CN108562343B - Device and method for testing ventilation capacity of dynamic operation equipment - Google Patents
Device and method for testing ventilation capacity of dynamic operation equipment Download PDFInfo
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- CN108562343B CN108562343B CN201810215549.0A CN201810215549A CN108562343B CN 108562343 B CN108562343 B CN 108562343B CN 201810215549 A CN201810215549 A CN 201810215549A CN 108562343 B CN108562343 B CN 108562343B
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- 238000012360 testing method Methods 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000009423 ventilation Methods 0.000 title claims description 18
- 239000007789 gas Substances 0.000 claims abstract description 110
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 66
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims description 13
- 210000001503 joint Anatomy 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 238000012429 release testing Methods 0.000 claims description 3
- 238000010257 thawing Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F13/00—Apparatus for measuring by volume and delivering fluids or fluent solid materials, not provided for in the preceding groups
- G01F13/006—Apparatus for measuring by volume and delivering fluids or fluent solid materials, not provided for in the preceding groups measuring volume in function of time
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- General Physics & Mathematics (AREA)
- Sampling And Sample Adjustment (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Abstract
The invention discloses a device and a method for testing the air release amount of dynamic operation equipment, wherein the device comprises a calibration container, a test molecular pump, a condensable gas collector, a collection container, a liquid nitrogen cold trap and a total molecular pump unit; the device can collect all gases released in the dynamic operation equipment to the testing device, and collect condensable gases and non-condensable gases separately, so that the pressure rise rate in the collecting device is reduced, and the volume of the testing device is reduced.
Description
Technical Field
The invention relates to a device for measuring the air release amount, in particular to a device and a method for testing the air release amount of dynamic operation equipment.
Background
The amount of gas released, i.e., the flow rate of the gas released, can be characterized as the ratio of the amount of gas released, G, to the time of release, t. The commonly used measuring method of the air release amount comprises a constant volume method, a constant pressure method, a fixed conductance method, a collecting method, a weighing method and the like. The test objects which the device mainly aims at are a sample wafer and a deflation element. When the method is used for measuring the air release amount, an air release element and the like are usually required to be placed in a vacuum chamber for testing. During testing, the tested object is required to be in a static state, and the method and the device for using the tested object cannot effectively perform the ventilation test of the dynamic operation equipment. And because the gas released by the dynamic operation equipment is unevenly distributed in the equipment, the gas cannot be directly obtained on the equipment by measuring the pressure and calculating the pressure rise rate or weighing.
Through analyzing the method, the dynamic deflation test can be realized by adopting the gas collecting method, and the common collecting method can be improved to realize the test of the gas release amount of dynamic operation equipment. The collection method generally adopts a diffusion pump to collect all released gases into a container with a fixed volume, and then tests the total gas amount, so that the method has the problem to be solved for dynamic operation equipment.
Firstly, the diffusion pump is used for oil return, so that a large background is caused and pollution is generated to dynamic operation equipment. And once the pump is powered off, the oil vapor is released to the equipment to cause pressure rise, the vacuum degree is destroyed, and abnormal operation of the equipment is caused.
Secondly, the method adopts a fixed container, is generally difficult to disassemble and clean, and after multiple tests, the device is lifted in the air release background because the collection container can not thoroughly clean the air released by the vacuum equipment.
Finally, aiming at dynamic operation equipment with different gas discharge amounts, a collection container with proper volume cannot be replaced timely according to the collected gas amount, so that the collection time is too short or too long. At present, by referring to the literature, no related description is found on a method and a device for testing the ventilation capacity when equipment is dynamically operated.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a device and a method for testing the ventilation quantity of dynamic operation equipment.
In order to solve the problems encountered in the above air release test of the dynamic operation equipment, realize the air release test of the dynamic operation equipment and ensure the operation safety of the dynamic operation equipment, the invention provides a device suitable for the air release test of the dynamic operation equipment. The device adopts the molecular pump to collect, eliminates and returns oily problem, and the molecular pump keeps certain pumping speed when having a power failure, cuts device and equipment at this moment, guarantees the equipment vacuum. The device can timely replace the collection container according to the deflation amount of the dynamic operation equipment, and accurately calibrate the volume V for testing in real time. The device can collect all gases released in the dynamic operation equipment to the testing device, and collect condensable gases and non-condensable gases separately, so that the pressure rising rate in the collecting device is reduced, and the volume effect of the testing device is reduced. Cleaning of the condensable gas collection components within the device can be performed, thereby reducing the bleed floor of the device. The total gas amount G and the deflation amount Q can be calculated by testing the total pressure P and the collection time t of the collection device. The technical problem of the above dynamic operation equipment air release volume test is solved.
The invention is realized by the following technical scheme:
the dynamic operation equipment is sequentially communicated with the test molecular pump, the condensable gas collector, the collection container, the liquid nitrogen cold trap and the total molecular pump unit through a closed gas pipeline, the calibration container is connected to a gas pipeline between the molecular pump and the dynamic operation equipment through a closed gas pipeline, and a gas pipeline branch for isolating the test molecular pump from the whole pipeline is connected between the calibration container and the condensable gas collector; and a KF flange (quick connection flange) structure for realizing convenient disassembly is arranged on the cylinder body of the condensable gas collector.
In the above technical solution, the collecting container is connected with a first vacuum gauge for testing the total pressure of the collected gas and measuring the partial pressure of the non-condensable gas.
In the technical scheme, the calibration container is connected with a second vacuum gauge for testing the internal pressure of the calibration container.
In the above technical solution, the condensable gas collector is provided with a liquid nitrogen tank for condensing the gas in the condensable gas collector.
In the above technical solution, a first valve is provided at the outlet of the dynamic operation device.
In the above technical solution, a second valve is provided at the outlet of the calibration container.
In the above technical solution, an eighth valve is disposed on a side of the test molecular pump connected to the dynamic operation device, and a third valve is disposed on a side of the test molecular pump connected to the condensable gas collector.
In the above technical solution, a ninth valve is disposed on a side of the gas line branch connected to the dynamic operation device, and a seventh valve is disposed on a side of the gas line branch connected to the condensable gas collector.
In the above technical solution, a sixth valve is provided between the condensable gas collector and the collection container.
In the technical scheme, a fourth valve is arranged between the collecting container and the liquid nitrogen cold trap.
In the technical scheme, a fifth valve is arranged between the liquid nitrogen cold trap and the total molecular pump unit.
In the above technical scheme, the condensable gas collector includes upper cover, sealing gasket, container, first flange, second flange and handle, is provided with the sealing gasket that installs through fastening bolt between upper cover and the container in order to form pressure pad seal structure, sets up in the both sides of container at first flange, second flange and ties for quick flange structure quick detach interface for realize quick butt joint and dismantlement, the handle sets up in the upper end face of upper cover and is used for opening of upper cover.
A method for testing the deflation amount of dynamic operation equipment comprises the following steps:
step one, keeping a first valve closed, starting a total molecular pump unit and vacuumizing the whole air release testing device;
closing a third valve, a fourth valve and a seventh valve, measuring the pressure rising amount P of the test volume V within a specified time t, and calculating a background Q0; vacuumizing again after the measurement is completed;
step three, opening a first valve, and vacuumizing the dynamic operation equipment;
step four, closing a first valve, a seventh valve and a ninth valve, starting a test molecular pump, filling liquid nitrogen into a liquid nitrogen tank after the molecular pump to be tested reaches a rated rotating speed, opening the first valve, closing a fourth valve, starting timing, recording the time as tc, and recording the reading number of a first vacuum gauge as Pc; after the specified time tz is collected, the first valve, the third valve and the seventh valve are closed.
And fifthly, removing the liquid nitrogen tank, thawing the condensable gas collector, recovering the temperature to room temperature, recording the first vacuum gauge reading as Ps, recording the time as ts, and calculating the gas release amount of the dynamic operation equipment according to the formula Q1= [ Ps-Pc ] V-Q0 (ts-tc) ]/tc-tz.
The invention has the advantages and beneficial effects that:
1. the molecular pump and the liquid nitrogen cold trap are used, so that the device is prevented from generating pollutants such as oil vapor and the like, and the air release background of the device can be effectively reduced.
2. By adopting the molecular pump and the design structure of the cut-off valve, the running safety of the dynamic running equipment is protected by rapidly cutting off the dynamic running equipment under the condition of instantaneous power failure of the device.
3. The cleaning of the condensable gas collecting part in the device can be performed, so that the air release background of the device can be effectively reduced.
4. The collection container can be replaced timely according to the deflation amount of the dynamic operation equipment, and the volume V is calibrated in real time by adopting an ideal gas state equation.
5. The device can collect all gases released in the dynamic operation equipment to the testing device, and collect condensable gases and non-condensable gases separately, so that the pressure rise rate in the collecting device is reduced, and the volume of the testing device is reduced.
Drawings
Fig. 1 is a schematic diagram of a connection structure according to the present invention.
Fig. 2 is a schematic view of the condensable gas collector of fig. 1.
Wherein: 1 is a first valve; 2 is dynamic operation equipment; 3 is a second valve; 4 is a calibration container; 5 is a test molecular pump; 6 is a third valve; 7 is a liquid nitrogen tank; 8 is a condensable gas collector; 9 is a collecting container; 10 is a fourth valve; 11 is a liquid nitrogen cold trap; 12 is a total molecular pump unit; 13 is a fifth valve; 14 is a first vacuum gauge; 15 is a sixth valve; 16 is a seventh valve; 17 is an eighth valve; 18 is a ninth valve; 19 is a second vacuum gauge; 20 is an upper cover; 21 is a sealing gasket; 22 is a fastening bolt; 23 is a first flange; 24 is a container; 25 is a second flange; 26 is a handle.
Other relevant drawings may be made by those of ordinary skill in the art from the above figures without undue burden.
Detailed Description
In order to make the person skilled in the art better understand the solution of the present invention, the following describes the solution of the present invention with reference to specific embodiments.
Example 1
The utility model provides a dynamic operation equipment gas release testing arrangement, including demarcation container 4, test molecular pump 5, condensable gas collector 8, collection container 9, liquid nitrogen cold trap 11 and total molecular pump unit 12, dynamic operation equipment communicates test molecular pump, condensable gas collector, collection container, liquid nitrogen cold trap and total molecular pump unit in proper order through airtight gas pipeline, demarcation container is connected to the gas pipeline between molecular pump and the dynamic operation equipment through airtight gas pipeline, be connected with the gas pipeline branch road that keeps apart test molecular pump and whole pipeline between demarcation container and condensable gas collector; and a KF flange (quick connection flange) structure for realizing convenient disassembly is arranged on the cylinder body of the condensable gas collector.
The collection vessel is connected to a first vacuum gauge 14 for testing the total pressure of the collected gas and measuring the partial pressure of the non-condensable gas.
The calibration vessel is connected to a second vacuum gauge 19 for testing the internal pressure of the calibration vessel.
The condensable gas collector is equipped with a liquid nitrogen tank 7 for condensing the gas inside the condensable gas collector.
A first valve 1 is provided at the outlet of the dynamic operating device.
A second valve 3 is arranged at the outlet of the calibration container.
An eighth valve 17 is arranged on the side of the test molecular pump connected with the dynamic operation device, and a third valve 6 is arranged on the side of the test molecular pump connected with the condensable gas collector.
A ninth valve 18 is provided on the side of the gas line branch connected to the dynamic operating device and a seventh valve 16 is provided on the side of the gas line branch connected to the condensable gas collector.
A sixth valve 15 is arranged between the condensable gas collector and the collection vessel.
A fourth valve 10 is provided between the collection vessel and the cold trap.
A fifth valve 13 is arranged between the liquid nitrogen cold trap and the total molecular pump unit.
The condensable gas collector comprises an upper cover 20, a sealing gasket 21, a container 24, a first flange 23, a second flange 25 and a handle 26, wherein the sealing gasket installed through a fastening bolt 22 is arranged between the upper cover and the container to form a pressing gasket sealing structure, the first flange and the second flange are arranged on two sides of the container and are connected into quick-dismantling interfaces of a quick flange structure, the quick-dismantling interfaces are used for realizing quick butt joint and disassembly, and the handle is arranged on the upper end face of the upper cover and used for opening the upper cover.
Example 2
The device for testing the gas release amount of the dynamic operation equipment comprises a calibration container 4, a test molecular pump 5, a liquid nitrogen tank 7, a condensable gas collector 8, a collection container 9, a liquid nitrogen cold trap 11, a total molecular pump unit 12, a first vacuum gauge 14, a second vacuum gauge 19 and valves (1, 3, 6, 10, 13, 15, 16, 17 and 18).
The test molecular pump 5 is used to collect the evolved gas from the dynamic operating device. The test molecular pump 5 is an oil-free pump, so that the problem that the diffusion pump in the collection method is oil-reflective, causes a large background and causes pollution to dynamic operation equipment is solved. When the power is cut instantaneously, a certain pumping speed is maintained, and the pumping can be continued in a short period when the test volume pressure is not high, so that the eighth valve 17 is rapidly closed at the moment, and the operation safety of the dynamic operation equipment can be ensured.
The condensable gas collector 8 is composed of an upper cover 20, a sealing gasket 21, fastening bolts 22, a first flange 23, a container 24, a second flange 25, and a handle 26 for condensing the collected condensable gas. Compared with a device for directly collecting gas by a condensation method, the device reduces the boosting rate of the testing device, reduces the volume of the testing device, and has more advantages for operation equipment which releases most of gas which is condensable. The upper cover 20, the sealing gasket 21, the fastening bolt 22 and the container 24 form a pressing gasket sealing structure for sealing the condensable gas collector 8. Removing the fastening bolts 22 and pulling the handles 26 opens the condensable gas collector 8 for internal cleaning to reduce background. The first flange 23 and the second flange 25 are KF structure quick-release interfaces and are used for realizing quick butt joint with the rest parts of the device.
The liquid nitrogen tank 7 is used for freezing the condensable gas collector 8, condensing the gas when collecting the gas, and taking down the gas when actually testing the discharge amount Q, so that the condensable gas collector 8 is restored to the room temperature.
The collection vessel 9 is used to collect non-condensable gases, with which the test volume V is formed after thawing of the condensable gas collector 8.
The liquid nitrogen cold trap 11 is provided with liquid nitrogen for condensation, so that oil pump oil return of a front-stage mechanical pump and the like in the process of evacuating the total molecular pump unit 12 is prevented.
The total molecular pump unit 12 is firstly used for evacuating the testing device when the first valve 1 is closed, and when the pressure of the first vacuum gauge 14 and the second vacuum gauge 19 is lower than 1Pa, the first valve 1 is opened to evacuate the dynamic operation equipment 2, so that the safe operation of the dynamic operation equipment is ensured.
The first vacuum gauge 14 is used to test the total pressure P of the collected gas and can measure the partial pressure of the non-condensable gas. When the pressure of the first vacuum gauge 14 rises too fast or too slow, the collection container 9 can be replaced according to the rising rate.
The volume V of the collection vessel 9 is known and the internal pressure P is measured by a second vacuum gauge 19. According to the ideal gas state equation, calibration of the test volume V consisting of the third valve 6, the condensable gas collector 8, the collection vessel 9, the fourth valve 10, the first vacuum gauge 14, the sixth valve 15, the seventh valve 16 can be achieved. After the calibration is completed, the second valve 3 is closed, and the evacuation path of the test molecular pump 5 is converted.
Example 3
When the device for testing the ventilation capacity of the dynamic operation equipment is used for testing the ventilation capacity of the operation equipment, the device is used for testing the ventilation capacity of the dynamic operation equipment according to the following steps:
1. the apparatus 2 and the ventilation testing device are connected in the manner shown in fig. 1. Wherein, the first valve 1 is kept closed, the liquid nitrogen tank 7 is not installed, liquid nitrogen is injected into the liquid nitrogen cold trap 11, and the freezing is maintained for more than 2 hours.
2. Starting a forepump of the total molecular pump unit 12, sequentially opening a fifth valve 13, a fourth valve 10, a sixth valve 15, a seventh valve 16, a third valve 6, an eighth valve 17 and a ninth valve 18, evacuating the deflation amount testing device, starting a molecular pump of the total molecular pump unit 12 after the readings of the first vacuum gauge 14 and the second vacuum gauge 19 are smaller than 100Pa, evacuating the readings of the first vacuum gauge 14 and the second vacuum gauge 19 to below 1Pa, and continuously evacuating for more than 8 hours.
3. Closing the third valve 6, the fourth valve 10 and the seventh valve 16 and starting timing. The pressure rise P of the test volume V for a specified time t is measured with the first vacuum gauge 14, and the bleed-off background Q0 is calculated with the formula q=g/t=pv/t.
4. And opening the third valve 6, the fourth valve 10 and the seventh valve 16, continuously evacuating the air discharge amount testing device, and evacuating the readings of the first vacuum gauge 14 and the second vacuum gauge 19 to below 1 Pa.
5. The first valve 1 is opened, and the dynamic operation device is evacuated until the readings of the first vacuum gauge 14 and the second vacuum gauge 19 are less than 1 Pa.
6. The first valve 1, the seventh valve 16 and the ninth valve 18 are closed, and the test molecular pump 5 is started.
7. After the molecular pump 5 to be tested reaches the rated rotation speed, a liquid nitrogen tank 7 is installed at a marked position in the figure and filled with liquid nitrogen. The first valve 1 is opened, the fourth valve 10 is closed, and the time is counted as tc, and the reading of the first vacuum gauge 14 is counted as Pc.
8. If the device is in instantaneous power failure, the eighth valve 17 is rapidly closed, so that the operation safety of the dynamic operation equipment can be ensured.
9. When the pressure of the first vacuum gauge 14 is lower than 100Pa after the specified time tz is collected, the first valve 1, the third valve 6 and the seventh valve 16 are closed.
10. The liquid nitrogen tank 7 was removed, the condensable gas collector 8 was thawed, and the temperature was returned to room temperature, at which time the first vacuum gauge 14 read number was denoted as Ps and the time was denoted as ts.
11. The discharge amount of the dynamically operated device is calculated according to the formula Q1= [ Ps-Pc ] V-Q0 (ts-tc) ]/tc-tz.
12. After the deflation amount is calculated, all valves of the deflation amount measuring device except the first valve 1 are opened, the total molecular pump unit 12 is used for evacuating devices to be less than 1Pa, the molecular pump 5 and the total molecular pump unit 12 are stopped to be tested, and the deflation amount test is completed.
13. The collection container 9 can be replaced according to the range of the test bleed. And (5) removing and reinstalling, and calibrating the test volume V in real time by using the standard fixed component and the ideal gas state equation conversion type P1V1=P2V2.
14. After the test is completed, the condensable gas collector 8 is disassembled for thorough cleaning, and background air bleed is reduced.
The foregoing has described exemplary embodiments of the invention, it being understood that any simple variations, modifications, or other equivalent arrangements which would not unduly obscure the invention may be made by those skilled in the art without departing from the spirit of the invention.
Claims (10)
1. The utility model provides a dynamic operation equipment air release volume testing arrangement which characterized in that: the dynamic operation device is sequentially communicated with the test molecular pump, the condensable gas collector, the collection container, the liquid nitrogen cold trap and the total molecular pump unit through a closed gas pipeline, the calibration container is connected to a gas pipeline between the molecular pump and the dynamic operation device through a closed gas pipeline, and a gas pipeline branch for isolating the test molecular pump from the whole pipeline is connected between the calibration container and the condensable gas collector; a quick connecting flange structure for realizing convenient disassembly is arranged on the cylinder body of the condensable gas collector;
the collecting container is connected with a first vacuum gauge which is used for testing the total pressure of the collecting gas and can measure the partial pressure of the non-condensable gas; the calibration container is connected with a second vacuum gauge for testing the internal pressure of the calibration container;
the condensable gas collector is equipped with a liquid nitrogen tank for condensing the gas within the condensable gas collector.
2. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 1, wherein: a first valve is disposed at an outlet of the dynamic operating device.
3. A dynamically-operated device ventilation testing apparatus in accordance with claim 2, wherein: and a second valve is arranged at the outlet of the calibration container.
4. A dynamically-operated device ventilation testing apparatus in accordance with claim 3, wherein: an eighth valve is arranged on one side of the test molecular pump connected with the dynamic operation equipment, and a third valve is arranged on one side of the test molecular pump connected with the condensable gas collector.
5. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 4, wherein: a ninth valve is arranged on one side of the gas pipeline branch connected with the dynamic operation equipment, and a seventh valve is arranged on one side of the gas pipeline branch connected with the condensable gas collector.
6. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 5, wherein: a sixth valve is disposed between the condensable gas collector and the collection vessel.
7. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 6, wherein: a fourth valve is arranged between the collecting container and the liquid nitrogen cold trap.
8. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 7, wherein: and a fifth valve is arranged between the liquid nitrogen cold trap and the total molecular pump unit.
9. The apparatus for testing the ventilation capacity of a dynamic operation device according to claim 8, wherein: the condensable gas collector comprises an upper cover, a sealing gasket, a container, a first flange, a second flange and a handle, wherein the sealing gasket installed through a fastening bolt is arranged between the upper cover and the container to form a pressing gasket sealing structure, the first flange and the second flange are arranged on two sides of the container and are connected into a quick flange structure quick-dismantling interface for realizing quick butt joint and disassembly, and the handle is arranged on the upper end face of the upper cover and used for opening the upper cover.
10. The method for testing a device for testing the ventilation capacity of a dynamically operated apparatus according to claim 9, wherein the method comprises the steps of:
step one, keeping a first valve closed, starting a total molecular pump unit and vacuumizing the whole air release testing device;
closing a third valve, a fourth valve and a seventh valve, measuring the pressure rising amount P of the test volume V within a specified time t, and calculating a background Q0; vacuumizing again after the measurement is completed;
step three, opening a first valve, and vacuumizing the dynamic operation equipment;
step four, closing a first valve, a seventh valve and a ninth valve, starting a test molecular pump, filling liquid nitrogen into a liquid nitrogen tank after the molecular pump to be tested reaches a rated rotating speed, opening the first valve, closing a fourth valve, starting timing, recording the time as tc, and recording the reading number of a first vacuum gauge as Pc; closing the first valve, the third valve and the seventh valve after the specified time tz is collected;
and fifthly, removing the liquid nitrogen tank, thawing the condensable gas collector, recovering the temperature to room temperature, recording the first vacuum gauge reading as Ps, recording the time as ts, and calculating the gas release amount of the dynamic operation equipment according to the formula Q1= [ Ps-Pc ] V-Q0 (ts-tc) ]/tc-tz.
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| CN201810215549.0A CN108562343B (en) | 2018-03-15 | 2018-03-15 | Device and method for testing ventilation capacity of dynamic operation equipment |
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| CN201810215549.0A CN108562343B (en) | 2018-03-15 | 2018-03-15 | Device and method for testing ventilation capacity of dynamic operation equipment |
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| CN109854484A (en) * | 2019-03-26 | 2019-06-07 | 核工业理化工程研究院 | Vacuum equipment outgassing constituent collection device |
| CN110057629A (en) * | 2019-03-26 | 2019-07-26 | 核工业理化工程研究院 | A kind of vacuum equipment deflation sampling method |
| CN109975083A (en) * | 2019-03-26 | 2019-07-05 | 核工业理化工程研究院 | A kind of vacuum equipment outgassing constituent collection method |
| CN109781472A (en) * | 2019-03-26 | 2019-05-21 | 核工业理化工程研究院 | Vacuum equipment deflation sampler |
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