CN108626424A - 半导体单晶炉气囊密封式异形阀 - Google Patents

半导体单晶炉气囊密封式异形阀 Download PDF

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CN108626424A
CN108626424A CN201810662001.0A CN201810662001A CN108626424A CN 108626424 A CN108626424 A CN 108626424A CN 201810662001 A CN201810662001 A CN 201810662001A CN 108626424 A CN108626424 A CN 108626424A
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spool
valve body
inflation
auxiliary valve
water
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CN108626424B (zh
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赖章田
贺贤汉
夏孝平
黄保强
河野贵之
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Shanghai Hanhong Precision Machinery Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F16K27/045—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members with pivotal obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)

Abstract

本发明提供半导体单晶炉气囊密封式异形阀，包括一主阀体、一副阀体和阀芯，阀芯位于主阀体与副阀体之间，副阀体通过铰链安装在主阀体上，主阀体与副阀体的连接处设有O型密封圈，副阀体与铰链的连接处设有十个螺钉；阀芯包括磁流体、磁流体密封圈、阀芯密封圈、磁流体座、锁紧螺母、球轴承和下盖装配而成，阀芯通过驱动气缸绕磁流体的中心轴线旋转运动，阀芯开启的最大角度为65°；阀芯还包括阀芯充放气接头和安全气囊，阀芯充放气接头连接安全气囊，阀芯充放气接头上设有电磁阀。

Description

半导体单晶炉气囊密封式异形阀
技术领域
本发明涉及半导体设备制造行业，具体涉及半导体单晶炉气囊密封式异形阀。
背景技术
原有的隔离阀结构采用阀芯竖直旋转的方式，受结构影响，阀体空间较大，阀芯密封较差，长晶时工艺气流在此段会紊乱，晶棒直径波动大，容易NG。
发明内容
针对现有技术存在的问题，本发明提供半导体单晶炉气囊密封式异形阀，以解决传统隔离阀阀体空间较大，阀芯密封较差，长晶时工艺气流在此段会紊乱，晶棒直径波动大的问题。
本发明的技术方案是：半导体单晶炉气囊密封式异形阀，包括一主阀体、一副阀体和阀芯，所述阀芯位于主阀体与所述副阀体之间，所述副阀体通过铰链安装在所述主阀体上，所述主阀体与所述副阀体的连接处设有O型密封圈，所述副阀体与所述铰链的连接处设有十个螺钉；
所述阀芯包括磁流体、磁流体密封圈、阀芯密封圈、磁流体座、锁紧螺母、球轴承和下盖装配而成，所述阀芯通过驱动气缸绕磁流体的中心轴线旋转运动，所述阀芯开启的最大角度为65°；
所述阀芯还包括阀芯充放气接头和安全气囊，所述阀芯充放气接头连接所述安全气囊，所述阀芯充放气接头上设有电磁阀。
本发明通过阀芯充放气接头对阀芯的安全气囊充放气使主副阀体涨开与收紧运动，阀芯充放气接头通过外部电磁阀进行控制充气或放气，充气时阀芯气囊内充满一定压力的气体将主副阀体涨开，阀板密封圈与主阀体密封达到关闭的目的；放气时阀芯气囊内的气体排出主副阀体收拢，此状态下才可通过阀芯驱动气缸做水平旋转开闭运动，打开或关闭阀门。本发明通过阀芯由竖直开闭改成水平旋转开闭，由气缸驱动，并且采用磁性流体密封以解决阀芯密封较差、晶棒直径波动大的问题。阀体水平结构设计，由固定不动的主阀体和由铰链连接方便开闭的副阀体构成，节约空间，方便维护与清扫。
所述阀芯还包括一导入冷却水的阀芯进水接头和一阀芯出水接头，所述阀芯进水接头与所述阀芯出水接头构成一冷却通道，所述冷却通道是对阀芯进行冷却的冷却通道。
通过阀芯进水接头加入循环冷却水对阀芯进行冷却，冷却水将整个阀芯冷却后从阀芯出水接头排出。阀芯通过水冷可以确保密封圈在高温条件下的长期使用不至于损坏。
所述主阀体上设有一导入冷却水的阀体进出水接头，所述阀体进出水接头通过以外部水管与所述副阀体连接。
通过阀体进出水接头加入冷却水可以对主阀体和副阀体充分冷却，保护整个阀体长期处于常温状态下。
附图说明
图1为本发明的整体结构示意图；
图2为本发明的剖视图。
图中：1、主阀体；2、副阀体；3、阀芯；4、磁流体；5、O型密封圈；6、磁流体密封圈；7、阀芯密封圈；8、磁流体座；9、锁紧螺母；10、球轴承；11、下盖；12、驱动气缸；13、阀芯充放气接头；14、阀芯进水接头；15、阀芯出水接头；16、外部水管；17、阀体进出水接头。
具体实施方式
下面结合附图对本发明做进一步的说明。
如图1和图2所示，半导体单晶炉气囊密封式异形阀，包括一主阀体1、一副阀体2和阀芯3，阀芯位于主阀体与副阀体之间，副阀体通过铰链安装在主阀体上，主阀体与副阀体的连接处设有O型密封圈5，副阀体与铰链的连接处设有十个螺钉；阀芯包括磁流体4、磁流体密封圈6、阀芯密封圈7、磁流体座8、锁紧螺母9、球轴承10和下盖11装配而成，阀芯通过驱动气缸12绕磁流体的中心轴线旋转运动，阀芯开启的最大角度为65°；阀芯还包括阀芯充放气接头13和安全气囊，阀芯充放气接头连接安全气囊，阀芯充放气接头上设有电磁阀。
本发明通过阀芯充放气接头对阀芯的安全气囊充放气使主副阀体涨开与收紧运动，阀芯充放气接头通过外部电磁阀进行控制充气或放气，充气时阀芯气囊内充满一定压力的气体将主副阀体涨开，阀板密封圈与主阀体密封达到关闭的目的；放气时阀芯气囊内的气体排出主副阀体收拢，此状态下才可通过阀芯驱动气缸做水平旋转开闭运动，打开或关闭阀门。本发明通过阀芯由竖直开闭改成水平旋转开闭，由气缸驱动，并且采用磁性流体密封以解决阀芯密封较差、晶棒直径波动大的问题。阀体水平结构设计，由固定不动的主阀体和由铰链连接方便开闭的副阀体构成，节约空间，方便维护与清扫。
阀芯还包括一导入冷却水的阀芯进水接头14和一阀芯出水接头15，阀芯进水接头与阀芯出水接头构成一冷却通道，冷却通道是对阀芯进行冷却的冷却通道。通过阀芯进水接头加入循环冷却水对阀芯进行冷却，冷却水将整个阀芯冷却后从阀芯出水接头排出。阀芯通过水冷可以确保密封圈在高温条件下的长期使用不至于损坏。主阀体上设有一导入冷却水的阀体进出水接头17，阀体进出水接头通过以外部水管16与副阀体连接。通过阀体进出水接头加入冷却水可以对主阀体和副阀体充分冷却，保护整个阀体长期处于常温状态下。
以上仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。

Claims (3)

1.半导体单晶炉气囊密封式异形阀，其特征在于：包括一主阀体、一副阀体和阀芯，所述阀芯位于主阀体与所述副阀体之间，所述副阀体通过铰链安装在所述主阀体上，所述主阀体与所述副阀体的连接处设有O型密封圈，所述副阀体与所述铰链的连接处设有十个螺钉；
所述阀芯包括磁流体、磁流体密封圈、阀芯密封圈、磁流体座、锁紧螺母、球轴承和下盖装配而成，所述阀芯通过驱动气缸绕磁流体的中心轴线旋转运动，所述阀芯开启的最大角度为65°；
所述阀芯还包括阀芯充放气接头和安全气囊，所述阀芯充放气接头连接所述安全气囊，所述阀芯充放气接头上设有电磁阀。
2.根据权利要求1所述的半导体单晶炉气囊密封式异形阀，其特征在于：所述阀芯还包括一导入冷却水的阀芯进水接头和一阀芯出水接头，所述阀芯进水接头与所述阀芯出水接头构成一冷却通道，所述冷却通道是对阀芯进行冷却的冷却通道。
3.根据权利要求1所述的半导体单晶炉气囊密封式异形阀，其特征在于：所述主阀体上设有一导入冷却水的阀体进出水接头，所述阀体进出水接头通过以外部水管与所述副阀体连接。
CN201810662001.0A 2018-06-25 2018-06-25 半导体单晶炉气囊密封式异形阀 Active CN108626424B (zh)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115370773A (zh) * 2022-09-26 2022-11-22 浙江求是半导体设备有限公司 晶体生长炉
CN115370779A (zh) * 2022-08-25 2022-11-22 上海汉虹精密机械有限公司 一种单晶炉大直径旋板阀阀芯

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CN107012501A (zh) * 2017-03-29 2017-08-04 上海汉虹精密机械有限公司 一种单晶硅生长炉水冷套装置
US20180037073A1 (en) * 2014-12-30 2018-02-08 Advantaria Sl Valve with a number of ducts for passing and increased sealing
CN108119683A (zh) * 2017-12-18 2018-06-05 捷锐企业(上海)有限公司 一种阀芯结构及减压阀

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CN2396245Y (zh) * 1999-11-12 2000-09-13 肖业明 一种流体控制阀
US20100187455A1 (en) * 2007-09-07 2010-07-29 Microsys Technologies, Inc. Gas valve with high speed opening and high speed gas flow capability
CN202381820U (zh) * 2011-11-25 2012-08-15 中冶华天工程技术有限公司 充气密封阀自动充气装置
US20180037073A1 (en) * 2014-12-30 2018-02-08 Advantaria Sl Valve with a number of ducts for passing and increased sealing
CN205956425U (zh) * 2016-08-25 2017-02-15 瑞立集团瑞安汽车零部件有限公司 一种高度阀
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115370779A (zh) * 2022-08-25 2022-11-22 上海汉虹精密机械有限公司 一种单晶炉大直径旋板阀阀芯
CN115370773A (zh) * 2022-09-26 2022-11-22 浙江求是半导体设备有限公司 晶体生长炉

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