CN108557826A - One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser - Google Patents
One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser Download PDFInfo
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- CN108557826A CN108557826A CN201810682355.1A CN201810682355A CN108557826A CN 108557826 A CN108557826 A CN 108557826A CN 201810682355 A CN201810682355 A CN 201810682355A CN 108557826 A CN108557826 A CN 108557826A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
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Abstract
Material formula crystal silicon waste recovery, which is washed, the invention discloses one kind removing adhesive dispenser, including arc upper cover, body, wash bowl and mounting bracket are provided in body, body is divided into clean room, wet method removes photoresist room and burning is removed photoresist room, wet method interior of removing photoresist is provided with glue, and the remove photoresist bottom of room of burning is provided with burner；The upper end of body is provided with mounting bracket, two groups of rotary cylinder is provided in mounting bracket, the shaft that two groups of rotary cylinder connects material washing machine structure, material washing machine structure includes the first sieve and the second sieve, first sieve and the second sieve are hinged, connection ring is connected on first sieve, connection ring is hinged with wash bowl, and is rotatably connected with wash bowl inner wall.The purpose of the present invention is in view of the above problems, offer one kind washing material formula crystal silicon waste recovery and removes adhesive dispenser, which is sieved the crystal silicon waste material fallen by the first sieve and the second sieve back and forth, so that the dust being sticked on crystal silicon is cleaned up, effectively increases the cleaning speed of crystal silicon waste material.
Description
Technical field
The invention belongs to the recycling field of crystal silicon waste material, specially one kind washing material formula crystal silicon waste recovery and removes adhesive dispenser.
Background technology
After the mankind enter 21 century, with the fast development of semi-conductor industry, high-purity crystal silicon materials have obtained answering extensively
With in chip processes are made, often due to generating crystal silicon waste material in off quality or cutting process, if can be by this
A little waste material comprehensive reutilizations, it will reduce environmental pollution, improve the utilization rate of the energy, to alleviating China's monocrystalline silicon and polysilicon
It is in short supply, reduce import be of great importance.
Monocrystalline waste material and polycrystalline waste material are had any different with other raw materials, have remaining UV glue and viscose top on waste material, if
Not exclusively removal will lead to problems such as polycrystal silicon ingot purity not up to standard, before crystal silicon waste material removes photoresist technology, need to crystal silicon waste material
It is washed, the sewage direct emission after washing causes water resource serious waste, and needs to dry after washing, when causing
Between extend, greatly reduce efficiency of removing photoresist.
Invention content
The purpose of the present invention is removing adhesive dispenser in view of the above problems, provide one kind and washing material formula crystal silicon waste recovery, the device
By the first sieve and the second sieve, the crystal silicon waste material fallen into is sieved back and forth, so that the dust being sticked on crystal silicon is cleaned up, has
The cleaning speed that effect improves crystal silicon waste material ensures its quality of removing photoresist then by process of drying, burn.
In order to achieve the above object, the technical solution adopted by the present invention is：One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser,
Including arc upper cover, organism is arranged in the upper cover lower end, which is characterized in that is provided with wash bowl and installation in the body
Frame, is divided into clean room, wet method removes photoresist room and burning is removed photoresist room by body, and wet method interior of removing photoresist is provided with and removes photoresist
Liquid, the remove photoresist bottom of room of burning are provided with burner；The upper end of the body is provided with mounting bracket, is provided in the mounting bracket
Two groups of rotary cylinder, the shaft that two groups of the rotary cylinder is stretched into across body connects material washing machine structure in wash bowl, described to wash material
Mechanism includes the first sieve and the second sieve for having circular configuration, and first sieve and the second sieve are hinged, the second sieve
It is fixedly connected with shaft, connection ring is connected on the first sieve, the connection ring is hinged with wash bowl, and is revolved with wash bowl inner wall
Turn connection；The upper end of the wash bowl offers connection wet method and removes photoresist the feed opening of room.
Further, wet method interior of removing photoresist is provided with column, and spiral plate, the column are provided on the column
On be provided with opening, there are multiple hot gas mouths with open communication, described its section of hot gas mouth is located at two spirals on shaft
Between plate；The lower end of the column is provided with heating pipe, and the heating pipe is connect with the burning room of removing photoresist, and wet method, which is removed photoresist, indoor also to be set
It is equipped with gas outlet.
Further, suction pump is provided in the outside body of wash bowl, circulating water pipe connects suction pump, and one end is stretched
Enter clean room, the other end is connected to the bottom of wash bowl；Be provided in the clean room with the inclined clean room's bottom plate of horizontal plane,
The recirculated water nozzle is located at the upper end of clean room's bottom plate, and inserted with filtering shank on the upper lid, the filtering shank is by handle
Head, shank, shank frame form, and strainer is provided in the shank frame, and the filtering shank stretches into body, shank frame and filter
Net is formed by notch face recirculated water nozzle.
Further, one group of rotary cylinder is provided on the mounting bracket, on the piston bull stick of one group of the rotary cylinder
Conical drum is installed, draws material cone cylinder and material rotating plate, the conical drum and draws material cone cylinder and is located at wet method and remove photoresist interior, stirring
Plate is located at interior of removing photoresist of burning, and multiple filtration holes and coiled strip folded plate is provided on the stack shell of the conical drum, described draws material
Offer multiple for being connected the material guide groove that material is fallen from coiled strip folded plate in cone cylinder, the wash bowl is square tube,
It is provided with sealing block on bottom and body, draws material cone cylinder and sealing block and coordinates and separate wet method room of removing photoresist with the burning room of removing photoresist, institute
Its section of the bottom plate on body is stated to flush with conical drum.
Further, the coiled strip folded plate is " Z " type structure, and the side of the conical drum is provided with side shield.
Further, the sealing block is made of seal groove and second connecting portion, and the seal groove is connect with second
Portion is connected by first connecting portion, and the angle not less than 90 degree is formed between first connecting portion and second connecting portion.
Further, it is described draw be fixed with sealing ring in material cone cylinder, the sealing ring coordinates with seal groove.
Further, the burning removes photoresist to be provided between room and burner and sets material web plate, and burning is removed photoresist the lower end of room
It is provided with combustion bin, the put flitch is hinged by axis pin with combustion bin, and burning shell, the combustion are provided on the combustion bin
It burns and is fixed with connecting rod on shell, the end bottom for setting material web plate is provided with support plate, and sliding slot is offered in the support plate,
The support plate is flexibly connected by sliding slot with connecting rod, and the other end of the support plate is connected with Dump gate, the Dump gate one
End and burning housing hinge, the other end close block by rotation and coordinate with combustion bin, and draw ring is provided in the Dump gate, described
Rotation is closed block and is connect with combustion bin by shaft core.
Further, the upper end of the burning shell is provided with arc injection plate, is offered on the arc injection plate more
A injection nozzle is provided with multiple ejector pipes on the inner wall of burning shell, and the ejector pipe is connect with injection nozzle, described
The lower end of ejector pipe is connect with oxygen hose, and the burner is placed in burning housing central section.
Beneficial effects of the present invention are：
1. the crystal silicon waste material fallen into is sieved by the first sieve and the second sieve, makes to be sticked to crystal silicon by the device back and forth on the water
On dust clean up, effectively increase the cleaning speed of crystal silicon waste material, then by process of drying, burn, ensure that it goes
Colloid amount.
2. sewage is evacuated at the notch of filtering shank by suction pump, dust is blocked at strainer, by periodically to accumulation
Dust at notch and strainer is cleaned, and is realized the water cycle of wash bowl, is reduced the waste of water resource.
3. the crystal silicon waste material after cleaning falls into wet method interior of removing photoresist and can effectively avoid under the cushioning effect of spiral plate
Crystal silicon waste material directly hits conical drum, during crystal silicon waste material slide-down, by the hot gas being filled with, to crystal silicon waste material remnants aqueous
It is dried, prevents aqueous from being mixed with glue is removed, gelatin concentration is removed in reduction, takes full advantage of the heat source provided when burning.
4. waste material is rolled realization stirring through the coiled strip folded plate on conical drum, glue is made to be sufficiently submerged in；When need by
Waste material drain into burning remove photoresist room when, waste material is rolled by coiled strip folded plate, goes glue through the filter on roller by the conical drum of stirring
Water hole is discharged, and prevents glue while entering room of removing photoresist of burning；The coiled strip folded plate of " Z " type structure can reduce waste material and fall into again
In glue, by bending, the roller of pyramidal structure, most of waste material is slided in the material guide groove for drawing material cone cylinder, eventually fall into combustion
In burning-off glue room.
Coordinate with seal groove 5. drawing and being fixed with sealing ring in material cone cylinder, realizes sealing, prevent heat from distributing.
6. by pulling draw ring to open Dump gate, the material inside depths can be discharged, easy to operate, discharging is quick,
Reduce distributing for heat.
7. when to prevent burning, scraped surface blacks, and by being filled with excessive oxygen, converts flame to oxidizing flame, is filled with
Oxygen by arc injection plate, be sprayed onto combustion zone, ensure fully burning.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the partial enlargement structural representation at A in Fig. 1.
Fig. 3 is the structural schematic diagram for filtering shank.
Fig. 4 is the dimensional structure diagram of material washing machine structure.
Fig. 5 is the overlooking structure diagram of Fig. 4.
Fig. 6 is the attachment structure schematic diagram of spiral plate and column.
Fig. 7 is conical drum and draws the dimensional structure diagram of material cone cylinder.
Fig. 8 is the dimensional structure diagram of another angles of Fig. 7.
Fig. 9 is the overlooking structure diagram of Fig. 8.
Figure 10 is the structural schematic diagram that discharging and burning are removed photoresist.
Figure 11 is the partial enlargement structural representation at B in Figure 10.
Figure 12 is the dimensional structure diagram that burner is connect with arc injection plate.
Figure 13 is the dimensional structure diagram of ejector pipe installation position.
Label character described in figure is expressed as：1, body；2, upper cover；3, wash bowl；4, mounting bracket；5, rotary cylinder two
Group；6, shank is filtered；7, clean room；8, wet method is removed photoresist room；9, burning is removed photoresist room；10, spiral plate；11, shaft；12, material washing machine
Structure；14, column；15, circulating water pipe；16, suction pump；17, clean room's bottom plate；18, bottom plate；19, one group of rotary cylinder；20, pacify
It shelves；21, piston bull stick；23, conical drum；24, side shield；25, coiled strip folded plate；26, draw material cone cylinder；27, sealing ring；28、
Material rotating plate；29, combustion bin；31, sealing block；32, material web plate is set；33, axis pin；34, support plate；35, connecting rod；36, Dump gate；
37, draw ring；38, burn shell；39, burner；40, combustion chamber；41, arc injection plate；42, ejector pipe；43, oxygen hose；44、
Block is closed in rotation；45, shaft core；46, heating pipe；47, gas outlet；121, connection ring；122, the first sieve；123, the second sieve；140、
Opening；141, hot gas mouth；201, feed opening；230, filtration hole；260, material guide groove；301, feed opening；310, seal groove；311,
One interconnecting piece；312, second connecting portion；340, sliding slot；420, injection spout；601, button；602, shank；603, shank frame；
6030, strainer；6031, notch.
Specific implementation mode
In order to make those skilled in the art more fully understand technical scheme of the present invention, below in conjunction with the accompanying drawings to the present invention into
The description of row detailed description, this part is only exemplary and explanatory, should not there is any limitation to protection scope of the present invention
Effect.
As shown in Fig. 1-Figure 13, concrete structure of the invention is：Including arc upper cover 2, the setting of 2 lower end of the upper cover is organic
Body 1, which is characterized in that be provided with wash bowl 3 and mounting bracket 20 in the body 1, body 1 be divided into clean room 7, wet method is gone
Glue room 8 and room 9 of removing photoresist of burning, realize that the multistage after washing and washing before removing photoresist is removed photoresist, ensure quality of removing photoresist, described is wet
Method, which is removed photoresist, is provided with glue in room 8, and the remove photoresist bottom of room 9 of burning is provided with burner 39；The upper end of the body 1 is provided with
Mounting bracket 4 is provided with two group 5 of rotary cylinder in the mounting bracket 4, and the shaft 11 that two group 5 of the rotary cylinder is stretched across body 1
Enter connection material washing machine structure 12 in wash bowl 3, the material washing machine structure 12 includes that there is the first sieve 122 and second of circular configuration to sieve
Net 122, first sieve, 122 and second sieve 122 is hinged, and the second sieve 122 is fixedly connected with shaft 11, the first sieve
Connection ring 121 is connected on 122, the connection ring 121 is hinged with wash bowl 3, and is rotatably connected with 3 inner wall of wash bowl；It is described
The upper end of wash bowl 3 offers the remove photoresist feed opening 301 of room 8 of connection wet method makes crystal silicon by pushing the second sieve 122 back and forth
Waste material sieves back and forth in aqueous, and the dust of adherency is trembled down, and connection ring 121 is rotatably connected with inner wall, ensures in discharging, brilliant
Scrap silicon is flowed out from feed opening 301.
Preferably, the wet method removes photoresist and is provided with column 14 in room 8, and spiral plate 10 is provided on the column 14, described
Column 14 on be provided with opening 140, have on shaft multiple with the 140 hot gas mouths 141 being connected to that are open, the hot gas mouth
141 its section are between two spiral plates 10；The lower end of the column 14 is provided with heating pipe 46, the heating pipe 46 and burning
It removes photoresist the connection of room 9, wet method removes photoresist and is additionally provided with gas outlet 47 in room 8, is filled with hot gas at gas outlet 47, and hot gas is from hot gas mouth
It is sprayed in 141, it is rapid to dry under the action of the crystal silicon waste material rolled on spiral plate 10 is in hot gas.
Preferably, suction pump 16 is provided in the outside body 1 of wash bowl 3, circulating water pipe 15 connects suction pump 16,
Clean room 7 is stretched into one end, and the other end is connected to the bottom of wash bowl 3；It is provided in the clean room 7 inclined net with horizontal plane
Change room bottom plate 17,15 mouthfuls of the circulating water pipe is located at the upper ends of clean room's bottom plate 17, inserted with filtering shank 6 in the upper cover 2,
The filtering shank 6 is made of button 601, shank 602, shank frame 603, and strainer 6030, institute are provided in the shank frame 603
It states filtering shank 6 to stretch into body 1, shank frame 603 is formed by 15 mouthfuls of 6031 face circulating water pipe of notch with strainer 6030；
Sewage is evacuated in clean room 7 by suction pump 16, it is filtered by filtering shank 6, impurity is retained in notch
It in 6031, is cleaned by extracting filtering shank 6 out manually, realizes the water cycle of wash bowl.
Preferably, one group 19 of rotary cylinder, the piston bull stick that one group 19 of the rotary cylinder are provided on the mounting bracket 4
Conical drum 23 is installed on 21, draws material cone cylinder 26 and material rotating plate 28, the conical drum 23 and draw material cone cylinder 26 be located at it is wet
Method is removed photoresist in room 8, and material rotating plate 28 is located at burning and removes photoresist in room 9, and multiple filtration holes are provided on the stack shell of the conical drum 23
230 and coiled strip folded plate 25, convenient for draining and coiled strip, described drawing offers multiple for being connected material from coiled strip in material cone cylinder 26
The material guide groove 260 fallen at folded plate 25；Waste material is rolled realization stirring by the coiled strip folded plate 25 on conical drum 23, and glue is made to fill
Sub-dip enters；The wash bowl 3 is square tube, and sealing block 31 is provided on bottom and body 1, draws material cone cylinder 26 and sealing block
31 cooperations separate wet method room 8 and burning room 9 of removing photoresist of removing photoresist, its section of bottom plate 18 on the body 1 with conical drum 23 together
It is flat.
Preferably, the coiled strip folded plate 25 is " Z " type structure, and the side of the conical drum 23 is provided with side shield
24；The coiled strip folded plate 25 of " Z " type structure can reduce waste material and fall into glue again, will by bending, the roller of pyramidal structure
Most of waste material slides in the material guide groove 260 for drawing material cone cylinder 26, eventually falls into burning and removes photoresist in room 9.
Preferably, the sealing block 31 is made of seal groove 310 and second connecting portion 312, the seal groove 310 with
Second connecting portion 312 is connected by first connecting portion 311, and is formed between first connecting portion 311 and second connecting portion 312 not small
It in 90 degree of angle, can prevent in coiled strip, glue will be gone to get rid of into burning and removed photoresist in room 9, while be also beneficial to waste material entrance
Burning is removed photoresist room 9.
Preferably, it is described draw be fixed with sealing ring 27 in material cone cylinder 26, the sealing ring 27 coordinates with seal groove 310；It is close
Seal ring 27 coordinates with seal groove 310, prevents heat from distributing.
Preferably, the burning, which removes photoresist to be provided between room 9 and burner 39, sets material web plate 32, room 9 of removing photoresist of burning
Lower end is provided with combustion bin 29, and the put flitch 32 is hinged by axis pin 33 with combustion bin 29, is provided on the combustion bin 29
Burn shell 38, and connecting rod 35 is fixed on the burning shell 38, and the end bottom for setting material web plate 32 is provided with support plate
34, sliding slot 340 is offered in the support plate 34, and the support plate 34 is flexibly connected by sliding slot 340 with connecting rod 35, the branch
The other end of fagging 34 is connected with Dump gate 36, and 36 one end of the Dump gate and burning shell 38 are hinged, and the other end is closed by revolving
Block 44 coordinates with combustion bin 29, and draw ring 37 is provided in the Dump gate 36, and the rotation closes block 44 and passes through shaft core 45 and combustion
The connection of storehouse 29 is burnt, it can be achieved that quickly discharging material, reduces heat and distribute.
Preferably, the upper end of the burning shell 38 is provided with arc injection plate 41, is opened up on the arc injection plate 41
There are multiple injection nozzles 420, multiple ejector pipes 42, the ejector pipe 42 and injection are provided on the inner wall of burning shell 38
Nozzle 420 connects, and the lower end of the ejector pipe 42 is connect with oxygen hose 43, and the burner 39 is placed in 38 middle part of burning shell.
The course of work of wash cycles before removing photoresist：Polycrystalline is put into feed opening 201 or monocrystalline waste material, crystal silicon waste material are fallen
To " V " between the first sieve 122, the second sieve 123, by starting two group 5 of rotary cylinder, make the connection of material washing machine structure 12
Ring 121 rotates in the inner wall groove of wash bowl 3, and after cleaning up, shaft 11 bounces back, and it is switching to " ︿ " for " W " type to make section
Type, and departing from the water surface, the crystal silicon waste material after washing flows out from feed opening 301, removes photoresist in room 8 into wet method.It puts into
When crystal silicon waste material, suction pump 16 starts, and the waste water in wash bowl 3 is evacuated in clean room 7, and filtering shank 6 carries out blowdown, strainer
6030 are blocked in impurity in notch 6031, can be carried out clearly to impurity in notch 6031 by manually detaching filtering shank 6
Reason, the recycling of aqueous can be realized by the process, reduces the waste of water resource.
Wet method stripping process：Before crystal silicon waste material is thrown to wet method and removes photoresist room 7, one group 19 of rotary cylinder is with piston bull stick 21
Retraction makes to draw material cone cylinder 26 and is adjacent to sealing block 31, and sealing ring 27 coordinates with seal groove 310, prevent heat distribute with crystal silicon waste material,
It goes glue to enter burning to remove photoresist in room 9；The crystal silicon waste material fallen into can effectively avoid crystal silicon under the cushioning effect of spiral plate 10
Waste material directly hits conical drum 23, right by the hot gas being filled in 14 inner opening 140 of column during crystal silicon waste material slide-down
The crystal silicon waste material remnants aqueous rolled on spiral plate 10 is dried；The piston bull stick 21 of rotation drives 23 turns of conical drum
Dynamic, the coiled strip folded plate 25 of " Z " type structure is stirred material, accelerates speed of removing photoresist；After preset time to be achieved, piston bull stick
21 release, and draw material cone cylinder 26 and are detached with sealing block 31, the rotation of conical drum 23 at this time can will go the crystal silicon waste material in glue to roll；
The coiled strip folded plate 25 of " Z " type structure can reduce waste material and directly fall into glue, will be big by bending, the roller of pyramidal structure
Part waste material slides in the material guide groove 260 for drawing material cone cylinder 26, eventually falls into burning and removes photoresist in room 9, and that rolls goes glue to pass through
Filtration hole 230 and first connecting portion 311 fall into wet method and remove photoresist in room 8 again.
Burning stripping process：39 jet flames of burner（Before the startup of burner 39, dried using waste heat）, from drawing
Oxygen that pipe 42 is filled with is penetrated by arc injection plate 41, flame burn area is sprayed onto, is fully burnt to impurity, material rotating plate 28
It rotates simultaneously, flange is carried out to waste material.
Discharge process after removing photoresist：As shown in figs. 10-11, rotation rotation closes block 44, pulls draw ring 37, sets material web plate 32 and is propping up
It is rotated under the action of fagging 34, makes to set and expect that web plate 32 is in heeling condition, positioned at the material set after removing photoresist on material web plate 32 in weight
Under force effect, it is discharged from discharge outlets through setting material web plate 32.
It should be noted that herein, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment including a series of elements includes not only those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Principle and implementation of the present invention are described for specific case used herein, the explanation of above example
It is merely used to help understand the method and its core concept of the present invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited concrete structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (9)
1. one kind washing material formula crystal silicon waste recovery and goes adhesive dispenser, including arc upper cover（2）, the upper cover（2）Lower end setting is organic
Body（1）, which is characterized in that the body（1）Inside it is provided with wash bowl（3）And mounting bracket（20）, by body（1）It is divided into purification
Room（7）, wet method removes photoresist room（8）And room of removing photoresist of burning（9）, the wet method removes photoresist room（8）It is inside provided with glue, burning is gone
Glue room（9）Bottom be provided with burner（39）；The body（1）Upper end be provided with mounting bracket（4）, the mounting bracket（4）
Inside it is provided with two groups of rotary cylinder（5）, two groups of the rotary cylinder（5）Shaft（11）Across body（1）Stretch into wash bowl（3）
Interior connection material washing machine structure（12）, the material washing machine structure（12）It include the first sieve with circular configuration（122）With the second sieve
（122）, first sieve（122）With the second sieve（122）It is hinged, the second sieve（122）With shaft（11）It is fixedly connected, the
One sieve（122）On be connected with connection ring（121）, the connection ring（121）With wash bowl（3）It is hinged, and and wash bowl（3）It is interior
Wall is rotatably connected；The wash bowl（3）Upper end offer connection wet method and remove photoresist room（8）Feed opening（301）.
2. one kind according to claim 1 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the wet method is gone
Glue room（8）Inside it is provided with column（14）, the column（14）On be provided with spiral plate（10）, the column（14）On be provided with
Opening（140）, have on shaft multiple with opening（140）The hot gas mouth of connection（141）, the hot gas mouth（141）Its section
Face is located at two spiral plates（10）Between；The column（14）Lower end be provided with heating pipe（46）, the heating pipe（46）With combustion
Burning-off glue room（9）Connection, wet method are removed photoresist room（8）Inside it is additionally provided with gas outlet（47）.
3. one kind according to claim 1 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that be located at wash bowl
（3）Outside body（1）Inside it is provided with suction pump（16）, circulating water pipe（15）Connect suction pump（16）, clean room is stretched into one end
（7）, the other end and wash bowl（3）Bottom connection；The clean room（7）It is inside provided with and the inclined clean room's bottom plate of horizontal plane
（17）, the circulating water pipe（15）Mouth is located at clean room's bottom plate（17）Upper end, the upper cover（2）On inserted with filtering shank
（6）, the filtering shank（6）By button（601）, shank（602）, shank frame（603）Composition, the shank frame（603）Inside set
It is equipped with strainer（6030）, the filtering shank（6）Stretch into body（1）It is interior, shank frame（603）With strainer（6030）It is formed by
Notch（6031）Face circulating water pipe（15）Mouthful.
4. one kind according to claim 1 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the mounting bracket
（4）On be provided with one group of rotary cylinder（19）, one group of the rotary cylinder（19）Piston bull stick（21）On be equipped with taper rolling
Cylinder（23）, draw material cone cylinder（26）And material rotating plate（28）, the conical drum（23）With draw material cone cylinder（26）It removes photoresist positioned at wet method
Room（8）It is interior, material rotating plate（28）It removes photoresist room positioned at burning（9）It is interior, the conical drum（23）Stack shell on be provided with multiple drainages
Hole（230）With coiled strip folded plate（25）, described draws material cone cylinder（26）On offer it is multiple for being connected material from coiled strip folded plate
（25）The material guide groove that place is fallen（260）, the wash bowl（3）For square tube, bottom and body（1）On be provided with sealing block
（31）, draw material cone cylinder（26）With sealing block（31）Cooperation removes photoresist wet method room（8）It removes photoresist room with burning（9）It separates, the body
（1）On bottom plate（18）Its section and conical drum（23）It flushes.
5. one kind according to claim 4 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the coiled strip
Folded plate（25）For " Z " type structure, the conical drum（23）Side be provided with side shield（24）.
6. one kind according to claim 4 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the sealing
Block（31）By seal groove（310）And second connecting portion（312）Composition, the seal groove（310）With second connecting portion（312）It is logical
Cross first connecting portion（311）Connection, and first connecting portion（311）With second connecting portion（312）Between formed not less than 90 degree
Angle.
7. one kind according to claim 6 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that described to draw material cone
Cylinder（26）On be fixed with sealing ring（27）, the sealing ring（27）With seal groove（310）Cooperation.
8. one kind according to claim 1 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the burning is gone
Glue room（9）With burner（39）Between be provided with and set material web plate（32）, room of removing photoresist of burning（9）Lower end be provided with combustion bin
（29）, the put flitch（32）With combustion bin（29）Pass through axis pin（33）It is hinged, the combustion bin（29）On be provided with burning shell
Body（38）, the burning shell（38）On be fixed with connecting rod（35）, described to set material web plate（32）End bottom be provided with support
Plate（34）, the support plate（34）On offer sliding slot（340）, the support plate（34）Pass through sliding slot（340）With connecting rod（35）
Flexible connection, the support plate（34）The other end be connected with Dump gate（36）, the Dump gate（36）One end and burning shell
（38）Hinged, the other end closes block by rotation（44）With combustion bin（29）Cooperation, the Dump gate（36）On be provided with draw ring
（37）, the rotation closes block（44）Pass through shaft core（45）With combustion bin（29）Connection.
9. one kind according to claim 1 washes material formula crystal silicon waste recovery and removes adhesive dispenser, which is characterized in that the burning shell
Body（38）Upper end be provided with arc injection plate（41）, the arc injection plate（41）On offer multiple injection nozzles（420）,
Positioned at burning shell（38）Inner wall on be provided with multiple ejector pipes（42）, the ejector pipe（42）With injection nozzle（420）Even
It connects, the ejector pipe（42）Lower end and oxygen hose（43）Connection, the burner（39）It is placed in burning shell（38）Middle part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810682355.1A CN108557826A (en) | 2018-06-28 | 2018-06-28 | One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810682355.1A CN108557826A (en) | 2018-06-28 | 2018-06-28 | One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108557826A true CN108557826A (en) | 2018-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810682355.1A Withdrawn CN108557826A (en) | 2018-06-28 | 2018-06-28 | One kind washing material formula crystal silicon waste recovery and removes adhesive dispenser |
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| Country | Link |
|---|---|
| CN (1) | CN108557826A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111730783A (en) * | 2020-07-29 | 2020-10-02 | 莫凤婷 | Waste material regenerating unit for building |
| CN112852105A (en) * | 2021-01-14 | 2021-05-28 | 方霞 | Epoxy resin sports terrace material |
-
2018
- 2018-06-28 CN CN201810682355.1A patent/CN108557826A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111730783A (en) * | 2020-07-29 | 2020-10-02 | 莫凤婷 | Waste material regenerating unit for building |
| CN112852105A (en) * | 2021-01-14 | 2021-05-28 | 方霞 | Epoxy resin sports terrace material |
| CN112852105B (en) * | 2021-01-14 | 2024-02-02 | 温州市中亿防腐工程有限公司 | Epoxy resin sports terrace material |
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Application publication date: 20180921 |
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