CN108562217B - Capacitance displacement sensor for optimizing signal-to-noise ratio in real time - Google Patents
Capacitance displacement sensor for optimizing signal-to-noise ratio in real time Download PDFInfo
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Abstract
The invention discloses a capacitance displacement sensor for optimizing a signal-to-noise ratio in real time, which comprises a mechanical sensitive probe, a bridge circuit, a preamplifier, a signal processing circuit, a phase sensitive detection circuit, a low-pass filter, a signal-to-noise ratio measuring device and a carrier frequency adjusting device, wherein the bridge circuit is connected with the preamplifier; the input end of the bridge circuit is connected to the output end of the mechanical sensitive probe, the input end of the preamplifier is connected to the output end of the bridge circuit, the input end of the signal processing circuit is connected to the output end of the preamplifier, the first input end of the phase-sensitive detection circuit is connected to the output end of the signal processing circuit, the second input end of the phase-sensitive detection circuit is used for connecting a carrier signal, the input end of the low-pass filter is connected to the output end of the phase-sensitive detection circuit, the input end of the signal-to-noise ratio measuring device is connected to the output end of the preamplifier, the input end of the carrier frequency adjusting device is connected to the output end of the signal-.
Description
Technical Field
The invention belongs to the field of capacitance displacement detection, and particularly relates to a capacitance displacement sensor for optimizing a signal-to-noise ratio in real time.
Background
A high-precision capacitive displacement sensor is used as a traditional non-contact sensor and is mainly applied to inertial measurement devices based on capacitance change, such as gyroscopes, accelerometers and the like. The high-precision capacitance displacement sensor mainly comprises a capacitance bridge, a front-end circuit, a phase-sensitive detection circuit, a low-pass circuit and the like. At present, high-precision capacitance displacement sensors based on transformer bridges are widely applied to space electrostatic accelerometers and inertial sensors. The resolution has reached 10-7pF/Hz1/2And the magnitude, corresponding to displacement detection, can reach picometer magnitude and approach the thermal noise level of a circuit. Because the resolution of the capacitance displacement sensing circuit is extremely high, the circuit is required to be always in a working state with high signal-to-noise ratio, and the traditional circuitOnce the model parameters of the device are determined and welded, the working frequency parameters and the like are fixed, and the actually expected working parameters (such as carrier frequency and the like) are easily influenced by the external environment, so that the circuit deviates or fails to work in the working state with the optimal signal-to-noise ratio, and the resolution of capacitance displacement sensing is influenced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a capacitance displacement sensor for optimizing the signal-to-noise ratio in real time, and aims to solve the problem that the resolution of capacitance displacement sensing is low because a working circuit cannot work in the state of the initially set optimal signal-to-noise ratio (working frequency) due to factors such as time drift, working temperature environment change and the like in a circuit in the prior art.
The invention provides a capacitance displacement sensor for optimizing signal-to-noise ratio in real time, which comprises: the device comprises a mechanical sensitive probe, a bridge circuit, a preamplifier, a signal processing circuit, a phase sensitive detection circuit, a low-pass filter, a signal-to-noise ratio measuring device and a carrier frequency adjusting device; the input end of the mechanical sensitive probe is used for receiving a carrier signal, the input end of the bridge circuit is connected to the output end of the mechanical sensitive probe, the input end of the preamplifier is connected to the output end of the bridge circuit, the input end of the signal processing circuit is connected to the output end of the preamplifier, the first input end of the phase sensitive detection circuit is connected to the output end of the signal processing circuit, the second input end of the phase sensitive detection circuit is used for connecting the carrier signal, the input end of the low-pass filter is connected to the output end of the phase sensitive detection circuit, the input end of the signal-to-noise ratio measuring device is connected to the output end of the preamplifier, the input end of the carrier frequency adjusting device is connected to the output end of.
Still further, the mechanically sensitive probe comprises: an inertial mass, a first capacitance and a second capacitance; the first capacitor and the second capacitor are respectively connected to two input ends of the bridge circuit, and when the first capacitor and the second capacitor are not equal in size, the bridge circuit outputs a modulation signal containing differential capacitor displacement information.
Furthermore, when an inertial reference object in the mechanical sensitive probe moves in an inertial system, the size of a first capacitor and a second capacitor formed by the inertial reference object and a frame changes, the first capacitor and the second capacitor which change slowly are modulated in a bridge circuit through carrier signals, a pre-amplifier further amplifies differential modulation signals, a signal processing circuit further conditions the amplified signals, a phase sensitive detection circuit demodulates and separates out the first capacitor and the second capacitor differential capacitance signals which change slowly, a low-frequency differential capacitance signal is obtained after a high-frequency signal is filtered out by a low-pass filter, a signal-to-noise ratio measuring device analyzes the signal after the differential capacitance signal pre-amplifier, and the whole displacement measuring system is located at an optimal working point through a carrier parameter adjusting device, so that the performance is optimal.
Further, the signal-to-noise ratio measuring apparatus includes: the data acquisition module and the signal-to-noise ratio optimal working frequency analysis module are connected in sequence; the input end of the data acquisition module is used as the input end of the signal-to-noise ratio measuring device, and the output end of the signal-to-noise ratio optimal working frequency analysis module is used as the output end of the signal-to-noise ratio measuring device; the data acquisition module is used for acquiring a voltage signal v output by the preamplifier; and the signal-to-noise ratio optimal working frequency analysis module is used for carrying out spectrum analysis on the voltage signal v to obtain the corresponding working frequency when the voltage noise is lowest.
Further, the carrier frequency adjusting means includes: the control module, the lookup table module, the DAC digital-to-analog conversion module and the filter module are connected in sequence; the input end of the control module is used as the input end of the carrier frequency adjusting device, and the output end of the filter module is used as the output end of the carrier frequency adjusting device; the control module is used for controlling the lookup table module to output a carrier digital signal corresponding to the optimal working frequency according to the optimal working frequency output by the signal-to-noise ratio measuring device; the DAC digital-to-analog conversion module is used for converting the carrier digital signal into a carrier analog signal; the filter module is used for carrying out band-pass filtering on the carrier analog signal and outputting a carrier control signal for controlling the carrier signal to work at the optimal working frequency.
The invention mainly adds a measuring device for measuring the optimal signal-to-noise ratio (working frequency) of the capacitance displacement sensing circuit in real time, adjusts and optimizes the amplitude, the frequency and the phase of a carrier signal of capacitance displacement sensing in real time through the actual measurement of the corresponding working frequency of the optimal signal-to-noise ratio and further through a carrier frequency adjusting device, so that the circuit is not influenced by external environment interference such as time drift, temperature and the like, works in the optimal state of the circuit in real time, ensures that the capacitance displacement sensing noise does not change, and further meets the displacement detection requirement of long-term ultra-high precision.
Drawings
Fig. 1 is a schematic diagram of a capacitance displacement sensing device for optimizing a signal-to-noise ratio in real time according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a signal-to-noise ratio measuring apparatus in a capacitance displacement sensing apparatus for optimizing a signal-to-noise ratio in real time according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a carrier parameter adjusting device in a capacitance displacement sensing device for optimizing a signal-to-noise ratio in real time according to an embodiment of the present invention.
Wherein 1 is a carrier signal; 2 is a mechanically sensitive probe, 21 is an inertial reference mass in the mechanically sensitive probe, 22 is a first capacitance, 23 is a second capacitance, 22 and 23 form a pair of capacitances; 3 is a bridge circuit; 4 is a preamplifier; 5 is a signal processing circuit; 6 is a phase sensitive detector circuit; 7 is a low pass filter; 8 is a signal-to-noise ratio measuring device, and 9 is a carrier parameter adjusting device.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention provides a device for dynamically adjusting and improving the signal-to-noise ratio of a differential capacitance sensor, which is suitable for various fields requiring high-precision capacitance displacement sensing circuits, such as an accelerometer, a space inertial sensor and other inertial instruments or geophysical measurement and observation instruments. The invention combines the signal-to-noise ratio measuring device to realize the expected working state of the capacitance displacement sensing circuit, thereby realizing high-precision displacement detection and ensuring the performance of the whole machine.
Fig. 1 illustrates a capacitance displacement sensing device for optimizing a signal-to-noise ratio in real time according to an embodiment of the present invention, and only the portions related to the embodiment of the present invention are shown for convenience of description, which is detailed as follows:
the capacitance displacement sensing device for optimizing the signal-to-noise ratio in real time comprises: the device comprises a mechanical sensitive probe 2, a bridge circuit 3, a preamplifier 4, a signal processing circuit 5, a phase sensitive detection circuit 6, a low-pass filter 7, a signal-to-noise ratio measuring device 8 and a carrier frequency adjusting device 9; the input end of the mechanical sensitive probe 2 is used for receiving a carrier signal 1, the input end of the bridge circuit 3 is connected to the output end of the mechanical sensitive probe 2, the input end of the preamplifier 4 is connected to the output end of the bridge circuit 3, the input end of the signal processing circuit 5 is connected to the output end of the preamplifier 4, the first input end of the phase sensitive detection circuit 6 is connected to the output end of the signal processing circuit 5, the second input end of the phase sensitive detection circuit 6 is used for connecting the carrier signal 1, the input end of the low-pass filter 7 is connected to the output end of the phase sensitive detection circuit 6, the input end of the signal-to-noise ratio measuring device 8 is connected to the output end of the preamplifier 4, the input end of the carrier frequency adjusting device 9 is connected to the output end of the signal-to-.
The mechanically sensitive probe 2 comprises: the mechanically sensitive probe 2 comprises: the inertial body 21, the first capacitor 22 and the second capacitor 23 are respectively connected to two input ends of the bridge circuit 3, and when the first capacitor 22 and the second capacitor 23 are not equal, the bridge circuit 3 outputs a modulation signal containing differential capacitance displacement information.
When an inertial reference object 21 in a mechanical sensitive probe 2 moves in an inertial system, the size of a first capacitor 22 and a second capacitor 23 formed by the inertial reference object and a frame changes, the first capacitor 22 and the second capacitor 23 which change slowly are modulated in a bridge circuit 3 through a carrier signal 1, a preamplifier 4 further amplifies a differential modulation signal, a signal processing circuit 5 further conditions the amplified signal, such as filtering and the like, a phase sensitive detection circuit 6 is mainly used for demodulating and separating the differential capacitance signals of the first capacitor 22 and the second capacitor 23 which change slowly, a low-pass filter 7 finally filters out a high-frequency signal, so that a low-frequency differential capacitance signal is obtained, namely capacitance displacement sensing measurement is realized, a signal-to-noise ratio measuring device 8 carries out signal-to-noise ratio analysis on the signal after the differential capacitance signal preamplifier 4 and searches for an optimal working point, then the whole displacement measuring system is positioned at the optimal working point through the carrier parameter adjusting device 9, so that the performance is optimal.
In the embodiment of the present invention, the preamplifier 4 may be a low noise operational amplifier; the signal processing circuit 5 may be a combination circuit of a low-pass filter and a high-pass filter; the phase sensitive detection circuit 6 can be implemented by using a switch demodulation or multiplication demodulation circuit.
In the embodiment of the present invention, the signal-to-noise ratio measuring apparatus 8 includes: the data acquisition module 81 and the signal-to-noise ratio optimum working frequency analysis module 82 are connected in sequence, the data acquisition module 81 is used for acquiring a voltage signal v output by the preamplifier 4, wherein the acquisition frequency capacity needs to reach hundreds of kHz; the signal-to-noise ratio optimal working frequency analysis module 82 is configured to perform spectrum analysis on the voltage signal v to obtain a working frequency corresponding to the lowest voltage noise, that is, an optimal working frequency of the signal-to-noise ratio; wherein the spectral analysis may specifically be a fourier spectral analysis. In the embodiment of the present invention, the carrier frequency adjusting device 9 includes: the device comprises a control module 90, a lookup table module 91, a DAC (digital-to-analog converter) module 92 and a filter module 93 which are connected in sequence, wherein the input end of the control module 90 is used as the input end of a carrier frequency adjusting device 9, and the output end of the filter module 93 is used as the output end of the carrier frequency adjusting device 9; the control module 90 is configured to control the lookup table module 91 to output a carrier digital signal corresponding to the optimal operating frequency according to the optimal operating frequency output by the snr measuring device 8; the DAC digital-to-analog conversion module 92 is configured to convert the carrier digital signal into a carrier analog signal; the filter module 93 is configured to perform band-pass filtering on the carrier analog signal and output a carrier control signal for controlling the carrier signal 1 to operate at the optimal operating frequency.
The invention mainly adds a measuring device for measuring the optimal signal-to-noise ratio (working frequency) of the capacitance displacement sensing circuit in real time, adjusts and optimizes the amplitude, the frequency and the phase of a carrier signal of capacitance displacement sensing in real time through the actual measurement of the corresponding working frequency of the optimal signal-to-noise ratio and further through a carrier frequency adjusting device, so that the circuit is not influenced by external environment interference such as time drift, temperature and the like, works in the optimal state of the circuit in real time, ensures that the capacitance displacement sensing noise does not change, and further meets the displacement detection requirement of long-term ultra-high precision.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A capacitance displacement sensor for optimizing signal-to-noise ratio in real time, comprising: the device comprises a mechanical sensitive probe (2), a bridge circuit (3), a preamplifier (4), a signal processing circuit (5), a phase sensitive detection circuit (6), a low-pass filter (7), a signal-to-noise ratio measuring device (8) and a carrier frequency adjusting device (9);
the input end of the mechanical sensitive probe (2) is used for receiving a carrier signal (1), the input end of the bridge circuit (3) is connected to the output end of the mechanical sensitive probe (2), the input end of the preamplifier (4) is connected to the output end of the bridge circuit (3), the input end of the signal processing circuit (5) is connected to the output end of the preamplifier (4), the first input end of the phase sensitive detection circuit (6) is connected to the output end of the signal processing circuit (5), the second input end of the phase sensitive detection circuit (6) is used for connecting the carrier signal (1), the input end of the low-pass filter (7) is connected to the output end of the phase sensitive detection circuit (6), the input end of the signal-to-noise ratio measuring device (8) is connected to the output end of the preamplifier (4), and the input end of the carrier frequency adjusting device (9) is connected to the output end of the signal-, the output end of the carrier frequency adjusting device (9) is connected to the input end of the mechanical sensitive probe (2);
the signal-to-noise ratio of the circuit is measured in real time through the signal-to-noise ratio measuring device (8), and the optimal working frequency of the signal-to-noise ratio is obtained according to the signal-to-noise ratio; the carrier frequency adjusting device (9) outputs a carrier digital signal corresponding to the optimal working frequency of the signal-to-noise ratio according to the optimal working frequency of the signal-to-noise ratio output by the signal-to-noise ratio measuring device (8), the carrier digital signal is converted into a carrier analog signal, the carrier analog signal is subjected to band-pass filtering and then a carrier control signal is output, and the carrier control signal controls the carrier signal to work at the optimal working frequency.
2. A capacitive displacement transducer according to claim 1, wherein the mechanically sensitive probe (2) comprises: an inertial mass (21), a first capacitance (22) and a second capacitance (23); the first capacitor (22) and the second capacitor (23) are respectively connected to two input ends of the bridge circuit (3), and when the first capacitor (22) and the second capacitor (23) are not equal in size, the bridge circuit (3) outputs a modulation signal containing differential capacitor displacement information.
3. The capacitance displacement transducer according to claim 2, wherein when the inertial reference object in the mechanical sensing probe moves in the inertial system, the first capacitance and the second capacitance formed by the inertial reference object and the frame change in magnitude, the first capacitance and the second capacitance that change slowly are modulated in the bridge circuit by the carrier signal, the differential modulation signal is further amplified by the preamplifier, the signal processing circuit further conditions the amplified signal, the phase sensitive detection circuit demodulates and separates the first capacitance and the second capacitance differential capacitance signal that change slowly, the low-frequency differential capacitance signal is obtained after the high-frequency signal is filtered out by the low-pass filter, the signal-to-noise ratio measuring device analyzes the signal after the preamplifier of the differential capacitance signal and the whole displacement measuring system is located at the optimum operating point by the carrier frequency adjusting device, thereby optimizing performance.
4. A capacitive displacement transducer according to any of claims 1-3, characterized in that the signal-to-noise ratio measuring means (8) comprises: the data acquisition module (81) and the signal-to-noise ratio optimal working frequency analysis module (82) are connected in sequence;
the input end of the data acquisition module (81) is used as the input end of the signal-to-noise ratio measuring device (8), and the output end of the signal-to-noise ratio optimal working frequency analysis module (82) is used as the output end of the signal-to-noise ratio measuring device (8); the data acquisition module (81) is used for acquiring a voltage signal v output by the preamplifier (4); and the signal-to-noise ratio optimal working frequency analysis module (82) is used for carrying out spectrum analysis on the voltage signal v to obtain the corresponding working frequency when the voltage noise is lowest.
5. A capacitive displacement transducer according to any of claims 1 to 3, characterized in that the carrier frequency adjustment means (9) comprises: the device comprises a control module (90), a lookup table module (91), a DAC (digital-to-analog converter) module (92) and a filter module (93) which are connected in sequence;
the input end of the control module (90) is used as the input end of the carrier frequency adjusting device (9), and the output end of the filter module (93) is used as the output end of the carrier frequency adjusting device (9);
the control module (90) is used for controlling the lookup table module (91) to output a carrier digital signal corresponding to the optimal working frequency according to the optimal working frequency output by the signal-to-noise ratio measuring device (8); the DAC digital-to-analog conversion module (92) is used for converting the carrier digital signal into a carrier analog signal; the filter module (93) is configured to perform band-pass filtering on the carrier analog signal and output a carrier control signal for controlling the carrier signal (1) to operate at the optimal operating frequency.
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| CN113167564B (en) * | 2018-12-11 | 2023-06-27 | 日商乐华股份有限公司 | Capacitive sensor |
| CN111830284B (en) * | 2020-07-07 | 2021-10-08 | 华中科技大学 | Ground test method and device for circuit function of space electrostatic accelerometer |
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| CN102162769A (en) * | 2011-01-05 | 2011-08-24 | 中国海洋石油总公司 | Fatigue multi-point wireless monitoring system of marine riser |
| CN102394704A (en) * | 2011-07-15 | 2012-03-28 | 华中科技大学 | Device for automatically adjusting output power of array calibration signal source |
| CN106130507A (en) * | 2016-06-17 | 2016-11-16 | 中国电子科技集团公司第十研究所 | High-speed parallel bit synchronization wave filter time-varying coefficient updates loop |
| CN206563546U (en) * | 2017-03-15 | 2017-10-17 | 郑州科技学院 | Simple capacitive displacement transducer |
| CN208282768U (en) * | 2018-06-05 | 2018-12-25 | 华中科技大学 | A kind of capacitance displacement sensor of real-time optimization signal-to-noise ratio |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162769A (en) * | 2011-01-05 | 2011-08-24 | 中国海洋石油总公司 | Fatigue multi-point wireless monitoring system of marine riser |
| CN102394704A (en) * | 2011-07-15 | 2012-03-28 | 华中科技大学 | Device for automatically adjusting output power of array calibration signal source |
| CN106130507A (en) * | 2016-06-17 | 2016-11-16 | 中国电子科技集团公司第十研究所 | High-speed parallel bit synchronization wave filter time-varying coefficient updates loop |
| CN206563546U (en) * | 2017-03-15 | 2017-10-17 | 郑州科技学院 | Simple capacitive displacement transducer |
| CN208282768U (en) * | 2018-06-05 | 2018-12-25 | 华中科技大学 | A kind of capacitance displacement sensor of real-time optimization signal-to-noise ratio |
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