CN108640674A - A kind of method of constant temperature and humidity rapid draing ITO target green body - Google Patents
A kind of method of constant temperature and humidity rapid draing ITO target green body Download PDFInfo
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- CN108640674A CN108640674A CN201810652754.3A CN201810652754A CN108640674A CN 108640674 A CN108640674 A CN 108640674A CN 201810652754 A CN201810652754 A CN 201810652754A CN 108640674 A CN108640674 A CN 108640674A
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- green body
- ito target
- target green
- constant temperature
- humidity
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
- C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6022—Injection moulding
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/606—Drying
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a kind of methods of constant temperature and humidity rapid draing ITO target green body, and steps are as follows：1) the ITO target green body that injection forming obtains is placed on the backing plate in constant temperature and humidity room, controlled at 25~35 DEG C, relative humidity be 86%~96%, dried medium flow velocity is 0.5~2m/s, dry 24~30h；2) be 80%~90% controlled at 30~50 DEG C, relative humidity, dried medium flow velocity is 1~2.4m/s, dry 10~20h；3) be 40%~60% controlled at 50~80 DEG C, relative humidity, dried medium flow velocity is 1~2.5m/s, dry 2~5h.The present invention has the characteristics that drying time is short, drying temperature is low, low energy consumption, improves production efficiency, and it is possible to prevente effectively from seasoning defect drying defect occurs in ITO target green body.
Description
Technical field
The present invention relates to a kind of methods of constant temperature and humidity rapid draing ITO target green body.
Background technology
In recent years, display panel is more universal in people's lives, and performance is more powerful.And it manufactures and goes as display panel
The dosage of the critical material of industry --- ITO target also increases therewith, and the performance requirement of ITO target is also gradually increased.System
The target laid siege to as target producer for the high-end target of large scale, high density, low poisoning.
ITO target be typically by ITO target green body through degreasing, be sintered.Currently, the forming method of ITO target green body
There are mainly two types of：1) molding+cold isostatic compaction：It will be by being granulated the ITO powders handled dry method pre-molding in steel mold
A green body is obtained, then is transferred into isostatic cool pressing equipment and is molded, obtains ITO target green body；2) injection forming or
Slurry pouring molding：Slurry is injected porous using compressed air as pressure medium with the uniform slurry of ITO powder preparation properties
Mold by outside the most of moisture press filtration to mold cavity in slurry under grouting pressure, then through demoulding, drying, obtains ITO target
Green body.
ITO target blank density prepared by molding+cold isostatic compaction is uniform, by being easy to obtain after subsequent densification process
Highdensity ITO sintered bodies, but compression moulding is be easy to cause in target material blank body residual stress, in subsequent densification process
It easily deforms, crackle is susceptible to when preparing large-sized ITO target green body, the defects of green body is divided into, and cannot prepare
Complex-shaped ITO target green body.
Injection forming or slurry pouring molding can prepare large scale, complex-shaped ITO target green body, and there is no moldings
+ plus cold isostatic compaction residual stress problems, green body is not easy to deform in subsequent densification process, need not use spraying
The equipment of the costliness such as drying machine, great tonnage press and cold isostatic press, but slurry is high for the performance requirement of ITO powders used,
And have the slurry that solid content is high, viscosity is low, is conducive to injection forming and be difficult to prepare, and the material of mold body be easy to fall off and
ITO target green body is polluted, ITO target green body is also easy to produce crackle or cracking during drying, and drying time is long.
The drying of ITO target green body is to prepare one of important procedure of ITO target, and the drying means of science is conducive to eliminate
The defects of crackle that ITO target green body prepared by injection forming generates in the drying process, cracking, and when can shorten dry
Between, fraction defective is reduced, production efficiency is improved.However, few people study the drying means of ITO target green body, it is existing
Drying means can not ensure not cause seasoning defect drying defect while rapid draing at all.Such as：CN 103787650A are disclosed
A method of preparing ITO target, the ITO target green body of preparation needs first drying at room temperature 3~6 days, then 20~30 DEG C of dryings 4~
7 days, then 80~150 DEG C of dryings 2~3 days, drying time is long, and efficiency is low, and drying temperature is high, and energy consumption is big, and in drying process not
The humidity of dry environment is controlled, humidity is easy the influence of climate condition, and drying process is in a kind of uncontrolled
State, it is easy to seasoning defect drying defect occur.
Invention content
The purpose of the present invention is to provide a kind of methods of constant temperature and humidity rapid draing ITO target green body.
The technical solution used in the present invention is：
A kind of method of constant temperature and humidity rapid draing ITO target green body, steps are as follows：
1) the ITO target green body that injection forming obtains is placed on the backing plate in constant temperature and humidity room, controlled at 25~
35 DEG C, relative humidity be 86%~96%, dried medium flow velocity is 0.5~2m/s, dry 24~30h；
2) be 80%~90% controlled at 30~50 DEG C, relative humidity, dried medium flow velocity is 1~2.4m/s, is done
Dry 10~
20h；
3) be 40%~60% controlled at 50~80 DEG C, relative humidity, dried medium flow velocity is 1~2.5m/s, is done
Dry 2~
5h。
Step 1) the ITO target green body is prepared by ITO powders, dispersant, binder and water.
The ITO powders, dispersant, binder, water mass ratio be 1：(0.001~0.03)：(0.001~0.03)：
(0.3~0.5).
The grain size of the ITO powders is 20~400nm.
The dispersant is at least one of polycarboxylic-acid dispersant, dispersant containing acrylic.
The binder is at least one of crylic acid resin binder, polyvinyl alcohol binder.
The grouting pressure of the step 1) injection forming is 0.1~0.4MPa.
The relative density of step 1) the ITO target green body is 58%~63%.
The material of the step 1) backing plate is one kind in corundum-mullite, calcium silicates, surface roughness Ra<8μm。
Step 1)~3) dried medium is air.
The beneficial effects of the invention are as follows：The present invention has the characteristics that drying time is short, drying temperature is low, low energy consumption, improves
Production efficiency, and it is possible to prevente effectively from there is seasoning defect drying defect in ITO target green body.
1) present invention can accurately control drying temperature, relative humidity and dried medium flow velocity in drying process, can be with
It needs to set drying program according to dry；
2) present invention can eliminate influence of the outside climatic to drying process so that the drying of ITO target green body can be by
It is carried out according to the program of setting；
3) present invention is not influenced by outside climatic fluctuation, it is possible to prevente effectively from ITO target green body cracks；
4) drying time can be greatly shortened in the present invention, reduce drying temperature, reduce energy consumption for drying, improve life
Produce efficiency；
5) present invention can reduce the equilibrium water conten of ITO target green body after drying, it is possible to reduce the water in ITO target green body
Divide in follow-up degreasing process to the influence of degreasing equipment.
Specific implementation mode
A kind of method of constant temperature and humidity rapid draing ITO target green body, steps are as follows：
1) the ITO target green body that injection forming obtains is placed on the backing plate in constant temperature and humidity room, controlled at 25~
35 DEG C, relative humidity be 86%~96%, dried medium flow velocity is 0.5~2m/s, dry 24~30h；
2) be 80%~90% controlled at 30~50 DEG C, relative humidity, dried medium flow velocity is 1~2.4m/s, is done
Dry 10~
20h；
3) be 40%~60% controlled at 50~80 DEG C, relative humidity, dried medium flow velocity is 1~2.5m/s, is done
Dry 2~
5h。
Preferably, step 1) the ITO target green body is prepared by ITO powders, dispersant, binder and water.
Preferably, the ITO powders, dispersant, binder, water mass ratio be 1：(0.001~0.03)：(0.001~
0.03)：(0.3~0.5).
Preferably, the grain size of the ITO powders is 20~400nm.
Preferably, the dispersant is at least one of polycarboxylic-acid dispersant, dispersant containing acrylic.
Preferably, the binder is at least one of crylic acid resin binder, polyvinyl alcohol binder.
Preferably, the grouting pressure of the step 1) injection forming is 0.1~0.4MPa.
Preferably, mold used by the step 1) injection forming is one kind in resin die, gypsum mold.
Preferably, the relative density of step 1) the ITO target green body is 58%~63%.
Preferably, the material of the step 1) backing plate is one kind in corundum-mullite, calcium silicates, surface roughness Ra<
8μm。
Preferably, the flexural strength of the step 1) backing plate is 30~70MPa, and Young's modulus is 45~60GPa, and thickness is
10~38mm.
Preferably, step 1)~3) dried medium is air.
The present invention is made further explanation and description with reference to specific embodiment.
Embodiment 1：
A kind of method of constant temperature and humidity rapid draing ITO target green body, steps are as follows：
1) the ITO target green body that injection forming obtains is placed on the corundum-mullite backing plate in constant temperature and humidity room (anti-folding is strong
Spend 40MPa, Young's modulus 50GPa, thickness 30mm) on, it is controlled at 25 DEG C, relative humidity 86%, air velocity
0.8m/s, dry 28h；
2) controlled at 47 DEG C, relative humidity 80%, air velocity 1.2m/s, dry 13h；
3) controlled at 69 DEG C, relative humidity 45%, air velocity 1.1m/s, dry 3h.
After tested, the ITO target green body obtained after drying without cracking, flawless, without deformation, equilibrium water conten is
1.5%.
The preparation method of step 1) the ITO target green body is as follows：By the ITO powders of 100 mass parts (grain size 70~
100nm), the deionized water of the polycarboxylic-acid dispersant of 2 mass parts and 30 mass parts mixes, and ball milling 20h adds 0.6 mass
The polyvinyl alcohol binder of part, ultrasonic (power 1kW) are uniformly mixed, and obtain slurry, then slurry is noted with the pressure of 0.3MPa
Enter in gypsum mold, demoulded after pressurize 3h, obtains ITO target green body.
Embodiment 2：
A kind of method of constant temperature and humidity rapid draing ITO target green body, steps are as follows：
1) the ITO target green body that injection forming obtains is placed on the corundum-mullite backing plate in constant temperature and humidity room (anti-folding is strong
Spend 40MPa, Young's modulus 50GPa, thickness 30mm) on, it is controlled at 30 DEG C, relative humidity 91%, air velocity
0.5m/s, dry 27h；
2) controlled at 45 DEG C, relative humidity 85%, air velocity 1.1m/s, dry 15h；
3) controlled at 75 DEG C, relative humidity 44%, air velocity 1.1m/s, dry 2h.
After tested, the ITO target green body obtained after drying without cracking, flawless, without deformation, equilibrium water conten is
1.4%.
The preparation method of step 1) the ITO target green body is as follows：By the ITO powders of 100 mass parts (grain size 70~
100nm), the deionized water of the polycarboxylic-acid dispersant of 1 mass parts and 40 mass parts mixes, and ball milling 18h adds 0.6 mass
The polyvinyl alcohol binder of part, ultrasonic (power 1kW) are uniformly mixed, and obtain slurry, then slurry is noted with the pressure of 0.27MPa
Enter in gypsum mold, demoulded after pressurize 3h, obtains ITO target green body.
Embodiment 3：
A kind of method of constant temperature and humidity rapid draing ITO target green body, steps are as follows：
1) the calcium silicates backing plate (flexural strength being placed on the ITO target green body that injection forming obtains in constant temperature and humidity room
40MPa, Young's modulus 50GPa, thickness 20mm) on, controlled at 35 DEG C, relative humidity 96%, air velocity 0.8m/
S, dry 28h；
2) controlled at 47 DEG C, relative humidity 90%, air velocity 1.2m/s, dry 13h；
3) controlled at 69 DEG C, relative humidity 45%, air velocity 1.1m/s, dry 3h.
After tested, the ITO target green body obtained after drying without cracking, flawless, without deformation, equilibrium water conten is
1.5%.
The preparation method of step 1) the ITO target green body is as follows：By the ITO powders of 100 mass parts (grain size 70~
100nm), the deionized water of the polycarboxylic-acid dispersant of 0.1 mass parts and 50 mass parts mixes, and ball milling 20h adds 0.6 matter
The polyvinyl alcohol binder of part is measured, ultrasonic (power 1kW) is uniformly mixed, obtains slurry, then by slurry with the pressure of 0.29MPa
It injects in gypsum mold, is demoulded after pressurize 3h, obtain ITO target green body.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (10)
1. a kind of method of constant temperature and humidity rapid draing ITO target green body, it is characterised in that：Steps are as follows：
1) the ITO target green body that injection forming obtains is placed on the backing plate in constant temperature and humidity room, controlled at 25~35 DEG C,
Relative humidity is 86%~96%, dried medium flow velocity is 0.5~2m/s, dry 24~30h；
2) be 80%~90% controlled at 30~50 DEG C, relative humidity, dried medium flow velocity is 1~2.4m/s, dry 10
~20h；
3) be 40%~60% controlled at 50~80 DEG C, relative humidity, dried medium flow velocity is 1~2.5m/s, dry 2~
5h。
2. the method for constant temperature and humidity rapid draing ITO target green body according to claim 1, it is characterised in that：Step 1)
The ITO target green body is prepared by ITO powders, dispersant, binder and water.
3. the method for constant temperature and humidity rapid draing ITO target green body according to claim 2, it is characterised in that：The ITO
Powder, dispersant, binder, water mass ratio be 1：(0.001~0.03)：(0.001~0.03)：(0.3~0.5).
4. the method for constant temperature and humidity rapid draing ITO target green body according to claim 2 or 3, it is characterised in that：It is described
The grain size of ITO powders is 20~400nm.
5. the method for constant temperature and humidity rapid draing ITO target green body according to claim 2 or 3, it is characterised in that：It is described
Dispersant is at least one of polycarboxylic-acid dispersant, dispersant containing acrylic.
6. the method for constant temperature and humidity rapid draing ITO target green body according to claim 2 or 3, it is characterised in that：It is described
Binder is at least one of crylic acid resin binder, polyvinyl alcohol binder.
7. according to the method for constant temperature and humidity rapid draing ITO target green body described in claim 1, it is characterised in that：Step 1) institute
The grouting pressure for stating injection forming is 0.1~0.4MPa.
8. the method for constant temperature and humidity rapid draing ITO target green body according to claim 1, it is characterised in that：Step 1)
The relative density of the ITO target green body is 58%~63%.
9. the method for constant temperature and humidity rapid draing ITO target green body according to claim 1, it is characterised in that：Step 1)
The material of the backing plate is one kind in corundum-mullite, calcium silicates, surface roughness Ra<8μm。
10. the method for constant temperature and humidity rapid draing ITO target green body according to claim 1, it is characterised in that：Step 1)
~3) dried medium is air.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810652754.3A CN108640674A (en) | 2018-06-22 | 2018-06-22 | A kind of method of constant temperature and humidity rapid draing ITO target green body |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810652754.3A CN108640674A (en) | 2018-06-22 | 2018-06-22 | A kind of method of constant temperature and humidity rapid draing ITO target green body |
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| CN201810652754.3A Pending CN108640674A (en) | 2018-06-22 | 2018-06-22 | A kind of method of constant temperature and humidity rapid draing ITO target green body |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112209724A (en) * | 2020-09-24 | 2021-01-12 | 西安交通大学 | Shape-preserving drying method for 3D printing direct-writing formed ceramic blank |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH026332A (en) * | 1987-11-26 | 1990-01-10 | Agency Of Ind Science & Technol | Production of indium oxide-tim oxide powder |
| CN101890752A (en) * | 2009-05-22 | 2010-11-24 | 光洋应用材料科技股份有限公司 | Die for slip casting, using method thereof and green-ware and ITO target prepared by die |
| CN103787650A (en) * | 2014-02-27 | 2014-05-14 | 中国船舶重工集团公司第七二五研究所 | Method for preparing ITO (Indium Tin Oxide) target |
| CN103868340A (en) * | 2012-12-14 | 2014-06-18 | 广东中鹏热能科技有限公司 | Method for drying ceramic blank and energy-saving rapid drying kiln used in method |
| CN107814561A (en) * | 2017-11-29 | 2018-03-20 | 郑州大学 | A kind of method for preparing high-density oxide ceramic target |
| CN108046767A (en) * | 2017-12-08 | 2018-05-18 | 郑州大学 | A kind of method for preparing oxide ceramics target material blank body |
-
2018
- 2018-06-22 CN CN201810652754.3A patent/CN108640674A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH026332A (en) * | 1987-11-26 | 1990-01-10 | Agency Of Ind Science & Technol | Production of indium oxide-tim oxide powder |
| CN101890752A (en) * | 2009-05-22 | 2010-11-24 | 光洋应用材料科技股份有限公司 | Die for slip casting, using method thereof and green-ware and ITO target prepared by die |
| CN103868340A (en) * | 2012-12-14 | 2014-06-18 | 广东中鹏热能科技有限公司 | Method for drying ceramic blank and energy-saving rapid drying kiln used in method |
| CN103787650A (en) * | 2014-02-27 | 2014-05-14 | 中国船舶重工集团公司第七二五研究所 | Method for preparing ITO (Indium Tin Oxide) target |
| CN107814561A (en) * | 2017-11-29 | 2018-03-20 | 郑州大学 | A kind of method for preparing high-density oxide ceramic target |
| CN108046767A (en) * | 2017-12-08 | 2018-05-18 | 郑州大学 | A kind of method for preparing oxide ceramics target material blank body |
Non-Patent Citations (1)
| Title |
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| 王松等: "高密度氧化铟锡（ITO）靶材制备工艺的研究进展", 《材料导报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112209724A (en) * | 2020-09-24 | 2021-01-12 | 西安交通大学 | Shape-preserving drying method for 3D printing direct-writing formed ceramic blank |
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Effective date of registration: 20190627 Address after: 528137 No. 5 Qili Avenue South, Leping Town, Sanshui District, Foshan City, Guangdong Province Applicant after: Guangdong Kaisheng PV Ttechnology Research Institute Co.,Ltd. Applicant after: China building materials Bengbu Glass Industry Design & Research Institute Co., Ltd. Address before: 528137 No. 5 Qili Avenue South, Leping Town, Sanshui District, Foshan City, Guangdong Province Applicant before: Guangdong Kaisheng PV Ttechnology Research Institute Co.,Ltd. |
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