CN108546925A - A kind of rose gold thin film and preparation method thereof prepared in metal surface - Google Patents

A kind of rose gold thin film and preparation method thereof prepared in metal surface Download PDF

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Publication number
CN108546925A
CN108546925A CN201810532334.1A CN201810532334A CN108546925A CN 108546925 A CN108546925 A CN 108546925A CN 201810532334 A CN201810532334 A CN 201810532334A CN 108546925 A CN108546925 A CN 108546925A
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rose gold
thin film
metallic matrix
rose
bias
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杨富国
张玉红
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Foshan University
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Foshan University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering

Abstract

The rose gold thin film and preparation method thereof that the invention discloses a kind of to prepare in metal surface, rose gold thin film is multilayered structure, including metallic matrix, which is stainless steel, the surface of metallic matrix is rose gold plate, there is TiN and Ti transition zones between rose gold plate and metallic matrix;Preparation method is to prepare TiN and Ti transition zones, rose gold plate respectively in metal surface by the way of medium frequency magnetron sputtering plated film;The rose gold plate of the metal base surface has very high intensity and scratch-resistant performance, and there is higher bond strength with metallic matrix, the rose gold thin film can be widely applied to the appearance decoration of various stainless steel watch cases, watchband, to improve the service life of watchcase, watchband;Preparation method is simple and fast, reduces conventional plating process and is endangered to caused by operator and environment, is brought great convenience to electroplating activity.

Description

A kind of rose gold thin film and preparation method thereof prepared in metal surface
Technical field
The present invention relates to the technical field of medium frequency magnetron sputtering plated film more particularly to a kind of roses prepared in metal surface Gold thin film and preparation method thereof.
Background technology
Currently, conventional electroplated product is all that metal parts is immersed in electroplate liquid, using the principle of electrolysis by electric conductor Layer overlay electroplated layer.Although can meet the needs of people to a certain extent, there is also some disadvantages simultaneously:One, often The largely electroplating wastewater containing strong acid, highly basic, heavy metal chromium is will produce in rule electroplating technology, it is very big to worker's actual bodily harm, and And it is easy polluted surface water and underground water, belong to heavy polluted industry;Secondly, that conventional plating is easy to cause coating layer thickness is uneven, Influence appearance.On the other hand, Vacuum Deposition rose gold thin film is easy to change, the passivated processing of need, and present Passivation Treatment is usually Potassium bichromate solution is soaked, potassium bichromate solution environmental pollution is larger, is not suitable for a large amount of use.
Invention content
Purpose of the present invention is to solve the above problems, a kind of rose gold thin film prepared in metal surface of invention and its preparation side Method.
To achieve the goals above, the technical scheme is that:
A kind of rose gold thin film prepared in metal surface, including metallic matrix, the metal matrix material are stainless steel, rose Rare gold thin film is multilayered structure, and the surface of metallic matrix is rose gold plate, have between rose gold plate and metallic matrix TiN and Ti transition zones.
A method of preparing rose gold thin film in metal surface comprising following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 10-15min, Be put into vacuum drying chamber it is fully dry after be put into vacuum chamber of film coating machine rapidly, vacuum chamber of film coating machine background vacuum is 8.0 × 10-3Pa is heated to 230 DEG C, soaking time 20-30min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, voltage 250V, duty ratio 74.4, Glow Discharge Cleaning 20-30min;Bias is reduced to 200V, opens ion source Ion Cleaning 20- 30min is then turned on arc source Ti targets, bias 200-300V, target current 70A, ion bombardment Ti targets 3-4min;
S3, depositing Ti:Ar air pressures are adjusted to 0.36-0.39Pa, bias is reduced to 50-60V, electric arc to plate Ti3-5min;
S4, depositing TiN:Adjustment operating air pressure is 0.32-0.36Pa, bias 58V, Ti target current 50-60A;N2 is opened, is adjusted Whole N2 flows are 110-130sccm, and depositing temperature is 120-200 DEG C, medium frequency magnetron sputtering depositing TiN 15-20min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 0.9-1.8Pa, are biased into 100- 200V, opens gold target power supply, current-modulation 5-6A, and medium frequency magnetron sputtering deposits rose gold 60-70min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 20-25min, coating Terminate;
S7, Passivation Treatment:The metallic matrix leaching gold and silver for being coated with rose gold thin film is protected into water, temperature is 30 DEG C, at passivation 5min is managed, drying is taken out.
Compared with prior art, the invention has the advantages and positive effects that:
Rose gold film design is multilayered structure by the present invention, and the surface of metallic matrix is rose gold plate, rose gold plating There are TiN and Ti transition zones between layer and metallic matrix, to reduce residual stress, increases between rose gold thin film and metallic matrix Bond strength;The rose gold thin film has good wearability, while having higher bond strength, appearance with metallic matrix It is non-discolouring for rosiness, chromium is free of, so as to improve the service life of stainless steel watch band, watchcase;On the other hand, it prepares Process is simple and fast, reduces conventional plating process and is endangered to caused by operator and environment, is brought to electroplating activity Great convenience.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art With obtain other attached drawings according to these attached drawings.
Fig. 1 is the structural diagram of the present invention;
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
As shown in Figure 1, a kind of rose gold thin film prepared in metal surface, including metallic matrix 1,1 material of metallic matrix Material is stainless steel, and rose gold thin film is multilayered structure, and the surface of metallic matrix 1 is rose gold plate 4, rose gold plate 4 and gold There are TiN transition zones 3 and Ti transition zones 2 between category matrix 1.
Rose gold film design is multilayered structure by the present invention, and the surface of metallic matrix is rose gold plate, rose gold plating There are TiN and Ti transition zones between layer and metallic matrix, to reduce residual stress, increases between rose gold thin film and metallic matrix Bond strength;The rose gold thin film has good wearability, while having higher bond strength, appearance with metallic matrix It is non-discolouring for rosiness, chromium is free of, so as to improve the service life of stainless steel watch band, watchcase.
A method of rose gold thin film being prepared in metal surface, the method is the side using medium frequency magnetron sputtering plated film Formula prepares TiN and Ti transition zones, rose gold plate respectively in metal surface;It includes the following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 10-15min use With pollutants such as the oil stains that removes metal base surface, be put into vacuum drying chamber it is fully dry after be put into coating machine vacuum rapidly Room, vacuum chamber of film coating machine background vacuum are 8.0 × 10-3Pa, are heated to 230 DEG C, soaking time 20-30min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, voltage 250V, duty ratio 74.4, Glow Discharge Cleaning 20-30min;Bias is reduced to 200V, opens ion source Ion Cleaning 20- 30min is then turned on arc source Ti targets, bias 200-300V, target current 70A, ion bombardment Ti targets 3-4min;
S3, depositing Ti:Ar air pressures are adjusted to 0.36-0.39Pa, bias is reduced to 50-60V, electric arc to plate Ti3-5min;
S4, depositing TiN:Adjustment operating air pressure is 0.32-0.36Pa, bias 58V, Ti target current 50-60A;N2 is opened, is adjusted Whole N2 flows are 110-130sccm, and depositing temperature is 120-200 DEG C, medium frequency magnetron sputtering depositing TiN 15-20min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 0.9-1.8Pa, are biased into 100- 200V, opens gold target power supply, current-modulation 5-6A, and medium frequency magnetron sputtering deposits rose gold 60-70min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 20-25min, coating Terminate;
S7, Passivation Treatment:The metallic matrix leaching gold and silver for being coated with rose gold thin film is protected into water, temperature is 30 DEG C, at passivation 5min is managed, drying is taken out.
Embodiment one, a kind of method preparing rose gold thin film in metal surface comprising following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 10min, be put into Vacuum chamber of film coating machine is put into after fully being dried in vacuum drying chamber rapidly, vacuum chamber of film coating machine background vacuum is 8.0 × 10- 3Pa is heated to 230 DEG C, soaking time 20min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, voltage 250V, duty ratio 74.4, Glow Discharge Cleaning 20min;Bias is reduced to 200V, opens ion source Ion Cleaning 20min, then Open arc source Ti targets, bias 200V, target current 70A, ion bombardment Ti targets 3min;
S3, depositing Ti:Ar air pressures are adjusted to 0.36Pa, bias is reduced to 50V, electric arc to plate Ti3min;
S4, depositing TiN:Adjustment operating air pressure is 0.32Pa, bias 58V, Ti target current 50A;N2 is opened, N2 flows are adjusted For 110sccm, depositing temperature is 120 DEG C, medium frequency magnetron sputtering depositing TiN 15min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 0.9Pa, are biased into 100V, are opened Gold target power supply, current-modulation 5A, medium frequency magnetron sputtering deposit rose gold 60min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 20min, coating knot Beam;
S7, Passivation Treatment:The metallic matrix leaching gold and silver for being coated with rose gold thin film is protected into water, temperature is 30 DEG C, at passivation 5min is managed, drying is taken out.
Embodiment two, a kind of method preparing rose gold thin film in metal surface comprising following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 13min, be put into Vacuum chamber of film coating machine is put into after fully being dried in vacuum drying chamber rapidly, vacuum chamber of film coating machine background vacuum is 8.0 × 10- 3Pa is heated to 230 DEG C, soaking time 25min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, voltage 250V, duty ratio 74.4, Glow Discharge Cleaning 25min;Bias is reduced to 200V, opens ion source Ion Cleaning 25min, then Open arc source Ti targets, bias 250V, target current 70A, ion bombardment Ti targets 3min;
S3, depositing Ti:Ar air pressures are adjusted to 0.38Pa, bias is reduced to 55V, electric arc to plate Ti4min;
S4, depositing TiN:Adjustment operating air pressure is 0.34Pa, bias 58V, Ti target current 55A;N2 is opened, N2 flows are adjusted For 120sccm, depositing temperature is 160 DEG C, medium frequency magnetron sputtering depositing TiN 18min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 1.5Pa, are biased into 150V, are opened Gold target power supply, current-modulation 5A, medium frequency magnetron sputtering deposit rose gold 65min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 23min, coating knot Beam;
S7, Passivation Treatment:The metallic matrix leaching gold and silver for being coated with rose gold thin film is protected into water, temperature is 30 DEG C, at passivation 5min is managed, drying is taken out.
Embodiment three, a kind of method preparing rose gold thin film in metal surface comprising following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 15min, be put into Vacuum chamber of film coating machine is put into after fully being dried in vacuum drying chamber rapidly, vacuum chamber of film coating machine background vacuum is 8.0 × 10- 3Pa is heated to 230 DEG C, soaking time 30min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, voltage 250V, duty ratio 74.4, Glow Discharge Cleaning 30min;Bias is reduced to 200V, opens ion source Ion Cleaning 30min, then Open arc source Ti targets, bias 300V, target current 70A, ion bombardment Ti targets 4min;
S3, depositing Ti:Ar air pressures are adjusted to 0.39Pa, bias is reduced to 60V, electric arc to plate Ti5min;
S4, depositing TiN:Adjustment operating air pressure is 0.36Pa, bias 58V, Ti target current 60A;N2 is opened, N2 flows are adjusted For 130sccm, depositing temperature is 200 DEG C, medium frequency magnetron sputtering depositing TiN 20min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 1.8Pa, are biased into 200V, are opened Gold target power supply, current-modulation 6A, medium frequency magnetron sputtering deposit rose gold 70min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 25min, coating knot Beam;
S7, Passivation Treatment:The metallic matrix leaching gold and silver for being coated with rose gold thin film is protected into water, temperature is 30 DEG C, at passivation 5min is managed, drying is taken out.
The preparation process of the present invention is simple and fast, reduces conventional plating process to caused by operator and environment Harm, and metallic matrix external coating thickness is uniform, brings great convenience to electroplating activity;On the other hand, the present invention adopts It with organic solution Passivation Treatment, avoids and is passivated using potassium bichromate solution, reduce passivation operation caused by environment Pollution, protection is made that environment.

Claims (2)

1. a kind of rose gold thin film prepared in metal surface, including metallic matrix, which is stainless steel, special Sign is:Rose gold thin film is multilayered structure, and the surface of metallic matrix is rose gold plate, rose gold plate and metallic matrix it Between have TiN and Ti transition zones.
2. a kind of method preparing rose gold thin film in metal surface according to claim 1, it is characterised in that:It includes Following steps:
S1, pre-treatment:By metallic matrix sanding and polishing, it is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 10-15min, be put into Vacuum chamber of film coating machine is put into after fully being dried in vacuum drying chamber rapidly, vacuum chamber of film coating machine background vacuum is 8.0 × 10- 3Pa is heated to 230 DEG C, soaking time 20-30min;
S2, Ion Cleaning:It is passed through Ar gas in vacuum chamber of film coating machine, pressure 0.3Pa opens grid bias power supply, and voltage 250V is accounted for Empty ratio 74.4, Glow Discharge Cleaning 20-30min;Bias is reduced to 200V, opens ion source Ion Cleaning 20-30min, then Open arc source Ti targets, bias 200-300V, target current 70A, ion bombardment Ti targets 3-4min;
S3, depositing Ti:Ar air pressures are adjusted to 0.36-0.39Pa, bias is reduced to 50-60V, electric arc to plate Ti3-5min;
S4, depositing TiN:Adjustment operating air pressure is 0.32-0.36Pa, bias 58V, Ti target current 50-60A;N2 is opened, N2 is adjusted Flow is 110-130sccm, and depositing temperature is 120-200 DEG C, medium frequency magnetron sputtering depositing TiN 15-20min;
S5, deposition rose gold plate:Ti targets are closed, N2 is closed;Ar air pressures are adjusted to 0.9-1.8Pa, are biased into 100-200V, Gold target power supply, current-modulation 5-6A are opened, medium frequency magnetron sputtering deposits rose gold 60-70min;
S6, post-processing:Gold target power supply is closed, grid bias power supply, ion source and gas source are closed, keeps the temperature 20-25min, coating terminates;
S7, Passivation Treatment:It is 30 DEG C that the metallic matrix leaching gold and silver for being coated with rose gold thin film, which is protected water, temperature, Passivation Treatment 5min takes out drying.
CN201810532334.1A 2018-05-29 2018-05-29 A kind of rose gold thin film and preparation method thereof prepared in metal surface Pending CN108546925A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109136844A (en) * 2018-10-12 2019-01-04 佛山科学技术学院 A kind of rose gold plate and its preparation process
CN109182824A (en) * 2018-10-12 2019-01-11 佛山科学技术学院 A kind of resistance to oxidation rose gold plate and its preparation process
CN109234564A (en) * 2018-10-12 2019-01-18 佛山科学技术学院 A kind of wear-resisting rose gold plate and its preparation process
CN111394703A (en) * 2020-04-30 2020-07-10 森泰纳米科技(深圳)有限公司 Vacuum-plated super nanometer functional gradient rose gold decorative composite layer and preparation method thereof

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CN1089665A (en) * 1993-12-04 1994-07-20 北京长城钛金技术联合开发公司 golden gradual change alternative coating work-piece
CN101538712A (en) * 2008-03-17 2009-09-23 精工爱普生株式会社 Method of manufacturing a decorative article, a decorative article, and a timepiece
CN201722425U (en) * 2010-03-02 2011-01-26 深圳森丰真空镀膜有限公司 Vacuum magnetron sputtering precious metal thin-film plating equipment
CN105002462A (en) * 2015-06-26 2015-10-28 金华万得福日用品股份有限公司 Rose gold tableware coating method
CN107313013A (en) * 2017-06-22 2017-11-03 维达力实业(深圳)有限公司 Compound gold coated films and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1089665A (en) * 1993-12-04 1994-07-20 北京长城钛金技术联合开发公司 golden gradual change alternative coating work-piece
CN101538712A (en) * 2008-03-17 2009-09-23 精工爱普生株式会社 Method of manufacturing a decorative article, a decorative article, and a timepiece
CN201722425U (en) * 2010-03-02 2011-01-26 深圳森丰真空镀膜有限公司 Vacuum magnetron sputtering precious metal thin-film plating equipment
CN105002462A (en) * 2015-06-26 2015-10-28 金华万得福日用品股份有限公司 Rose gold tableware coating method
CN107313013A (en) * 2017-06-22 2017-11-03 维达力实业(深圳)有限公司 Compound gold coated films and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109136844A (en) * 2018-10-12 2019-01-04 佛山科学技术学院 A kind of rose gold plate and its preparation process
CN109182824A (en) * 2018-10-12 2019-01-11 佛山科学技术学院 A kind of resistance to oxidation rose gold plate and its preparation process
CN109234564A (en) * 2018-10-12 2019-01-18 佛山科学技术学院 A kind of wear-resisting rose gold plate and its preparation process
CN111394703A (en) * 2020-04-30 2020-07-10 森泰纳米科技(深圳)有限公司 Vacuum-plated super nanometer functional gradient rose gold decorative composite layer and preparation method thereof

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Application publication date: 20180918