CN108593765A - A kind of biosensor and its detection method based on surface acoustic wave pattern - Google Patents
A kind of biosensor and its detection method based on surface acoustic wave pattern Download PDFInfo
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- CN108593765A CN108593765A CN201810301311.XA CN201810301311A CN108593765A CN 108593765 A CN108593765 A CN 108593765A CN 201810301311 A CN201810301311 A CN 201810301311A CN 108593765 A CN108593765 A CN 108593765A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/222—Constructional or flow details for analysing fluids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2462—Probes with waveguides, e.g. SAW devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/024—Mixtures
- G01N2291/02466—Biological material, e.g. blood
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
Abstract
The present invention provides a kind of biosensor and its detection method based on surface acoustic wave pattern, substrate, the interdigital transducer formed by piezoelectric substrate or by piezoelectric material；It is arranged between the input energy converter and output transducer of the interdigital transducer, is used for the microchannel liquid pool of biological respinse；And the biological function film in the microchannel liquid pool for adsorbing the liquid to be detected sample；When detecting fluid sample, the interdigital transducer arranges at least one surface acoustic wave pattern for carrying out miniflow and stirring to the liquid to be detected sample in sensing passage and excitation channel respectively, and exports the frequency signal for analyzing the liquid to be detected sample physical attribute.Biosensor disclosed in this invention and its detection method increase by one of Rayleigh surface wave by sensing passage vertical direction and encourage liquid flowing, stir to eliminate, to realize the biological detecting function of anti-nonspecific interference and quick response.
Description
Technical field
The present invention relates to Novel electronic devices and biotechnology, more particularly to one kind being based on surface acoustic wave pattern
Biosensor and its detection method.
Background technology
Surface acoustic wave biosensor（Surface Acoustic Wave Biosensor, SAWB, SAWB）It is in recent years
Come the novel unmarked acoustic MEMS biosensor of one kind to grow up.Its structure has pressure as shown in Fig. 1, by being produced on
The interdigital transducer 13 on 11 surface of substrate of electrical property（Interdigital transducer, IDT）Excitation and reception sound table
Surface wave, by the propagation path of surface acoustic wave it is upper apply one layer have highly selective biological functional substance (such as protein,
DNA, pathogen, cell, virus etc.) sensitive membrane 13, constitute sensitizing range, when test substance sensitizing range occur physical absorption or
When chemical reaction, the mass loading of sensitizing range will change, and the surface acoustic wave parameter of device also changes therewith, to detect
Go out test substance and its content.SAWB is compared with the Measurement for Biotechnique that other are traditional with easy to detect, at low cost, clever
The advantages that sensitivity is high.The especially Love wave SAWB containing ducting layer, since its energy is concentrated mainly on plane of crystal and waveguide
Among, it is very sensitive to the boundary condition variation of waveguide layer surface, can reach very high sensitivity.
But the bioprocesses occurred in biosensor are always related to the mixing of reactant, generally for life
For object chip, reactant rapidly and uniformly mixes in chip microchannel and plays important work to the detection performance of chip
With.Main mixed mechanism in the process is natural diffuseness, but the macromolecular due to floating on a liquid or particle
Diffusion coefficient is low, therefore merely diffusion process is a slow and inefficient process, so being limited by practical applications
It is undesirable to cause most of biosensor response speed at present for reactant diffuser efficiency bottom；On the other hand, SAWB mainly locates
In Proof-Of Principle assessment and maiden trial test phase, successfully commercialization is realized there are no real.This is mainly due to work as to wait for
Test sample sheet（Blood, blood plasma or urine etc.）Other than test analyte, also contain various macromoleculars when, non-targeted albumen or
Molecule and the interference of the non-specific binding of sensitive membrane not only will increase ambient noise, result even in false positive test results, can not
Directly humoral sample is directly detected, becomes biologic sensor chip and faces an important challenge.
Therefore, the prior art is up for further improving.
Invention content
It is a kind of based on sound surface it is an object of the invention to provide to the user in view of above-mentioned shortcoming in the prior art
The biosensor and its detection method of wave mode, overcome defect in the prior art.
First embodiment provided by the invention is：A kind of biosensor based on surface acoustic wave pattern, wherein including：
Piezoelectric substrate or the substrate being made of piezoelectric material；
At least a pair of of the interdigital transducer being arranged in the piezoelectric substrate or substrate；
It is arranged between the input energy converter and output transducer of the interdigital transducer, is used for the microchannel liquid of biological respinse
Pond；
And the biological function film in the microchannel liquid pool for adsorbing the liquid to be detected sample；
When detecting fluid sample, arrangement at least one is used for the interdigital transducer in sensing passage and excitation channel respectively
The surface acoustic wave pattern of miniflow and stirring is carried out to the liquid to be detected sample, and is exported for analyzing the liquid to be detected
The frequency signal of sample physical attribute.
Optionally, it is in certain angle between the sensing passage and the direction for encouraging the surface acoustic wave pattern arranged in channel
Degree.
Optionally, the shear horizontal surface wave mode positioned at X-direction is arranged as in the sensing passage；The excitation is logical
Arrange to be Rayleigh wave mode positioned at Y direction in road.
Optionally, ducting layer is additionally provided with above the piezoelectric substrate, it is described to be located at X-direction shear horizontal surface wave mould
Formula is converted to Love wave modes.
Optionally, the piezoelectric substrate is piezo-electric crystal substrate；
The material of the piezo-electric crystal substrate is：36 ~ 42oYX lithium tantalates, 41YXo lithium niobates, ST quartz, AT quartz.
Optionally, the substrate is made of silicon chip or sapphire, further includes one or more layers piezoelectric membrane on surface.
Optionally, the shape of the interdigital transducer is arc line type.
Second embodiment provided by the invention is：A kind of detection method of biosensor, wherein include the following steps：
Liquid to be detected sample is put into the liquid pool of microchannel, is located at the biological function film in the liquid pool of microchannel to described to be detected
Fluid sample is adsorbed；
When controlling interdigital transducer detection fluid sample, at least one sound surface is arranged in sensing passage and excitation channel respectively
Wave mode carries out miniflow and stirring to liquid sample；
Sensing passage is obtained respectively and encourages the frequency signal exported in channel, and the frequency signal got is analyzed, is obtained
To the physical attribute of liquid to be detected sample.
Optionally, the shear horizontal surface wave mode positioned at X-direction is arranged as in the sensing passage；The excitation is logical
Arrange to be Rayleigh wave mode positioned at Y direction in road.
Optionally, the set of frequency of the Rayleigh wave mode is in 1 ~ 20MHz, and period of interdigital transducer is set as 0.1 ~
1mm；The Frequency Design of the shear horizontal surface wave mode or Love wave modes is in 150 ~ 500MHz, the period of interdigital transducer
10~40µm；The aperture of the interdigital transducer is 0.4 ~ 4mm.
Advantageous effect, the present invention provides a kind of biosensor and its detection method based on surface acoustic wave pattern lead to
Cross piezoelectric substrate or the substrate being made of piezoelectric material, interdigital transducer；Input transducing in the interdigital transducer is set
Between device and output transducer, it to be used for the microchannel liquid pool of biological respinse；And for adsorbing in the microchannel liquid pool
The biological function film of the liquid to be detected sample；When detecting fluid sample, the interdigital transducer is respectively in sensing passage
At least one surface acoustic wave pattern for carrying out miniflow and stirring to the liquid to be detected sample is arranged in channel with encouraging,
And frequency signal of the output for analyzing the liquid to be detected sample physical attribute.Biosensor disclosed in this invention and
Its detection method, the surface wave excitation liquid flow for increasing by one of Rayleigh pattern by sensing passage vertical direction is dynamic, stirring
It eliminates, overcomes problem above, to realize the biological detecting function of anti-nonspecific interference and quick response.
Description of the drawings
Fig. 1 is the structural schematic diagram of biosensor in the prior art；
Fig. 2 is the structural schematic diagram of the biosensor provided by the present invention based on surface acoustic wave pattern；
Fig. 3 is the IDT structural schematic diagrams of alliteration surface wave mode sensor of the present invention；
Fig. 4 is that energy converter of the present invention uses check configuration schematic diagram；
Fig. 5 is the arcuate structure schematic diagram that energy converter of the present invention uses；
Fig. 6 is the detection method flow chart of steps of biosensor of the present invention.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer and more explicit, develop simultaneously embodiment pair referring to the drawings
The present invention is further described.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and do not have to
It is of the invention in limiting.
The purpose of the present invention is to provide the surface acoustic wave biosensors of a kind of high specific and quick response.It can
Overcome existing surface acoustic wave biosensor to be limited by reactant diffuser efficiency bottom in practical applications, causes response speed not
It is ideal.In addition in sample to be tested there are when various macromoleculars, the non-specific binding of non-targeted albumen or molecule and sensitive membrane
When interference, ambient noise is not only will increase, results even in false positive test results, directly humoral sample can not be carried out direct
Detection.It is dynamic by the surface wave excitation liquid flow for increasing by one of Rayleigh mode in sensing passage vertical direction, it stirs to eliminate, gram
Problem above is taken, to realize the biological detecting function of anti-nonspecific interference and quick response.
First embodiment provided by the invention is a kind of biosensor based on surface acoustic wave pattern, as shown in Fig. 2, packet
It includes：
Piezoelectric substrate or the substrate 21 being made of piezoelectric material；
At least a pair of of the interdigital transducer 24 being arranged in the piezoelectric substrate or substrate 21；
It is arranged between the input energy converter and output transducer of the interdigital transducer 24, is used for the microchannel liquid of biological respinse
Pond 26；
And the biological function film 25 in the microchannel liquid pool 26 for adsorbing the liquid to be detected sample；
When detecting fluid sample, the interdigital transducer 24 arranges at least one use in sensing passage and excitation channel respectively
In the surface acoustic wave pattern for carrying out miniflow and stirring to the liquid to be detected sample, and output is for analyzing the liquid to be detected
The frequency signal of body sample physical attribute.
Biosensor provided by the present invention includes：The substrate of piezoelectric substrate or piezoelectric material composition, specifically, this
Piezoelectric substrate or substrate material provided in invention are met on the piezoelectric monocrystal sheet either various substrates of specified conditions
The piezoelectric film material for meeting specified conditions of growth.Specified conditions are to be respectively present and encourage Rayleigh waves and SH-SAW
Wave, when it is piezoelectric substrate, material includes：36 ~ 42oYX lithium tantalates, 41YXo lithium niobates, ST quartz, AT quartz,
[1120] ZnO, [1120] AlN。
Microchannel reaction tank may be used including inorganic material (such as monocrystalline silicon, quartz, glass, metal) and organic polymer
(such as polymetylmethacrylate, polycarbonate, polydimethylsiloxane, epoxy resin).
Interdigital transducer may be used gold, aluminium and other metal materials and be prepared into substrate table using micro Process photoetching process
Two-way, check configuration may be used in the design in face, interdigital transducer, and carries out withdraw-weighted or apodization to interdigital transducer
It weights to realize the regulation and control of surface acoustic wave.
Optionally, the piezoelectric substrate is piezo-electric crystal substrate；The material of the piezo-electric crystal substrate is：36~42ºYX
Lithium tantalate, 41YXo lithium niobates, ST quartz, AT quartz.The substrate is made of silicon chip and sapphire, further includes one on surface
The piezoelectric membrane of layer or multilayer.
In the following, being done further to the biosensor with the specific manufacturing method of biosensor provided by the invention
Explanation.
The first step designs substrate or substrate and makes IDT.
By taking scheme of the biosensor using piezo-electric crystal substrate as an example；
The material of piezoelectric substrate includes：36 ~ 42oYX lithium tantalates, 41YXo lithium niobates, ST quartz, AT quartz, using etching or
The method of person's stripping, forms to obtain the metal of interdigital transducer by techniques such as electron beam evaporation, magnetron sputtering, CVD, atomic layers
Change the shape of layer, the material of the interdigital transducer includes being selected from aluminium, gold, copper, nickel, chromium, zinc, the metal simple-substance of platinum or conjunction
Gold, the thickness of metal layer is in 80 ~ 200nm.
Second, by taking the biosensor does the scheme of substrate using piezoelectric material as an example；
It is grown on substrate by magnetron sputtering using the scheme of silicon chip either Sapphire Substrate [1120] of one layer or multilayer
ZnO, [1120] AlN piezoelectric membranes.Interdigital transducer is prepared on its surface using the method for stripping.
Second step, PDMS are packaged into biosensor.
The formpiston of access sites protrusion is first made with the method for photoetching and etching, the making material of formpiston has silicon materials, glass
Glass, epoxy group SU-8 photoresists.By method of molding, PDMS and curing agent are pressed 1:The 10 mixed liquid of ratio injects formpiston
On plate, peeled off from negative plate by being heating and curing, after by corona treatment, as shown in Fig. 2, with substrate into line unit
It closes.
Biosensor provided by the present invention is respectively arranged by respectively in sensing passage and excitation channel different
Surface acoustic wave pattern, increases the reaction process of the fluid sample in reaction tank, and can remove non-specific adsorption interference simultaneously.
It is envisioned that it is two different sound tables to be arranged in sensing passage and encourage the surface acoustic wave pattern in channel
Surface wave pattern, the direction of propagation that two kinds of surface acoustic wave patterns can be arranged is parallel, can also arrange the transmission in excitation channel
Surface acoustic wave pattern and sensing passage in surface acoustic wave pattern there is certain angle, preferably, in order to obtain preferably
Miniflow and stirring can obtain best mixing effect as a result, when the direction of two kinds of surface acoustic wave patterns transmission is mutually perpendicular to.
In the specific implementation, as shown in Fig. 2, a pair of of the interdigital transducer that may be used in the Y direction has encouraged Rayleigh wave mode, energy
Amount is coupled in liquid to be detected sample, by controlling the energy size of pumping signal, causes miniflow and the stirring of liquid；In X
A pair of of interdigital transducer on direction arranges SH-SAW wave modes（Shear horizontal surface wave）Delay-line structure, energy concentrates on
Substrate surface is not lost in liquid, and SH-SAW waves are disturbed by biological functional material adhesion protein equimolecular, and will
Information reaches output transducer, and is used as final output by the frequency signal of twice sensing passage progress difference to obtain
State the quantitative detection of measured object.
In order to obtain better effect, optionally, ducting layer is additionally provided with above the piezoelectric substrate, it is described to be located at X-axis
Direction shear horizontal surface wave mode is converted to Love wave modes.When practical application, decide whether according to actual needs described
The top of piezoelectric substrate or substrate first covers one layer of ducting layer, and SH-SAW patterns are further converted into Love wave modes to carry
It is highly sensitive.Ducting layer can utilize shear wave velocity less than the organic or inorganic material of substrate.
In specific manufacture, may be used on the SAW device surface prepared using magnetron sputtering, the side PECVD
Method prepares one layer 0.5 ~ 10 μm of silica membrane, or grows one layer of 0.5 ~ 2 μm of polymeric waveguiding layer by spin coating mode,
SH-SAW waves are converted to the higher Love waves of sensitivity.
As shown in figure 3, being disposed with the IDT 33 of excitation R wave in the Y direction, meet certain frequency, energy bar in excitation
The R wave 31 of part is propagated along the Y direction, and when R wave encounters microchannel liquid pool, energy will be coupled to be checked in pond
It surveys in liquid, causes the variation of acoustic pressure in fluid sample, form flowing inside the liquid pool of microchannel so as to cause fluid sample.
By changing the design of IDT 33 and microchannel liquid pool, liquid forma fluens can be regulated and controled.Arrangement twice sensing in the X direction
IDT, all by inputting transducer excitation SH-SAW or Love wave 32, energy is passed directly to output by substrate surface and changes
Energy device, is not coupled in liquid.It is provided with biological function film in the reaction tank in one of channel 34, can adsorb and wait for instead
Object is answered, perturbation is generated to 32.There is no biological function film in the reaction tank in another channel 35, does not adsorb liquid to be detected sample
Product, since influence of environment, including humidity, temperature etc. are about the same to the effect of signals in two channels, therefore by channel
34 and the signal in channel 35 carry out difference and can obtain the offset of surface acoustic wave frequency caused by being adsorbed due to liquid sample.
In the liquid pool in channel 34, the adsorption process of liquid sample is a slow and inefficient process, passes through R wave 31
Caused liquid internal miniflow, can obviously speed the adsorption process.After the completion of absorption, by the energy for increasing channel 31
Amount rinses out the non-specific substance of biological function film absorption.
By using Fig. 4 check configurations, enhances exciting and propagating along a direction for surface wave, inhibit another side
To reduction IDT insertion loss can also improve the amplitude of excitation surface acoustic wave.
Preferably, as shown in figure 5, shown interdigital transducer can also use arcuate structure, which can will be auspicious
Sharp wave focuses on the position needed in liquid pool, obtains preferably driving mixing effect.
Biosensor provided by the invention based on surface acoustic wave pattern is utilized in existing surface acoustic wave biosensor
SH-SAW carry out liquid environment sensing on the basis of, the surface acoustic wave for increasing Rayleigh wave mode in its vertical direction drives
Miniflow in hydrodynamic body achievees the purpose that accelerate bioprocesses and rinse non-specific binding to interfere, and R wave
Distribution, form and energy size can realize control by the design of device.Since the process need not be to example reaction
Process applies any other chemical substance, will not generate interference and spurious response to reaction process, and at low cost.
Second embodiment provided by the invention is a kind of detection method of biosensor, as shown in fig. 6, including following step
Suddenly：
Liquid to be detected sample is put into the liquid pool of microchannel by S61, and the biological function film in the liquid pool of microchannel is waited for described
Detection fluid sample is adsorbed.
S62 when control interdigital transducer detects fluid sample, arranges at least one in sensing passage and excitation channel respectively
Kind surface acoustic wave pattern carries out miniflow and stirring to liquid sample.
S63 obtains sensing passage and encourages the frequency signal exported in channel, carried out to the frequency signal got respectively
Analysis, obtains the physical attribute of liquid to be detected sample.
Optionally, described two different surface acoustic wave patterns are respectively the shear horizontal surface wave mould positioned at X-direction
Formula or Love wave modes, and the Rayleigh wave mode positioned at Y direction.
Above-mentioned detection method provided by the invention utilizes orthogonal R wave（Rayleigh wave）And horizontal shear
Surface wave（Shear Horizontal SAW, SH-SAW）/ Love wave（Love wave）Alliteration surface wave（surface
acoustic wave, SAW）The surface acoustic wave biosensor structure of pattern, is specifically encouraged on same substrate simultaneously
The sensor of Rayleigh and SH-SAW patterns, it is another on the one hand on the basis of being sensed using SH-SAW pattern high sensitivity
In terms of aspect removes the biological sample being stirred to react in liquid pool using the surface acoustic wave of Rayleigh patterns, accelerate the reaction of sample
Journey and removing non-specific adsorption interference, so as to improve performance of biosensor.
Preferably, the set of frequency of the Rayleigh wave mode is in 1 ~ 20MHz, period of interdigital transducer is set as 0.1 ~
1mm；The Frequency Design of the shear horizontal surface wave mode or Love wave modes is in 150 ~ 500MHz, the period of interdigital transducer
10~40µm；The aperture of the interdigital transducer is 0.4 ~ 4mm.
The present invention provides a kind of biosensor and its detection method based on surface acoustic wave pattern, passes through piezoelectric substrate
Or substrate, the interdigital transducer being made of piezoelectric material；The input energy converter being arranged in the interdigital transducer is changed with output
Between energy device, it to be used for the microchannel liquid pool of biological respinse；And it is described to be detected for adsorbing in the microchannel liquid pool
The biological function film of fluid sample；The interdigital transducer, when detecting fluid sample, by sensing passage and excitation channel
In motivate at least one different surface acoustic wave pattern, obtain sensing passage and encourage at least two frequencies exported in channel
Signal analyzes the frequency signal got, obtains the testing result of liquid to be detected sample.Life disclosed in this invention
Object sensor and its detection method increase the surface wave excitation liquid of one of Rayleigh pattern by sensing passage vertical direction
Flowing stirs to eliminate, problem above is overcome, to realize the biological detecting function of anti-nonspecific interference and quick response.
It, can according to the technique and scheme of the present invention and its hair it is understood that for those of ordinary skills
Bright design is subject to equivalent substitution or change, and all these changes or replacement should all belong to the guarantor of appended claims of the invention
Protect range.
Claims (10)
1. a kind of biosensor based on surface acoustic wave pattern, which is characterized in that including：
Piezoelectric substrate or the substrate being made of piezoelectric material；
At least a pair of of the interdigital transducer being arranged in the piezoelectric substrate or substrate；
It is arranged between the input energy converter and output transducer of the interdigital transducer, is used for the microchannel liquid of biological respinse
Pond；
And the biological function film in the microchannel liquid pool for adsorbing the liquid to be detected sample；
When detecting fluid sample, arrangement at least one is used for the interdigital transducer in sensing passage and excitation channel respectively
The surface acoustic wave pattern of miniflow and stirring is carried out to the liquid to be detected sample, and is exported for analyzing the liquid to be detected
The frequency signal of sample physical attribute.
2. the biosensor according to claim 1 based on surface acoustic wave pattern, which is characterized in that the sensing passage
Between the direction for the surface acoustic wave pattern arranged in excitation channel at an angle.
3. the biosensor according to claim 2 based on surface acoustic wave pattern, which is characterized in that the sensing passage
In be arranged as shear horizontal surface wave mode positioned at X-direction；Arrange to be positioned at the auspicious of Y direction in the excitation channel
Sharp wave mode.
4. the biosensor according to claim 3 based on surface acoustic wave pattern, which is characterized in that the piezoelectric substrate
Top is additionally provided with ducting layer, described to be converted to Love wave modes positioned at X-direction shear horizontal surface wave mode.
5. the biosensor according to any one of claims 1 to 4 based on surface acoustic wave pattern, which is characterized in that institute
It is piezo-electric crystal substrate to state piezoelectric substrate；
The material of the piezo-electric crystal substrate is selected from：36 ~ 42oYX lithium tantalates, 41YXo lithium niobates, ST is quartzy, in AT quartz
It is one or more.
6. the biosensor according to any one of claims 1 to 4 based on surface acoustic wave pattern, which is characterized in that institute
It states substrate to be made of silicon chip or sapphire, further includes one or more layers piezoelectric membrane on surface.
7. the biosensor according to any one of claims 1 to 4 based on surface acoustic wave pattern, which is characterized in that institute
The shape for stating interdigital transducer is arc line type.
8. a kind of detection method of biosensor as described in claim 1, which is characterized in that include the following steps：
Liquid to be detected sample is put into the liquid pool of microchannel, is located at the biological function film in the liquid pool of microchannel to described to be detected
Fluid sample is adsorbed；
When controlling interdigital transducer detection fluid sample, at least one sound surface is arranged in sensing passage and excitation channel respectively
Wave mode carries out miniflow and stirring to liquid sample；
Sensing passage is obtained respectively and encourages the frequency signal exported in channel, and the frequency signal got is analyzed, is obtained
To the physical attribute of liquid to be detected sample.
9. the detection method of biosensor according to claim 8, which is characterized in that be arranged as in the sensing passage
Positioned at the shear horizontal surface wave mode of X-direction；Arrange to be R wave mould positioned at Y direction in the excitation channel
Formula.
10. the detection method of biosensor according to claim 9, which is characterized in that the frequency of the Rayleigh wave mode
Rate is arranged in 1 ~ 20MHz, and the period of interdigital transducer is set as 0.1 ~ 1mm；The shear horizontal surface wave mode or Love waves
The Frequency Design of pattern is in 150 ~ 500MHz, 10 ~ 40 μm of the period of interdigital transducer；The aperture of the interdigital transducer be 0.4 ~
4mm。
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| CN201810301311.XA CN108593765A (en) | 2018-04-04 | 2018-04-04 | A kind of biosensor and its detection method based on surface acoustic wave pattern |
| PCT/CN2018/100808 WO2019192125A1 (en) | 2018-04-04 | 2018-08-16 | Biosensor based on surface acoustic wave mode and test method thereof |
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| CN110208369A (en) * | 2019-06-19 | 2019-09-06 | 西南交通大学 | Multi-functional sound surface wave sensor and its preparation method and application |
| CN111969975A (en) * | 2020-08-28 | 2020-11-20 | 哈尔滨工业大学 | Surface wave acoustic tweezers and method for independently capturing and controlling microparticles at any position of plane |
| CN113316717A (en) * | 2019-01-10 | 2021-08-27 | 因塔公司 | Sensor device for analyzing a fluid by means of acoustic waves |
| CN113826007A (en) * | 2019-03-28 | 2021-12-21 | 传感器动力公司 | Detection of cardiac troponin or biomarkers by shear horizontal surface acoustic wave biosensors using wet-dry bioanalytical techniques |
| CN114002318A (en) * | 2021-11-03 | 2022-02-01 | 深圳大学 | Method for detecting prostate specific antigen |
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| CN110146596B (en) * | 2018-11-28 | 2021-06-15 | 南京航空航天大学 | Love wave device structure for detecting residual quantity of detergent and detection method |
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| CN110208369B (en) * | 2019-06-19 | 2020-08-14 | 西南交通大学 | Multifunctional surface acoustic wave sensor and preparation method and application thereof |
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| CN111969975B (en) * | 2020-08-28 | 2024-01-26 | 哈尔滨工业大学 | Surface wave acoustic tweezers and method for individually capturing and controlling particles at any position of plane |
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