CN108671972A - The preparation method and Preparation equipment of metal-surface nano structure - Google Patents
The preparation method and Preparation equipment of metal-surface nano structure Download PDFInfo
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- CN108671972A CN108671972A CN201810796630.2A CN201810796630A CN108671972A CN 108671972 A CN108671972 A CN 108671972A CN 201810796630 A CN201810796630 A CN 201810796630A CN 108671972 A CN108671972 A CN 108671972A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/02—Adapting objects or devices to another
- B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
- B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0896—Nanoscaled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
Abstract
The invention discloses a kind of preparation methods of metal-surface nano structure, including：Solution containing charged nanoparticles is led into surface of workpiece, electrophoresis auxiliary electrode to metal works and above metal works is powered, electric field is formed between metal works and electrophoresis auxiliary electrode so that nano particle is adsorbed in surface of workpiece under electric field force effect；In vacuum environment or atmosphere of inert gases, laser facula irradiation is carried out to surface of workpiece presumptive area, it is laser sintered to the nano particle progress in presumptive area, so that nano particle and metal works is bonded connection, obtaining surface has the metal works of nanostructure.It is easy and safe to operate without chemicals in the present invention, it is pollution-free；It is uniform that surface of workpiece nanostructure thickness is made, can be used as extensive micro-nano structure manufacture and transfer micro-fluidic chip.The present invention also provides a kind of Preparation equipments of metal-surface nano structure, have above-mentioned advantageous effect.
Description
Technical field
The present invention relates to microfluidic arts, a kind of preparation method more particularly to metal-surface nano structure and
A kind of Preparation equipment of metal-surface nano structure.
Background technology
Micro-fluidic chip (Microfluidic chip) is also known as chip lab (lab-on-a-chip), is a kind of detection
Analytical instrument.It is usually used in genetic analysis, the synthesis of novel drugs and screening, biological ore dressing, medical diagnosis on disease and food safety detection, quilt
It is classified as one of 21 century most important cutting edge technology.
The surface hydrophilic and hydrophobic of micro-fluidic chip plays an important role in microfluid such as transports, manipulates at the applications.High score
Sub- material surface is hydrophobic surface, by that its surface hydrophilic modification, can widen its use scope in certain fields.And it is micro-
The micro nano structure on fluidic chip surface is the key that micro-fluidic chip surface hydrophilic and hydrophobic.
Hot extrusion briquetting technique be prepare one of polymeric micro-fluidic chip and the most common method of surface micro-nano structure, and this
Kind process key is that surface has the manufacture of the mold of micro nano structure.The method of currently manufactured mold includes：1) hot
Sintering process, the disadvantage is that needing high-temperature process, cost is higher, and modified material attachment may be uneven in dipping process, is easy
Cause processing carbon material surface hydrophobe property uneven；2) chemical reagent used is low-surface-energy modifying agent, the disadvantage is that having
Pollution, operation is dangerous, and directly polishing pretreatment and heat treatment makes Metal Surface Roughness reduce.Therefore, various at present to be used for
Preparing surface has the method for mold of micro nano structure, and it is uneven to have some limitations the nanostructure either prepared
The problems such as even.
Invention content
The object of the present invention is to provide a kind of preparation method of metal-surface nano structure and metal-surface nano structures
Preparation equipment, solve that the operation being modified to metal surface hydrophilic and hydrophobic is dangerous and metal surface hydrophilic and hydrophobic is modified
Non-uniform problem.
In order to solve the above technical problems, the present invention provides a kind of preparation method of metal-surface nano structure, including：
Solution containing charged nanoparticles is led into surface of workpiece；
Electrophoresis auxiliary electrode to the metal works and above the metal works is powered, in the metal works
Electric field is formed between the electrophoresis auxiliary electrode so that the nano particle is adsorbed in the metal work under electric field force effect
Part surface；
In vacuum environment or atmosphere of inert gases, laser facula photograph is carried out to the surface of workpiece presumptive area
It penetrates, it is laser sintered to the nano particle progress in the presumptive area, keep the nano particle and the metal works viscous
Connection is closed, obtaining surface has the metal works of nanostructure.
Wherein, the solution position is formed after electric field on the metal works, further includes：
Shoot the distributed image that the nano particle is adsorbed on the surface of workpiece distribution situation；
The size and Orientation of the electric field is adjusted according to the distributed image, until the nano particle is described
The distribution of surface of workpiece meets Spreading requirements, then executes described to surface of workpiece presumptive area progress laser light
The operation of spot irradiation.
Wherein, described to include to surface of workpiece presumptive area progress laser facula irradiation：
According to the contour shape of surface of workpiece and presumptive area position, adjust laser facula transmitting range and
Launch angle so that the laser facula exposes to surface of workpiece presumptive area.
Wherein, before the colloid mixed liquor for being blended with nano particle is led on metal works, further include：
The nano particle in the solution is set uniformly to mix by ultrasonic vibration and/or magnetic agitation.
The present invention also provides a kind of Preparation equipments of metal-surface nano structure, for realizing any one of them as above
Preparation method, including：
The vacuum control unit of vacuum environment or inert gas environment is provided for the metal works；
Suspension suction tube for the solution containing charged nanoparticles to be led to the surface of workpiece；
With the metal works and power supply be connected between the metal works formed electric field electrophoresis auxiliary the moon
Pole, wherein the electric field is adsorbed in the surface of workpiece for controlling nano particle in the solution；
It is laser sintered for the nano particle progress to the surface of workpiece presumptive area, make the nanometer
Grain is bonded in the laser of the surface of workpiece.
Wherein, further include solution mixing apparatus；
The solution mixing apparatus includes ultrasonic vibration installation and agitating device, and being used for will be described molten in suspension suction tube
Liquid is led to before the surface of workpiece, and the nano particle in the solution is made uniformly to mix.
Wherein, the solution mixing apparatus further includes solution circulating device, for obtaining the metal work with nanostructure
After part, adsorption recovery is carried out to the remaining solution of the surface of workpiece.
Wherein, further include CCD video detecting devices, the surface of workpiece is adsorbed on for shooting the nano particle
The distributed image of distribution situation.
Wherein, further include the motion control device for controlling the metal works and electrophoresis auxiliary cathode movement respectively,
For the relative position by controlling metal works and electrophoresis auxiliary cathode, to the metal works and the electrophoresis auxiliary cathode
Between the size and Orientation of electric field that generates be adjusted.
Wherein, further include for according to the surface of workpiece contour shape, controlling the laser and the metal
The laser regulating system of workpiece relative position and laser transmitting laser angle；
The motion control device is additionally operable to the relative position between control metal works and mask plate, so as to the mask
Plate is when the laser emits laser to metal works into line mask.
The preparation method of metal-surface nano structure provided by the present invention, by metal works and electrophoresis auxiliary electrode
The electric field being collectively formed applies the nano particle of the electrification in surface of workpiece solution the effect of electric field force so that nanometer
Particle arranges the surface for being adsorbed in metal works, then laser sintered to nano particle progress, and nano particle is made to be bonded in metal
The surface of workpiece, you can form nanostructure on the surface of metal works, which can be used as preparing micro-fluidic chip
Mold.
Because nano particle is the surface for being adsorbed in metal works by electric field controls, nano particle can it is rough side by side
It is arranged in surface of workpiece, even if surface of workpiece there is a situation where uneven, nano particle also can be with metal work
Adaptable male-female arrangement is presented in the convex-concave surface on part surface so that the thickness of the nano particle of surface of workpiece absorption is substantially
Uniformly, it also ensures that the uniformity of nanostructure thickness, and then ensure that the uniformity of surface of workpiece hydrophilic and hydrophobic；Separately
Outside, without chemicals, easy and safe to operate, pollution-free, the metal work with nanostructure obtained in the present invention
Part can be used as the mold of the large-scale production of micro-fluidic chip.
The present invention also provides a kind of Preparation equipments of metal-surface nano structure, have above-mentioned advantageous effect.
Description of the drawings
It, below will be to embodiment or existing for the clearer technical solution for illustrating the embodiment of the present invention or the prior art
Attached drawing is briefly described needed in technology description, it should be apparent that, the accompanying drawings in the following description is only this hair
Some bright embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
The flow diagram of the preparation method for the metal-surface nano structure that Fig. 1 is provided by the embodiment of the present invention；
The Preparation equipment structural schematic diagram for the metal-surface nano structure that Fig. 2 is provided by the embodiment of the present invention；
In attached drawing 1 be metal works, 2 be vacuum control unit, 3 be suspension suction tube, 4 be power supply, 5 be electrophoresis auxiliary
Cathode, 6 be laser, 7 be workbench, 8 be work piece holder, 9 be processing groove, 10 be integrated control cabinet, 11 be solution mixing set
It is standby, 12 be CCD video detecting devices, 13 be three-dimensional movement platform, 14 be laser regulating system.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description
The present invention is described in further detail.Obviously, described embodiments are only a part of the embodiments of the present invention, rather than
Whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, shall fall within the protection scope of the present invention.
The flow of the preparation method of the metal-surface nano structure provided as shown in FIG. 1, FIG. 1 is the embodiment of the present invention is shown
It is intended to, including：
Step S1：Solution containing charged nanoparticles is led into surface of workpiece.
Specifically, the nano particle of electrification can be by compound directly it is melt and dissolved in water after, ionize generation band ionization
Son.Can also be that nano level particle is mixed in water or other solution that can be ionized, particle is mutually tied with the charge in solution
It closes and charges.In short, as long as there are sizes in nanoscale and the particle of electrification in solution.
Optionally, can also include further before step S1：
The nano particle in solution is set uniformly to mix by ultrasonic vibration and/or magnetic agitation.
It should be noted that charged characteristic or architectural characteristic of the nano particle of the electrification in solution due to itself, it may
Chemical bond can be formed between nano particle, and then agglomerate into the larger particle of volume, and the larger particle of volume is shown
So the requirement for preparing metal-surface nano structure is not met.By ultrasonic vibration and/or magnetic agitation to carry out solution vibration or
Stirring, the reunion that can be largely avoided between nano particle so that nano particle in the solution uniformly mixing and
Grain size is generally uniform, and then guarantee prepares the quality of the nanostructure of surface of workpiece.
Step S2：Electrophoresis auxiliary electrode above metal works and metal works is powered.
Specifically, the voltage that metal works are connected with electrophoresis auxiliary electrode is there are certain potential difference, then the two
Between can form electric field.And the solution of the nano particle containing electrification is located at the upper surface of metal works, the nanometer in solution
Grain is under the action of electric field force, you can is moved to surface of workpiece, and is adsorbed on the surface of metal works.
It is understood that be powered to metal works, the surfaces of metal works also necessarily equipotential surface, close to metal works
The electric field line on surface is each perpendicular to the surface of metal works, then the effect for the electric field force that nano particle is subject to namely perpendicular to
The surface of metal works so that nano particle can be adsorbed on metal works, and the size by adjusting electric field strength and side
To can ensure that nanostructure thickness to a certain extent substantially so that nano particle is laid in the surfaces of metal works
Uniformity.Also, since metal works are equipotentiality body, even if there is to a certain extent uneven in the surface of metal works,
Nano particle is also capable of the adsorption of complexed metal workpiece under the action of electric field force, shows male-female arrangement.
Can be part to the processing of surface of workpiece nanostructure it should be noted that in actual mechanical process
What small range carried out successively, if carrying out small-scale processing, even surface of workpiece bumps not to surface of workpiece
In flat regional area, it also can approximately be considered as even curface, it is suitable at the angle of inclination on foundation surface and direction etc.
Direction when adjustment electric field and size so that the electric field line of entire electric field all approximately perpendicular to the surface for needing machining area,
It may make the nano particle ordered deposition of surface of workpiece, and improve deposition efficiency.
Step S3：In vacuum environment or atmosphere of inert gases, laser light is carried out to surface of workpiece presumptive area
Spot irradiates, and is carried out to the nano particle in presumptive area laser sintered.
Specifically, it can directly carry out, avoid in vacuum environment or atmosphere of inert gases in whole process
When carrying out laser sintered to surface of workpiece, oxygen in external environment etc. generates oxidation to surface of workpiece.
After nano particle adsorbs arrangement surface of workpiece, by laser sintered so that nano particle is bonded in completely
Surface of workpiece, you can form nanostructure on the surface of metal works.
It should be noted that in order to expand the range of micro-fluidic chip application field, to the close and distant of micro-fluidic chip surface
It is aqueous to there is higher requirement.If producing micro-fluidic chip using hot stamping method, it is common practice to change metal die table
The hydrophilic and hydrophobic in face.It is generally necessary to need high-temperature process to metal die surface, and modified material is impregnated, and the work of hot conditions
Skill cost is higher, and the thickness of the modified material of surface dipping may also be uneven；Alternatively, it is also possible to directly to metal surface modification
The chemical reagent such as agent, after the hydrophilic and hydrophobic of metal surface can be changed by changing metal surface, directly using the metal as miniflow
Chip is controlled, and chemical reagent not only has pollution to environment, there is also danger in operating process, and both the above mode can not
Realize the large-scale production of micro-fluidic chip.
The preparation method of metal-surface nano structure provided in the present invention is the mold for producing micro-fluidic chip
Preparation method.Nanostructure is prepared on the surface of metal works, if certain hydrophily is presented in metal works itself, in metal
After workpiece surface forms nanostructure, hydrophily can enhance, conversely, certain hydrophobicity is presented in metal works itself, in gold
After metal work-pieces surface forms nanostructure, hydrophobicity can also enhance.It, can be in gold using electrophoresis auxiliary and selective laser technology
The hydrophobe modification of metal work-pieces surface.Using electric field driven nano particle, in the arbitrary plane of mold, curved surface, boss, groove
Equal irregular surfaces are surface-treated, and surface of workpiece is made to obtain orderly particle alignment；Pass through laser technology constituency again
Heating changes specific workpiece surface temperature, realizes enhancing micro-nano modified particles and workpiece surface binding force；Modified can be passed through
The surface hydrophobe that grain carries out mold regional area and different shape size without mask is modified.
The method of the present invention for processing nanostructure to metal surface, step is simple, whole process safe operation
It is pollution-free, and nano particle is enabled to uniformly to be arranged in surface of workpiece, it ensure that the uniformity of nanostructure, in turn
The uniformity that ensure that surface of workpiece hydrophilic and hydrophobic can using the metal works as the mold of coining micro-fluidic chip
The batch production for realizing micro-fluidic chip, improves the production efficiency of micro-fluidic chip.
Further, after metal works form nanostructure, surface of workpiece can also be decreased or increased
Surface energy, and then further strengthen the hydrophilic and hydrophobic of metal works.
Based on above-described embodiment, in another embodiment of the present invention, the solution position shape on metal works
After electric field, can also include further：
Shooting nano particle is adsorbed on the distributed image of surface of workpiece distribution situation；
The size and Orientation of electric field is adjusted according to distributed image, until nano particle is in point of surface of workpiece
Cloth meets Spreading requirements, then executes the operation of step S3
In view of the state that the nano particle in solution is finally adsorbed on surface of workpiece can be influenced by many factors,
Such as electric field is excessive, may result in the nano particle accumulation of surface of workpiece absorption, electric field is too small, leads to receiving for absorption
Rice grain is very few.
By shoot surface of workpiece image can be with nano particle visible in detail in metal surface distribution feelings
Condition, if the distribution of nano particle is undesirable, the appropriate size and Orientation for adjusting electric field, and then change nano particle
Arrangement so that nano particle finally meets Spreading requirements, and basis is provided subsequently to obtain uniform nanostructure.
Optionally, in nano particle after surface of workpiece absorption laser is carried out to surface of workpiece presumptive area
Hot spot irradiation can specifically include：
According to the contour shape of surface of workpiece and presumptive area position, adjust laser facula transmitting range and
Launch angle so that laser facula exposes to surface of workpiece presumptive area.
In view of the surface of metal works is there are irregularities, then the direction of Laser emission hot spot cannot ensure and
Surface of workpiece is completely vertical, and the angle of Laser emission and laser all influence nano particle in the distance of metal works
Absorb laser facula heat number.Therefore, in practical operation, it is necessary to according to the shape and metal of surface of workpiece
The type of material and nano particle, size do adjusting appropriate to the irradiation of laser, so as to reach best laser sintered
Effect.
A kind of Preparation equipment of metal-surface nano structure is additionally provided in the present invention, is applied particularly to realize above-mentioned arbitrary
The preparation method of embodiment specifically can refer to Fig. 2, which includes：
The vacuum control unit 2 of vacuum environment or inert gas environment is provided for metal works 1；
Suspension suction tube 3 for the solution containing charged nanoparticles to be led to 1 surface of metal works；
It is connected between metal works 1 the electrophoresis auxiliary cathode 5 of formation electric field with power supply 4 with metal works 1,
In, electric field is adsorbed in 1 surface of metal works for controlling nano particle in solution；
It is laser sintered for the nano particle progress to 1 surface presumptive area of metal works, so that nano particle is bonded in gold
The laser 6 on 1 surface of metal work-pieces.
As shown in Fig. 2, on the table 7, it is provided with the work piece holder 8 of fixed metal works 1, the work piece holder 8 and gold
Metal work-pieces 1 are respectively positioned in processing groove 9, and the vacuum state and temperature in processing groove 9 are adjusted by vacuum control unit 2.Metal work
The top of part 1 is provided with suspension suction tube 3, and the surface for solution to be adsorbed to metal works 1, solution is inhaled by suspension
Skirt 3 is primary or is accurately placed in several times on 1 surface of metal works；1 top of metal works is additionally provided with electrophoresis auxiliary cathode
5, which connects with power supply 4 with metal works 1, and one connects positive pole one and connects power cathode so that
Electric field is formed between electrophoresis auxiliary cathode 5 and metal works 1.It is additionally provided with laser 6, Ke Yixiang in the top of metal works 1
Laser sintered laser facula is carried out to nano particle at 1 surface emitting of metal works.
In addition it is additionally provided with integrated control cabinet 10 in the side of workbench 7, the host in the integrated control cabinet 10 is built-in with
The control program for controlling each device of whole equipment, to carry out automation control to the normal operation of whole equipment
It adjusts, reduces the precision that raising prepares 1 surface nano-structure of metal works.
Matching by vacuum control unit 2, suspension suction tube 3, electrophoresis auxiliary cathode 5 and laser 6 in the present invention
It closes and uses, realize nano particle in the absorption on 1 surface of metal works and eventually by the laser sintered metal works 1 that are bonded in
Surface, obtaining surface has the metal works 1 of nanostructure, the hydrophilic and hydrophobic of metal works 1 is transformed, operation side
Just, safety coefficient is high, and can ensure the uniformity of 1 surface hydrophilic and hydrophobic of metal works.
Further, in another embodiment of the present invention, solution mixing apparatus 11 is can further include, it is molten
Liquid mixing apparatus 11 includes ultrasonic vibration installation and agitating device.
The solution of the nano particle also charged is carried in the solution mixing apparatus 11, and is additionally provided with ultrasonic vibration
Device and magnetic stirring apparatus.Before solution is led to 1 surface of metal works by suspension suction tube 3, filled by ultrasonic vibration
Set makes the nano particle in solution uniformly mix with magnetic stirring apparatus.As described in Figure 1, one end of suspension suction tube 3 and molten
Liquid mixing apparatus 11 is connected, it is ensured that solution is attracted to the surface of metal works 1 by suspension suction tube 3.
Further, which can also include solution circulating device.
After the nano particle on 1 surface of metal works is bonded in 1 surface of metal works formation nanostructure completely, metal
The solution on 1 surface of workpiece can not run out completely, and solution circulating device can by the solution of 1 surface residual of metal works into
Row attracts recycling and not used solution to mix repetitive cycling use, reduces unnecessary waste of material, reduces production
Cost.
Based on above-mentioned any embodiment, in another embodiment of the present invention, can also include：
CCD video detecting devices 12, the CCD video detecting devices 12 can be to the images of 1 nano surface grade of metal works
It is shot.
When nano particle is adsorbed in surface of metal particles by the effect of electric field force, CCD video detecting devices can be passed through
The image of 12 shooting 1 nano surface distribution of particles of metal works, by the image it may determine that nano particle is in metal works 1
The arrangement on surface whether reach requirement, if not reaching requirement, just to nano particle 1 surface of metal works distribution into
Row adjustment.
In addition, after laser 6 is laser sintered to the nano particle progress on 1 surface of metal works, CCD can also be passed through
Food inspection equipment shoots the nanostructure on 1 surface of metal works, to judge whether the metal works 1 that processing obtains are qualified.
Based on above-mentioned any embodiment, in another embodiment of the present invention, can also include further：
Motion control device, the motion control device can control the work piece holder 8 of metal works 1 on 7 surface of workbench
Movement.
Specifically, which may include three-dimensional movement platform 13,8 equal position of metal works 1 and work piece holder
In in three-dimensional movement platform 13, by three-dimensional movement platform 13 all around and the movement of deflection, and drive metal works 1
With moving with it.When even inclined angle changes for the position of metal works 1 on the table 7, suspension suction tube 3
Solution can be adsorbed at the different position in 1 surface of metal works；Laser 6 is radiated at the laser on 1 surface of metal works
The position of hot spot and the angle for emitting laser also change accordingly.
Electrophoresis auxiliary cathode 5 can also be controlled to move relative to metal works 1, it is auxiliary to change metal works 1 and electrophoresis
Help the size and Orientation of the electric field generated between cathode 5.
Adjustment by motion control device to 5 position of metal works 1 and electrophoresis auxiliary cathode, you can realize metal work
The processing of 1 surface different location of part.
Optionally, in another embodiment of the present invention, can also include further：
Laser regulating system 14, the laser regulating system 14 can adjust laser 6 emit laser angle and laser
Height of the device 6 relative to metal works 1.
It in actual application can be according to 1 surface profile shape of metal works, by laser regulating system 14 to swashing
Light device 6 is controlled to adjust so that laser 6 emits the angle of laser and the distance of transmitting laser is adjusted to one suitably
State so that after heat caused by nanoparticle absorbance laser, be preferably bonded in 1 surface of metal works.
It should be noted that specifically use can control laser up and down motion or all around angle to laser regulating system 14
The mechanical structure of the adjusting of degree, such as mechanical arm, up and down slideway etc., in this regard, the existing prior art can be real at present
It is existing, this is no longer repeated one by one.
Optionally, mask plate can also be set in 1 surface position of metal works, when using laser irradiation metal works
It is laser sintered to be carried out to the nano particle in presumptive area to 1 surface of metal works into line mask when 1 surface.
In general, because can be the small-scale processing in part, processing to the processing of 1 surface nano-structure of metal works
Fineness is higher, need not generally use mask plate.But in order to avoid error present in operating process influences, nanostructure
Machining accuracy, mask plate can be set above metal works 1, and controls metal works 1 by motion control device and cover
The relative position of diaphragm plate can be specifically that motion control device only controls the movement of metal works 1, can also two same time controls
System movement, as long as adjusting the relative position of the two to suitable state.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with it is other
The difference of embodiment, just to refer each other for same or similar part between each embodiment.
The preparation method to metal-surface nano structure provided by the present invention and Preparation equipment have carried out in detail above
It introduces.Principle and implementation of the present invention are described for specific case used herein, the explanation of above example
It is merely used to help understand the method and its core concept of the present invention.It should be pointed out that for the ordinary skill people of the art
Member for, without departing from the principle of the present invention, can with several improvements and modifications are made to the present invention, these improve and
Modification is also fallen within the protection scope of the claims of the present invention.
Claims (10)
1. a kind of preparation method of metal-surface nano structure, which is characterized in that including：
Solution containing charged nanoparticles is led into surface of workpiece；
Electrophoresis auxiliary electrode to the metal works and above the metal works is powered, in the metal works and institute
It states and forms electric field between electrophoresis auxiliary electrode so that the nano particle is adsorbed in the metal works table under electric field force effect
Face；
In vacuum environment or atmosphere of inert gases, laser facula irradiation is carried out to the surface of workpiece presumptive area, it is right
Nano particle progress in the presumptive area is laser sintered, so that the nano particle and the metal works is bonded and connects
It connects, obtaining surface has the metal works of nanostructure.
2. preparation method according to claim 1, which is characterized in that the solution position on the metal works
It is formed after electric field, further includes：
Shoot the distributed image that the nano particle is adsorbed on the surface of workpiece distribution situation；
The size and Orientation of the electric field is adjusted according to the distributed image, until the nano particle is in the metal
The distribution of workpiece surface meets Spreading requirements, then executes described to surface of workpiece presumptive area progress laser facula photograph
The operation penetrated.
3. preparation method according to claim 2, which is characterized in that it is described to the surface of workpiece presumptive area into
Row laser facula irradiates：
According to the contour shape of surface of workpiece and presumptive area position, transmitting range and the transmitting of laser facula are adjusted
Angle so that the laser facula exposes to surface of workpiece presumptive area.
4. preparation method according to any one of claims 1 to 3, which is characterized in that in the glue for being blended with nano particle
Before body mixed liquor is led on metal works, further include：
The nano particle in the solution is set uniformly to mix by ultrasonic vibration and/or magnetic agitation.
5. a kind of Preparation equipment of metal-surface nano structure, which is characterized in that for realizing any one of such as Claims 1-4
The preparation method, including：
The vacuum control unit of vacuum environment or inert gas environment is provided for the metal works；
Suspension suction tube for the solution containing charged nanoparticles to be led to the surface of workpiece；
It is connected between the metal works electrophoresis auxiliary cathode of formation electric field with power supply with the metal works,
In, the electric field is adsorbed in the surface of workpiece for controlling nano particle in the solution；
It is laser sintered for the nano particle progress to the surface of workpiece presumptive area, keep the nano particle viscous
Tie the laser in the surface of workpiece.
6. Preparation equipment according to claim 5, which is characterized in that further include solution mixing apparatus；
The solution mixing apparatus includes ultrasonic vibration installation and agitating device, for drawing the solution in suspension suction tube
Before to the surface of workpiece, the nano particle in the solution is made uniformly to mix.
7. Preparation equipment according to claim 6, which is characterized in that the solution mixing apparatus further includes solution cycle dress
It sets, after obtaining the metal works with nanostructure, the remaining solution of the surface of workpiece is adsorbed back
It receives.
8. Preparation equipment according to claim 5, which is characterized in that further include CCD video detecting devices, for shooting
State the distributed image that nano particle is adsorbed on the surface of workpiece distribution situation.
9. according to claim 5 to 8 any one of them Preparation equipment, which is characterized in that further include controlling the metal respectively
The motion control device of workpiece and electrophoresis auxiliary cathode movement, for by controlling metal works and electrophoresis auxiliary cathode
The size and Orientation of relative position, the electric field generated between the metal works and the electrophoresis auxiliary cathode is adjusted.
10. Preparation equipment according to claim 9, which is characterized in that further include for according to the surface of workpiece
Contour shape controls the laser of the laser and the metal works relative position and laser transmitting laser angle
Regulating system；
The motion control device is additionally operable to the relative position between control metal works and mask plate, so that the mask plate exists
Into line mask when the laser emits laser to metal works.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110424041A (en) * | 2019-06-20 | 2019-11-08 | 吴赞 | A kind of modulated modified surface preparation method for being used to strengthen boiling |
| CN113272061A (en) * | 2018-12-26 | 2021-08-17 | 3M创新有限公司 | Membranes for microfluidic devices, and methods of making the same |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1807685A (en) * | 2005-12-09 | 2006-07-26 | 浙江工业大学 | Nano coating process for metal surface |
| CN101519184A (en) * | 2008-02-29 | 2009-09-02 | 财团法人工业技术研究院 | Method for manufacturing application substrate through photo-thermal effect |
| CN102747363A (en) * | 2012-07-17 | 2012-10-24 | 河南理工大学 | Nano metal particle cold spraying technique |
| CN105807466A (en) * | 2016-05-11 | 2016-07-27 | 电子科技大学 | Production of photoelectric regulation metal nanoparticle and liquid crystal array structural box |
| CN106868570A (en) * | 2017-04-25 | 2017-06-20 | 广东工业大学 | A kind of metal surface modifying device |
| US20170198394A1 (en) * | 2016-01-13 | 2017-07-13 | Product Innovation and Engineering L.L.C. | Electrostatic powder feeder |
-
2018
- 2018-07-19 CN CN201810796630.2A patent/CN108671972A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1807685A (en) * | 2005-12-09 | 2006-07-26 | 浙江工业大学 | Nano coating process for metal surface |
| CN101519184A (en) * | 2008-02-29 | 2009-09-02 | 财团法人工业技术研究院 | Method for manufacturing application substrate through photo-thermal effect |
| CN102747363A (en) * | 2012-07-17 | 2012-10-24 | 河南理工大学 | Nano metal particle cold spraying technique |
| US20170198394A1 (en) * | 2016-01-13 | 2017-07-13 | Product Innovation and Engineering L.L.C. | Electrostatic powder feeder |
| CN105807466A (en) * | 2016-05-11 | 2016-07-27 | 电子科技大学 | Production of photoelectric regulation metal nanoparticle and liquid crystal array structural box |
| CN106868570A (en) * | 2017-04-25 | 2017-06-20 | 广东工业大学 | A kind of metal surface modifying device |
Non-Patent Citations (2)
| Title |
|---|
| 徐滨士，朱绍华等: "《无机非金属材料热工设备》", 31 December 2013, 武汉理工大学出版社, pages: 393 - 394 * |
| 徐滨士，朱绍华等: "表面工程的理论与技术", 华中科技大学出版社, pages: 129 - 131 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113272061A (en) * | 2018-12-26 | 2021-08-17 | 3M创新有限公司 | Membranes for microfluidic devices, and methods of making the same |
| CN113272061B (en) * | 2018-12-26 | 2023-03-10 | 3M创新有限公司 | Membranes for microfluidic devices, and methods of making the same |
| CN110424041A (en) * | 2019-06-20 | 2019-11-08 | 吴赞 | A kind of modulated modified surface preparation method for being used to strengthen boiling |
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