CN108565313A - One kind removing membrane processing method and equipment - Google Patents
One kind removing membrane processing method and equipment Download PDFInfo
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- CN108565313A CN108565313A CN201711375583.6A CN201711375583A CN108565313A CN 108565313 A CN108565313 A CN 108565313A CN 201711375583 A CN201711375583 A CN 201711375583A CN 108565313 A CN108565313 A CN 108565313A
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- 239000012528 membrane Substances 0.000 title claims abstract description 88
- 238000003672 processing method Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 62
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 230000004075 alteration Effects 0.000 abstract description 8
- 239000010408 film Substances 0.000 description 52
- 210000004027 cell Anatomy 0.000 description 24
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000013084 building-integrated photovoltaic technology Methods 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The embodiment of the invention discloses one kind removing membrane processing method and equipment, and the equipment includes：Optical module；Optical module includes：Laser generator, for generating laser beam；First scanning mirror is used for reflection laser light beam；Second scanning mirror, the laser beam for reflecting the reflection of the first scanning mirror；Focus lamp, the laser beam focusing for reflecting the second scanning mirror carry out removing film process to solar battery sheet and to solar battery sheet；Further include processor and memory, instruction is stored in memory, following steps are realized when instruction is executed by processor：Solar battery sheet or optical module are moved to designated position, the first scanning mirror is controlled and the second scanning mirror deflects, and control the solar battery sheet simultaneously and moved, to carry out removing film process to the solar battery sheet.The embodiment of the present invention improves membrane removal rate, and not will produce aberration.
Description
Technical field
The present invention relates to photovoltaic technologies, espespecially a kind of to remove membrane processing method and equipment.
Background technology
Photovoltaic generation is a kind of generally acknowledged clean energy resource, and photovoltaic generation obtains vigorously supporting for national policy in recent years.As
Membrane removal photovoltaic module is more widely used in and builds, the combinations, i.e. photovoltaic building one such as automobile because can not only generate electricity energy daylighting again
It body (BIPV, Building Integrated Photovoltaic), the solar energy power generating system that is attached on building
It unites (BAPV, Building Attached Photovoltaic) etc..The making of current thin film solar cell membrane removal is mostly adopted
With laser grooving and scribing mode, i.e., reach membrane removal effect using a certain proportion of not membrane removal film layer of laser ablation, but conventional laser
The groove mode for being generally used motor drag laser head is delineated in membrane removal, or in the case where laser beam is motionless, passes through cell piece
The groove mode of reciprocating motion realizes that both modes are limited by mechanical movement ability, groove speed can only achieve
1000~2000 millimeters (mm/s) per second, while spot diameter or spot width can generally be limited in the μ of 50 microns (μm)~100
M or so, thus membrane removal rate is relatively low, on the other hand, conventional laser membrane removal delineation can be swashed to improve membrane removal rate using multiple
Shaven head is carried out at the same time processing, and since each laser performance is variant, different machining areas easy to produce aberration.
Invention content
An embodiment of the present invention provides one kind removing membrane processing method and equipment, can improve except membrane efficiency, and do not generate color
Difference.
An embodiment of the present invention provides a kind of membrane removal processing equipments, including：Optical module；The optical module includes：
Laser generator, for generating laser beam；
First scanning mirror, for reflecting the laser beam；
Second scanning mirror, the laser beam for reflecting the first scanning mirror reflection；
Focus lamp, the laser beam focusing for reflecting second scanning mirror is to solar battery sheet and to solar energy
Cell piece carries out removing film process；
The membrane removal processing equipment further includes processor and memory, and instruction is stored in the memory, when the finger
Order realizes following steps when being executed by the processor：
The solar battery sheet or the optical module are moved to designated position, control first scanning
Mirror and the second scanning mirror deflect, and control the solar battery sheet simultaneously and moved, with to the solar cell
Piece carries out removing film process.
Optionally, the solar battery sheet includes one or more predeterminable areas, each predeterminable area its
The middle scanning range for being less than or equal to second scanning mirror on one side.
Optionally, control the as described below is specifically realized in the following ways when described instruction is executed by the processor
One scanning mirror and the second scanning mirror deflect, and control solar battery sheet and moved, to be carried out to solar battery sheet
Except film process：
It controls first scanning mirror and second scanning mirror deflects, and control the solar battery sheet simultaneously
It is moved along the direction vertical with groove, to form groove in the solar cell on piece；Wherein, first scanning
The movement velocity of the deflection speed of mirror, the deflection speed of second scanning mirror and the solar battery sheet meets
Wherein, line spacing of the W between groove, V2For the movement velocity of the solar battery sheet, L1To delineate the quarter
The path length that laser beam moves when line, V1For the deflection speed of second scanning mirror, V3For the inclined of first scanning mirror
Rotary speed.
Optionally, the power of the laser generator is greater than or equal to predetermined power.
Optionally, first scanning mirror and second scanning mirror are scanning galvanometer.
Optionally, in the geometry of incidence point of the laser beam on first scanning mirror and first scanning mirror
The distance between heart point be less than or equal to the first pre-determined distance, incidence point of the laser beam on second scanning mirror with
The distance between geometric center point of second scanning mirror is less than or equal to the second pre-determined distance.
Optionally, the focal length of the focus lamp is greater than or equal to default focal length.
The embodiment of the present invention proposes one kind and removing membrane processing method, including：
Solar battery sheet or optical module are moved to designated position；
It controls the first scanning mirror and the second scanning mirror deflects, and control the solar battery sheet simultaneously and transported
It is dynamic, to carry out removing film process to the solar battery sheet；
Wherein, the optical module includes：The laser generator, first scanning mirror, second scanning mirror and
The focus lamp；The laser beam that laser generator generates is reflected through the first scanning mirror and the second scanning mirror, and focus lamp will reflect
Laser beam focusing to solar cell on piece and to solar battery sheet carry out remove film process.
Optionally, the first scanning mirror of the control and the second scanning mirror deflect, and control solar battery sheet simultaneously
It is moved, to carry out including except film process to solar battery sheet：
It controls first scanning mirror and second scanning mirror deflects, and control the solar battery sheet simultaneously
It is moved along the direction vertical with groove, to form groove wherein in the solar cell on piece, first scanning
The movement velocity of the deflection speed of mirror, the deflection speed of second scanning mirror and the solar battery sheet meets
Wherein, line spacing of the W between groove, V2For the movement velocity of the solar battery sheet, L1To delineate the quarter
The path length that laser beam moves when line, V1For the deflection speed of second scanning mirror, V3For the inclined of first scanning mirror
Rotary speed.
Compared with the relevant technologies, the embodiment of the present invention includes：Optical module；The optical module includes：Laser generator,
For generating laser beam；First scanning mirror, the laser beam for reflecting the first scanning mirror reflection；Second scanning mirror,
For reflecting the laser beam；Focus lamp, the laser beam focusing for being used to reflect the second scanning mirror to solar battery sheet
And solar battery sheet is carried out to remove film process；The membrane removal processing equipment further includes processor and memory, the memory
In be stored with instruction, realize following steps when described instruction is executed by the processor：By the solar battery sheet or institute
It states optical module and is moved to designated position, control the first scanning mirror and second scanning mirror deflects, and control simultaneously too
Positive energy cell piece is moved, to carry out removing film process to solar battery sheet.The embodiment of the present invention control the first scanning mirror and
Second scanning mirror deflects, and control simultaneously solar battery sheet carry out movement realize formula is scanned to solar battery sheet
Except film process, disposable working (finishing) area is increased, improves membrane removal rate, and can be improved using single laser generator
Membrane removal rate, not will produce aberration.
In an alternative, carries out removing film process using the laser generator more than or equal to predetermined power, increase
Possibility except film process is carried out using large spot, further improves membrane removal rate.
In an alternative, incidence point of the laser beam on first scanning mirror is scanned with described first
The distance between geometric center point of mirror is less than or equal to the first pre-determined distance, and the laser beam is on second scanning mirror
The distance between the geometric center point of incidence point and second scanning mirror be less than or equal to the second pre-determined distance.Due to laser
The distance between the geometric center point of light beam incidence point on the scan mirror and scanning mirror is longer, and the groove distortion finally delineated is got over
Seriously, therefore, the distance between the geometric center point of laser beam incidence point on the scan mirror and scanning mirror is limited to one
In fixed range, the distortion phenomenon for even being eliminated groove is reduced, to improve the quality of solar battery sheet.
Other features and advantages of the present invention will be illustrated in the following description, also, partly becomes from specification
It obtains it is clear that understand through the implementation of the invention.The purpose of the present invention and other advantages can be by specification, rights
Specifically noted structure is realized and is obtained in claim and attached drawing.
Description of the drawings
Attached drawing is used for providing further understanding technical solution of the present invention, and a part for constitution instruction, with this
The embodiment of application technical solution for explaining the present invention together, does not constitute the limitation to technical solution of the present invention.
Fig. 1 is the structural schematic diagram of solar cell of the embodiment of the present invention；
Fig. 2 is the schematic diagram that tradition removes membrane processing method；
Fig. 3 is the structure composition schematic diagram of membrane removal processing equipment of the embodiment of the present invention；
Fig. 4 (a) is that the groove of solar cell on piece of the embodiment of the present invention generates the schematic diagram one of distortion；
Fig. 4 (b) is that the groove of solar cell on piece of the embodiment of the present invention generates the schematic diagram two of distortion；
Fig. 5 is schematic diagram of the embodiment of the present invention to solar battery sheet scoring process；
Fig. 6 is the flow chart that the embodiment of the present invention removes membrane processing method；
Fig. 7 is the relation schematic diagram in laser beam moves in scoring process of the embodiment of the present invention path and groove.
Specific implementation mode
The embodiment of the present invention is described in detail below in conjunction with attached drawing.It should be noted that not conflicting
In the case of, the features in the embodiments and the embodiments of the present application mutually can be combined arbitrarily.
Step shown in the flowchart of the accompanying drawings can be in the computer system of such as a group of computer-executable instructions
It executes.Also, although logical order is shown in flow charts, and it in some cases, can be with suitable different from herein
Sequence executes shown or described step.
Introduce the embodiment of the present invention except the solar cell before membrane processing method, introduced first using this method
Structure.Fig. 1 is the structural schematic diagram of solar cell of the embodiment of the present invention.As shown in Figure 1, solar cell is from top to bottom successively
Including：Back electrode layer 1, photovoltaic film layer 2, preceding electrode layer 3 and transparent substrates 4.Generally except membrane processing method is to use laser pair
Back electrode layer 1 and photovoltaic film layer 2, or selective etch is carried out to back electrode layer 1, photovoltaic film layer 2 and preceding electrode layer and is gone
It removes.
Traditional removes membrane processing method as shown in Fig. 2, being parallel to the battery structure of X-axis on solar battery sheet 200
Groove 221, the battery structure groove 221 are grooves intrinsic on solar battery sheet 200, do not need laser generator 210 into
Row is obtained except film process.
And the membrane removal groove 220 that Y-axis is parallel on solar battery sheet 200 then needs to carry out using laser generator 210
Except film process obtain, specifically except membrane processing method approximately as：
Laser generator 210 is fixed on a certain position of a certain axis parallel with Z axis, laser generator 210 generates
Laser beam 211 light-emitting directions are fixed by focus lamp 212.Solar battery sheet 200, which is grabbed, to be clipped on platform, the platform
Parallel with XOY plane, which can drag solar battery sheet 200 along the direction for being parallel to Y-axis by Y-axis mechanical movement
Movement is parallel to the membrane removal groove 220 of Y-axis to generate, when generate one it is complete be parallel to the membrane removal groove 220 of Y-axis after,
Another membrane removal groove 220 for being parallel to Y-axis is generated if necessary, then needs platform dragging the sun by X-axis mechanical movement
Energy cell piece 200 carries out stepping, to generate another membrane removal groove 220 for being parallel to Y-axis.
It is traditional except membrane processing method is limited by mechanical movement ability, groove speed can only achieve 1000~2000mm/
S, while spot diameter or spot width can generally be limited in 50 μm~100 μm or so, thus membrane removal rate is relatively low, another party
Face, conventional laser membrane removal delineation can be carried out at the same time processing to improve membrane removal rate using multiple laser heads, due to each laser
Device performance is variant, and different machining areas easy to produce aberration, and spot diameter or spot width are inconsistent, can lead to etching line
Width is inconsistent, influences subsequent processing or film quality.
Referring to Fig. 3, the embodiment of the present invention proposes a kind of membrane removal processing equipment, including：Optical module.
Wherein, optical module includes：
Laser generator 310, for generating laser beam；
First scanning mirror 312a is used for reflection laser light beam；
Second scanning mirror 312b, the laser beam for reflecting the first scanning mirror 312a reflections；
Focus lamp 313, the laser beam focusing for being used to reflect the second scanning mirror 312b to solar battery sheet 300 are simultaneously right
Solar battery sheet 300 carries out removing film process.
In an alternative embodiment, the power of laser generator 310 is greater than or equal to predetermined power.For example, laser
The power of generator 310 is tens W to hundreds of W.Such as use power for 100W, wavelength is that the green laser of 532 nanometers (nm) is sent out
Raw device.
Using the laser generator of relatively high power carry out remove film process, increase using large spot carry out except film process can
Energy property, further improves membrane removal rate.
In an alternative embodiment, the first scanning mirror 312a and the second scanning mirror 312b is scanning galvanometer.
In an alternative embodiment, the focal length of focus lamp 313 is greater than or equal to default focal length.For example, model
The focus lamp of F825.
Above-mentioned membrane removal processing equipment further includes processor and memory, and instruction is stored in memory, when instruction is handled
Device realizes following steps when executing：
Solar battery sheet 300 or optical module are moved to designated position, control the first scanning mirror and the second scanning mirror
It deflects, and controls solar battery sheet 300 simultaneously and moved, to carry out removing film process to solar battery sheet 300.
Wherein, due to that when the deflection angle of the first scanning mirror 312a is larger, laser beam can be made in the second scanning mirror
Incidence point on 312b deviates the second scanning mirror 312b, so that the groove finally delineated generates distortion, such as Fig. 4 (a) and Fig. 4
(b) shown in, so that groove is not parallel, to reduce the quality of solar battery sheet 300.In order to improve solar cell
The quality of piece 300, the deflection angle that can control the first scanning mirror 312a are consistently less than or are equal to predetermined angle so that laser light
Incidence point of the beam on the first scanning mirror 312a between the geometric center point of the first scanning mirror 312a at a distance from be less than or equal to
First pre-determined distance, the geometric center point of incidence point and second scanning mirror 312b of the laser beam on the second scanning mirror 312b it
Between distance be less than or equal to the second pre-determined distance.
In order to ensure to be satisfied by scoring process：Incidence point of the laser beam on the first scanning mirror 312a is swept with first
It retouches the distance between geometric center point of mirror 312a and is less than or equal to the first pre-determined distance, laser beam is in the second scanning mirror 312b
On incidence point and the distance between the geometric center point of the second scanning mirror 312b be less than or equal to the second pre-determined distance, this implementation
Example is moved in scoring process by controlling solar battery sheet 300 so that the deflection angle of the first scanning mirror 312a begins
It is less than or equal to predetermined angle eventually, and is realized at the membrane removal to solar battery sheet 300 by controlling the second scanning mirror 312b
Reason, and since the second scanning mirror 312b has certain scanning range, when the both sides of solar battery sheet 300 are all higher than the second scanning
When the scanning range of mirror 312b, need that solar battery sheet 300 is first divided into multiple predeterminable areas, each predeterminable area
Wherein it is less than or equal to the scanning range of the second scanning mirror 312b on one side；Then each predeterminable area is carried out at membrane removal respectively
Reason carries out first predeterminable area removing film process, after the completion, carry out removing film process to second predeterminable area, after the completion,
Third predeterminable area is carried out to remove film process ... ..., and so on, it is carried out until to all predeterminable areas except film process is complete
At.
The method that membrane removal is carried out to each predeterminable area is described in detail below.
First, when carrying out solar battery sheet 300 except film process, the pattern of membrane removal can be arbitrary graphic pattern, for example, removing
The pattern of film can be spot, can also be groove, can also be other patterns, and the embodiment of the present invention is not construed as limiting this.
It is illustrated so that the pattern of membrane removal is groove as an example below.
Laser beam 320 will form groove in moving process and need to meet the Duplication between two hot spots of arbitrary neighborhood
More than or equal to predetermined threshold value.If the Duplication between two neighboring hot spot is less than predetermined threshold value, what is obtained is two phases
Mutual independent hot spot point.
Wherein, by solar battery sheet 300 or optical module be moved to designated position refer to by solar battery sheet 300 or
Optical components are moved to the current predeterminable area carried out except film process, which can should at least to control the first scanning mirror
312a and the second scanning mirror 312b deflect, and control completed to solar energy when solar battery sheet 300 is moved simultaneously
The current preset region of cell piece 300 carries out removing film process, which can be any position, as long as can complete to too
The current preset region of positive energy cell piece 300 carries out removing film process.For example, in Fig. 3, realizes be parallel to Y if necessary
Solar battery sheet 300 or optical module first can be moved to designated position, and make laser light by the membrane removal groove 320 of axis
Beam focuses on the upper left corner in current preset region, then controls the first scanning mirror 312a and the second scanning mirror 312b deflects,
To form the groove of an oblique-X-axis, and solar battery sheet 300 is controlled simultaneously and is moved along-X-axis, to obtain
One groove 320 for being parallel to Y-axis.
Wherein, the angle α between the groove and X-axis of oblique-X-axis meetsWherein, α is oblique-X-axis
Groove and X-axis between angle, L be solar cell on piece groove length, L1Laser beam moves when to delineate groove
Dynamic path length.
What needs to be explained here is that if when the spot diameter of laser beam is more than the width of groove 320, control
First scanning mirror 312a and the second scanning mirror 312b deflect, and control solar battery sheet 300 simultaneously and moved so that
Laser beam is moved to lower end from the upper end of groove 320, or laser beam is made to be moved to upper end i.e. from the lower end of groove 320
Can complete groove 320 removes film process.
If the spot diameter of laser beam is less than the width of groove 320, control the first scanning mirror 312a and the
Two scanning mirror 312b deflect, and control solar battery sheet 300 simultaneously and moved so that laser beam is at least from groove
320 upper end is moved to lower end, then is moved to upper end from lower end；Or so that laser beam is at least moved from the lower end of groove 320
It moves to upper end, then lower end is moved to from upper end, that is to say, that same groove 320 is at least needed to carry out at membrane removal twice
Reason just can be with, specifically needs the number carried out related to the width of the spot diameter of laser beam and groove, i.e., spot diameter with
The product of membrane removal number should be at least more than the width of groove 320.
In an alternative embodiment, following control is specifically realized in the following ways when instruction is executed by processor
First scanning mirror and the second scanning mirror deflect, and control solar battery sheet simultaneously and moved, with to solar cell
Piece carries out removing film process：
It controls the first scanning mirror and the second scanning mirror deflects, and control solar battery sheet simultaneously and hang down along with groove
Straight direction is moved, to form groove in solar cell on piece；Wherein, the deflection speed of the first scanning mirror, second are swept
The movement velocity of the deflection speed and solar battery sheet of retouching mirror meets
Wherein, line spacing of the W between groove, V2For the movement velocity of solar battery sheet, L1Laser when to delineate groove
The length in the path 501 of light beam movement, V1For the deflection speed of the second scanning mirror, V3For the deflection speed of first scanning mirror.
As shown in fig. 5, it is assumed that existing need to delineate the membrane removal groove 320 for being parallel to Y-axis on solar battery sheet 300, by
It therefore can not be to solar-electricity in the scanning range for being wherein less than the second scanning mirror 312b on one side of solar battery sheet 300
Pond piece 300 is divided, then solar battery sheet 300 or optical module is first moved to designated position so that laser beam is poly-
Coke then controls the first scanning mirror 312a and the second scanning mirror to the upper end of first membrane removal groove of solar battery sheet 300
312b deflects, and controls solar battery sheet 300 simultaneously and moved along-X-axis so that laser beam is gradually from
The upper end of one membrane removal groove is moved to lower end, completes to remove film process to first membrane removal groove；Later, laser is closed
Device 310, and control the second scanning mirror 312b and remain stationary as, the first scanning mirror 312a of control is remained stationary as, and controls solar cell
Piece 300 continues on-and X-axis moved so that and laser beam is moved to the lower end of Article 2 membrane removal groove, then, opens and swashs
Optical generator 310, and control the first scanning mirror 312a and the second scanning mirror 312b and deflect, while controlling solar battery sheet
300 continue on-X-axis moved so that laser beam is gradually moved to upper end from the lower end of Article 2 membrane removal groove, complete
Pairs of Article 2 membrane removal groove removes film process ... ..., and so on, until completing all membrane removals on solar battery sheet 300
Groove removes film process.
The embodiment of the present invention controls the first scanning mirror and the second scanning mirror deflects, and controls solar battery sheet simultaneously
It carries out movement and realizes that being scanned formula to solar battery sheet removes film process, increases disposable working (finishing) area, improves membrane removal
Rate, and membrane removal rate can be improved using single laser generator, it not will produce aberration.
In addition, real using the first scanning mirror 312a, the scanning of the second scanning mirror 312b and the movement of solar battery sheet 300
Show and pattern, word, scatterplot mark are carried out according to arbitrary graphic, has formed pattern, word etc. on solar battery sheet 300, this
Be tradition except membrane processing method it is unapproachable.
Finally, using relatively high power laser generator because membrane removal rate is fast, it can be rapidly completed and be removed using single laser head
Film groove will not cause aberration problem.
Referring to Fig. 6, the embodiment of the present invention proposes one kind and removing membrane processing method, including：
Solar battery sheet or optical module are moved to designated position by step 600.
In the present embodiment, optical module includes：Laser generator, the first scanning mirror, the second scanning mirror and focus lamp.Laser
The laser beam that generator generates is reflected through the first scanning mirror and the second scanning mirror, and focus lamp arrives the laser beam focusing of reflection
Membrane removal processing is carried out on solar battery sheet.
Wherein, due to that when the deflection angle of the first scanning mirror 312a is larger, laser beam can be made in the second scanning mirror
Incidence point on 312b deviates the second scanning mirror 312b, so that the groove finally delineated generates distortion, as shown in figure 4, this
Sample so that groove is not parallel, to reduce the quality of solar battery sheet 300.In order to improve the product of solar battery sheet 300
Matter, the deflection angle that can control the first scanning mirror 312a are consistently less than or are equal to predetermined angle so that laser beam is first
It is default that the distance between geometric center point of incidence point and the first scanning mirror 312a on scanning mirror 312a is less than or equal to first
Distance, incidence point of the laser beam on the second scanning mirror 312b between the geometric center point of the second scanning mirror 312b at a distance from
Less than or equal to the second pre-determined distance.
In order to ensure to be satisfied by scoring process：Incidence point of the laser beam on the first scanning mirror 312a is swept with first
It retouches the distance between geometric center point of mirror 312a and is less than or equal to the first pre-determined distance, laser beam is in the second scanning mirror 312b
On incidence point and the distance between the geometric center point of the second scanning mirror 312b be less than or equal to the second pre-determined distance, this implementation
Example is moved in scoring process by controlling solar battery sheet 300 so that the deflection angle of the first scanning mirror 312a begins
It is less than or equal to predetermined angle eventually, and is realized at the membrane removal to solar battery sheet 300 by controlling the second scanning mirror 312b
Reason, and since the second scanning mirror 312b has certain scanning range, when the both sides of solar battery sheet 300 are all higher than the second scanning
When the scanning range of mirror 312b, need that solar battery sheet 300 is first divided into multiple predeterminable areas, each predeterminable area
Wherein it is less than or equal to the scanning range of the second scanning mirror 312b on one side；Then each predeterminable area is carried out at membrane removal respectively
Reason carries out first predeterminable area removing film process, after the completion, carry out removing film process to second predeterminable area, after the completion,
Third predeterminable area is carried out to remove film process ... ..., and so on, it is carried out until to all predeterminable areas except film process is complete
At.
The method that membrane removal is carried out to each predeterminable area is described in detail below.
First, when carrying out solar battery sheet 300 except film process, the pattern of membrane removal can be arbitrary graphic pattern, for example, removing
The pattern of film can be spot, can also be groove, can also be other patterns, and the embodiment of the present invention is not construed as limiting this.
It is illustrated so that the pattern of membrane removal is groove as an example below.
Laser beam 320 will form groove in moving process and need to meet the Duplication between two hot spots of arbitrary neighborhood
More than or equal to predetermined threshold value.If the Duplication between two neighboring hot spot is less than predetermined threshold value, what is obtained is two phases
Mutual independent hot spot point.
In the present embodiment, it refers to by solar cell that solar battery sheet 300 or optical module, which are moved to designated position,
Piece 300 or optical components are moved to the current predeterminable area carried out except film process, which can should at least make control the
One scanning mirror 312a and the second scanning mirror 312b deflect, and control when solar battery sheet 300 is moved and complete simultaneously
The current preset region of solar battery sheet 300 is carried out to remove film process, which can be any position, as long as can
It completes that the current preset region of solar battery sheet 300 is carried out to remove film process.For example, in Fig. 3, realize if necessary
It is parallel to the membrane removal groove 320 of Y-axis, can solar battery sheet 300 or optical module be first moved to designated position, and make
Laser beam focusing then controls the first scanning mirror 312a and the second scanning mirror 312b occurs to the upper left corner in current preset region
Deflection to form the groove of an oblique-X-axis, and controls solar battery sheet 300 and is moved along-X-axis simultaneously, from
And obtain a groove for being parallel to Y-axis 320.
Wherein, the angle α between the groove and X-axis of oblique-X-axis meetsWherein, α is oblique-X-axis
Groove and X-axis between angle, L be solar cell on piece groove length, L1Laser beam moves when to delineate groove
Dynamic path length.
What needs to be explained here is that if when the spot diameter of laser beam is more than the width of groove 320, control
First scanning mirror 312a and the second scanning mirror 312b deflect, and control solar battery sheet 300 simultaneously and moved so that
Laser beam is moved to lower end from the upper end of groove 320, or laser beam is made to be moved to upper end i.e. from the lower end of groove 320
Can complete groove 320 removes film process.
If the spot diameter of laser beam is less than the width of groove 320, control the first scanning mirror 312a and the
Two scanning mirror 312b deflect, and control solar battery sheet 300 simultaneously and moved so that laser beam is at least from groove
320 upper end is moved to lower end, then is moved to upper end from lower end；Or so that laser beam is at least moved from the lower end of groove 320
It moves to upper end, then lower end is moved to from upper end, that is to say, that same groove 320 is at least needed to carry out at membrane removal twice
Reason just can be with, specifically needs the number carried out related to the width of the spot diameter of laser beam and groove, i.e., spot diameter with
The product of membrane removal number should be at least more than the width of groove 320.
Step 601, the first scanning mirror of control and the second scanning mirror deflect, and control solar battery sheet and transported
It is dynamic, to carry out removing film process to solar battery sheet.
In the present embodiment, controls the first scanning mirror and the second scanning mirror deflects, and control solar battery sheet simultaneously
It is moved along the direction vertical with groove, to form groove in solar cell on piece；Wherein, the deflection of the first scanning mirror
The movement velocity of speed, the deflection speed of the second scanning mirror and solar battery sheet meets
Wherein, line spacing of the W between groove, V2For the movement velocity of solar battery sheet, L1Laser when to delineate groove
The length in the path 501 of light beam movement, V1For the deflection speed of the second scanning mirror, V3For the deflection speed of first scanning mirror.
The embodiment of the present invention controls the first scanning mirror and the second scanning mirror deflects, and controls solar battery sheet progress
Movement realizes that being scanned formula to solar battery sheet removes film process, increases disposable working (finishing) area, improves membrane removal rate,
And membrane removal rate can be improved using single laser generator, not will produce aberration.
For example, when the scanning range of the first scanning mirror 312a and the second scanning mirror 312b be 0 × 0 millimeter (mm) to 1500 ×
1500mm, groove speed is 15000 millimeters (mm/s) per second, when spot width or a diameter of 1mm are carried out except film process, membrane removal speed
Rate is up to 15000 millimeter squared per second (mm2/s)；And tradition is except in membrane processing method, when spot diameter is 100 μm, groove is fast
When degree is 1500mm/s, membrane removal rate is 150mm2/s；Therefore, the embodiment of the present invention is removed than traditional except membrane processing method
Fast 100 times of membrane processing method or more.
Pattern, text are carried out according to arbitrary graphic in addition, being realized using the first scanning mirror 312a and the second scanning mirror 312b
Word, scatterplot mark form pattern, word etc. on solar battery sheet 300, this is tradition except membrane processing method is difficult to reach
's.
Finally, using relatively high power laser generator because membrane removal rate is fast, it can be rapidly completed and be removed using single laser head
Film groove will not cause aberration problem.
Although disclosed herein embodiment it is as above, the content only for ease of understanding the present invention and use
Embodiment is not limited to the present invention.Technical staff in any fields of the present invention is taken off not departing from the present invention
Under the premise of the spirit and scope of dew, any modification and variation, but the present invention can be carried out in the form and details of implementation
Scope of patent protection, still should be subject to the scope of the claims as defined in the appended claims.
Claims (9)
1. a kind of membrane removal processing equipment, which is characterized in that including：Optical module；The optical module includes：
Laser generator, for generating laser beam；
First scanning mirror, for reflecting the laser beam；
Second scanning mirror, the laser beam for reflecting the first scanning mirror reflection；
Focus lamp, the laser beam focusing for reflecting second scanning mirror is to solar battery sheet and to solar cell
Piece carries out removing film process；
The membrane removal processing equipment further includes processor and memory, and instruction is stored in the memory, when described instruction quilt
The processor realizes following steps when executing：
The solar battery sheet or the optical module are moved to designated position, control first scanning mirror and
Second scanning mirror deflects, and controls the solar battery sheet simultaneously and moved, with to the solar battery sheet into
Row removes film process.
2. film removing device according to claim 1, which is characterized in that the solar battery sheet include one or one with
Upper predeterminable area, the scanning range for being wherein less than or equal to second scanning mirror on one side of each predeterminable area.
3. membrane removal processing equipment according to claim 1 or 2, which is characterized in that when described instruction is held by the processor
It specifically realizes that first scanning mirror of control as described below and the second scanning mirror deflect when row in the following ways, and controls the sun
Energy cell piece is moved, to carry out removing film process to solar battery sheet：
Control first scanning mirror and second scanning mirror deflect, and control simultaneously the solar battery sheet along
The direction vertical with groove is moved, to form groove in the solar cell on piece；Wherein, first scanning mirror
The movement velocity of deflection speed, the deflection speed of second scanning mirror and the solar battery sheet meets
Wherein, line spacing of the W between groove, V2For the movement velocity of the solar battery sheet, L1When to delineate the groove
The path length of laser beam movement, V1For the deflection speed of second scanning mirror, V3For the deflection speed of first scanning mirror
Degree.
4. membrane removal processing equipment according to claim 1 or 2, which is characterized in that the power of the laser generator is more than
Or it is equal to predetermined power.
5. membrane removal processing equipment according to claim 1 or 2, which is characterized in that first scanning mirror and described second
Scanning mirror is scanning galvanometer.
6. membrane removal processing equipment according to claim 1 or 2, which is characterized in that the laser beam is swept described first
It retouches the distance between geometric center point of incidence point and first scanning mirror on mirror and is less than or equal to the first pre-determined distance, institute
State incidence point of the laser beam on second scanning mirror between the geometric center point of second scanning mirror at a distance from it is small
In or equal to the second pre-determined distance.
7. membrane removal processing equipment according to claim 1 or 2, which is characterized in that the focal length of the focus lamp is more than or waits
In default focal length.
8. one kind removing membrane processing method, which is characterized in that including：
Solar battery sheet or optical module are moved to designated position；
It controls the first scanning mirror and the second scanning mirror deflects, and control the solar battery sheet simultaneously and moved, with
The solar battery sheet is carried out to remove film process；
Wherein, the optical module includes：The laser generator, first scanning mirror, second scanning mirror and described
Focus lamp；The laser beam that laser generator generates is reflected through the first scanning mirror and the second scanning mirror, and focus lamp swashs reflection
Light light beam focuses on solar cell on piece and carries out removing film process to solar battery sheet.
9. according to claim 8 remove membrane processing method, which is characterized in that the first scanning mirror of the control and the second scanning
Mirror deflects, and controls solar battery sheet simultaneously and moved, to carry out including except film process to solar battery sheet：
Control first scanning mirror and second scanning mirror deflect, and control simultaneously the solar battery sheet along
The direction vertical with groove is moved, to form groove wherein in the solar cell on piece, first scanning mirror
The movement velocity of deflection speed, the deflection speed of second scanning mirror and the solar battery sheet meets
Wherein, line spacing of the W between groove, V2For the movement velocity of the solar battery sheet, L1When to delineate the groove
The path length of laser beam movement, V1For the deflection speed of second scanning mirror, V3For the deflection speed of first scanning mirror
Degree.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711375583.6A CN108565313B (en) | 2017-12-19 | 2017-12-19 | One kind removing membrane processing method and equipment |
| CN201880001485.2A CN110178228A (en) | 2017-12-19 | 2018-09-26 | Except membrane processing method and equipment |
| PCT/CN2018/107659 WO2019119914A1 (en) | 2017-12-19 | 2018-09-26 | Film removing processing method and equipment |
| EP18197118.5A EP3503221A1 (en) | 2017-12-19 | 2018-09-27 | Processing method for removing film and apparatus for removing film |
| US16/147,049 US20190189831A1 (en) | 2017-12-19 | 2018-09-28 | Processing method for removing film and apparatus for removing film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711375583.6A CN108565313B (en) | 2017-12-19 | 2017-12-19 | One kind removing membrane processing method and equipment |
Publications (2)
| Publication Number | Publication Date |
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| CN108565313A true CN108565313A (en) | 2018-09-21 |
| CN108565313B CN108565313B (en) | 2019-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711375583.6A Active CN108565313B (en) | 2017-12-19 | 2017-12-19 | One kind removing membrane processing method and equipment |
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| CN (1) | CN108565313B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019119914A1 (en) * | 2017-12-19 | 2019-06-27 | 君泰创新（北京）科技有限公司 | Film removing processing method and equipment |
| CN113878254A (en) * | 2021-09-29 | 2022-01-04 | 江苏铁锚玻璃股份有限公司 | Drawing method and drawing graph for special-shaped glass laser etching and film removing pattern |
| WO2023115818A1 (en) * | 2021-12-22 | 2023-06-29 | 苏州德龙激光股份有限公司 | Laser film removal device and method thereof for lithium battery cell insulating protective film |
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| CN102113137A (en) * | 2008-10-05 | 2011-06-29 | 常州雷射激光设备有限公司 | Methods and systems of manufacturing photovoltaic devices |
| CN106129162A (en) * | 2016-07-29 | 2016-11-16 | 无锡嘉瑞光伏有限公司 | A kind of solar battery sheet and assembly and preparation technology thereof |
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| US4594600A (en) * | 1984-10-11 | 1986-06-10 | Ricoh Company, Ltd. | Integrated laser diode scanner |
| CN102113137A (en) * | 2008-10-05 | 2011-06-29 | 常州雷射激光设备有限公司 | Methods and systems of manufacturing photovoltaic devices |
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| WO2019119914A1 (en) * | 2017-12-19 | 2019-06-27 | 君泰创新（北京）科技有限公司 | Film removing processing method and equipment |
| CN113878254A (en) * | 2021-09-29 | 2022-01-04 | 江苏铁锚玻璃股份有限公司 | Drawing method and drawing graph for special-shaped glass laser etching and film removing pattern |
| WO2023115818A1 (en) * | 2021-12-22 | 2023-06-29 | 苏州德龙激光股份有限公司 | Laser film removal device and method thereof for lithium battery cell insulating protective film |
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|---|---|
| CN108565313B (en) | 2019-09-06 |
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