CN108615792A - A kind of production method of back contact solar cell group - Google Patents

A kind of production method of back contact solar cell group Download PDF

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Publication number
CN108615792A
CN108615792A CN201810387184.XA CN201810387184A CN108615792A CN 108615792 A CN108615792 A CN 108615792A CN 201810387184 A CN201810387184 A CN 201810387184A CN 108615792 A CN108615792 A CN 108615792A
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China
Prior art keywords
crystalline silicon
circuit board
solar cell
production method
cell group
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Application number
CN201810387184.XA
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Chinese (zh)
Inventor
林应斌
芶富均
毛玲
李芬
屈克庆
兰洵
马丁·格林
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Xuzhou Dayto Photovoltaic Technology Co Ltd
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Xuzhou Dayto Photovoltaic Technology Co Ltd
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Priority to CN201810387184.XA priority Critical patent/CN108615792A/en
Publication of CN108615792A publication Critical patent/CN108615792A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876Particular processes or apparatus for batch treatment of the devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/048Encapsulation of modules
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/048Encapsulation of modules
    • H01L31/049Protective back sheets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a kind of production method of back contact solar cell group, manufacturing process steps are as follows:S1 is respectively formed positive charge film layer and negative electrical charge film layer in the front and back of crystalline silicon and crystalline silicon circuit board is made;S2 carries out boron diffusion technique to the shady face of crystalline silicon circuit board, forms p type diffusion region domain;Phosphorus atoms are fully goed deep into crystalline silicon circuit board by the way of magnetron sputtering, infiltration part are made to form N-type diffusion zone by S3;S4, using chemical vapour deposition technique;The tempered glass of the crystalline silicon circuit board correspondingly-sized processed is bonded by S5;Crystalline silicon circuit board in step S5 is sealed punching press by S6;S7 after sealing punching press 24 hours, forms solar battery group;S8, start battery charging.The charging of solar battery group that the present invention makes faster, lasts a long time, and charging temperature range is wider, while processing that consumables cost is relatively low, and product yield is largely increased, and achieves good economic benefit.

Description

A kind of production method of back contact solar cell group
Technical field
The present invention relates to battery processing technique field, especially a kind of production method of back contact solar cell group.
Background technology
Solar cell is also known as " solar chip " or " photocell ", is a kind of photoelectricity using the sunlight direct generation of electricity Wafer.As long as the illumination that it is satisfied certain illumination conditions is arrived, moment output voltage and can have the case where circuit Lower generation electric current.Physically it is being known as photovoltaic (Photovoltaic is abbreviated as PV), abbreviation photovoltaic.Solar-electricity Pond is the device for directly luminous energy being converted to by photoelectric effect or photochemical effect electric energy.The crystal silicon to be worked with photoelectric effect Solar cell is mainstream, and implements solar cell then also in the budding stage with the hull cell of photochemical effect work.
The application of solar cell at present enters industry, business, agricultural, communication, household from military field, space industry The departments such as electric appliance and public utility, it is particularly possible to dispersedly be used in outlying district, high mountain, desert, island and rural area, with section Save the expensive transmission line of electricity of cost.But at this stage, its cost is very high, and service life is shorter, for these problems, Here it is proposed that a kind of production method of back contact solar cell group.
Invention content
The present invention provides a kind of back contact solar cell group for technical deficiencies such as existing insecticidal formulations Production method.
The present invention is to solve above-mentioned technical deficiency, using modified technical solution, a kind of back contact solar cell group Production method, manufacturing process steps are as follows:
S1 is respectively formed positive charge film layer and negative electrical charge film layer in the front and back of crystalline silicon and crystalline silicon is made and integrates Plate, the positive charge film layer are formed by plasma lead plating membrane process, and the negative electrical charge film layer by carrying out plasma successively Lead oxide-coated antireflective coating, printing silver paste grid, sintering and import negative electrical charge and formed;
S2 carries out boron diffusion technique to the shady face of crystalline silicon circuit board, forms boron doped region, damaging layer can stop The diffusion of boron atom, to form multiple holes in wafer, the hole does not have electronics to become unstable, is easy to absorb Electronics and neutralize, formed p type diffusion region domain;
Phosphorus atoms are fully goed deep into crystalline silicon circuit board by the way of magnetron sputtering, infiltration part are made to be formed by S3 N-type diffusion zone;
S4 will be on the crystalline silicon circuit board that complete p type diffusion region domain and N-type diffusion zone using chemical vapour deposition technique Uniform coating silicon nitride film, the thickness control of the silicon nitride film is at 20-50 μm;
S5, the crystalline silicon circuit board external application ethylene-vinyl acetate copolymer that will be processed, and by correspondingly-sized Tempered glass is bonded;
Crystalline silicon circuit board in step S5 is put into the mold of the hydraulic press equipped with buffer unit by S6, carries out punching press, The operating pressure of hydraulic press is 6-12T, and the cushion effect of buffer unit is 0.8-3.2T, and the punch downstream rate of hydraulic press is 30- 50mm/s is sealed punching press;
S7 after sealing punching press 2-4 hours, connects circuit-line, connects anode and cathode, while can be gone here and there multiple Connection is in parallel, forms solar battery group;
S8, start battery charging check electric current and temperature after charging, ensure that free electron moves to cathode from anode, Complete battery production.
As present invention further optimization mode, in step S1, the crystalline silicon can also be substituted for non-crystalline silicon, arsenic Gallium or selenium indium copper.
As present invention further optimization mode, in step S1, the crystalline silicon is the height in 350~450 μm of thickness Made of on quality silicon chip, the silicon chip is formed from sawing on the silicon ingot for lifting or casting.
As present invention further optimization mode, in step S5, the light transmittance of the tempered glass is more than 91%, described Tempered glass is set as handling by ultrawhite tempering.
As present invention further optimization mode, in step S1, the making of the crystalline silicon is selected with SiH2Cl2、 SiHCl3、SiCl4Or SiH4, it is reaction gas, the lining for generating silicon atom and being deposited on heating is reacted under the protective atmosphere of argon gas On bottom, the substrate material selects Si, SiO2Or Si3N4
As present invention further optimization mode, in step S5, the silicon nitride film process condition is:Control ammonia Gas NH3With silane gas SiH4Flow-rate ratio be 1:0.5, then 250-450 DEG C of depositing temperature, time 10-15min is carried out quiet 1-2h is set, carrying out wiping with 95% ethanol liquid cleans, and completes processing.
The solar battery group charging that the present invention makes faster, lasts a long time, and charging temperature range is wider, reduces the sun Energy battery level, safety and environmental protection, and silicon nitride film and tempered glass have been added in outside, convenient for being sealed guarantor to element Shield, extends the service life of equipment, while processing that consumables cost is relatively low, and product yield is largely increased, and achieves very Good economic benefit.
Specific implementation mode
Below in conjunction in the embodiment of the present invention, technical solution in the embodiment of the present invention is clearly and completely retouched It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts Example, shall fall within the protection scope of the present invention.
The present invention provides a kind of technical solution:A kind of production method of back contact solar cell group, manufacturing process steps It is as follows:
S1 is respectively formed positive charge film layer and negative electrical charge film layer in the front and back of crystalline silicon and crystalline silicon is made and integrates Plate, the positive charge film layer are formed by plasma lead plating membrane process, and the negative electrical charge film layer by carrying out plasma successively Lead oxide-coated antireflective coating, printing silver paste grid, sintering and import negative electrical charge and formed;
S2 carries out boron diffusion technique to the shady face of crystalline silicon circuit board, forms boron doped region, damaging layer can stop The diffusion of boron atom, to form multiple holes in wafer, the hole does not have electronics to become unstable, is easy to absorb Electronics and neutralize, formed p type diffusion region domain;
Phosphorus atoms are fully goed deep into crystalline silicon circuit board by the way of magnetron sputtering, infiltration part are made to be formed by S3 N-type diffusion zone;
S4 will be on the crystalline silicon circuit board that complete p type diffusion region domain and N-type diffusion zone using chemical vapour deposition technique Uniform coating silicon nitride film, the thickness control of the silicon nitride film is at 20-50 μm;
S5, the crystalline silicon circuit board external application ethylene-vinyl acetate copolymer that will be processed, and by correspondingly-sized Tempered glass is bonded;
Crystalline silicon circuit board in step S5 is put into the mold of the hydraulic press equipped with buffer unit by S6, carries out punching press, The operating pressure of hydraulic press is 6-12T, and the cushion effect of buffer unit is 0.8-3.2T, and the punch downstream rate of hydraulic press is 30- 50mm/s is sealed punching press;
S7 after sealing punching press 2-4 hours, connects circuit-line, connects anode and cathode, while can be gone here and there multiple Connection is in parallel, forms solar battery group;
S8, start battery charging check electric current and temperature after charging, ensure that free electron moves to cathode from anode, Complete battery production.
In step S1, the crystalline silicon can also be substituted for non-crystalline silicon, GaAs or selenium indium copper.
In step S1, the crystalline silicon be made of the high quality silicon on piece of 350~450 μm of thickness, the silicon chip from Sawing forms on the silicon ingot of lifting or casting.
In step S5, the light transmittance of the tempered glass is more than 91%, and the tempered glass is set as by ultrawhite tempering Reason.
In step S1, the making of the crystalline silicon is selected with SiH2Cl2、SiHCl3、SiCl4Or SiH4, it is reaction gas, Reaction generates silicon atom and deposits on the heated substrate under the protective atmosphere of argon gas, and the substrate material selects Si, SiO2 Or Si3N4
In step S5, the silicon nitride film process condition is:Control ammonia NH3With silane gas SiH4Flow-rate ratio It is 1:0.5, then 250-450 DEG C of depositing temperature, time 10-15min carries out standing 1-2h, with 95% ethanol liquid into Row wiping cleaning, completes processing.
To sum up, the solar battery group charging that the present invention makes faster, lasts a long time, charging temperature range is wider, subtracts Few solar cell dosage, safety and environmental protection, and silicon nitride film and tempered glass have been added in outside, it is close convenient for being carried out to element Envelope protection, extends the service life of equipment, while processing that consumables cost is relatively low, and product yield is largely increased, and obtains Good economic benefit.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from the present invention spirit or In the case of essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state Bright restriction, it is intended that including all changes that come within the meaning and range of equivalency of the claims in the present invention It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiment being appreciated that.

Claims (6)

1. a kind of production method of back contact solar cell group, which is characterized in that manufacturing process steps are as follows:
S1 is respectively formed positive charge film layer and negative electrical charge film layer in the front and back of crystalline silicon and crystalline silicon circuit board is made, The positive charge film layer is formed by plasma lead plating membrane process, and the negative electrical charge film layer plates oxygen by carrying out plasma successively Change lead antireflective coating, printing silver paste grid, sintering and imports negative electrical charge and formed;
S2 carries out boron diffusion technique to the shady face of crystalline silicon circuit board, forms boron doped region, and damaging layer can stop boron original The diffusion of son, to form multiple holes in wafer, the hole does not have electronics to become unstable, is easy to absorb electronics And neutralize, form p type diffusion region domain;
Phosphorus atoms are fully goed deep into crystalline silicon circuit board by the way of magnetron sputtering, infiltration part are made to form N-type by S3 Diffusion zone;
S4 will be uniform on the crystalline silicon circuit board for completing p type diffusion region domain and N-type diffusion zone using chemical vapour deposition technique Coating silicon nitride film, the thickness control of the silicon nitride film is at 20-50 μm;
S5, the crystalline silicon circuit board external application ethylene-vinyl acetate copolymer that will be processed, and by the tempering of correspondingly-sized Glass is bonded;
Crystalline silicon circuit board in step S5 is put into the mold of the hydraulic press equipped with buffer unit by S6, carries out punching press, hydraulic pressure The operating pressure of machine is 6-12T, and the cushion effect of buffer unit is 0.8-3.2T, and the punch downstream rate of hydraulic press is 30-50mm/ S is sealed punching press;
S7 connects circuit-line after sealing punching press 2-4 hour, connects anode and cathode, at the same by multiple can connect or Parallel connection forms solar battery group;
S8, start battery charging check electric current and temperature after charging, ensure that free electron moves to cathode from anode, complete Battery production.
2. a kind of production method of back contact solar cell group according to claim 1, which is characterized in that step S1 In, the crystalline silicon can also be substituted for non-crystalline silicon, GaAs or selenium indium copper.
3. a kind of production method of back contact solar cell group according to claim 1, which is characterized in that step S1 In, the crystalline silicon is silicon of the silicon chip from lifting or casting made of the high quality silicon on piece of 350~450 μm of thickness Sawing forms on ingot.
4. a kind of production method of back contact solar cell group according to claim 1, which is characterized in that step S5 In, the light transmittance of the tempered glass is more than 91%, and the tempered glass is set as handling by ultrawhite tempering.
5. a kind of production method of back contact solar cell group according to claim 1, which is characterized in that step S1 In, the making of the crystalline silicon is selected with SiH2Cl2、SiHCl3、SiCl4Or SiH4, it is reaction gas, in the protection gas of argon gas Reaction generates silicon atom and deposits on the heated substrate under atmosphere, and the substrate material selects Si, SiO2Or Si3N4
6. a kind of production method of back contact solar cell group according to claim 1, which is characterized in that step S5 In, the silicon nitride film process condition is:Control ammonia NH3With silane gas SiH4Flow-rate ratio be 1:0.5, deposition temperature 250-450 DEG C of degree, then time 10-15min carries out standing 1-2h, carrying out wiping with 95% ethanol liquid cleans, and completes Processing.
CN201810387184.XA 2018-04-26 2018-04-26 A kind of production method of back contact solar cell group Pending CN108615792A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112909128A (en) * 2021-02-07 2021-06-04 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) Manufacturing method of heterojunction solar cell and heterojunction solar cell

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102148291A (en) * 2011-03-18 2011-08-10 天威新能源(扬州)有限公司 Manufacturing method of back contact battery in low ohmic contact
CN103681963A (en) * 2013-11-29 2014-03-26 奥特斯维能源(太仓)有限公司 Back-junction back-contact crystalline silicon solar cell manufacturing method
CN104576798A (en) * 2013-10-29 2015-04-29 Lg电子株式会社 Solar cell module and method for manufacturing same
CN107342340A (en) * 2017-06-29 2017-11-10 南京日托光伏科技股份有限公司 Double glass assemblies of back contact solar cell and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102148291A (en) * 2011-03-18 2011-08-10 天威新能源(扬州)有限公司 Manufacturing method of back contact battery in low ohmic contact
CN104576798A (en) * 2013-10-29 2015-04-29 Lg电子株式会社 Solar cell module and method for manufacturing same
CN103681963A (en) * 2013-11-29 2014-03-26 奥特斯维能源(太仓)有限公司 Back-junction back-contact crystalline silicon solar cell manufacturing method
CN107342340A (en) * 2017-06-29 2017-11-10 南京日托光伏科技股份有限公司 Double glass assemblies of back contact solar cell and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112909128A (en) * 2021-02-07 2021-06-04 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) Manufacturing method of heterojunction solar cell and heterojunction solar cell

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