CN108593528B - Laser interference based method for measuring shape and size of non-spherical rough particles - Google Patents

Laser interference based method for measuring shape and size of non-spherical rough particles Download PDF

Info

Publication number
CN108593528B
CN108593528B CN201810372404.1A CN201810372404A CN108593528B CN 108593528 B CN108593528 B CN 108593528B CN 201810372404 A CN201810372404 A CN 201810372404A CN 108593528 B CN108593528 B CN 108593528B
Authority
CN
China
Prior art keywords
image
particle
dimension
particles
ccd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810372404.1A
Other languages
Chinese (zh)
Other versions
CN108593528A (en
Inventor
张红霞
李姣
王晓磊
贾大功
刘铁根
张以谟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin University
Original Assignee
Tianjin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University filed Critical Tianjin University
Priority to CN201810372404.1A priority Critical patent/CN108593528B/en
Publication of CN108593528A publication Critical patent/CN108593528A/en
Application granted granted Critical
Publication of CN108593528B publication Critical patent/CN108593528B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N2015/1022Measurement of deformation of individual particles by non-optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N2015/1029Particle size
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N2015/103Particle shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a method for measuring the shape and size of non-spherical rough particles based on laser interference, which comprises the following steps: a laser interference imaging double-light-path measuring system is set up, and two CCDs are used for receiving particle scattered light at the same time; carrying out image enhancement on the focused image recorded by the first CCD to obtain the shape information of the particles; and performing 2D autocorrelation operation on the out-of-focus image recorded by the second CCD to obtain a 2D autocorrelation image of the out-of-focus image, searching the minimum dimension direction of a central bright spot of the 2D autocorrelation image to determine the maximum dimension and the direction of the particle, calculating the dimension of the particle in the direction perpendicular to the minimum dimension direction, determining the dimension of the particle according to the relationship between the 2D autocorrelation image of the out-of-focus image and the dimension of the particle, and finally obtaining the dimension information of the particle. And comprehensively analyzing the shape information and the size information to give an interference imaging measurement result of the shape and the size of the irregular particles.

Description

Laser interference based method for measuring shape and size of non-spherical rough particles
Technical Field
The invention specifically provides a method for measuring the shape and size of non-spherical rough particles based on laser interference imaging double-receiving light paths, and belongs to the field of optical measurement.
Background
Particle field parameter measurements are spread across many industrial and research areas, such as agriculture, mining, food, chemical, construction, metallurgy, machinery, medicine, etc. The particles change shape in the processes of generation, movement, collision and the like, and irregular particles widely exist in a particle field to influence production life, industrial manufacturing and the like, so that the research on the non-spherical particles is also significant. Laser interference imaging is a real-time, fast, non-contact particle measurement technique that has matured to study spherical particles. However, the scattered light characteristics of the non-spherical coarse particles also include the shape and size information thereof, so that the laser interference imaging technology is an effective method for acquiring the shape and size information of the non-spherical coarse particles.
For the research of non-spherical particles, patent CN105866013A discloses a system and method for discriminating spherical particles based on two laser interference imaging defocusing interferograms. The method utilizes the principle of laser interference imaging to synchronously work by two CCDs, respectively receives defocusing interference patterns of particle scattered light with the polarization direction the same as and perpendicular to incident light, utilizes a polarizer and an analyzer to adjust the angle between the polarization direction of the scattered light and the polarization direction of the incident light, and realizes the discrimination and measurement of spherical particles according to the difference of the two images, thereby obtaining the conclusion whether the particles are spherical. Patent CN106092859A discloses a particle shape discrimination system and method based on laser interference imaging and coaxial holography. The method builds a laser interference imaging and coaxial holographic imaging dual-light-path system. The particles are illuminated with a sheet-like laser beam, and the shape of the particles is inferred by observing the different interference fringe patterns formed by the scattered light of the particles at the defocused image plane. Another optical path system takes an in-line hologram of the interfering particle and reconstructs the hologram to obtain the profile of the particle. And then matching the holographic reconstruction image with the corresponding particle interference fringe image to obtain an accurate particle shape judgment result. Patent CN104807738A discloses a real-time detection method and a detection device for single aerosol particles, which can distinguish the particle shape with a particle size less than 2.5 μm by synchronously collecting the forward and side scattering patterns of the single aerosol particles in the atmosphere for analysis and processing.
Disclosure of Invention
The invention provides a method for measuring the shape and size of an aspheric rough particle, which judges the shape and size of the rough particle by utilizing a focused image and a defocused speckle image of the particle acquired by a dual-optical-path system. The technical scheme provided by the invention is as follows:
a method for measuring shape and size of non-spherical rough particles based on laser interference, comprising the following steps:
i. the method comprises the steps that a laser interference imaging double-light-path measuring system is set up, two CCDs are used for receiving particle scattered light at the same time, the first CCD is located on a focusing image surface of the imaging system and receives a focusing image of particles, the second CCD is located on a defocusing image surface of the imaging system and receives an interference defocusing image of the particles;
ii. Carrying out image enhancement on the focused image recorded by the first CCD to obtain the shape information of the particles; performing 2D autocorrelation operation on the out-of-focus image recorded by the second CCD to obtain a 2D autocorrelation image of the out-of-focus image, searching the minimum dimension direction of a central bright spot of the 2D autocorrelation image to determine the maximum dimension and the direction of the particle, calculating the dimension of the particle in the direction perpendicular to the minimum dimension direction, determining the dimension of the particle according to the relationship between the 2D autocorrelation image of the out-of-focus image and the dimension of the particle, and finally obtaining the dimension information of the particle;
and iii, comprehensively analyzing the shape information and the size information and giving an interference imaging measurement result of the shape and the size of the irregular particles.
Preferably, light emitted by the laser is filtered by the beam expanding pinhole, compressed by the convex and concave cylindrical lenses, becomes a sheet-shaped light beam and irradiates on the rough particles, scattered light of the light beam is collected by the first CCD under a scattering angle of 90 degrees, and the scattered light is collected by the second CCD after beam splitting, so that a focused image and an out-of-focus image are respectively obtained.
The method comprises the steps of utilizing a laser interference imaging principle to synchronously work by two CCDs to respectively collect a focus image and an out-of-focus image of scattered light under a specific scattering angle of particles, carrying out image enhancement on the focus image to obtain shape information of the particles, carrying out 2D self-correlation operation on the out-of-focus image, and obtaining size information of the particles according to the relation between the center width of a 2D self-correlation peak and the size of the particles. The method can realize more accurate description of the particle field information.
Drawings
FIG. 1 is a computational flow diagram of the present invention.
FIG. 2 is a schematic diagram of a laser interference imaging dual-receiving optical path system of the present invention:
in the figure, 1 semiconductor laser, 2 microscope objective, 3 pinhole, 4 collimating lens, 5 convex column lens, 6 concave column lens, 7 glass slide, 8 imaging lens, 91:1 beam splitter, 10 first CCD, 11 second CCD.
FIG. 3 is a simulation of different shapes of rough particles according to the present invention, and FIG. 3(a) is a projection of the scattered light distribution on the surface of each shape of particles on the xoy plane; FIG. 3(b) is an interference defocus image of the particle in FIG. 3(a), and FIG. 3(c) is a 2D autocorrelation image of the defocus image; fig. 3(D) a color image of a 2D autocorrelation image.
Fig. 4 is an experimental graph of interference imaging of the grits. Fig. 4(a) is an in-focus image of the grits, fig. 4(b) is an out-of-focus image of the grits, fig. 4(c) is a 2D autocorrelation image of the out-of-focus image, and fig. 4(D) is an enlarged image of the 2D autocorrelation central bright spot.
Detailed Description
The invention is described below with reference to the accompanying drawings and examples.
According to the experimental schematic diagram experimental device shown in fig. 2, a laser 1 is a semiconductor laser with the wavelength of 532nm, the maximum power is 4w, beam expanding pinhole filtering is composed of a microscope objective 2 with the magnification of 10 × and a pinhole 3 with the size of 10 μm, the focal length of a collimator lens 4 is 150mm, the focal length of a convex cylindrical lens 5 is 200mm, the focal length of a concave cylindrical lens 6 is-9.7 mm, the size of a glass slide 7 is 25mm × 75mm × 1mm, the focal length of an imaging lens 8 is 50mm, the aperture F is 1.4, the splitting ratio of a beam splitter 9 is 1:1, parameters of a CCD sensor 10 and a CCD sensor 11 are the same, the number of effective pixels is 1280 960, the size of pixels is 6.45 μm, and the frame frequency is 15 fps.
The light beam is compressed by two convex-concave cylindrical lenses to form a sheet-shaped light beam with the length of 13mm and the width of about 1.0mm, the rough gravel stuck on the glass slide is irradiated by the light beam, and scattered light of the rough gravel is collected under a scattering angle of 90 degrees; during measurement, the system magnification M is 1.77, and the object distance z178mm, imaging distance z of CCD sensor 102,focus138mm, imaging distance z of the CCD sensor 112,focus+ Δ p equals 162mm, and defocus distance Δ p equals 24 mm. The total transmission coefficient B of the imaging system at this timetot=z1+z2-z1z2/f=12.7。
The measuring method of the invention is a flow shown in the attached figure 1, and comprises the following steps:
i. a laser interference imaging double-receiving light path measuring system is built, two CCDs are used for acquiring a focused image and an out-of-focus image respectively, the CCD10 records the focused image of particles, and the CCD11 records the out-of-focus speckle image of the particles.
ii. FIG. 3 is a simulation diagram of rough particles of different shapes, and FIG. 3(a) is a projection of the scattered light distribution on the surface of each particle of different shapes on the xoy plane; FIG. 3(b) is an interference defocus image of the particle in FIG. 3(a), and FIG. 3(c) is a 2D autocorrelation image of the defocus image; fig. 3(D) is a color image of a 2D autocorrelation image of the out-of-focus image. The simulation results show that the size of a particle is related to the width of its 2D autocorrelation central bright spot of the out-of-focus image.
iii, selecting a single gravel to carry out an interference imaging experiment, wherein the experimental result is shown in figure 4. Fig. 4(a) is an in-focus image of the grits, fig. 4(b) is an out-of-focus image of the grits, fig. 4(c) is a 2D autocorrelation image of the out-of-focus image, and fig. 4(D) is an enlarged image of the 2D autocorrelation central bright spot. The shape information of the grits can be obtained by image enhancement of fig. 4(a), and the size information of the grits can be obtained by calculating the width of the central bright spot of fig. 4 (d).

Claims (2)

1. A method for measuring shape and size of non-spherical rough particles based on laser interference, comprising the following steps:
i. the method comprises the steps that a laser interference imaging double-light-path measuring system is set up, two CCDs are used for receiving particle scattered light at the same time, the first CCD is located on a focusing image surface of the imaging system and receives a focusing image of particles, the second CCD is located on a defocusing image surface of the imaging system and receives an interference defocusing image of the particles;
ii. Carrying out image enhancement on the focused image recorded by the first CCD to obtain the shape information of the particles; performing 2D autocorrelation operation on the out-of-focus image recorded by the second CCD to obtain a 2D autocorrelation image of the out-of-focus image, searching the minimum dimension direction of a central bright spot of the 2D autocorrelation image to determine the maximum dimension and the direction of the particle, calculating the dimension of the particle in the direction perpendicular to the minimum dimension direction, determining the dimension of the particle according to the relationship between the 2D autocorrelation image of the out-of-focus image and the dimension of the particle, and finally obtaining the dimension information of the particle;
and iii, comprehensively analyzing the shape information and the size information and giving an interference imaging measurement result of the shape and the size of the irregular particles.
2. The method as claimed in claim 1, wherein the laser emits light which is filtered by the beam expanding pinhole and then compressed by the convex and concave cylindrical lenses to become a sheet-shaped light beam to irradiate the rough particles, the scattered light is collected by the first CCD under a scattering angle of 90 degrees, and the scattered light is collected by the second CCD after being split, so that a focused image and an out-of-focus image are obtained respectively.
CN201810372404.1A 2018-04-24 2018-04-24 Laser interference based method for measuring shape and size of non-spherical rough particles Active CN108593528B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810372404.1A CN108593528B (en) 2018-04-24 2018-04-24 Laser interference based method for measuring shape and size of non-spherical rough particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810372404.1A CN108593528B (en) 2018-04-24 2018-04-24 Laser interference based method for measuring shape and size of non-spherical rough particles

Publications (2)

Publication Number Publication Date
CN108593528A CN108593528A (en) 2018-09-28
CN108593528B true CN108593528B (en) 2020-07-03

Family

ID=63614947

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810372404.1A Active CN108593528B (en) 2018-04-24 2018-04-24 Laser interference based method for measuring shape and size of non-spherical rough particles

Country Status (1)

Country Link
CN (1) CN108593528B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109239930A (en) * 2018-10-10 2019-01-18 哈尔滨工业大学 A kind of saturation type laser sheet beam apparatus for shaping
CN114219064B (en) * 2021-12-20 2024-08-20 北京环境特性研究所 Irregular particle morphology characterization method and device based on sphere superposition model
CN116255922A (en) * 2023-02-21 2023-06-13 昆明理工大学 Spray particle diameter measurement method based on double laser interference

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58201005A (en) * 1982-05-19 1983-11-22 Toshiba Corp Device for measuring particle diameter
JP3446410B2 (en) * 1995-07-24 2003-09-16 株式会社島津製作所 Laser diffraction particle size distribution analyzer
CN103674791A (en) * 2013-12-16 2014-03-26 天津大学 Double beam irradiation-based interfering particle image measurement method
CN103712781B (en) * 2013-12-25 2016-03-30 天津大学 The multiple angles of incidence polarization interference measurement mechanism of birefringent wedge optical axis direction and method
CN103868831B (en) * 2014-02-26 2016-01-20 天津大学 Cloud particle Spectral structure measuring method and measuring system
CN104020083B (en) * 2014-06-13 2016-06-29 重庆大学 A kind of determine the method for suspended particulate substance scattering properties in water
CN105866013A (en) * 2016-05-26 2016-08-17 天津大学 Spherical particle distinguishing method based on two laser interference imaging out-of-focus interference patterns
CN106092859A (en) * 2016-05-26 2016-11-09 天津大学 Shape of particle judgement system based on laser interference imaging and in-line holographic and method
CN106841036B (en) * 2017-02-14 2019-09-17 天津大学 The best arrangement method of sample cell in laser interference imaging system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《Hybrid spherical particle field measurement》;Jinlu Sun;《Measurement Science and Technology》;20170228;全文 *
《双光束照明的干涉粒子成像粒子尺寸测量》;吕且妮;《中国激光》;20151210;第42卷(第12期);全文 *

Also Published As

Publication number Publication date
CN108593528A (en) 2018-09-28

Similar Documents

Publication Publication Date Title
CN108593528B (en) Laser interference based method for measuring shape and size of non-spherical rough particles
JP6995975B2 (en) Judgment method
JP6716121B2 (en) Digital holographic microscope
CN107003229B (en) Analytical method comprising holographic determination of the position of a biological particle and corresponding device
CN108254295B (en) Method and device for positioning and representing spherical particles
CN102866494A (en) Holographic microscopy for trapping three-dimensional structure
US10261305B2 (en) Three-dimensional focusing device and method for a microscope
US20220262087A1 (en) Method and apparatus for super-resolution optical imaging
JP6485847B2 (en) Measuring apparatus, microscope, and measuring method
CN101943663A (en) Measuring analytical system and measuring analytical method for distinguishing diffraction image of particles automatically
CN106092859A (en) Shape of particle judgement system based on laser interference imaging and in-line holographic and method
CN102540447A (en) Trapping and detecting multiplexed scanning optical-tweezers system
JP6867731B2 (en) Fine particle observation device and fine particle observation method
CN107907512B (en) Deep space exploration micro-area self-adaptive Raman fluorescence imaging combination method
US11480920B2 (en) Image processing apparatus, evaluation system, image processing program, and image processing method
JP2011507007A (en) Multifocal spot generator and multifocal multi-spot scanning microscope
CN114112959A (en) Rapid high-precision hyperspectral depth imaging system
CN108562522B (en) Method for simultaneously measuring particle size and refractive index
Go et al. Learning-based automatic sensing and size classification of microparticles using smartphone holographic microscopy
CN109100272B (en) Method for measuring orientation and size of transparent ellipsoid particles
Goud et al. Novel defocus hologram aberration compensation method in digital holography integrated pathology microscope for label free 3-D imaging
EP2012109A1 (en) Method for obtaining a high resolution image
JP2017161436A (en) Apparatus and method for identifying three-dimensional position of microparticle
JPWO2020066348A1 (en) Judgment method
CN109211117B (en) Line width measuring system and line width measuring device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant