CN108663835A - A kind of liquid crystal apparatus detection method - Google Patents
A kind of liquid crystal apparatus detection method Download PDFInfo
- Publication number
- CN108663835A CN108663835A CN201810707912.0A CN201810707912A CN108663835A CN 108663835 A CN108663835 A CN 108663835A CN 201810707912 A CN201810707912 A CN 201810707912A CN 108663835 A CN108663835 A CN 108663835A
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- Prior art keywords
- defective locations
- display panel
- repair
- defect
- liquid crystal
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses a kind of liquid crystal apparatus detection methods, including：Check whether display panel has defective locations；After the defective locations for obtaining display panel by inspection, the defective locations of display panel are cut using the first focused ion beam generated by the first ion check device, to remove defect in defective locations and observe anomalad；Repair process is executed to defective locations using prosthetic device with after defect is stripped；Wherein, the check device for checking defective locations, the first ion apparatus for examination and repair and repair apparatus are sequentially sequentially arranged at this on same production line.
Description
Technical field
The present invention relates to liquid crystal apparatus production and studying technological domain more particularly to a kind of liquid crystal apparatus detection methods.
Background technology
It is existing in the related technology, liquid crystal display manufacturers are on a display panel held using the method for cutting fritter
Row FIB (focused ion beam) is analyzed, and during manufacturing TFT-LCD (Thin Film Transistor-LCD) panel, such as
There are POSS for fruit.The existing defects on the glass panel of display panel, glass panel must be cut into fritter and carry out FIB analyses.
Entire glass panel is thus inevitably wasted, the waste of display panel manufacture material is caused, wastes production cost.
Technical solution
The invention mainly solves the technical problem of providing a kind of liquid crystal apparatus detection methods, including：Check display panel
Whether there are defective locations；After the defective locations for obtaining display panel by inspection, using by the first ion check device
The first focused ion beam generated cuts the defective locations of display panel, to remove defect in defective locations and lack in the form of observing
It falls into；Repair process is executed to defective locations using prosthetic device with after defect is stripped；Wherein, for checking defective locations
Check device, the first ion apparatus for examination and repair and repair apparatus are sequentially sequentially arranged at this on same production line.
Optionally, check device is optical checking machine, and optical checking machine scans entire display panel using photographic camera
Image capture is carried out, and the data of capture images are compared with the qualification parameters of storage in the database.The optics of SE is examined
Survey machine to determine the defective locations of display panel, and observes the form of defect.
Optionally, check device is the second ion apparatus for examination and repair, the second focused ion that the second ion apparatus for examination and repair generates
Beam is imaged for scanning display panel, in the form of determining the defect of defective locations of display panel and sensor.
Optionally, it in the stripping process of the defect on defective locations, while being shelled using scanning electron microscope observation
From defective locations, with judge stripping result whether meet it is subsequent repair require real-time.
Optionally, wherein in the mistake that after defect is stripped defective locations are carried out with repair process using the prosthetic device
Cheng Zhong observes the defective locations repaired using scanning electron microscope, to monitor the process, and to the defect of display panel
Position carries out real-time repair process.
The beneficial effects of the invention are as follows：
The purpose of the present invention is to provide a kind of liquid crystal apparatus detection methods, and the display panel to solve the prior art produces
The problem of FIB analyses cause entire glass panel to waste in the process.
Description of the drawings
Fig. 1 is the flow chart according to the embodiment of the detection method of the disclosure.
Fig. 2 is the schematic configuration diagram that FIB analyses are executed according to the disclosure.
Embodiment
The preferred embodiments of the present invention will be described in detail below so that advantages and features of the invention can be easier to by
It will be appreciated by those skilled in the art that so as to make a clearer definition of the protection scope of the present invention.
As shown in Figure 1 and Figure 2, after by checking the defective locations 11 obtained on entire glass plate 10, using first from
Sub- apparatus for examination and repair 20, such as the first FIB devices, and specifically use the first focused ion beam for being generated by the first FIB devices Lai
Defective locations 11 on glass-cutting panel 10 remove defect in defective locations 11 and observe the form of defect；Then, using repairing
Apparatus for coating 40, such as laser CVD prosthetic appliance execute repair process after defect is stripped to defective locations 11.By defective bit
Check device, the first FIB devices and laser CVD prosthetic device is set to be sequentially arranged in same Inspection and Repair Production Line.By check device,
First FIB devices and laser CVD prosthetic device are sequentially arranged in same Inspection and Repair Production Line, to lacking on entire glass panel 10
It falls into position 11 to be checked and determined, and after the determination of defective locations 11.Since glass panel 10 can be on same production line
Subsequent processing is arrived in maintenance immediately, convenient for carrying out FIB analyses and cutting to the defective locations 11 on entire glass panel 10, and observes
The form of defect；Entire glass panel 10 is sent into the repair procedure of laser CVD prosthetic appliance to carry out repair process.Therefore,
By using technical scheme of the present invention, entire glass panel 10 can be maintained at defective position 11, and repair glass
Defective locations 11 on panel 10 are the glass panel product for meeting product quality to repair entire glass panel 10.TY
It is required that, it is possible to reduce the scrap rate of glass panel saves production cost, and in entire production process, staff is not required to
Glass panel 10 is carried or contacted, therefore the body of staff can be protected to pacify in the case where not increasing the workload of S
Entirely.
Before whether the entire glass panel 10 for checking display panel has defective locations 11, step S10 is first carried out,
Film coating processing is carried out to the entire glass panel 10 of display panel, to obtain film coating.Lacking at defective locations 11
Sunken is the defect of film coating.That is, FIB analyses and laser CVD reparation are the analysis to film coating defect and reparation.In this hair
In bright, selected using from vacuum evaporation coating processes, sputtering coating processes, plasma coating technique and ion coating processes
A kind of coating processes form film coating, or multiple coating processes for being selected from vacuum EVAP.By coating coating processes,
Sputtering coating processes, plasma spray coating process and ion coating processes are combined to form thin-film cladding layer.Checking glass panel
During defective locations 11 on 10, the check device used in detection method of the invention is optical detector, in step
In S20 operation is checked to execute using AOI machines.Specifically, AOI machines using photographic camera scan entire glass panel 10 with
It is simultaneously compared by capture images with the qualification parameters being stored in the database of AOI machines, so that it is determined that glass panel 10
On defective locations 11 and observe the form of defect.According to optical detection principle, to possibly being present at lacking on glass panel 10
It falls into position and 11 carries out photograph inspection, so as to intuitive and clearly display inspection result.
Glass panel 10 is on using the focused ion beam stripping glass panel 10 generated by the first FIB devices in order to prevent
Defective locations 11 when excessive stripping, remove defective locations at defect during, i.e., in the process.Shown in Fig. 1
Step S30 go to the defective locations on glass panel 10, while using the defective bit of scanning electron microscope observation stripping
It sets, to judge whether peel results meet the requirement of post laser CVDReP.When the stripping of the defective locations 11 on glass panel 10
When meeting the requirement of laser CVD reparation from degree, the first FIB equipment is stopped, and is then transported to glass panel 10 next
The work station of repair procedure, and carry out RR reparations using laser CVD prosthetic appliance.EPIR removes defective locations 11, makes reparation
Glass panel 10 afterwards meets the quality requirement of glass panel product, that is, the laser CVD for completing step S40 as shown in Figure 1 is repaiied
Multiple operation.During repairing defects of display panel position, it is also necessary to the repair process of monitoring defective locations in real time, so as to reality
When monitoring display panel defective locations reparation operation, prevent display panel generate failure.In rejected region repair process
It is dropped because of maloperation.Therefore, in scanning process, the defective bit of display board is monitored in real time using scanning electron microscope
It sets, the scanning electron microscope for the scanning electron microscope of real-time monitor and repairing process and for stripping.It monitors in real time
Process is identical microscope, and in this case, scanning electron microscope is movably mounted at the first ion apparatus for examination and repair
Between 20 and prosthetic device 40.When the defective locations to display panel carry out strip operation, scanning electron microscope and first
Ion apparatus for examination and repair 20 moves side by side, to realize the real-time monitoring to entire stripping process；On the defective locations of display panel
Matching operation moves scanning electron microscope and prosthetic device 40 side by side, to monitor repair process in real time.In another implementation
In example, in order to improve production efficiency, two scanning electron microscope are provided.In the process of the defective locations of Peeled display panel
Middle to use a scanning electron microscope, for monitoring strip operation in real time, scanning electron microscope is filled with the maintenance of the first ion
20 are set to fix side by side.Another scanning electron microscope for monitoring the reparation in the repair process of defects of display panel position in real time
Operation, another scanning electron microscope are fixed side by side with prosthetic device.In this manner it is possible to solve only there are one scanning electron
The problem of microscope is configured to sequential monitoring strip operation and is waited in the case of repairing operation, therefore each work station has
Relative independentability.
Specifically, the defective locations that defect is removed using laser CVD prosthetic device carry out repair process it
Afterwards, display panel (implementation of photoetching and step S50 as shown in Figure 1, in this field then are executed with subsequent photoetching process
The conventional lithographic of middle progress, therefore will not be repeated, to continue to complete the production process of display panel.
In the present invention, after being removed to defect, repair process is carried out to defective locations using prosthetic device, then
After executing subsequent photoetching process on a display panel, the repairing quality of the display panel after repairing is checked, and whether repair.
Judge whether the air quality of display panel is qualified.Display panel after reparation is repaired using subsequent photoetching process, and
The underproof display panel of repairing quality then carries out reprocessing Repair.In this way, the quality of the display panel into follow-up photoetching
Product Eligibility requirements are complied fully with, it is hereby ensured that the quality of the display panel of manufacture and final shipment to conform to quality requirements.
The sequencing of above example is only for ease of description, can not represent the quality of embodiment.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
With technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features；
And these modifications or replacements, various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (5)
1. a kind of liquid crystal apparatus detection method, which is characterized in that including：Check whether display panel has defective locations；Logical
Cross check obtain display panel defective locations after, using the first focused ion beam generated by the first ion check device Lai
The defective locations for cutting display panel, to remove defect in defective locations and observe anomalad；After being stripped in defect
Repair process is executed to defective locations using prosthetic device；Wherein, the check device for checking defective locations, the inspection of the first ion
Device and repair apparatus is repaiied sequentially to be sequentially arranged on same production line with this.
2. a kind of liquid crystal apparatus detection method according to claim 1, it is characterised in that：Wherein, check device is optics
Check machine, optical checking machine scan entire display panel using photographic camera and carry out image capture, and by the number of capture images
It is compared according to the qualification parameters of storage in the database.The optical detector of SE, to determine the defective locations of display panel,
And observe the form of defect.
3. a kind of liquid crystal apparatus detection method according to claim 1, it is characterised in that：Wherein, check device is second
Ion apparatus for examination and repair, the second focused ion beam that the second ion apparatus for examination and repair generates are imaged for scanning display panel, with
Determine the form of the defect of the defective locations of display panel and sensor.
4. a kind of liquid crystal apparatus detection method according to claim 1, it is characterised in that：Defect on defective locations
In stripping process, while the defective locations being stripped are observed using scanning electron microscope, whether the result to judge stripping is full
Foot is subsequent to repair desired real-time.
5. a kind of liquid crystal apparatus detection method according to claim 4, it is characterised in that：Wherein, it is filled using the reparation
It sets during carrying out repair process to defective locations after defect is stripped, is being repaired using scanning electron microscope observation
Defective locations, to monitor the process, and real-time repair process is carried out to the defective locations of display panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810707912.0A CN108663835A (en) | 2018-07-02 | 2018-07-02 | A kind of liquid crystal apparatus detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810707912.0A CN108663835A (en) | 2018-07-02 | 2018-07-02 | A kind of liquid crystal apparatus detection method |
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| Publication Number | Publication Date |
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| CN108663835A true CN108663835A (en) | 2018-10-16 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810707912.0A Withdrawn CN108663835A (en) | 2018-07-02 | 2018-07-02 | A kind of liquid crystal apparatus detection method |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109459897A (en) * | 2018-11-09 | 2019-03-12 | 深圳市华星光电技术有限公司 | A kind of array substrate method for repairing and mending and repair apparatus |
| CN112419970A (en) * | 2020-12-16 | 2021-02-26 | 安徽熙泰智能科技有限公司 | Micro-LED pixel repairing equipment and repairing method |
| CN112599713A (en) * | 2020-12-17 | 2021-04-02 | 安徽熙泰智能科技有限公司 | High-resolution microdisplay defect repairing method |
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| CN101246132A (en) * | 2007-02-13 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Focused ion beam equipment and focused ion beam detecting method |
| CN106483693A (en) * | 2016-12-30 | 2017-03-08 | 深圳市华星光电技术有限公司 | The detection means of mesomorphic state and its detection method in liquid crystal panel |
| CN106597700A (en) * | 2016-12-06 | 2017-04-26 | 惠科股份有限公司 | Detecting method and detecting equipment used by same |
| CN108231617A (en) * | 2016-12-21 | 2018-06-29 | Fei公司 | Defect analysis |
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2018
- 2018-07-02 CN CN201810707912.0A patent/CN108663835A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1941276A (en) * | 2005-09-26 | 2007-04-04 | 中芯国际集成电路制造(上海)有限公司 | Method for focus plasma beam mending with precisivelly positioning |
| CN101246132A (en) * | 2007-02-13 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Focused ion beam equipment and focused ion beam detecting method |
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| CN108231617A (en) * | 2016-12-21 | 2018-06-29 | Fei公司 | Defect analysis |
| CN106483693A (en) * | 2016-12-30 | 2017-03-08 | 深圳市华星光电技术有限公司 | The detection means of mesomorphic state and its detection method in liquid crystal panel |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109459897A (en) * | 2018-11-09 | 2019-03-12 | 深圳市华星光电技术有限公司 | A kind of array substrate method for repairing and mending and repair apparatus |
| CN109459897B (en) * | 2018-11-09 | 2021-07-06 | Tcl华星光电技术有限公司 | Array substrate repairing method and device |
| CN112419970A (en) * | 2020-12-16 | 2021-02-26 | 安徽熙泰智能科技有限公司 | Micro-LED pixel repairing equipment and repairing method |
| CN112599713A (en) * | 2020-12-17 | 2021-04-02 | 安徽熙泰智能科技有限公司 | High-resolution microdisplay defect repairing method |
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Application publication date: 20181016 |