CN108628053A - Uv掩膜板及其制作方法 - Google Patents

Uv掩膜板及其制作方法 Download PDF

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CN108628053A
CN108628053A CN201810438871.XA CN201810438871A CN108628053A CN 108628053 A CN108628053 A CN 108628053A CN 201810438871 A CN201810438871 A CN 201810438871A CN 108628053 A CN108628053 A CN 108628053A
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substrate
polaroid
layer
mask plates
electrode layer
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吴万春
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to CN201810438871.XA priority Critical patent/CN108628053A/zh
Priority to US16/069,317 priority patent/US20210080821A1/en
Priority to PCT/CN2018/089653 priority patent/WO2019214002A1/zh
Publication of CN108628053A publication Critical patent/CN108628053A/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
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    • G02F1/155—Electrodes
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    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
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    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
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    • G02F1/15165—Polymers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • G02F1/1524—Transition metal compounds
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/157—Structural association of cells with optical devices, e.g. reflectors or illuminating devices
    • G—PHYSICS
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    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/163—Operation of electrochromic cells, e.g. electrodeposition cells; Circuit arrangements therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
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    • G03F1/48—Protective coatings
    • G—PHYSICS
    • G02—OPTICS
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    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • G02F1/1525—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material characterised by a particular ion transporting layer, e.g. electrolyte
    • G—PHYSICS
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    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
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Abstract

本发明公开了一种UV掩膜板，包括相对设置的第一偏光片和第二偏光片、设于第一偏光片与第二偏光片之间的电致变色玻璃，电致变色玻璃包括靠近第一偏光片的第一基板和靠近第二偏光片的第二基板；第一基板朝向第二基板的表面设有第一电极层，第二基板朝向第一基板的表面设有阵列设置的薄膜晶体管和设于薄膜晶体管上的第二电极层，电致变色玻璃在第一电极层、第二电极层被施加电压后透光度改变。本发明还公开了一种UV掩膜板的制作方法。通过对本发明电致变色玻璃的两层电极层施加电压即可改变电致变色玻璃的透光度，从而使得掩膜板可以适用于多种尺寸的产品，降低了面板的制造成本，提高了面板制造效率，降低了因更换掩膜板造成的破片风险。

Description

UV掩膜板及其制作方法
技术领域
本发明涉及显示技术领域，尤其涉及一种UV掩膜板及其制作方法。
背景技术
液晶显示器(LCD，Liquid Crystal Display)等显示装置是一种被广泛应用的平面显示装置，其制作方法大体包括：提供两片平行的基板、在该两片基板间涂布封框胶(sealant)以及在封框胶和两片衬底基板所组成空间中灌注液晶。其中，下基板上设置有薄膜场效应晶体管(TFT，Thin Film Transistor)，上基板衬底上设置有彩膜(CF，ColorFilter)，通过TFT上的信号与电压改变来控制液晶盒中液晶分子的转动方向，从而达到控制每个像素点偏振光出射与否而达到显示目的。
现有的液晶加工工艺中，采用液晶滴下方式填充液晶时，由于在封框胶固化前，封框胶可能与液晶接触，因此，业界一般采用UV(Ultraviolet ray，即紫外线)固化的方式来避免由于液晶和封框胶直接接触造成的对液晶的污染。所谓的UV固化，主要是利用遮挡物(掩膜板，也可称为掩模板)遮住液晶区域，并暴露涂有封框胶的区域以利用UV固化设备对封框胶进行UV固化，通常将这种掩膜板称为UV掩膜板。
对封框胶固化时，针对不同尺寸的产品需要开发相应尺寸的UV掩膜板，对每种尺寸的UV掩膜板只是进行一次性的使用。所有不同尺寸的产品的UV掩膜板都是独立的，每开发一款产品就需要开发一款相对应的UV掩膜板，这种方式会增加显示装置的制作成本，不利于液晶面板制造成本的管控。而且，当在不同尺寸的产品间切换制造时需要手动更换UV掩模板，更换过程较慢，且更换过程中易造成破片等风险。
发明内容
鉴于现有技术存在的不足，本发明提供了一种UV掩膜板及其制作方法，可以使得掩膜板兼容不同尺寸的产品，降低了面板的制造成本，提高了面板制造效率，降低了因更换掩膜板造成的破片风险。
为了实现上述的目的，本发明采用了如下的技术方案：
一种UV掩膜板，包括相对设置的第一偏光片和第二偏光片、设于所述第一偏光片与所述第二偏光片之间的电致变色玻璃，所述电致变色玻璃包括更靠近所述第一偏光片的第一基板和更靠近所述第二偏光片的第二基板；所述第一基板朝向所述第二基板的表面设有第一电极层，所述第二基板朝向所述第一基板的表面设有阵列设置的薄膜晶体管和设于所述薄膜晶体管上的第二电极层，所述电致变色玻璃在所述第一电极层、所述第二电极层被施加电压后透光度改变。
作为其中一种实施方式，所述电致变色玻璃包括第一基板、第二基板、设于所述第一电极层与所述第二电极层之间的电致变色层、设于所述电致变色层与所述第一电极层之间的电解质层、设于所述电致变色层与所述第二电极层之间的离子存储层。
作为其中一种实施方式，所述电致变色层为三氧化钨。
或者，所述电致变色层为聚噻吩类及其衍生物、紫罗精类、四硫富瓦烯、金属酞菁类化合物。
作为其中一种实施方式，所述电解质层为含有高氯酸锂或高氯酸纳的溶液或固体电解质材料。
作为其中一种实施方式，所述离子存储层为TiO2、CeO2、SnO2、ZrO2中的一种。
或者，所述离子存储层为NiOx、IrO2、CoO2、MnO2、FeO2、Cr2O3或RhO2中的一种。
作为其中一种实施方式，所述第一电极层、所述第二电极层为氧化铟锡。
作为其中一种实施方式，所述的UV掩膜板还包括分别设于所述第一偏光片与所述第二基板之间、所述第二偏光片与所述第一基板之间的两层透明保护层。
本发明的另一目的在于提供一种所述的UV掩膜板的制作方法，包括：
提供一第一衬底，并在所述第一衬底上依次制作薄膜晶体管和第二电极层；
提供一第二衬底，并在所述第二衬底上制作第一电极层；
在第一衬底、第二衬底间填充材料形成电致变色玻璃；
分别在所述第一衬底外表面、所述第二衬底外形成第一偏光片、第二偏光片。
本发明通过在两片偏光片之间设有具有薄膜晶体管和电极层的电致变色玻璃，通过对电致变色玻璃的两层电极层施加电压即可改变电致变色玻璃的透光度，从而使得掩膜板可以适用于多种尺寸的产品，降低了面板的制造成本，提高了面板制造效率，降低了因更换掩膜板造成的破片风险。
附图说明
图1为本发明实施例的UV掩膜板的结构示意图；
图2为本发明实施例的第一基板的结构示意图；
图3为本发明实施例的第二基板的结构示意图；
图4为本发明实施例的UV掩膜板的制作方法示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
参阅图1～图3，本发明实施例的UV掩膜板主要包括相对设置的第一偏光片1和第二偏光片2、设于第一偏光片1与第二偏光片2之间的电致变色玻璃3，电致变色玻璃3包括更靠近第一偏光片1的第一基板31和更靠近第二偏光片2的第二基板32；第一基板31朝向第二基板32的表面设有第一电极层32a，第二基板32朝向第一基板31的表面设有阵列设置的薄膜晶体管31a和设于薄膜晶体管31a上的第二电极层31b，电致变色玻璃3在第一电极层32a、第二电极层31b被施加电压后透光度改变，第二基板32起到类似于现有技术中的薄膜晶体管阵列基板的功能。
当所有的薄膜晶体管31a保持工作状态而导通时，电致变色玻璃3整面的透光度一致，由于薄膜晶体管31a阵列设置，可以通过单独控制各个薄膜晶体管31a的通断从而改变电致变色玻璃3的相应区域的透光度，当第一电极层32a、第二电极层31b被施加电压后，通过控制相应区域的薄膜晶体管31a的通断，即可使得电致变色玻璃3的局部透光度发生改变，从而形成类似现有技术的掩膜板的构造，不透光的部分作为遮挡区域，透光的部分可供UV光线穿过，从而对下方的封框胶进行光照固化。
本实施例中，电致变色玻璃3具体包括第一基板31、第二基板32、设于第一电极层32a与第二电极层31b之间的电致变色层33、设于电致变色层33与第一电极层32a之间的电解质层34、设于电致变色层33与第二电极层31b之间的离子存储层35。
电致变色层33可以在外加电场作用下发生电化学氧化还原反应，得失电子，使材料的颜色发生变化，从而实现透光度的变化。UV掩膜板工作时，在第一电极层32a、第二电极层31b之间加上一定的电压，电致变色层33在电压作用下发生氧化还原反应而使其颜色发生变化。
当在薄膜晶体管31a对应区域的电解质层34被加上正相直流电压后，离子储存层35的离子被抽出，通过离子导体，进入电致变色层33，实现无功耗记忆，当电解质层34被加上反相电压后，电致变色层33中的离子被抽出，然后进入离子储存层35，电致变色玻璃3恢复透明状。
这里，第一基板31、第二基板32均采用透明的玻璃基板，第一电极层32a、第二电极层31b采用透明的氧化铟锡导电材料。电致变色层33可以是无机电致变色材料，例如三氧化钨，也可以是有机电致变色材料，例如聚噻吩类及其衍生物、紫罗精类、四硫富瓦烯、金属酞菁类化合物等。电解质层34为含有高氯酸锂或高氯酸纳的溶液或固体电解质材料，离子存储层35在电致变色材料发生氧化还原反应时起到储存相应的反离子、保持整个体系电荷平衡的作用，其可以是离子电荷注入/脱出时都保持透明的光惰性离子存储层，如TiO2、CeO2、SnO2或ZrO2等，或者，也可以是与电致变色层33的材料互补致色的光活性电致变色离子存储层，例如NiOx、IrO2、CoO2、MnO2、FeO2、Cr2O3或RhO2，可以在遮光部分加深UV掩膜板的不透光效果。
UV掩膜板还可以具有分别设于第一偏光片1与第二基板32之间、第二偏光片2与第一基板31之间的两层透明保护层4，第一偏光片1、第二偏光片2分别贴合在两层透明保护层4表面。透明保护层4可以是玻璃，可用于保护中间的电致变色玻璃3。在其他实施方式中，第一基板31、第二基板32可以分别与一层透明保护层4一体形成，省去两层玻璃结构，减薄整体厚度，简化制作工艺。
如图4所示，本发明还提供了一种的UV掩膜板的制作方法，主要包括：
S01、提供一第一衬底310，并在第一衬底310上依次制作薄膜晶体管31a和第二电极层31b，在第一衬底310制作薄膜晶体管31a和第二电极层31b的过程与现有的TFT基板制程相同，在此不再详细说明；
S02、提供一第二衬底320，并在第二衬底320上制作第一电极层32a，第一基板31、第二基板32选用透明的玻璃基板作为第一衬底310、第二衬底320，第一电极层32a、第二电极层31b选用透明的氧化铟锡材料；
S03、在第一衬底310、第二衬底320间填充材料形成电致变色玻璃3，电致变色玻璃3具体包括第一基板31、第二基板32、设于第一电极层32a与第二电极层31b之间的电致变色层33、设于电致变色层33与第一电极层32a之间的电解质层34、设于电致变色层33与第二电极层31b之间的离子存储层35；
S04、分别在第一衬底310外表面、第二衬底320外贴合一层透明保护层4，然后分别在两层透明保护层4的外表面各贴合第一偏光片1、第二偏光片2，透明保护层4可以是玻璃。
在其他实施方式中，透明保护层4可以省去或者与第一衬底310、第二衬底320一体形成，有利于减薄整体厚度，简化制作工艺。
本发明通过在两片偏光片之间设有具有薄膜晶体管和电极层的电致变色玻璃，通过对电致变色玻璃的两层电极层施加电压即可改变电致变色玻璃的透光度，从而使得掩膜板可以适用于多种尺寸的产品，降低了面板的制造成本，提高了面板制造效率，降低了因更换掩膜板造成的破片风险。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (10)

1.一种UV掩膜板，其特征在于，包括相对设置的第一偏光片(1)和第二偏光片(2)、设于所述第一偏光片(1)与所述第二偏光片(2)之间的电致变色玻璃(3)，所述电致变色玻璃(3)包括更靠近所述第一偏光片(1)的第一基板(31)和更靠近所述第二偏光片(2)的第二基板(32)；所述第一基板(31)朝向所述第二基板(32)的表面设有第一电极层(32a)，所述第二基板(32)朝向所述第一基板(31)的表面设有阵列设置的薄膜晶体管(31a)和设于所述薄膜晶体管(31a)上的第二电极层(31b)，所述电致变色玻璃(3)在所述第一电极层(32a)、所述第二电极层(31b)被施加电压后透光度改变。
2.根据权利要求1所述的UV掩膜板，其特征在于，所述电致变色玻璃(3)包括第一基板(31)、第二基板(32)、设于所述第一电极层(32a)与所述第二电极层(31b)之间的电致变色层(33)、设于所述电致变色层(33)与所述第一电极层(32a)之间的电解质层(34)、设于所述电致变色层(33)与所述第二电极层(31b)之间的离子存储层(35)。
3.根据权利要求2所述的UV掩膜板，其特征在于，所述电致变色层(33)为三氧化钨。
4.根据权利要求2所述的UV掩膜板，其特征在于，所述电致变色层(33)为聚噻吩类及其衍生物、紫罗精类、四硫富瓦烯、金属酞菁类化合物。
5.根据权利要求2所述的UV掩膜板，其特征在于，所述电解质层(34)为含有高氯酸锂或高氯酸纳的溶液或固体电解质材料。
6.根据权利要求2所述的UV掩膜板，其特征在于，所述离子存储层(35)为TiO2、CeO2、SnO2、ZrO2中的一种。
7.根据权利要求2所述的UV掩膜板，其特征在于，所述离子存储层(35)为NiOx、IrO2、CoO2、MnO2、FeO2、Cr2O3或RhO2中的一种。
8.根据权利要求1所述的UV掩膜板，其特征在于，所述第一电极层(32a)、所述第二电极层(31b)为氧化铟锡。
9.根据权利要求1-8任一所述的UV掩膜板，其特征在于，还包括分别设于所述第一偏光片(1)与所述第二基板(32)之间、所述第二偏光片(2)与所述第一基板(31)之间的两层透明保护层(4)。
10.一种权利要求1-9任一所述的UV掩膜板的制作方法，其特征在于，包括：
提供一第一衬底(310)，并在所述第一衬底(310)上依次制作薄膜晶体管(31a)和第二电极层(31b)；
提供一第二衬底(320)，并在所述第二衬底(320)上制作第一电极层(32a)；
在第一衬底(310)、第二衬底(320)间填充材料形成电致变色玻璃(3)；
分别在所述第一衬底(310)外表面、所述第二衬底(320)外形成第一偏光片(1)、第二偏光片(2)。
CN201810438871.XA 2018-05-09 2018-05-09 Uv掩膜板及其制作方法 Pending CN108628053A (zh)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1492274A (zh) * 2003-08-26 2004-04-28 广州市光机电工程研究开发中心 全固态塑料电致变色器件及其制备方法
CN201867584U (zh) * 2010-11-26 2011-06-15 京东方科技集团股份有限公司 掩膜版
CN103091906A (zh) * 2013-01-30 2013-05-08 北京京东方光电科技有限公司 一种掩膜板
CN103513509A (zh) * 2013-10-25 2014-01-15 北京京东方光电科技有限公司 一种掩膜板、基板及基板的制作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103235451A (zh) * 2013-04-23 2013-08-07 北京京东方光电科技有限公司 掩膜板及其制造方法
CN203337997U (zh) * 2013-07-19 2013-12-11 京东方科技集团股份有限公司 一种灰阶掩模板
CN105629655B (zh) * 2016-01-11 2018-08-07 京东方科技集团股份有限公司 掩膜板
CN105607377B (zh) * 2016-04-01 2020-01-03 京东方科技集团股份有限公司 掩模板及其制作方法、使用方法以及包括该掩模板的设备

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1492274A (zh) * 2003-08-26 2004-04-28 广州市光机电工程研究开发中心 全固态塑料电致变色器件及其制备方法
CN201867584U (zh) * 2010-11-26 2011-06-15 京东方科技集团股份有限公司 掩膜版
CN103091906A (zh) * 2013-01-30 2013-05-08 北京京东方光电科技有限公司 一种掩膜板
CN103513509A (zh) * 2013-10-25 2014-01-15 北京京东方光电科技有限公司 一种掩膜板、基板及基板的制作方法

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