CN108663543A - A kind of surface test device of resolution ratio fast tunable - Google Patents
A kind of surface test device of resolution ratio fast tunable Download PDFInfo
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- CN108663543A CN108663543A CN201810683017.XA CN201810683017A CN108663543A CN 108663543 A CN108663543 A CN 108663543A CN 201810683017 A CN201810683017 A CN 201810683017A CN 108663543 A CN108663543 A CN 108663543A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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Abstract
The present invention relates to the technical field of microscopy to material,A kind of surface test device of resolution ratio fast tunable,Including air accumulator,Tracheae,The vacuum cavity connected by cavity I and cavity II,Injector head,Driver I,Current divider,Driver II,Collimating aperture array,Displacement platform,Major bore,Detector I,Sample,Sample stage,Computer,Detector II,Bleeding point I,Vacuum pump group I,Bleeding point II,Vacuum pump group II,Driver I is fixed in cavity I and can be so that the movement of injector head three-dimensional,Driver II is fixed in cavity I and can be so that the movement of current divider three-dimensional,It is 40 microns of through-hole that major bore, which has internal diameter,,Zone plate for focusing of atomic beam is installed in through-hole,Displacement platform is fixed in cavity II and connects collimating aperture array,Displacement platform enables to collimating aperture array to be translated in x/y plane；The atom beam intensity that computer obtains reflecting from sample surfaces by detector I and detector II, and adjust injector head and current divider relative position.
Description
Technical field
The present invention relates to the technical field of microscopy to material, especially a kind of collimating aperture with special designing, and spray
Penetrating head can be according to a kind of automatic adjustable surface test of resolution ratio fast tunable of atom beam intensity at a distance from current divider
Device.
Background technology
In technical field of microscopy, general electron microscope can only be imaged conducting sample, and emit when its work
The energy of the electron beam gone out is higher, and certain more sensitive sample surfaces can be made by radiation injury.Atomic beam microscope can
Overcome disadvantages described above, rapid wear or insulated sample are imaged, generally use intert-gas atoms are as transmitting atom, inertia
Gas atom beam energy is very low, and chemical property is highly stable, these factors enable atomic beam microscope non-destructively to obtain
To sample surfaces image.The microscopical operation principle of atomic beam is：In high vacuum, free atom circulation overspray head and aperture
A branch of gas atom beam is formed to sample surfaces, is scanned in two dimensional surface with season sample or aperture, using mass filter
Detector detects the atom reflected by sample surfaces, and exports image density signal according to partial pressure.General atomic beam is aobvious
There is current divider, a part for the atom for the free jet form that injector head is launched after current divider by forming atom in micro mirror
Beam and directive sample.The microscopical resolution ratio of helium atom depends on the beam spot size of sample surfaces, the i.e. characteristic with atom line
It is related.Prior art defect one：Distance can influence beam behaviour between current divider and injector head, still, currently without atomic beam
Microscope equipment can realize that distance is accurately adjustable between current divider and injector head.Prior art defect two：Study different samples
Different characteristics it is required that atom beam microscope works under different resolution ratio, still, if to change original in an experiment
The microscopical resolution ratio of beamlet needs the vacuum environment of breaking plant to replace element, and complex steps simultaneously influence experiment progress, institute
Stating a kind of surface test device of resolution ratio fast tunable can solve the problems, such as.
Invention content
To solve the above-mentioned problems, it is differentiated purpose of the present invention is to change the beam spot size of sample surfaces and improve microscope
Rate, a kind of collimating aperture of the surface test device of resolution ratio fast tunable with special designing, and injector head-current divider
Distance is automatically adjustable according to atom beam intensity, to adapt to the kinetic energy of different gas atom type and different atomic beams, and
Can quickly and have stepwise change device resolution ratio, basic skills be by a series of array being made of collimating apertures install
In the path of atom line, change the effective sectional area of line with this, to change the beam spot size of sample surfaces and micro-
Mirror resolution ratio.
The technical solution adopted in the present invention is：
A kind of surface test device of resolution ratio fast tunable includes mainly air accumulator, tracheae, by cavity I and cavity
Vacuum cavity that II is connected into, injector head, driver I, current divider, driver II, collimating aperture array, displacement platform, major bore,
Detector I, sample, sample stage, computer, detector II, bleeding point I, vacuum pump group I, bleeding point II, vacuum pump group II, xyz
For three-dimensional system of coordinate, z-axis is horizontal direction, and the cavity I is connected with cavity II by current divider, and cavity II passes through bleeding point I
Vacuum pump group I is connected, cavity I is located at by bleeding point II connection vacuum pump group II, the injector head in cavity I, and injector head is logical
Tracheae to be crossed to connect with the air accumulator outside vacuum cavity, injector head outlet is opposite with the entrance of current divider, the collimating aperture array,
Displacement platform, major bore, detector I, detector II, sample and sample stage are respectively positioned in cavity II, and sample is fixed on sample stage, are visited
It surveys device I and detector II and is located at sample surfaces both sides, sample stage can be three-dimensional mobile, driver I, driver II, displacement
Platform, sample stage, detector I and detector II distinguish cable connection computer, major bore center be located at injector head export center with
On the extended line of the line at splitter inlet center, the outlet of sample surfaces face major bore；When gas atom passes through from air accumulator
Tracheae is transmitted to injector head and is injected cavity I in the form of free jet, and a part for atom line enters splitter inlet and leads to
It crosses current divider and enters cavity II, sample surfaces are mapped to after collimating aperture array and major bore can be passed sequentially through, to form original
The transmission path of beamlet stream, driver I are fixed in cavity I and connect injector head, and driver I enables to injector head three-dimensional to move
Dynamic, driver II is fixed in cavity I and connects current divider, and driver II enables to current divider three-dimensional to move, major bore tool
It is 40 microns of through-hole to have internal diameter, and the zone plate for focusing of atomic beam is equipped in the through-hole, and displacement platform is fixed on cavity
In II and collimating aperture array is connected, displacement platform enables to collimating aperture array to be translated in x/y plane；Computer can lead to
It crosses detector I and detector II and obtains the atom beam intensity reflected from sample surfaces, and control driver I and driver II
Adjust the relative position of injector head and current divider；Collimating aperture array is made of silicon nitride material, and it is z-axis to have a series of axial directions
Direction and the different collimating aperture of internal diameter, collimating aperture size include 50 microns, 20 microns and 10 microns, each collimating aperture
Center is located on the node of the two-dimensional grid in an x/y plane, and the distance between adjacent node is 200 microns；Injector head internal diameter
It it is 5 microns, current divider internal diameter is 100 microns, and injector head and current divider initial distance are 10 millimeters.
It is using a kind of method and step that the surface test device of resolution ratio fast tunable measures：
One, opens vacuum pump group II and vacuum pump group I, is vacuumized respectively to cavity I and cavity II so that true in cavity I
Sky is better than 10-1Vacuum is better than 10 in Pa, cavity II-2Pa；
For two, air accumulators by tracheae output gas to injector head, gas atom enters cavity I in the form of free jet, and
After current divider, cavity II is entered with atomic beam manifold formula；
Three, atom lines are mapped to sample surfaces after passing sequentially through collimating aperture array and major bore；
Four, need control bit moving stage to move according to experiment, to adjust collimating aperture array position so that the aperture position of needs
In on atom beam path；
Five, injector heads are adjusted with current divider position, the specific steps are：
Coarse scanning is carried out first, and control driver I makes injector head with stepping 0.1dskThe random scanning in x/y plane, often
The direction of one stepping is the directions x or y, scanning range 3dsk×3dsk, wherein dskIt is the internal diameter of current divider, when detecting signal peak
When intensity is the three times of back end noise, stop scanning, back end noise institute when not inputting for detector I and detector II
The signal level detected；
Then close scanning is carried out, control driver I makes injector head make one week by axis of z-axis direction in x/y plane
Circular motion is defined as an annular stepping, often terminates an annular stepping, and computer obtains detector I in the annular stepping
Increase 0.01d with the radius of the mean intensity of the signal of detector II acquisitions, the circumference of next annular steppingsk；Annular stepping
Radius of a circle range from 0.01dskTo 0.15dsk, when the averaged magnitude obtained in a certain annular stepping is than previous ring
When the averaged magnitude decrement that shape stepping obtains is more than 2%, stop close scanning, close scanning can be repeated as many times, to obtain
Better injector head and current divider relative position；
Injector head and current divider distance further are adjusted in the directions z, control driver I makes injector head with stepping 10dsk
Z-axis direction is moved, moving range 100dsk, and the signal strength moved more every time, finally stop sweeping in the strongest position of signal
It retouches；
Six, sample stages translation in 1 × 1 micron range, so that can be by atom in 1 × 1 micron range of sample surfaces
Beam direct irradiation；
Seven, enter detector I and detector II, detector I and detector II institutes by the part of atoms that sample surfaces reflect
It obtains data and inputs computer
Eight, computer processing datas, obtain the relevant information of sample surfaces.
The beneficial effects of the invention are as follows：
The present invention can rapidly change the effective sectional area of line, to change the beam spot size and device of sample surfaces
Resolution ratio, it is easy to operate and time saving without the vacuum environment in breaking plant；In addition, device can be in kinds of experiments item
It works under part, is suitable for the kinetic energy of different gas atom type and different atomic beams, increases its sample that can be measured
Type and surveyed physical quantity range.
Description of the drawings
It is further illustrated with reference to the figure of the present invention：
Fig. 1 is schematic diagram of the present invention.
In figure, 1. air accumulators, 2. tracheaes, 3. vacuum cavities, 3-1. cavitys I, 3-2. cavity II, 4. injector heads, 5. drivings
Device I, 6. current dividers, 7. driver II, 8. collimating aperture arrays, 9. displacement platforms, 10. major bores, 11. detector I, 12. samples,
13. sample stage, 14. computers, 15. detector II, 16. bleeding point I, 17. vacuum pump group I, 18. bleeding point II, 19. vacuum pumps
Group II.
Specific implementation mode
If Fig. 1 is schematic diagram of the present invention, a kind of surface test device of resolution ratio fast tunable includes mainly gas storage
Tank (1), tracheae (2), vacuum cavity (3), injector head (4), the driver I connected by cavity I (3-1) and cavity II (3-2)
(5), current divider (6), driver II (7), collimating aperture array (8), displacement platform (9), major bore (10), detector I (11), sample
Product (12), sample stage (13), computer (14), detector II (15), bleeding point I (16), vacuum pump group I (17), bleeding point II
(18), (19) vacuum pump group II, xyz are three-dimensional system of coordinate, and z-axis is horizontal direction, the cavity I (3-1) and cavity II (3-2)
It is connected by current divider (6), cavity II (3-2) is passed through by bleeding point I (16) connection vacuum pump group I (17), cavity I (3-1)
Bleeding point II (18) connection vacuum pump group II (19), the injector head (4) are located in cavity I (3-1), and injector head (4) passes through gas
Pipe (2) is connect with the air accumulator (1) of vacuum cavity (3) outside, and injector head (4) exports, the standard opposite with the entrance of current divider (6)
Straight apertures array (8), displacement platform (9), major bore (10), detector I (11), detector II (15), sample (12) and sample stage
(13) it is respectively positioned in cavity II (3-2), sample (12) is fixed on sample stage (13), and detector I (11) and detector II (15) divide
Not Wei Yu sample (12) surface both sides, sample stage (13) can be three-dimensional mobile, driver I (5), driver II (7), displacement platform
(9), sample stage (13), detector I (11) and detector II (15) difference cable connection computers (14), major bore (10) center
On the extended line of injector head (4) export center and the line of current divider (6) entrance center, sample (12) surface face main aperture
Diameter (10) exports；When gas atom is transmitted to injector head (4) from air accumulator (1) by tracheae (2) and is penetrated in the form of free jet
Entering cavity I (3-1), a part for atom line enters current divider (6) entrance and enters cavity II (3-2) by current divider (6),
It is mapped to sample (12) surface after collimating aperture array (8) and major bore (10) can be passed sequentially through, to form atom line
Transmission path, driver I (5) are fixed in cavity I (3-1) and connect injector head (4), and driver I (5) enables to injector head
(4) three-dimensional mobile, driver II (7) is fixed in cavity I (3-1) and connects current divider (6), and driver II (7) is enabled to
Current divider (6) is three-dimensional mobile, and it is 40 microns of through-hole that major bore (10), which has internal diameter, is equipped with for atomic beam in the through-hole
The zone plate of focusing, displacement platform (9) are fixed in cavity II (3-2) and connect collimating aperture array (8), and displacement platform (9) can
So that collimating aperture array (8) translates in x/y plane；Computer (14) can pass through detector I (11) and detector II (15)
The atom beam intensity from sample (12) surface reflection is obtained, and controls driver I (5) and driver II (7) to adjust injection
The relative position of head (4) and current divider (6)；Collimating aperture array (8) is made of silicon nitride material, and it is z to have a series of axial directions
Axis direction and the different collimating aperture of internal diameter, collimating aperture size include 50 microns, 20 microns and 10 microns, each collimating aperture
Center be located on the node of the two-dimensional grid in x/y plane, the distance between adjacent node is 200 microns；Injector head
(4) internal diameter is 5 microns, and current divider (6) internal diameter is 100 microns, and injector head (4) and current divider (6) initial distance are 10 millimeters.
The present invention has the collimating aperture of special designing, can rapidly change the effective sectional area of line, to change
The beam spot size of sample surfaces and the resolution ratio of device, experimental procedure is easy, in addition, its injector head and current divider distance are according to original
Beamlet intensity of flow is automatically adjustable, can be suitable for the kinetic energy of different gas atom type and different atomic beams so that device
It can work under various experimental conditions.
Claims (3)
1. a kind of surface test device of resolution ratio fast tunable includes mainly air accumulator (1), tracheae (2), by cavity I (3-1)
The vacuum cavity (3) that is connected into cavity II (3-2), injector head (4), driver I (5), current divider (6), driver II (7),
Collimating aperture array (8), displacement platform (9), major bore (10), detector I (11), sample (12), sample stage (13), computer
(14), detector II (15), bleeding point I (16), vacuum pump group I (17), bleeding point II (18), vacuum pump group II (19), xyz are
Three-dimensional system of coordinate, z-axis are horizontal direction, and the cavity I (3-1) and cavity II (3-2) are connected by current divider (6), cavity II
(3-2) passes through bleeding point II (18) connection vacuum pump groups by bleeding point I (16) connection vacuum pump group I (17), cavity I (3-1)
II (19), the injector head (4) are located in cavity I (3-1), and injector head (4) passes through tracheae (2) and the storage of vacuum cavity (3) outside
Gas tank (1) connect, injector head (4) outlet it is opposite with the entrance of current divider (6), the collimating aperture array (8), displacement platform (9),
Major bore (10), detector I (11), detector II (15), sample (12) and sample stage (13) are respectively positioned in cavity II (3-2),
Sample (12) is fixed on sample stage (13), and detector I (11) and detector II (15) are located at sample (12) surface both sides, sample
Sample platform (13) can be three-dimensional mobile, driver I (5), driver II (7), displacement platform (9), sample stage (13), detector I (11)
Cable connection computer (14), major bore (10) center are located at injector head (4) export center and divide respectively with detector II (15)
On the extended line for flowing the line of device (6) entrance center, sample (12) surface face major bore (10) outlet；When gas atom is from storage
Gas tank (1) is transmitted to injector head (4) by tracheae (2) and is injected cavity I (3-1) in the form of free jet, and the one of atom line
Part enters current divider (6) entrance and enters cavity II (3-2) by current divider (6), can pass sequentially through collimating aperture array
(8) and after major bore (10) it is mapped to sample (12) surface, to form the transmission path of atom line,
It is characterized in that：Driver I (5) is fixed in cavity I (3-1) and connects injector head (4), and driver I (5) enables to spray
It is three-dimensional mobile to penetrate head (4), driver II (7) is fixed in cavity I (3-1) and connects current divider (6), and driver II (7) can
So that current divider (6) is three-dimensional mobile, it is 40 microns of through-hole that major bore (10), which has internal diameter, is equipped in the through-hole for original
The zone plate that beamlet focuses, displacement platform (9) are fixed in cavity II (3-2) and connect collimating aperture array (8), displacement platform (9)
Collimating aperture array (8) is enabled to be translated in x/y plane；Computer (14) can pass through detector I (11) and detector II
(15) the atom beam intensity from sample (12) surface reflection is obtained, and controls driver I (5) and driver II (7) to adjust
The relative position of injector head (4) and current divider (6).
2. a kind of surface test device of resolution ratio fast tunable according to claim 1, it is characterized in that：Collimating aperture battle array
Row (8) are made of silicon nitride material, are z-axis direction and the different collimating aperture of internal diameter, collimating aperture ruler with a series of axial directions
Very little includes 50 microns, 20 microns and 10 microns, and the center of each collimating aperture is located at the section of the two-dimensional grid in an x/y plane
On point, the distance between adjacent node is 200 microns.
3. a kind of surface test device of resolution ratio fast tunable according to claim 1, it is characterized in that：Injector head (4)
Internal diameter is 5 microns, and current divider (6) internal diameter is 100 microns, and injector head (4) and current divider (6) initial distance are 10 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810683017.XA CN108663543A (en) | 2018-06-16 | 2018-06-16 | A kind of surface test device of resolution ratio fast tunable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810683017.XA CN108663543A (en) | 2018-06-16 | 2018-06-16 | A kind of surface test device of resolution ratio fast tunable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108663543A true CN108663543A (en) | 2018-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810683017.XA Pending CN108663543A (en) | 2018-06-16 | 2018-06-16 | A kind of surface test device of resolution ratio fast tunable |
Country Status (1)
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130001413A1 (en) * | 2011-06-29 | 2013-01-03 | Philip James Witham | Neutral Particle Microscope |
-
2018
- 2018-06-16 CN CN201810683017.XA patent/CN108663543A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130001413A1 (en) * | 2011-06-29 | 2013-01-03 | Philip James Witham | Neutral Particle Microscope |
Non-Patent Citations (3)
| Title |
|---|
| M. BARR: "A design for a pinhole scanning helium microscope", NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH B, pages 76 - 80 * |
| R. FLATABØ: "Fast resolution change in neutral helium atom microscopy", REVIEW OF SCIENTIFIC INSTRUMENTS, pages 053702 - 1 * |
| S. D. EDER: "A free jet (supersonic), molecular beam source with automatized, 50 nm precision nozzle-skimmer positioning", REVIEW OF SCIENTIFIC INSTRUMENTS, pages 093303 - 1 * |
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