CN108574131B - Microwave waveguide component, microwave waveguide air extractor and accelerator - Google Patents

Abstract

The embodiment of the invention provides a microwave waveguide component, a microwave waveguide air extraction device and an accelerator. The microwave waveguide part includes: the microwave separation device is provided with a first waveguide port and is configured to separate microwaves input from the first waveguide port into a first path of microwaves and a second path of microwaves; and a microwave synthesis device provided with a second waveguide port, the microwave synthesis device being configured to synthesize the first path of microwaves and the second path of microwaves into a third path of microwaves, the third path of microwaves being output from the second waveguide port, wherein at least one of the microwave separation device and the microwave synthesis device is provided with a third waveguide port, and the third waveguide port is communicated with the first waveguide port and the second waveguide port in a physical space but isolated from the first waveguide port and the second waveguide port in microwave conduction.

Description

Microwave waveguide component, microwave waveguide air extractor and accelerator

Technical Field

The invention relates to the field of microwave waveguides, in particular to a microwave waveguide component, a microwave waveguide air extraction device and an accelerator.

Background

In the microwave field, a waveguide refers to a transmission line made of a set of material boundaries or members for guiding an electromagnetic wave, or a structure for confining or guiding an electromagnetic wave. Generally, a waveguide refers to a hollow metal waveguide tube of various shapes. The waveguide can be divided into a rectangular waveguide, a circular waveguide and the like according to the shape of the cross section of the waveguide. Although there are many different waveguide forms and new ones are emerging, up to now rectangular waveguides and circular waveguides are the two most dominant waveguide forms in practical applications. However, in the broad definition, the waveguide not only refers to a hollow metal tube, but also includes other waveguide forms such as a ridge waveguide, an elliptical waveguide, a dielectric waveguide, and the like; the device also comprises a double-conductor, a coaxial line, a strip line, a microstrip and mirror line, a single surface wave transmission line and the like.

When the electric field intensity in the waveguide exceeds the breakdown electric field intensity of the medium, the waveguide is broken down to generate a spark phenomenon. The existing high-power microwave system usually plans to strike sparks by two methods, so that the stability of the system is improved. The first is by inflation, and the gas used is SF 6. The other mode is vacuum pumping, and microwave is transmitted in vacuum, which is a common mode in the field of accelerators and has better effect on the simulation of ignition. In the prior art, the evacuation is usually performed by forming an evacuation hole in the waveguide.

Disclosure of Invention

It is an object of the present invention to provide a microwave waveguide component that is capable of providing a microwave isolated waveguide port for evacuation to avoid microwave interference with evacuation.

The invention also provides a microwave waveguide air extraction device and an accelerator comprising the microwave waveguide component.

An embodiment of the present invention provides a microwave waveguide component, including:

the microwave separation device is provided with a first waveguide port and is configured to separate microwaves input from the first waveguide port into a first path of microwaves and a second path of microwaves; and

a microwave synthesis device provided with a second waveguide port, wherein the microwave synthesis device is configured to synthesize the first path of microwave and the second path of microwave into a third path of microwave, the third path of microwave is output from the second waveguide port,

wherein at least one of the microwave separating device and the microwave synthesizing device is provided with a third waveguide port which is communicated with the first waveguide port and the second waveguide port in a physical space but is isolated from the first waveguide port and the second waveguide port in microwave conduction.

In one embodiment, the microwave separation device has a first branch, a second branch and a third branch, the first waveguide port is arranged at the end of the first branch, the first microwave is conducted into the second branch, and the second microwave is conducted into the third branch; and is

The microwave synthesis device is provided with a fourth branch, a fifth branch and a sixth branch, the fourth branch and the fifth branch are respectively butted with a second branch and a third branch of the microwave separation device to form an annular waveguide part, the first path of microwaves are transmitted into the fourth branch from the second branch, the second path of microwaves are transmitted into the fifth branch from the third branch, the second waveguide port is arranged at the tail end of the sixth branch,

at least one of the microwave separation device and the microwave synthesis device is further provided with a seventh branch, and the third waveguide port is arranged at the tail end of the seventh branch.

In an embodiment, the power of the first path of microwaves is equal to the power of the second path of microwaves.

In one embodiment, the microwave separating means comprises a 3dB coupler, a magic T or a power splitter.

In one embodiment, the microwave synthesis means comprises a 3dB coupler, a magic T or a power splitter.

In an embodiment, the microwave waveguide part further comprises a microwave reflector disposed at the third waveguide port and configured to reflect microwaves leaking from the microwave separating device or the microwave combining device to the third waveguide port.

In one embodiment, the microwave reflector comprises:

a first rectangular waveguide located on the microwave outlet side toward the third waveguide port;

a second rectangular waveguide located on a side of the microwave outlet facing away from the third waveguide port; and

one or a plurality of circular waveguides arranged in parallel and connected between the first rectangular waveguide and the second rectangular waveguide,

and a reflecting column is arranged in the second rectangular waveguide and is used for reflecting the microwave.

In one embodiment, the reflective post is located at a middle position of the cross section of the second rectangular waveguide.

In one embodiment, the area occupied by the reflective columns in the cross section of the second rectangular waveguide is less than or equal to one third of the cross-sectional area of the second rectangular waveguide.

In one embodiment, the circular waveguide has a length of at least 10 mm.

In one embodiment, the reflective posts are made of metal.

In one embodiment, the third waveguide port is a pumping port.

In an embodiment, the first waveguide port and the second waveguide port have the same waveguide mode.

The embodiment of the present invention further provides a microwave waveguide air extraction device, including:

a microwave waveguide component as in any one of the embodiments above; and

and the air pump is connected with the third waveguide port and used for vacuumizing the microwave waveguide part.

Embodiments of the present invention also provide an accelerator comprising a microwave waveguide component as described in any of the above embodiments or a microwave waveguide extraction device as described in any of the above embodiments.

The microwave waveguide part according to at least one embodiment of the present invention forms a waveguide port physically communicating with the inside of the microwave waveguide part but isolated from the inside of the microwave waveguide part in microwave conduction by the microwave separating means and the microwave synthesizing means, for pumping the inside of the microwave waveguide part.

Drawings

Fig. 1 schematically illustrates a microwave waveguide component according to an embodiment of the present invention;

fig. 2 schematically illustrates a microwave waveguide component according to another embodiment of the present invention;

FIG. 3 schematically illustrates an exemplary structure of a 3dB coupler;

figure 4 schematically shows an exemplary structure of the magic T;

FIG. 5 schematically illustrates an exemplary configuration of a power splitter;

FIG. 6 schematically illustrates a microwave reflector in a microwave waveguide component according to an embodiment of the present invention;

fig. 7 schematically shows a cross-sectional view of an example of a rectangular waveguide; and

fig. 8 schematically shows a cross-sectional view of an example of a circular waveguide.

Detailed Description

The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings. In the specification, the same or similar reference numerals denote the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention and should not be construed as limiting the invention.

According to the present general inventive concept, there is provided a microwave waveguide part including: the microwave separation device is provided with a first waveguide port and is configured to separate microwaves input from the first waveguide port into a first path of microwaves and a second path of microwaves; and a microwave synthesis device provided with a second waveguide port, the microwave synthesis device being configured to synthesize the first path of microwaves and the second path of microwaves into a third path of microwaves, the third path of microwaves being output from the second waveguide port, wherein at least one of the microwave separation device and the microwave synthesis device is provided with a third waveguide port, and the third waveguide port is communicated with the first waveguide port and the second waveguide port in a physical space but isolated from the first waveguide port and the second waveguide port in microwave conduction.

Furthermore, in the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details.

Fig. 1 schematically illustrates a microwave waveguide component 100 according to an embodiment of the present invention. The microwave waveguide part 100 comprises a microwave separating device 10 provided with a first waveguide port 11 and a microwave combining device 20 provided with a second waveguide port 12. The microwave separation device 10 is configured to separate the microwaves input from the first waveguide port 11 into a first microwave 21 and a second microwave 22 (the microwaves are represented by a plurality of energy spots in fig. 1). The microwave synthesis device 20 is configured to synthesize the first path of microwaves 21 and the second path of microwaves 22 into a third path of microwaves 23, and the third path of microwaves 23 are output from the second waveguide port 12. The microwave synthesizer 20 is provided with a third waveguide port 13, and the third waveguide port 13 is physically communicated with the first waveguide port 11 and the second waveguide port 12 but is isolated from the first waveguide port 11 and the second waveguide port 12 in terms of microwave conduction.

In the example shown in fig. 1, only the microwave combining device 20 is provided with the third waveguide port 13, however, in other embodiments, the third waveguide port 13 may be provided on the microwave separating device 10, or both the microwave separating device 10 and the microwave combining device 20 are provided with the third waveguide port 13, and the number of the third waveguide ports 13 may be one, or may be more.

In the embodiment of the present invention, the third waveguide port 13 is isolated from the first waveguide port 11 and the second waveguide port 12 in terms of microwave conduction, and does not mean that the microwaves output from the first waveguide port 11 are not absolutely leaked from the third waveguide port 13, but means that the amount of the microwaves output from the first waveguide port 11 that can be leaked from the third waveguide port 13 is very small, for example, only the microwaves output from the first waveguide port 11 can be leaked from the third waveguide port 13 at a ratio of not more than 1%, 0.1%, 0.01%, 0.001%, or 0.0001%.

In the embodiment of the present invention, the third waveguide port 13 may be used as a pumping port, and may be used, for example, to evacuate the microwave waveguide part 100. The third waveguide port 13 is in communication with the first waveguide port 11 and the second waveguide port 12 in physical space, which ensures that the gas in the microwave waveguide member 100 can be pumped away from the third waveguide port 13, and the third waveguide port 13 is isolated from the first waveguide port 11 and the second waveguide port 12 in microwave conduction, which can prevent the influence of the pumping by the third waveguide port 13 on the microwave transmission in the microwave waveguide member 100. By adopting the structure, complex structures such as an additional early current structure and the like for blocking stronger microwaves can be avoided.

In one example, microwave separating device 10 may have a first leg 31, a second leg 32, and a third leg 33. The first waveguide port 11 is disposed at the end of the first branch 31, the first path of microwaves 21 is conducted to the second branch 32, and the second path of microwaves 22 is conducted to the third branch 33. The microwave synthesis apparatus 20 may have a fourth branch 34, a fifth branch 35, and a sixth branch 36. The fourth branch 34 and the fifth branch 35 are respectively butted with the second branch 32 and the third branch 33 of the microwave separation device 10 to form an annular waveguide portion 40, the first path of microwaves 21 are conducted from the second branch 32 to the fourth branch 34, the second path of microwaves 22 are conducted from the third branch 33 to the fifth branch 35, and the second waveguide port 12 is arranged at the end of the sixth branch 36. At least one of the microwave separating device 10 and the microwave synthesizing device 20 is further provided with a seventh branch 37, and the third waveguide port 13 is disposed at an end of the seventh branch 37.

With the structure of the above example, on the one hand, it is easy to realize that the microwaves entering from the first waveguide port 11 are output from the second waveguide port 12 in substantially the same mode while maintaining the original microwave conduction mode, and on the other hand, the microwave waveguide member 100 can be easily evacuated. Thus, the microwave waveguide component 100 may be conveniently embedded in any of the waveguide structures to evacuate these waveguide structures and prevent sparking.

As an example, the power of the first path of microwaves 21 may be equal to the power of the second path of microwaves 22. This is advantageous in reducing the peak power of the microwaves in the microwave waveguide part 100. However, the embodiment of the present invention is not limited to this, for example, the power of the first path of microwaves 21 may not be equal to the power of the second path of microwaves 22, such as the power of one of the first path of microwaves 21 and the second path of microwaves 22 may account for 40% of the total power and the power of the other one accounts for 60% of the total power, or the power of one of the first path of microwaves 21 and the second path of microwaves 22 may account for 30% of the total power and the power of the other one accounts for 70% of the total power, and so on.

Fig. 2 shows a microwave waveguide component 100' according to another embodiment of the present invention. The microwave waveguide part 100' is structurally different from the microwave waveguide part 100 shown in fig. 1 mainly in that the microwave separating means 10 and the microwave combining means 20 are each provided with a third waveguide port 13. The plurality of spots in fig. 1 and 2 are energy spots for illustrating the transmission of microwaves in the microwave waveguide part 100, 100 ', and do not illustrate the shape of the microwave waveguide part 100, 100'.

Fig. 3 shows a schematic diagram of an example of a 3dB coupler. The 3dB coupler is a directional coupler commonly used in the microwave field, and is a four-port element with directional transmission characteristics. In the example of fig. 3, the 3dB coupler has four ports, wherein the first port 41 is a microwave input port, and it can be derived from the principle of the 3dB coupler that the second port 42 has no microwave output, the third port 43 and the fourth port 44 respectively output microwaves, and the power of the microwaves output from the third port 43 and the fourth port 44 is approximately half of the power of the microwaves input from the first port 41. In this way, the 3dB coupler can be used as a microwave splitting device. When microwaves are input from the third port 43 and the fourth port 44, microwaves can be output from the first port 41, and the output microwave power is the sum of the power of the microwaves input from the third port 43 and the microwaves input from the fourth port 44. In this way, the 3dB coupler can be used again as a microwave synthesis device.

Figure 4 shows a schematic view of an example of a magic T. Magic tees are a type of waveguide commonly used in the microwave field and are typically comprised of transmission line transformers. In the example of fig. 4, the magic T has four ports, wherein the first port 51 is a microwave input port, and it can be derived from the principle of the magic T that the second port 52 has no microwave output, the third port 53 and the fourth port 54 respectively output microwaves, and the power of the microwaves output from the third port 53 and the fourth port 54 is approximately half of the power of the microwaves input from the first port 51. In this way, the magic T may be used as a microwave separating device. When microwaves are input from the third port 53 and the fourth port 54, microwaves can be output from the first port 51, and the output microwave power is the sum of the power of the microwaves input from the third port 53 and the microwaves input from the fourth port 54. In this way, the magic T can be used again as a microwave synthesis apparatus.

Fig. 5 shows a schematic diagram of an example of a power splitter. Power splitters are also a type of waveguide commonly used in the microwave field. In the example of fig. 5, the power divider has three ports, wherein the first port 61 is a microwave input port, and according to the principle of the power divider, it can be derived that the second port 62 and the third port 63 output microwaves respectively, and the power of the microwaves output by the second port 62 and the third port 63 is approximately half of the power of the microwaves input from the first port 61. In this way, the power splitter can be used as a microwave separation device. And when microwaves are input from the second port 62 and the third port 63, microwaves can be output from the first port 61, and the power of the output microwaves is the sum of the power of the microwaves input from the third port 63 and the microwaves input from the second port 62. In this way, the power divider can be used again as a microwave synthesis device.

Since the 3dB coupler, the magic T and the power divider are all waveguide devices commonly used in the microwave field, detailed descriptions of their specific structures and operation principles are omitted here.

As an example, the microwave separating means 10 may comprise, for example, a 3dB coupler, a magic T or a power splitter. Also, as an example, the microwave synthesis apparatus 20 may include a 3dB coupler, a magic T, or a power divider. As in the example shown in fig. 1, the microwave separating means 10 is formed by a power divider, while the microwave combining means 20 is formed by a 3dB coupler. Whereas in the example shown in fig. 2, the microwave separating means 10 and the microwave synthesizing means 20 are each formed by a 3dB coupler. However, the embodiment of the present invention is not limited thereto, and the microwave separating device 10 may be constructed of any other structure known in the art for microwave separation, and the microwave synthesizing device 20 may be constructed of any other structure known in the art for microwave synthesis, as long as a third waveguide port that is physically connected in space but separated in microwave conduction can be provided. In the embodiment of the present invention, the 3dB coupler, magic T, or power divider used to constitute the microwave separating device 10 and/or the microwave synthesizing device 20 is not limited to the exemplary structure shown in fig. 3 to 5, and other forms of known 3dB couplers, magic ts, or power dividers may be adopted as long as they can satisfy the respective microwave separating and microwave synthesizing functions.

In an example, the microwave waveguide part 100, 100' may further include a microwave reflector 50, where the microwave reflector 50 is disposed at the third waveguide port 13 and configured to reflect the microwave leaked from the microwave separating device 10 or the microwave combining device 20 to the third waveguide port 13.

As described above, although the third waveguide port 13 is isolated from the first waveguide port 11 and the second waveguide port 12 in terms of microwave conduction, there may be a very small amount of microwaves that can leak from the third waveguide port 13. In order to further suppress the amount of microwaves leaking out of the third waveguide port 13, the microwave reflector 50 may be provided at the third waveguide port 13 (or in the seventh branch 37). As an example, the microwave reflector 50 may reduce the amount of microwaves leaking from the third waveguide port 13 by a factor of two, even by a factor of ten or a factor of hundred.

In one example, as shown in fig. 6, the microwave reflector 50 may include: a first rectangular waveguide 51 located on the microwave exit side toward the third waveguide port 13 (see fig. 1 or fig. 2); a second rectangular waveguide 52 located on the microwave exit side facing away from the third waveguide port 13; and one or a plurality of circular waveguides 53 arranged in parallel connected between the first rectangular waveguide 51 and the second rectangular waveguide 52. A reflective column 54 is provided in the second rectangular waveguide 52 for reflecting the microwave. At least a portion (e.g., a majority) of the microwaves incident from the second rectangular waveguide 52 may be reflected by the reflective posts 54 back to the microwave separation device 10 or the microwave synthesis device 20. And if there is still a residual amount of microwaves that are not reflected back by the reflecting pillar 54, they can be further attenuated by the circular waveguide 53, so that the amount of microwaves that reach the first rectangular waveguide 51 is extremely minute. Thus, the amount of microwaves leaking from the third waveguide port 13 can be further suppressed, and system instability due to the leaked amount of microwaves can be avoided. This is particularly beneficial for high power microwave systems (e.g., X-band).

In one example, the reflective post 54 may be located at a middle position of the cross-section of the second rectangular waveguide 52. This can improve the reflection effect of the reflection columns 54 on the microwaves. Of course, embodiments of the present invention are not limited thereto, and for example, the reflective posts 54 may be located at a non-intermediate position (e.g., biased to one side) of the cross-section of the second rectangular waveguide 52.

In one example, the reflective posts 54 occupy less than or equal to one third of the cross-sectional area of the second rectangular waveguide 52 in the cross-section of the second rectangular waveguide 52. This can compromise the reflection effect and the air extraction effect. Embodiments of the present invention are not limited thereto and the area of the reflective columns 54 may be selected as desired. The larger the area occupied by the reflection columns 54 is, the better the reflection effect on the microwave is, but the sectional area for air extraction may be reduced, whereas the smaller the area occupied by the reflection columns 54 is, the worse the reflection effect on the microwave is, but the larger the sectional area for air extraction is, which contributes to the improvement of the air extraction effect.

By way of example, the circular waveguide 53 has a length of at least 10mm, for example about 15 mm. The circular waveguide 53 has such a length that the coupling action between the first rectangular waveguide 51 and the second rectangular waveguide 52 can be suppressed, thereby improving the attenuation effect of the circular waveguide 53 on microwaves.

By way of example, the reflective posts 54 may be made of a metal (e.g., copper, iron, aluminum, etc.). The reflecting column 54 may have various shapes such as a cylinder, a prism, a cone, a truncated cone, a pyramid, and a truncated pyramid, as long as it can reflect microwaves.

By way of example, the first waveguide port 11 and the second waveguide port 12 may have the same waveguide mode, such as various TE or TM modes known in the art, and the like. This enables the microwave waveguide part 100, 100' to be embedded in any waveguide device without changing the original microwave conduction mode.

As an example, the third waveguide port 13 may be a pumping port.

Embodiments of the present invention further provide a microwave waveguide gas extraction apparatus, which includes the microwave waveguide assembly 100, 100 'according to any of the above embodiments, and a gas pump 60 (schematically shown in fig. 1), wherein the gas pump 60 is connected to the third waveguide port 13, and is used for evacuating the microwave waveguide assembly 100, 100'.

Embodiments of the present invention also provide an accelerator comprising a microwave waveguide component 100, 100' as described in any of the above embodiments or a microwave waveguide gas extraction device as described in any of the above embodiments. By means of the above-described microwave waveguide part 100, 100' or microwave waveguide pumping device, the waveguide in the accelerator can maintain a good vacuum state while suppressing a problem of sparking in the microwave system.

It should be noted that, in order to show the structure of the waveguide more clearly, the tube wall of the waveguide is not shown in fig. 1 to 6, but only the cavity in the waveguide is shown. While the shape of the cavity enclosed by the walls of the waveguide is actually shown in fig. 1 to 6. As will be appreciated by those skilled in the microwave art. While the actual waveguide section is of tubular wall cross-sectional shape as shown in fig. 7 and 8 for rectangular and circular waveguides. In fig. 7, a cavity 71 of a rectangular waveguide for microwave transmission is surrounded by a waveguide wall 72. In fig. 8, a cavity 81 of a circular waveguide for microwave transmission is surrounded by a waveguide wall 82. It will be appreciated by those skilled in the art that the outer shape of the waveguide of the microwave waveguide part and other waveguide devices described in the embodiments of the present invention may be arbitrary, and only the cavity defined by the waveguide walls of the microwave waveguide part may have the above-described structure.

The embodiment of the invention utilizes the waveguide port for inhibiting the transmission of the microwave to perform vacuum air extraction, and does not simply perform air extraction by punching a hole on the wall of the waveguide pipe, thereby preventing the problem of unstable system caused by the leakage of a large amount of microwave from the air extraction hole.

Embodiments of the present invention may be used in microwave systems of various wavelength bands, such as S-band, X-band, etc., and are particularly effective in high power and high frequency band microwave systems. The dimensions of the components in embodiments of the invention, particularly the dimensions of the waveguide cross-section, may be determined by the frequency of the microwaves and the mode of transmission of the microwaves employed. For example, for certain X-band microwaves, the first and second waveguide ports may have cross-sections that are 22.86mm and 10.16mm long and wide. However, this is merely exemplary, and one skilled in the art, after reading the disclosure of the present application, may choose to set the dimensions of the components in embodiments of the present invention based on the frequency of the microwaves and the mode of transmission of the microwaves used.

The different embodiments of the present application described above can be combined into new embodiments without technical conflicts, which still fall within the scope of the present invention.

Although the present invention has been described in connection with the accompanying drawings, the embodiments disclosed in the drawings are intended to be illustrative of preferred embodiments of the present invention and should not be construed as limiting the invention. The dimensional proportions in the figures are merely schematic and are not to be understood as limiting the invention.

Although a few embodiments of the present general inventive concept have been shown and described, it would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the general inventive concept, the scope of which is defined in the claims and their equivalents.

Claims (14)

1. A microwave waveguide component comprising:

the microwave separation device is provided with a first waveguide port and is configured to separate microwaves input from the first waveguide port into a first path of microwaves and a second path of microwaves; and

a microwave synthesis device provided with a second waveguide port, wherein the microwave synthesis device is configured to synthesize the first path of microwave and the second path of microwave into a third path of microwave, the third path of microwave is output from the second waveguide port,

at least one of the microwave separation device and the microwave synthesis device is provided with a third waveguide port, the third waveguide port is communicated with the first waveguide port and the second waveguide port in a physical space but is isolated from the first waveguide port and the second waveguide port in microwave conduction, and the third waveguide port is an air pumping port.

2. The microwave waveguide component according to claim 1, wherein the microwave separating means has a first branch, a second branch and a third branch, the first waveguide port is disposed at a terminal end of the first branch, the first branch is for microwave propagation into the second branch, and the second branch is for microwave propagation into the third branch; and is

The microwave synthesis device is provided with a fourth branch, a fifth branch and a sixth branch, the fourth branch and the fifth branch are respectively butted with a second branch and a third branch of the microwave separation device to form an annular waveguide part, the first path of microwaves are transmitted into the fourth branch from the second branch, the second path of microwaves are transmitted into the fifth branch from the third branch, the second waveguide port is arranged at the tail end of the sixth branch,

at least one of the microwave separation device and the microwave synthesis device is further provided with a seventh branch, and the third waveguide port is arranged at the tail end of the seventh branch.

3. The microwave waveguide component of claim 1, wherein the power of the first path of microwaves is equal to the power of the second path of microwaves.

4. The microwave waveguide component according to claim 1, wherein the microwave splitting means comprises a 3dB coupler, a magic T, or a power splitter.

5. The microwave waveguide component according to claim 1, wherein the microwave synthesis apparatus comprises a 3dB coupler, a magic T, or a power splitter.

6. The microwave waveguide component according to any one of claims 1 to 5, further comprising a microwave reflector disposed at the third waveguide port configured to reflect microwaves leaking from the microwave separating device or the microwave combining device toward the third waveguide port.

7. The microwave waveguide component according to claim 6, wherein the microwave reflector comprises:

a first rectangular waveguide located on the microwave outlet side toward the third waveguide port;

a second rectangular waveguide located on a side of the microwave outlet facing away from the third waveguide port; and

one or a plurality of circular waveguides arranged in parallel and connected between the first rectangular waveguide and the second rectangular waveguide,

and a reflecting column is arranged in the second rectangular waveguide and is used for reflecting the microwave.

8. The microwave waveguide component according to claim 7, wherein the reflective cylinder is located at a middle position of a cross section of the second rectangular waveguide.

9. The microwave waveguide component according to claim 7, wherein the reflective columns occupy less than or equal to one third of the cross-sectional area of the second rectangular waveguide in its cross-section.

10. The microwave waveguide component according to claim 7, wherein the length of the circular waveguide is at least 10 mm.

11. The microwave waveguide component according to claim 7, wherein the reflective posts are made of metal.

12. A microwave waveguide component according to any one of claims 1-5, wherein the first and second waveguide ports have the same waveguide mode.

13. A microwave waveguide pumping arrangement comprising:

a microwave waveguide component according to any one of claims 1-12; and

and the air pump is connected with the third waveguide port and used for vacuumizing the microwave waveguide part.

14. An accelerator comprising a microwave waveguide component according to any one of claims 1 to 12 or a microwave waveguide pumping arrangement according to claim 13.

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