CN108588671B - Multifunctional vacuum coating machine - Google Patents
Multifunctional vacuum coating machine Download PDFInfo
- Publication number
- CN108588671B CN108588671B CN201810496829.3A CN201810496829A CN108588671B CN 108588671 B CN108588671 B CN 108588671B CN 201810496829 A CN201810496829 A CN 201810496829A CN 108588671 B CN108588671 B CN 108588671B
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- CN
- China
- Prior art keywords
- air
- pump
- coating machine
- vacuum coating
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 48
- 239000000428 dust Substances 0.000 claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000001816 cooling Methods 0.000 claims abstract description 20
- 230000001502 supplementing effect Effects 0.000 claims abstract description 18
- 238000009792 diffusion process Methods 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 238000000605 extraction Methods 0.000 claims description 16
- 239000013589 supplement Substances 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 3
- 230000017525 heat dissipation Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 230000000740 bleeding effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
A multifunctional vacuum coating machine comprises a vacuum coating machine body, a control panel, a rapid cooling device, an air supplementing pipe, an air supplementing box, an exhaust pipe, an exhaust box, a diffusion pump, a Roots pump, a machine pump, an air exhaust dust collector, an air exhaust pump, an air supplementing dust collector and an air supplementing pump, wherein the rapid cooling device comprises a frame body, a water tank, a water inlet plug, a sponge metal net, a radiating fan and an air inlet, the control panel is arranged on the left side of the vacuum coating machine body, the rapid cooling device is arranged on the right side of the vacuum coating machine body, the air supplementing box is communicated with the inside of the vacuum coating machine body through the air supplementing pipe, and the exhaust box is connected with the vacuum coating machine body through the exhaust pipe. Improve work efficiency, be provided with the sealing washer and can prevent gaseous leakage.
Description
Technical Field
The invention relates to the technical field of coating machine equipment, in particular to a multifunctional vacuum coating machine.
Background
When the vacuum coating machine works, the vacuum chamber needs to be vacuumized firstly, so that the vacuum chamber is in a vacuum state, and then coating is carried out; after the coating is finished, the vacuum chamber needs to be inflated. In the prior art, an air charging pipeline of a vacuum coating machine is directly communicated with the outside, dust in the outside air is easily brought into a vacuum chamber to cause dust adsorption on lenses, and a poor vacuum evaporation metal film of a product is formed by melting and gasifying metal through resistance, high frequency or electronic heating under the condition of high vacuum and attaching the metal to the surface of a film substrate to form a composite film, wherein most of metal to be plated is aluminum, a layer of extremely thin metal aluminum is plated on the surface of a plastic film or paper to form aluminized thin paper or aluminized paper, the vacuum condition is strictly limited in the production process of the aluminized thin film, and the performance of the coating is influenced by over-high or over-low vacuum degree, at present, the control of the vacuum degree of the coating machine used in a factory is not stable, so that the performance of the product in the production process is not stable enough, therefore, the problem that the control of the vacuum degree in the coating machine in the production process is difficult is solved, and the temperature of the internal film coating object is high, and needs to be cooled in time, so that the working efficiency is improved.
Disclosure of Invention
The invention aims to provide a multifunctional vacuum coating machine, which comprises a vacuum coating machine body, a control panel, a rapid cooling device, an air supplementing pipe, an air supplementing box, an exhaust pipe, an exhaust box, a diffusion pump, a roots pump, a machine pump, an exhaust dust collector, an exhaust air pump, an air supplementing dust collector and an air supplementing pump, wherein the rapid cooling device comprises a frame body, a water tank, a water inlet plug, a sponge metal net, a radiating fan and an air inlet, the control panel is arranged on the left side of the vacuum coating machine body, the rapid cooling device is arranged on the right side of the vacuum coating machine body, the air supplementing box is communicated with the inside of the vacuum coating machine body through the air supplementing pipe, the exhaust box is connected with the vacuum coating machine body through the exhaust pipe, the machine pump is connected with the exhaust pipe, and the roots pump is connected with the machine pump, the one end of dust remover of bleeding with the exhaust tube is connected, the other end with the air pump of bleeding is connected, dust remover of bleeding with the air pump of bleeding all set up in the exhaust chamber, the tonifying qi dust remover with the tonifying qi air pump all set up in the tonifying qi incasement, the tonifying qi dust remover passes through the air supplement pipe with the inside intercommunication of vacuum coating machine body, the tonifying qi air pump with the tonifying qi dust remover is connected, the basin set up in the bottom of framework, the stopper of entrying set up in on the basin, the top of sponge metal mesh with the framework top is connected, the bottom with the basin bottom is connected, radiator fan set up in the rear of sponge metal mesh, the air intake set up in the left and right sides of framework.
Preferably, the sponge metal net comprises a metal net and a sponge film, wherein the sponge film is wrapped on the periphery of the metal wires of the metal net;
preferably, a transparent water level observation window is arranged on the outer side of the water tank, and scales are arranged on the window;
preferably, the frame body is made of metal and is connected with the inner wall of the vacuum coating machine body;
preferably, sealing rings are arranged at the joints of the air supply pipe and the exhaust pipe and the vacuum coating machine body;
preferably, the control panel is electrically connected to the diffusion pump, the roots pump, the machine pump, the air suction dust remover, the air pump, the air supplement dust remover, the air pump and the heat dissipation fan respectively.
The beneficial effects are that:
the invention provides a multifunctional vacuum coating machine which is simple in structure, convenient to operate, complete in function, capable of keeping a dust-free environment in a vacuum chamber, capable of quickly cooling the interior of the coating machine and improving the working efficiency, and provided with a sealing ring to prevent gas leakage.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a side cross-sectional view of the structure of the present invention;
FIG. 3 is a front cross-sectional view of the structure of the present invention;
FIG. 4 is a side sectional view of the rapid cooling device of the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1-vacuum coating machine body, 2-control panel, 3-rapid cooling device, 4-air supplement pipe, 5-air supplement box, 6-air exhaust pipe, 7-air exhaust box, 8-diffusion pump, 9-roots pump, 10-machine pump, 11-air exhaust dust remover, 12-air exhaust pump, 13-air supplement dust remover, 14-air supplement air pump, 301-frame body, 302-water tank, 303-water inlet plug, 304-sponge metal net, 305-cooling fan and 306-air inlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a multifunctional vacuum coating machine comprises a vacuum coating machine body 1, a control panel 2, a rapid cooling device 3, an air supply pipe 4, an air supply box 5, an exhaust pipe 6, an exhaust box 7, a diffusion pump 8, a roots pump 9, a machine pump 10, an exhaust dust collector 11, an exhaust air pump 12, an air supply dust collector 13 and an air supply pump 14, wherein the rapid cooling device 3 comprises a frame body 301, a water tank 302, a water inlet plug 303, a sponge metal net 304, a cooling fan 305 and an air inlet 306, the control panel 2 is arranged on the left side of the vacuum coating machine body 1, the rapid cooling device 3 is arranged on the right side of the vacuum coating machine body 1, the air supply box 5 is communicated with the inside of the vacuum coating machine body 1 through the air supply pipe 4, the exhaust box 7 is connected with the vacuum coating machine body 1 through the exhaust pipe 6, the machine pump 10 is connected with the exhaust pipe 6, the roots pump 9 is connected with the machine pump 10, one end of the exhaust dust collector, the other end is connected with an air extraction pump 12, an air extraction dust remover 11 and the air extraction pump 12 are arranged in an air extraction box 7, an air supply dust remover 13 and an air supply pump 14 are arranged in an air supply box 5, the air supply dust remover 13 is communicated with the inside of a vacuum coating machine body 1 through an air supply pipe 4, the air supply pump 14 is connected with the air supply dust remover 13, a water tank 302 is arranged at the bottom of a frame body 301, a water inlet plug 303 is arranged on the water tank 302, the top end of a sponge metal net 304 is connected with the top end of the frame body 301, the bottom end is connected with the bottom end of the water tank 302, a heat radiation fan 305 is arranged at the rear side of the sponge metal net 304, an air inlet 306 is arranged at the left side and the right side of the frame body 301, the sponge metal net 304 comprises a metal net and a sponge film, wherein the sponge film is wrapped on the periphery, and is connected with the inner wall of the vacuum coating machine body 1, the air supplement pipe 4 and the connection part of the exhaust pipe 6 and the vacuum coating machine body 1 are all provided with a sealing ring, the control panel 2 is respectively and electrically connected with a diffusion pump 8, a roots pump 9, a machine pump 10, an air exhaust dust collector 11, an air exhaust pump 12, an air exhaust dust collector 13, an air supply air pump 14 and a cooling fan 305, when the vacuum coating machine is used, air is extracted by the air exhaust pump 12, the air exhaust dust collector 11 filters and removes dust of the extracted air, firstly, the air is primarily extracted by the machine pump 10, the roots pump 9 works after reaching a certain vacuum degree, when the vacuum degree in the vacuum chamber reaches a certain vacuum degree (10-2mbar), the diffusion pump 8 is opened, the high vacuum degree (10-4mbar) in the vacuum chamber is further improved and maintained by the diffusion pump 8, after the coating of the interior of the belt machine is finished, the air is supplemented into the vacuum coating machine body 1 by, before the use, water needs to be injected into the water tank 302, the sponge metal net 304 is always in a wet state by utilizing the water adsorption property, the heat radiation fan 305 accelerates the evaporation of water on the sponge metal net 304 to absorb heat quickly, so that the internal temperature of the film plating machine is reduced quickly, and the working efficiency is improved.
The vacuum coating machine is simple in structure, convenient to operate, complete in function, capable of keeping a dust-free environment in the vacuum chamber, capable of quickly cooling the interior of the coating machine and improving working efficiency, and provided with the sealing ring, and gas leakage can be prevented.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (6)
1. A multifunctional vacuum coating machine is characterized in that: comprises a vacuum coating machine body (1), a control panel (2), a rapid cooling device (3), an air supplementing pipe (4), an air supplementing box (5), an air extracting pipe (6), an air extracting box (7), a diffusion pump (8), a roots pump (9), a machine pump (10), an air extracting dust collector (11), an air extracting air pump (12), an air supplementing dust collector (13) and an air supplementing air pump (14), wherein the rapid cooling device (3) comprises a frame body (301), a water tank (302), a water inlet plug (303), a sponge metal net (304), a heat radiation fan (305) and an air inlet (306), the control panel (2) is arranged on the left side of the vacuum coating machine body (1), the rapid cooling device (3) is arranged on the right side of the vacuum coating machine body (1), the air supplementing box (5) is communicated with the interior of the vacuum coating machine body (1) through the air supplementing pipe (4), the air extraction box (7) is connected with the vacuum coating machine body (1) through the air extraction pipe (6), the machine pump (10) is connected with the air extraction pipe (6), the roots pump (9) is connected with the machine pump (10), one end of the air extraction dust remover (11) is connected with the air extraction pipe (6), the other end of the air extraction dust remover is connected with the air extraction pump (12), the air extraction dust remover (11) and the air extraction pump (12) are both arranged in the air extraction box (7), the air supplement dust remover (13) and the air supplement pump (14) are both arranged in the air supplement box (5), the air supplement dust remover (13) is communicated with the interior of the vacuum coating machine body (1) through the air supplement pipe (4), the air supplement pump (14) is connected with the air supplement dust remover (13), the water tank (302) is arranged at the bottom of the frame body (301), the water inlet plug (303) is arranged on the water tank (302), the top end of the sponge metal net (304) is connected with the top end of the frame body (301), the bottom end of the sponge metal net is connected with the bottom end of the water tank (302), the heat dissipation fan (305) is arranged behind the sponge metal net (304), and the air inlets (306) are arranged on the left side and the right side of the frame body (301).
2. The multifunctional vacuum coating machine of claim 1, characterized in that: the sponge metal net (304) comprises a metal net and a sponge film, wherein the sponge film is wrapped on the periphery of the metal wires of the metal net (304).
3. The multifunctional vacuum coating machine of claim 1, characterized in that: the outside of basin (302) is equipped with transparent water level observation window, and is equipped with the scale on the window.
4. The multifunctional vacuum coating machine of claim 1, characterized in that: the frame body (301) is made of metal and is connected with the inner wall of the vacuum coating machine body (1).
5. The multifunctional vacuum coating machine of claim 1, characterized in that: sealing rings are arranged at the joints of the air supply pipe (4), the exhaust pipe (6) and the vacuum coating machine body (1).
6. The multifunctional vacuum coating machine of claim 1, characterized in that: the control panel (2) is electrically connected with the diffusion pump (8), the roots pump (9), the machine pump (10), the air extraction dust remover (11), the air extraction pump (12), the air supplement dust remover (13), the air supplement pump (14) and the cooling fan (305) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810496829.3A CN108588671B (en) | 2018-05-22 | 2018-05-22 | Multifunctional vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810496829.3A CN108588671B (en) | 2018-05-22 | 2018-05-22 | Multifunctional vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108588671A CN108588671A (en) | 2018-09-28 |
| CN108588671B true CN108588671B (en) | 2020-03-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810496829.3A Expired - Fee Related CN108588671B (en) | 2018-05-22 | 2018-05-22 | Multifunctional vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108588671B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109182978A (en) * | 2018-11-05 | 2019-01-11 | 铜陵市超越电子有限公司 | A kind of high-cleanness type coating machine with gas purge system |
| CN110938809A (en) * | 2019-11-29 | 2020-03-31 | 湖南旭昱新能源科技有限公司 | Vacuum coating device for amorphous silicon solar wafer |
| CN113061868A (en) * | 2021-03-12 | 2021-07-02 | 斡兹真空科技(嘉兴)有限公司 | Flexible multifunctional film coating machine |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203904454U (en) * | 2014-04-18 | 2014-10-29 | 芜湖市德宝新材料股份有限公司 | Vacuum-pumping system for coating machine |
| KR101718412B1 (en) * | 2015-04-07 | 2017-03-27 | (주)제너코트 | Thin-film coating apparatus and coating method for graphite surface treatment |
| CN105018884B (en) * | 2015-07-30 | 2018-04-10 | 苏州方昇光电装备技术有限公司 | Instrument is deposited in a kind of small size vacuum |
| CN205946474U (en) * | 2016-08-02 | 2017-02-08 | 陈玉芬 | Automatic infantees machine switch board |
| CN107841709A (en) * | 2017-11-15 | 2018-03-27 | 中山市创科科研技术服务有限公司 | A kind of optical coating system Quick dustless inlet duct |
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2018
- 2018-05-22 CN CN201810496829.3A patent/CN108588671B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN108588671A (en) | 2018-09-28 |
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Granted publication date: 20200324 |