CN108627394A - Microscope and its Polydirectional adjusting device and have the microscopical push-pull effort machine - Google Patents
Microscope and its Polydirectional adjusting device and have the microscopical push-pull effort machine Download PDFInfo
- Publication number
- CN108627394A CN108627394A CN201810379543.7A CN201810379543A CN108627394A CN 108627394 A CN108627394 A CN 108627394A CN 201810379543 A CN201810379543 A CN 201810379543A CN 108627394 A CN108627394 A CN 108627394A
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- Prior art keywords
- microscope
- micro
- connecting rod
- microscopical
- adjusting mechanism
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
Abstract
Microscope and its Polydirectional adjusting device provided by the invention and have the microscopical push-pull effort machine,The regulating device includes microscope stand,For installing microscopical fixed seat,Connecting rod for making microscope be moved forward and backward along X-axis,The first micro-adjusting mechanism for making microscope be moved up and down along Z axis,The curved bar component of the second micro-adjusting mechanism for making microscope be moved left and right along Y-axis and the angle for adjusting microscope stand,Make the coarse adjustment of microscope realization front and back position by the connecting rod,Pass through first micro-adjusting mechanism again,Second micro-adjusting mechanism can make the fine tuning of microscope realization left and right and upper and lower position,Microscope is set to realize that 2 axis rotations adjust the adjustment in 8 orientation for finally making microscope realize three dimensions by the curved bar component again,Solves difficulty inefficient when visual field offset needs to focus caused by changing enlargement ratio well,It is strong with body function,The features such as regulated efficiency is high.
Description
Technical field
The present invention relates to multi-function sliding power test equipment technical field, more particularly to a kind of microscope and its multi-faceted tune
Regulating device and have the microscopical push-pull effort machine.
Background technology
Multi-function sliding power test machine be mainly used in semicon industry detection chip bonding force, so lder ball bonding power and
The detection device of gold thread weld strength, and chip, gold goal, gold thread are all very tiny, may diminish to tens microns, therefore need to set
Standby upper outfit microscope is more primarily used to the failure mode after observation has pushed away, such as observing sample and being directed at position measurement
Seen whether residual gold when pushing away gold goal, residual gold how many, tested whether it is abnormal etc., because the test of multi-function sliding power machine is special
Property, microscope can only be placed at an angle, and the angle changing rate placed is big, measured position when being tested with micro- sem observation
The visual field usually will not be in theoretical center, and the type of sample is much smaller greatly, and same enlargement ratio cannot be applicable in institute
Some products, it is therefore desirable to enlargement ratio appropriate is adjusted to according to sample to test, at this moment just not because of visual field original state
In theoretical center, so when changing enlargement ratio at this moment the visual field can not need to adjust the microscopical visual field in measured position,
And need simple, understandable, easy to get started.
On the multi-function sliding power test machine of same type, micro- mirror adjustment mechanism at this stage is different, all
Single mechanism just slightly, poor practicability, and never have for a long time it is any be effectively improved scheme so that user
Though there is feedback, it uses problem, is not resolved slowly, therefore, in conjunction with reality and demand, needs to design a set of new scheme
To solve the problems, such as this.
In existing push-pull effort equipment, microscope angled need to remove observation test product, so when to adjust amplification
When multiplying power, the visual field of measured position often shifts, and at this moment regulating mechanism is preferably multi-faceted adjusting, and existing aobvious
Micro mirror adjusting orientation is single, and limitation is big, and use is very inconvenient, especially can not achieve fine tuning up and down, it is therefore desirable to
A kind of good scheme is difficult to solve this.
Invention content
Place in view of above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of microscope and its multi-faceted tune
Regulating device and have the microscopical push-pull effort machine, microscopical multi-faceted adjustment can be realized by the regulating device.
In order to solve the above technical problems, this invention takes following technical schemes:
A kind of microscopical Polydirectional adjusting device, including microscope stand, for installing microscopical fixed seat, being used for
Make connecting rod that microscope is moved forward and backward along X-axis, for making the first micro-adjusting mechanism that microscope moves up and down along Z axis, for making to show
The curved bar component of the second micro-adjusting mechanism that micro mirror is moved left and right along Y-axis and the angle for adjusting microscope stand, the connecting rod
It is slidably connected with fixed seat, first micro-adjusting mechanism couples with connecting rod, and second micro-adjusting mechanism and the first micro-adjusting mechanism join
It connects, second micro-adjusting mechanism is coupled by curved bar component with microscope stand.
In the microscopical Polydirectional adjusting device, first micro-adjusting mechanism includes that the first fixed block and first move
The end of motion block, first fixed block and connecting rod connects, and the side of the first movement block and the first fixed block is slidably connected.
In the microscopical Polydirectional adjusting device, it is provided on first fixed block for controlling first movement
The hand rotary nut that block is moved up and down along Z axis, the hand rotary nut are connect with first movement block.
In the microscopical Polydirectional adjusting device, second micro-adjusting mechanism includes that the second fixed block and second move
The side of motion block, second fixed block is fixedly connected on the end of first movement block, and second movable block is slideably positioned in
The other side of second fixed block is oppositely arranged with the end of first movement block.
In the microscopical Polydirectional adjusting device, second micro-adjusting mechanism further includes bent for clamp or release
The latch segment of bar assembly, the latch segment are set to one end of the second movable block, and the curved bar component is set to the second movable block
The other end, the latch segment couples with curved bar component.
In the microscopical Polydirectional adjusting device, the curved bar component includes head rod, the second connecting rod
With third connecting rod, second connecting rod is set on head rod, and the third connecting rod is set to the second connecting rod
On, the microscope stand is rotationally installed in the end of third connecting rod.
In the microscopical Polydirectional adjusting device, the first sliding groove and slide unit are provided in the fixed seat;It is described
Second sliding slot is provided on connecting rod, the bottom of connecting rod is provided with sliding rail, and the sliding rail is placed in the first sliding groove, and the slide unit is placed in
In second sliding slot.
In the microscopical Polydirectional adjusting device, between first fixed block and first movement block and second
Differential head adjusting screw rod is both provided between fixed block and the second movable block.
A kind of microscope, including microscope ontology and the regulating device as described in above-mentioned any one, the microscope sheet
Body is installed in the regulating device.
A kind of push-pull effort machine, including apparatus body and such as the above-mentioned microscope, the microscope is fixed on equipment
On ontology.
Compared to the prior art, it microscope and its Polydirectional adjusting device provided by the invention and microscopical is pushed away with this
In puller system, so that microscope is realized the coarse adjustment of front and back position by the connecting rod, then passes through first micro-adjusting mechanism, second micro-
Regulating mechanism can make microscope realization up and down and the fine tuning of left and right position, and the angle of microscope stand is adjusted by curved bar component, from
And the multi-faceted adjusting of microscope is realized, reach the features such as body function is strong, and regulated efficiency is high.
Description of the drawings
Fig. 1 is the structural schematic diagram of microscopical Polydirectional adjusting device provided by the invention.
Fig. 2 is the side structure schematic diagram of microscopical Polydirectional adjusting device provided by the invention.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
It should be noted that when component is referred to as on " being installed in ", " being fixed on " or " being set to " another component, it can
Directly on another component or may be simultaneously present component placed in the middle.When a component be known as " being connected to " another
Component, it can be directly to another component or may be simultaneously present component placed in the middle.
Only it is relative concept each other it should also be noted that, the orientation term such as left and right, upper and lower in the embodiment of the present invention
Or with the normal operating condition of product be reference, and it should not be regarded as restrictive.
It please refers to Fig.1 with 2, microscopical Polydirectional adjusting device provided by the invention, including microscope stand 1, is used for
Install microscopical fixed seat 2, for making connecting rod 3 that microscope is moved forward and backward along X-axis, for making microscope be moved down along Z axis
Dynamic the first micro-adjusting mechanism 4, the second micro-adjusting mechanism 5 for making microscope be moved left and right along Y-axis and for adjusting microscope branch
The curved bar component 6 of the angle of frame 1 makes the coarse adjustment of microscope realization front and back position by the connecting rod 3, then micro- by described first
Regulating mechanism 4, the second micro-adjusting mechanism 5 can make microscope realization up and down and the fine tuning of left and right position, finally realize microscope three-dimensional
The adjustment in 6 orientation in space.
Specifically, the connecting rod 3 is slidably connected with fixed seat 2, first micro-adjusting mechanism 4 couples with connecting rod 3, described
Two micro-adjusting mechanisms 5 couple with the first micro-adjusting mechanism 4, and second micro-adjusting mechanism 5 passes through curved bar component 6 and microscope stand 1
It connects, so that microscope is realized that 2 axis rotations are adjusted by the curved bar component 6.The present invention can make 8 orientation of microscope realization
Adjustment, and have the characteristics that body function is strong, regulated efficiency is high.
In the embodiment of the present invention, first micro-adjusting mechanism 4 includes the first fixed block 41 and first movement block 42, and described the
One fixed block 41 is connect with the end of connecting rod 3, and the first movement block 42 and the side of the first fixed block 41 are slidably connected, and make institute
It states first movement block 42 to move relative to the first fixed block 41, to achieve the purpose that microscope can be made to move up and down.
The hand rotary nut moved up and down along Z axis for controlling first movement block 42 is provided on first fixed block 41
43, the hand rotary nut 43 is connect with first movement block 42, can be carried out to first movement block 42 by the hand rotary nut 43 micro-
It adjusts, in order to which staff operates.An at least differential head adjusting screw rod is provided on first movement block 42 (not mark in figure
Number), the differential head adjusting screw rod coordinates with hand rotary nut 43, by turning round the hand rotary nut 43 clockwise or counterclockwise, i.e.,
Opposite first fixed block 41 of first movement block 42 can be achieved to move up and down, that is, realize that first movement block 42 is moved in Z-direction, institute
Stating differential head adjusting screw rod has the features such as precision is high, good hand touch, adjustment smooth.
Please continue to refer to Fig. 1 and 2, second micro-adjusting mechanism 5 includes the second fixed block 51 and the second movable block 52, described
The side of second fixed block 51 is fixedly connected on the end of first movement block 42, and second movable block 52 is slideably positioned in second
The other side of fixed block 51, and the end of the second movable block 52 and first movement block 42 is oppositely arranged, and makes the first micro-adjusting mechanism 4
When being adjusted, the second micro-adjusting mechanism 5 is moved up and down with first movement block 42, and second micro-adjusting mechanism 5 passes through control when adjusting
It makes second movable block 52 to be moved left and right, that is, realizes that the second movable block 52 is moved in Y direction.Correspondingly, second is solid
Determine to be also equipped with differential head adjusting screw rod between block 51 and the second movable block 52, adjusts realization method and above-mentioned first freqency fine adjustment machine
Structure 4 is identical, and details are not described herein again.
In the present embodiment, second micro-adjusting mechanism 5 further includes the latch segment 53 for clamp or release curved bar component 6,
The latch segment 53 is set to one end of the second movable block 52, and the curved bar component 6 is set to the other end of the second movable block 52,
The latch segment 53 couples with curved bar component 6, and specifically when debugging, the latch segment 53 in the loosened condition, mixes up one in an axial direction
Determine after angle (shown in each arrow A of its adjustment mode), latch segment 53 locks curved bar component 6 again.
Specifically, the curved bar component 6 includes head rod 61, the second connecting rod 62 and third connecting rod 63, specifically
, the head rod 61 is set to the other end of the second movable block 52, passes through 53 clamp or release first of the latch segment
Connecting rod 61, when unclamping head rod 61, head rod 61 is rotatable, to adjust the angle of head rod 61, institute
It states the second connecting rod 62 to be set on head rod 61, the third connecting rod 63 is set in the second connecting rod 62, described
Microscope stand 1 is rotationally installed in the end of third connecting rod 63, make microscope stand 1 can along arrow B left-right rotations, from
And microscope can be made to carry out axial-rotation by the curved bar component 6, to adjust the angle of curved bar, keep microscopes accurately fixed
Position.
Further, second connecting rod 62 is rotatably set on head rod 61, the third connecting rod
63 are rotatably set in the second connecting rod 62, to realize that more perspective adjusts microscope stand 1.
Please continue to refer to Fig. 1 and Fig. 2, the first sliding groove (not shown) and slide unit are provided in the fixed seat 2 (in figure
It is not shown);Second sliding slot 31 is provided on the connecting rod 3, the bottom of connecting rod 3 is provided with sliding rail (not shown), the cunning
Rail is placed in the first sliding groove, and the slide unit is placed in second sliding slot 31, by the first sliding groove and sliding rail, second sliding slot 31 with
The cooperation of slide unit makes connecting rod 3 be relatively fixed when seat 2 is moved forward and backward and is not likely to produce shaking, more stable.
When specific operation, it first passes through the connecting rod 3 and carries out the coarse adjustment of front and back position, then carried out by first movement block 42
Then the fine tuning of lower position also carries out the fine tuning of left and right position by the second movable block 52, finally again by curved bar component 6 along the
One pitman shaft, in conjunction with the adjusting in multiple orientation, reaches machine to adjustment angle to third pitman shaft to realize fast speed coke
Structure functional, the features such as regulated efficiency is high.
Based on above-mentioned microscopical Polydirectional adjusting device, the present invention correspondingly provides a kind of microscope, including micro-
Mirror ontology and regulating device, the microscope ontology are installed in the regulating device, by the regulating device, keep display micro-
Mirror realizes the adjusting of multi-method, makes the product to be checked that microscopes quickly and are accurately aligned on inspection bench 100 (in figure not
Show), when efficiently solving because changing enlargement ratio, field of microscope shift and lead to problems such as to focus again it is difficult, slow.
Based on above-mentioned microscope, the present invention correspondingly provides a kind of push-pull effort machine, including apparatus body and microscope, institute
Microscope is stated to be fixed on apparatus body.
In conclusion microscope provided by the invention and its Polydirectional adjusting device and have the microscopical push-pull effort
Machine, the regulating device includes microscope stand, for installing microscopical fixed seat, for making microscope be moved before and after X-axis
Dynamic connecting rod, the first micro-adjusting mechanism for making microscope be moved up and down along Z axis, for making microscope be moved left and right along Y-axis
The curved bar component of second micro-adjusting mechanism and angle for adjusting microscope stand, before and after making microscope realize by the connecting rod
The coarse adjustment of position, then microscope can be made to realize left and right and upper and lower position by first micro-adjusting mechanism, the second micro-adjusting mechanism
Fine tuning finally makes microscope realize the adjustment in 6 orientation of three dimensions, also so that microscope is realized 2 by the curved bar component
A axial-rotation is adjusted.
The present invention solves the single micro- mirror adjustment mechanism on current multi-function sliding power test machine, operating difficulties, no
Practical and slow efficiency problem.A kind of quick, accurate, easy to operate regulating mechanism is provided, microscope can be made to realize multi-party
The adjustment of position solves difficulty inefficient when visual field offset needs to focus caused by changing enlargement ratio well,
Have the characteristics that body function is strong, regulated efficiency is high.
In addition, it is the configuration of the present invention is simple, at low cost, it is easy to operate, greatly improve working efficiency.
It, can according to the technique and scheme of the present invention and its hair it is understood that for those of ordinary skills
Bright design is subject to equivalent substitution or change, and all these changes or replacement should all belong to the guarantor of appended claims of the invention
Protect range.
Claims (10)
1. a kind of microscopical Polydirectional adjusting device, which is characterized in that including microscope stand, microscopical solid for installing
Reservation, for making connecting rod that microscope is moved forward and backward along X-axis, for make the first micro-adjusting mechanism that microscope moves up and down along Z axis,
The curved bar component of the second micro-adjusting mechanism for making microscope be moved left and right along Y-axis and the angle for adjusting microscope stand,
The connecting rod is slidably connected with fixed seat, and first micro-adjusting mechanism couples with connecting rod, second micro-adjusting mechanism and first micro-
Regulating mechanism couples, and second micro-adjusting mechanism is coupled by curved bar component with microscope stand.
2. microscopical Polydirectional adjusting device according to claim 1, which is characterized in that the first micro-adjusting mechanism packet
Include the first fixed block and first movement block, the end connection of first fixed block and connecting rod, the first movement block and first
The side of fixed block is slidably connected.
3. microscopical Polydirectional adjusting device according to claim 2, which is characterized in that set on first fixed block
It is equipped with the hand rotary nut moved up and down along Z axis for controlling first movement block, the hand rotary nut is connect with first movement block.
4. microscopical Polydirectional adjusting device according to claim 2, which is characterized in that the second micro-adjusting mechanism packet
The second fixed block and the second movable block are included, the side of second fixed block is fixedly connected on the end of first movement block, described
Second movable block is slideably positioned in the other side of the second fixed block, is oppositely arranged with the end of first movement block.
5. microscopical Polydirectional adjusting device according to claim 4, which is characterized in that second micro-adjusting mechanism is also
Include the latch segment for clamp or release curved bar component, the latch segment is set to one end of the second movable block, the curved bar
Component is set to the other end of the second movable block, and the latch segment couples with curved bar component.
6. microscopical Polydirectional adjusting device according to claim 5, which is characterized in that the curved bar component includes the
One connecting rod, the second connecting rod and third connecting rod, second connecting rod are set on head rod, the third connection
Bar is set in the second connecting rod, and the microscope stand is rotationally installed in the end of third connecting rod.
7. microscopical Polydirectional adjusting device according to claim 1, which is characterized in that be provided in the fixed seat
The first sliding groove and slide unit;Second sliding slot is provided on the connecting rod, the bottom of connecting rod is provided with sliding rail, and the sliding rail is placed in first
In sliding slot, the slide unit is placed in second sliding slot.
8. microscopical Polydirectional adjusting device according to claim 4, which is characterized in that first fixed block and
Differential head adjusting screw rod is both provided between one movable block and between the second fixed block and the second movable block.
9. a kind of microscope, which is characterized in that the adjusting dress including microscope ontology and as described in claim 1-8 any one
It sets, the microscope ontology is installed in the regulating device.
10. a kind of push-pull effort machine, which is characterized in that described micro- including apparatus body and microscope as claimed in claim 9
Mirror is fixed on apparatus body.
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CN201810379543.7A CN108627394A (en) | 2018-04-25 | 2018-04-25 | Microscope and its Polydirectional adjusting device and have the microscopical push-pull effort machine |
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CN201810379543.7A CN108627394A (en) | 2018-04-25 | 2018-04-25 | Microscope and its Polydirectional adjusting device and have the microscopical push-pull effort machine |
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Cited By (3)
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---|---|---|---|---|
CN109870798A (en) * | 2019-04-11 | 2019-06-11 | 中国电子科技集团公司第三研究所 | A kind of underwater eyepiece support frame |
CN109900545A (en) * | 2019-02-28 | 2019-06-18 | 深圳市德瑞茵精密科技有限公司 | A kind of crochet hook concentricity regulating mechanism |
CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
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