CN108550545A - A kind of wafer paster apparatus of optical branching device - Google Patents

Abstract

The invention discloses a kind of wafer paster apparatus of optical branching device, the patch workbench that it includes rack, is arranged in rack, through-hole is offered on patch workbench, the side of rack is fixed with cylinder, the piston rod of cylinder connects slide, and the both sides of slide are equipped with rolling bearing units and servo motor, and screw axis is mounted on rolling bearing units and servo motor, screw axis is threadedly coupled with slide plate, and slide plate is connect with plaster mechanism；It is fixed with tooth plate under slide, is provided with movable rotation-shaft in rack, movable rotation-shaft is provided with gear, is equipped with axle sleeve on the diameter of axle, and gear engages connection with tooth plate, glue brush is provided on axle sleeve；The lower end of axle sleeve is provided with gumming mechanism, the purpose of the present invention is in view of the above problems, a kind of wafer paster apparatus of optical branching device is provided, while so that plaster mechanism is declined using cylinder, complete the brush coating task to glass cover-plate, semi-automatic patch task is completed, the patch efficiency and quality of wafer are improved.

Description

A kind of wafer paster apparatus of optical branching device

Technical field

The invention belongs to communication products fields, more particularly to being bonded to wafer and glass cover-plate, specially a kind of light The wafer paster apparatus of splitter.

Background technology

Being thinned for wafer is frequently involved in semiconductor processes, especially in the preparation process of semiconductor laser chip In, in order to reach good heat dissipation effect and adapt to laser chip light and small development trend, the wafer by 400 microns is needed to subtract 100 microns are as thin as, however the thinned of wafer thickness leads to the reduction of its mechanical strength, causes to be easy to produce in thinning process Raw fragment, production yield greatly reduce, therefore before carrying out reduction process, need to exist the front of wafer by adhesive bond Have on certain thickness glass or ceramic substrate, to facilitate the operation of reduction process, increase wafer mechanical strength, is split to reduce Piece promotes yield.

Wafer crosses Cheng Qian in patch, needs to smear UV glue to glass cover-plate or wafer, existing paster apparatus is all to use The mode manually smeared carries out, and due to being smeared using artificial, if the UV glue smeared is excessive, wafer fitting can be made to cool down waiting Time is longer, if the UV glue smeared is very few, fitting dynamics is inadequate, is easy to fall off, and after smearing UV glue, when carrying out patch, shows There is device, placing wafer and when glass cover-plate, can not ensure the precision of institute's placement location, error, cannot achieve High accuracy positioning patch, good time difference when leading to patch quality, levels of audit quality is uneven, and therefore, there is an urgent need for a kind of paster apparatus, to meet To the quick patch of wafer.

Invention content

The purpose of the present invention is in view of the above problems, provide a kind of wafer paster apparatus of optical branching device, made using cylinder While plaster mechanism declines, complete, to the brush coating task of glass cover-plate, to complete semi-automatic patch task, improve wafer Patch efficiency and quality.

In order to achieve the above object, the technical solution adopted by the present invention is：A kind of wafer paster apparatus of optical branching device, it is wrapped Including rack, the patch workbench being arranged in rack offer on the patch workbench and place wafer and glass cover-plate The side of two through-holes, the rack is fixed with cylinder, and the piston rod of the cylinder connects slide, and the both sides of the slide are equipped with Rolling bearing units and servo motor, screw axis are mounted on rolling bearing units and servo motor, and the screw axis is threadedly coupled with slide plate, The slide plate passes through the opening of slide to be connect with plaster mechanism, and the plaster mechanism is located at the upper end of through-hole；In the slide Lower plate on be fixed with tooth plate, be provided with movable rotation-shaft in rack, the both sides of the movable rotation-shaft are provided with gear, on the diameter of axle Axle sleeve is installed, the gear engages connection with tooth plate, and glue brush is provided on axle sleeve, and the glue brush is located at glass cover-plate institute In the through-hole of placement；The lower end of axle sleeve is provided with gumming mechanism.

Further, the gumming mechanism by glue loading box and support bar group at being placed with UV glue in the glue loading box.

Further, the plaster mechanism includes a manifold clamp, connecting rod and patch rack, the branch manifold clamp It is connect with connecting rod with slide plate, paster table frame is arranged in connecting rod；Positioned at the lower end of patch rack, sucker fixed block, institute are set The lower end for stating sucker fixed block is provided with sucker, and gas-tpe fitting is connect by tracheae with sucker.

Further, inner cavity and the gas outlet for being connected to inner cavity are offered in the patch rack, the gas outlet is located at Patch rack both sides, branch pipe one end are fixed on branch manifold clamp, and the other end is connected to the inner cavity of patch rack.

Further, it is respectively arranged with the identical left locating piece of shape for placing the through hole of glass cover-plate and wafer I and left locating piece II, the through hole for placing wafer is provided with the right locating piece II being oppositely arranged with left positioning II, described Left locating piece I and left locating piece II patch workbench is connected by spring, and left-hand end is provided with the conical surface, the conical surface and patch It is formed with card slot between piece workbench, is provided on the left of the patch rack and the matched briquetting of the conical surface.

Further, the shape of the left positioning I and left locating piece II is to form the parallel first part of extending direction And Part III, and the second part of first part and Part III is connected, the second part and first part and third portion Divide and is vertically arranged.

Further, in wafer patch, the patch rack and left locating piece II, wafer, glass cover-plate and patch A drying tank is formed between piece workbench, the drying tank is connected to inner cavity by gas outlet.

Beneficial effects of the present invention are：

1. the present invention carries out moving down gripping glass cover-plate using cylinder to slide, the engagement of gear is pushed away by tooth plate Power makes movable rotation-shaft rotate, and realizes and carries out brush coating to glass cover-plate, reduces the use of motor, cleverly design, make entirely to fill It sets more rationally, by semi-automatic patch, substantially increases the quality of the patch efficiency of wafer.

2. the device uses automatic brush coating, make to be applied to the UV glue amount homogeneous on glass cover-plate, the wafer after patch is high Degree is consistent.

3. the patch rack with inner cavity, by being filled with hot wind, is accelerated to the solidification after wafer bak stay after patch Speed.

4. when declining, using the extruding of briquetting, make left locating piece I and left locating piece II to glass cover-plate and wafer into Row centralized positioning ensures that welt flushes in patch, and the quality being bonded is highly improved, and the stability of wafer obtains Enhancing.

5. in wafer patch, between patch rack and left locating piece II, wafer, glass cover-plate and patch workbench A drying tank is formed, the hot gas being filled in drying tank, the hot gas being filled with is dried in drying tank around welt side seam, Reduce distributing for hot gas.

6. wafer of the present invention is kept entire patch efficiency quicker, is reduced the labor of worker using semi-automatic patch Fatigue resistance improves work efficiency.

Description of the drawings

Fig. 1 is the structural diagram of the present invention.

Fig. 2 is the partial enlargement structural representation at A in Fig. 1.

Fig. 3 is the structural schematic diagram that brush coating is carried out to glass cover-plate.

Fig. 4 is the structural schematic diagram that glue brush is provided on movable rotation-shaft.

Fig. 5 is the structural schematic diagram that plaster mechanism draws that glass cover-plate prepares patch.

Fig. 6 is the connection dimensional structure diagram of sucker fixed block and sucker.

Fig. 7 is the partial enlargement structural representation at B in Fig. 5.

Fig. 8 is the structural schematic diagram of left positioning I.

Label character described in figure is expressed as：1, rack；2, cylinder；3, piston rod；4, slide；5, rolling bearing units；6, it watches Take motor；7, screw axis；8, slide plate；9, plaster mechanism；10, tooth plate；11, gear；12, movable rotation-shaft；13, axle sleeve；14, glue Brush；15, gumming mechanism；16, patch workbench；17, glass cover-plate；18, wafer；19, left locating piece I；20, sliding slot；21, bullet Spring；22, right locating piece II；23, left locating piece II；24, UV glue；151, glue loading box；152, supporting rod；161, through-hole；191, it supports By face；192, first part；193, second part；194, Part III；231, the conical surface；401, it is open；901, branch manifold clamp； 902, connecting rod；903, gas-tpe fitting；904, sucker fixed block；905, sucker；906, branch pipe；907, patch rack；908, interior Chamber；909, briquetting；910, gas outlet；911, drying tank；912, gap.

Specific implementation mode

In order to make those skilled in the art more fully understand technical scheme of the present invention, below in conjunction with the accompanying drawings to the present invention into The description of row detailed description, this part is only exemplary and explanatory, should not there is any limitation to protection scope of the present invention Effect.

As Figure 1-Figure 8, concrete structure of the invention is：The patch work that it includes rack 1, is arranged in rack 1 Platform 16 offers two through-holes 161 for placing wafer 18 and glass cover-plate 17, the rack 1 on the patch workbench 16 Side be fixed with cylinder 2, the piston rod 3 of the cylinder 2 connects slide 4, and the both sides of the slide 4 are equipped with 5 He of rolling bearing units Servo motor 6, screw axis 7 are mounted on rolling bearing units 5 and servo motor 6, and the screw axis 7 is threadedly coupled with slide plate 8, is passed through The step of drive displacement on screw axis 7 of slide plate 8 of servo motor 6, realization intermediate plate and patch, the slide plate 8 passes through opening for slide 4 Mouth 401 is connect with plaster mechanism 9, and the plaster mechanism 9 is located at the upper end of through-hole 161；It is solid on the lower plate of the slide 4 Surely there is tooth plate 10, be provided with movable rotation-shaft 12 in rack 1, the both sides of the movable rotation-shaft 12 are provided with gear 11, pacify on the diameter of axle Equipped with axle sleeve 13, the gear 11 engages connection with tooth plate 10, pushes gear 11 to rotate by tooth plate 10, is arranged on axle sleeve 13 There are glue brush 14, the gear 11 of rotation to drive movable rotation-shaft 12 to rotate, make glue brush 14 that 24 glue of UV glue is applied to glass cover-plate 17 On, the glue brush 14 is located in the through-hole 161 that glass cover-plate 17 is placed, and is brushed convenient for the bottom to glass cover-plate 17 Glue；The lower end of axle sleeve 13 is provided with gumming mechanism 15；Using automatic brush coating, the UV glue amounts for making to be applied on glass cover-plate are equal Matter, the wafer 18 after patch are highly consistent.

Preferably, the gumming mechanism 15 is made of glue loading box 151 and supporting rod 152, is placed in the glue loading box 151 UV glue while autosizing, contains the glue of drippage, ensure that the profit of 24 glue of cleannes and UV glue of device With rate.

Preferably, the plaster mechanism 9 includes a manifold clamp 901, connecting rod 902 and patch rack 907, described Branch manifold clamp 901 and connecting rod 902 are connect with slide plate 8, and patch rack 907 is arranged in connecting rod 902；Positioned at patch rack 907 lower end setting sucker fixed block 904, the lower end of the sucker fixed block 904 are provided with sucker 905, and gas-tpe fitting 903 is logical Tracheae is crossed to connect with sucker 905.

Preferably, inner cavity 908 and the gas outlet 910 for being connected to inner cavity 908 are offered in the patch rack 907, it is described Gas outlet 910 is located at 907 both sides of patch rack, and 906 one end of branch pipe is fixed on branch manifold clamp 901, the other end and patch rack 907 inner cavity 908 is connected to, and the patch rack 907 with inner cavity 908, by being filled with hot wind, is accelerated to wafer after patch Setting rate after 18 patch of piece.

Preferably, the identical left side of shape is respectively arranged at glass cover-plate 17 and the through-hole 161 of wafer 18 for placing Locating piece I19 and left locating piece II23 is provided at the through-hole 161 for placing wafer 18 and is oppositely arranged with left positioning II23 Right locating piece II22, the left locating piece I19 and left locating piece II23 patch workbench 16 is connected by spring 21, and Left-hand end is provided with the conical surface 231, and card slot 20 is formed between the conical surface 231 and patch workbench 16, the patch rack 907 Left side is provided with pushes left locating piece I19 or left locating piece II23 to glass with 231 matched briquetting 909 of the conical surface, briquetting 909 Cover board 17 and wafer carry out intermediate plate positioning and patch positioning, ensure that welt flushes in patch, the quality being bonded obtain compared with The stability of big promotion, wafer is enhanced.

Preferably, the shape of the left positioning I19 and left locating piece II23 is to form parallel first of extending direction Divide 192 and Part III 194, and the second part 194 of connection first part 192 and Part III 194, the second part 194 are vertically arranged with first part 192 and Part III 194.

Preferably, in wafer patch, the patch rack 907 and left locating piece II23, wafer 18, glass cover-plate 17 And a drying tank 911 is formed between patch workbench 16, the drying tank 911 is connected to inner cavity 908 by gas outlet 910, The hot gas being filled in drying tank, the hot gas being filled with are dried in drying tank around welt side seam, and hot gas is reduced It distributes, improves the reasonable utilization of heat.

The course of work of the present invention：

Manually or mechanically glass cover-plate 17 and wafer 18 are placed on patch workbench 16 by hand, and such as Fig. 2, glass cover-plate 17 is set In on left locating piece I19；Such as Fig. 7, wafer 18 is placed in left locating piece 23.Then such as Fig. 1, starts cylinder 2, make piston rod 3 Retraction, slide 4 moves down, and while slide 4 moves down, the rack 10 being arranged on slide 4 drives gear 11 to rotate, drive activity Shaft 12 rotates, and the glue brush 14 of rotation carries out brush coating to 17 bottom surface of glass cover-plate（The height of glue brush 14 exceeds patch workbench 16 Upper plane）, it is located at the briquetting 909 of patch rack 907 when declining, briquetting 909 pushes left locating piece I19 to move to right, abutment face 191 push glass cover-plate 17 to move, and so that the gap 912 between glass cover-plate 17 and abutment face 191 is converted into fit-state, at this time Sucker 905 draws glass cover-plate 17, is clamped to glass cover-plate 17.

Then, starting cylinder 2, slide 4 is pushed to rise to certain position, servo motor 6 starts, and screw axis 7 is driven to rotate, Since for threaded connection, slide plate 8 moves to right, after reaching the positive upper end of wafer 18, cylinder 2 starts, and slide 4 is made to be displaced downwardly to fixation Position, as shown in figs. 4 and 7, briquetting 909 push left locating piece II23 movements, carry out centralized positioning to wafer 18, ensure patch Piece flushes, and after patch flushes, patch rack 907 and left locating piece II23, wafer 18, glass cover-plate 17 and patch work Drying tank 911 is formed between platform 16, hot wind is filled with into drying tank 911, fitting side seam is dried, and is accelerated solidifying after welt Gu speed.

It should be noted that herein, the terms "include", "comprise" or its any other variant are intended to non-row His property includes, so that the process, method, article or equipment including a series of elements includes not only those elements, and And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic Element.

Principle and implementation of the present invention are described for specific case used herein, the explanation of above example The method and its core concept for being merely used to help understand the present invention are answered the above is only a preferred embodiment of the present invention When pointing out due to the finiteness of literal expression, and objectively there is unlimited concrete structure, for the common skill of the art For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.

Claims (7)

1. a kind of wafer paster apparatus of optical branching device, which is characterized in that it includes rack（1）, be arranged in rack（1）On patch Piece workbench（16）, the patch workbench（16）On offer placement wafer（18）And glass cover-plate（17）Two through-holes （161）, the rack（1）Side be fixed with cylinder（2）, the cylinder（2）Piston rod（3）Connect slide（4）, the cunning Seat（4）Both sides be equipped with rolling bearing units（5）And servo motor（6）, screw axis（7）Mounted on rolling bearing units（5）And servo motor （6）On, the screw axis（7）With slide plate（8）It is threadedly coupled, the slide plate（8）Across slide（4）Opening（401）With patch Mechanism（9）Connection, the plaster mechanism（9）Positioned at through-hole（161）Upper end；In the slide（4）Lower plate on it is fixed There is tooth plate（10）, rack（1）On be provided with movable rotation-shaft（12）, the movable rotation-shaft（12）Both sides be provided with gear（11）、 Axle sleeve is installed on the diameter of axle（13）, the gear（11）With tooth plate（10）Engagement connection, axle sleeve（13）On be provided with glue brush （14）, the glue brush（14）Positioned at glass cover-plate（17）The through-hole placed（161）It is interior；Positioned at axle sleeve（13）Lower end setting There is gumming mechanism（15）.

2. a kind of wafer paster apparatus of optical branching device according to claim 1, which is characterized in that the gumming mechanism （15）By glue loading box（151）And supporting rod（152）Composition, the glue loading box（151）Inside it is placed with UV glue.

3. a kind of wafer paster apparatus of optical branching device according to claim 1, which is characterized in that the plaster mechanism （9）Including a manifold clamp（901）, connecting rod（902）And patch rack（907）, the branch manifold clamp（901）And connection Bar（902）With slide plate（8）Connection, patch rack（907）It is arranged in connecting rod（902）On；Positioned at patch rack（907）Lower end Sucker fixed block is set（904）, the sucker fixed block（904）Lower end be provided with sucker（905）, gas-tpe fitting（903）It is logical Cross tracheae and sucker（905）Connection.

4. a kind of wafer paster apparatus of optical branching device according to claim 3, which is characterized in that the patch rack （907）Inside offer inner cavity（908）Be connected to inner cavity（908）Gas outlet（910）, the gas outlet（910）Positioned at patch Rack（907）Both sides, branch pipe（906）One end is fixed on branch manifold clamp（901）On, the other end and patch rack（907）Inner cavity （908）Connection.

5. a kind of wafer paster apparatus of optical branching device according to claim 4, which is characterized in that for placing glass cover Plate（17）And wafer（18）Through-hole（161）Place is respectively arranged with the identical left locating piece I of shape（19）With left locating piece II （23）, for placing wafer（18）Through-hole（161）Place is provided with and left positioning II（23）The right locating piece II being oppositely arranged （22）, the left locating piece I（19）With left locating piece II（23）Pass through spring（21）Connect patch workbench（16）, and it is left Side is provided with the conical surface（231）, the conical surface（231）With patch workbench（16）Between be formed with card slot（20）, the paster table Frame（907）Left side be provided with and the conical surface（231）Matched briquetting（909）.

6. a kind of wafer paster apparatus of optical branching device according to claim 5, which is characterized in that the left positioning I （19）With left locating piece II（23）Shape be to form the parallel first part of extending direction（192）And Part III（194）, And connection first part（192）And Part III（194）Second part（194）, the second part（194）With first part （192）And Part III（194）It is vertically arranged.

7. a kind of wafer paster apparatus of optical branching device according to claim 5, which is characterized in that in wafer patch, The patch rack（907）With left locating piece II（23）, wafer（18）, glass cover-plate（17）And patch workbench（16）It Between form a drying tank（911）, the drying tank（911）With inner cavity（908）Pass through gas outlet（910）Connection.