CN108536335B - Touch sensor, touch device and manufacturing method of touch sensor - Google Patents
Touch sensor, touch device and manufacturing method of touch sensor Download PDFInfo
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- CN108536335B CN108536335B CN201810355967.XA CN201810355967A CN108536335B CN 108536335 B CN108536335 B CN 108536335B CN 201810355967 A CN201810355967 A CN 201810355967A CN 108536335 B CN108536335 B CN 108536335B
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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Abstract
The invention provides a touch sensor, a touch device and a manufacturing method of the touch sensor. According to the embodiment of the invention, the first insulating layer with the preset thickness is arranged between the driving electrode and the sensing electrode, so that the facing area of the driving electrode and the sensing electrode at the first insulating layer can be increased, the capacitance between the driving electrode and the sensing electrode can be improved, and the recognition capability of a touch signal can be improved.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to a touch sensor, a touch device, and a method for manufacturing a touch sensor.
Background
AMOLED (Active Matrix/Organic Light Emitting Diode) display is drawing attention due to its advantages of fast response speed, high brightness, low power consumption, good viewing angle, and flexible display.
At present, the AMOLED display in medium and small sizes mostly adopts an external hanging type touch sensor technology, and the whole thickness of a module is thicker. The thickness of the entire display device is important for the display device.
Referring to fig. 1, which shows a schematic diagram of a position structure of a driving electrode and a sensing electrode of a touch sensor in the prior art, as shown in fig. 1, generally, an OLED display on _ cell touch is prepared on a TFE (Thin Film Encapsulation) layer, and Tx (driving electrode) and Rx (sensing electrode) are patterned to form a capacitor, so as to implement a touch function by detecting a change in the capacitor.
Referring to fig. 2, a schematic structural diagram of a touch sensor in the prior art is shown. As shown in fig. 2, in the prior art, when the touch sensor operates, Tx, Rx and the cathode form a large capacitance, which may cause a large influence on the detection signal of the sensor, resulting in a problem in touch signal identification.
Disclosure of Invention
The invention provides a touch sensor, a touch device and a manufacturing method of the touch sensor, and aims to solve the problem that in the prior art, when a touch sensor works, capacitance formed by Tx, Rx and a cathode is large, so that detection signals of the sensor are greatly influenced, and the problem of touch signal identification is caused.
In a first aspect, a touch sensor is provided, including: a driving electrode and a sensing electrode formed on the substrate;
a first insulating layer with a preset thickness is arranged between the adjacent driving electrode and the adjacent induction electrode; two adjacent ends of the driving electrode and the induction electrode are respectively positioned on two opposite side walls of the first insulating layer.
Furthermore, the cross section of the first insulating layer is of a trapezoidal structure in the vertical direction, and two ends, adjacent to the driving electrode and the induction electrode, of the driving electrode cover two opposite side waists of the trapezoidal structure.
Further, the thickness of the first insulating layer is 1-5 micrometers, and the first insulating layer is made of an organic resin material.
Further, the substrate includes: the organic light-emitting device, the thin film packaging layer, the third insulating layer and the second insulating layer are sequentially stacked, and the driving electrode and the sensing electrode are located on one side, deviating from the third insulating layer, of the second insulating layer.
Further, conducting layers arranged in an array are arranged between the second insulating layer and the third insulating layer; the driving electrode and the induction electrode are arranged in the same layer and are crossed, the driving electrode is disconnected at the crossed part of the driving electrode and the induction electrode, and the conducting layer is arranged at the crossed part; and a through hole is formed in the second insulating layer, and the disconnected driving electrode is electrically contacted with the conductive layer through the through hole to realize connection.
Further, the touch sensor further comprises a protective layer, and the protective layer is arranged on one side, away from the substrate, of the driving electrode and the sensing electrode.
In a second aspect, a touch device is also provided, which includes a display device and the touch sensor as described above located on the display side of the display device.
Further, the display device is an OLED, and the touch sensor is disposed on an encapsulation layer of the OLED.
In a third aspect, a method for manufacturing a touch sensor is provided, including:
providing a substrate;
forming a plurality of discrete first insulating layers on the substrate;
and forming a driving electrode and an induction electrode on the substrate, wherein two adjacent ends of the driving electrode and the induction electrode are respectively positioned on two opposite side walls of the first insulating layer.
Further, the providing a substrate includes:
depositing a third insulating layer on the substrate;
depositing a conductive layer film on the third insulating layer;
patterning the conducting layer film to form conducting layers arranged in an array;
and depositing a second insulating layer on the third insulating layer and each conducting layer, and forming a through hole on the second insulating layer so that the driving electrode is connected with the conducting layer through the through hole.
Compared with the prior art, the invention has the following advantages:
the embodiment of the invention provides a touch sensor, a touch device and a manufacturing method of the touch sensor. According to the embodiment of the invention, the first insulating layer with the preset thickness is arranged between the driving electrode and the sensing electrode, so that the facing area of the driving electrode and the sensing electrode at the first insulating layer can be increased, the capacitance between the driving electrode and the sensing electrode can be improved, and the recognition capability of a touch signal can be improved.
Drawings
Fig. 1 is a schematic diagram illustrating a position structure of a driving electrode and a sensing electrode of a touch sensor in the prior art;
FIG. 2 is a schematic diagram of a touch sensor in the prior art;
fig. 3 is a schematic structural diagram of a touch sensor according to an embodiment of the present invention;
fig. 4 is a flowchart illustrating steps of a method for manufacturing a touch sensor according to an embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example one
Referring to fig. 3, a schematic structural diagram of a touch sensor according to an embodiment of the present invention is shown, and as shown in fig. 3, the touch sensor may include a driving electrode 1 and a sensing electrode 2 formed on a substrate (not shown).
The first insulating layer 3 with a preset thickness is arranged between the adjacent driving electrode 1 and the adjacent sensing electrode 2, two adjacent ends of the driving electrode 1 and the sensing electrode 2 are respectively located on two opposite side walls of the first insulating layer 3, that is, the driving electrode 1 is located on a first side wall of the first insulating layer 3, the sensing electrode 2 is located on a second side wall of the first insulating layer 3, the first side wall is opposite to the second side wall, specifically, the driving electrode 1 can completely cover the first side wall, the sensing electrode 2 can completely cover the second side wall, even, the driving electrode 1 can also partially cover the surface of one side of the first insulating layer 3, which is away from the substrate, and the sensing electrode 2 can also partially cover the surface, so as to increase the facing area of the driving electrode 1 and the sensing electrode 2 as much as possible, as long as a capacitor is formed between the driving electrode 1 and the sensing electrode 2.
In the embodiment of the present invention, the preset thickness is in a range between 1um and 5um, and preferably, in an actual process, the preset thickness is set to be about 3um, which is most suitable.
Of course, in practical applications, a person skilled in the art may select the thickness of the first insulating layer 3 according to actual needs, which is not limited in the embodiments of the present invention.
The first insulating layer 3 may be made of an organic resin material, such as a silicone material, an epoxy material, and the like, which is not limited in the embodiments of the present invention.
The first insulating layer 3 can be in a trapezoidal structure with the cross section in the vertical direction, the lower bottom of the trapezoidal structure is located on the substrate, the upper bottom of the trapezoidal structure is away from the substrate, the length of the lower bottom is larger than that of the upper bottom, the driving electrodes 1 and the sensing electrodes 2 cover the two opposite side waists of the trapezoid, and materials can be saved while the opposite area between the adjacent driving electrodes 1 and the adjacent sensing electrodes 2 is increased.
Of course, in practical applications, the first insulating layer 3 may be formed in other shapes, which is not limited in the embodiment of the present invention.
According to the embodiment of the invention, the first insulating layer with the preset thickness is arranged between the moving electrode and the induction electrode, so that the facing area of the driving electrode and the induction electrode at the first insulating layer can be increased, the capacitance between the driving electrode and the induction electrode can be improved, and the recognition capability of a touch signal is further improved.
In a preferred embodiment of the present invention, as shown in fig. 3, the substrate may include: the organic electroluminescent device comprises an organic electroluminescent device 6, a cathode 8, a TFE (thin film encapsulation layer) 7, a third insulating layer 4 and a second insulating layer 5 which are sequentially stacked, wherein a driving electrode 1 and an induction electrode 2 are positioned on one side, away from the third insulating layer 4, of the second insulating layer 5; among them, the organic electroluminescent device 6 may specifically include a first electrode, a light emitting layer, and a second electrode.
The conductive layer 9 is further arranged between the second insulating layer 5 and the third insulating layer 4, the driving electrode 1 and the sensing electrode 2 are arranged in the same layer and in a crossed manner, the driving electrode 1 is disconnected at the crossed portion of the driving electrode 2 and the sensing electrode 2, the conductive layer 9 is arranged at the crossed portion, a through hole 10 (shown in fig. 3) is further arranged on the second insulating layer 5, the disconnected driving electrode 1 can be electrically contacted with the conductive layer 9 through the through hole 10, connection between the conductive layer 9 and the driving electrode 1 is achieved, and therefore electrical connection between part of adjacent driving electrodes 1 can be achieved through the through hole and the conductive layer 9.
In another preferred embodiment of the present invention, the touch sensor may further include a protection layer (not shown in the figure), the protection layer is disposed on a side of the driving electrode 1 and the sensing electrode 2, which is away from the substrate, that is, the protection layer is disposed on the periphery of the touch sensor, so as to protect the touch sensor.
In the touch sensor provided by the embodiment of the invention, the first insulating layer with a preset thickness is arranged between the driving electrode and the sensing electrode, and two adjacent ends of the driving electrode and the sensing electrode are respectively positioned on two opposite side walls of the first insulating layer. According to the embodiment of the invention, the first insulating layer with the preset thickness is arranged between the driving electrode and the sensing electrode, so that the facing area of the driving electrode and the sensing electrode at the first insulating layer can be increased, the capacitance between the driving electrode and the sensing electrode can be improved, and the recognition capability of a touch signal can be improved.
An embodiment of the present invention further discloses a touch device, and as shown in fig. 3, the touch device may include a display device and a touch sensor located on one side of the display device as described in any one of the above.
The display device may be an OLED (Organic Light-emitting Diode), such as the OLED6 shown in fig. 3, or may have other structures, which is not limited in the embodiments of the present invention.
Of course, in the embodiment of the present invention, the OLED6 may be a flexible OLED, and may also be a rigid OLED, which is not limited in the embodiment of the present invention.
The OLED6 may include an encapsulation layer (e.g., TFE7 as shown in fig. 3), and the touch sensor may be disposed on TFE 7.
Example two
Referring to fig. 4, a flowchart illustrating steps of a method for manufacturing a touch sensor according to an embodiment of the present invention is shown, which may specifically include the following steps:
step 401: providing a substrate;
step 402: forming a plurality of discrete first insulating layers on the substrate;
step 403: and forming a driving electrode and an induction electrode on the substrate, wherein two adjacent ends of the driving electrode and the induction electrode are respectively positioned on two opposite side walls of the first insulating layer.
The touch sensor manufactured by the manufacturing method of the touch sensor provided by the embodiment of the invention can increase the opposite area between the driving electrode and the sensing electrode, thereby increasing the capacitance between the driving electrode and the sensing electrode and further improving the recognition capability of a touch signal.
As for step 401, the formed substrate may include a first electrode layer, TFE, a third insulating layer, and a second insulating layer, which are sequentially stacked, and a specific manufacturing flow of the substrate is described in the following preferred embodiments.
In a preferred embodiment of the present invention, the step 401 may include:
substep S1: depositing a third insulating layer on the substrate;
substep S2: depositing a conductive layer film on the third insulating layer;
substep S3: patterning the conducting layer film to form conducting layers arranged in an array;
substep S4: and depositing a second insulating layer on the third insulating layer and each conducting layer, and forming a through hole on the second insulating layer so that the driving electrode is connected with the conducting layer through the through hole.
In the embodiment of the present invention, the material of the third insulating layer and the second insulating layer may be oil-impregnated paper, rubber, fiber, plastic, and the like, which is not limited in this embodiment of the present invention.
The substrate may be formed of a transparent glass material whose main component is silicon dioxide, and the material forming the substrate is not limited to the transparent glass material, and may also be a transparent plastic material, which is not limited in this embodiment of the present invention.
A third insulating layer is deposited on the substrate, and a conductive layer thin film is deposited on the third insulating layer, where the conductive layer thin film may be made of IGZO (indium gallium zinc oxide) or the like, and certainly, other types of materials are not excluded, and embodiments of the present invention are not limited thereto.
And patterning the deposited conducting layer film to form the conducting layer arranged in an array.
And depositing second insulating layers on the third insulating layer and each conducting layer, and etching the second insulating layers to form a plurality of through holes, wherein each driving electrode can be connected with the conducting layers through the through holes, and the adjacent driving electrodes are connected with one conducting layer through two through holes, so that the electric signal transmission between the two adjacent driving electrodes can be realized through the conducting layers.
After the substrate is formed, a plurality of discrete first insulating layers may be formed on the substrate, and a driving electrode and a sensing electrode are further formed on the substrate, wherein two adjacent ends of the driving electrode and the sensing electrode are respectively located on two opposite sidewalls of the first insulating layers. The area opposite to the driving electrode and the sensing electrode is increased through the first insulating layer, so that the capacitance between the driving electrode and the sensing electrode is increased, and the recognition capability of a touch signal is improved.
The first insulating layers can be in a trapezoid cross section structure, the side length of each trapezoid structure close to the driving electrode and the sensing electrode is longer, the side length of each trapezoid structure far away from the driving electrode and the sensing electrode is shorter, and materials can be saved while the facing area between the adjacent driving electrodes and the adjacent sensing electrodes is increased.
In the embodiment of the present invention, the thickness range of the first insulating layer near the driving electrode and the sensing electrode may be between 1um and 5um, and preferably, in practical process, it is most suitable to set the preset thickness to be about 3 um. Of course, in practical applications, a person skilled in the art may select the thickness of the first insulating layer according to actual needs, and the embodiment of the invention is not limited thereto.
The first insulating layer may be made of an organic resin material, such as a silicone material, an epoxy material, and the like, which is not limited in the embodiments of the present invention.
Of course, in practical applications, the first insulating layer may be formed in other shapes, which is not limited in the embodiment of the present invention.
In the method for manufacturing the touch sensor provided by the embodiment of the invention, the first insulating layer with a preset thickness is arranged between the driving electrode and the sensing electrode, and two adjacent ends of the driving electrode and the sensing electrode are respectively positioned on two opposite side walls of the first insulating layer. According to the embodiment of the invention, the first insulating layer with the preset thickness is arranged between the driving electrode and the sensing electrode, so that the facing area of the driving electrode and the sensing electrode at the first insulating layer can be increased, the capacitance between the driving electrode and the sensing electrode can be improved, and the recognition capability of a touch signal can be improved.
While, for purposes of simplicity of explanation, the foregoing method embodiments have been described as a series of acts or combination of acts, it will be appreciated by those skilled in the art that the present invention is not limited by the illustrated ordering of acts, as some steps may occur in other orders or concurrently with other steps in accordance with the invention. Further, those skilled in the art should also appreciate that the embodiments described in the specification are preferred embodiments and that the acts and modules referred to are not necessarily required by the invention.
The embodiments in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The touch sensor, the touch device and the method for manufacturing the touch sensor provided by the invention are described in detail, and specific examples are applied to explain the principle and the implementation of the invention, and the description of the examples is only used to help understanding the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (9)
1. A touch sensor includes a driving electrode and a sensing electrode formed on a substrate;
a first insulating layer with a preset thickness is arranged between the adjacent driving electrode and the adjacent induction electrode; two adjacent ends of the driving electrode and the induction electrode are respectively positioned on two opposite side walls of the first insulating layer;
the two opposite side walls of the first insulating layer comprise a first side wall and a second side wall; the driving electrode completely covers the first side wall, and the sensing electrode completely covers the second side wall;
the driving electrode and the induction electrode respectively partially cover the surface of one side of the first insulating layer, which faces away from the substrate.
2. The touch sensor of claim 1, wherein the cross section of the first insulating layer is a trapezoid structure in a vertical direction, and two adjacent ends of the driving electrode and the sensing electrode cover two opposite lateral waists of the trapezoid structure.
3. The touch sensor according to claim 1, wherein the first insulating layer has a thickness of 1 to 5 μm, and is made of an organic resin material.
4. The touch sensor of claim 1, wherein the substrate comprises:
the organic light-emitting device, the thin film packaging layer, the third insulating layer and the second insulating layer are sequentially stacked, and the driving electrode and the sensing electrode are located on one side, deviating from the third insulating layer, of the second insulating layer.
5. The touch sensor according to claim 4, wherein a conductive layer is disposed in an array between the second insulating layer and the third insulating layer;
the driving electrode and the induction electrode are arranged in the same layer and are crossed, the driving electrode is disconnected at the crossed part of the driving electrode and the induction electrode, and the conducting layer is arranged at the crossed part;
and a through hole is formed in the second insulating layer, and the disconnected driving electrode is electrically contacted with the conductive layer through the through hole to realize connection.
6. The touch sensor of claim 1, further comprising a protective layer disposed on the drive and sense electrodes on a side facing away from the substrate.
7. A touch device comprising a display device and a touch sensor according to any one of claims 1-6 on a display side of the display device.
8. A method for manufacturing a touch sensor is characterized by comprising the following steps:
providing a substrate;
forming a plurality of discrete first insulating layers on the substrate;
forming a driving electrode and an induction electrode on the substrate, wherein two adjacent ends of the driving electrode and the induction electrode are respectively positioned on two opposite side walls of the first insulating layer;
the two opposite side walls of the first insulating layer comprise a first side wall and a second side wall; the driving electrode completely covers the first side wall, and the sensing electrode completely covers the second side wall;
the driving electrode and the induction electrode respectively partially cover the surface of one side of the first insulating layer, which faces away from the substrate.
9. The method of claim 8, wherein the providing a substrate comprises:
depositing a third insulating layer on the substrate;
depositing a conductive layer film on the third insulating layer;
patterning the conducting layer film to form conducting layers arranged in an array;
and depositing a second insulating layer on the third insulating layer and each conducting layer, and forming a through hole on the second insulating layer so that the driving electrode is connected with the conducting layer through the through hole.
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| CN109346503A (en) * | 2018-09-25 | 2019-02-15 | 武汉华星光电半导体显示技术有限公司 | Display panel and display device |
| US20220100296A1 (en) * | 2019-01-25 | 2022-03-31 | Shenzhen Royole Technologies Co., Ltd. | Flexible touch sensor electrode and manufacturing method therefor |
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| CN103150070B (en) * | 2013-03-05 | 2016-07-06 | 合肥京东方光电科技有限公司 | A kind of capacitance touching control module, capacitance type in-cell touch panel and display device |
| CN107219694B (en) * | 2017-07-28 | 2020-04-07 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
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| US20090078576A1 (en) * | 2007-05-17 | 2009-03-26 | Ting-Hao Lin | Embedded Passive Device Structure And Manufacturing Method Thereof |
| CN104156098A (en) * | 2013-05-14 | 2014-11-19 | 鸿富锦精密工业（深圳）有限公司 | Touch control screen and manufacturing method of touch control screen |
| CN105116582A (en) * | 2015-09-07 | 2015-12-02 | 昆山龙腾光电有限公司 | Liquid crystal display device and manufacture method of same |
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