CN108598634A - A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial - Google Patents
A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial Download PDFInfo
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- CN108598634A CN108598634A CN201810321044.2A CN201810321044A CN108598634A CN 108598634 A CN108598634 A CN 108598634A CN 201810321044 A CN201810321044 A CN 201810321044A CN 108598634 A CN108598634 A CN 108598634A
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- coaxial
- millimeter wave
- outer chamber
- wave band
- band logical
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/205—Comb or interdigital filters; Cascaded coaxial cavities
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Abstract
The invention discloses a kind of inline line filters of miniaturization millimeter wave band logical rectangular coaxial, including outer chamber, the inside of outer chamber is longitudinally spaced to be provided with multiple coaxial resonators, both sides are correspondingly arranged on Supporting Media plate inside outer chamber, the coaxial resonator of the left and right sides is connect with one end of incoming feeder and output feeder respectively, and the input port of incoming feeder and the output port of output feeder are symmetricly set on the top of dielectric-slab supported on both sides.Filter filter characteristics of the present invention are good, easy to process, insertion loss is small, of low cost, can be used in modern millimeter-wave communication system.
Description
Technical field
The invention belongs to microwave telecommunication devices technical fields, and in particular in a kind of miniaturization millimeter wave band logical rectangular coaxial
On line filter.
Background technology
With the rapid development of wireless communication technique, millimeter wave transmission technology is in communication, radar, remote sensing and radio astronomy etc.
There is a large amount of application in field, is proposed to the frequency microwave filter to work in a communications system and is different from traditional low-frequency rate device
The particular/special requirement of design.There is radiation losses and insertion loss in millimeter wave frequency band for filter based on planar transmission cable architecture
Greatly, the serious disadvantage of effect of dispersion.In the device that millimere-wave band takes UV-LIGA techniques to process, it is based on waveguide resonant cavity knot
The filter of structure is commonly designed in the form of a single to have preferable transmission characteristic, and appearance and size is larger, to small
Microwave device brings inconvenience.
For example, 2017, Wang Xin et al. have delivered " 100GHz on Microelectronics Journal periodicals
Waveguide band-pass filter employing UV-LIGA micromachining process " propose one
Kind uses the working frequency that UV-LIGA techniques are processed in the waveguide bandpass filter of 100GHz, however due to introducing rectangular waveguide
Transmission mode, will certainly bring filter construction size be more than 3mm, irrealizable mini filter.
For coaxial filter because size is small, insertion loss is small, and power is big to wait good characteristics, is suitable for millimeter-wave communication system
In high performance filter design；Meanwhile the rectangular coaxial filter for being designed as layered structure can use UV-LIGA multilayer alignment process
Processing.Compared to traditional discrete formula Millimeter Wave Coaxial filter, the layout advantage of interior on line is：Save the space of outer chamber
So that filter construction is compacter, size is more compact；Meanwhile the leakage for reducing energy can obtain higher quality factor
To improve the performance of filter.
Invention content
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of be applied in the least
Meter wave band, the inline line filter of rectangular coaxial UV-LIGA techniques processing, minimized, to improve the insertion loss of filter,
The circuit size for reducing filter meets millimeter wave electronic equipment and system to filter micromation, light-weighted requirement.
The present invention uses following technical scheme：
The inside of a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial, including outer chamber, outer chamber is longitudinal
It is arranged at intervals with multiple coaxial resonators, the coaxial resonator of side is connect with incoming feeder in outer chamber, another in outer chamber
The coaxial resonator of side is connect with output feeder, and the output port of incoming feeder and output feeder is symmetricly set on a left side in outer chamber
Above the Supporting Media plate of right both sides.
Specifically, coaxial resonator is the rectangular coaxial line of single-ended short circuit, it is humorous using quarter-wave coaxial resonant cavity
Minimum oscillation mode in chamber of shaking is TEM moulds.
Further, multiple coaxial resonators are arranged in interdigital position shape, and Air Coupling shape is used between coaxial resonator
Formula connects.
Further, coaxial resonator includes six.
Specifically, incoming feeder and output feeder are made of two orthogonal L-type feeder line cascades, using directly feedback
The mode of electricity feeds corresponding coaxial resonator.
It is prepared specifically, outer chamber and coaxial resonator are all made of all-metal material.
Specifically, Supporting Media plate is made of the SU-8 colloids of relative dielectric constant 3.2.
Specifically, outer chamber is rectangular parallelepiped structure, if being provided in the front of outer chamber, the back side, leading flank and trailing flank
The release aperture 6 of dry rectangular-shape.
Further, the length of outer chamber is respectively less than 3mm.
Compared with prior art, the present invention at least has the advantages that：
A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial of the invention, the longitudinally spaced setting in outer chamber
There are multiple coaxial resonators, the coaxial resonator of both sides to be connect respectively with one end of incoming feeder and output feeder, incoming feeder
It is symmetricly set on above dielectric-slab supported on both sides with the other end of output feeder, to improve the insertion loss of filter, reduces filter
The circuit size of wave device meets millimeter wave electronic equipment and system to filter micromation, light-weighted requirement, circuit of the present invention
Size is small, realizes the miniaturization of circuit, has design form flexible, and it is logical to can be applied to millimeter wave for the small advantage of insertion loss
In letter system.
Further, coaxial resonator uses quarter-wave coaxial resonant cavity, by the rectangular coaxial line of single-ended short circuit
It constitutes, its object is to make filter resonance at centre frequency, generates filter effect, while reducing device size.
Further, Air Coupling form is used between coaxial resonator, it can be with by adjusting the distance of adjacent resonators
Change the size of the coefficient of coup.
Further, filter includes six, using on line in the rectangular coaxial of interdigital shape location layout, is significantly reduced
Filter size.
Further, coaxial resonator is fed by the way of direct feed, incoming feeder and output feeder are by two
Item orthogonal L-type feeder line cascade composition, its object is in the top of feeder line convenient for placing and fix probe to filter
It is tested for the property.
Further, outer chamber and coaxial resonator are all made of all-metal preparation, its object is to reduce the loss of energy,
Improve the electric properties such as millimetric wave device isolation, packaging density, insertion loss, quality factor.
Further, Supporting Media plate uses relative dielectric constant for 3.2 SU-8 colloids, and its object is to use SU-8 glue
Body realizes high-aspect-ratio MEMS structure, and is not easy to remove after photoetching crosslinking and electroforming metallic structure.
Further, the release aperture for several rectangular-shapes that the upper and lower surface and front and rear surfaces of outer chamber are opened, purpose
It is convenient for the wash-off of AZ positive photoresists in process.
In conclusion filter filter characteristics of the present invention are good, easy to process, insertion loss is small, of low cost, can be used for existing
For in millimeter-wave communication system.
Below by drawings and examples, technical scheme of the present invention will be described in further detail.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is structure of the invention vertical view；
Fig. 3 is structure of the invention side view；
Fig. 4 is the frequency response curve of structure of the invention.
Wherein：1. outer chamber；2. coaxial resonator；3. incoming feeder；4. output feeder；5. Supporting Media plate；6. release
Hole.
Specific implementation mode
In the description of the present invention, it is to be understood that, term "upper", "lower", "front", "rear", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside", " side ", " one end ", " one side " is based on shown in attached drawing
Orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, do not indicate or imply the indicated device
Or element must have a particular orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, in the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
It please refers to Fig.1 and Fig. 2, a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial of the invention, including outer
Cavity 1, the coaxial resonator 2 of single-ended short circuit, incoming feeder 3, output feeder 4 and Supporting Media plate 5, coaxial resonator 2 include
It six, is arranged in outer chamber 1 in interdigital position shape, Supporting Media plate 5 is symmetricly set on the two bottom sides of outer chamber 1, input
Feeder line 3 and output feeder 4 take symmetrical distribution mode that the both sides in outer chamber 1 are arranged, and connect respectively with the resonator of both sides 2
Connect, the input port of incoming feeder 3 and the output port of output feeder 4 it is symmetrical be placed on corresponding Supporting Media plate 5
Top, the upper and lower surface and front and rear surfaces of outer chamber 1 are provided with the release aperture 6 of several rectangular-shapes.
Preferably, Air Coupling form is used between coaxial resonator 2, coupled modes are based on magnetic coupling.
Preferably, incoming feeder 3 and output feeder 4 are made of two orthogonal " L " type feeder line cascades, using straight
The mode for connecing feed feeds resonator.
Preferably, outer chamber 1 and coaxial resonator 2 are all made of all-metal (copper) preparation, and Supporting Media plate 5 is situated between using opposite
The SU-8 colloids that electric constant is 3.2.
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being described and shown in usually here in attached drawing is real
Applying the component of example can be arranged and be designed by a variety of different configurations.Therefore, the present invention to providing in the accompanying drawings below
The detailed description of embodiment be not intended to limit the range of claimed invention, but be merely representative of the selected of the present invention
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
Referring to Fig. 3, the inline line filter of millimeter wave band logical rectangular coaxial of miniaturization includes 5 layers of structure from side, often
Layer height is 50um, and when processing is processed using UV-LIGA techniques, overall dimensions 2652um*1012um*250um, much smaller than same
The waveguide dimensions of frequency range.
Incoming feeder 3 and output feeder 4 take symmetrical distribution mode, and each feed line is by two orthogonal " L " types
Feeder line cascade composition, feeds resonator by the way of direct feed, input and output port it is symmetrical be placed on branch
5 top of dielectric-slab is supportted, probe easy to use is tested.
The upper and lower surface and front and rear surfaces of outer chamber 1 are provided with the release aperture 6 of rectangular-shape according to certain arrangement regulation, this
It is easy for the wash-off of AZ positive photoresists in process, release aperture 6 has simulation result slight influence, therefore release aperture 6
It influences in view of in structure design.
Coaxial resonator 2 uses quarter-wave coaxial resonant cavity, is made of the rectangular coaxial line of one section of single-ended short circuit,
Minimum oscillation mode is TEM moulds, resonant frequency f in resonant cavity0Meet：
Wherein, C is the light velocity, and L is cavity length, εrFor relative dielectric constant.
Operation principle is as follows：Electromagnetic signal is by 3 feed-in resonator 2 of matched incoming feeder, by Air Coupling to next
In rank resonator 2, and so on, until signal is coupled in matched output feeder 4, realize the filtering characteristic of passband.
Referring to Fig. 4, S21 is the transfer curve of filter, S11 is the coverage diagram of 1 port of filter, by
Fig. 4 is it is found that the passband central frequency of the bandpass filter is 100GHz, and relative bandwidth 4%, return loss is in 20dB or less.
The above content is merely illustrative of the invention's technical idea, and protection scope of the present invention cannot be limited with this, every to press
According to technological thought proposed by the present invention, any change done on the basis of technical solution each falls within claims of the present invention
Protection domain within.
Claims (9)
1. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial, which is characterized in that including outer chamber (1), exocoel
The inside of body (1) is longitudinally spaced to be provided with multiple coaxial resonators (2), the coaxial resonator (2) of side and input in outer chamber
Feeder line (3) connects, and the coaxial resonator (2) of the other side is connect with output feeder (4) in outer chamber, incoming feeder (3) and output
The output port of feeder line (4) is symmetricly set in outer chamber (1) above the Supporting Media plate (5) of the left and right sides.
2. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1, which is characterized in that
Coaxial resonator (2) is the rectangular coaxial line of single-ended short circuit, minimum in resonant cavity to shake using quarter-wave coaxial resonant cavity
It is TEM moulds to swing pattern.
3. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1 or 2, feature exist
In multiple coaxial resonators (2) are arranged in interdigital position shape, are connected using Air Coupling form between coaxial resonator.
4. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 3, which is characterized in that
Coaxial resonator (2) includes six.
5. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1, which is characterized in that
Incoming feeder (3) and output feeder (4) are made of two orthogonal L-type feeder line cascades, by the way of direct feed
Corresponding coaxial resonator (2) are fed.
6. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1, which is characterized in that
Outer chamber (1) and coaxial resonator (2) are all made of all-metal material and are prepared.
7. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1, which is characterized in that
Supporting Media plate (5) is made of the SU-8 colloids of relative dielectric constant 3.2.
8. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 1, which is characterized in that
Outer chamber (1) is rectangular parallelepiped structure, and several rectangular-shapes are provided in the front of outer chamber (1), the back side, leading flank and trailing flank
Release aperture 6.
9. a kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial according to claim 8, which is characterized in that
The length of outer chamber (1) is respectively less than 3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810321044.2A CN108598634A (en) | 2018-04-11 | 2018-04-11 | A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810321044.2A CN108598634A (en) | 2018-04-11 | 2018-04-11 | A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial |
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| Publication Number | Publication Date |
|---|---|
| CN108598634A true CN108598634A (en) | 2018-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810321044.2A Pending CN108598634A (en) | 2018-04-11 | 2018-04-11 | A kind of inline line filter of miniaturization millimeter wave band logical rectangular coaxial |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202662745U (en) * | 2012-04-21 | 2013-01-09 | 安徽科瑞达通信科技有限公司 | High-transmission time-delay filter |
| CN103594767A (en) * | 2013-11-23 | 2014-02-19 | 中国电子科技集团公司第三十八研究所 | Integrated cavity filter |
| EP3093916A1 (en) * | 2015-05-15 | 2016-11-16 | Innertron, Inc. | Resonance device and filter including the same |
-
2018
- 2018-04-11 CN CN201810321044.2A patent/CN108598634A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202662745U (en) * | 2012-04-21 | 2013-01-09 | 安徽科瑞达通信科技有限公司 | High-transmission time-delay filter |
| CN103594767A (en) * | 2013-11-23 | 2014-02-19 | 中国电子科技集团公司第三十八研究所 | Integrated cavity filter |
| EP3093916A1 (en) * | 2015-05-15 | 2016-11-16 | Innertron, Inc. | Resonance device and filter including the same |
Non-Patent Citations (1)
| Title |
|---|
| 翟琼华 等: "SIW交指带通滤波器的设计与仿真", 《传感技术学报》 * |
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Application publication date: 20180928 |