of the support plate 32 is provided with a threaded cavity, one side wall of the L-shaped installation cavity is provided with a, the side wall of one side of the abutting plate 32 is provided with a limiting block matched with the limiting groove, the side wall of the L-shaped installation cavity is rotatably connected with a vertically arranged screw rod 30, one side of the screw rod 30 is inserted in the threaded cavity and is in threaded connection with the threaded cavity, the side wall of the outer side of the screw rod 30 is sleeved with a first helical gear 29, the transverse end of the L-shaped installation cavity is provided with a transversely arranged rotating rod 27, one end of the rotating rod 27 is provided with a second helical gear 28 matched with the first helical gear 29, the other side of the rotating rod 27 penetrates through the side wall of the L-shaped installation cavity and is connected with a knob 26, zero calibration treatment can be carried out on the detection device, the side wall of the outer side of the knob 26 is sleeved with a cotton sleeve, the sleeve opening of the cotton sleeve is fastened and connected by an elastic band, so that the hand is more comfortable during adjustment and the worn cotton sleeve is convenient to replace, the U-shaped block 19 is arranged on the side, the outer side wall of the conductor bar 16 is wound with a plurality of turns of coils 18, so that the generated electromotive force is stronger, and the attraction effect is more obvious, the side wall of one side of the conductor bar 16 is provided with a laser lamp 17, the side wall of one side of the shell 1 is provided with a through hole 20 which is transversely arranged, and the through hole 20 is flush with the notch of the third groove 39, so that when light penetrates through the through hole 20, the conductor bar 16 is flush with the notch, so that the subsequent zero calibration treatment is convenient, the outer side wall of the conductor bar 16 is wound with the coils 18, the lower side wall of the shell 1 is provided with the third groove 39 with a downward opening, two permanent magnets 15 with opposite polarities are symmetrically arranged on the side walls of two sides of the third groove 39, a cavity is also arranged on the side wall of one side of the shell 1, an electromagnet 38 is arranged in the cavity, the conductor bar 16 and the electromagnet 38 form a, and the support 8 is rotatably connected with a swing rod 11 transversely arranged through a torsion spring 10, the swing rod 11 is made of a magnetic material, so that the electromagnet 38 can attract the swing rod 11 during magnetization, one end of the swing rod 11, which is far away from the torsion spring 10, is provided with an installation pipe 13, a vertically arranged recording pen 12 is inserted in the installation pipe 13, the upper side wall of the shell 1 is also provided with an electric slide rail 14, the electric slide rail 14 is connected with a slide block 25 matched with the electric slide rail 14 in a sliding manner, the side wall of the electric slide rail 14 is rotatably connected with a winding wheel 22, a roll paper 23 is sleeved in the winding wheel 22, a scale mark is arranged on one side wall of the roll paper 23, which section on the surface of the furniture is provided with a bulge can be clearly determined, one side of the slide block 25 is provided with a fixing clamp 24.
In the invention, when the flatness detection device of the high-precision processing plane detects the flatness of the surface of furniture, firstly, zero calibration treatment needs to be carried out on the detection device, the laser lamp 17 is turned on and penetrates through the through hole 20, if the light of the laser lamp 17 is not found to be transmitted out of the through hole 20, the conductor bar 16 is not flush with the notch of the third groove 39, the knobs 26 at the two ends can be rotated, so that the rotating rod 27 drives the second bevel gear 28 to rotate, the screw 30 rotates due to the meshing effect of the second bevel gear 28 and the first bevel gear 29, and the abutting plate 32 pushes the rack 31 to move due to the rotation of the screw 30 in the threaded cavity, and the zero calibration treatment is completed until the light of the laser lamp 17 penetrates through the through hole 20 or not;
then the detection device is placed on the surface of furniture, the end surface of the detection device and the end surface of the furniture are positioned on the same surface, one side provided with a swing rod 11 is positioned at the end head, and then the lifting adjusting devices are arranged on the four sides of the detection device, and a level is arranged on the side wall of the detection device, so that the integral levelness of the detection device is adjusted;
then, the linear module motor 21 is started, so that the linear module motor 21 pushes the fixed block 2 to move, the roller 7 rolls along the surface of the furniture, when the surface of the furniture is convex, the roller 7 is lifted, the conductor bar 16 enters the third groove 39, the moving direction is perpendicular to the direction of a magnetic field formed by the two permanent magnets 15 due to the upward movement of the conductor bar 16, so that the magnetic induction line cutting movement is performed, a closed loop is formed by the conductor bar 16, the coil 18 and the electromagnet 38, so that a current is formed, and when the current acts on the electromagnet 38, the electromagnet has certain magnetism, so that the swinging rod 11 can be attracted, the recording pen 12 moves downwards, and meanwhile, the movement speed of the sliding block 25 in the electric sliding rail 14 is ensured to be consistent with the speed of the linear module motor 21, so that when the linear module motor 21 is started, the sliding block 25 drives the paper roll 23 to move through the fixed clamp 24, so that the recording pen 12 can draw traces on the surface of the roll paper 23, when the protruding degree is large, the areas of the conductor bars 16 entering the magnetic field are different, so that the generated current is different, and further the attraction force of the electromagnet 38 to the swinging rod 11 is different, so that the traces left in the roll paper 23 by the recording pen 12 are different in depth;
finally, an operator unloads the roll paper 23, whether the furniture is qualified in flatness can be judged by observing the traces on the surface of the roll paper 23, if the traces are deep, the protruding degree can be indicated to be large, otherwise, the same principle is carried out; in addition, since the roll paper 23 is marked with scale marks, it is possible to clearly know where the protrusions exist on the surface of the furniture.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (8)
1. The flatness detection device for the high-precision machining plane comprises a shell (1) and is characterized in that a mounting groove (9) with a downward opening is formed in one side wall of the shell (1), first grooves (4) with opposite openings are symmetrically formed in two side walls of the mounting groove (9), fixed blocks (2) are arranged in the first grooves (4), one side wall of each fixed block (2) is connected with a bearing sleeve (5) which is transversely arranged through a moving device, a rotating shaft (6) matched with the bearing sleeve is inserted in the bearing sleeve (5), a roller (7) which is transversely arranged is connected between the two rotating shafts (6), gears (3) are rotatably connected to the other sides of the two fixed blocks (2), racks (31) matched with the gears (3) are arranged on one side wall of the first groove (4), two L-shaped mounting cavities are symmetrically formed in the shell (1), and the L-shaped installation cavity is communicated with the first groove (4), a linear module motor (21) is arranged on the outer side wall of the shell (1), the moving end of the linear module motor (21) is abutted to the side wall of one of the fixed blocks (2), the L-shaped installation cavity is abutted to the rack (31) through a zero calibration device, a U-shaped block (19) is arranged on the upper side wall of the bearing sleeve (5), a conductor bar (16) is arranged on the upper side wall of the U-shaped block (19), a coil (18) is wound on the outer side wall of the conductor bar (16), a third groove (39) with a downward opening is arranged on the lower side wall of the shell (1), two permanent magnets (15) with opposite polarities are symmetrically arranged on the side walls of two sides of the third groove (39), a cavity is further arranged beside the side walls of two sides of the shell (1) close to the third groove (39), an electromagnet (38) is arranged in the cavity, the conductor bar (16) and the electromagnet (38) form a closed loop through a coil (18), a support (8) is arranged on the side wall of the upper side of the shell (1), the support (8) is rotationally connected with a swing rod (11) which is transversely arranged through a torsion spring (10), a mounting pipe (13) is arranged at one end of the swinging rod (11) far away from the torsion spring (10), a vertically arranged recording pen (12) is inserted into the mounting tube (13), an electric slide rail (14) is arranged on the upper side wall of the shell (1), and a sliding block (25) matched with the electric sliding rail (14) is connected in the electric sliding rail in a sliding way, a winding wheel (22) is rotatably connected on the side wall of the electric sliding rail (14), roll paper (23) is sleeved in the winding wheel (22), one side of the sliding block (25) is provided with a fixing clamp (24), and the fixing clamp (24) is clamped and fixed with one side of the roll paper (23).
2. The flatness detecting device for high-precision machining planes as claimed in claim 1, wherein the moving device comprises a vertically arranged sleeve (37), a second groove (35) is arranged on a side wall of the fixed block (2), a vertically arranged fixed rod (33) is arranged in a side wall of the second groove (35), a vertically arranged spring (34) is sleeved in the fixed rod (33), the sleeve (37) is sleeved in the fixed rod (33) and is in sliding connection with the fixed rod, one side of the spring (34) is fixedly connected with a side wall of the sleeve (37), and one side of the sleeve (37) is fixedly connected with the bearing sleeve (5) through a connecting rod (36).
3. The flatness detecting device for high-precision machining planes according to claim 1, characterized in that a laser lamp (17) is arranged on one side wall of the conductor bar (16), a through hole (20) is transversely arranged on one side wall of the shell (1), and the through hole (20) is flush with the notch of the third groove (39).
4. The flatness detecting device for high-precision machining planes according to claim 1, characterized in that the zero calibration device comprises a support plate (32) vertically arranged at the vertical end of the L-shaped installation cavity, a threaded cavity is arranged on the lower side wall of the support plate (32), a vertically arranged limit groove is arranged on one side wall of the L-shaped installation cavity, a limit block matched with the limit groove is arranged on one side wall of the support plate (32), a vertically arranged screw rod (30) is rotatably connected in the side wall of the L-shaped installation cavity, one side of the screw rod (30) is inserted in the threaded cavity and is in threaded connection with the threaded cavity, a first helical gear (29) is sleeved on the outer side wall of the screw rod (30), a horizontally arranged rotating rod (27) is arranged at the horizontal end of the L-shaped installation cavity, a second helical gear (28) matched with the first helical gear (29) is arranged at one end of the rotating rod (27), and the other side of the rotating rod (27) penetrates through the side wall of the L-shaped mounting cavity and is connected with a knob (26).
5. A flatness detecting apparatus for a high precision processing plane according to claim 1, wherein a side wall of said roll paper (23) is provided with scale marks.
6. The flatness detecting device for the high-precision processing plane according to claim 4, wherein a cotton sleeve is sleeved on the outer side wall of the knob (26), and the opening of the cotton sleeve is fastened and connected by an elastic band.
7. A flatness detecting apparatus for a high precision work plane according to claim 4, wherein said swinging lever (11) is made of a magnetic material.
8. A flatness detecting apparatus for a high precision machining plane according to claim 4, wherein said conductor bar (16) is wound with a plurality of turns of a coil (18) on an outer side wall thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810521456.0A CN108680098B (en) | 2018-05-28 | 2018-05-28 | Flatness detection device for high-precision machining plane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810521456.0A CN108680098B (en) | 2018-05-28 | 2018-05-28 | Flatness detection device for high-precision machining plane |
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| Publication Number | Publication Date |
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| CN108680098A CN108680098A (en) | 2018-10-19 |
| CN108680098B true CN108680098B (en) | 2020-11-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810521456.0A Active CN108680098B (en) | 2018-05-28 | 2018-05-28 | Flatness detection device for high-precision machining plane |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111649666B (en) * | 2020-06-05 | 2021-11-16 | 长春财经学院 | Computer machine case roughness verifying attachment based on electromagnetic induction principle |
| CN112146562B (en) * | 2020-09-22 | 2022-05-13 | 安徽广毅达精密科技有限公司 | Surface flatness detector for new material with capacitance variation control |
| CN113724517B (en) * | 2021-07-30 | 2022-08-30 | 安徽工程大学 | Unmanned driving detection system and device thereof |
| CN113983922B (en) * | 2021-11-23 | 2023-09-19 | 宁波纽兰得轴承有限公司 | High-precision surface flatness detection equipment for bearing machining |
| CN114563745B (en) * | 2022-04-26 | 2022-07-05 | 江苏天利机电有限公司 | Transformer detection device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB567918A (en) * | 1943-06-17 | 1945-03-08 | Kapella Ltd | Improvements in or relating to apparatus for measuring or indicating the roughnessesor undulations of a surface |
| DE3622306A1 (en) * | 1986-07-03 | 1988-01-07 | Hommelwerke Gmbh | Length measurement sensor, especially for sensing the surface of a workpiece |
| CN2234091Y (en) * | 1995-04-14 | 1996-08-28 | 机械工业部北京起重运输机械研究所 | Sag measurer for conveyer belting |
| JPH08324194A (en) * | 1995-05-30 | 1996-12-10 | Ando Electric Co Ltd | Vibrating pen |
| JPH1011953A (en) * | 1996-06-21 | 1998-01-16 | Hitachi Electron Eng Co Ltd | Apparatus for testing durability of magnetic disk |
| JP2006118916A (en) * | 2004-10-20 | 2006-05-11 | Sii Nanotechnology Inc | Surface information measuring instrument, and surface information measuring method |
| CN103808297B (en) * | 2014-03-04 | 2016-08-17 | 哈尔滨工业大学 | A kind of lorry body flatness measuring instrument |
| CN203908518U (en) * | 2014-06-30 | 2014-10-29 | 苏州格雷特机器人有限公司 | Workpiece plane detection robot |
| CN205825886U (en) * | 2016-07-18 | 2016-12-21 | 赣州云信工贸有限责任公司 | A kind of plastic-steel material flatness detecting device |
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- 2018-05-28 CN CN201810521456.0A patent/CN108680098B/en active Active
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| 氮化硅薄膜的表面平整度特性;陶孟仙等;《量子电子学报》;20000831;第17卷(第4期);第365-368页 * |
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