CN108639383B - Intelligent flexible actuator based on distributed flexible structure - Google Patents
Intelligent flexible actuator based on distributed flexible structure Download PDFInfo
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- CN108639383B CN108639383B CN201810461473.XA CN201810461473A CN108639383B CN 108639383 B CN108639383 B CN 108639383B CN 201810461473 A CN201810461473 A CN 201810461473A CN 108639383 B CN108639383 B CN 108639383B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
- B64G1/24—Guiding or controlling apparatus, e.g. for attitude control
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Abstract
An intelligent distributed flexure-based actuator comprising: the device comprises an upper flexible hinge (2), a support rod (3), a connecting block (4), a lower flexible hinge (6), an upper diaphragm spring (7), a rotor mounting cover (9), a voice coil motor (10), an outer cylinder (11), a stator mounting cover (12), a lower diaphragm spring (13), a displacement sensor measured piece (14), a displacement sensor (15) and a bottom cover (16). After the intelligent flexible actuator is installed, vibration isolation, disturbance vibration suppression and accurate pointing adjustment of the intelligent flexible actuator are achieved through measurement feedback of a large-range high-precision eddy current displacement sensor (15) and control output of a large-range fast-response voice coil motor (10). The intelligent flexible actuator adopts a structural form of double membrane springs and double flexible hinges, has high control precision and good expansibility, and can be widely applied to the field of ultrahigh precision, ultrahigh stability and hypersensitive control of spacecrafts.
Description
Technical Field
The invention relates to the field of spacecraft control, in particular to an intelligent flexible actuator.
Background
In recent years, along with the demands of a series of future tasks such as ground observation with extremely high resolution, high-stability tracking of space moving targets, high-resolution imaging and the like, extremely high requirements are put forward on the precision and the stability of a satellite control system.
The method is limited by the limitations of measurement precision and measurement bandwidth of traditional attitude sensors (star sensors, gyros) and the like, a traditional low-bandwidth attitude control system cannot effectively inhibit the influence of various disturbance torques in a wide frequency domain, and the technical scheme of realizing precise and stable directional control of effective loads based on satellite attitude control is difficult to meet the requirements of very high-precision directional control and stable control under the prior technical condition; therefore, a design scheme for installing the active platform on the load and the star is provided, and high performance indexes of the load are achieved through vibration isolation, disturbance suppression and accurate pointing of the actuators in the active platform.
However, the actuators currently used generally only have vibration sensors (e.g., force sensors and acceleration sensors) and thus only have an active vibration isolation function, but not a precise pointing adjustment function. And the traditional common hinge (such as a spherical hinge and a Hooke hinge) is adopted at the joint of the actuator, so that the control output precision of the actuator is limited due to the existence of friction and gaps. And with the continuous increase of satellite load and the continuous improvement of agility, mobility and rapid stability, the current small-stroke active vibration isolation actuator can not meet the application requirements.
Based on the scheme, the intelligent flexible actuator based on the distributed flexible structure is provided, high-frequency vibration isolation is realized through a flexible (flexible) part, and disturbance vibration suppression and high-precision pointing are realized through closed-loop intelligent active control of a sensor and a voice coil motor.
Disclosure of Invention
The technical problem solved by the invention is as follows: the defects of the prior art are overcome, an intelligent flexible actuator based on a distributed flexible structure is provided, compared with the prior art, the axial rigidity of the intelligent flexible actuator is provided by adopting double membrane springs, the axial movement of the actuator is strictly ensured, the double flexible hinges are adopted, the constraint freedom degree is released, the transmission of the axial movement of the intelligent flexible actuator to the six-freedom-degree movement of a platform consisting of a plurality of intelligent flexible actuators is provided, the large-stroke high-precision control output of the intelligent flexible actuator is jointly realized through a large-stroke quick-response voice coil motor actuator and a large-stroke high-precision eddy current sensor, the vibration isolation, the disturbance vibration suppression and the precise pointing of a load are realized simultaneously, and the problems of ultrahigh precision, ultrahigh stability and hypersensitive control of a satellite are effectively solved.
The technical scheme adopted by the invention is as follows: an intelligent distributed flexure-based actuator comprising: the device comprises an upper flexible hinge, a support rod, a connecting block, a lower flexible hinge, an upper diaphragm spring, a limiting block, a rotor mounting cover, a voice coil motor, an outer cylinder, a stator mounting cover, a lower diaphragm spring, a displacement sensor measured piece, a displacement sensor and a bottom cover; the two ends of the voice coil motor are respectively connected with a rotor mounting cover and a stator mounting cover, and the rotor mounting cover is connected with the inner ring of the upper diaphragm spring through a central boss; the end part of a boss at the center of the rotor mounting cover is connected with one end of the lower flexible hinge; the other end of the lower flexible hinge is connected with one end of the support rod through a connecting block; the other end of the supporting rod is connected with one end of an upper flexible hinge, and the other end of the flexible hinge is connected with an external structure; the outer ring of the upper membrane spring is fixed at one end port of the outer cylinder; the stator mounting cover is arranged on the inner wall of the outer barrel; the stator mounting cover is provided with a hole along the central axis, the central column of the measured piece of the displacement sensor sequentially passes through the lower membrane spring inner ring, the central hole of the stator mounting cover and the central hole of the voice coil motor and is connected with the rotor mounting cover, and the middle part of the measured surface of the sensor is fixedly connected with the lower membrane spring inner ring; the outer ring of the lower diaphragm spring is arranged on the inner wall of the outer barrel; the displacement sensor is arranged on the bottom cover; the bottom cover is arranged at the other end of the outer cylinder and is connected with an external structure.
The voice coil motor comprises a voice coil motor rotor and a voice coil motor stator, and a through hole is formed in the central axis of the voice coil motor stator; the rotor of the voice coil motor is connected with the rotor mounting cover, and the stator of the voice coil motor is fixed on the stator mounting cover.
The lower flexible hinge limiting cylinder is arranged outside the lower flexible hinge to limit the maximum rotation angle of the lower flexible hinge; the end part of a boss at the center of the rotor mounting cover penetrates through a center hole at the end face of the lower flexible hinge limiting cylinder and then is connected with one end of the lower flexible hinge, and the lower flexible hinge limiting cylinder is pressed and fixed.
The flexible hinge limiting device comprises an upper flexible hinge limiting cylinder, wherein the upper flexible hinge limiting cylinder is arranged outside the upper flexible hinge and used for limiting the maximum rotating angle of the upper flexible hinge; the upper flexible hinge and the external structure are jointly pressed on the upper flexible hinge limiting cylinder.
The upper flexible hinge and the lower flexible hinge are the same in structural form and material, and the upper flexible hinge and the lower flexible hinge are made of titanium alloy;
the upper diaphragm spring and the lower diaphragm spring are the same in structural form and material; the upper diaphragm spring and the lower diaphragm spring are made of beryllium bronze.
The working stroke of the voice coil motor is +/-6 mm, the maximum output force is 450N, and the force output precision is 0.02N.
The displacement sensor is an eddy current displacement sensor, the measurement range is +/-5 mm, and the resolution is 0.3 mu m; the central line of the displacement sensor probe coincides with the central line of the intelligent flexible actuator, and a distance exists between the upper end of the probe and a measured piece of the displacement sensor.
The displacement sensor measured piece comprises a measured disc and a center column located in the center of the measured disc, the diameter of the measured disc is more than three times of that of a displacement sensor probe, and the displacement sensor measured piece is made of aluminum alloy.
The four limiting blocks penetrate through the side wall of the outer barrel and are evenly fixed on the outer barrel along the circumferential direction, and the limiting blocks are used for limiting the rotor mounting cover and the voice coil motor rotor.
Compared with the prior art, the invention has the following advantages:
(1) the method adopts the form of opening a hole in the center of the voice coil motor, and the measured surface of the sensor passes through the voice coil motor through the center hole, thereby ensuring that the eddy current displacement sensor and the measured surface are positioned on the central axis of the intelligent flexible actuator, and improving the measurement and control precision of the intelligent flexible actuator.
(2) The method adopts a separated double-membrane spring structure form, not only provides the axial rigidity of the intelligent flexible actuator, but also limits the radial movement and relative rotation between the rotor and the stator of the voice coil motor, and avoids collision caused by too small gap between the rotor and the stator of the voice coil motor when the intelligent flexible actuator works.
(3) The method adopts a structural form that a supporting rod is added in the middle of a double flexible hinge, and the position of a connecting hinge point of an intelligent flexible actuator and an external structure is changed by changing the length of the supporting rod, so that the configuration of an active platform formed by a plurality of intelligent flexible actuators is convenient to adjust.
(4) The method adopts a structural form of double flexible hinges, increases the radial rigidity of the intelligent flexible actuator, and greatly improves the mechanical property of the anti-emission active section of the intelligent flexible actuator.
Drawings
FIG. 1 is a cross-sectional view of an intelligent flexible actuator of the present invention;
FIG. 2 is a view of a voice coil motor according to the present invention;
FIG. 3 is a schematic view of a diaphragm spring according to the present invention;
FIG. 4 is a schematic view of a lower diaphragm spring of the present invention;
FIG. 5 is a schematic axial limiting diagram of the intelligent flexible actuator of the present invention;
FIG. 6 is a top view of an axial limit of the intelligent flexible actuator of the present invention;
FIG. 7 is a schematic view of the corner limits of the upper flexible hinge of the present invention;
fig. 8 is a schematic view of the corner limit of the lower flexible hinge of the present invention.
Detailed Description
The invention is further described with reference to the following drawings and specific embodiments.
As shown in fig. 1, 5 and 6, an intelligent flexible actuator based on a distributed flexible structure comprises: the device comprises an upper flexible hinge limiting cylinder 1, an upper flexible hinge 2, a support rod 3, a connecting block 4, a lower flexible hinge limiting cylinder 5, a lower flexible hinge 6, an upper membrane spring 7, a limiting block 8, a rotor mounting cover 9, a voice coil motor 10, an outer cylinder 11, a stator mounting cover 12, a lower membrane spring 13, a displacement sensor measured piece 14, a displacement sensor 15 and a bottom cover 16.
As shown in fig. 2, the voice coil motor 10 includes a voice coil motor mover 17 and a voice coil motor stator 18, and a through hole with a diameter of 10mm is formed on an axial line of the voice coil motor stator 18; the working stroke of the voice coil motor 10 is +/-6 mm, the maximum output force is 450N, and the force output precision is 0.02N.
As shown in fig. 7 and 8, the upper flexible hinge limiting cylinder 1 and the lower flexible hinge limiting cylinder 5 are installed outside the upper flexible hinge 2 and the lower flexible hinge 6 to limit the maximum rotation angle of the flexible hinge, so as to protect the flexible hinge from fatigue damage caused by continuous large deformation; the upper flexible hinge 2 and the lower flexible hinge 6 have the same structural form and material; the maximum rotation angle of the flexible hinge is limited while the normal working rotation angle of the actuator is met by adjusting the rotation angle limiting distance s; in this design, s is 2 mm. The upper flexible hinge 2 and the lower flexible hinge 6 are required to have high axial rigidity and shear rigidity and small bending rigidity and torsional rigidity. The bending rigidity of the cylinder is greatly reduced through linear cutting of the cylinder, and the rigidity in the other directions is reduced less, so that the rotational rigidity in the vertical axial direction is far lower than the rigidity in the other directions. The design of the linear cutting path can ensure that the virtual rotating shaft is coincident with the design rotating shaft of the flexible hinge chain. The upper flexible hinge 2 and the lower flexible hinge 6 should be made of materials with small elastic modulus and large yield limit as much as possible. The bending stiffness of the upper flexible hinge 2 and the lower flexible hinge 6 is 60Nm/rad in this embodiment; the material of the upper flexible hinge 2 and the lower flexible hinge 6 is titanium alloy.
As shown in fig. 3 and 4, the upper diaphragm spring 7 is connected with the moving part and the fixed part of the intelligent flexible actuator through an upper diaphragm spring inner ring 19 and an upper diaphragm spring outer ring 20; the lower diaphragm spring 13 is connected with a moving part and a fixed part of the intelligent flexible actuator through a lower diaphragm spring inner ring 21 and a lower diaphragm spring outer ring 22, and the upper diaphragm spring 7 and the lower diaphragm spring 13 are matched to limit radial motion and relative rotation between the voice coil motor rotor 17 and the voice coil motor stator 18; the upper diaphragm spring 7 and the lower diaphragm spring 13 are identical in structural form and material, the axial stiffness of the actuator is realized by designing the axial stiffness of the single diaphragm spring, and the axial stiffness of the single diaphragm spring in the design is 15N/mm; the material of the diaphragm spring is beryllium bronze.
The displacement sensor 15 is an eddy current displacement sensor, the measuring range is +/-5 mm, and the resolution is 0.3 mu m; the displacement sensor measured piece 14 comprises a measured disc and a center column located in the center of the measured disc, the diameter of the measured disc is more than three times of that of a probe of the displacement sensor 15, and the displacement sensor measured piece is made of aluminum alloy.
The limiting block 8, the rotor mounting cover 9 and the voice coil motor rotor 17 are combined to realize axial limiting of the intelligent flexible actuator. As shown in the figure, the axial limiting distance d is adjusted to meet the normal axial stroke of the actuator, and simultaneously, the maximum axial stroke of the actuator is limited, so that a displacement sensor probe is protected, and the mutual collision between a rotor of the voice coil motor and a stator of the voice coil motor is avoided; in this design d is 5 mm.
The connection form and the working principle of the intelligent flexible actuator are as follows: the voice coil motor rotor 17 is connected with a rotor mounting cover 9, and the rotor mounting cover 9 is connected with an upper membrane spring inner ring 19 through a screw; the upper end threads of the rotor mounting cover 9 penetrate through the lower flexible hinge limiting cylinder 5 and are connected with the lower end internal thread holes of the lower flexible hinges 6 through the upper end external threads, and the lower flexible hinge limiting cylinder 5 is tightly pressed and fixed; the upper end of the lower flexible hinge 6 is connected with the lower end of the support rod 3 through the external thread of the connecting block 4; the external thread at the upper end of the supporting rod 3 is connected with the internal thread hole at the lower end of the upper flexible hinge 2, the upper end of the upper flexible hinge 2 is connected with an external structure through the internal thread hole, and the upper flexible hinge limiting cylinder 1 is pressed tightly; the upper diaphragm spring outer ring 20 is fixed on the outer cylinder 11 through screws; the four limiting blocks 8 penetrate through the side wall of the outer barrel 11 and are fixed on the outer barrel 11 through screws; the voice coil motor stator 18 is fixed on the stator mounting cover 12 through a screw, the stator mounting cover 12 is fixedly connected with the screw penetrating through the side wall of the outer cylinder 11 through a circumferential threaded hole, and the stator mounting cover 12 is fixed on the side wall of the outer cylinder 11; a hole is formed in the central axis of the stator mounting cover 12, a measured displacement sensor 14 penetrates through a lower membrane spring inner ring 22, a central hole of the stator mounting cover 12 and a central hole of the voice coil motor 10 and is fixedly connected with an internal threaded hole at the lower end of the rotor mounting cover 9 through an external thread at the upper end, and the middle part of the measured displacement sensor 14 is fixedly connected with the lower membrane spring inner ring 21 through a screw; the lower diaphragm spring outer ring 22 is fixed at the bottom end of the outer cylinder 11 through screws; the displacement sensor 15 is arranged on the bottom cover through a screw, the center line of a probe of the displacement sensor 15 is ensured to be superposed with the center line of the whole intelligent flexible actuator, and the distance from the upper end of the probe to a measured surface 14 of the sensor is 6 mm; the outer barrel 11 and the bottom cover 16 are connected with an external structure through screws; the mover mounting cover 9 connected with the voice coil motor mover 17, the upper diaphragm spring inner ring 19, the lower flexible hinge 6, the lower flexible hinge limiting cylinder 5, the connecting block 4, the supporting rod 3, the upper flexible hinge 2, the upper flexible hinge limiting cylinder 1, the displacement sensor tested piece 14 and the lower diaphragm spring inner ring 21 jointly form a moving part of the intelligent flexible actuator, and the stator mounting cover 12 connected with the voice coil motor stator 18, the upper diaphragm spring outer ring 20, the lower diaphragm spring outer ring 22, the outer cylinder 11, the bottom cover 16 and the displacement sensor 15 jointly form a fixed part of the intelligent flexible actuator. The displacement sensor 15 positioned on the fixed part of the intelligent flexible actuator can accurately measure the relative motion displacement of the displacement sensor measured piece 14 positioned on the moving part of the intelligent flexible actuator, when the intelligent flexible actuator moves to a target position, a control algorithm, such as a PID control algorithm, can be designed through the deviation between the measurement result of the displacement sensor 15 and the target position, and then the current is output through the controller and the voice coil motor driver to drive the voice coil motor to generate a control force, so that the moving part linearly moves relative to the fixed part and reaches the target position. After the installation is finished, the large-stroke high-precision output of the intelligent flexible actuator is realized through the measurement of a large-stroke high-precision eddy current displacement sensor 15 and the control output of a large-stroke quick-response voice coil motor 10, the measurement range of the displacement sensor is +/-5 mm, and the resolution ratio is 0.3 mu m. The voice coil motor has a working stroke of +/-6 mm, the maximum output force of 450N and the force output precision of 0.02N.
The intelligent flexible actuator is arranged between the satellite body and the load in a mode that a plurality of actuators are connected in parallel, so that vibration isolation, disturbance vibration suppression and accurate pointing adjustment of the load are realized.
Those skilled in the art will appreciate that those matters not described in detail in the present specification are well known in the art.
Claims (10)
1. An intelligent flexible actuator based on a distributed flexible structure, comprising: the device comprises an upper flexible hinge (2), a support rod (3), a connecting block (4), a lower flexible hinge (6), an upper membrane spring (7), a limiting block (8), a rotor mounting cover (9), a voice coil motor (10), an outer cylinder (11), a stator mounting cover (12), a lower membrane spring (13), a displacement sensor measured piece (14), a displacement sensor (15) and a bottom cover (16); two ends of a voice coil motor (10) are respectively connected with a rotor mounting cover (9) and a stator mounting cover (12), and the rotor mounting cover (9) is connected with an upper membrane spring inner ring (19) through a central boss; the end part of a center boss of the rotor mounting cover (9) is connected with one end of the lower flexible hinge (6); the other end of the lower flexible hinge (6) is connected with one end of the support rod (3) through a connecting block (4); the other end of the supporting rod (3) is connected with one end of the upper flexible hinge (2), and the other end of the upper flexible hinge (2) is connected with an external structure; the upper membrane spring outer ring (20) is fixed at one end port of the outer cylinder (11); the stator mounting cover (12) is mounted on the inner wall of the outer cylinder (11); the stator mounting cover (12) is provided with a hole along the central axis, the central column of the displacement sensor measured piece (14) sequentially passes through the lower membrane spring inner ring (21), the central hole of the stator mounting cover (12) and the central hole of the voice coil motor (10) and is connected with the rotor mounting cover (9), and the middle part of the displacement sensor measured piece (14) is fixedly connected with the lower membrane spring inner ring (21); the lower diaphragm spring outer ring (22) is arranged on the inner wall of the outer cylinder (11); the displacement sensor (15) is arranged on the bottom cover (16); the bottom cover (16) is arranged at the other end of the outer cylinder (11) and is connected with an external structure.
2. The intelligent flexible actuator based on distributed compliant structure as claimed in claim 1, wherein: the voice coil motor (10) comprises a voice coil motor rotor (17) and a voice coil motor stator (18), and a through hole is formed in the axial line of the voice coil motor stator (18); a rotor (17) of the voice coil motor is connected with a rotor mounting cover (9), and a stator (18) of the voice coil motor is fixed on a stator mounting cover (12).
3. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the device is characterized by further comprising a lower flexible hinge limiting cylinder (5), wherein the lower flexible hinge limiting cylinder (5) is arranged outside the lower flexible hinge (6) to limit the maximum rotating angle of the lower flexible hinge (6); the end part of a center boss of the rotor mounting cover (9) penetrates through a center hole of the end face of the lower flexible hinge limiting cylinder (5) and then is connected with one end of the lower flexible hinge (6), and the lower flexible hinge limiting cylinder (5) is compressed and fixed.
4. The intelligent flexure actuator based on distributed flexure structures of claim 3, wherein: the flexible hinge limiting device is characterized by further comprising an upper flexible hinge limiting cylinder (1), wherein the upper flexible hinge limiting cylinder (1) is arranged outside the upper flexible hinge (2) to limit the maximum rotating angle of the upper flexible hinge (2); the upper flexible hinge (2) and an external structure jointly compress the upper flexible hinge limiting cylinder (1).
5. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the upper flexible hinge (2) and the lower flexible hinge (6) are made of the same material, and the upper flexible hinge (2) and the lower flexible hinge (6) are made of titanium alloy.
6. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the upper diaphragm spring (7) and the lower diaphragm spring (13) are the same in structural form and material; the upper diaphragm spring (7) and the lower diaphragm spring (13) are made of beryllium bronze.
7. The intelligent flexible actuator based on distributed compliant structures as claimed in claim 2, wherein: the voice coil motor (10) has the working stroke of +/-6 mm, the maximum output force of 450N and the force output precision of 0.02N.
8. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the displacement sensor (15) is an eddy current displacement sensor, the measuring range is +/-5 mm, and the resolution is 0.3 mu m; the central line of the probe of the displacement sensor (15) is superposed with the central line of the intelligent flexible actuator, and a distance exists between the upper end of the probe and a measured piece (14) of the displacement sensor.
9. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the displacement sensor measured piece (14) comprises a measured disc and a center column located in the center of the measured disc, the diameter of the measured disc is more than three times of that of a probe of the displacement sensor (15), and the displacement sensor measured piece (14) is made of aluminum alloy.
10. The intelligent flexible actuator based on the distributed flexible structure as claimed in claim 1 or 2, wherein: the four-shaft-drive-type motor rotor is characterized by further comprising limiting blocks (8), wherein the four limiting blocks (8) penetrate through the side wall of the outer barrel (11), are uniformly fixed on the outer barrel (11) along the circumferential direction and are used for limiting the rotor mounting cover (9) and the voice coil motor rotor (17).
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| CN201810461473.XA CN108639383B (en) | 2018-05-15 | 2018-05-15 | Intelligent flexible actuator based on distributed flexible structure |
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| CN201810461473.XA CN108639383B (en) | 2018-05-15 | 2018-05-15 | Intelligent flexible actuator based on distributed flexible structure |
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| CN108639383B true CN108639383B (en) | 2020-03-24 |
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| CN111791079B (en) * | 2020-05-22 | 2021-08-31 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN112100733B (en) * | 2020-07-23 | 2023-08-29 | 北京控制工程研究所 | Main and passive integrated flexible actuator flexible link and actuating unit integrated stress balancing method based on three-super control |
| CN112046790B (en) * | 2020-07-27 | 2022-04-12 | 北京空间飞行器总体设计部 | Variable-rigidity large-bearing vibration isolator suitable for vibration isolation of satellite equipment |
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| JP2003278830A (en) * | 2002-01-15 | 2003-10-02 | Mitsubishi Heavy Ind Ltd | Rotor stabilizer |
| US6896441B1 (en) * | 2002-08-14 | 2005-05-24 | Lockheed Martin Corporation | Automated latching device with active damping |
| CN101404437A (en) * | 2008-11-11 | 2009-04-08 | 天津三星电机有限公司 | Linear vibration motor |
| KR101388726B1 (en) * | 2011-09-30 | 2014-04-28 | 삼성전기주식회사 | Linear Vibration Motor |
| CN102820761A (en) * | 2012-07-30 | 2012-12-12 | 北京航空航天大学 | Voice coil actuator based on non-linear membrane spring |
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