CN108571936A - Displacement measuring device - Google Patents
Displacement measuring device Download PDFInfo
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- CN108571936A CN108571936A CN201711360394.1A CN201711360394A CN108571936A CN 108571936 A CN108571936 A CN 108571936A CN 201711360394 A CN201711360394 A CN 201711360394A CN 108571936 A CN108571936 A CN 108571936A
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- Prior art keywords
- sensor head
- light
- predetermined distance
- light projection
- distance
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Abstract
The present invention provides a kind of displacement measuring device, to allow user to easily identify the measuring state of the displacement measuring device including the sensor head without electronic circuit.Displacement measuring device (1) includes：Sensor head (30) has optical system and does not have electronic circuit；Controller (100)；Irradiation light from light projection unit (10) is transferred to sensor head (30) by the 1st fiber optics；And the 2nd fiber optics, the reflected light from sensor head (30) is transferred to controller (100).Control unit (50) has：1st pattern measures the distance between sensor head (30) and reflection position；And the 2nd pattern, indicate whether the distance between sensor head (30) and reflection position are in the central portion of predetermined distance range by the light projection state of light projection unit (10).
Description
Technical field
The present invention is to be related to a kind of displacement measuring device.In particular, the present invention is to be related to a kind of including not having electronic circuit
Sensor head displacement measuring device.
Background technology
The device checked as the surface shape etc. to measurement object object, it is known to which (displacement passes displacement measuring device
Sensor).For example, Japanese Patent Laid-Open 2012-208102 bulletins (patent document 1) are disclosed using confocal optical system come with non-
The mode of contact measures the confocal measuring apparatus of the displacement of measurement object object.
[existing technical literature]
[patent document]
[patent document 1] Japanese Patent Laid-Open 2012-208102 bulletins
Invention content
[problem to be solved by the invention]
In Japanese Patent Laid-Open 2012-208102 bulletins (patent document 1) in recorded confocal measuring apparatus, pass
Sensor head does not have electronic circuit and sensor head is detached with controller.In order to grasp the measuring state of displacement measuring device, position
User near sensor head needs to confirm the display of controller.
For example, when sensor head is arranged, in order to correctly be measured, the position of adjustment setting sensor head is needed.
The measurable range of displacement measuring device is represented by the range of the distance before self-inductance measurement device head.In general, manufactory
The range is defined as to the specification of displacement measuring device.It, will be as the measurable distance of displacement measuring device in this specification
Range and prespecified range are known as " predetermined distance range ".
On the basis of the position for placing workpiece, the installation position of sensor head is adjusted, so that the position of the workpiece enters rule
Within the scope of set a distance.When user is located near sensor head, there is following possibility：It is difficult to by from controller to user's
Distance or user confirm the display of controller relative to the position of controller.
It is easily identified including the sensor head without electronic circuit to user the purpose of the present invention is to provide a kind of
Displacement measuring device measuring state technology.
[technical means to solve problem]
The displacement measuring device of certain situation according to the present invention includes：Sensor head has optical system and without electricity
Sub-circuit；Controller；Irradiation light from light projection unit is transferred to sensor head by the 1st fiber optics；And the 2nd fiber optics, it will
Reflected light from sensor head is transferred to controller, and the controller has：Light projection unit generates irradiation light；Light receiver,
Receive the reflected light of the irradiation light received by sensor head；And control unit, it is passed based on the light acceptance amount of light receiver to calculate
The distance between the reflection position of sensor head and reflected light.Control unit has：1st pattern, to sensor head and reflection position it
Between distance measure；And the 2nd pattern, by the light projection state of light projection unit come indicate sensor head and reflection position it
Between distance whether be in predetermined distance range central portion.Predetermined distance range be defined as displacement measuring device it is measurable away from
From range.The central portion of predetermined distance range is defined as the set distance of the immediate vicinity of predetermined distance range.1st optical fiber
Dimension can be identical with the 2nd fiber optics.
According to the composition, it is possible to provide a kind of achievable user easily identifies the distance between sensor head and reflection position
Whether the displacement measuring device of the central portion of predetermined distance range is in.In the 2nd pattern, user can be by penetrating from sensor head
The light gone out confirms the measuring state of displacement measuring device.
Preferably：In the 2nd pattern, control unit judges whether the distance between sensor head and reflection position enter regulation
In the central portion of distance range, and the judging result is indicated by the light projection state of light projection unit.
Pass through the composition, it is possible to provide a kind of usable family easily identifies the displacement measurement of the central portion of predetermined distance range
Device.In the 2nd pattern, user can by the light projected from sensor head come confirm between sensor head and reflection position away from
From in the central portion for predetermined distance range.
Preferably：In the 2nd pattern, the center of predetermined distance range is in the distance from sensor head to reflection position
When in portion, control unit makes the continuous lighting of light projection unit.In the 2nd pattern, it is in the distance from sensor head to reflection position
The outside of the central portion of predetermined distance range and when within the scope of predetermined distance, control unit makes light projection unit flicker.
According to the composition, user can continuously project light to confirm sensor head and reflection position by confirmation from sensor head
It the distance between sets in the central portion for predetermined distance range.
Preferably：The model in the outside of the central portion of predetermined distance range is in the distance from sensor head to reflection position
In the case of in enclosing, the outside of the central portion of predetermined distance range is in the distance from sensor head to reflection position and to advise
When in the set distance range within the scope of set a distance, control unit makes light projection unit with the 1st interval flashing, from sensor head extremely
The distance of the reflection position outside of the central portion in predetermined distance range and set distance range within the scope of predetermined distance
When outer, control unit makes light projection unit with the 2nd interval flashing more than the 1st interval.
According to the composition, user can by the interval of the flicker of the light projected from sensor head come confirm sensor head with
The central portion of the distance between reflection position from predetermined distance range is separate how many.
Preferably：It is in the outside of the central portion of predetermined distance range in the distance from sensor head to reflection position and is
In the case of within the scope of predetermined distance, control unit is in the distance and predetermined distance range from sensor head to reflection position
Difference between the upper limit or lower limit in centre portion becomes larger and increases the interval of the flicker of light projection unit.
According to the composition, user can by the interval of the flicker of the light projected from sensor head come confirm sensor head with
The central portion of the distance between reflection position from predetermined distance range is separate how many.
Preferably：Situation in the central portion that the distance from sensor head to reflection position is in predetermined distance range
Under, control unit controls light projection unit, so that the light projection power of light projection unit becomes certain value.From sensor head to reflecting position
The distance set is in the outside of the central portion of predetermined distance range and in the case of in predetermined distance, control unit control light
Projection unit, so that the crest value of the light projection power of light projection unit is in regulation higher than the distance from sensor head to reflection position
The output of light projection unit when in the central portion of distance range.
According to the composition, the central portion in predetermined distance range at a distance from sensor head is between reflection position
Outside and when within the scope of predetermined distance, displacement measuring device can make the optical flare projected from sensor head simultaneously measurement sensor head
The distance between reflection position.
[The effect of invention]
According to the present invention, it is possible to provide a kind of achievable user, which easily identifies the distance between sensor head and reflection position, is
The displacement measuring device of the no central portion in predetermined distance range.
Description of the drawings
Fig. 1 is the figure of the principle of the range measurement for the displacement measuring device for illustrating embodiments of the present invention.
Fig. 2 (A), Fig. 2 (B) are showing for the composition for the light guide section for illustrating the displacement measuring device according to present embodiment
It is intended to.
Fig. 3 is the schematic diagram of an example for the composition for indicating the displacement measuring device according to present embodiment.
Fig. 4 is the figure for the light projection state for illustrating the sensor head in usual measurement pattern (the 1st pattern).
Fig. 5 is the light projection shape for illustrating the sensor head in predetermined distance range center affirmation mode (the 2nd pattern)
The figure of state.
Fig. 6 is the signal waveforms for the control for illustrating the light projection unit in usual measurement pattern (the 1st pattern).
Fig. 7 is the letter for the control for illustrating the light projection unit in predetermined distance range center affirmation mode (the 2nd pattern)
Number oscillogram.
Fig. 8 is the flow chart for illustrating the control unit control light projection using controller.
Fig. 9 is the light projection shape for illustrating the sensor head in predetermined distance range center affirmation mode (the 2nd pattern)
The figure of another embodiment of state.
[explanation of symbol]
1：Displacement measuring device
2：Measurement object object
3：Position (reflection position)
10：Light projection unit
20：Light guide section
21：Input side cable
22：Outlet side cable
23：Coupler
24：Rostral cable
30：Sensor head
32：Aberration unit
34：Object lens
40：Light receiver
41：Collimation lens
42：Optical splitter
43：Reduce optical system
44：Detector
45：Reading circuit
50：Control unit
60：Display unit
100：Controller
202：Core
204：Covering
206：Coat material
208：Exterior material
241、243、245：Cable
242、244：Connector
AX：Optical axis
D1：The central portion of predetermined distance range
D2：Predetermined distance range
D3：Set distance range within the scope of predetermined distance
S1~S8：Step
d：Distance
λ1、λ2、λ3：Wavelength
Specific implementation mode
With reference to diagram, detailed description of embodiments of the present invention.Furthermore to the same or comparable part in figure
Mark same symbol does not repeat its explanation.
<A. summary>
Fig. 1 is the figure of the principle of the range measurement for the displacement measuring device for illustrating embodiments of the present invention.Reference
Fig. 1, displacement measuring device 1 include light guide section 20, sensor head 30 and controller 100.In embodiments of the present invention, displacement is surveyed
It includes having optical system to measure device 1, does not on the other hand have the sensor head 30 of electronic circuit.Embodiment party described below
In formula, as an example of such sensor head, the sensor head 30 for including confocal optical system is shown.It is passed however, not limiting
The type of optical system contained in sensor head 30.
Sensor head 30 includes aberration unit 32 and object lens 34.Controller 100 include light projection unit 10, light receiver 40,
Control unit 50 and display unit 60.Light receiver 40 includes optical splitter 42 and detector 44.
The irradiation light with set wavelength spread generated by light projection unit 10 is transmitted in light guide section 20 and is passed to reaching
Sensor head 30.In sensor head 30, the irradiation light from light projection unit 10 is focused by object lens 34 by exposes to measurement pair
As object 2.About irradiation light, because of the coke of the irradiation light by generating aberration on axis due to aberration unit 32, therefore from the irradiation of object lens 34
Point position is different for each wavelength.In wavelength by the surface reflection of measurement object object 2, only with 2 focus of measurement object object
The light of consistent wavelength, which reenters to be incident upon in the light guide section 20 of sensor head 30, becomes confocal fiber.
It reenters and is incident upon the reflected light of sensor head 30 and is transmitted in light guide section 20 and be incident to light receiver 40.Light receiver 40
In, incident reflected light is separated into each wavelength components by optical splitter 42, and each wavelength is detected by detector 44
The intensity of ingredient.Control unit 50 based on the testing result of detector 44 come calculate from sensor head 30 to measurement object object 2 away from
From (displacement).
In example shown in FIG. 1, for example, the irradiation light comprising multi-wavelength λ 1, wavelength X 2, wavelength X 3 is projected to optical axis AX
Extended line on.Each different position (focal position 1, focus position by the wavelength dispersion of irradiation light on optical axis AX
Set 2, focal position 3) describe picture.On optical axis AX, the surface of measurement object object 2 is consistent with focal position 2, therefore irradiation light
In, only the ingredient of wavelength X 2 is reflected in focal position 2.That is, focal position 2 is corresponding with the reflection position of irradiation light.Light receiver
The ingredient of 40 Detection wavelength λ 2.It is to be equivalent to wavelength X 2 that control unit 50, which is calculated from sensor head 30 to the distance of measurement object object 2,
Focal position distance.Display unit 60 shows the distance calculated by control unit 50 by numerical value.
In the multiple light receiving elements for constituting the detector 44 of light receiver 40, receive the light receiving element of reflected light according to
The shape on the surface of the measurement object object 2 relative to sensor head 30 and change.It therefore, can be according to the multiple of detector 44
The testing result (Pixel Information) of light receiving element measures the distance change (displacement) relative to measurement object object 2.As a result, may be used
The shape on the surface of measurement object object 2 is measured by displacement measuring device 1.
The structure of the light guide section 20 of the displacement measuring device 1 according to present embodiment is schematically shown in Fig. 2 (A), Fig. 2 (B)
At.As shown in Fig. 2 (A), light guide section 20 may include the optical input side cable for being connected to light projection unit 10, optical be connected to
The outlet side cable 22 of light receiver 40 and rostral cable 24 with 30 optical connection of sensor head.Input side cable 21 and defeated
Go out the end of 22 respective end of side cable and rostral cable 24 via the coupler 23 with multiplex/splitter structure optical knot
It closes.Coupler 23 is 2 × 1 star-type couplers (2 output of/1 input of 2 input, 1 output) for being equivalent to Y-branch coupler, will be from defeated
Enter the incident light of side cable 21 and be transferred to rostral cable 24, and is transferred to dividing from the incident light of rostral cable 24 respectively
Input side cable 21 and outlet side cable 22.
Input side cable 21, outlet side cable 22 and rostral cable 24 can be the fiber optics with single core 202.
Fiber optics has core 202, covering 204, cladding material 206 and exterior material 208.As shown in Fig. 2 (B), can also it be adopted in light guide section 20
With the fiber optics with multiple cores.Coupler 231,232 respectively will be transferred to rostral cable from the incident light of input side cable 21
24, and it is transferred to input side cable 21 and outlet side cable 22 respectively by dividing from the incident light of rostral cable 24.
<B. device is constituted>
Fig. 3 is the schematic diagram of an example for the composition for indicating the displacement measuring device 1 according to present embodiment.With reference to Fig. 3, light
Projection unit 10 generates the irradiation light with multi-wavelength's ingredient.For typical case, light projection unit 10 includes white light-emitting diode
(Light Emitting Diode, LED).As long as about the displacement width of the focal position generated due to aberration on axis, can produce
The raw irradiation light with the wave-length coverage for making up required measured zone as far as possible then can use arbitrary light in light projection unit 10
Source.
Light receiver 40 includes：The reflected light received by sensor head 30 is separated into each wavelength components by optical splitter 42；
And detector 44, there are multiple light receiving elements that are corresponding with the light splitting direction of optical splitter 42 and configuring.As optical splitter 42, allusion quotation
For type, using diffraction grating, in addition to this, arbitrary device can also be used.Point with optical splitter 42 can be used in detector 44
The corresponding and one-dimensional line sensor (one-dimensional sensor) configured with multiple light receiving elements of light direction, it is possible to use in detection faces
Two-dimensional arrangement has the imaging sensor (dimension sensor) of multiple light receiving elements.
Other than including optical splitter 42 and detector 44, may also comprise makes to project from outlet side cable 22 light receiver 40
Reflected light parallelization collimation lens 41 and exporting the testing result of detector 44 to the reading circuit of control unit 50
45.Optionally, light receiver 40, which may also set up, carries out the spot diameter of the different reflected light of wavelength detached through optical splitter 42
The diminution optical system 43 of adjustment.
The respective detected values of multiple light receiving elements of the control unit 50 based on light receiver 40 is calculated from sensor head
30 to measurement object object 2 distance.The relational expression between pixel and wavelength and distance value is preset (for example, in product shipment
When be not stored in the inside of control unit 50 volatibility).Therefore, control unit 50 can be exported according to light receiver 40 by light wave
Shape (Pixel Information) calculates displacement.
It shows to improve availability (usability) and be connected in series with more cables to constitute rostral cable in Fig. 3
Example.That is, as rostral cable, using three cables 241, cable 243, cable 245.Between cable 241 and cable 243 via
Connector 242 and optical connection, the optical connection via connector 244 between cable 243 and cable 245.Certainly, it couples
Device 23 also can the optical connection via a cable with sensor head 30.
Light guide section 20 includes to by the conjunction of input side cable 21 and outlet side cable 22 and the optical combination of rostral cable
Wave/partial wave portion (coupler) 23.About the function in multiplex/partial wave portion 23, it is illustrated with reference to Fig. 2 (A), Fig. 2 (B), because
This does not repeat to be described in detail.In the displacement measuring device 1 of foundation present embodiment, using coupler as multiplex/partial wave
Structure.The light in light guide section 20 can be detached as a result, and can be received respectively in multiple cores using single detector 44
The reflected light (measuring light) from measurement object object 2 of middle transmission.
In embodiments of the present invention, there are two control models for the tool of displacement measuring device 1.1st pattern is to be passed to measure
The pattern of the distance between sensor head 30 and reflection position.2nd pattern is to confirm between sensor head 30 and reflection position
Distance whether in predetermined distance range central portion pattern.Hereinafter, the 1st pattern is known as " usual measurement pattern ", it will
2nd pattern is known as " predetermined distance range center affirmation mode ".
<C. pattern>
Fig. 4 is the figure for the light projection state for illustrating the sensor head 30 in usual measurement pattern (the 1st pattern).Reference
Fig. 4, position 3 are the position of the light connection focus of certain wavelength contained in the irradiation light that projects from sensor head 30, such as quite
In the position that should place workpiece.
Relative distances of the distance d between sensor head 30 and position 3.In the following description, it is set as：Position 3 is fixed, and is led to
Crossing makes sensor head 30 be moved along the optical axis direction of sensor head 30 and distance d is made to change.Certainly, it can also be set as：Sensing
The position of device head 30 is fixed, and so that distance d is changed by so that position 3 is moved along the optical axis direction of sensor head 30.In Fig. 4
In, D2 provides that predetermined distance range, D1 provide the central portion of predetermined distance range D2.Central portion D1 is as predetermined distance range
Adopted range depending on both set a distances of the immediate vicinity of D2.
In usual measurement pattern, no matter whether distance d is in the central portion D1 of predetermined distance range D2, sensor head 30
Light projection is carried out when often.That is, continuously projecting light from sensor head 30.
Fig. 5 is the light projection for illustrating the sensor head 30 in predetermined distance range center affirmation mode (the 2nd pattern)
The figure of state.With reference to Fig. 5, when in the central portion D1 that distance d is in predetermined distance range D2, projected when normal from sensor head 30
Light.That is, carrying out common light projection.On the other hand, it is in the outside of the central portion D1 of predetermined distance range D2 in distance d and is
When in predetermined distance range D2, passage of scintillation light (flicker light projection) is projected from sensor head 30.That is, predetermined distance range center confirms
In pattern, it is in the central portion D1 of predetermined distance range D2 according to distance d or distance d is in predetermined distance range D2
Except centre portion D1 and in predetermined distance range D2, and the embodiment of light projection is different.
Fig. 6 is the signal waveforms for the control for illustrating the light projection unit in usual measurement pattern (the 1st pattern).Reference
Fig. 1 and Fig. 6, in usual measurement pattern, control unit 50 makes 10 continuous lighting of light projection unit.In usual measurement pattern, light projection unit
10 Chang Shiwei connect (ON) state.
Fig. 7 is the letter for the control for illustrating the light projection unit in predetermined distance range center affirmation mode (the 2nd pattern)
Number oscillogram.It is same with usual measurement pattern when referring to Fig.1 and Fig. 7, in the central portion D1 that distance d is predetermined distance range D2
Sample, control unit 50 makes 10 continuous lighting of light projection unit.On the other hand, the central portion of predetermined distance range D2 is in distance d
The outside of D1 and when in predetermined distance range D2, control unit 50 makes light projection unit 10 flicker.Therefore, control unit 50 repeats to send out
Switched on and off (OFF) is carried out to make the control signal of 10 lighting of light projection unit.
Furthermore for usual measurement pattern and predetermined distance range center affirmation mode it is any in the case of, usual
When light projection, control unit 50 remains the light projection power of light projection unit 10 (output of light projection unit 10) substantially certain.
On the other hand, when light projection unit 10 being made to flicker in the affirmation mode of predetermined distance range center, control unit 50 controls light projection unit
10, so that the output of the light projection unit 10 when the crest value of the output of light projection unit 10 is higher than normal when light projection.That is, in passage of scintillation light
When projection, when usual light projection compared with, control unit 50 makes the turn-on level (ON level) of control signal get higher.Exist as a result,
When light projection unit 10 flickers, it is possible to increase the light acceptance amount of 100 side of controller, therefore in light receiver 40, be easy to obtain by light wave
Shape.Therefore, when being in the outside of the central portion D1 of predetermined distance range D2 in distance d and being in predetermined distance range D2, also may be used
Measure distance d.
The pulse spacing of light projection is determining as follows：User can recognize that flicker state and displacement measuring device 1 can
Measure displacement.As an example, during the pulse and interval of pulse is 50ms or more.
<D. control flow>
Fig. 8 is the flow chart for illustrating the control control light projection of control unit 50 using controller 100.Reference Fig. 8,
In step S1, control unit 50 selects usual measurement pattern (the 1st pattern).In step s 2, control unit 50 is thrown with executing usual light
The mode for penetrating (light projection when normal) controls light projection unit 10 (with reference to Fig. 6).
In step s3, judge whether the pattern that will be executed is switched to predetermined distance to control unit 50 from usual measurement pattern
Range center affirmation mode (the 2nd pattern).When the pattern for being judged as that control unit 50 will execute remains usual measurement pattern
(being in step s3 no (NO)), processing are back to step S2.On the other hand, for example, by the instruction input control portion of user
When 50, it is judged as that the pattern switching that control unit 50 should will execute is predetermined distance range center affirmation mode.In this case (
It is (YES) to be in step S3), processing is advanced into step S4.
In step s 4, control unit 50 selects predetermined distance range center affirmation mode.In step s 5, control unit 50 is sentenced
Determine from sensor head 30 to the distance between position 3 d whether to be in the central portion D1 of predetermined distance range D2.Predetermined distance range
D2 and its central portion D1 can be determined for each form of sensor head 30.Controller 100 can also be prestored for sensing
Each form of device head 30 and the predetermined distance range D2 and its central portion D1 of determination.About the sensing being connect with controller 100
The information of the form of device head 30, such as controller 100 can be written with certainly with 1 pair of 1 sensor head letter corresponding with sensor head 30
The recording medium of breath is read.
When in the central portion D1 that distance d is predetermined distance range D2 (in step s 5 for be (YES)), processing is advanced into
Step S6.In this case, control unit 50 controls light projection unit 10 in a manner of executing usual light projection (light projection when normal).Control
On-state when portion 50 is by make the control signal of 10 lighting of light projection unit be set as normal (with reference to Fig. 7).
The outside for the central portion D1 that distance d is predetermined distance range D2 and when being in predetermined distance range D2 (in step
It is no (NO) in S5), processing is advanced into step S7.In this case, control unit 50 controls light in a manner of executing and flicker light projection
Projection unit 10.Control unit 50 repeats to send out to make the control signal of 10 lighting of light projection unit and carry out switched on and off (reference
Fig. 7).
In step s 8, judge control unit 50 whether from predetermined distance range center affirmation mode cut by the pattern that will be executed
It is changed to usual measurement pattern.It is being judged as that the pattern that control unit 50 will execute remains predetermined distance range center affirmation mode
When (being in step s 8 no (NO)), processing be back to step S5.On the other hand, for example, by the instruction input control of user
When portion 50, it is judged as that the pattern switching that control unit 50 should will execute is usual measurement pattern.In this case (in step s 8 for
It is (YES)), processing is back to step S1.
<E. another embodiment>
Fig. 9 is the light projection for illustrating the sensor head 30 in predetermined distance range center affirmation mode (the 2nd pattern)
The figure of another embodiment of state.In the outside of the central portion D1 of predetermined distance range D2 and it is predetermined distance model with reference to Fig. 9
Enclose the distance range D3 that setting is set in D2.It is in the outside of the central portion D1 of predetermined distance range D2 in distance d and is set
Distance range D3 in when, the light projected from sensor head 30 relatively quickly flickers.On the other hand, rule are in distance d
When outside the set distance range D3 in set a distance range D2 and in predetermined distance range D2, projected from sensor head 30
Light will be relatively slowly flickers.In this way, being in the outside of the central portion D1 of predetermined distance range D2 in distance d and being predetermined distance model
When enclosing in D2, the different mode in interval that control unit 50 can also be flickered according to distance d controls light projection unit 10.
In turn, it is not limited to make the interval stage of flicker different.Referring again to Fig. 5, control unit 50 can also distance d
Difference between the upper limit or lower limit of the central portion D1 of predetermined distance range D2 is bigger, and the mode that the blinking intervals of light are bigger controls
Light projection unit 10.
<F. advantage>
Consider the example whether being in 100 side display distance d of controller in the central portion D1 of predetermined distance range D2.Example
Such as, user's display distance d can be within the scope of predetermined distance by making the display lamp lighting of controller 100.Alternatively, passing through
The measured value of displacement is shown in the display unit 60 of controller 100, user can confirm whether distance d is in predetermined distance range D2
Central portion D1 in.
Sensor head 30 is configured at the position far from controller 100 however, it is believed that having.In such cases, user is located at
Near the setting place of sensor head 30.Therefore, there is following possibility：User is difficult to by from controller 100 to user's
Distance or user confirm the display of controller 100 relative to the position of controller 100.
In the embodiment, displacement measuring device 1 indicates autobiography by the projection state of the light from sensor head 30
The distance d of sensor head 30 to position 3 (reflection position) is in the central portion D1 of predetermined distance range D2.Therefore, it is set in user
When setting sensor head 30, user can easily identify the central portion of the predetermined distance range of sensor head 30.User can not also confirm
The display of controller 100.Sensor head can be set to position appropriate by user, therefore can be easy structure can be accurately and stably
The environment measured.
It is considered as：This time revealed embodiment is considered in all respects only as illustrating, not limiter.It will be appreciated that：This
The range of invention is shown in claim rather than the explanation, including with all in the meaning and range of claim equalization
Change.
Claims (8)
1. a kind of displacement measuring device, it is characterised in that including：
Sensor head has optical system and does not have electronic circuit；
Controller has：Light projection unit generates irradiation light；Light receiver receives described in being received by the sensor head
The reflected light of irradiation light；And control unit, calculated based on the light acceptance amount of the light receiver sensor head with it is described anti-
Penetrate the distance between the reflection position of light；
The irradiation light from the light projection unit is transferred to the sensor head by the 1st fiber optics；And
The reflected light from the sensor head is transferred to the controller by the 2nd fiber optics,
The control unit has：1st pattern measures the distance between the sensor head and the reflection position；And
2nd pattern indicates the institute between the sensor head and the reflection position by the light projection state of the light projection unit
State the central portion whether distance is in predetermined distance range.
2. displacement measuring device according to claim 1, it is characterised in that：
In the 2nd pattern, the control unit judges that the distance between the sensor head and the reflection position is
In the no central portion into the predetermined distance range, and indicated by the light projection state of the light projection unit
The judging result.
3. displacement measuring device according to claim 2, it is characterised in that：
In the 2nd pattern, the predetermined distance is in the distance from the sensor head to the reflection position
When in the central portion of range, the control unit makes the continuous lighting of the light projection unit,
In the 2nd pattern, the predetermined distance is in the distance from the sensor head to the reflection position
The outside of the central portion of range and when within the scope of the predetermined distance, the control unit makes the light projection unit flicker.
4. displacement measuring device according to claim 3, it is characterised in that：
The outer of the central portion of the predetermined distance range is being in the distance of the reflection position from the sensor head
In the case of in the range of side, the predetermined distance model is in the distance from the sensor head to the reflection position
The outside of the central portion enclosed and when in the set distance range within the scope of the predetermined distance, the control unit makes institute
Light projection unit is stated with the 1st interval flashing,
In the distance from the sensor head to the reflection position in described set within the scope of the predetermined distance
Distance range it is outer and when for outside the predetermined distance range, the control unit makes the light projection unit to be more than between the described 1st
Every the 2nd interval flashing.
5. displacement measuring device according to claim 3, it is characterised in that：
The outer of the central portion of the predetermined distance range is being in the distance of the reflection position from the sensor head
Side and in the case of within the scope of the predetermined distance, the control unit is with from the sensor head to the reflection position
Difference between the distance and the upper limit or lower limit of the central portion of the predetermined distance range becomes larger and increases the light and throw
Penetrate the interval of the flicker in portion.
6. displacement measuring device according to any one of claim 3 to 5, it is characterised in that：
Situation in the central portion that the distance from the sensor head to reflection position is in the predetermined distance range
Under, the control unit controls light projection unit, so that the light projection power of the light projection unit becomes certain value, from the sensing
The distance of device head to the reflection position be in the outside of the central portion of the predetermined distance range and for it is described regulation away from
In the case of in range, the control unit controls the light projection unit, so that the crest value of the output of the light projection unit is high
Light when in the central portion that the distance from the sensor head to reflection position is in the predetermined distance range
The output of projection unit.
7. displacement measuring device according to any one of claim 1 to 5, it is characterised in that：
1st fiber optics is identical as the 2nd fiber optics.
8. displacement measuring device according to claim 6, it is characterised in that：
1st fiber optics is identical as the 2nd fiber optics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202010883783.8A CN111982017B (en) | 2017-03-14 | 2017-12-15 | Displacement measuring device |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2017048283A JP6819376B2 (en) | 2017-03-14 | 2017-03-14 | Displacement measuring device |
| JP2017-048283 | 2017-03-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010883783.8A Division CN111982017B (en) | 2017-03-14 | 2017-12-15 | Displacement measuring device |
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| CN108571936A true CN108571936A (en) | 2018-09-25 |
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| JP (1) | JP6819376B2 (en) |
| KR (3) | KR102046158B1 (en) |
| CN (2) | CN108571936A (en) |
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| US11892279B2 (en) | 2018-11-05 | 2024-02-06 | Trinamix Gmbh | Detector and method for determining a position of at least one object |
| CN109724516A (en) * | 2019-02-27 | 2019-05-07 | 中北大学 | A kind of system for measuring surface appearance and method based on Fibre Optical Sensor |
| JP7207377B2 (en) | 2020-06-30 | 2023-01-18 | 株式会社羽根 | Water flow shield for feeding in aquaculture tank, and feeding method in aquaculture tank |
| JP2021047213A (en) * | 2020-12-25 | 2021-03-25 | オムロン株式会社 | Displacement measurement device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0674760A (en) * | 1992-06-25 | 1994-03-18 | Matsushita Electric Works Ltd | Optical displacement sensor |
| JP2004264082A (en) * | 2003-02-28 | 2004-09-24 | Sunx Ltd | Thickness measuring instrument |
| CN1950670A (en) * | 2004-05-06 | 2007-04-18 | 卡尔·马尔控股有限公司 | Measuring device provided with a probe-tip |
| CN101182992A (en) * | 2007-12-27 | 2008-05-21 | 哈尔滨工业大学 | Compound shade ultra-distinguish differential confocal measurement method and device |
| CN102679880A (en) * | 2011-03-14 | 2012-09-19 | 欧姆龙株式会社 | Confocal measurement device |
| CN103673887A (en) * | 2012-09-14 | 2014-03-26 | 欧姆龙株式会社 | Chromatic confocal measurement apparatus |
| CN104457609A (en) * | 2013-09-18 | 2015-03-25 | 株式会社三丰 | Coordinate measuring apparatus |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05322531A (en) * | 1992-05-22 | 1993-12-07 | Toshio Fukuda | Three-dimensional shape measuring device of object |
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| JP5870576B2 (en) * | 2011-09-22 | 2016-03-01 | オムロン株式会社 | Optical measuring device |
| JP2013096941A (en) * | 2011-11-04 | 2013-05-20 | Sony Corp | Imaging device, imaging method, and program |
| JP5834979B2 (en) | 2012-02-03 | 2015-12-24 | オムロン株式会社 | Confocal measuring device |
| JP6044315B2 (en) * | 2012-12-12 | 2016-12-14 | オムロン株式会社 | Displacement measuring method and displacement measuring apparatus |
| JP5966982B2 (en) * | 2013-03-15 | 2016-08-10 | オムロン株式会社 | Confocal measuring device |
| CN103398659B (en) * | 2013-08-07 | 2016-05-18 | 南京信息工程大学 | Optical fibre displacement sensor and the multichannel displacement measurement method based on data fusion |
| JP6331499B2 (en) * | 2014-03-07 | 2018-05-30 | オムロン株式会社 | Optical axis adjustment method for confocal measurement apparatus, confocal measurement system, program, and recording medium recording program |
| JP2016099742A (en) * | 2014-11-19 | 2016-05-30 | 株式会社東芝 | Information processing device, video projection device, information processing method and program |
| JP2016102697A (en) * | 2014-11-27 | 2016-06-02 | パナソニックＩｐマネジメント株式会社 | Device, method, and program for creating distance image |
| US9829312B2 (en) * | 2015-07-09 | 2017-11-28 | Mituloyo Corporation | Chromatic confocal range sensor comprising a camera portion |
-
2017
- 2017-03-14 JP JP2017048283A patent/JP6819376B2/en active Active
- 2017-12-13 TW TW106143736A patent/TWI642900B/en active
- 2017-12-15 CN CN201711360394.1A patent/CN108571936A/en active Pending
- 2017-12-15 CN CN202010883783.8A patent/CN111982017B/en active Active
- 2017-12-18 KR KR1020170174124A patent/KR102046158B1/en active IP Right Grant
-
2019
- 2019-02-01 KR KR1020190014042A patent/KR102109948B1/en active IP Right Grant
- 2019-12-03 KR KR1020190159122A patent/KR102160671B1/en active IP Right Grant
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0674760A (en) * | 1992-06-25 | 1994-03-18 | Matsushita Electric Works Ltd | Optical displacement sensor |
| JP2004264082A (en) * | 2003-02-28 | 2004-09-24 | Sunx Ltd | Thickness measuring instrument |
| CN1950670A (en) * | 2004-05-06 | 2007-04-18 | 卡尔·马尔控股有限公司 | Measuring device provided with a probe-tip |
| CN101182992A (en) * | 2007-12-27 | 2008-05-21 | 哈尔滨工业大学 | Compound shade ultra-distinguish differential confocal measurement method and device |
| CN102679880A (en) * | 2011-03-14 | 2012-09-19 | 欧姆龙株式会社 | Confocal measurement device |
| CN103673887A (en) * | 2012-09-14 | 2014-03-26 | 欧姆龙株式会社 | Chromatic confocal measurement apparatus |
| CN104457609A (en) * | 2013-09-18 | 2015-03-25 | 株式会社三丰 | Coordinate measuring apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190017841A (en) | 2019-02-20 |
| CN111982017B (en) | 2023-05-02 |
| JP6819376B2 (en) | 2021-01-27 |
| KR102046158B1 (en) | 2019-11-18 |
| JP2018151282A (en) | 2018-09-27 |
| KR102160671B1 (en) | 2020-09-28 |
| TW201833508A (en) | 2018-09-16 |
| CN111982017A (en) | 2020-11-24 |
| KR20190138766A (en) | 2019-12-16 |
| KR102109948B1 (en) | 2020-05-12 |
| TWI642900B (en) | 2018-12-01 |
| KR20180105046A (en) | 2018-09-27 |
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Application publication date: 20180925 |