CN111596796A - Three-dimensional touch module, driving method thereof and display device - Google Patents

Three-dimensional touch module, driving method thereof and display device Download PDF

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Publication number
CN111596796A
CN111596796A CN202010406096.7A CN202010406096A CN111596796A CN 111596796 A CN111596796 A CN 111596796A CN 202010406096 A CN202010406096 A CN 202010406096A CN 111596796 A CN111596796 A CN 111596796A
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touch
electrodes
dimensional
electrode
pressure
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CN111596796B (en
Inventor
张锋
刘文渠
姚琪
董立文
吕志军
宋晓欣
孟德天
王利波
侯东飞
黄海涛
肖维康
崔钊
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Position Input By Displaying (AREA)

Abstract

The application discloses a three-dimensional touch module, a driving method thereof and a display device, which are used for simplifying the structural complexity and the preparation difficulty of the three-dimensional touch module and simultaneously realizing the integration of a pressure touch function. The embodiment of the application provides a three-dimensional touch module includes: the touch control device comprises a plurality of touch control driving electrodes arranged in an array, a plurality of touch control induction electrodes arranged in an array, pressure induction electrodes which correspond to the touch control driving electrodes one by one and are arranged oppositely, and a dielectric layer positioned between the touch control driving electrodes and the pressure induction electrodes; the touch driving electrode and the touch sensing electrode are not overlapped and insulated from each other, and the pressure sensing electrode and the touch sensing electrode are not overlapped and insulated from each other; the touch driving electrodes are electrically connected through the first touch lead in the first direction, the touch sensing electrodes are electrically connected through the second touch lead in the second direction, the pressure sensing electrodes are electrically connected through the third touch lead in the first direction, and the first direction is crossed with the second direction.

Description

Three-dimensional touch module, driving method thereof and display device
Technical Field
The application relates to the technical field of display, in particular to a three-dimensional touch module, a driving method of the three-dimensional touch module and a display device of the three-dimensional touch module.
Background
At present, touch screens are widely applied to various electronic devices such as smart phones, tablet computers, televisions and the like. The conventional touch mode focuses on realizing position recognition of a finger in a two-dimensional plane. With the development of the touch screen technology, the touch pressure detection function can increase the touch mode to three dimensions, and richer human-computer interaction scenes can be realized. In the prior art, a pressure sensing function is realized by utilizing a capacitor structure designed in a complete machine, the structure is independent of a touch structure in a screen, so that the touch screen has a complex structure and higher production cost, and the thickness of a module and the complexity of the process can be increased by integrating the pressure sensing structure in the touch screen, so that the light and thin of a product are not utilized.
In summary, in the prior art, the scheme for realizing three-dimensional touch requires an additional pressure sensing structure, which results in a complicated touch screen structure, high production cost and no use of product lightness and thinness.
Disclosure of Invention
The embodiment of the application provides a three-dimensional touch module, a driving method thereof and a display device, which are used for simplifying the structural complexity and the preparation difficulty of the three-dimensional touch module and realizing the integration of a pressure touch function.
The three-dimensional touch module that this application embodiment provided, three-dimensional touch module includes: the touch control device comprises a plurality of touch control driving electrodes arranged in an array, a plurality of touch control induction electrodes arranged in an array, pressure induction electrodes which correspond to the touch control driving electrodes one to one and are arranged oppositely, and a dielectric layer positioned between the touch control driving electrodes and the pressure induction electrodes;
the touch driving electrode and the touch sensing electrode are not overlapped and insulated from each other, and the pressure sensing electrode and the touch sensing electrode are not overlapped and insulated from each other;
the touch driving electrodes are electrically connected through first touch leads in a first direction, the touch sensing electrodes are electrically connected through second touch leads in a second direction, the pressure sensing electrodes are electrically connected through third touch leads in the first direction, and the first direction is crossed with the second direction.
According to the three-dimensional touch module provided by the embodiment of the application, on the basis of the touch driving electrode, the touch sensing electrode and the dielectric layer of the touch position, the pressure sensing electrode opposite to the touch electrode is arranged on one side, away from the touch driving electrode, of the dielectric layer, so that touch pressure detection can be realized, one electrode for realizing touch pressure detection is used for multiplexing the touch driving electrode, and the pressure-touch function integration is realized.
Optionally, orthographic projections of the touch driving electrode and the pressure sensing electrode coincide.
Therefore, the touch driving electrode, the pressure sensing electrode and the dielectric layer form a sandwich structure, and the accuracy of touch pressure detection is improved.
Optionally, the touch sensing electrode and the pressure sensing electrode are located on the same layer;
the three-dimensional touch module further comprises: a first insulating layer located between the touch sensing electrode and the dielectric layer;
the second touch lead includes: a bridge portion between the first insulating layer and the dielectric layer; the bridging part is electrically connected with the touch sensing electrode through a via hole penetrating through the first insulating layer.
Optionally, the touch sensing electrode and the touch driving electrode are located on the same layer;
the three-dimensional touch module further comprises: a second insulating layer between the touch driving electrode and the dielectric layer;
the second touch lead includes: a bridge portion between the second insulating layer and the dielectric layer; the bridging part is electrically connected with the touch sensing electrode through a via hole penetrating through the second insulating layer.
Optionally, the material of the dielectric layer comprises: polyvinylidene fluoride; the polyvinylidene fluoride has piezoelectric performance through a low-temperature crystallization process and an electric field polarization process.
Optionally, the pressure sensing electrode is located on a side of the touch driving electrode departing from the touch operation.
The driving method of the three-dimensional touch module provided by the embodiment of the application includes:
a touch position detection stage, providing a first driving signal to the touch driving electrode, providing a touch position detection signal to the touch sensing electrode, receiving a touch sensing signal fed back by the touch sensing electrode, and determining a touch position according to the touch sensing signal;
and a touch pressure detection stage, providing a second driving signal to the touch driving electrode, providing a touch pressure detection signal to the pressure sensing electrode, receiving a pressure sensing signal fed back by the pressure sensing electrode, and determining touch pressure according to the pressure sensing signal.
According to the touch module driving method provided by the embodiment of the application, when touch operation occurs, the touch driving electrodes are driven in a time-sharing mode, the touch position is determined by the touch driving electrodes and the touch sensing electrodes in the touch position detection stage, and the touch pressure is determined by the touch driving electrodes and the touch sensing electrodes in the touch pressure detection stage, so that three-dimensional touch position detection can be achieved.
An embodiment of the present application provides a display device, the display device includes: the touch control module comprises an array substrate and the three-dimensional touch control module, wherein the three-dimensional touch control module is located on the array substrate.
The display device provided by the embodiment of the application comprises the three-dimensional touch module provided by the embodiment of the application, and the three-dimensional touch module comprises a structure for realizing integration of a pressure-touch function, so that a complex touch pressure detection structure independent of touch position detection is not required to be arranged, the structural complexity and the preparation difficulty of the display device are simplified, and the thickness of the display device can be further simplified.
Optionally, the array substrate includes: the electroluminescent device comprises a substrate base plate, a thin film transistor pixel circuit, an electroluminescent device and a packaging layer, wherein the thin film transistor pixel circuit is positioned on the substrate base plate, the electroluminescent device is positioned on the thin film transistor pixel circuit, and the packaging layer is positioned on the electroluminescent device and used for sealing the electroluminescent device;
the display device further includes: a color film and a black matrix on the packaging layer; the black matrix is provided with an opening area arranged in an array mode, and the color film is located in the opening area;
the three-dimensional touch module is located between the color film and the packaging layer.
Optionally, the orthographic projection of the black matrix covers the orthographic projection of the touch driving electrode, the orthographic projection of the touch sensing electrode and the orthographic projection of the pressure sensing electrode.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a three-dimensional touch module according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
fig. 6 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
fig. 7 is a schematic structural diagram of another three-dimensional touch module according to an embodiment of the present disclosure;
FIG. 8 shows the transmittance test results of PVDF provided in the examples of the present application in the visible light range;
fig. 9 is a flowchart of a driving method of a three-dimensional touch module according to an embodiment of the present disclosure;
fig. 10 is a schematic structural diagram of a display device according to an embodiment of the present application.
Detailed Description
The embodiment of the present application provides a three-dimensional touch module, as shown in fig. 1 and 2, the three-dimensional touch module includes: the touch control device comprises a plurality of touch control driving electrodes 1 arranged in an array, a plurality of touch control induction electrodes 2 arranged in an array, pressure induction electrodes 3 which correspond to the touch control driving electrodes 1 one by one and are arranged oppositely, and a dielectric layer 4 positioned between the touch control driving electrodes 1 and the pressure induction electrodes 3;
the touch driving electrode 1 and the touch sensing electrode 2 are not overlapped and insulated from each other, and the pressure sensing electrode 3 and the touch sensing electrode 2 are not overlapped and insulated from each other;
the touch driving electrodes 1 are electrically connected in a first direction Y through first touch leads 7; the touch control sensor 2 is electrically connected in a second direction X through a second touch control lead 8; the pressure sensing electrodes are electrically connected in a first direction through a third touch lead; the first direction Y and the second direction X intersect.
Fig. 2 is a top view of a touch driving electrode and a touch sensing electrode in a three-dimensional touch module according to an embodiment of the present disclosure. In fig. 2, the first direction is taken as a Y direction, and the second direction is taken as an X direction for example, in a specific implementation, the first direction and the second direction may be selected according to actual needs.
It should be noted that, in the three-dimensional touch module provided in the embodiments of the present application, the dielectric layer is used as an insulating layer between the touch driving electrode and the touch sensing electrode, and the pressure sensing electrode is further disposed on a side of the dielectric layer away from the touch driving electrode, because the dielectric material has piezoelectric property, the interconversion between mechanical energy and electric energy can be realized, when a certain amount of force is applied to the dielectric layer, a certain amount of charges are generated on the surface of the dielectric layer, the amount of the charges generated by the dielectric layer is in direct proportion to the force, therefore, the three-dimensional touch module provided by the embodiment of the application can determine the magnitude of the touch pressure by detecting the capacitance change between the touch driving electrode and the pressure sensing electrode, and the three-dimensional touch module can also determine the touch position through the capacitance change between the touch driving electrode and the touch sensing electrode, so that the three-dimensional touch position detection can be realized.
According to the three-dimensional touch module provided by the embodiment of the application, on the basis of the touch driving electrode, the touch sensing electrode and the dielectric layer of the touch position, the pressure sensing electrode opposite to the touch electrode is arranged on one side, away from the touch driving electrode, of the dielectric layer, so that touch pressure detection can be realized, one electrode of the touch pressure detection is reused for the touch driving electrode, therefore, the pressure-touch function integration can be realized, a complex touch pressure detection structure independent of touch position detection is not required to be arranged, and the structural complexity and the preparation difficulty of the three-dimensional touch module are simplified.
In fig. 2, the projection shapes of the touch sensing electrodes and the touch driving electrodes are illustrated as rectangular blocks. Of course, in specific implementation, as shown in fig. 3, the projection shapes of the touch sensing electrodes and the touch driving electrodes may be bar shapes, and in fig. 3, the widths of the touch leads are the same as the widths of the electrodes. Alternatively, when the projection shapes of the touch sensing electrodes and the touch driving electrodes are rectangular blocks, the arrangement of the touch sensing electrodes and the touch driving electrodes may be as shown in fig. 4.
Optionally, as shown in fig. 1, orthographic projections of the touch driving electrode and the pressure sensing electrode coincide. The touch driving electrode, the pressure sensing electrode and the dielectric layer form a sandwich structure, and the accuracy of touch pressure detection is improved.
In specific implementation, the orthographic projection of the third touch lead coincides with the orthographic projection of the first touch lead.
Optionally, as shown in fig. 1 and 5, the touch sensing electrode 2 and the pressure sensing electrode 3 are located on the same layer;
the three-dimensional touch module further comprises: a first insulating layer 5 located between the touch sensing electrode 2 and the dielectric layer 4;
the second touch lead 8 includes: a bridge 9 between the first insulating layer 5 and the dielectric layer 4;
the bridging portion 9 is electrically connected to the touch sensing electrode 2 through a via hole penetrating through the first insulating layer 5.
Optionally, as shown in fig. 6 and 7, the touch sensing electrodes 2 and the touch driving electrodes 1 are located on the same layer;
the three-dimensional touch module further comprises: a second insulating layer 11 located between the touch driving electrode 1 and the dielectric layer 4;
the second touch lead 8 includes: a bridge 9 between the second insulating layer 11 and the dielectric layer 4; the bridging portion 9 is electrically connected to the touch sensing electrode 2 through a via hole penetrating through the second insulating layer 11.
Fig. 1 and 6 may be, for example, cross-sectional views along AA 'in fig. 2, and fig. 5 and 7 may be, for example, cross-sectional views along BB' in fig. 2.
In specific implementation, as shown in fig. 5 and 7, the orthographic projection of the third touch lead 10 coincides with the orthographic projection of the first touch lead 7.
It should be noted that no matter which layer the touch sensing electrode is located, in order to reduce the capacitance generated between the touch sensing electrode and the pressure sensing electrode as much as possible, the larger the distance between the touch sensing electrode and the pressure sensing electrode in the same touch structure is, the better the distance is.
In a specific implementation, the touch driving electrode is further electrically connected to a driving chip (IC), and the touch driving electrode may be electrically connected to two ICs, where one IC is used to provide a signal to the touch driving electrode in a touch position detection stage, and the other IC is used to provide a signal to the touch driving electrode in a touch pressure detection stage. Of course, the touch driving electrodes may also be electrically connected to an IC, and the IC provides signals to the touch driving electrodes during the touch position phase and provides signals to the touch driving electrodes during the touch pressure detection phase.
Optionally, the material of the dielectric layer comprises: polyvinylidene fluoride (PVDF); the PVDF has piezoelectric properties through a low-temperature crystallization process and an electric field polarization process.
PVDF has a certain dielectric property, the dielectric production constant of the PVDF is 9-12, and when a force is applied, the charge produced by the PVDF is in direct proportion to the magnitude of the force. When the dielectric layer is made of PVDF, the result of transmittance test of PVDF in a visible light range by film-forming at a low temperature process is shown in fig. 8, the average transmittance of PVDF in the visible light range is 95.87%, and the transmittance is high.
Moreover, it should be noted that, for a scheme in the prior art in which the touch pressure detection structure is independent of the touch position detection structure, the pressure classification for realizing touch pressure detection is at most 3 levels, and the touch pressure detection sensitivity is low. In the three-dimensional touch module provided by the embodiment of the application, the organic material PVDF can be used as a dielectric layer of a touch structure and a piezoelectric layer for detecting touch pressure, so that the function of detecting the touch pressure is completely integrated in the touch structure for detecting a touch position, the pressure classification of the touch pressure detection can reach 10 levels by the structure, the recognition flexibility is greatly improved, richer man-machine interaction can be realized, and the thickness and the process difficulty of the touch module can be reduced.
Optionally, the pressure sensing electrode is located on a side of the touch driving electrode departing from the touch operation.
In a specific implementation, the three-dimensional touch module may be formed on the substrate 6, for example. The three-dimensional touch module further comprises: and the packaging insulating layer is positioned on one side of the touch drive electrode, which is far away from the dielectric layer.
Based on the same inventive concept, an embodiment of the present application further provides a driving method of a three-dimensional touch module, as shown in fig. 9, the method includes:
s101, in a touch position detection stage, providing a first driving signal to the touch driving electrode, providing a touch position detection signal to the touch sensing electrode, receiving a touch sensing signal fed back by the touch sensing electrode, and determining a touch position according to the touch sensing signal;
s102, in a touch pressure detection stage, providing a second driving signal to the touch driving electrode, providing a touch pressure detection signal to the pressure sensing electrode, receiving a pressure sensing signal fed back by the pressure sensing electrode, and determining touch pressure according to the pressure sensing signal.
According to the touch module driving method provided by the embodiment of the application, when touch operation occurs, the touch driving electrodes are driven in a time-sharing mode, the touch position is determined by the touch driving electrodes and the touch sensing electrodes in the touch position detection stage, and the touch pressure is determined by the touch driving electrodes and the touch sensing electrodes in the touch pressure detection stage, so that three-dimensional touch position detection can be achieved.
It should be noted that, in fig. 9, the touch position detection is performed first and then the touch pressure detection is taken as an example, and in the specific implementation, the touch pressure detection may be performed first and then the touch position detection may be performed.
It should be noted that, in the stage of detecting the touch position, no signal is provided to the pressure sensing electrode, the pressure sensing electrode does not work, and the touch position detection is not affected.
In the specific implementation, in the touch test stage, the capacitance change between the touch driving electrode and the touch sensing electrode is determined according to the touch sensing signal, so that the touch position is determined. And in the pressure testing stage, the capacitance change between the touch driving electrode and the pressure sensing electrode is determined according to the pressure sensing signal, so that the touch pressure is determined.
Based on the same inventive concept, an embodiment of the present application further provides a display device, as shown in fig. 10, the display device includes: the touch panel includes an array substrate 12, and the three-dimensional touch module 13 provided in the embodiment of the present application and located on the array substrate 12.
The display device provided by the embodiment of the application comprises the three-dimensional touch module provided by the embodiment of the application, and the three-dimensional touch module comprises a structure for realizing integration of a pressure-touch function, so that a complex touch pressure detection structure independent of touch position detection is not required to be arranged, the structural complexity and the preparation difficulty of the display device are simplified, and the thickness of the display device can be further simplified.
Alternatively, as shown in fig. 10, the array substrate 12 includes: a substrate base plate 14, a thin film transistor 15 positioned on the substrate base plate, an electroluminescent device 16 positioned on the thin film transistor 15, and an encapsulation layer 17 positioned on the electroluminescent device 16 and sealing the electroluminescent device 16;
the display device further includes: a color film 18 and a black matrix 19 on the encapsulation layer 17; the black matrix 19 is provided with an opening area arranged in an array, and the color film 18 is positioned in the opening area;
the three-dimensional touch module 13 is located between the color film 18 and the encapsulation layer 17.
That is, the display device provided in the embodiments of the present application may be, for example, an electroluminescent display device, and the electroluminescent device may be, for example, an organic light emitting diode device (OLED).
As shown in fig. 10, an insulating layer 20 is further included between the thin film transistor 15 and the substrate 14, and the insulating layer 20 may specifically include: the buffer layer structure comprises a Polyimide (PI) layer, a first buffer layer and a second buffer layer which are sequentially formed. The thin film transistor 15 includes: an active layer 21, a Gate Insulator (GI) 22 on the active layer 21, a Gate electrode 23 on the Gate Insulator 22, an Interlayer Insulator (ILD) 24 on the Gate electrode 23, and a source electrode 25 and a drain electrode 26 on the Interlayer Insulator 24, wherein the source electrode 25 and the drain electrode 26 are in contact with the active layer 21 through a via hole penetrating the Interlayer Insulator 24 and the Gate Insulator 22. The electroluminescent device 16 includes: an anode 27, a light-emitting functional layer 28, and a cathode 29 are stacked in this order. A Planarization Layer (PLN) 30 is further included between the anode 27 and the drain 26, and the anode 27 is electrically connected to the drain 26 through a via penetrating through the Planarization layer 30. A pixel defining layer 31 is also provided between the electroluminescent devices. The three-dimensional touch module 13 further includes an encapsulation insulating layer 33. An Optical Clear Adhesive (OCA)34 and a cover glass 35 are further included on the color film 18 and the black matrix 19.
In fig. 10, a thin film transistor having a top gate structure is illustrated as an example, and in a specific implementation, the thin film transistor may have a bottom gate structure. In fig. 10, it is exemplified that the touch sensing electrodes and the pressure sensing electrodes are located at the same layer, and in the specific implementation, the touch sensing electrodes may be located at the same layer as the touch driving electrodes.
In one embodiment, the display device is divided into a plurality of sub-pixels, and the opening regions of the black matrix and the electroluminescent devices are in one-to-one correspondence with the sub-pixels. The sub-pixels may include, for example, a red sub-pixel, a blue sub-pixel, and a green sub-pixel. The electroluminescent device corresponding to the red sub-pixel comprises a red light emitting functional layer, and the color film corresponding to the red sub-pixel comprises a red color resistor. The electroluminescent device corresponding to the blue sub-pixel comprises a blue light emitting functional layer, and the color film corresponding to the blue sub-pixel comprises a blue color resistor. The electroluminescent device corresponding to the green sub-pixel comprises a green light emitting functional layer, and the color film corresponding to the green sub-pixel comprises a green color resistor.
In a specific implementation, the encapsulation layer may be, for example, a thin film encapsulation layer, and the film encapsulation layer may include, for example: the organic light-emitting device comprises a first inorganic packaging layer, a second inorganic packaging layer and an organic packaging layer positioned between the first inorganic packaging layer and the second inorganic packaging layer.
According to the display device provided by the embodiment of the application, the color film is arranged on the packaging insulating layer of the three-dimensional touch module, so that the color gamut and the brightness of the display device can be improved.
Optionally, as shown in fig. 10, the orthographic projection of the black matrix covers the orthographic projection of the touch driving electrode, the orthographic projection of the touch sensing electrode, and the orthographic projection of the pressure sensing electrode.
According to the display device provided by the embodiment of the application, the touch driving electrode, the touch sensing electrode and the pressure sensing electrode are arranged in the area shielded by the black matrix, so that the transmittance and the brightness of the display device cannot be influenced.
In specific implementation, the preparation of the display device provided in the embodiments of the present application may include, for example, the following steps:
s201, sequentially depositing a PI film, a first buffer layer and a second buffer layer on the whole surface of a glass substrate;
s202, depositing an active layer by adopting a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, and forming a pattern of the active layer by adopting a patterning process;
s203, depositing a GI layer by adopting a PECVD process;
s204, depositing a grid layer by adopting a sputtering (Sputter) process and forming a grid pattern by adopting a patterning process;
s205, forming an interlayer insulating layer by adopting a Coating (Coating) process, and forming a via hole which penetrates through the interlayer insulating layer and the gate insulating layer and exposes part of the active layer by adopting a patterning process;
the material of the interlayer insulating layer may be, for example, an organic material;
s206, depositing a source drain layer by adopting a Sputter process, and forming patterns of a source electrode and a drain electrode by adopting a patterning process;
s207, forming a PLN layer, and forming a via hole in the PLN layer by adopting a patterning process;
s208, depositing an anode by adopting a Sputter process and forming a pattern of the anode by adopting a patterning process;
s209, preparing a PDL layer and forming a PDL pattern by adopting a patterning process;
s210, evaporating a light-emitting functional layer by using evaporation equipment;
s211, evaporating a cathode by using evaporation equipment;
s212, preparing by adopting packaging equipment, and carrying out thin film packaging to form a TFE packaging layer;
s213, preparing an electrode layer by adopting a sputter low-temperature process, and forming patterns of the touch sensing electrode and the pressure sensing electrode by adopting a patterning process;
s214, Coating PVDF by using a Coating process, removing a solvent in a PVDF solution for a preset time period after the PVDF is cured at a preset temperature, then forming more beta phases by using a low-temperature crystallization process, polarizing the PVDF under a high-voltage electric field to enable the PVDF to have piezoelectric properties, and finally forming a pattern of a dielectric layer by using a patterning process;
s215, forming an electrode layer through a sputter low-temperature process and forming a pattern of the touch drive electrode by adopting a patterning process;
s216, forming a packaging insulating layer;
s217, forming a color film and a black matrix, and flattening by using low-temperature OCA glue;
and S218, forming cover glass.
In particular implementations, the patterning process may include, for example, a photolithography and etching process.
In particular implementations, Coating PVDF can be coated, for example, using 650 revolutions per 30 seconds; the preset temperature for curing the PVDF may be, for example, 80 degrees Celsius (C.), and the preset time for curing may be, for example, 20 minutes; the preset temperature for crystallization of PVDF can be 90 ℃ for example, and the preset duration for crystallization can be 90 ℃ for example; the high voltage electric field for PVDF polarization may be, for example, 15 picograms per Newton (pC/N). In the embodiment of the application, the PVDF dielectric layer is formed in a low-temperature process, and the process temperature does not exceed 110 ℃ in the preparation process of the dielectric layer, so that the performance of the OLED light-emitting functional layer material is not affected.
In summary, according to the three-dimensional touch module, the driving method thereof, and the display device provided in the embodiments of the present application, on the basis of the touch driving electrode, the touch sensing electrode, and the dielectric layer at the touch position, the pressure sensing electrode opposite to the touch electrode is only disposed on the side of the dielectric layer away from the touch driving electrode, so that touch pressure detection can be achieved, one of the electrodes for touch pressure detection is reused for the touch driving electrode, and pressure-touch function integration is achieved.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (10)

1. The three-dimensional touch module is characterized by comprising: the touch control device comprises a plurality of touch control driving electrodes arranged in an array, a plurality of touch control induction electrodes arranged in an array, pressure induction electrodes which correspond to the touch control driving electrodes one to one and are arranged oppositely, and a dielectric layer positioned between the touch control driving electrodes and the pressure induction electrodes;
the touch driving electrode and the touch sensing electrode are not overlapped and insulated from each other, and the pressure sensing electrode and the touch sensing electrode are not overlapped and insulated from each other;
the touch driving electrodes are electrically connected through first touch leads in a first direction, the touch sensing electrodes are electrically connected through second touch leads in a second direction, the pressure sensing electrodes are electrically connected through third touch leads in the first direction, and the first direction is crossed with the second direction.
2. The three-dimensional touch module according to claim 1, wherein orthographic projections of the touch driving electrodes and the pressure sensing electrodes coincide.
3. The three-dimensional touch module according to claim 1, wherein the touch sensing electrodes and the pressure sensing electrodes are located on the same layer;
the three-dimensional touch module further comprises: a first insulating layer located between the touch sensing electrode and the dielectric layer;
the second touch lead includes: the bridging portion is located between the first insulating layer and the dielectric layer and is electrically connected with the touch sensing electrode through a through hole penetrating through the first insulating layer.
4. The three-dimensional touch module according to claim 1, wherein the touch sensing electrodes and the touch driving electrodes are located on the same layer;
the three-dimensional touch module further comprises: a second insulating layer between the touch driving electrode and the dielectric layer;
the second touch lead includes: the bridging part is positioned between the second insulating layer and the dielectric layer and is electrically connected with the touch sensing electrode through a through hole penetrating through the second insulating layer.
5. The three-dimensional touch module according to claim 1, wherein the dielectric layer comprises: polyvinylidene fluoride; the polyvinylidene fluoride has piezoelectric performance through a low-temperature crystallization process and an electric field polarization process.
6. The three-dimensional touch module according to claim 1, wherein the pressure sensing electrode is located on a side of the touch driving electrode facing away from the touch operation.
7. The method for driving the three-dimensional touch module according to any one of claims 1 to 6, wherein the method comprises:
a touch position detection stage, providing a first driving signal to the touch driving electrode, providing a touch position detection signal to the touch sensing electrode, receiving a touch sensing signal fed back by the touch sensing electrode, and determining a touch position according to the touch sensing signal;
and a touch pressure detection stage, providing a second driving signal to the touch driving electrode, providing a touch pressure detection signal to the pressure sensing electrode, receiving a pressure sensing signal fed back by the pressure sensing electrode, and determining touch pressure according to the pressure sensing signal.
8. A display device, characterized in that the display device comprises: the three-dimensional touch control module comprises an array substrate and the three-dimensional touch control module according to any one of claims 1 to 6, wherein the three-dimensional touch control module is positioned on the array substrate.
9. The display device according to claim 8, wherein the array substrate comprises: the electroluminescent device comprises a substrate base plate, a thin film transistor, an electroluminescent device and a packaging layer, wherein the thin film transistor is positioned on the substrate base plate, the electroluminescent device is positioned on the thin film transistor, and the packaging layer is positioned on the electroluminescent device and used for sealing the electroluminescent device;
the display device further includes: a color film and a black matrix on the packaging layer; the black matrix is provided with an opening area arranged in an array mode, and the color film is located in the opening area;
the three-dimensional touch module is located between the color film and the packaging layer.
10. The display device according to claim 9, wherein an orthogonal projection of the black matrix covers an orthogonal projection of the touch driving electrodes, an orthogonal projection of the touch sensing electrodes, and an orthogonal projection of the pressure sensing electrodes.
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