CN108609578A - A kind of preparation method of multistage micro-nano motor - Google Patents
A kind of preparation method of multistage micro-nano motor Download PDFInfo
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- CN108609578A CN108609578A CN201810412434.0A CN201810412434A CN108609578A CN 108609578 A CN108609578 A CN 108609578A CN 201810412434 A CN201810412434 A CN 201810412434A CN 108609578 A CN108609578 A CN 108609578A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 238000004070 electrodeposition Methods 0.000 claims description 18
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 239000002070 nanowire Substances 0.000 claims description 14
- 238000007747 plating Methods 0.000 claims description 12
- 230000033001 locomotion Effects 0.000 claims description 11
- 239000004417 polycarbonate Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 229920000515 polycarbonate Polymers 0.000 claims description 10
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- 238000009415 formwork Methods 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910021607 Silver chloride Inorganic materials 0.000 claims description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims description 4
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 claims description 4
- 238000003828 vacuum filtration Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910021592 Copper(II) chloride Inorganic materials 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 3
- 229910002666 PdCl2 Inorganic materials 0.000 claims description 3
- 239000002659 electrodeposit Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910017604 nitric acid Inorganic materials 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 229910052938 sodium sulfate Inorganic materials 0.000 claims description 3
- 235000011152 sodium sulphate Nutrition 0.000 claims description 3
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 229910000368 zinc sulfate Inorganic materials 0.000 claims description 3
- 239000011686 zinc sulphate Substances 0.000 claims description 3
- RCEAADKTGXTDOA-UHFFFAOYSA-N OS(O)(=O)=O.CCCCCCCCCCCC[Na] Chemical class OS(O)(=O)=O.CCCCCCCCCCCC[Na] RCEAADKTGXTDOA-UHFFFAOYSA-N 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 6
- 239000010931 gold Substances 0.000 description 9
- 238000011160 research Methods 0.000 description 5
- 239000003814 drug Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229940079593 drug Drugs 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 206010059866 Drug resistance Diseases 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000004425 Makrolon Substances 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000013270 controlled release Methods 0.000 description 1
- 238000011262 co‐therapy Methods 0.000 description 1
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- 238000006731 degradation reaction Methods 0.000 description 1
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- 238000001514 detection method Methods 0.000 description 1
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- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical class CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- 239000003937 drug carrier Substances 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001095 motoneuron effect Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- IRPDISVJRAYFBI-UHFFFAOYSA-N nitric acid;potassium Chemical compound [K].O[N+]([O-])=O IRPDISVJRAYFBI-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229940124597 therapeutic agent Drugs 0.000 description 1
- 230000001225 therapeutic effect Effects 0.000 description 1
- 239000003981 vehicle Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00539—Wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
- B81C1/00611—Processes for the planarisation of structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B1/002—Devices comprising flexible or deformable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/037—Microtransmissions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0133—Wet etching
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The present invention proposes a kind of preparation method of multistage micro-nano motor, it is proposed that a kind of preparation method of multistage micro-nano motor is prepared for a kind of driving micron motor of chemistry of the driving nano-motor of novel load magnetic field.The motor can be moved first in chemical fields and gradually discharge Magnetic driving nano-motor, and the nano-motor discharged can move under field drives again, to execute respective goal task.The invention further can accurately control the placement position of nano-motor, and fractional motor is made to be run in finer working region；The fractional motor that different driving mode can be loaded simultaneously, realizes it in more various application values.
Description
Technical field
The present invention relates to micro-nano motor technologies fields, more particularly, to a kind of preparation method of multistage micro-nano motor.
Background technology
Micro-nano motor be it is a kind of can by multiple kinds of energy (chemical energy, luminous energy, acoustic energy, electric energy, magnetic energy etc.) activate and transport
Dynamic (rotation, shuttle, aggregation, diffusion etc.), and size is micron or nano level microdevice.The research boom of micro-nano motor by
Multiple subjects such as chemistry, physics, biology, environmentology, tribology, hydrodynamics are gradually penetrated into, current nano science is become
Hot spot in research field.By the development in more than ten years, no matter micro-nano motor is from movenent performance, preparation process, or actually answers
With achieving considerable progress.It is driving that the energy source driven according to motor can be divided into the chemical energy generated by chemical reaction
Or external world's physical energy is driving (luminous energy, acoustic energy, magnetic energy, electric energy).The driving motor of chemical energy, as the term suggests it is passing through of one kind
The micro-nano motor that reaction provides energy is learned, currently, usually with H2O2、HCl、N2H4、I2Deng for fuel report it is more；Physical energy drives
Ejector half motor refers to then providing energy by extraneous physical field come the micro-nano motor that drives, such as optical drive micro-nano motor, sound-driving
Micro-nano motor, Magnetic driving micro-nano motor, electric drive micro-nano motor etc..Meanwhile huge variation also has occurred in the form of motor, is in
Existing diversified development.From initial bimetal nano line, more metal nanometer lines, micron tube, Janus balls and spiral till now
The forms such as line emerge one after another, and the motor of different shape can drive itself using different energy.Micro-nano motor is as removable
Microdevice, matter transportation, cancer cell capture be isolated, DNA is detected, ion identification and identification, organic matter degradation,
Oily waste treatment etc. embodies preferable application value.Micro-nano motor is the forward position focus in current nanotechnology research field,
Its appearance provides completely new thinking without the practical problem suspected of the following microsystem of solution.
Studies have shown that by the way that the nano particle for being loaded with drug to be attached on the outer surface of micro motor, motor can be with
Therapeutic agent is effectively carried to by target location with the speed higher than three orders of magnitude of conventional Brownian movement by predefined path.This
A little artificial synthesized microdevices are other than the notable control to the direction of motion, also in early stage in terms of other, wherein
Micro-nano motor is explored urgently to realize in the application of biomedical aspect.It is micro-nano motor that cargo is delivered in a manner of controllable and is quick
One of main application.However, crucial challenge is how to design, the motor with appropriate function is manufactured and optimizes, to realize
The effective delivery and release of cargo.It is expected that reliable delivery vehicle can carry lot cargo to improve validity (such as drug
Therapeutic efficiency in delivering), while different types of cargo is delivered for multitask (such as the treatment for overcoming drug resistance
Or conjoint therapy), effective cargo (such as Drug controlled release) is discharged in a manner of a kind of response, and discharge when no longer needing
Itself.In order to meet these crucial multi-functional requirements, we use template assist in electrodeposition method, make respectively in this patent
Nano wire is prepared using AAO templates with two kinds of templates of aluminium oxide (AAO) and makrolon (PC), then using the side of etching
Method prepares the nano thread structure of spiral；Using PC templates, micron rocket is prepared.Using the method for vacuum filtration, by spiral
Nano thread structure is pumped into micron rocket, successfully constructs a kind of micron fire of new chemical driving and the full load of field drives
Arrow, our this motor is referred to as two level motor, has the function of delivery, transmission and release.
The research of current micro-nano motor has been achieved for prodigious progress, and existing research is concentrated mainly on particle, Janus
The motor of the micro-nano motor of the patterns such as ball, nano wire, nanometer sheet, helix, these single forms still suffers from sport efficiency not
High, carrying capacity deficiency problem.Since fluid viscosity is excessive, the movement of micro-nano motor effect hindered can be made, motor
Movement velocity declines, and their running environment is single, and then motor is caused to execute specific task (such as drug carrier, object
Quality detection, water process, bacterium and cell capture transport etc.) when efficiency be greatly reduced, which greatly limits motor applications potentiality.
Invention content
The present invention proposes a kind of preparation method of multistage micro-nano motor, which can the first movement and gradual in chemical fields
Magnetic driving nano-motor is discharged, the nano-motor discharged can move under field drives again, to execute respective goal task.
The invention further can accurately control the placement position of nano-motor, and fractional motor is made to be run in finer working region；Together
When can load the fractional motor of different driving mode, realize it in more various application values.
The technical proposal of the invention is realized in this way：A kind of preparation method of multistage micro-nano motor：
Then step 1 uses Pt with one layer of Ag of magnetron sputtering coater sputtering on alumina formwork as working electrode
Electrode and Ag/AgCl reference electrodes, are barricaded as three-electrode system, using template assist in electrodeposition method, difference electro-deposition Ag, Au, Pd/
The plating solution of Cu, Pd/Cu alloy includes 30mM PdCl2, 20mM CuCl2With 0.1M HCl；
Step 2, Au layers are polished off with 3-4 μm of aluminum oxide polishing powder, and alumina formwork is dissolved in 3M NaOH solutions
Middle 30min is then centrifuged for washing and solution is washed into neutrality, then use Ag sacrificial layers and Cu to discharge nano wire motor completely
Concentrated nitric acid etches 10min, obtains the spiral nanometer line motor of Pd；
Step 3 on the glass sheet by the spiral nanometer line motor tiling of obtained Pd is sputtered with magnetron sputtering coater
One layer of W metal, then ultrasound release Pd/Ni spiral nanometer line；
Step 4, with template assist in electrodeposition method, we use magnetron sputtering plating in 2 μm of polycarbonate template first
Machine sputters layer of Au, electro-deposition PEDOT outer layers, and plating solution includes 8 μ L 3,4-rthylene dioxythiophenes (EDOT), 0.075g nitric acid
Potassium (KNO3), 2.88g dodecyl sodium sulfates (SDS) and 10mL water；Then using the method for vacuum filtration, by the spiral shell of Pd/Ni
Rotation nano wire is pumped into the polycarbonate template of PEDOT outer layers；
The PEDOT polycarbonate templates of spiral nanometer line containing Pd/Ni are barricaded as three-electrode system by step 5 again,
Template assist in electrodeposition method is equally used, electrodeposit metals Zn, plating solution includes 80g L-1 ZnSO4With 20g L-1 H3BO3, directly
Cover with the template in 2 μm of apertures completely to metal Zn；
Template is dissolved in 10min in dichloromethane solution by step 6, to discharge motor completely, is then centrifuged for, is washed,
To obtain the full load micron rocket of PEDOT/Zn/Pd/Ni；
The full load micron rocket of PEDOT/Zn/Pd/Ni is placed in containing 0.3M HCl and 1.7% triton X- by step 7
In 100 running environment, the case where being observed the motion conditions of motor with inverted fluorescence microscope and discharged nano wire fractional motor, and
Motion conditions of the nano wire fractional motor in magnetic field are observed, then the speed with corresponding software detection full load micron rocket is big
It is small.
As a kind of perferred technical scheme, it is CHI660E using electrochemical workstation model in step 1.
Above-mentioned technical proposal is used, beneficial effects of the present invention are：The preparation method of multistage micro-nano motor of the invention, carries
A kind of model by big motor delivery fractional motor is gone out, and can accurately control the placement position of fractional motor, so as to fractional motor
More efficient completion task, provides for motor and is widely applied range.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art
With obtain other attached drawings according to these attached drawings.
Fig. 1 is Pd/Cu nanometer spirals line specific experiment flow chart of the present invention；
Fig. 2 is that the SEM of Pd helixes of the present invention schemes；
Fig. 3 is preparation flow such as figure below of the multistage micron rocket of the present invention；
Fig. 4 is that the SEM of PEDOT/Zn/Pd/Ni two levels motor of the present invention schemes；
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
As shown in Figs 1-4, a kind of preparation method of multistage micro-nano motor, includes the following steps：
Then step 1 uses Pt with one layer of Ag of magnetic controlled ion plating film machine sputtering on alumina formwork as working electrode
Electrode and Ag/AgCl reference electrodes, are barricaded as three-electrode system, use electrochemical workstation, model CHI660E, using template
Assist in electrodeposition method, electro-deposition Ag, Au, Pd/Cu, the plating solution of wherein Ag, Au directly buy commercial plating solution, Pd/Cu conjunctions respectively
The plating solution of gold includes 30mM PdCl2, 20mM CuCl2With 0.1M HCl.In Fig. 1, a is that electro-deposition one cuts Au；B is electro-deposition Pd/
Cu alloys；C is to dissolve template, discharges Pd/Cu nano wires；D is to etch away Ag and Cu；E is sputtering layer of Ni.
Step 2 polishes off Au layers with 3-4 μm of aluminum oxide polishing powder, and the NaOH that 3M is dissolved on alumina formwork is molten
Liquid 30min is then centrifuged for washing and solution is washed into neutrality, then use Ag sacrificial layers and Cu to discharge nano wire motor completely
Concentrated nitric acid etches 10min, obtains the spiral nanometer line motor of Pd；
Step 3 on the glass sheet by the spiral nanometer line motor tiling of obtained Pd is sputtered with magnetic controlled ion plating film machine
One layer of W metal, then ultrasound release Pd/Ni spiral nanometer line；
Step 4, with template assist in electrodeposition method, we use magnetic controlled ion plating film in 2 μm of polycarbonate template first
Machine sputters layer of Au, as working electrode, then uses Pt electrodes and Ag/AgCl reference electrodes, is barricaded as three-electrode system, electro-deposition
PEDOT outer layers, plating solution include 8 μ L 3,4-rthylene dioxythiophenes (EDOT), 0.075g potassium nitrate (KNO3), 2.88g dodecanes
Base sodium sulfonate (SDS) and 10mL water；Then using the method for vacuum filtration, the spiral nanometer line of Pd/Ni is pumped into PEDOT outer layers
Polycarbonate template in；
The PEDOT polycarbonate templates of spiral nanometer line containing Pd/Ni are barricaded as three-electrode system by step 5 again,
Template assist in electrodeposition method is equally used, electrodeposit metals Zn, plating solution includes 80g L-1 ZnSO4With 20g L-1 H3BO3It (uses
Sulphur acid for adjusting pH is 2.5), until metal Zn covers with the template in 2 μm of apertures completely；
Template is dissolved in 10min in dichloromethane solution by step 6, to discharge motor completely, is then centrifuged for, is washed,
To obtain the full load micron rocket of PEDOT/Zn/Pd/Ni；
The full load micron rocket of PEDOT/Zn/Pd/Ni is placed in containing 0.3M HCl and 1.7% triton X- by step 7
In 100 running environment, the case where being observed the motion conditions of motor with inverted fluorescence microscope and discharged nano wire fractional motor, and
Motion conditions of the nano wire fractional motor in magnetic field are observed, then the speed with corresponding software detection full load micron rocket is big
It is small.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (2)
1. a kind of preparation method of multistage micro-nano motor, which is characterized in that include the following steps：
Step 1 sputters one layer of Ag on alumina formwork with magnetron sputtering coater, as working electrode, then uses Pt electrodes
With Ag/AgCl reference electrodes, it is barricaded as three-electrode system, using template assist in electrodeposition method, distinguishes electro-deposition Ag, Au, Pd/Cu,
The plating solution of Pd/Cu alloys includes 30mM PdCl2, 20mM CuCl2With 0.1M HCl；
Step 2, Au layers are polished off with 3-4 μm of aluminum oxide polishing powder, and alumina formwork is dissolved in 3M NaOH solutions
30min is then centrifuged for washing and solution is washed into neutrality to discharge nano wire motor completely, then by Ag sacrificial layers and Cu with dense
Nitric acid etching 10min obtains the spiral nanometer line motor of Pd；
Step 3 on the glass sheet by the spiral nanometer line motor tiling of obtained Pd sputters one layer with magnetron sputtering coater
W metal, then ultrasound release Pd/Ni spiral nanometer line；
Step 4, with template assist in electrodeposition method, we are splashed in 2 μm of polycarbonate template with magnetron sputtering coater first
Layer of Au, electro-deposition PEDOT outer layers are penetrated, plating solution includes 8 μ L 3,4-rthylene dioxythiophenes (EDOT), 0.075g potassium nitrate
(KNO3), 2.88g dodecyl sodium sulfates (SDS) and 10mL water；Then using the method for vacuum filtration, by the spiral of Pd/Ni
Nano wire is pumped into the polycarbonate template of PEDOT outer layers；
The PEDOT polycarbonate templates of spiral nanometer line containing Pd/Ni are barricaded as three-electrode system, equally by step 5 again
Using template assist in electrodeposition method, electrodeposit metals Zn, plating solution includes 80g L-1ZnSO4With 20g L-1H3BO3, until metal
Zn covers with the template in 2 μm of apertures completely；
Template is dissolved in 10min in dichloromethane solution by step 6, to discharge motor completely, is then centrifuged for, is washed, with
To the full load micron rocket of PEDOT/Zn/Pd/Ni；
The full load micron rocket of PEDOT/Zn/Pd/Ni is placed in containing 0.3M HCl and 1.7% triton x-100 by step 7
In running environment, the case where being observed the motion conditions of motor with inverted fluorescence microscope and discharged nano wire fractional motor, and observe
Motion conditions of the nano wire fractional motor in magnetic field, then with the velocity magnitude of corresponding software detection full load micron rocket.
2. a kind of preparation method of multistage micro-nano motor as described in claim 1, which is characterized in that using electrification in step 1
It is CHI660E to learn work station model.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002397A (en) * | 2019-04-04 | 2019-07-12 | 南京航空航天大学 | A kind of preparation method of complex configuration nano-motor |
| CN109998489A (en) * | 2019-04-15 | 2019-07-12 | 哈尔滨工业大学 | Photoacoustic signal detection and imaging method based on micro-nano motor |
| CN110203880A (en) * | 2019-06-04 | 2019-09-06 | 百色学院 | A kind of preparation method of CD-ROM drive magnetic control integration micro-nano motor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530853A (en) * | 2012-01-11 | 2012-07-04 | 哈尔滨工业大学 | Preparation method of artificial nanometer pipes and application of utilizing artificial nanometer pipes as nanometer motors |
| KR101367374B1 (en) * | 2013-03-12 | 2014-03-19 | 서울대학교산학협력단 | Nanowire storing biochemical material and manufacturing method thereof |
| CN104089940A (en) * | 2014-07-22 | 2014-10-08 | 中国科学院烟台海岸带研究所 | Tubular protein blot catalytic magnetic micro-motor as well as preparation method and application of tubular protein blot catalytic magnetic micro-motor |
| CN106756813A (en) * | 2016-12-18 | 2017-05-31 | 江苏师范大学 | A kind of micro-nano motor and preparation method thereof |
| CN107425749A (en) * | 2017-08-08 | 2017-12-01 | 哈尔滨工业大学深圳研究生院 | A kind of nano-motor and preparation method thereof |
-
2018
- 2018-05-03 CN CN201810412434.0A patent/CN108609578B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530853A (en) * | 2012-01-11 | 2012-07-04 | 哈尔滨工业大学 | Preparation method of artificial nanometer pipes and application of utilizing artificial nanometer pipes as nanometer motors |
| KR101367374B1 (en) * | 2013-03-12 | 2014-03-19 | 서울대학교산학협력단 | Nanowire storing biochemical material and manufacturing method thereof |
| CN104089940A (en) * | 2014-07-22 | 2014-10-08 | 中国科学院烟台海岸带研究所 | Tubular protein blot catalytic magnetic micro-motor as well as preparation method and application of tubular protein blot catalytic magnetic micro-motor |
| CN106756813A (en) * | 2016-12-18 | 2017-05-31 | 江苏师范大学 | A kind of micro-nano motor and preparation method thereof |
| CN107425749A (en) * | 2017-08-08 | 2017-12-01 | 哈尔滨工业大学深圳研究生院 | A kind of nano-motor and preparation method thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002397A (en) * | 2019-04-04 | 2019-07-12 | 南京航空航天大学 | A kind of preparation method of complex configuration nano-motor |
| CN109998489A (en) * | 2019-04-15 | 2019-07-12 | 哈尔滨工业大学 | Photoacoustic signal detection and imaging method based on micro-nano motor |
| CN109998489B (en) * | 2019-04-15 | 2021-09-17 | 哈尔滨工业大学 | Photoacoustic signal detection and imaging method based on micro-nano motor |
| CN110203880A (en) * | 2019-06-04 | 2019-09-06 | 百色学院 | A kind of preparation method of CD-ROM drive magnetic control integration micro-nano motor |
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