CN108534800B - MEMS-IMU full-temperature full-parameter calibration compensation method - Google Patents

MEMS-IMU full-temperature full-parameter calibration compensation method Download PDF

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CN108534800B
CN108534800B CN201810194768.5A CN201810194768A CN108534800B CN 108534800 B CN108534800 B CN 108534800B CN 201810194768 A CN201810194768 A CN 201810194768A CN 108534800 B CN108534800 B CN 108534800B
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temperature
accelerometer
imu
gyroscope
full
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CN108534800A (en
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孙婷婷
储海荣
张宏巍
陈阳
张德进
张百强
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • G01—MEASURING; TESTING
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Abstract

The invention provides an MEMS-IMU full-temperature full-parameter calibration compensation method, which adopts close combination of temperature control turntable calibration and precision centrifugal calibration to complement each other in action, wherein the temperature control turntable calibration is used for calibrating zero offset, temperature coefficient, scale factor, installation coupling error and nonlinear error of a gyroscope in the MEMS-IMU, the acceleration effect coefficient of the gyroscope can be calibrated by the zero offset, temperature coefficient and precision centrifugal calibration of the accelerometer, the scale factor, installation coupling error, nonlinear error, lever arm effect and the like of the accelerometer, and the full-error parameters of the MEMS-IMU in a full-temperature state can be accurately calibrated, so that the precision of the MEMS-IMU in the practical application process is improved.

Description

MEMS-IMU full-temperature full-parameter calibration compensation method
Technical Field
The invention relates to the field of testing of inertial devices, in particular to a MEMS-IMU full-temperature full-parameter calibration compensation method.
Background
The MEMS inertial sensor has the characteristics of small volume, low cost, light weight, strong environmental adaptability and the like, so that the MEMS inertial sensor is widely applied to various fields. Aiming at the problem of poor precision, researches for improving the precision are competitively developed in the related fields. Two methods for improving the precision of the MEMS-IMU are mainly used, one is to research or purchase a MEMS inertial sensor with higher precision, which inevitably brings about great increase in time and cost; the other method is to calibrate and compensate the error of the MEMS inertial sensor and improve the use precision of the MEMS inertial sensor, and the method has the advantages of low cost, simplicity and easiness in implementation.
The conventional MEMS-IMU calibration method is characterized in that each axis gyroscope and cross coupling between the axis gyroscopes are calibrated through a rate turntable, errors such as zero offset and scale factors of an accelerometer under the condition that earth gravity acceleration is +/-1 g input are calibrated through a six-position method, and then the temperature characteristics of the MEMS-IMU are identified by putting the MEMS-IMU into a warm box to collect zero offset changes of inertia devices at different temperatures.
For the temperature characteristic, a method for calibrating the MEMS-IMU by a temperature box turntable alone is also available, although the method can calibrate the temperature coefficient and most error parameters of the gyroscope and the accelerometer, the calibration of all the error parameters in the full temperature state is not comprehensive, the method cannot calibrate the error coefficient of the gyroscope changing along with the acceleration, and can only calibrate the output condition of the accelerometer when the input is +/-1 g, and the condition of the acceleration being other values must be considered in the practical application process, so the method cannot obtain higher calibration precision.
Disclosure of Invention
In view of this, the embodiment of the present invention provides a calibration compensation method for full-temperature full parameters of an MEMS-IMU, which can accurately calibrate full-error parameters of the MEMS-IMU in a full-temperature state, and improve the precision of the MEMS-IMU in an actual application process.
Compared with the conventional calibration method, the calibration process of a single sensor or a single error parameter is omitted. Not only improves the calibration precision, but also obviously improves the experimental efficiency. Meanwhile, the defect of incomplete calibration parameters caused by independent temperature control calibration is avoided.
The invention provides a MEMS-IMU full-temperature full-parameter calibration compensation method, which comprises the following steps:
establishing a calibration model of a gyroscope and an accelerometer;
calibrating the zero offset of the gyroscope, the temperature correction coefficient of the gyroscope, the scale factor of the gyroscope, the installation coupling error of the gyroscope, the nonlinear error of the gyroscope, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer in a full-temperature state by using a temperature control turntable;
substituting the zero offset of the gyroscope, the temperature correction coefficient of the gyroscope, the scale factor of the gyroscope, the installation coupling error of the gyroscope, the nonlinear error of the gyroscope, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer as known error compensation parameters into the calibration model of the gyroscope and the accelerometer to perform parameter compensation;
and calibrating the acceleration effect coefficient of the gyroscope, the scale factor of the accelerometer, the mounting coupling error of the accelerometer, the nonlinear error of the accelerometer and the lever arm effect of the accelerometer in the full-temperature state by using the precision centrifuge so as to finish calibrating all error parameters in the full-temperature state.
As a possible implementation manner, the establishing a calibration model of a gyroscope and an accelerometer includes: establishing a gyro calibration model
ω＝(K+Mg)Ω+(K1Ω+K2Ω2+K3Ω3)+B+Ca+υ，
Figure BDA0001592759330000021
Is the actual angular velocity loaded on the IMU;
Figure BDA0001592759330000022
is the output angular velocity value of the gyroscope;
Figure BDA0001592759330000023
is a gyroscope scale factor matrix, gamma1、δ1Is a temperature change correction coefficient;
Figure BDA0001592759330000031
the mounting error correction matrix is an error deflection angle existing between the gyroscope and the mounting base;
Figure BDA0001592759330000032
is a non-linearity correction term;
Figure BDA0001592759330000033
is a zero-offset matrix, gamma0、δ0Is a zero offset temperature variation correction coefficient;
Figure BDA0001592759330000034
is an acceleration-related correction term, upsilon is a random error;
according to the input-output relation of the gyroscope, combining the calibration models of the gyroscope into:
Figure BDA0001592759330000035
establishing accelerometer calibration model
a＝(S+Ma)A+(S1A+S2A2+S3A3)+D+Rω2+v
Figure BDA0001592759330000041
Is the actual specific force loaded on the IMU;
Figure BDA0001592759330000042
is the output specific force value of the accelerometer;
Figure BDA0001592759330000043
is a scale factor matrix, alpha, of the accelerometer1,β1Is a temperature change correction coefficient;
Figure BDA0001592759330000044
is accelerometer installation error correctionA positive matrix;
Figure BDA0001592759330000045
is the accelerometer non-linearity correction term;
Figure BDA0001592759330000046
is the accelerometer zero-offset correction term, alpha0,β0Is a zero offset temperature variation correction coefficient;
Figure BDA0001592759330000047
is a centrifugal acceleration error correction term, upsilon is a random error;
the calibration model of the accelerometer is merged as:
Figure BDA0001592759330000051
as a possible implementation, the method further includes:
and calibrating the MEMS-IMU by adopting positive and negative rotation of six positions.
As a possible implementation manner, the calibrating the MEMS-IMU by positive and negative rotation of six positions includes:
the output of the i-axis gyroscope in positive and negative rotation is as follows:
Ωji+＝f(ωj+ωie,-g)
Ωji-＝f(-ωj+ωie,-g)
wherein the i-axis is the sensitive axis, Ωji+Output representing positive rotation of j-point rotation speed, Ωji-Output, ω, representing j-point speed reversaljRepresenting j-point turntable input angular rate, omegaieThe earth rotation speed is represented, so that the influence of the earth rotation and the gravity acceleration can be deducted by subtracting two formulas, and the output of the j-point rotating speed gyro is obtained as follows:
Figure BDA0001592759330000052
as a possible realization mode, the calibration temperature range of the temperature rotary table is set to be-40-60 ℃, one temperature point is set at intervals of 10 ℃, and each temperature point is kept warm for half an hour before rotation measurement is carried out.
As a possible implementation manner, the calibrating, by using the temperature control turntable, a zero offset of the gyro, a temperature correction coefficient of the gyro, a scale factor of the gyro, an installation coupling error of the gyro, a nonlinear error of the gyro, a zero offset of the accelerometer, and a temperature correction coefficient of the accelerometer in the full temperature state includes:
step 1, fixing the position of an IMU on a temperature control rotary table through a tool and standing still, and electrifying and preheating the IMU for 30 minutes after electrical installation and check are correct;
step 2, powering up the temperature control rotary table, setting the temperature point of the temperature control rotary table and preserving heat for half an hour, wherein the temperature points are set from low to high;
step 3, setting the rotation speed and the rotation direction of the temperature control rotary table, setting the temperature control rotary table to rotate forwards, starting the temperature control rotary table, judging whether the angular speed is stable in an inquiring mode, outputting and sampling a gyroscope, wherein the sampling time is 30 seconds, and the temperature control rotary table stops rotating;
step 4, setting the same rotation rate, setting the temperature control rotary table to perform reverse rotation, starting the temperature control rotary table, judging whether the angular rate is stable in a query mode, and then sampling the output of the gyroscope, wherein the sampling time is 30 seconds;
step 5, changing the input rotation rate of the temperature control rotary table according to the sequence of the rotation rate from small to large, and repeatedly executing the step 3 and the step 4 until all angular rate points needing to be calibrated are measured;
step 6, setting the next temperature point according to the sequence of the preset temperature points from low to high, and repeatedly executing the step 3, the step 4 and the step 5;
step 7, repeatedly executing the step 6 until all temperature points needing to be calibrated in the preset temperature points are calibrated;
step 8, changing the sensitive axis of the IMU according to the preset position sequence, and repeatedly executing the step 6 and the step 7;
and 9, repeatedly executing the step 8 until the preset position sequence is calibrated.
As a possible implementation manner, the calibration of the acceleration effect coefficient of the gyroscope, the scale factor of the accelerometer, the installation coupling error of the accelerometer, the nonlinear error of the accelerometer, and the lever arm effect of the accelerometer in the full temperature state by using the precision centrifuge includes:
step 11, fixing the MEMS-IMU on an installation base surface of a centrifuge through a tool, electrifying the MEMS-IMU after electrical installation and check are correct, and preheating for 5 minutes;
step 12, powering up the centrifuge, setting acceleration points to be calibrated of the centrifuge, and performing experiments in the sequence from small to large according to the preset acceleration points;
step 13, starting the centrifugal machine, outputting and sampling IMU after the acceleration of the centrifugal machine is stable, wherein the sampling time is 5 seconds, the centrifugal machine stops rotating, and the centrifugal machine is static for 30 seconds;
step 14, repeating the step 12 and the step 13 until the calibration of the test point of the preset acceleration point is finished;
step 15, changing the sensitive axis of the IMU according to the preset position sequence, and repeatedly executing the step 12, the step 13 and the step 14;
and step 16, repeatedly executing the step 15 until the preset position sequence calibration of the centrifuge is completed.
As a possible implementation manner, the calibration system adopted by the calibration method comprises a regular hexahedron calibration tool, a mounting fixture, a temperature control turntable, a test power supply, an upper computer and a test data acquisition system, the MEMS-IMU is fixed on the mounting fixture through the regular hexahedron calibration tool, the upper computer is electrically connected with the temperature control turntable through a USB CAN bus, and the test data acquisition system is electrically connected with the upper computer through a data network port.
The invention provides an MEMS-IMU full-temperature full-parameter calibration compensation method, which adopts close combination of temperature control turntable calibration and precision centrifugal calibration to complement each other in action, wherein the temperature control turntable calibration is used for calibrating zero offset, temperature coefficient, scale factor, installation coupling error and nonlinear error of a gyroscope in the MEMS-IMU, the acceleration effect coefficient of the gyroscope can be calibrated by the zero offset, temperature coefficient and precision centrifugal calibration of the accelerometer, the scale factor, installation coupling error, nonlinear error, lever arm effect and the like of the accelerometer, and the full-error parameters of the MEMS-IMU in a full-temperature state can be accurately calibrated, so that the precision of the MEMS-IMU in the practical application process is improved.
Drawings
FIG. 1 is a flow chart of a MEMS-IMU full temperature full parameter calibration compensation method in an embodiment of the present invention;
FIG. 2 is a schematic diagram of an installation coupling error of a three-axis gyroscope or a three-axis accelerometer in the MEMS-IMU full-temperature full-parameter calibration compensation method in the embodiment of the invention;
FIG. 3 is a schematic diagram of the components and operation of a temperature-controlled turntable calibration system in the MEMS-IMU full-temperature full-parameter calibration compensation method in the embodiment of the present invention;
FIG. 4 is a diagram of six calibration positions of a temperature-controlled turntable in the MEMS-IMU full-temperature full-parameter calibration compensation method according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of the centrifugal calibration installation in the MEMS-IMU full-temperature full-parameter calibration compensation method in the embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1, the present invention provides a method for MEMS-IMU full-temperature full-parameter calibration compensation, which comprises:
s101, establishing a calibration model of a gyroscope and an accelerometer;
s102, calibrating zero offset of the gyroscope, a temperature correction coefficient of the gyroscope, a scale factor of the gyroscope, an installation coupling error of the gyroscope, a nonlinear error of the gyroscope, zero offset of the accelerometer and the temperature correction coefficient of the accelerometer in a full-temperature state by using a temperature control turntable;
s103, substituting the zero offset of the gyroscope, the temperature correction coefficient of the gyroscope, the scale factor of the gyroscope, the installation coupling error of the gyroscope, the nonlinear error of the gyroscope, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer as known error compensation parameters into the calibration model of the gyroscope and the accelerometer to perform parameter compensation;
and S104, calibrating the acceleration effect coefficient of the gyroscope, the scale factor of the accelerometer, the installation coupling error of the accelerometer, the nonlinear error of the accelerometer and the lever arm effect of the accelerometer in the full-temperature state by using a precision centrifuge so as to complete calibration of all error parameters in the full-temperature state.
Step 1, establishing a comprehensive calibration model
Gyro calibration model
ω＝(K+Mg)Ω+(K1Ω+K2Ω2+K3Ω3)+B+Ca+υ (1)
Figure BDA0001592759330000081
Is the actual angular velocity loaded on the IMU;
Figure BDA0001592759330000091
is the output angular velocity value of the gyroscope;
Figure BDA0001592759330000092
is a gyroscope scale factor matrix, gamma1、δ1Is a temperature change correction coefficient;
Figure BDA0001592759330000093
is a mounting error correction matrix, i.e. the error deflection angle between the gyroscope and the mounting base, see fig. 2;
Figure BDA0001592759330000094
is a non-linearity correction term;
Figure BDA0001592759330000095
is a zero-offset matrix, gamma0、δ0Is a zero offset temperature variation correction coefficient;
Figure BDA0001592759330000096
is an acceleration-related correction term;
v is the random error.
According to the input-output relation of the gyroscope, combining the calibration models of the gyroscope into:
Figure BDA0001592759330000101
accelerometer calibration model
a＝(S+Ma)A+(S1A+S2A2+S3A3)+D+Rω2+v (3)
Figure BDA0001592759330000102
Is the actual specific force loaded on the IMU;
Figure BDA0001592759330000103
is the output specific force value of the accelerometer;
Figure BDA0001592759330000104
is a scale factor matrix, alpha, of the accelerometer1,β1Is a temperature change correction coefficient;
Figure BDA0001592759330000105
is an accelerometer mounting error correction matrix;
Figure BDA0001592759330000106
is the accelerometer non-linearity correction term;
Figure BDA0001592759330000111
is the accelerometer zero-offset correction term, alpha0,β0Is a zero offset temperature variation correction coefficient;
Figure BDA0001592759330000112
is a centrifugal acceleration error (lever arm effect) correction term;
v is the random error.
The calibration model of the accelerometer is merged as:
Figure BDA0001592759330000113
step 2, calibrating the temperature control rotary table
The parameters of the temperature control rotary table to be calibrated are as follows: zero offset and temperature coefficient of the accelerometer, zero offset, temperature coefficient, scale factor, installation coupling error, non-linearity error and the like of the gyroscope.
On the premise of meeting specific application indexes including measuring range, precision and environmental conditions of the sensor, the MEMS-IMU calibration method is provided. And the integrated MEMS-IMU is directly calibrated, all the error coefficients are obtained at one time, and the calibration process of a single sensor is omitted.
As shown in fig. 3, the calibration system comprises an MEMS-IMU, a regular hexahedron calibration fixture, a mounting fixture, a temperature control turntable, a test power supply, an upper computer, and an XPC test data acquisition system, wherein the temperature control turntable can also be used as a horizontal table.
As shown in FIG. 4, in order to eliminate the influence of the earth rotation and the gravitational acceleration on the MEMS-IMU calibration result, forward and reverse calibration of six positions is required, and the directions of three orthogonal axes are determined according to the specific IMU direction.
The influence of earth rotation and gravity acceleration can be eliminated by adopting a positive and negative rotation method. When the i axis is a sensitive axis, the output of the i axis gyroscope is as follows:
Figure BDA0001592759330000121
wherein omegaji+Output representing positive rotation of j-point rotation speed, Ωji-Output, ω, representing j-point speed reversaljRepresenting j-point turntable input angular rate, omegaieThe earth rotation speed is represented, so that the influence of the earth rotation and the gravity acceleration can be deducted by subtracting two formulas, and the output of the j-point rotating speed gyro is obtained as follows:
Figure BDA0001592759330000122
the working temperature range of the industrial grade device is generally-40-60 ℃, so the calibration and temperature of the MEMS-IMU under the full-temperature stateThe temperature range required to be set by the control rotary table is-40 ℃ to 60 ℃, and the measured temperature point TmAnd the sequence is shown in table 1, and each temperature point is kept warm for half an hour before the rotation measurement is started. It should be noted that other temperature points within the temperature range may also be selected for calibration test, depending on the needs.
T1 T2 T3 T4 T5 T6 T7 T8 T9 T10 T11
-40 -30 -20 -10 0 10 20 30 40 50 60
TABLE 1 measured temperature points (Unit ℃)
Regarding the calibration of the error parameters of the gyro in the temperature-controlled turntable, the rotation rate points set by the turntable refer to table 2, forward rotation is performed first, then reverse rotation is performed, and the rotation time of each rate point is about 30 s. The selection of the rate point in the present invention can be adjusted according to the specific requirements of the user.
Figure BDA0001592759330000123
TABLE 2 Rate points to be calibrated (in degrees/s)
Referring to fig. 4, regarding the calibration of the error parameters of the accelerometer in the temperature-controlled turntable, see the related calibration when the input rotation angular rate is 0 in table 2, the hexahedral tooling is flipped according to the position of fig. 4, and acceleration excitation is applied to the IMU carrier system by using the gravity acceleration, respectively, see table 3.
Position 1-1 Position 1-2 Position 2-1 Position 2-2 Position 3-1 Position 3-2
ax g -g 0 0 0 0
ay 0 0 g -g 0 0
az 0 0 0 0 g -g
Table 3 accelerometer six-position experiment excitation table
The calibration of the temperature control rotary table can be divided into six groups, each group corresponds to one calibration position in the figure 4, and the calibration of the six positions is completed. The specific calibration steps for each group are as follows:
a. referring to fig. 4, the IMU is fixed on the temperature control turntable by a tool and is still, and after electrical installation and check are correct, the IMU is electrified and preheated for 30 minutes;
b. powering up the temperature control rotary table, setting temperature points of the temperature control rotary table according to the table 1, preserving heat for half an hour, and setting the temperature points in the sequence from low to high in the table 1;
c. setting the rotation speed and the rotation direction of the temperature control rotary table, setting forward rotation, starting the temperature control rotary table, judging the stability of the angular speed in a query mode, sampling the output of the gyroscope by using a computer, wherein the sampling time is about 30 seconds, and the rotary table stops rotating;
d. setting the same rotation rate to make the turntable reversely rotate in the same way as the step c);
e. changing the input rotation speed of the rotary table from small to large according to the sequence of the table 2, and repeating the steps c) and d) until all the angular speed points needing to be calibrated in the table 2 are measured;
f. setting the next temperature point in the sequence from low to high in the table 1, and repeating the steps c), d) and e);
g. repeating the step f) until all temperature points needing to be calibrated in the table 1 are calibrated;
h. changing the sensitive axis of the IMU according to the position sequence in the figure 3, and repeating the steps f) and g);
i. and repeating h) until the six positions in the figure 4 are calibrated.
Step 3, compensating the model by the known parameters
The calibrated accelerometer zero offset and temperature correction coefficients, and parameters of the gyroscope such as zero offset, temperature correction coefficients, scale factors, installation coupling errors and nonlinear errors are substituted into the original calibration model for compensation by calibrating a temperature control turntable of the MEMS-IMU, and the residual error parameters in the compensated model are obtained by precise centrifugal calibration.
Step 4, precise centrifugal calibration
The purpose of centrifugal calibration is to mark scale factors, installation coupling errors, nonlinear errors, lever arm effect errors and acceleration effect coefficients of the gyroscope.
Referring to fig. 5, the equipment required for calibration includes a regular hexahedron calibration tool, a mounting fixture, a precision centrifuge, a test power supply, a test data recording system, and the like. The centrifuge deck provides a horizontal reference. The MEMS-IMU requires a mounting fixture of a weight to meet the centrifuge requirements to mount it to the centrifuge. The calibration of the centrifuge needs to calibrate the positive and negative directions of the three sensitive shafts.
When the accelerometer is calibrated, the acceleration points needing to be calibrated refer to the table 4, and after each acceleration point is stabilized, the MEMS-IMU output obtained by averaging the data of 5s is recorded. It should be noted here that the user may select different acceleration points for calibration according to his own needs.
0g 5g 10g 15g 20g 25g 30g 35g 40g 45g
TABLE 4 points for calibrated acceleration
The centrifugal calibration is divided into six groups according to six positions, each group corresponds to one calibration position in the figure 4, and the calibration of the six positions is completed. Each group of specific calibration steps is as follows:
a. fixing the MEMS-IMU on the installation base surface of the centrifuge through a tool according to the position 1-1 of the figure 4, electrifying the MEMS-IMU after electrical installation and check are correct, and preheating for 5 minutes;
b. powering up the centrifuge, setting acceleration points to be calibrated of the centrifuge, and carrying out experiments according to the sequence of table 4;
c. starting the centrifugal machine, after the angular speed is stable, sampling IMU output by using a computer, wherein the sampling time is 5 seconds, the centrifugal machine stops rotating, and the centrifugal machine is static for 30 seconds;
d. repeating the steps b) and c) until the acceleration test points in the table 4 are calibrated;
e. changing the sensitive axis of the IMU according to the position sequence in the figure 4, and repeating the steps b), c) and d);
f. and e) repeating the step e) until the calibration of the six positions of the centrifuge is completed.
The invention provides an MEMS-IMU full-temperature full-parameter calibration compensation method, which adopts close combination of temperature control turntable calibration and precision centrifugal calibration to complement each other in action, wherein the temperature control turntable calibration is used for calibrating zero offset, temperature coefficient, scale factor, installation coupling error and nonlinear error of a gyroscope in the MEMS-IMU, the acceleration effect coefficient of the gyroscope can be calibrated by the zero offset, temperature coefficient and precision centrifugal calibration of the accelerometer, the scale factor, installation coupling error, nonlinear error, lever arm effect and the like of the accelerometer, and the full-error parameters of the MEMS-IMU in a full-temperature state can be accurately calibrated, so that the precision of the MEMS-IMU in the practical application process is improved.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by associated hardware instructed by a program, which may be stored in a computer-readable storage medium, and the storage medium may include: read Only Memory (ROM), Random Access Memory (RAM), magnetic or optical disks, and the like.
The MEMS-IMU full-temperature full-parameter calibration compensation method provided by the present invention is described in detail above, and for those skilled in the art, according to the idea of the embodiment of the present invention, there may be changes in the specific implementation manner and the application scope, and in summary, the content of the present specification should not be construed as limiting the present invention.

Claims (8)

1. An MEMS-IMU full-temperature full-parameter calibration compensation method is characterized by comprising the following steps:
establishing a calibration model of a gyroscope and an accelerometer;
calibrating the zero offset of the gyroscope, the temperature correction coefficient of the gyroscope, the scale factor of the gyroscope, the installation coupling error of the gyroscope, the nonlinear error of the gyroscope, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer in a full-temperature state by using a temperature control turntable;
substituting the zero offset of the gyroscope, the temperature correction coefficient of the gyroscope, the scale factor of the gyroscope, the installation coupling error of the gyroscope, the nonlinear error of the gyroscope, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer as known error compensation parameters into the calibration model of the gyroscope and the accelerometer to perform parameter compensation;
calibrating the acceleration effect coefficient of the gyroscope, the scale factor of the accelerometer, the mounting coupling error of the accelerometer, the nonlinear error of the accelerometer and the lever arm effect of the accelerometer in the full-temperature state by using a precision centrifuge so as to finish calibrating all error parameters in the full-temperature state;
the establishment of the calibration model of the gyroscope and the accelerometer comprises the following steps:
establishing a gyro calibration model
ω＝(K+Mg)Ω+(K1Ω+K2Ω2+K3Ω3)+B+Ca+υ，
Figure FDA0003215724730000011
Is the actual angular velocity loaded on the IMU;
Figure FDA0003215724730000012
is the output angular velocity value of the gyroscope;
Figure FDA0003215724730000013
is a gyroscope scale factor matrix, gamma1、δ1Is a temperature change correction coefficient;
Figure FDA0003215724730000021
the mounting error correction matrix is an error deflection angle existing between the gyroscope and the mounting base;
Figure FDA0003215724730000022
is a non-linearity correction term;
Figure FDA0003215724730000023
is a zero-offset matrix, gamma0、δ0Is a zero offset temperature variation correction coefficient;
Figure FDA0003215724730000024
is an acceleration-related correction term, upsilon is a random error;
according to the input-output relation of the gyroscope, combining the calibration models of the gyroscope into:
Figure FDA0003215724730000025
establishing accelerometer calibration model
a＝(S+Ma)A+(S1A+S2A2+S3A3)+D+Rω2+v
Figure FDA0003215724730000031
Is the actual specific force loaded on the IMU;
Figure FDA0003215724730000032
is the output specific force value of the accelerometer;
Figure FDA0003215724730000033
is a scale factor matrix, alpha, of the accelerometer1,β1Is a temperature change correction coefficient;
Figure FDA0003215724730000034
is an accelerometer mounting error correction matrix;
Figure FDA0003215724730000035
is the accelerometer non-linearity correction term;
Figure FDA0003215724730000036
is the accelerometer zero-offset correction term, alpha0,β0Is a zero offset temperature variation correction coefficient;
Figure FDA0003215724730000037
is a centrifugal acceleration error correction term, and v is a random error;
the calibration model of the accelerometer is merged as:
Figure FDA0003215724730000041
2. the MEMS-IMU full temperature full parameter calibration compensation method of claim 1, further comprising:
and calibrating the MEMS-IMU by adopting positive and negative rotation of six positions.
3. The MEMS-IMU full-temperature full-parameter calibration compensation method according to claim 2, wherein the calibration of the MEMS-IMU by positive and negative rotation of six positions comprises:
the output of the i-axis gyroscope in positive and negative rotation is as follows:
Ωji+＝f(ωj+ωie,-g)
Ωji-＝f(-ωj+ωie,-g)
wherein the i-axis is the sensitive axis, Ωji+Output representing positive rotation of j-point rotation speed, Ωji-Output, ω, representing j-point speed reversaljRepresenting j-point turntable input angular rate, omegaieThe earth rotation speed is represented, so that the influence of the earth rotation and the gravity acceleration can be deducted by subtracting two formulas, and the output of the j-point rotating speed gyro is obtained as follows:
Figure FDA0003215724730000042
4. the MEMS-IMU full-temperature full-parameter calibration compensation method according to claim 1, wherein the calibration temperature range of the temperature control turntable is set to-40 ℃ to 60 ℃, one temperature point is set at intervals of 10 ℃, and each temperature point is kept warm for half an hour before rotation measurement is carried out.
5. The MEMS-IMU full-temperature full-parameter calibration compensation method according to claim 4, wherein the calibration of the zero offset of the gyro, the temperature correction coefficient of the gyro, the scale factor of the gyro, the installation coupling error of the gyro, the nonlinear error of the gyro, the zero offset of the accelerometer and the temperature correction coefficient of the accelerometer in the full-temperature state by using the temperature-controlled turntable comprises the following steps:
step 1, fixing the position of an IMU on a temperature control rotary table through a tool and standing still, and electrifying and preheating the IMU for 30 minutes after electrical installation and check are correct;
step 2, powering up the temperature control rotary table, setting the temperature point of the temperature control rotary table and preserving heat for half an hour, wherein the temperature points are set from low to high;
step 3, setting the rotation speed and the rotation direction of the temperature control rotary table, setting the temperature control rotary table to rotate forwards, starting the temperature control rotary table, judging whether the angular speed is stable in an inquiring mode, outputting and sampling a gyroscope, wherein the sampling time is 30 seconds, and the temperature control rotary table stops rotating;
step 4, setting the same rotation rate, setting the temperature control rotary table to perform reverse rotation, starting the temperature control rotary table, judging whether the angular rate is stable in a query mode, and then sampling the output of the gyroscope, wherein the sampling time is 30 seconds;
step 5, changing the input rotation rate of the temperature control rotary table according to the sequence of the rotation rate from small to large, and repeatedly executing the step 3 and the step 4 until all angular rate points needing to be calibrated are measured;
step 6, setting the next temperature point according to the sequence of the preset temperature points from low to high, and repeatedly executing the step 3, the step 4 and the step 5;
step 7, repeatedly executing the step 6 until all temperature points needing to be calibrated in the preset temperature points are calibrated;
step 8, changing the sensitive axis of the IMU according to the preset position sequence, and repeatedly executing the step 6 and the step 7;
and 9, repeatedly executing the step 8 until the preset position sequence is calibrated.
6. The MEMS-IMU full temperature full parameter calibration compensation method of claim 5, further comprising:
the rotation rate of the temperature control rotary table is provided with a plurality of rate points, and the rotation time of each rate point is 30S.
7. The MEMS-IMU full-temperature full-parameter calibration compensation method according to claim 1, wherein the calibration of the acceleration effect coefficient of the gyroscope, the scale factor of the accelerometer, the installation coupling error of the accelerometer, the nonlinear error of the accelerometer and the lever arm effect of the accelerometer in the full-temperature state by the precision centrifuge comprises:
step 11, fixing the MEMS-IMU on an installation base surface of a centrifuge through a tool, electrifying the MEMS-IMU after electrical installation and check are correct, and preheating for 5 minutes;
step 12, powering up the centrifuge, setting acceleration points to be calibrated of the centrifuge, and performing experiments in the sequence from small to large according to the preset acceleration points;
step 13, starting the centrifugal machine, outputting and sampling IMU after the acceleration of the centrifugal machine is stable, wherein the sampling time is 5 seconds, the centrifugal machine stops rotating, and the centrifugal machine is static for 30 seconds;
step 14, repeating the step 12 and the step 13 until the calibration of the test point of the preset acceleration point is finished;
step 15, changing the sensitive axis of the IMU according to the preset position sequence, and repeatedly executing the step 12, the step 13 and the step 14;
and step 16, repeatedly executing the step 15 until the preset position sequence calibration of the centrifuge is completed.
8. The MEMS-IMU full-temperature full-parameter calibration compensation method according to claim 1, wherein a calibration system adopted by the calibration method comprises a regular hexahedron calibration tool, a mounting fixture, a temperature control turntable, a test power supply, an upper computer and a test data acquisition system, the MEMS-IMU is fixed on the mounting fixture through the regular hexahedron calibration tool, the upper computer is electrically connected with the temperature control turntable through a USB CAN bus, and the test data acquisition system is electrically connected with the upper computer through a data network port.
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Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109211279B (en) * 2018-11-07 2020-11-03 中国兵器工业集团第二一四研究所苏州研发中心 System and method for automatic calibration of non-linearity of MIMU gyroscope
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221372A (en) * 2011-03-25 2011-10-19 北京航空航天大学 Method for calibrating error of inertia measurement unit by using centrifugal machine and turntable
CN102589573A (en) * 2012-02-09 2012-07-18 黑龙江省博凯科技开发有限公司 Sensor field calibration method in miniature integrated navigation system
CN102841218A (en) * 2012-08-21 2012-12-26 哈尔滨工业大学 Double-shaft centrifuge based gyro accelerometer testing method
CN103196462A (en) * 2013-02-28 2013-07-10 南京航空航天大学 Compensation method for error calibration of MEMS gyroscope in MIMU
CN104133081A (en) * 2014-07-31 2014-11-05 工业和信息化部电子第五研究所 Method and system for detecting accelerometer performance parameters
CN104897171A (en) * 2015-06-05 2015-09-09 立得空间信息技术股份有限公司 Full-temperature integrated inertial measurement unit calibration method
CN105910626A (en) * 2016-06-15 2016-08-31 重庆华渝电气集团有限公司 North-seeking full-temperature calibration compensation method for flexible gyro inclinometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9207256B2 (en) * 2012-02-14 2015-12-08 Infineon Technologies Ag Auto-calibration of acceleration sensors

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221372A (en) * 2011-03-25 2011-10-19 北京航空航天大学 Method for calibrating error of inertia measurement unit by using centrifugal machine and turntable
CN102589573A (en) * 2012-02-09 2012-07-18 黑龙江省博凯科技开发有限公司 Sensor field calibration method in miniature integrated navigation system
CN102841218A (en) * 2012-08-21 2012-12-26 哈尔滨工业大学 Double-shaft centrifuge based gyro accelerometer testing method
CN103196462A (en) * 2013-02-28 2013-07-10 南京航空航天大学 Compensation method for error calibration of MEMS gyroscope in MIMU
CN104133081A (en) * 2014-07-31 2014-11-05 工业和信息化部电子第五研究所 Method and system for detecting accelerometer performance parameters
CN104897171A (en) * 2015-06-05 2015-09-09 立得空间信息技术股份有限公司 Full-temperature integrated inertial measurement unit calibration method
CN105910626A (en) * 2016-06-15 2016-08-31 重庆华渝电气集团有限公司 North-seeking full-temperature calibration compensation method for flexible gyro inclinometer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
中短程捷联惯导/GNSS导航系统关键技术研究;张百强;《中国博士学位论文全文数据库 信息科技辑》;20170815(第8期);第I136-40页 *
全捷联制导系统关键技术研究;孙婷婷;《中国博士学位论文全文数据库 工程科技Ⅱ辑》;20160815(第8期);第C032-4页 *
微惯性测量单元的误差整机标定和补偿;代刚等;《光学精密工程》;20110731;第19卷(第7期);第1620-1626页 *

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