CN108624822A - A kind of nitrogenous iron gallium magnetostriction materials and preparation method thereof - Google Patents

A kind of nitrogenous iron gallium magnetostriction materials and preparation method thereof Download PDF

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CN108624822A
CN108624822A CN201710161659.9A CN201710161659A CN108624822A CN 108624822 A CN108624822 A CN 108624822A CN 201710161659 A CN201710161659 A CN 201710161659A CN 108624822 A CN108624822 A CN 108624822A
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magnetostriction materials
iron gallium
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iron
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CN108624822B (en
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罗阳
袁超
谢佳君
于敦波
武凯文
杨远飞
张洪滨
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Grirem Advanced Materials Co Ltd
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Priority to MYPI2018700993A priority patent/MY186635A/en
Priority to KR1020180029732A priority patent/KR20180106920A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00Magnetostrictive devices
    • H10N35/80Constructional details
    • H10N35/85Magnetostrictive active materials
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/001Ferrous alloys, e.g. steel alloys containing N
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00Heat treatment of ferrous alloys
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    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00Heat treatment of ferrous alloys
    • C21D6/008Heat treatment of ferrous alloys containing Si
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/002Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/02Ferrous alloys, e.g. steel alloys containing silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/06Ferrous alloys, e.g. steel alloys containing aluminium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48Ion implantation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00Magnetostrictive devices
    • H10N35/01Manufacture or treatment

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Abstract

A kind of nitrogenous iron gallium magnetostriction materials and preparation method thereof.The material composition and content of the present invention is expressed as Fe100‑x‑ yGaxMyNz, wherein M is Al, Si or B, x=15~20at%, y=0~1.5at%, z=0.1~1.0at%.The material surface of the present invention includes a certain amount of iron nitride, by the entrance of nitrogen, improves the Magnetostriction of iron gallium magnetostriction materials, and the iron nitride on surface is conducive to the raising of material corrosion resistance.

Description

A kind of nitrogenous iron gallium magnetostriction materials and preparation method thereof
Technical field
The invention belongs to magnetostriction materials field, in particular to a kind of iron gallium (FeGa) magnetostriction materials and Preparation method.
Background technology
Ferrimagnet is outside plus under magnetic fields, and shape and volume change, referred to as magnetostrictive effect.It is logical Normal practical application is line of material magnetostrictive effect, correspondence line magnetostriction coefficient λ=Δ L/L (L is material original length, Δ L is the variable quantity of the length of material under externally-applied magnetic field).Work as λ>0, i.e., under externally-applied magnetic field, material is extended along magnetic direction, referred to as Direct magnetostriction effect;Conversely, λ<0, then referred to as negative magnetostriction effect.Material is under externally-applied magnetic field, generated maximum Dependent variable, referred to as saturation magnetostriction constant (λ s), the size in corresponding magnetic field, referred to as saturated magnetization field (Hs).
Magnetostriction materials can realize the mutual conversion of electromagnetic energy and mechanical energy, have output power, energy density it is high, The advantages that good reliability, is important energy and information transition material, is one of most important functional material of high-tech sector, Underwater sound transducing, ultrasonic transducer, electroacoustic conversion, accurate brake, damping and noise control, intelligent machine, micro-displacement control contour skill Art field has wide practical use.The conventional metals magnetostriction materials such as FeNi, FeAl, Ni developed at present, magnetostriction Coefficient is relatively low, affects its popularization and application;And using TbDyFe as the rare earth ultra-magnetostriction material of representative, although having high magnetic Cause telescopicing performance, but poor processability, while rare earth cost of raw material height also limits it and is widely popularized.
Fe-Ga alloys are the one kind occurred after traditional magnetostriction materials and TbDyFe rare earth ultra-magnetostriction materials New Magnetostrictive Material is an important discovery of the people in the exploration of novel high-performance magnetostriction materials, is answered with height Force sensitivity, good heat-mechanical performance and Magnetostriction, have filled up traditional magnetostriction materials and rare-earth super-magnetic cause is stretched Blank between compression material has larger potential using value in ultrasound field and micro positioner etc..FeGa magnetostriction The preparation method of material is other than traditional directional solidification method, according to the difference of application field, also develops rolling, melt Quick quenching technique etc., by the material such as powder, film, silk material, plank etc. for preparing different dimensions, to meet the need of different field application It asks.Especially in high-power magnetostrictive ultrasonic transducer field, due to the resistivity of FeGa low (~9 × 10-7Ω m), Upper frequency not only reduces energy efficiency, but also can lead to material failure because of fever in use, will produce serious eddy-current loss, Meanwhile in order to avoid causing material failure under heat condition, the cooling of the media such as water can be used, to be easy to cause the corruption of FeGa Erosion.
The appearance of FeGa planks brings hope, at present the sound of energy converter for the development of high-frequency high-power ultrasonic transducer Power obtains at double or even the raising of the order of magnitude with respect to mainstream piezoelectric ultrasonic transducer.But meanwhile with the expansion of application field Exhibition is various with application environment, and to material, higher requirements are also raised, needs the Magnetostriction for further increasing FeGa, Improve environmental resistance, optimizes mechanical property, to adapt to increasingly harsh application demand.
Improve FeGa magnetostriction materials aspect of performance, US 20090039714A1 added in FeGa alloys Al or Be, addition obtain edge as grain growth inhibitor more than 1mol.%NbC by hot rolling, two step warm-rollings and subsequent heat treatment It rolls to the FeGa magnetostriction alloy sheetings with [001] texture.CN 101465406A are more than by adding atomic ratio 0.5% B, Cr, Nb, VC, TiC, MnS, AlN alloying element, and a small amount of S, Sn, Sb are unfavorable for the alloying element of magnetic property, borrow Help the H of low content (volume ratio 0.001-0.008%)2S or oxygen are obtained and are preferably taken in higher than 900 DEG C long heat treatment To Gauss or cubic polycrystalline orientation texture FeGa thin plates.Rare earth material is added in CN 101086912A propositions in FeGa, simultaneously C=200-600ppm, N=200-600ppm, O=200-700ppm are adulterated, to improve Magnetostriction.CN 103014594A proposes that oligo-element Al, Nb, C, B are added in FeGa bianry alloys forms member as inhibitor or inhibitor Element induces element, final obtain that there is the secondary recrystallization mangneto of strong goss texture to stretch using element S as secondary recrystallization Contracting strip, Magnetostriction is up to 300ppm or more.
The method of FeGa magnetostriction materials made above only improves the magnetic of material from ingredient and preparation process etc. Telescopicing performance is caused, the technology of material overall performance is improved by being surface-treated there is presently no open.
Invention content
For this purpose, one of the objects of the present invention is to provide a kind of nitrogenous FeGa magnetostriction materials.It is provided by the invention Not only Magnetostriction is been significantly enhanced material, and corrosion resistance be improved significantly, to improve the whole of material Body performance.
In order to achieve the above object, the present invention uses following technological means:
A kind of nitrogenous FeGa magnetostriction materials, the ingredient and content of the material are expressed as Fe100-x-yGaxMyNz, Middle M be Al, Si or B, x=15~20at%, for example, 16at%, 16.5at%, 17at%, 17.4at%, 18at%, 18.5at%, 19.1at%, 19.7at% etc., y=0~1.5at%, for example, 0.2at%, 0.4at%, 0.6at%, 0.8at%, 1.0at%, 1.2at%, 1.4at% etc., z=0.1~1.0at%, for example, 0.2at%, 0.35at%, 0.5at%, 0.7at%, 0.85at%, 0.96at% etc..At% is atomic percentage content.
Preferably, the material is plate, it is preferably lamellar.
Preferably, the thickness of the material be 0.1~0.5mm, for example, 0.15mm, 0.2mm, 0.25mm, 0.32mm, 0.38mm, 0.42mm, 0.46mm etc..
Preferably, the material includes the base layer and superficial layer of through-thickness.
Preferably, the thickness of the material surface layer be 5nm~5 μm, for example, 8nm, 10nm, 15nm, 30nm, 50nm, 100nm, 300nm, 500nm, 800nm, 1 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm etc..
Preferably, the material surface layer includes iron nitride, α "-Fe are preferably included16N2、γ′-Fe4N、ε-FexN (2<x≤3)、ζ-Fe2One kind or two or more combination in N and a certain amount of amorphous and α-Fe, further preferably mainly Including α "-Fe16N2
An object of the present invention, which also resides in, provides a kind of preparation method of iron gallium material of the present invention, including following Step:Prepare Fe100-x-yGaxMyBasis material, wherein M are Al, Si, B, x=15~20at%, y=0~1.5at%, to system The iron gallium material obtained is surface-treated to form iron nitride.
Preferably, being heat-treated after surface treatment.
Preferably, the heat treatment carries out in nitrogenous and hydrogen atmosphere.
Preferably, the atmosphere is NH3、NH3+H2Or N2+H2
Preferably, the volume ratio of hydrogen is not less than 5%, preferably not lower than 10% in the atmosphere.
Preferably, the surface treatment is using ion implanting or directly, heat treatment carries out.
Preferably, the surface treatment carries out in nitrogen containing atmosphere.
Preferably, the ion implanting processing step includes:Described matrix material is carried out using the ion beam containing N Ion implanting.
Preferably, the energy of ion beam is 50keV or more, preferably 100~800keV when the ion implanting.
Preferably, the nitrogen containing atmosphere when ion implanting is NH3、NH3+H2、N2+H2Or N2
Preferably, when atmosphere is NH3+H2Or N2+H2When, NH3Or N2With H2Ratio be more than 1:3.
Preferably, nitrogen partial pressure is more than 40% in the atmosphere.
Preferably, 400-800 DEG C of the heat treatment temperature being directly heat-treated, time 1-24h.
Preferably, the atmosphere being directly heat-treated is NH3、NH3+H2Or N2+H2, it is NH3+H2Or N2+H2When atmosphere in The volume ratio of hydrogen is not less than 20%, but is below 40%, for example, 23%, 26%, 31%, 36% etc..
Iron gallium material provided by the invention includes that nitrogenous superficial layer not only may be used by the auxiliary collaboration of superficial layer performance So that the Magnetostriction of iron gallium material is been significantly enhanced, and the corrosion resistance of the material can be obviously improved.
Specific implementation mode
Of the invention for ease of understanding, it is as follows that the present invention enumerates embodiment.Those skilled in the art are it will be clearly understood that the implementation Example is used only for helping to understand the present invention, should not be regarded as a specific limitation of the invention.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail with reference to embodiment.
It should be noted that term used herein above is merely to describe specific implementation mode, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative It is also intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, operation, device, component and/or combination thereof.
It is that extension iron gallium material is answered by background technology it is found that improving the corrosion resistance and Magnetostriction of iron gallium material With the key in field.The present invention is directed to the technical problem, proposes a kind of new nitrogenous iron gallium magnetostriction materials.The material Ingredient is Fe100-x-yGaxMyNz, M Al, Si, B, x=15~20at%, y=0~1.5at%, z=0.1~1.0at%.It should In aspect, by introducing nitrogen in the material, the interstitial atom effects of nitrogen are formed, and part reacts to form iron nitrification with Fe Object, the final Magnetostrictive Properties and corrosion resistance for influencing iron gallium material.
The illustrative embodiments according to Fe-based amorphous material provided by the invention are described in more detail below.However, These illustrative embodiments can be implemented by many different forms, and should not be construed to be limited solely to be explained here The embodiment stated.It should be understood that these embodiments are provided so that disclosure herein is thoroughly and complete, and And the design of these illustrative embodiments is fully conveyed to those of ordinary skill in the art.
The nitrogenous iron gallium material of the present invention is basic ingredient with FeGa, adds a certain amount of M on this basis to improve The processing performance of iron gallium material, at the same time, it is important that containing a certain amount of N in the ingredient, the introducing of N is to improve iron gallium material The key of correlated performance.Wherein in addition element M, M Al, Si, B, these materials mainly improve FeGa in the operation of rolling In ductility, improve the degree of orientation;It, can be improving the amorphous of material for the methods of fast quenching preparation process At ability, solid solutions of the N in FeGa materials can also be improved for the present invention by improving the ratio of the phases such as DO3 in material Degree.N is the basis of the present invention can generate interstitial atom effects, while can be formed by introducing nitrogen-atoms in FeGa materials Certain iron nitride, the whole Magnetostriction for improving material and surface anticorrosion performance.
Also certain proportionate relationship in the present invention, i.e. x=15~20at%, y=0~1.5at%, z=0.1~ 1.0at%.Wherein the ingredient of x be ensure FeGa structures formation and high-magnetostriction performance it is necessary, the introducing of y is mainly to change The related processing performance of kind material, while solid solubility of the N in FeGa is improved, therefore the content of y needs in 0~1.5at%, too The Magnetostriction of material can at most be reduced;For N, due to limited to the solid solubility of nitrogen in Fe, in the present invention, N contains Amount is in 0.1~1.0at%, to ensure the effect of the present invention.
In foregoing invention, preferably FeGa materials are plate, and plank is due to two-dimensional characteristics, due to larger contact Area, it is easier to nitrogen be allowed to enter inside iron gallium plank.Simultaneously as nitrogen is in injection process and follow-up heat treatment process, and N cannot be completely secured to be uniformly distributed in iron gallium matrix, therefore N more forms the dense of nitrogen in iron gallium material from surface to inside Spend gradient.When plank is too thick, N cannot be completely into material core, to be unfavorable for the raising of performance in the present invention, preferably iron The thickness of gallium material is 0.1~0.5mm.Preferably, the material includes the base layer and superficial layer of through-thickness.Together When, as previously described, after nitrogen enters, a part enters the interstitial void of base layer, to change the bulk crystal knot of material Structure, another part can form iron nitride in superficial layer, and in of the invention, iron nitride includes α "-Fe16N2, γ '- Fe4N, ε-FexN(2<X≤3), ζ-Fe2N and a certain amount of amorphous and α-Fe etc., the different properties of these nitride, to amorphous The influence of material overall performance is also different, wherein when the structure is γ '-Fe4N、ζ-Fe2When N, the raising to material corrosion resistance There is apparent effect.Preferably, the structure of superficial layer includes α "-Fe16N2, wherein α "-Fe16N2Saturation magnetization be up to The formation of 2.8T, the compound act on obviously the raising of overall performance.
Meanwhile there are many kinds of preparation methods for iron gallium material provided by the invention.Specifically, ion may be used in technical staff The modes such as injection are surface-treated to form the iron gallium magnetostriction for including high nitrogen-containing unazotized iron gallium basis material Material.
It will be specifically described the embodiment of the preparation method of above-mentioned iron gallium material below.The preparation method includes following step Suddenly:Prepare Fe100-x-yGaxMy, wherein M is Al, Si, B, x=15~20at%, y=0~1.5at%;To the iron gallium material It is surface-treated.
In a kind of preferred embodiment of the present invention, iron-based magnetostrictive material is prepared using ion implantation technology.Ion The basic principle of injection is incident in material with the ion beam that energy is 100keV magnitudes under certain atmosphere, ion beam with A series of physical and chemistry interaction will occur for atom or molecule in material, the gradual off-energy of incident ion, most After stop in the material, and material composition, structure and performance is caused to change, to optimize material property.It is excellent in the present invention Choosing uses iron gallium plank, carries out ion implanting using nitrogenous ion pair material, in the energy of injection, the energy of ion beam is 100~800keV.
Specifically, in ion implantation process, FeGa magnetostriction materials are put into ion implantation device, atmosphere be containing The atmosphere of nitrogen, such as preferably NH3, NH3+H2, N2+H2, N2.When atmosphere is NH3(N2)+H2When, NH3(N2) and H2Ratio be less than 1: 3.In the present invention, nitrogen is mainly made to enter in the material of FeGa bases, material matrix temperature etc. is not required.In order to reach this The nitrogen implantation dosage of invention needs nitrogen partial pressure to be more than 40%.
After being surface-treated to FeGa, there are one be heat-treated in atmosphere the step of, heat treatment is act as Make being uniformly distributed in FeGa matrixes of the nitrogen after injection, while iron nitride being made to form stable structure, ultimately facilitates The raising of whole Magnetostriction.As a preference of the present invention, heat treatment step preferably carries out in nitrogenous and hydrogen atmosphere, The presence of nitrogen may advantageously facilitate the uniform diffusion and reaction of nitrogen in the material, and the presence of hydrogen mainly provides a kind of reducing atmosphere, should Reducing atmosphere is most important, directly affects the dynamic conditions such as the rate of nitrogen diffusion, while the oxygen for reducing surface exists, to nitrogen Into and diffusion provide more multichannel.It is furthermore preferred that in the present invention in atmosphere heat treatment, atmosphere NH3, NH3+H2, N2+H2, gas The volume ratio of hydrogen is not less than 10% in atmosphere.
In another preferred embodiment of the invention, also can the magnetostriction material directly be prepared using heat treatment process Material, 400-800 DEG C of heat treatment temperature, time 1-24h.Likewise, preferably being carried out in nitrogenous and hydrogen atmosphere in the step, nitrogen Presence may advantageously facilitate the uniform diffusion and reaction of nitrogen in the material, the presence of hydrogen mainly provides a kind of reducing atmosphere, should be also Primordial Qi atmosphere is most important, directly affects the dynamic conditions such as rate of nitrogen diffusion, while the oxygen for reducing surface exists, to nitrogen into Enter and spread and more multichannel is provided.It is furthermore preferred that in the present invention in atmosphere heat treatment, atmosphere NH3, NH3+H2, N2+H2, atmosphere The volume ratio of middle hydrogen is not less than 20%, but is below 40%, accelerates the efficiency for being heat-treated nitriding to provide more nitrogen.
The material and preparation method thereof of offer is be provided below in conjunction with embodiment.
Embodiment 1
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe82.2Ga17.3N0.5, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include α "-Fe16N2With α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 2
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.5Ga17.9Al0.8N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the knot of superficial layer Structure includes ε-FexN+ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 600keV, and the atmosphere of heat treatment process is NH3
Embodiment 3
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.9Ga18.0B0.3N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure of superficial layer Including γ '-Fe4N、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.3mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 4
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.2Ga18.0N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include α "-Fe16N2With α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 600keV, and the atmosphere of heat treatment process is NH3+H2, the ratio of hydrogen is 30% wherein in atmosphere.
Embodiment 5
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe83.1Ga16.1N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include ε-FexN、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.2mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is N2+H2, the ratio of hydrogen is 30% wherein in atmosphere.
Embodiment 6
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.9Ga18.0Si0.3N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the knot of superficial layer Structure includes α "-Fe16N2+ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is N2+H2, the ratio of hydrogen is 20% wherein in atmosphere.
Embodiment 7
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe82.9Ga16.3N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include γ '-Fe4N、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.3mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 400keV, and the atmosphere of heat treatment process is N2+H2, the ratio of hydrogen is 10% wherein in atmosphere.
Embodiment 8
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.2Ga18.0N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3+H2, the ratio of hydrogen is 40% wherein in atmosphere.
Embodiment 9
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe82.5Ga16.5N1.0, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include α "-Fe16N2With α-Fe etc.;The iron gallium material thickness is 0.5mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 800keV, and the atmosphere of heat treatment process is NH3
Embodiment 10
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.0Ga18.0Al1.2N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the knot of superficial layer Structure includes γ '-Fe4N、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 11
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe82.0Ga17.2N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include α "-Fe16N2、γ′-Fe4N、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.4mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 12
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.0Ga18.0B0.2N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure of superficial layer Including γ '-Fe4N、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 300keV, and the atmosphere of heat treatment process is N2+H2, the ratio of hydrogen is 30% wherein in atmosphere.
Embodiment 13
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.7Ga18.0Si0.5N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the knot of superficial layer Structure includes α "-Fe16N2With α-Fe etc.;The iron gallium material thickness is 0.25mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is N2+H2, the ratio of hydrogen is 30% wherein in atmosphere.
Embodiment 14
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.2Ga18.0N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include γ '-Fe4N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3+H2, the ratio of hydrogen is 25% wherein in atmosphere.
Embodiment 15
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.2Ga19.0N0.8, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include α "-Fe16N2、ε-FexN and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3+H2, the ratio of hydrogen is 25% wherein in atmosphere.
Embodiment 16
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe80.2Ga18.0Al1.5N0.3, and the material includes base layer and the superficial layer positioned at matrix layer surface, the knot of superficial layer Structure includes ε-FexN、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.1mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 100keV, and the atmosphere of heat treatment process is NH3
Embodiment 17
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.5Ga18.0N0.5, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 18
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.1Ga18.0Si0.3B0.1N0.5, and the material includes base layer and the superficial layer positioned at matrix layer surface, superficial layer Structure includes α "-Fe16N2、ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 19
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe79.5Ga20.0N0.5, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include ζ-Fe2N and α-Fe etc.;The iron gallium material thickness is 0.3mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Embodiment 20
Present embodiments provide a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.9Ga18.0N0.1, and the material includes base layer and the superficial layer positioned at matrix layer surface, the structure packet of superficial layer Include ε-FexN、γ′-Fe4N and α-Fe etc.;The iron gallium material thickness is 0.35mm.
The step of preparing the iron gallium magnetostriction materials include:First, FeGa magnetostriction materials are prepared according to the ratio;So Afterwards, it uses nitrogenous ion beam to carry out ion implanting to basis material to form the iron gallium material, then it is heat-treated, The energy of intermediate ion beam is 500keV, and the atmosphere of heat treatment process is NH3
Comparative example 1
This comparative example provides a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe82.2Ga17.3
Comparative example 2
This comparative example provides a kind of iron gallium magnetostriction materials and preparation method thereof, wherein the magnetostriction materials Ingredient is Fe81.9Ga18.0
Performance test
The iron gallium magnetostriction materials obtained to embodiment 1 to 20 and comparative example 1 to 2 are tested for the property, test result As shown in table 1.As it can be seen from table 1 the iron gallium magnetostriction coefficient that embodiment 1 to 20 obtains is in 330ppm or more, and it is right Ratio 1 to 2 keeps its magnetostriction coefficient relatively small, while the material in embodiment is corrosion-resistant without carrying out Nitrogen ion infiltration Property significantly better than comparative example 1 to 2 obtain material.
Table 1
As can be seen from the table, the present invention realizes following technique effect:Iron gallium magnetostriction materials provided by the invention Containing nitrogen, proceed to the structure interval of FeGa by the infiltration of nitrogen, and the iron nitride of certain structure is formed on surface, To improve the magnetostriction coefficient of material, its corrosion resistance is improved.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or It changes still within the protection scope of the invention.

Claims (10)

1. a kind of nitrogenous FeGa magnetostriction materials, which is characterized in that the ingredient and content of the material are expressed as Fe100-x- yGaxMyNz, wherein M is Al, Si or B, x=15~20at%, y=0~1.5at%, z=0.1~1.0at%.
2. material according to claim 1, which is characterized in that the material is plate, preferably lamellar;
Preferably, the thickness of the material is 0.1~0.5mm.
3. according to claims 1 or 2 or the material, which is characterized in that the material includes the base layer of through-thickness With superficial layer;
Preferably, the thickness of the material surface layer is 5nm~5 μm.
4. according to claim 1-3 any one of them materials, which is characterized in that the material surface layer includes iron nitrification Object preferably includes α "-Fe16N2、γ′-Fe4N、ε-FexN(2<x≤3)、ζ-Fe21 in N and a certain amount of amorphous and α-Fe Kind or combination of more than two kinds further preferably include α "-Fe16N2
5. a kind of preparation method of claim 1-4 any one of them materials, includes the following steps:Prepare Fe100-x-yGaxMy Basis material, wherein M are Al, Si, B, and x=15~20at%, y=0~1.5at% carry out surface to iron gallium material obtained Processing is to form iron nitride.
6. preparation method according to claim 5, which is characterized in that be heat-treated after surface treatment;
Preferably, the heat treatment carries out in nitrogenous and hydrogen atmosphere;
Preferably, the atmosphere is NH3、NH3+H2Or N2+H2
Preferably, the volume ratio of hydrogen is not less than 5%, preferably not lower than 10% in the atmosphere.
7. preparation method according to claim 5 or 6, which is characterized in that the surface treatment is using ion implanting or directly Heat treatment is connect to carry out;
Preferably, the surface treatment carries out in nitrogen containing atmosphere.
8. according to claim 5-7 any one of them preparation methods, which is characterized in that the ion implanting processing step packet It includes:Ion implanting is carried out to described matrix material using the ion beam containing N.
9. according to claim 5-8 any one of them preparation methods, which is characterized in that the energy of ion beam when the ion implanting Amount is 50keV or more, preferably 100~800keV;
Preferably, the atmosphere when ion implanting is NH3、NH3+H2、N2+H2Or N2
Preferably, when atmosphere is NH3+H2Or N2+H2When, NH3Or N2With H2Ratio be more than 1:3;
Preferably, nitrogen partial pressure is more than 40% in the atmosphere.
10. according to claim 5-9 any one of them preparation methods, which is characterized in that at the heat being directly heat-treated Manage 400-800 DEG C of temperature, time 1-24h;
Preferably, the atmosphere being directly heat-treated is NH3、NH3+H2Or N2+H2, it is NH3+H2Or N2+H2When atmosphere in hydrogen Volume ratio be not less than 20%, but be below 40%.
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CN111349890A (en) * 2018-12-24 2020-06-30 有研工程技术研究院有限公司 Magnetoelectric composite film and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
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US20080115864A1 (en) * 2004-11-23 2008-05-22 Alison Behre Flatau Method of texturing polycrystalline iron/gallium alloys and compositions thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080115864A1 (en) * 2004-11-23 2008-05-22 Alison Behre Flatau Method of texturing polycrystalline iron/gallium alloys and compositions thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111349890A (en) * 2018-12-24 2020-06-30 有研工程技术研究院有限公司 Magnetoelectric composite film and preparation method thereof

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