CN108613686B

CN108613686B - Automatic trimming method for vibrating gyroscope

Info

Publication number: CN108613686B
Application number: CN201810396634.1A
Authority: CN
Inventors: 胡友旺; 段吉安; 曾凯; 孙小燕
Original assignee: Central South University
Current assignee: Central South University
Priority date: 2018-04-28
Filing date: 2018-04-28
Publication date: 2021-10-08
Anticipated expiration: 2038-04-28
Also published as: CN108613686A

Abstract

The invention belongs to the field of sensors, and discloses an automatic trimming method for a vibrating gyroscope, which comprises the following steps: (1) the natural frequencies of harmonic oscillators of the vibration gyroscope under two working modes are automatically measured, and a frequency cracking value is calculated according to the natural frequencies; (2) if the frequency cracking value does not meet the precision requirement, automatically determining a trimming mode and a corresponding trimming method by comparing the sizes of the two natural frequencies; (3) controlling the gyro to move to an expected processing position by automatically positioning the related physical position of the gyro and the physical position of the shape modification mechanism of the processing equipment; (4) and (3) automatically planning a machining process according to the relation between the mass to be removed and the machining process parameters, automatically trimming the spinning top according to the planned machining process, and returning to the step (1) after trimming is finished. The invention has high automation degree and improves the trimming precision and the trimming efficiency.

Description

Automatic trimming method for vibrating gyroscope

Technical Field

The invention relates to a vibrating gyroscope, in particular to an automatic trimming method for a vibrating gyroscope.

Background

With the continuous progress of aerospace technology, the requirements of high-resolution imaging, relay communication, navigation and other applications on the attitude stability and the service life of a satellite are higher and higher. The gyroscope is used as a core component of the satellite attitude control system and is used for measuring the angular displacement and the angular velocity of the satellite relative to an inertial space, and the zero-offset stability of the gyroscope is directly related to the satellite attitude stability. The on-orbit operation time of the satellite is more than 3 years and even reaches 10 years, the gyro is a vulnerable part in the satellite, and the continuous working time of the gyro is a key factor influencing the service life of the satellite. The vibrating gyroscope is a solid fluctuation gyroscope based on the Cogowski force principle, has the advantages of high sensitivity, low cost, high reliability, long service life and the like, and has better development potential. The vibrating gyroscope mainly comprises a hemispherical harmonic oscillator gyroscope, an MEMS micro gyroscope, a tuning fork gyroscope and the like, wherein the cylindrical shell vibrating gyroscope is a gyroscope which is relatively easy to process. The usa, russia, uk and the like are in the leading position in the aspect of the research of the vibration gyro, and the harmonic oscillator of the vibration gyro is researched by the middle school electronics group 26, the national defense science and technology university, the harabin industry university and the like in China, and has achieved substantial achievements in the aspects of the structural theory and the design of a control system of the vibration gyro.

The manufacturing of the vibrating gyroscope is a key step for verifying the theoretical research of the vibrating gyroscope. The university of defense science and technology has made a great deal of research in the aspects of theory and manufacture, and not only provides a corresponding theoretical model, but also manufactures a prototype. Prototypes can basically work as expected, but the working performance and the requirement are different. This difference is mainly due to manufacturing errors, including material uniformity, machining accuracy, residual internal stress, etc. In order to improve the working performance of the gyroscope and enable the gyroscope to meet the use requirements, the trimming of the harmonic oscillator after the fine machining is an important and effective method. The trimming process can make up for the defects on the harmonic oscillator material and the errors in processing, so that the harmonic oscillator works according to the required performance parameters.

Trimming precision and efficiency are two main indexes for evaluating the trimming process of the vibrating gyroscope. The precision directly determines the use occasion and market positioning of the gyroscope, and the shaping efficiency is a necessary guarantee for mass production. At present, most of trimming processes are manually finished, and uncertain factors are brought to control of removal quality, positioning of trimming positions and machining of trimming shapes, so that poor trimming precision and low efficiency are finally caused. And by adopting an automatic trimming technology, on one hand, high-precision positioning can be carried out by means of an image processing technology, and on the other hand, stable control of processing parameters can be realized, so that high-precision and high-efficiency trimming is achieved. At present, few reports on trimming equipment in China exist, and research on automatic trimming is less.

Disclosure of Invention

The invention aims to provide an automatic trimming method for a vibrating gyroscope, which has high automation degree and ensures trimming precision and efficiency.

In order to achieve the above object, the present invention provides an automatic trimming method for a vibration gyro (as shown in fig. 1), where fig. 2 is a schematic structural diagram of a trimming device, and the trimming method includes the following steps:

(1) the method comprises the following steps of automatically measuring natural frequencies of harmonic oscillators of the vibration gyro under two working modes, and calculating a frequency cracking value according to the natural frequencies;

(2) if the frequency cracking value does not meet the preset precision requirement, automatically determining a trimming mode and a corresponding trimming method by comparing the sizes of the two natural frequencies;

(3) controlling the spinning top to move to a desired processing position by automatically positioning the relevant physical position of the spinning top and the physical position of a processing equipment shape modification mechanism;

(4) automatically planning a machining process according to the relation between the quality to be removed and the machining process parameters, automatically trimming the spinning top according to the planned machining process, and returning to the step (1) after trimming is finished;

optionally, in the step (1), automatic switching between the two working modes is realized through a mode switching circuit, so as to realize continuous and uninterrupted rapid measurement of the natural frequencies in the two working modes. As shown in fig. 3, eight (four pairs) piezoelectric plates of a vibrating gyroscope are uniformly arranged at the bottom of the harmonic oscillator, one surface of each piezoelectric plate is bonded with the bottom of the harmonic oscillator through conductive glue and passes through the ground wire in the figure to be grounded, and the other surface of each piezoelectric plate leads out a lead wire to a corresponding electrode for inputting or outputting signals. The excitation piezoelectric sheet of the driving mode is used for exciting the gyroscope to vibrate in the driving mode, and the driving mode detection piezoelectric sheet is used for measuring the vibration frequency in the mode. When the piezoelectric sheet for detecting the mode is used for the gyroscope to work, the vibration frequency and the amplitude of the mode are measured under the condition of angular velocity input. And the detection mode compensation piezoelectric patch is used for compensating the measurement signal of the detection mode detection piezoelectric patch. From the above analysis it was found that the corresponding natural frequency can only be measured if the corresponding mode is excited to vibrate. During tuning, the natural frequencies of the two modes need to be measured. The methods generally employed are: an excitation signal is input from an excitation piezoelectric sheet of a drive mode, and a natural frequency of the drive mode is measured from a detection piezoelectric sheet of the drive mode. And then the excitation signal is input from the compensation piezoelectric sheet of the detection mode, and the natural frequency of the mode is measured by the detection piezoelectric sheet of the detection mode. In the process of switching the input signals, the lead wires need to be plugged, so that the measurement efficiency is reduced, and uncertain factors are brought by manual plugging. Therefore, the invention realizes the automatic switching of the circuit by combining the electromagnetic relay and giving out a control signal by the computer.

Optionally, in the step (2), the mode with low natural frequency is modified by a modification method of punching a hole at the top end of the cup wall of the harmonic oscillator (fig. 4), or the mode with high natural frequency is modified by a modification method of scratching a groove on the side wall (fig. 5). Research shows that the natural frequency of the mode where the hole is located can be improved by punching, and the natural frequency of the mode where the groove is located can be reduced by scratching. Therefore, the corresponding trimming method and mode can be automatically selected by comparing the natural frequency of the two modes.

Optionally, in the step (3), the related physical position of the vibratory gyroscope includes a physical position of a point to be processed of the resonator and a physical position of a working mode of the resonator, where the physical position of the point to be processed of the resonator refers to a position coordinate of the point to be processed of the resonator, and the physical position of the working mode of the resonator is an azimuth angle of the working mode of the resonator. As shown in fig. 6, images of the respective orientations of the gyro-resonator are acquired by the camera. The first camera 2 and the second camera 4 respectively acquire a side line and an axis of the harmonic oscillator, and through corresponding image processing, the x value of the point to be processed of the harmonic oscillator is acquired through the side line, and the y value of the point to be processed of the harmonic oscillator is acquired through the axis. And processing the picture of the

camera

2 or 4 to obtain the top end line coordinate of the harmonic oscillator as the z value of the point to be processed. Finally, a third camera 6 is used for overlooking the harmonic oscillator to shoot a circumferential picture, and the azimuth angle of the working mode of the harmonic oscillator can be obtained through processing. Therefore, the position coordinates of the point to be processed and the azimuth angle of the harmonic oscillator working mode can be automatically obtained.

Optionally, the processing device in step (3) is a laser or ion beam device, and the corresponding shaping mechanism is a laser or ion beam focusing point; the physical position of the shape modification mechanism of the processing equipment refers to the spatial coordinates of the focusing point, and three spatial coordinate values of the focusing point can be obtained by processing the images of the focusing point shot by the

cameras

2 and 4.

Optionally, the gyroscope in the step (3) is driven to an expected processing position through a three-degree-of-freedom motion platform and a rotating platform together; the three-degree-of-freedom motion platform drives the gyroscope to move in the X axial direction, the Y axial direction and the Z axial direction, so that the position coordinate of the point to be processed of the harmonic oscillator is superposed with the spatial coordinate of the focusing point; the rotating platform drives the gyroscope to rotate, so that the modal positioning identifier on the gyroscope rotates to an expected processing position. Under the condition that the position coordinate of a point to be processed of the harmonic oscillator, the working mode azimuth angle of the harmonic oscillator and the space coordinate of the focusing point are known, the system firstly judges whether the working mode azimuth angle of the harmonic oscillator is on the trimming azimuth, and if not, the harmonic oscillator is rotated to reach the corresponding position through the rotating platform. And calculating the difference value between the position coordinate to be processed of the harmonic oscillator and the space coordinate of the focusing point, determining X, Y and the distance of the Z axis which needs to be moved respectively, and realizing positioning by moving the three-degree-of-freedom motion platform. And the corresponding displacement parameters obtained by image processing are utilized to realize automatic positioning.

Optionally, the processing parameters in step (4) include laser energy, repetition frequency, polarization direction, pulse number, and the like of the laser device, and a motion trajectory of the three-degree-of-freedom motion platform during processing. After the positioning is finished, the laser and the three-degree-of-freedom motion platform can be controlled to realize automatic trimming, wherein the laser parameters, the motion trail of the three-degree-of-freedom motion platform and other processes are automatically generated by the system. The laser parameters are determined by the inherent frequency difference and the action mechanism of the laser and the harmonic oscillator material, and the motion trail of the three-degree-of-freedom motion platform during processing is determined by the shape modification. After the process is determined, corresponding laser parameters are realized by controlling an attenuation sheet, a laser, a polarizing sheet and an optical gate in the optical path of the laser equipment, and the three-degree-of-freedom motion platform is controlled to realize the planned processing track, so that automatic processing can be realized.

Optionally, in the step (4), after finishing the trimming for one time, the trimmed frequency cracking value is automatically measured, and whether the precision requirement is met and whether the trimming needs to be continued is judged. And if the precision requirement is met, finishing the trimming task of the gyroscope, otherwise, automatically entering the next trimming cycle to realize high-precision automatic trimming.

Through the technical scheme, the following beneficial technical effects can be realized:

1. the measurement mode can be automatically switched, the trouble of plugging and unplugging the lead wire is avoided, the loss of the circuit board caused by plugging and unplugging the lead wire for many times and uncertain factors of each time of plugging and unplugging the circuit are avoided, and the measurement precision and efficiency are improved;

2. the measured intrinsic frequency values of the two working modes are utilized to automatically judge the mode to be modified and the modification method, so that the judgment speed and the accuracy are improved;

3. by utilizing an image processing technology, automatic positioning is realized, and the positioning speed and precision are improved;

4. the trimming process parameters are automatically planned by utilizing the rule of the influence of laser on the trimming quality and the influence of the trimming quality on the natural frequency, so that the trimming efficiency is improved.

5. By combining motion control and laser parameter control, automatic processing is realized, and trimming precision and efficiency are improved;

additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.

Drawings

The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the embodiments of the invention without limiting the embodiments of the invention. In the drawings:

FIG. 1 is a flow chart of an automated trimming method for a vibratory gyroscope of the present invention;

FIG. 2 is a schematic structural diagram of an automatic trimming apparatus for a vibratory gyroscope according to the present invention;

FIG. 3 is a schematic diagram of a vibrating gyroscope piezoelectric patch arrangement;

FIG. 4 is a schematic diagram of a method for trimming a top end of a vibratory gyroscope according to the present invention;

FIG. 5 is a schematic diagram of a method for trimming a groove on a side wall of a vibratory gyroscope according to the present invention;

FIG. 6(a) is a schematic diagram of a first camera;

FIG. 6(b) is a schematic diagram of a second camera;

FIG. 6(c) is a schematic diagram of a third camera;

FIG. 6(d) is a schematic view of the positioning principle;

FIG. 7 is a processed image of a vibratory gyroscope orientation trimming mode azimuth angle in accordance with the present invention;

FIG. 8 is a processed image of a vibratory gyroscope for locating coordinates of a point to be processed according to the present invention;

fig. 9 is a processed image of locating the spatial coordinates of the laser focal point in the present invention.

Illustration of the drawings:

1: a Y-axis motion stage; 2: a first camera; 3: an X-axis motion stage; 4: a second camera; 5: shooting stations; 6: a third camera; 7: rotating the platform; 8: laser; 9: a gyro harmonic oscillator; 91 and 95: driving the mode excitation piezoelectric patch; 92 and 96: detecting a piezoelectric sheet in a detection mode; 93 and 97: a drive mode detection piezoelectric sheet; 94 and 98: detecting a modal compensation piezoelectric sheet; 10: and a Z-axis motion platform.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration and explanation only, not limitation.

In one embodiment of the invention, the position and the quality to be trimmed are automatically determined by measuring the frequency, the position to be trimmed is moved to a laser focusing point by an automatic positioning technology, the automatic trimming is realized by laser parameter control and motion control, and the automatic process design provides a trimming process for the automatic trimming. The vibration gyro is a cylindrical shell vibration gyro, and the trimming equipment is laser equipment.

As shown in fig. 1, the following sequence is generally implemented:

1. automatic measurement of natural frequency

Before trimming, the natural frequency of the gyro needs to be measured and the frequency cracking value needs to be calculated so as to guide the subsequent trimming work. As shown in fig. 3, eight (four pairs) piezoelectric plates of a vibrating gyroscope are uniformly arranged at the bottom of the harmonic oscillator, one surface of each piezoelectric plate is bonded with the bottom of the harmonic oscillator through conductive glue and passes through the ground wire in the figure to be grounded, and the other surface of each piezoelectric plate leads out a lead wire to a corresponding electrode for inputting or outputting signals. The excitation piezoelectric sheet of the driving mode is used for exciting the gyroscope to vibrate in the driving mode, and the driving mode detection piezoelectric sheet is used for measuring the vibration frequency in the mode. When the piezoelectric sheet for detecting the mode is used for the gyroscope to work, the vibration frequency and the amplitude of the mode are measured under the condition of angular velocity input. And the detection mode compensation piezoelectric patch is used for compensating the measurement signal of the detection mode detection piezoelectric patch. The computer sends out an instruction to start measuring the natural frequency, firstly, the excitation piezoelectric sheet of the driving mode inputs the excitation voltage, the gyro harmonic oscillator is excited to the resonance state, and the measured natural frequency is 5006.874 Hz. The electromagnetic relay is used for completing circuit switching, the compensation piezoelectric piece in the detection mode is used as an excitation piezoelectric piece to be connected into excitation voltage, the natural frequency of the detection piezoelectric piece in the detection mode is 5008.014Hz, and the frequency cracking value is calculated to be 1.140 Hz. At this time, whether the condition is met can be judged according to the precision requirement on frequency cracking. If the requirements are met, trimming is not needed, and if the requirements are not met, trimming is needed to be continued. In this example, the accuracy requirement is set to 0.2 Hz.

2. Automatic trimming mode judgment and trimming method

By comparing the natural frequencies of the drive and detection modes, the natural frequency of the detection mode is found to be higher than the drive mode by 1.140 Hz. As shown in fig. 4 and 5, the trimming of the scribe line can greatly reduce the rigidity of the gyro resonator, so that the trimming is more suitable for a high frequency cracking value, and therefore, the system in this example automatically determines the trimming using the punching. The natural frequency of the mode of the trimming position is slowly increased by the trimming of the punching, so that the system automatically selects a driving mode (a mode with low natural frequency) as the mode to be trimmed.

3. Automatic positioning

The installation angle of the positioning mark is obtained by processing the gyroscope image recognition mode positioning mark (straight line in fig. 7) which is shot by the third camera 6 and is positioned at the shooting station 5. Since the positioning mark is installed on the azimuth angle of the driving mode, the corresponding is the angle of the driving mode. Since the machining position is set at 90 degrees, it is necessary to rotate the index mark to 90 degrees so that the drive mode is located at the machining position. For example, if the inclination angle of the positioning mark is 85 degrees, it can be determined that the harmonic oscillator and the positioning mark should be rotated 5 degrees counterclockwise. The computer then sends an instruction to the rotation platform 7 to control it to rotate 5 degrees. After the rotation is finished, the picture is processed again, whether the picture reaches 90 degrees is judged (an error of 0.1 degree is allowed), and if the picture does not reach the error, the picture continues to move, so that high-precision positioning is realized.

After the corresponding mode is moved to the processing position, the position point to be corrected needs to be moved to coincide with the laser focusing point. To realize the positioning, as shown in fig. 2, coordinates of a to-be-processed point of the resonator 9 and a focusing point of the laser 8 are first acquired, and the position information of the to-be-processed point of the resonator includes a sideline abscissa (photographed by the first camera 2) as an X coordinate, an axis abscissa (photographed by the second camera 4) as a Y coordinate, and a vertex line ordinate (photographed by the first camera 2 or the second camera 4) as a Z coordinate. The processed image is shown in fig. 8, in which the large black area is the processed resonator image, and since the resonator is a rotationally symmetric structure, the images captured by the first camera 2 and the second camera 4 are both in the shape shown in fig. 8. Two vertical lines are the processed harmonic oscillator side lines, the abscissa of the right vertical line in the first camera 2 is taken as the X value of the point to be processed, and the abscissa of the center line of the two vertical lines in the second camera 4 is taken as the Y value of the point to be processed. And the vertical coordinate of the first transverse line close to the top end in the image is taken as the Z value of the point to be processed, so that the position coordinate of the point to be processed is automatically determined.

The position coordinates of the laser focusing point are also obtained from the images shot by the first camera 2 and the second camera 4, and the shot images are as shown in fig. 9, wherein only the middle position is provided with a white point, and the white point is the laser focusing point. The contents of the pictures shot by the first camera 2 and the second camera 4 are basically consistent, the abscissa of the white point in the first camera 2 is not taken as the X value of the focusing point, the abscissa of the white point in the second camera 4 is taken as the Y value of the focusing point, and the Z value of the focusing point can be the ordinate of the white point in the first camera 2 or the ordinate of the second camera 4, but the Z value and the Z value of the point to be processed are taken from the pictures shot by the same camera. Then, by processing the images of the first camera 2 and the second camera 4, the coordinate values of the focused point are also automatically acquired.

And finally, controlling the three-dimensional motion platform to position by calculating the distance between the point to be processed and the focus point. Specifically, the coordinates of the point to be processed obtained by the image processing are (2439,1306,600) (note: the unit of the coordinates is pixel), and the coordinates of the laser focusing point are (2461,1295,507). And subtracting the coordinate of the point to be processed from the coordinate of the laser focusing point to obtain (22, -11, -93), and then controlling the motion platform to move by the computer by using the difference data, so that the X-axis motion platform 3 moves by an actual distance corresponding to 22 pixel values in the positive direction, the Y-axis motion platform 1 moves by an actual distance corresponding to 11 pixels in the negative direction, and the Z-axis motion platform 10 moves by an actual distance corresponding to 93 pixels in the negative direction. After the movement is finished, whether the position coordinate difference value between the point to be processed and the laser focusing point meets the precision requirement (the positioning precision is less than 50 microns) is judged again. And after the positioning is automatically finished and the corresponding positioning precision is reached, the automatic processing can be carried out.

4. Automatic processing

When the laser focusing point is superposed with the point to be processed, the laser shutter is opened to realize processing. But different trimming parameters need to be implemented for different frequency cracking values. The three main factors affecting trimming are the trimming position, the trimming shape and the amount of material removed. The shape modification position is ensured by automatic accurate positioning, the shape modification shape is determined by a processing track, and the material removal quantity is related to parameters such as the energy, the repetition frequency, the pulse number and the like of laser. In order to realize the automatic processing, the system can automatically plan a track according to the shape modification shape, determine laser parameters according to the material removal amount, and control hardware to execute a modification task. As described above, when holes need to be drilled in the resonator driving mode, the diameter of the holes needs to be planned to determine whether or not radial feeding is necessary. And the walking track of the distance between the four repaired holes needs to be planned, so as to control the three-

dimensional motion platforms

1, 3 and 10 to realize corresponding track processing. The laser parameters need to be calculated by researching the action rule of the laser and the harmonic oscillator material, then the energy is changed by controlling the attenuation sheet, the laser is controlled to change the repetition frequency of the output pulse laser, and the optical gate is controlled to change the pulse number, so that the automatic processing is completed.

5. Circulation trimming

And after finishing one-time trimming, the natural frequencies of the two working modes are continuously measured, the natural frequency of the driving mode is 5006.963Hz, the natural frequency of the detection mode is 5007.720Hz, and the cracking value is 0.757 Hz. The frequency-cracked value still does not meet the accuracy requirement (0.2Hz), so further trimming is needed. The trimming system automatically repeats the steps, and the frequency cracking value can be reduced to be below 0.2Hz through multiple cycles, and the specific process is shown in the following table.

Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, the embodiments of the present invention are not limited to the details of the above embodiments, and various simple modifications can be made to the technical solutions of the embodiments of the present invention within the technical idea of the embodiments of the present invention, and the simple modifications all belong to the protection scope of the embodiments of the present invention.

It should be noted that the various features described in the above embodiments may be combined in any suitable manner without departing from the scope of the invention. In order to avoid unnecessary repetition, the embodiments of the present invention do not describe every possible combination.

In addition, any combination of various different implementation manners of the embodiments of the present invention is also possible, and the embodiments of the present invention should be considered as disclosed in the embodiments of the present invention as long as the combination does not depart from the spirit of the embodiments of the present invention.

Claims

1. An automatic trimming method for a vibrating gyroscope is characterized by comprising the following steps:

(3) automatically positioning a related physical position of the gyroscope and a physical position of a shape modification mechanism of processing equipment on a shooting station through a camera and a positioning identifier arranged on a working mode azimuth angle to control the gyroscope to move to an expected processing position, wherein the related physical position comprises a physical position of a to-be-processed point of a harmonic oscillator and a physical position of a working mode of the harmonic oscillator, and the physical position of the to-be-processed point of the harmonic oscillator is a position coordinate of the to-be-processed point of the harmonic oscillator; the physical position of the harmonic oscillator working mode is a harmonic oscillator working mode azimuth angle, the position coordinates of the harmonic oscillator to-be-machined point are obtained by collecting images of a side line, an axis line and a top line of the harmonic oscillator, and the harmonic oscillator working mode azimuth angle is obtained by collecting an image of a mode positioning identifier;

(4) and (3) automatically planning a machining process according to the relation between the quality to be removed and the machining process parameters, automatically trimming the spinning top according to the planned machining process, and returning to the step (1) after trimming is finished.

2. The automatic trimming method for a vibration gyro according to claim 1, wherein in the step (1), the automatic switching between the two working modes is realized by a mode switching circuit so as to continuously and rapidly measure the natural frequencies in the two working modes.

3. The automatic trimming method for a vibrating gyroscope according to claim 1, wherein in the step (2), the trimming method is to perform trimming by using a trimming method of punching a hole at the top end of the cup wall of the harmonic oscillator in a mode with low natural frequency, or perform trimming by using a trimming method of notching a side wall in a mode with high natural frequency.

4. The automatic trimming method for vibrating gyros according to claim 3, wherein in the step (3), the processing device is a laser or ion beam device, and the corresponding trimming mechanism is a laser or ion beam focusing point.

5. The automatic trimming method for the vibrating gyroscope according to claim 4, wherein the physical position of the trimming mechanism of the processing equipment refers to the spatial coordinate and the energy field distribution of the laser or ion beam focusing point, and the spatial coordinate and the energy field distribution of the focusing point are acquired by collecting the image of the focusing point.

6. A vibration gyro automatic trimming method according to claim 5, wherein in the step (3), the gyro is driven to the desired processing position by a rotating platform and a three-degree-of-freedom motion platform together;

the rotating platform drives the gyroscope to rotate, so that the modal positioning identifier on the gyroscope rotates to an expected processing position;

and the three-degree-of-freedom motion platform drives the gyroscope to move in the X axial direction, the Y axial direction and the Z axial direction, so that the position coordinate of the point to be processed of the harmonic oscillator is superposed with the spatial coordinate of the laser focusing point.

7. The automatic trimming method for vibrating gyros according to claim 6, wherein the processing parameters in step (4) include, but are not limited to, laser energy, repetition frequency, polarization direction and pulse number of the laser device, and motion trajectory of the three-degree-of-freedom motion platform during processing.

8. The automatic trimming method for a vibrating gyroscope according to claim 7, characterized in that laser energy, repetition frequency, polarization direction and pulse number are calculated according to the mass to be removed, and a processing track is planned;

the laser energy, the repetition frequency, the polarization direction and the pulse number are regulated and controlled by controlling an attenuation sheet, a laser, a polarizing sheet and an optical gate in the optical path of the laser equipment, and the coordination action of laser parameters and the motion platform is realized to achieve the effect of automatic trimming and adjusting by matching with the control of the three-degree-of-freedom motion platform.