CN108581820A - A kind of semi-conducting material production technology equipment - Google Patents

A kind of semi-conducting material production technology equipment Download PDF

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Publication number
CN108581820A
CN108581820A CN201810431797.9A CN201810431797A CN108581820A CN 108581820 A CN108581820 A CN 108581820A CN 201810431797 A CN201810431797 A CN 201810431797A CN 108581820 A CN108581820 A CN 108581820A
Authority
CN
China
Prior art keywords
cavity
chamber
cunning
slot
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201810431797.9A
Other languages
Chinese (zh)
Inventor
童英涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ninghai Voyage Industrial Product Design Co Ltd
Original Assignee
Ninghai Voyage Industrial Product Design Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ninghai Voyage Industrial Product Design Co Ltd filed Critical Ninghai Voyage Industrial Product Design Co Ltd
Priority to CN201810431797.9A priority Critical patent/CN108581820A/en
Publication of CN108581820A publication Critical patent/CN108581820A/en
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0015—Hanging grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a kind of semi-conducting material production technology equipment, including main body, the main body is internally provided with operating cavity, it is equipped with first in the main body on the upside of the operating cavity and slides chamber, the the second cunning chamber for extending downwardly setting is equipped in the main body on the right side of the first cunning chamber, setting is communicated at the top of the second cunning bottom of chamber portion extending end and the operating cavity, it is equipped with the first cavity and the second cavity in part between the first cunning chamber and the second cunning chamber, first cavity is located on the upside of second cavity, the first cunning intracavitary is slidably connected with the first sliding block, through equipped with through slot in first sliding block, the extended slide guide column in left and right is slidably connected in the through slot, end is connect with the left and right sides inner wall secure fit of the first cunning chamber respectively at left and right sides of the slide guide column.

Description

A kind of semi-conducting material production technology equipment
Technical field
The present invention relates to semiconductor processing equipment technical field, specially a kind of semi-conducting material production technology equipment.
Background technology
Semi-conducting material is a kind of material with semiconduction energy, can be used to make semiconductor devices and Machine Tool Circuit Electronic material etc., be widely used general, in semiconductor fabrication, need to carry out the semiconductor crystal wafer tentatively produced Surface polishes, so needing to use semiconductor grinding device.But that there are processing efficiencies is low for traditional semiconductor grinding device plus The shortcomings of work is of high cost, and machining accuracy processing quality is unstable, and safety prevention measure is weak, this makes traditional semiconductor grinding fill It sets and receives certain limitation, the present invention solves conventional semiconductors grinding device there are processing efficiencies low, high processing costs, adds Work precision processing quality is unstable, the weak problem of safety prevention measure, improves grinding technique level, is ensureing attrition process essence While degree and processing quality, processing efficiency and safety in utilization are also improved.
Invention content
It is in the prior art for overcoming the purpose of the present invention is to provide a kind of semi-conducting material production technology equipment State defect.
A kind of semi-conducting material production technology equipment according to the present invention, including main body, the main body are internally provided with Operating cavity is equipped with first in the main body on the upside of the operating cavity and slides chamber, and described first slides the main body on the right side of chamber It is interior to be equipped with the second cunning chamber for extending downwardly setting, it communicates and sets at the top of the second cunning bottom of chamber portion extending end and the operating cavity It sets, the first cavity and the second cavity, first cavity is equipped in the part between the first cunning chamber and the second cunning chamber On the upside of second cavity, the first cunning intracavitary is slidably connected with the first sliding block, runs through in first sliding block Equipped with through slot, the extended slide guide column in left and right, the slide guide column left and right sides are slidably connected in the through slot End is connect with the left and right sides inner wall secure fit of the first cunning chamber respectively, and the slide guide column screw-internal thread fit is connected with Extended adjusting screw rod down, adjusting screw rod bottom extending end are connected with first motor power, and described first Be rotatably assorted the internal key shaft of connection in the bottom end face of sliding block, and the internal key shaft top end be connected by power has solid described The second motor in first sliding block is rotatably assorted between first cavity and the first cunning chamber and is connected with first rotating shaft, institute It states first rotating shaft left distal end and is installed with the transmission gear for stretching into the first cunning intracavitary, first slider top end is fixed There is the tooth-strip part to be connected with the transmission gear power, the first rotating shaft right end, which is installed with, stretches into described The first cone pulley in one cavity is rotatably assorted between first cavity and second cavity and is connected with the second shaft, described Second shaft top end is installed with the second cone for stretching into first cavity and being connected with the first cone pulley power Wheel, the second shaft bottom end are installed with the reel stretched into second cavity, second cavity and described the Chamber is slided in part between two cunning chambers with described second equipped with right end to be connected the third cunning chamber of setting, third cunning chamber It is connected equipped with through hole between second cavity, the second cunning intracavitary is slidably connected with protection slide plate, described Symmetrical above and below in protection slide plate left end face to be equipped with lockhole, the third slides intracavitary and is slidably connected with closing piece, the closing piece The third in left side slides intracavitary and is equipped with top pressure spring, in the through hole transition be connected with the extended drawing in left and right Rope, described drawstring one end are fixedly connected with the reel, and the left end face fixation of the drawstring other end and the closing piece is matched Connection is closed, grinding and polishing mechanism is equipped in the operating cavity.
Further technical solution, the adjusting screw rod top end are rotatably assorted with the through slot inner roof wall and connect, The first motor outer surface is embedded in the through slot inner bottom wall admittedly.
Further technical solution, the main body right end face is interior to be equipped with the logical of setting that be connected with the second cunning chamber Fluting and the setting that is connected with the operating cavity inlet slot, it is described open up be slidably connected in slot left and right be extended Push and pull bar, the push and pull bar left distal end connect with the protection slide plate right end secure fit, the push-and-pull handle Hand right end is stretched out outside the right end face of the main body.
Further technical solution, the grinding and polishing mechanism include that bottom is arranged in the operating cavity in sliding connection The supporting table in portion and the connection that is rotatably assorted are arranged in the part between the first cunning chamber and the operating cavity and upper downward The third shaft of setting is stretched, extending end is installed with the external key axis stretched into the through slot at the top of the third shaft, described Third shaft bottom extending end is installed with the grinding and polishing wheel stretched into the operating cavity, and liter is installed at the top of the supporting table Platform component is dropped, fastening clips are installed in the lifting platform component top end surface, are led equipped with dovetail in the operating cavity inner bottom wall Slot is slidably connected with dovetail slider guide, the dovetail slider guide top end and the supporting table in the dovetail guide groove Bottom end face secure fit at left side edge connects.
Description of the drawings
Fig. 1 is a kind of semi-conducting material production technology equipment dimensional structure diagram in the present invention；
Fig. 2 is a kind of semi-conducting material production technology equipment inner structure schematic diagram in the present invention.
Specific implementation mode
With reference to Fig. 1-2, the present invention is described in detail.
Referring to Fig.1-2, a kind of semi-conducting material production technology equipment according to an embodiment of the invention, including main body 6, The main body 6 is internally provided with operating cavity 61, and being equipped with first in the main body 6 of 61 upside of the operating cavity slides chamber 62, institute It states and is equipped with the second cunning chamber 67 for extending downwardly setting in the main body 6 on 62 right side of the first cunning chamber, described second slides 67 bottom of chamber Portion's extending end communicates setting with the top of the operating cavity 61, and described first slides the portion between chamber 62 and the second cunning chamber 67 The first cavity 63 and the second cavity 64 are equipped in point, first cavity 63 is located on the upside of second cavity 64, and described first It is slidably connected with the first sliding block 621 in sliding chamber 62, runs through in first sliding block 621 and is equipped with through slot 624, the perforation Be slidably connected with the extended slide guide column 628 in left and right in slot 624,628 left and right sides end of the slide guide column respectively with Described first slides the left and right sides inner wall secure fit connection of chamber 62, and 628 screw-internal thread fit of slide guide column is connected with downward The adjusting screw rod 625 of setting is stretched, 625 bottom extending end of the adjusting screw rod is connected with 626 power of first motor, described Be rotatably assorted the internal key shaft 622 of connection in the bottom end face of first sliding block 621,622 top end power of the internal key shaft It is connected with solid the second motor 623 in first sliding block 621, first cavity 63 and described first turn between sliding chamber 62 Dynamic to be connected with first rotating shaft 631,631 left distal end of the first rotating shaft is installed with the biography stretched into the first cunning chamber 62 Moving gear 629,621 top end of the first sliding block are installed with the tooth to be connected with 629 power of the transmission gear Item portion 627,631 right end of the first rotating shaft are installed with the first cone pulley 632 stretched into first cavity 63, and described It is rotatably assorted between one cavity 63 and second cavity 64 and is connected with the second shaft 634,634 top end of the second shaft It is installed with the second cone pulley 633 for stretching into first cavity 63 and being connected with 632 power of the first cone pulley, described the Two shafts, 634 bottom end is installed with the reel 641 stretched into second cavity 64, second cavity 64 and described the Chamber 67 is slided in part between two cunning chambers 67 with described second equipped with right end to be connected the third cunning chamber 65 of setting, described the It is connected equipped with through hole 66 between three cunning chambers 65 and second cavity 64, is slidably connected in the second cunning chamber 67 Slide plate 671 is protected, symmetrical above and below in 671 left end face of protection slide plate to be equipped with lockhole 672, the third, which is slided in chamber 65, to be slided It is connected with closing piece 651, the third in 651 left side of the closing piece, which is slided, is equipped with top pressure spring 652, the through hole in chamber 65 Transition is connected with the extended drawstring 661 in left and right in 66, and 661 one end of the drawstring is fixed with the reel 641 to be connected It connects, 66 other end of the drawstring is connect with the left end face secure fit of the closing piece 651, and grinding is equipped in the operating cavity 61 Polishing mechanism.
Valuably or illustratively, 625 top end of the adjusting screw rod is rotatably assorted with 624 inner roof wall of the through slot Connection, 626 outer surface of the first motor are embedded in 624 inner bottom wall of the through slot admittedly, and described the is automatically controlled to realize The automatic lifting of one sliding block 621 works.
Valuably or illustratively, the setting that is connected with the second cunning chamber 67 is equipped in 6 right end face of the main body Open up slot 68 and the inlet slot 69 for the setting that is connected with the operating cavity 61, described open up are slidably connected in slot 68 The extended push and pull bar 681 in left and right, 681 left distal end of the push and pull bar are solid with 671 right end of protection slide plate Fixed to be connected, 681 right end of the push and pull bar is stretched out outside the right end face of the main body 6, to convenient control manually It makes the 671 oscilaltion slide-open of protection slide plate and closes work, reduce production and operating cost, meanwhile, it improves The safety that this equipment uses.
Valuably or illustratively, the grinding and polishing mechanism includes that sliding connection is arranged in the operating cavity 61 The supporting table 611 of bottom and the connection that is rotatably assorted are arranged in the part for sliding between chamber 62 and the operating cavity 61 described first And the third shaft 616 being extended up and down, 616 top extending end of the third shaft, which is installed with, stretches into the through slot External key axis 618 in 624,616 bottom extending end of the third shaft are installed with the grinding stretched into the operating cavity 61 and throw Halo 617,611 top of the supporting table are installed with lifting platform component 614, are installed in 614 top end surface of lifting platform component There are a fastening clips 615, is equipped with dovetail guide groove 612 in 61 inner bottom wall of the operating cavity, the company of being slidably matched in the dovetail guide groove 612 It is connected to dovetail slider guide 613,613 top end of dovetail slider guide is with 611 bottom end face of the supporting table close to left side Secure fit connects at edge, to realize efficiently accurately fine gtinding polishing, greatly improves work efficiency and work Make quality.
When original state, supporting table 611 is made to be fully located in operating cavity 61, at this point, driving dovetail slide guide by supporting table 611 Block 613 is utmostly located at the leftward position in dovetail guide groove 612, meanwhile, so that 671 bottom end of protection slide plate is utmostly stretched Enter in operating cavity 61, and 671 bottom end end face of protection slide plate is made to be in the state that offsets completely with bottom in operating cavity 61, this When, so that 671 left end face of protection slide plate is abutted against close to bottom position and the right end face of supporting table 611, and then realize into The work of the completely closed state and firm supporting table 611 of mouth slot 69, meanwhile, so that the lockhole 672 of upside is slided chamber 65 with third In complete relative position, at this point, the lockhole 672 of downside is made utmostly to slide chamber 65 far from third, meanwhile, make protection slide plate 671 drive push and pull bars 681 are located at the lowest position opened up in slot 68, are slided in chamber 62 at this point, the first sliding block 621 is located at first Lowest position, meanwhile, make the first sliding block 621 drive tooth-strip part 627 utmostly far from transmission gear 629, at this point, making to lead Traveller 628 is located at the top position in through slot 624, meanwhile, make the internal key shaft 622 in 621 bottom end face of the first sliding block It is connected with 618 complete power of external key axis, at this point, closing piece 651 is made 651 right side end of closing piece by 652 pressure on top surface of top pressure spring The 672 fully locked mating connection of lockhole at end and upside.
When needing grinding and polishing to work, internal key shaft 622 is driven to rotate by controlling the second motor 623, and then realize It drives external key axis 618 and third shaft 616 and grinding and polishing wheel 617 to rotate by internal key shaft 622, is then lifted by controlling The lifting work of platform component 614 makes lifting platform component 614 that fastening clips 615 be driven to carry out lifting grinding and polishing work, carries significantly High grinding efficiency；
When grinding is completed to need to take out, at this point, the second motor 623 of control stops operating, meanwhile, control lifting platform component 614 It drives fastening clips 615 utmostly far from grinding and polishing wheel 617, then, adjusting screw rod 625 is driven by first motor 626 Rotation drives the first sliding block 621 to slide the top-direction in chamber 62 towards first and slides, at this point, making the first sliding block by adjusting screw rod 625 Internal key shaft 622 in 621 drive bottom end faces is gradually distance from external key axis 618, meanwhile, gradually make the first sliding block 621 with moving teeth Item portion 627 and 629 power of transmission gear are slidably matched work, and then realize and drive the first cone pulley 632 and the by tooth-strip part 627 Two cone pulleys 633 rotate, and drive reel 641 to rotate by the second cone pulley 633, and then drawstring 661 is made to drive 651 gradual grams of closing piece 652 pressure on top surface of top pressure spring is taken gradually to slide into third cunning chamber 65, until when third cunning chamber 65 is slid completely into third cunning chamber 65, At this point, by manual-up pulling push and pull bar 681, until push and pull bar 681 slides into the top opened up in slot 68 Position, meanwhile, so that 671 top section of protection slide plate is utmostly slid into the top position in the second cunning chamber 67, at this point, making protection 671 bottom end of slide plate utmostly far from inlet slot 69, meanwhile, make downside lockhole 672 be moved to third slide chamber 65 the right side Side relative position at this point, the first sliding block 621 of control returns to initial position, and then realizes closing piece 651 by top pressure spring 652 Pressure on top surface utmostly stretches into the lockhole 672 of downside, then, supporting table 611 is pulled out on the right side of phase, you can fast and easy pickup with And put part work.
The beneficial effects of the invention are as follows：The configuration of the present invention is simple, it is easy to operate, by setting operating cavity inside main body, grasp Make to set the first cunning chamber in the main body on the upside of chamber, the second cunning chamber for extending downwardly setting set in the main body on the right side of the first cunning chamber, Setting is communicated at the top of second cunning bottom of chamber portion extending end and operating cavity, and the first cunning chamber and second is slided and sets the in part between chamber One cavity and the second cavity, the first cavity are located on the upside of the second cavity, first cunning intracavitary the first sliding block of sliding connection, and first Run through in sliding block and sets through slot, the extended slide guide column in sliding connection left and right in through slot, slide guide column left and right sides end End is connect with the left and right sides inner wall secure fit of the first cunning chamber respectively, and the connection of slide guide column screw-internal thread fit is extended up and down Adjusting screw rod, adjusting screw rod bottom extending end are connected with first motor power, the bottom end rotation in surface of the first sliding block The internal key shaft of mating connection, solid the second motor in the first sliding block of internal key shaft top end be connected by power, the first cavity It is rotatably assorted between the first cunning chamber and connect first rotating shaft, the fixed driving cog for stretching into the first cunning intracavitary of first rotating shaft left distal end Wheel, the first fixed tooth-strip part to be connected with transmission gear power in slider top end, first rotating shaft right end are solid If stretching into the first cone pulley in the first cavity, be rotatably assorted the second shaft of connection between the first cavity and the second cavity, second turn Axis top end is fixed to stretch into the second cone pulley being connected in the first cavity and with the first cone pulley power, the second shaft bottom end The fixed reel stretched into the second cavity is held, set right end in the part between the second cavity and the second cunning chamber slides with second The be connected third of setting of chamber slides chamber, and third, which is slided to be connected between chamber and the second cavity, sets through hole, and the second cunning intracavitary sliding is matched It closes and connects protection slide plate, symmetrical above and below in protection slide plate left end face to set lockhole, third slides intracavitary and is slidably connected closing piece, locks Third on the left of block slides intracavitary and sets top pressure spring, in through hole transition be connected the extended drawstring in left and right, drawstring one end It is fixedly connected with reel, the left end face secure fit connection of the drawstring other end and closing piece, polisher lapper is set in operating cavity Structure realizes efficiently accurately fine gtinding polishing, greatly improves work efficiency and work quality, meanwhile, it realizes It manually controls protection slide plate oscilaltion slide-open and closes work, reduce production and operating cost, improve semiconductor The safety in utilization of attrition process.
Those skilled in the art can define, can in the case of not departing from overall spirit and the design of the present invention To make the various modifications for above example.It each falls within protection scope of the present invention.The protection scheme of the present invention It is subject to claims appended hereto.

Claims (4)

1. a kind of semi-conducting material production technology equipment, including main body, it is characterised in that：The main body is internally provided with operation Chamber is equipped with first in the main body on the upside of the operating cavity and slides chamber, set in the main body on the right side of the first cunning chamber There is extend downwardly setting second to slide chamber, setting communicated at the top of the second cunning bottom of chamber portion extending end and the operating cavity, It is equipped with the first cavity and the second cavity in part between the first cunning chamber and the second cunning chamber, first cavity is located at On the upside of second cavity, the first cunning intracavitary is slidably connected with the first sliding block, runs through in first sliding block and is equipped with Through slot, is slidably connected with the extended slide guide column in left and right in the through slot, end at left and right sides of the slide guide column It is connect respectively with the left and right sides inner wall secure fit of the first cunning chamber, the slide guide column screw-internal thread fit is connected with downward The adjusting screw rod of setting is stretched, adjusting screw rod bottom extending end is connected with first motor power, first sliding block Bottom end face in be rotatably assorted the internal key shaft of connection, the internal key shaft top end be connected by power has solid described first The second motor in sliding block is rotatably assorted between first cavity and the first cunning chamber and is connected with first rotating shaft, and described the One shaft left distal end, which is installed with, stretches into the described first transmission gear for sliding intracavitary, and first slider top end is fixed useful With the tooth-strip part being connected with the transmission gear power, the first rotating shaft right end, which is installed with, stretches into first sky First cone pulley of intracavitary is rotatably assorted between first cavity and second cavity and is connected with the second shaft, and described second Shaft top end is installed with the second cone pulley for stretching into and being connected in first cavity and with the first cone pulley power, institute It states the second shaft bottom end and is installed with the reel stretched into second cavity, second cavity slides chamber with described second Between part in be equipped with right end and slide the be connected third of setting of chamber with described second and slide chamber, third cunning chamber with it is described It is connected between second cavity equipped with through hole, the second cunning intracavitary is slidably connected with protection slide plate, and the protection is slided Symmetrical above and below in plate left end face to be equipped with lockhole, the third slides intracavitary and is slidably connected with closing piece, on the left of the closing piece The third slides intracavitary and is equipped with top pressure spring, in the through hole transition be connected with the extended drawstring in left and right, it is described Drawstring one end is fixedly connected with the reel, and the drawstring other end is connect with the left end face secure fit of the closing piece, Grinding and polishing mechanism is equipped in the operating cavity.
2. a kind of semi-conducting material production technology equipment according to claim 1, it is characterised in that：The adjusting screw rod top Portion end is rotatably assorted with the through slot inner roof wall and connect, and the first motor outer surface is embedded in the through slot inner bottom wall admittedly It is interior.
3. a kind of semi-conducting material production technology equipment according to claim 1, it is characterised in that：On the right side of the main body The setting that is connected with the second cunning chamber is equipped in end face opens up slot and the inlet slot for the setting that is connected with the operating cavity, Described open up is slidably connected with the extended push and pull bar in left and right in slot, the push and pull bar left distal end is prevented with described The connection of slide plate right end secure fit is protected, the push and pull bar right end is stretched out outside the right end face of the main body.
4. a kind of semi-conducting material production technology equipment according to claim 1, it is characterised in that：The polisher lapper Structure includes that the supporting table of bottom is arranged in the operating cavity and the connection setting that is rotatably assorted is described the in sliding connection In part between one cunning chamber and the operating cavity and third shaft extended up and down, the third shaft top extends end End is installed with the external key axis stretched into the through slot, and third shaft bottom extending end, which is installed with, stretches into the operating cavity Interior grinding and polishing wheel, the supporting table top are installed with lifting platform component, are installed in the lifting platform component top end surface Fastening clips, the operating cavity inner bottom wall is interior to be equipped with dovetail guide groove, and dovetail slide guide is slidably connected in the dovetail guide groove Block, the dovetail slider guide top end are connect with supporting table bottom end face secure fit at left side edge.
CN201810431797.9A 2018-05-08 2018-05-08 A kind of semi-conducting material production technology equipment Withdrawn CN108581820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810431797.9A CN108581820A (en) 2018-05-08 2018-05-08 A kind of semi-conducting material production technology equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810431797.9A CN108581820A (en) 2018-05-08 2018-05-08 A kind of semi-conducting material production technology equipment

Publications (1)

Publication Number Publication Date
CN108581820A true CN108581820A (en) 2018-09-28

Family

ID=63636130

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810431797.9A Withdrawn CN108581820A (en) 2018-05-08 2018-05-08 A kind of semi-conducting material production technology equipment

Country Status (1)

Country Link
CN (1) CN108581820A (en)

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Application publication date: 20180928