CN108593717A - A kind of humidity sensor and preparation method thereof, electronic equipment - Google Patents
A kind of humidity sensor and preparation method thereof, electronic equipment Download PDFInfo
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- CN108593717A CN108593717A CN201810384017.XA CN201810384017A CN108593717A CN 108593717 A CN108593717 A CN 108593717A CN 201810384017 A CN201810384017 A CN 201810384017A CN 108593717 A CN108593717 A CN 108593717A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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Abstract
The invention discloses a kind of humidity sensor and preparation method thereof, electronic equipments, including nanometer paper substrates, are located at the conductive film of nanometer paper substrate surface, and the connection electrode of both ends opposite with conductive film respectively electrical connection；Conductive film includes multiple conductive elements, is mutually overlapped between adjacent conductive element；Humidity is bigger in environment, and nanometer paper substrates expand bigger, and the overlap joint degree between conductive element is lower, causes the resistance of conductive film bigger, and the final resistance that conductive film is presented is as expansion of the nanometer paper substrates in humidity changing environment changes and changes.Due to using degradable nanometer paper as substrate so that humidity sensor is to more environment-friendly；Due to nanometer paper good permeability, it is advantageously applied to wearable device.Expansion of the humidity sensor based on nanometer paper substrates and cause conductive film electric conductivity to change, for conductive film type selection it is unrestricted, and to humidity have quick response and fast quick-recovery excellent properties.
Description
Technical field
The present invention relates to sensor technical field more particularly to a kind of humidity sensor and preparation method thereof, electronic equipments.
Background technology
Ambient humidity has great influence to industrial production and human lives.The humidity of Sensitive Detection environment, for safety
Production and human health life are of great significance.At present commercialization hygrometer be based primarily upon moisture evaporation generation temperature change and
The conductance variation generated after active layer water suction carries out the detection of humidity, and the response time is longer, exists during Humidity Detection
Apparent hysteresis effect.In addition, such hygrometer is mainly rigid material, it is inconvenient to carry.
In recent years, the humidity sensor based on flexible substrates is made of in succession, flexible substrate such as dimethyl silicone polymer
(PDMS, Polydimethylsiloxane), poly terephthalic acid class plastics (PET, Polyethylene
Terephthalate), polyimides (PI, Polyimide) etc..Its sensor mechanism be based on its active layer (graphene oxide,
Molybdenum disulfide etc.) it interacts with hydrone, cause material electrical properties, such as resistance, the variation of electron mobility etc., to real
Now to the detection of humidity.However, such polymer-based end is difficult to be degraded, discarded electronic device causes different journeys to environment
The destruction of degree.Also, the poor air permeability of such polymer-based end is restricted in the application in wearable electronic device.
Therefore, exploitation has the humidity sensor that more preferable bio-compatibility and degradable flexible substrates are produced, for
Wearable and environmental-friendly electronic device is developed to have great importance.
Invention content
In view of this, an embodiment of the present invention provides a kind of humidity sensor and preparation method thereof, electronic equipment, to solve
The problem of certainly existing flexible humidity sensor bio-compatibility difference and non-degradable.
Therefore, an embodiment of the present invention provides a kind of humidity sensors, including：Nanometer paper substrates, are located at the nanometer paper
The conductive film of substrate surface, and both ends opposite with the conductive film respectively electrical connection connection electrode；
The conductive film includes multiple conductive elements, is mutually overlapped between the adjacent conductive element；
The resistance of the conductive film is as expansion of the nanometer paper substrates in humidity changing environment changes and changes.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the conduction
Primitive includes nanometer rods and/or nanometer sheet.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the nanometer
Stick includes one of carbon nanotube, Au nanometer rods, Ag nanometer rods and Cu nanometer rods or combination.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the nanometer
A diameter of 20nm-200nm of stick, the ratio between length and diameter of the nanometer rods are 5-20.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the nanometer
Piece includes one of graphene nanometer sheet, Au nanometer sheets, Ag nanometer sheets and Cu nanometer sheets or combination.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the nanometer
The maximum length of piece is 20nm-2 μm, and the thickness of the nanometer sheet is 2nm-5nm.
In one possible implementation, in above-mentioned humidity sensor provided in an embodiment of the present invention, the conduction
The resistance of film is at 200 ohm -20000 ohm.
On the other hand, the embodiment of the present invention additionally provides a kind of production method of above-mentioned humidity sensor, including：
It is respectively formed nanometer paper and conductive film；
The conductive film is transferred to the surface of the nanometer paper；
It is fixedly connected with electrode at the opposite both ends of the conductive film.
In one possible implementation, in above-mentioned production method provided in an embodiment of the present invention, conductive thin is formed
Film specifically includes：
The alcohol dispersion liquid of conductive element is dripped on the water surface, as the ethyl alcohol volatilizees, the conductive element self assembly
Form conductive film.
In one possible implementation, in above-mentioned production method provided in an embodiment of the present invention, by the conduction
Film is transferred to the surface of the nanometer paper, specifically includes：
The conductive film is picked up from the water surface using silicon chip；
The conductive film is fixed using heat release adhesive tape after drying；
Etching removes the silicon chip, obtains the composite construction of the conductive film and the heat release adhesive tape；
The composite construction is transferred to the surface of the nanometer paper；
The heating removal heat release adhesive tape.
On the other hand, the embodiment of the present invention additionally provides a kind of electronic equipment, including provided in an embodiment of the present invention above-mentioned
Humidity sensor.
The advantageous effect of the embodiment of the present invention includes：
A kind of humidity sensor provided in an embodiment of the present invention and preparation method thereof, electronic equipment, including：Nanometer paper substrate
Bottom is located at the conductive film of nanometer paper substrate surface, and the connection electrode of both ends opposite with conductive film respectively electrical connection；
Conductive film includes multiple conductive elements, is mutually overlapped between adjacent conductive element；Humidity is bigger in environment, nanometer paper substrates
What is expanded is bigger, and the overlap joint degree in conductive film between conductive element is lower, causes the resistance of conductive film bigger, is in finally
The resistance of existing conductive film is as expansion of the nanometer paper substrates in humidity changing environment changes and changes.Due to using degradable
Nanometer paper as substrate so that humidity sensor is to more environment-friendly；Due to nanometer paper good permeability, it is advantageously applied to
Wearable device.Expansion of the humidity sensor based on nanometer paper substrates and cause conductive film electric conductivity to change, for
The type selection of conductive film is unrestricted, and has the excellent properties of quick response and fast quick-recovery to humidity.
Description of the drawings
Fig. 1 a to Fig. 1 c are respectively the structural schematic diagram of humidity sensor provided in an embodiment of the present invention；
Fig. 2 is the correspondence that the resistance variations of conductive film in humidity sensor provided in an embodiment of the present invention change with humidity
Relational graph；
Fig. 3 is the schematic diagram that the resistance provided in an embodiment of the present invention for measuring humidity sensor changes with humidity；
Fig. 4 is what the resistance variations of conductive film in humidity sensor provided in an embodiment of the present invention changed with humidity cycle
Correspondence figure；
Fig. 5 is the flow chart of the production method of humidity sensor provided in an embodiment of the present invention；
Fig. 6 is the particular flow sheet of the production method of humidity sensor provided in an embodiment of the present invention；
Fig. 7 is the Raman Characterization for the humidity sensor produced using production method provided in an embodiment of the present invention
Figure.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention make into
It is described in detail to one step, it is clear that described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts all
Other embodiments shall fall within the protection scope of the present invention.
The shapes and sizes of each component do not reflect that actual proportions, purpose are schematically illustrate the content of present invention in attached drawing.
A kind of humidity sensor provided in an embodiment of the present invention, as shown in Fig. 1 a to Fig. 1 c, including：Nanometer paper substrates 100,
Conductive film 200 positioned at 100 surface of nanometer paper substrates, and company that both ends opposite with conductive film 200 respectively are electrically connected
Receiving electrode 300；
Conductive film 200 includes multiple conductive elements 210, is mutually overlapped between adjacent conductive element 210；
The resistance of conductive film 200 is as expansion of the nanometer paper substrates 100 in humidity changing environment changes and changes.
Specifically, the operation principle of humidity sensor provided in an embodiment of the present invention is different from existing hygrometer, nanometer
Paper is a kind of novel environmental-friendly transparent flexible thin-film material, nanometer paper by renewable, degradable nano-cellulose from
Assemble, there is good bio-compatibility, be a kind of ideal flexible base material.Contain largely on nano-cellulose surface
Oxygen-containing functional group so that nanometer paper substrates 100 occur under different humidity environment in various degree expand.Therefore, the present invention is real
The operation principle for applying the humidity sensor of example offer is the expansion variation based on nanometer paper substrates 100, so as to cause its surface
The electric conductivity for conductive element 210 that mutually overlapped in conductive film 200 changes.Humidity is bigger in environment, nanometer paper substrates
100 expansion it is bigger, the overlap joint degree in conductive film 200 between conductive element 210 is lower, leads to the electricity of conductive film 200
Resistance is bigger.Finally show as shown in Fig. 2, the resistance of conductive film 200 is as nanometer paper substrates 100 are in humidity changing environment
Expansion become larger and become larger, therefore can determine ambient humidity according to the resistance variations of conductive film 200.
Specifically, in humidity sensor provided in an embodiment of the present invention, due to using degradable nanometer paper as base
Bottom so that humidity sensor is to more environment-friendly；Due to nanometer paper good permeability, it is advantageously applied to wearable device.
Also, humidity sensor provided in an embodiment of the present invention is the expansion based on nanometer paper substrates 100 and causes conduction
200 electric conductivity of film changes, therefore, unrestricted for the type selection of conductive film.
Specifically, humidity sensor provided in an embodiment of the present invention has the excellent of quick response and fast quick-recovery to humidity
Performance.As shown in figure 3, humidity sensor A provided in an embodiment of the present invention is positioned in the chamber that both ends connect gas circuit, by following
The humidity being passed through in circumferential chamber in the air-flow regulation and control chamber for being loaded with vapor, then passing to a large amount of dry gas makes intracavitary back down
To initial value.Characteristic of semiconductor analyzer is adjusted to resistance mode, source and drain two-stage is separately connected provided in an embodiment of the present invention
Connection electrode in above-mentioned humidity sensor.By the real-time record to resistance value in characteristic of semiconductor analyzer, such as Fig. 4 institutes
Show, can obtain the concussion that the resistance value of humidity sensor changes with humidity, the response time can reach several seconds to tens seconds
Magnitude.And it is consistent with the data obtained measured by business hygrometer B.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, as shown in Fig. 1 a to Fig. 1 c, conductive element
210 may include nanometer rods 211 and/or nanometer sheet 212.
Specifically, Fig. 1 a show that each conductive element 210 for constituting conductive film 200 is the structure of nanometer rods 211, figure
1b shows that each conductive element 210 for constituting conductive film 200 is the structure of nanometer sheet 212, and Fig. 1 c show that composition is conductive
Each conductive element 210 of film 200 is the structure that nanometer rods 211 and nanometer sheet 212 mix.Pass through nanometer rods 211 and/or nanometer
Mutually overlapped structure is formed between piece 212, and the resistance of the conductive film to be formed 200 can be made with nanometer paper substrates 100
Expansion changes and changes.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, nanometer rods 211 may include carbon nanometer
One of pipe, Au nanometer rods, Ag nanometer rods and Cu nanometer rods or combination, do not limit herein.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, the diameter of nanometer rods 211 is generally
20nm-200nm, the ratio between length and diameter of nanometer rods 211 are generally 5-20.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, nanometer sheet 212 may include that graphene is received
One of rice piece, Au nanometer sheets, Ag nanometer sheets and Cu nanometer sheets or combination, do not limit herein.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, the maximum length of nanometer sheet 212 is generally
20nm-2 μm, the thickness of nanometer sheet 212 is generally 2nm-5nm.
Optionally, in above-mentioned humidity sensor provided in an embodiment of the present invention, the resistance of conductive film 200 generally exists
200 ohm -20000 ohm.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of production method of above-mentioned humidity sensor, by
It is similar to a kind of aforementioned humidity sensor in the principle that the production method solves the problems, such as, therefore the implementation of the production method can be joined
See the implementation of humidity sensor, overlaps will not be repeated.
Specifically, the production method for a kind of above-mentioned humidity sensor that the embodiment of the present invention also provides, as shown in figure 5, can
To specifically include following steps：
S501, nanometer paper and conductive film are respectively formed；
S502, the surface that conductive film is transferred to nanometer paper；
S503, it is fixedly connected with electrode at the opposite both ends of conductive film.
Optionally, in above-mentioned production method provided in an embodiment of the present invention, the formation conductive film in step S501, such as
Shown in Fig. 6, specifically following steps can be used to realize：
S601, the alcohol dispersion liquid of conductive element is dripped on the water surface, as ethyl alcohol volatilizees, conductive element is self-assembly of
Conductive film.
Optionally, in above-mentioned production method provided in an embodiment of the present invention, conductive film is transferred to by step S503 to be received
The surface of rice paper, as shown in fig. 6, specifically following steps can be used to realize：
S602, conductive film is picked up from the water surface using silicon chip；
Conductive film is fixed using heat release adhesive tape after S603, drying；
S604, etching removal silicon chip, obtain the composite construction of conductive film and heat release adhesive tape；
S605, the surface that composite construction is transferred to nanometer paper；
S606, heating removal heat release adhesive tape.
Illustrate to produce using above-mentioned production method provided in an embodiment of the present invention below by several specific embodiments
Humidity sensor parameter.
Embodiment 1：The production method of flexible humidity sensor is as follows：
1, the alcohol dispersion liquid 2mL of the graphene nanometer sheet of a concentration of 5% (mass fraction) is dripped into the water in culture dish
Graphene film is prepared on face；
2, graphene film is picked up using silicon chip from water, is fixed with heat release adhesive tape after drying；
3, etching removes silicon chip, the composite construction of release graphene/heat release adhesive tape；
4, it will be transferred in nanometer paper substrates after composite construction heat drying, heating removes heat release adhesive tape；
5, upper connection electrode is fixed at graphene film both ends, obtains humidity sensor.
The humidity sensor that the present embodiment obtains is measured through multimeter, and the sheet resistance of prepared graphene film is 2000
Ω.Through Raman Characterization, as shown in fig. 7, graphene film is multilayered structure in humidity sensor, and defect is seldom.Through sweeping
Electronic Speculum characterization is retouched, the maximum length of the graphene nanometer sheet in humidity sensor is 20nm-2 μm.
Embodiment 2：The production method of flexible humidity sensor is as follows：
1, the graphene nanometer sheet alcohol dispersion liquid 1mL of a concentration of 1% (mass fraction) is dripped into the water surface in culture dish
On prepare graphene film；
2, graphene film is picked up using silicon chip from water, is fixed with heat release adhesive tape after drying；
3, etching removes silicon chip, and release graphene/heat discharges adhesive tape composite construction；
4, it will be transferred in nanometer paper substrates after composite construction heat drying, heating removes heat release adhesive tape；
5, upper connection electrode is fixed at graphene film both ends, obtains humidity sensor.
The humidity sensor that the present embodiment obtains is measured through multimeter, and the sheet resistance of prepared graphene film is 6000
Ω。
Embodiment 3：The production method of flexible humidity sensor is as follows：
1, the Silver nanorod alcohol dispersion liquid 1mL of a concentration of 10% (mass fraction) is dripped on the water surface in culture dish and is made
Standby Ag films；
2, Ag films are picked up using silicon chip from water, is fixed with heat release adhesive tape after drying；
3, etching removes silicon chip, and release Ag films/heat discharges adhesive tape composite construction；
4, it will be transferred in nanometer paper substrates after composite construction heat drying, heating removes heat release adhesive tape；
5, upper connection electrode is fixed at Ag films both ends, obtains humidity sensor.
The humidity sensor that the present embodiment obtains is measured through multimeter, and the sheet resistance of prepared Ag films is 200 Ω.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of electronic equipment, including the embodiment of the present invention carries
The above-mentioned humidity sensor supplied.The electronic equipment can be wearable device, display equipment, mobile unit etc., not limit herein
It is fixed.
Above-mentioned humidity sensor provided in an embodiment of the present invention and preparation method thereof, electronic equipment, including：Nanometer paper substrate
Bottom is located at the conductive film of nanometer paper substrate surface, and the connection electrode of both ends opposite with conductive film respectively electrical connection；
Conductive film includes multiple conductive elements, is mutually overlapped between adjacent conductive element；Humidity is bigger in environment, nanometer paper substrates
What is expanded is bigger, and the overlap joint degree in conductive film between conductive element is lower, causes the resistance of conductive film bigger, is in finally
The resistance of existing conductive film is as expansion of the nanometer paper substrates in humidity changing environment changes and changes.Due to using degradable
Nanometer paper as substrate so that humidity sensor is to more environment-friendly；Due to nanometer paper good permeability, it is advantageously applied to
Wearable device.Expansion of the humidity sensor based on nanometer paper substrates and cause conductive film electric conductivity to change, for
The type selection of conductive film is unrestricted, and has the excellent properties of quick response and fast quick-recovery to humidity.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
God and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (11)
1. a kind of humidity sensor, which is characterized in that including：Nanometer paper substrates, are located at the conduction of the nanometer paper substrate surface
Film, and both ends opposite with the conductive film respectively electrical connection connection electrode；
The conductive film includes multiple conductive elements, is mutually overlapped between the adjacent conductive element；
The resistance of the conductive film is as expansion of the nanometer paper substrates in humidity changing environment changes and changes.
2. humidity sensor as described in claim 1, which is characterized in that the conductive element includes nanometer rods and/or nanometer
Piece.
3. humidity sensor as claimed in claim 2, which is characterized in that the nanometer rods include carbon nanotube, Au nanometer rods,
One of Ag nanometer rods and Cu nanometer rods or combination.
4. humidity sensor as claimed in claim 2, which is characterized in that a diameter of 20nm-200nm of the nanometer rods, institute
It is 5-20 to state the ratio between length and diameter of nanometer rods.
5. humidity sensor as claimed in claim 2, which is characterized in that the nanometer sheet includes that graphene nanometer sheet, Au receive
One of rice piece, Ag nanometer sheets and Cu nanometer sheets or combination.
6. humidity sensor as claimed in claim 2, which is characterized in that the maximum length of the nanometer sheet is 20nm-2 μm,
The thickness of the nanometer sheet is 2nm-5nm.
7. humidity sensor as claimed in any one of claims 1 to 6, which is characterized in that the resistance of the conductive film is 200
- 20000 ohm of ohm.
8. a kind of production method of such as claim 1-7 any one of them humidity sensors, which is characterized in that including：
It is respectively formed nanometer paper and conductive film；
The conductive film is transferred to the surface of the nanometer paper；
It is fixedly connected with electrode at the opposite both ends of the conductive film.
9. production method as claimed in claim 8, which is characterized in that form conductive film, specifically include：
The alcohol dispersion liquid of conductive element is dripped on the water surface, as the ethyl alcohol volatilizees, the conductive element is self-assembly of
Conductive film.
10. production method as claimed in claim 9, which is characterized in that the conductive film is transferred to the nanometer paper
Surface specifically includes：
The conductive film is picked up from the water surface using silicon chip；
The conductive film is fixed using heat release adhesive tape after drying；
Etching removes the silicon chip, obtains the composite construction of the conductive film and the heat release adhesive tape；
The composite construction is transferred to the surface of the nanometer paper；
The heating removal heat release adhesive tape.
11. a kind of electronic equipment, which is characterized in that including claim 1-7 any one of them humidity sensors.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810384017.XA CN108593717A (en) | 2018-04-26 | 2018-04-26 | A kind of humidity sensor and preparation method thereof, electronic equipment |
| PCT/CN2019/084019 WO2019206167A1 (en) | 2018-04-26 | 2019-04-24 | Humidity sensor and manufacturing method therefor, and electronic device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810384017.XA CN108593717A (en) | 2018-04-26 | 2018-04-26 | A kind of humidity sensor and preparation method thereof, electronic equipment |
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| WO (1) | WO2019206167A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109662694A (en) * | 2019-01-08 | 2019-04-23 | 京东方科技集团股份有限公司 | A kind of facial mask, mask, mobile terminal and system |
| WO2019206167A1 (en) * | 2018-04-26 | 2019-10-31 | 京东方科技集团股份有限公司 | Humidity sensor and manufacturing method therefor, and electronic device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019206167A1 (en) * | 2018-04-26 | 2019-10-31 | 京东方科技集团股份有限公司 | Humidity sensor and manufacturing method therefor, and electronic device |
| CN109662694A (en) * | 2019-01-08 | 2019-04-23 | 京东方科技集团股份有限公司 | A kind of facial mask, mask, mobile terminal and system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019206167A1 (en) | 2019-10-31 |
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