CN107538231B - Multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and combined device - Google Patents

Multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and combined device Download PDF

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CN107538231B
CN107538231B CN201710899963.3A CN201710899963A CN107538231B CN 107538231 B CN107538231 B CN 107538231B CN 201710899963 A CN201710899963 A CN 201710899963A CN 107538231 B CN107538231 B CN 107538231B
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platform
screw
rod
locking
upper platform
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CN107538231A (en
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杨斌堂
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The invention provides a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and a combined device, which comprise: the device comprises a load unloading device (1), a driving support rod (2), a connecting base (3), an upper platform (4), a locking device (5), a positioning support tool (6) and a lower platform (7); the load unloading device (1) is connected with the upper platform (4) and separated from the lower platform (7); the connecting base (3) which is fastened and connected on the upper platform (4) is connected with the connecting base (3) which is fastened and connected on the lower platform (7) through the driving support rod (2); the locking device (5) is connected between the upper platform (4) and the lower platform (7); the positioning support tool (6) is arranged on the lower platform (7), and the driving support rod (2) is obliquely embedded in a semi-arc groove of a support edge of the positioning support tool (6). The invention integrates intelligent sensing, has the characteristics of multi-degree-of-freedom precision positioning, active and passive vibration isolation, safe locking, convenient assembly, strong bearing capacity and the like.

Description

Multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and combined device
Technical Field
The invention relates to the technical field of precision driving and vibration control devices, in particular to a multi-freedom-degree self-sensing precision pointing vibration isolation integrated platform.
Background
The pointing device is a device capable of accurately adjusting the target load according to a desired pose, and the vibration isolation device is generally used for reducing the negative influence of vibration generated by the operation of numerous and complicated parts on the target load. In the fields of aerospace, genetic engineering, biomedicine, optical engineering, ultra-precision machining, manufacturing and the like, the micro-nano level space pose of a target load has extremely strict requirements on one hand, and the interference of external vibration on the target load is also strictly limited on the other hand. The traditional mechanical device seriously reduces the final output precision due to the complicated transmission chain and the accumulated error of each transmission link; meanwhile, the additional series vibration isolation devices limit further application in the related field in terms of space volume and mass.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and a combined device.
The invention provides a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform, which comprises: the device comprises a load unloading device, a driving support rod, a connecting base, an upper platform, a locking device, a positioning support tool and a lower platform;
the load unloading device is connected with the upper platform and separated from the lower platform;
the connecting base fixedly connected to the upper platform is connected with the connecting base fixedly connected to the lower platform through the driving support rod;
the locking device is connected between the upper platform and the lower platform;
the positioning support tool is arranged on the lower platform, and the driving support rod is obliquely embedded into the arc-shaped groove of the support edge of the positioning support tool.
Preferably, the driving strut includes: the device comprises a flexible hinge, an upper round pin, an integrated sensing device, a ring rib driving outer sleeve, a lower round pin, a flexible amplifying mechanism, an output rod, a driving coil, a giant magnetostrictive rod, a magnetic yoke and a safety supporting beam;
the flexible amplifying mechanism is fixedly arranged on one end of the annular rib driving outer sleeve, the input end of the flexible amplifying mechanism is inserted into the output rod and is fastened through a square pin, and the output end of the flexible amplifying mechanism is matched with one end of a flexible hinge through a screw and is locked through an upper round pin;
the other end of the flexible hinge is inserted into a first fine thread hole or a second fine thread hole of a connecting base arranged on the upper platform through a shaft of a polished rod at one end of a screw rod at one end, and then is screwed up through a bolt;
the safety supporting beam is tightly connected to one end of the annular rib driving outer sleeve, and the integrated sensing device is embedded into a middle beam groove of the safety supporting beam;
the output rod is inserted into the driving coil wrapped by the magnetic conduction yoke and is contacted and pressed with the giant magnetostrictive rod wrapped in the driving coil; the giant magnetostrictive rod is in a pre-tightening state;
the other end of the outer sleeve driven by the annular rib is matched with one end of the other flexible hinge through a screw rod and locked through a lower round pin; the other end of the other flexible hinge is inserted into a first fine thread threaded hole or a second fine thread threaded hole of a connecting base arranged on the lower platform through a shaft of a polished rod at one end of a screw rod at one end, and then is screwed up through a bolt.
Preferably, the load shedding apparatus comprises: the universal ball with the screw, the end cover with the circular groove, the support base, the linear bearing and the unloading spring are arranged;
the upper end screw of the universal ball with the screw is arranged on the upper platform, and the lower end universal ball of the universal ball with the screw is inserted into the circular groove of the circular groove end cover;
the unloading spring is arranged in the supporting base, the linear bearing is arranged at the top end of the supporting base through a bolt, and the annular groove end cover is inserted into the axial bearing and compresses the unloading spring.
Preferably, the locking device comprises: the device comprises a micrometer screw with a spindle lock horizontally, a support base and a micrometer screw with a spindle lock vertically;
the horizontal micrometer screw with spindle lock and the vertical micrometer screw with spindle lock are arranged on the supporting base;
the supporting base is fixedly connected with the lower platform;
the horizontal micrometer screw with spindle lock and the vertical micrometer screw with spindle lock are matched with the corresponding hole groove of the upper platform;
through carrying out precession, revolve the retreat to the micrometer caliper of horizontal area spindle lock, the micrometer caliper of vertical area spindle lock, can extend and shorten the corresponding spindle to realize locking or adjustment location with the hole groove that the upper mounting plate corresponds.
Preferably, the connection base includes: the first fine thread threaded hole, the second fine thread threaded hole, the first locking bolt hole, the second locking bolt hole and the bottom end bulge;
the first fine thread threaded hole and the second fine thread threaded hole are respectively matched with two ends of different driving support rods and are respectively inserted into the first locking bolt hole and the second locking bolt hole through locking bolts for locking;
the bottom end bulge is matched and positioned with the groove at the corresponding position of the lower platform or the upper platform.
Preferably, the upper platform and the lower platform are respectively and tightly provided with a connecting base at the symmetrical triangular positions to form six connecting bases;
among the six connection bases, one drive strut is connected between circumferentially adjacent connection bases, forming a total of six drive struts.
Preferably, the three sets of locking devices are arranged in an equilateral triangle.
The combined device provided by the invention comprises a plurality of multi-degree-of-freedom self-sensing precise pointing vibration isolation integrated platforms, wherein the multi-degree-of-freedom self-sensing precise pointing vibration isolation integrated platforms are distributed according to different directions.
Compared with the prior art, the invention has the following advantages:
the invention considers space drive positioning and vibration isolation simultaneously, and abandons the traditional scheme that a set of vibration isolation platform is connected in series in front of the positioning platform. The integrated level is high, the volume and the mass are small, the pose adjustment is precise, the stroke amplification factor is high, and the device has the advantages of safe locking, strong bearing capacity, self-sensing, intellectualization and the like; the above features are not only reflected in the structure, mounting, fixing and working principle of the device, but also in the following details:
1. the invention can adopt the spatial cube layout, can realize the structural decoupling to the maximum extent, and can effectively reduce the difficulty of later active control.
2. The invention provides a design scheme of a one-dimensional driver (driving support rod) which has the advantages of driving displacement amplification, vibration isolation and self-sensing embedding. The one-dimensional driver mainly comprises a flexible displacement amplifying mechanism, a driving active element, a safety supporting beam and a self-sensing module. During working, on one hand, the self-sensing module detects the displacement signal of the output end in real time, the self-adaptive control algorithm is used for calculating the control quantity, and the current signal (or the voltage signal) is controlled in a closed loop mode, so that the precise pointing and the low-frequency vibration suppression are realized; on the other hand, through multi-objective optimization design, the flexible displacement amplification mechanism not only can realize the corresponding displacement amplification function, but also has the medium-high frequency vibration isolation function, and when external vibration interference is transmitted to the flexible amplification mechanism, the disturbance is effectively reduced, so that the influence on the pointing accuracy is reduced.
3. The drivers (driving support rods) are combined in different numbers to realize multi-degree-of-freedom precise pointing and vibration isolation, for example, 2 drivers can realize two-degree-of-freedom precise pointing and vibration isolation; the three-degree-of-freedom precise pointing and vibration isolation can be realized by adopting 3 drivers; the 6 drivers can realize the precise pointing, vibration isolation and the like with six degrees of freedom.
4. Through system integration design, the device has sensing function, the structure size of the device can be effectively reduced, meanwhile, the detection position is at a theoretical output position point, and the measurement precision is improved.
5. The driving active element can widely adopt the existing mature technology, such as giant magnetostriction, piezoelectricity, electromagnetism and other driving mechanisms, and the application range is improved.
6. The design of the outer wall of the annular rib type driving mechanism can improve the heat dissipation performance of the driving mechanism, so that the requirement for long-time space pose positioning is met.
7. The flexible amplification mechanism of the transmission link adopts multi-objective optimization design, only the requirement of displacement output amplification is not considered any more, but on the basis of meeting the stroke requirement, the rigidity is reduced, the flexibility is improved, and therefore vibration isolation of medium-frequency and high-frequency vibration is achieved by utilizing the flexibility.
8. The hinge in the transmission link adopts a flexible hinge technology, so that the gap error caused by introducing the traditional Hooke hinge and the like is reduced, and the space pose precision is improved.
9. On the motion transmission chain, each spare part cooperation position department has all set up the spacing locking of pin to alleviate long-term motion and the not hard up phenomenon that the vibration arouses.
10. The magnetic circuit yoke of the driving mechanism is made of high-permeability materials, so that energy loss can be effectively reduced.
11. The safety supporting beams are designed at the symmetrical positions of the flexible amplifying mechanisms, on one hand, the safety supporting beams can replace the flexible amplifying mechanisms to bear risks when bearing external impact, on the other hand, the intelligent sensing devices can be integrated in the grooves at the central positions, and compared with external sensing, the synchronism of the safety supporting beams and the driving supporting rods can be kept, so that measured data are more accurate.
12. The designed load unloading device adopts the matching of the universal ball with the screw and the end cover with the circular groove, so that the universal ball can be in rolling contact with the groove surface in the motion stroke, the friction is reduced, and the limiting effect is realized.
13. The connection base is formed by integrated processing, the fine threads can guarantee the tightness of the polished rod connected with the two ends of the driving supporting rod, and meanwhile, the difficulty of later-stage assembly can be reduced by adopting a bolt locking mode.
14. The designed positioning support tool can ensure the mounting consistency of the platform, thereby avoiding the problem of inconsistent system response caused by assembly errors of all the supporting rods and improving the reliability of the platform; on the other hand, the assembly process is simplified due to the introduction of the supporting tool, and the assembly efficiency of the platform can be effectively improved.
15. The designed positioning support tool is provided with semi-arc grooves on two mutually vertical edges, so that the clamping and positioning of the driving support rod during initial assembly are facilitated; after the platform is assembled, the fastening screws are loosened, and the positioning and supporting tool can be horizontally withdrawn, so that the spatial pose of each support rod during the working of the platform is not influenced.
16. The multi-degree-of-freedom self-sensing precision-pointing vibration isolation integrated platform can be used for carrying out multi-objective optimization design on a flexible mechanism according to different load targets and assembling different numbers of driving support rods on the basis of utilizing different driving elements, so that expected space degree-of-freedom pose adjustment is realized.
17. The active and passive suppression of low, medium and high frequency vibration is also considered while the spatial degree of freedom pose is adjusted, the application range is wide, the performance is reliable, and the device has wide application prospects in the fields of aerospace, biomedicine, optical engineering, ultra-precision machining, manufacturing and the like.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a schematic view of the overall structure of the present invention.
Figure 2 is an alternative drive strut arrangement of the present invention.
Fig. 3 shows a solution of the load shedding apparatus according to the invention.
Fig. 4 shows a locking device solution according to the invention.
FIG. 5 is a schematic view of the connecting base structure of the present invention.
In the figure: the device comprises a load unloading device, a driving support rod, a connecting base, an upper platform, a locking device, a positioning and supporting tool, a lower platform, a flexible hinge, an upper round pin, an integrated sensing device, an annular rib driving outer sleeve, a lower round pin, a flexible amplifying mechanism, an output rod, a driving coil, a giant magnetostrictive rod, a magnetic yoke, a safety supporting beam, a universal ball with a screw, a universal ball with a ring groove, an end cover with a ring groove, a supporting base, a linear bearing, an unloading spring, a horizontal spindle lock, a supporting base, a vertical spindle lock, a first fine thread hole, a second fine thread hole, a first locking bolt hole, a first fine thread hole, a second locking bolt hole and a bottom end protrusion, wherein the load unloading spring is arranged on the upper platform, the lower platform, the driving support rod, the supporting rod, the driving.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The embodiment provides a multi-degree-of-freedom self-sensing precise pointing vibration isolation integrated platform and a combined device, in particular to a six-degree-of-freedom self-sensing precise pointing vibration isolation integrated device platform based on giant magnetostrictive driving. The invention can utilize a plurality of direct drive types, such as giant magnetostrictive drive, piezoelectric drive, electromagnetic drive and other active drive elements, and not only can realize active amplification adjustment of the space pose through the design of a flexible amplification mechanism, but also can realize active control on low-frequency vibration through a double-control-loop control strategy, and the optimally designed flexible structure can realize passive control on medium-frequency and high-frequency vibration. The scheme is a closed-loop system integrating drive positioning, active and passive vibration isolation, sensing and control.
The present embodiment will be further described below with reference to the drawings by taking "six degrees of freedom" as an example.
As shown in fig. 1, the multi-degree-of-freedom self-sensing precision-pointing vibration isolation integrated platform provided by the invention comprises: three sets of load unloading devices 1, six driving support rods 2, six connecting bases 3, an upper platform 4, three sets of locking devices 5, three positioning support tools 6 and a lower platform 7.
Specifically, the plurality of driving support rods 2 are arranged in a cube, are respectively supported between the upper platform 4 and the lower platform 7, and are used for realizing accurate adjustment of the spatial pose and active control of low-frequency vibration. The integrated sensing device 203 in the driving support rod 2 is embedded into the output end of the driving support rod 2, so that the output quantity of each driving support rod can be effectively monitored.
The locking device 5 is used for realizing device locking and safety protection in the theoretical pose fine adjustment, transportation and movement processes during assembly;
the load-shedding device 1 is used for reducing the negative influence of target load on a flexible link comprising a flexible hinge 201 integrated in a driving strut 2;
the positioning support tool 6 is used for positioning and protecting each driving support rod 2 during initial assembly, and accelerating the installation process; the positioning support tool 6 is integrally machined, and is convenient to install quickly. Two support edges of the positioning support tool 6 are 90 degrees in space, and a semi-arc-shaped groove is formed in each support edge, so that the driving support rod 2 can horizontally withdraw after the driving support rod 2 is installed, and the driving support rod 2 is separated from a clamping state.
The connecting base 3 can facilitate clamping and locking of the driving support rods 2 and is accurately fixed on the upper platform 4 and the lower platform 7. The upper platform 4 is formed by cutting the arc surface of the circular plate surface, so that the quality of the upper platform is effectively reduced without influencing the overall rigidity and strength of the upper platform; mounting holes and limiting grooves are machined in symmetrical triangular positions of the upper platform 4 and the lower platform 7, so that the connecting base 3 is convenient to mount; the lower platform 7 is designed into a circular plate, and six symmetrical handle holes are formed in the edge of the lower platform, so that the lower platform is convenient to carry; mounting bosses of the locking device 5, the load unloading device 1, the positioning and supporting tool 6 and other parts are respectively designed on the lower platform 7, and threaded mounting holes are designed; the connecting base 3 is integrally machined, the clamping blocks are cut out by utilizing a linear cutting technology, bolt holes are formed in the clamping blocks, and installation and adjustment of the supporting rods in the later period are facilitated.
As shown in fig. 2, taking a single driving strut 2 as an example, the driving strut 2 mainly includes: two flexible hinges 201, an upper round pin 202, an integrated sensing device 203, a ring rib driving outer sleeve 204, a lower round pin 205, a flexible amplifying mechanism 206, an output rod 207, a driving coil 208, a giant magnetostrictive rod 209, three magnetic conductive yokes 210 and three safety supporting beams 211.
Wherein the flexible amplification mechanism 206 is fixed on the annular rib drive outer sleeve 204 by four bolts, and the input end of the flexible amplification mechanism 206 is inserted into the output rod 207 and fastened by a square pin. The output end of the flexible amplification mechanism 206 is engaged with one end of a flexible hinge 201 through a screw and locked by an upper circular pin 202. The other end of the flexible hinge 201 passes through a shaft of a polished rod at one end of a screw rod at one end, is inserted into a first fine thread hole 501 of the connecting base 3, and is screwed down through a bolt, wherein the screw rod of the shaft is matched with the first fine thread hole 501 and the bolt. And the connecting base 3 is fastened on the upper platform 4 through three bolts. The safety support beam 211 is fixed to the ribbed drive outer sleeve 204 as is the flexible amplification mechanism 206, and the integrated sensing device 203 is embedded in the center beam groove of the safety support beam 211. The output rod 207 is inserted into a drive coil 208, which is encased by a magnetically conductive yoke 210, and contacts and compresses a giant magnetostrictive rod 209 encased within the drive coil 208. After assembly, the giant magnetostrictive rod 209 is in a pre-tensioned state.
Specifically, the flexible amplification mechanism 206 is designed through multi-objective optimization, which not only can achieve desired displacement amplification, but also has the function of vibration isolation above a target frequency. The flexible amplification mechanism 206 is fastened with the driver through bolts and rectangular pins; wherein, the driver can be selected from giant magnetostrictive rod 209, piezoelectricity, voice coil motor and other driving types. The safety support beam 211 and the flexible amplifying mechanism 206 are arranged in a 90-degree crossed manner, and the safety support beam 211 is provided with a groove and a hole at the central position, and the integrated sensing device 203 can be embedded into the groove and the hole; the annular rib driving outer sleeve 204 is used as an outer sleeve of the driver, and a heat dissipation annular rib design is carried out, so that heat dissipation of intelligent material driving is facilitated; the driving coil is designed without a framework, so that the air gap and the overall size are reduced; the flexible hinge 201 is manufactured by linear cutting, and the defects of gaps, lubrication and low precision of the traditional hinge are overcome.
As shown in fig. 3, the load shedding apparatus 1 provided by the present invention mainly includes: the device comprises a universal ball with screw 301, an end cover with ring groove 302, a support base 303, a linear bearing 304 and an unloading spring 305. The upper end screw of the universal ball 301 with the screw is arranged on the upper platform 4, and the lower end universal ball of the universal ball 301 with the screw is inserted into the circular groove of the circular groove end cover 302. The unloading spring 305 is loaded into the support base 303, the linear bearing 304 is mounted on the top end of the support base 303 by bolts, and the circular groove end cover 302 is inserted into the axial bearing 304 and compresses the unloading spring 305. At this point, the load mass will be transferred to the unloading spring 305. A small gap is reserved between the screw universal ball 301 and the end cover 302 with the circular ring groove in a matched mode, and the movement stroke is limited to guarantee safety; meanwhile, the universal ball is in rolling contact with the groove surface, so that the friction resistance is reduced.
As shown in fig. 4, the locking device 5 of the present invention is particularly a fine tuning locking device, and the locking device 5 mainly includes: a horizontal micrometer screw 401 with a spindle lock, a support base 402, and a vertical micrometer screw 403 with a spindle lock. The screw micrometer 401 with the spindle lock horizontally and the screw micrometer 403 with the spindle lock vertically are screwed in and screwed out, so that the corresponding spindle is extended and shortened, and the hole groove corresponding to the upper platform 4 is locked or finely adjusted and positioned. The locking device adopts three sets of equilateral triangle arrangement. Each set is assembled by a supporting base and two micrometer screw gauges with spindle locks which are horizontally and vertically distributed.
As shown in fig. 5, the connection base 3 provided by the present invention mainly includes: a first fine thread hole 501, a second fine thread hole 503, a first locking bolt hole 502, a second locking bolt hole 504 and a bottom end bulge 505. The first fine thread threaded hole 501 and the second fine thread threaded hole 503 of the connecting base are respectively matched with two ends of the driving support rod 2 and are inserted into the first locking bolt hole 502 and the second locking bolt hole 504 through locking bolts for locking. The bottom end protrusion 505 is matched and positioned with a groove at a corresponding position of the lower platform 7 or the upper platform 4.
In a preferred embodiment, three connecting bases 3 corresponding to the upper platform 4 and the lower platform 7 are provided with mounting bosses, and grooves matched with the connecting bases 3 are formed in the mounting bosses, so that the connecting bases 3 can be positioned conveniently. Meanwhile, the upper platform 4 is also provided with a threaded hole for mounting the composite unloading device with screw universal ball matching, and a horizontal hole groove and a vertical hole groove for locking and fine adjustment. The flexible amplification mechanism 206 is formed by multi-objective optimization design based on a two-stage lever amplification principle, and has displacement amplification and vibration isolation capabilities. The flexible amplifying mechanism 206 is fixed at the output end of the magnetostrictive actuator through four bolts, the square input end of the flexible amplifying mechanism is inserted into the output rod of the actuator, and the flexible amplifying mechanism is fastened through a rectangular pin, so that the output precision can be effectively ensured. The output end of the flexible amplification mechanism 206 is connected with the flexible hinge 201 through a double screw, and a through hole is formed through a drilling process and a round pin is embedded, so that the fastening in a long-term motion and vibration bearing environment is ensured. The safety support beam 211 is also fixed to the output end of the driver by four bolts and is arranged to cross the flexible amplification mechanism 206 at 90 degrees. The safety support beam 211 is notched at a central location and is spaced from the flexible amplification mechanism to protect the flexible amplification mechanism 206 by removing force from contact with the flexible hinge 201 when subjected to an impact condition without affecting the normal positioning stroke range. Meanwhile, a groove is formed in the center position, so that the intelligent sensing device is convenient to install and clamp, and the accuracy of data acquisition and output can be ensured by the position. Furthermore, the driver is a magnetostrictive driver, a multi-objective optimization design is adopted, the energy loss, the magnetic field intensity, the overall mass and the like of the system are taken as the optimization objective functions, and the coil and the magnetic circuit of the driver are designed. The driver mainly comprises an output rod, a driving coil, a giant magnetostrictive rod, a magnetic yoke, an annular rib driver shell, a driver base, a driver end cover with external threads, a pre-pressing disc spring, a graphite copper sleeve and the like. The magnetic conduction magnetic yoke mainly comprises a magnetic conduction sleeve, a magnetic conduction end cover and a magnetic conduction base. The magnetostrictive rod is assembled inside the driving coil, the magnetic conductive magnetic yoke wraps the coil and the magnetostrictive rod, and then the industrial pure iron output rod is inserted into the reserved magnetic conductive end cover and is screwed to compress the disc spring through the end cover of the driver with the external threads so as to keep the pretension with the magnetostrictive rod. In order to avoid the inclination of the output rod, the graphite copper sleeve is adopted to replace a linear bearing in a tiny space so as to realize the axial displacement output. And each driving support rod 2 is assembled by inserting the polished rods at two ends into the fine-tooth threaded holes of the connecting base and then fastening the polished rods by bolts. Thereby reducing the difficulty caused by adopting other assembly forms and improving the assembly efficiency. The screw with the screw universal ball is screwed into a threaded hole reserved in the upper platform and can be screwed up and down according to the weight of a load, so that the upper platform is adjusted to be always in a designed theoretical position; and the universal ball ensures that the upper platform is subjected to smaller frictional resistance in the motion process. Meanwhile, the end cover with the circular groove can just place the universal ball into the circular groove and can move in a theoretical stroke, and when the universal ball is greatly disturbed by the outside, the universal ball is in contact with the circular groove, so that the limiting protection effect is achieved. The unloading spring can also be adjusted by selecting different rigidity and size according to the load weight. The locking device is skillfully designed through the supporting base, and meanwhile, a corresponding hole groove is formed in the upper platform, so that a micrometer caliper with a spindle lock is selected. During initial assembly, when the three micrometer screws which are vertically arranged are screwed in, the corresponding mandrel extends out and is inserted into the corresponding hole groove, so that the upper platform is jacked up, and the initial pose of the upper platform can be adjusted. After the assembly is finished, the spindle of the micrometer screw gauge is vertically arranged and is rotated back as required, and the spindle and the hole groove keep a required distance; and simultaneously, three micrometer screws horizontally arranged are screwed in, so that the mandrel of the micrometer screws is inserted into the corresponding hole groove of the upper platform, and the required distance is kept, thus the limiting and protecting functions can be realized in the working process of the platform. In the carrying process, firstly, the spindle of the horizontally arranged micrometer screw is completely screwed into the hole groove of the upper platform and the spindle lock is screwed, then the spindle of the vertically arranged micrometer screw is screwed until the upper platform is jacked up and the horizontal hole groove of the upper platform is contacted and clamped with the horizontally arranged micrometer screw, and the vertical spindle lock is screwed to finish the locking process.
Further, the assembling method of the multi-degree-of-freedom self-sensing precision-pointing vibration isolation integrated platform is described as follows:
firstly, fastening three connecting bases 3 on a lower platform 7, matching bottom protrusions 505 with grooves of the lower platform 7, and then fastening each connecting base 3 by using three bolts;
then fastening the three positioning and supporting tools 6 at corresponding positions of the lower platform 7 by using three bolts respectively; then inserting one end of the six assembled driving support rods 2 into a first fine thread threaded hole 501 and a second fine thread threaded hole 503 of the connecting base, and meanwhile, inclining, approaching and embedding the driving support rods into bevel edge arc-shaped grooves of the positioning and supporting tool 6; at this time, the base lock bolt is screwed to fasten the lower end of each drive strut 2 to the lower platform 7.
And then, respectively assembling the three sets of load unloading devices 1 and the locking device 5 on the lower platform 7, adjusting the distance pose of the upper platform 4 through the locking device 5 to reach a designed theoretical position, and placing the upper platform 4. Subsequently, the other three-piece connection base 3 is mounted, but not fastened, to the corresponding recess of the upper platform 4. Then, the polish rod at the upper end of each driving support rod 2 is respectively inserted into the first fine thread threaded hole 501 and the second fine thread threaded hole 503 of the connecting base, and then the locking bolt of the connecting base is screwed down, so that each driving support rod 2 and the connecting base 3 are completely clamped.
And finally, screwing three fixing bolts of the connecting base 3 on the upper platform 4 respectively, and horizontally withdrawing the three positioning and supporting tools 6. At this point, the device is initially assembled.
Further, the multi-degree-of-freedom self-sensing precision-pointing vibration isolation integrated platform adjusts the unloading device according to the load requirement, and the adjusting method for realizing gravity balance comprises the following steps:
firstly, three fixing bolts of the connecting base 3 of the upper platform 4 are loosened, then the micrometer caliper 401 with the spindle lock in the locking device 5 is extended and inserted into the corresponding hole groove of the upper platform 4, and a corresponding gap is formed between the theoretical position and the hole groove. And then, placing a load to the central position of the upper platform 4, keeping symmetry and fixing the load by using a reserved threaded hole, wherein the upper platform 4 sinks, and the hole groove is contacted with the locking shaft.
Then the universal ball 301 with the screw of the load-off device 1 is adjusted, the upper platform 4 is floated by rotating the screw and reaches the designed theoretical position, and at the moment, the corresponding clearance between the locking shaft and the corresponding hole slot is formed.
And finally, the upper platform 4 is fastened with three bolts of the connecting base 3, and the loaded device can be in a working state after being assembled.
The working target of the multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform is to provide precise space pose positioning for precision load and inhibit external low, medium and high frequency vibration applied to the precision load. The micro-nano-scale positioning of the expected spatial pose is realized through the active motion of the six driving support rods 2. Due to the integration of the integrated sensing device, closed-loop control can be achieved, thereby achieving the desired goal. The designed driving ring and vibration isolation ring double-ring control strategy realizes closed-loop tracking of a given expected target on one hand and can realize active compensation of low-frequency external interference on the other hand, and the control current or voltage is calculated and fed back to the giant magnetostrictive driver in real time through an upper computer according to data detected by a sensor, so that the influence of low-frequency vibration on the spatial pose is reduced. In addition, the flexible amplification mechanism 206 is designed in consideration of the requirement of passive vibration isolation in the later period, at this time, after the vibration of the middle and high frequencies is transmitted to the six driving struts 2 from the lower platform 7, the vibration is effectively reduced when passing through the flexible amplification mechanism 206, that is, the passive vibration isolation function of the flexible mechanism is utilized. Therefore, the device can simultaneously realize precise driving positioning and vibration isolation of six degrees of freedom.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.

Claims (4)

1. The utility model provides a multi freedom self-sensing accurate directional vibration isolation integration platform which characterized in that includes: the device comprises a load unloading device (1), a driving support rod (2), a connecting base (3), an upper platform (4), a locking device (5), a positioning support tool (6) and a lower platform (7);
the load unloading device (1) is connected with the upper platform (4) and the lower platform (7);
the connecting base (3) which is fastened and connected on the upper platform (4) is connected with the connecting base (3) which is fastened and connected on the lower platform (7) through the driving support rod (2);
the locking device (5) is connected between the upper platform (4) and the lower platform (7);
the positioning and supporting tool (6) is arranged on the lower platform (7), and the driving support rod (2) is obliquely embedded into an arc-shaped groove of a supporting edge of the positioning and supporting tool (6);
the drive strut (2) comprises: the device comprises a flexible hinge (201), an upper round pin (202), an integrated sensing device (203), a ring rib driving outer sleeve (204), a lower round pin (205), a flexible amplifying mechanism (206), an output rod (207), a driving coil (208), a giant magnetostrictive rod (209), a magnetic yoke (210) and a safety supporting beam (211);
the flexible amplification mechanism (206) is fixedly arranged at one end of the annular rib driving outer sleeve (204), the input end of the flexible amplification mechanism (206) is inserted into the output rod (207) and is fixedly connected through a square pin, and the output end of the flexible amplification mechanism (206) is matched with one end of a flexible hinge (201) through a screw and is locked through an upper round pin (202);
the other end of the flexible hinge (201) is inserted into a first fine thread threaded hole (501) or a second fine thread threaded hole (503) of a connecting base (3) arranged on the upper platform (4) through a shaft of a polished rod at one end of a screw rod, and then is screwed down through a bolt;
the safety support beam (211) is tightly connected to one end of the annular rib driving outer sleeve (204), and the integrated sensing device (203) is embedded into a middle beam groove of the safety support beam (211);
the output rod (207) is inserted into a driving coil (208) wrapped by a magnetic conductive magnetic yoke (210) and is contacted and pressed with a giant magnetostrictive rod (209) wrapped in the driving coil (208); the giant magnetostrictive rod (209) is in a pre-tightening state;
the other end of the annular rib driving outer sleeve (204) is matched with one end of another flexible hinge (201) through a screw rod and locked through a lower circular pin (205); the other end of the other flexible hinge (201) is inserted into a first fine thread hole (501) or a second fine thread hole (503) of a connecting base (3) arranged on the lower platform (7) through a shaft of a polished rod at one end of a screw rod, and then is screwed down through a bolt;
the locking device (5) comprises: the device comprises a horizontal micrometer screw (401) with a spindle lock, a supporting base (402) and a vertical micrometer screw (403) with a spindle lock;
the horizontal micrometer screw (401) with the spindle lock and the vertical micrometer screw (403) with the spindle lock are arranged on the supporting base (402);
the support base (402) is fixedly connected with the lower platform (7);
a micrometer screw gauge (401) with a spindle lock horizontally and a micrometer screw gauge (403) with a spindle lock vertically are respectively matched with corresponding holes and grooves of the upper platform (4);
the corresponding mandrel can be extended and shortened by screwing in and out the micrometer screw gage (401) with the mandrel lock horizontally and the micrometer screw gage (403) with the mandrel lock vertically, so that the hole slot corresponding to the upper platform (4) is locked or adjusted and positioned;
the connection base (3) comprises: a first fine thread threaded hole (501), a second fine thread threaded hole (503), a first locking bolt hole (502), a second locking bolt hole (504) and a bottom end bulge (505);
the first fine thread threaded hole (501) and the second fine thread threaded hole (503) are respectively matched with two ends of different driving support rods (2) and are respectively inserted into the first locking bolt hole (502) and the second locking bolt hole (504) through locking bolts for locking;
the bottom end bulge (505) is matched and positioned with a groove at the corresponding position of the lower platform (7) or the upper platform (4);
the upper platform (4) and the lower platform (7) are symmetrically and fixedly provided with connecting bases (3) to form six connecting bases;
among the six connection bases, one drive strut (2) is connected between circumferentially adjacent connection bases to form a total of six drive struts (2).
2. The integrated platform with multiple degrees of freedom and self-sensing, precision pointing and vibration isolating according to claim 1, wherein the load unloading device (1) comprises: the device comprises a universal ball (301) with a screw, an end cover (302) with a circular groove, a support base (303), a linear bearing (304) and an unloading spring (305);
the upper end screw of the universal ball (301) with the screw is arranged on the upper platform (4), and the lower end universal ball of the universal ball (301) with the screw is inserted into the circular groove of the circular groove end cover (302);
the unloading spring (305) is installed in the supporting base (303), the linear bearing (304) is installed at the top end of the supporting base (303) through bolts, and the circular groove end cover (302) is inserted into the linear bearing (304) and compresses the unloading spring (305).
3. The integrated platform of multi-degree-of-freedom self-sensing precision directional vibration isolation according to claim 1, wherein the three sets of locking devices are arranged in an equilateral triangle.
4. A combination of multiple degrees of freedom self-sensing precision pointing vibration isolation integrated platform according to any one of claims 1 to 3, wherein the multiple degrees of freedom self-sensing precision pointing vibration isolation integrated platform are distributed in different directions.
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