CN108508594A - High resonant frequency optical fiber phase modulator based on piezoelectric ceramics - Google Patents

High resonant frequency optical fiber phase modulator based on piezoelectric ceramics Download PDF

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Publication number
CN108508594A
CN108508594A CN201810588982.9A CN201810588982A CN108508594A CN 108508594 A CN108508594 A CN 108508594A CN 201810588982 A CN201810588982 A CN 201810588982A CN 108508594 A CN108508594 A CN 108508594A
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China
Prior art keywords
piezoelectric ceramics
resonant frequency
phase modulator
ceramic structures
energy
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CN201810588982.9A
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Chinese (zh)
Inventor
马阎星
宋涛
支冬
粟荣涛
马鹏飞
周朴
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National University of Defense Technology
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National University of Defense Technology
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Priority to CN201810588982.9A priority Critical patent/CN108508594A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

Abstract

A high resonant frequency optical fiber phase modulator based on piezoelectric ceramics comprises piezoelectric ceramics, piezoelectric ceramic electrodes and energy transmission optical fibers, wherein the piezoelectric ceramic electrodes are welded on electrodes at two sides of the piezoelectric ceramics and used for loading and modulating electric signals; the piezoelectric ceramic is arranged between the two ceramic structural parts, and two side surfaces of the piezoelectric ceramic are respectively and tightly attached to the inner side surfaces of the two ceramic structural parts to form a similar cylinder; the energy transmission optical fiber is tightly wound on the outer surface of the cylinder-like body and fixed through gluing. The piezoelectric ceramic is arranged between the two semi-cylindrical ceramic structural members, and the ceramic material has high hardness, low density and high resonant frequency, so that the phase modulation frequency of the phase modulator can be effectively improved. The phase modulator provided by the invention can realize phase modulation with higher power (more than 10W), low insertion loss and megahertz level.

Description

A kind of high resonant frequency fibre optic phase modulator based on piezoelectric ceramics
Technical field
The invention belongs to Fiber laser technology fields, more particularly, to a kind of high resonant frequency optical fiber based on piezoelectric ceramics Phase-modulator.
Background technology
Fibre optic phase modulator has been led in industrial scientifics such as fiber optic communication, optical fibre gyro, optical-fiber laser optics coherence tomographies at present Domain obtains extensive use, mainly there is the lithium niobate phase modulator based on electrooptic effect and the piezoelectric ceramics phase based on mechanical oscillation Position modulator.
Since piezoelectric ceramic phase has the characteristics that insertion loss is low, threshold for resisting laser damage is high, at low cost, mesh It is preceding to be widely used in the fields such as Fibre Optical Sensor, optical-fiber laser optics coherence tomography.
Relatively common piezoelectric ceramic phase is that single mode energy-transmission optic fibre is wrapped in circular tube shaped or cylindrical piezoelectric On ceramics, the length for winding optical fiber is caused to change by the expansion and contraction that control piezoelectric ceramics, final realization transmission laser Phase-modulation.But it is limited to the bending radius of single mode optical fiber and the resonant frequency of large scale piezoelectric ceramic, piezoelectric ceramics optical fiber phase The response frequency of position modulator is relatively low, generally within hundred kHz.
Invention content
In view of the defects existing in the prior art, the present invention proposes a kind of high resonant frequency fiber phase based on piezoelectric ceramics Response frequency, can be promoted to megahertz by modulator.
Purpose to realize the present invention, is achieved using following technical scheme:
A kind of high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, including piezoelectric ceramics, piezoelectric ceramics electrode And energy-transmission optic fibre, piezoelectric ceramics electrode welding are used for load-modulate electric signal, feature in two lateral electrodes of piezoelectric ceramics It is, further includes two ceramic structures, two ceramic structures is oppositely arranged;Piezoelectric ceramics be placed in two ceramic structures it Between and medial surface of the two sides respectively with two ceramic structures of piezoelectric ceramics fit closely, you can form a class cylinder; The outer surface for the class cylinder that energy-transmission optic fibre is wound around and pass through be glued fix.
Further, the ceramic structures in the present invention are the ceramic structures of semi-cylindrical, two ceramic structures Opposite split can synthesize a complete cylinder.
Further, the material of the ceramic structures in the present invention is Al2O3 ceramics.Ceramic structures be hollow-core construction or Person's ceramic structures are internally provided with multiple hollow out cavitys.Ceramic structures in the case where that can ensure support strength, in Between hollow out as far as possible increase resonant frequency to mitigate its quality.The overall structure that the ceramic structures are integrally formed.
Further, the ceramic structures in the present invention are the semicolumn bodily form, and radius should be greater than the minimum of energy-transmission optic fibre Bending radius;The height of ceramic structures, which should meet, can wind required energy-transmission optic fibre.
Further, heretofore described piezoelectric ceramics is using commercial one chip or stack piezoelectric ceramics, shape For cuboid, operative orientation is that (piezoelectric ceramics length, width are 5~10mm, the main shadow of length, width to its thickness direction The output for ringing piezoelectric ceramics, additionally needs the machinery for considering entire device master-plan, appearance demand), thickness under normal conditions The representative value of frequency × thickness is about 2MHzmm on direction, and user can select different thickness according to required response frequency and stroke The piezoelectric ceramics of degree.
In the present invention, the energy-transmission optic fibre uses single mode optical fiber, fiber lengths to be determined by formula (1),
Wherein L is energy-transmission optic fibre length, and λ is transmission optical maser wavelength, and n is the refractive index of energy-transmission optic fibre, d33For piezoelectric ceramics Piezoelectric strain constant, VmTo load the maximum modulation voltage on piezoelectric ceramics, generally less than 10V, D are ceramic structures Diameter, dpFor the thickness of piezoelectric ceramics.
In the present invention, the piezoelectric ceramics electrode uses transmission pressure, can bear voltage and be more than load in piezoelectric ceramics On maximum modulation voltage Vm
A kind of production method of the high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, first by piezoelectric ceramics electrode It is welded on piezoelectric ceramics;Then between piezoelectric ceramics being folded in two ceramic structures, a class cylinder is formed;Finally Energy-transmission optic fibre solid matter is wrapped on class cylinder outer surface, and energy-transmission optic fibre is fixed on the outside of cylinder using ultraviolet glue On surface.
Compared with the existing technology, present invention produces following advantageous effects:
Piezoelectric ceramics is arranged between the ceramic structures of two semi-cylindricals the present invention, due to ceramic material hardness Height, density is small, and resonant frequency is high, can effectively improve the phase modulation frequency of the type phase-modulator.
The phase-modulator provided through the invention can realize higher-wattage (10W or more), filter with low insertion loss, order of megahertz Phase-modulation.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention;
Figure label:
1, piezoelectric ceramics;2, ceramic structures;3, energy-transmission optic fibre;4, piezoelectric ceramics electrode.
Specific implementation mode
Below in conjunction with the attached drawing in figure of the embodiment of the present invention, technical solution in the embodiment of the present invention carry out it is clear, It is fully described by, is described in further details, but do not limit protection scope of the present invention according to this.
Referring to Fig.1, a kind of high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, including piezoelectric ceramics 1, piezoelectricity Ceramic electrode 4 and energy-transmission optic fibre 3, piezoelectric ceramics electrode 4 are welded in two lateral electrodes of piezoelectric ceramics 1, are used for load-modulate Electric signal.
It further includes the ceramic structures 2 of two semi-cylindricals.The ceramic structures 2 of two semi-cylindricals are with respect to split energy Enough synthesize a complete cylinder.
Two ceramic structures 2 are oppositely arranged;Piezoelectric ceramics 1 is placed between two ceramic structures 2 and piezoelectric ceramics 1 Medial surface of the two sides respectively with two ceramic structures 2 fits closely, and forms a class cylinder;Energy-transmission optic fibre 3 is closely wound Class cylinder outer surface and pass through be glued fix.
The material of ceramic structures 2 in the present embodiment is Al2O3 ceramics.Ceramic structures 2 are hollow-core construction or pottery Porcelain structural member 2 is internally provided with multiple hollow out cavitys.For ceramic structures in the case where that can ensure support strength, centre is to the greatest extent Possible hollow out increases resonant frequency to mitigate its quality.The overall structure that the ceramic structures 2 are integrally formed.
Ceramic structures 2 its radius in the present embodiment should be greater than the minimum bending radius of energy-transmission optic fibre 3;Ceramic structures 2 height, which should meet, can wind required energy-transmission optic fibre 3.
For the piezoelectric ceramics 1 using commercial one chip or stack piezoelectric ceramics, shape is cuboid, operative orientation For its thickness direction, the representative value of frequency × thickness is about 2MHzmm (its length of piezoelectric ceramics on thickness direction under normal conditions Degree, width are 5~10mm, and length, width mainly influence the output of piezoelectric ceramics, additionally need and consider that entire device is overall The machinery of design, appearance demand), user can select the piezoelectric ceramics of different-thickness according to required response frequency and stroke.
The energy-transmission optic fibre 3 uses single mode optical fiber, fiber lengths to be determined by formula (1),
Wherein L is energy-transmission optic fibre length, and λ is transmission optical maser wavelength, and n is the refractive index of energy-transmission optic fibre, d33For piezoelectric ceramics Piezoelectric strain constant, VmTo load the maximum modulation voltage on piezoelectric ceramics, generally less than 10V, D are ceramic structures Diameter, dpFor the thickness of piezoelectric ceramics.
The piezoelectric ceramics electrode 4 uses transmission pressure, can bear voltage and be more than maximum of the load on piezoelectric ceramics Modulation voltage Vm
General principles:
Piezoelectric ceramics 1 is placed between two ceramic structures 2, forms sandwich structure, and energy-transmission optic fibre 3 is wrapped in ceramic junction On the outside of component.Laser enters from the one end for going out energy-transmission optic fibre 3, and other end output (does not differentiate between disengaging port).On piezoelectric ceramics 1 When applying sinusoidal voltage, piezoelectric ceramics 1 can follow sinusoidal voltage period stretch, to drive ceramic structures 2 to do periodic motion, Energy-transmission optic fibre 3 wound on it also can periodic elongation and shortening therewith.The change of fiber lengths can cause internal transmission laser The change of light path, to realize the modulation of laser phase.
A kind of production method of the high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, first by piezoelectric ceramics electrode It is welded on piezoelectric ceramics;Then between piezoelectric ceramics being folded in two ceramic structures, a class cylinder is formed;Finally Energy-transmission optic fibre solid matter is wrapped on class cylinder outer surface, and energy-transmission optic fibre is fixed on the outside of cylinder using ultraviolet glue On surface.
In conclusion although the present invention has been disclosed as a preferred embodiment, however, it is not to limit the invention, any Those of ordinary skill in the art, without departing from the spirit and scope of the present invention, when can make it is various change and retouch, therefore this hair Bright protection domain is subject to the range defined depending on claims.

Claims (10)

1. the high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, including piezoelectric ceramics, piezoelectric ceramics electrode and biography Energy optical fiber, piezoelectric ceramics electrode welding are used for load-modulate electric signal in two lateral electrodes of piezoelectric ceramics, which is characterized in that Further include two ceramic structures, two ceramic structures are oppositely arranged;Piezoelectric ceramics be placed between two ceramic structures and Medial surface of the two sides of piezoelectric ceramics respectively with two ceramic structures fits closely, and forms a class cylinder;Energy-transmission optic fibre The outer surface of the class cylinder wound around and pass through be glued fix.
2. the high resonant frequency fibre optic phase modulator according to claim 1 based on piezoelectric ceramics, it is characterised in that:Pottery Porcelain structural member is the ceramic structures of semi-cylindrical, and two ceramic structures can synthesize a complete circle with respect to split Cylinder.
3. the high resonant frequency fibre optic phase modulator according to claim 2 based on piezoelectric ceramics, it is characterised in that:Pottery The material of porcelain structural member is Al2O3 ceramics.
4. the high resonant frequency fibre optic phase modulator according to claim 2 or 3 based on piezoelectric ceramics, feature exist In:Ceramic structures are that hollow-core construction or ceramic structures are internally provided with multiple hollow out cavitys.
5. the high resonant frequency fibre optic phase modulator according to claim 4 based on piezoelectric ceramics, it is characterised in that:Pottery Its radius of porcelain structural member should be greater than the minimum bending radius of energy-transmission optic fibre.
6. the high resonant frequency fibre optic phase modulator according to claim 4 based on piezoelectric ceramics, it is characterised in that:Pottery The height of porcelain structural member, which should meet, can wind required energy-transmission optic fibre.
7. the high resonant frequency fibre optic phase modulator according to claim 1 based on piezoelectric ceramics, it is characterised in that:Pressure It is cuboid that electroceramics, which uses one chip or stack piezoelectric ceramics, shape, and operative orientation is its thickness direction, thickness side The value of upward frequency × thickness is 2MHzmm, and user can select the piezoelectricity of different-thickness according to required response frequency and stroke Ceramics.
8. the high resonant frequency fibre optic phase modulator according to claim 1 based on piezoelectric ceramics, it is characterised in that:Institute Stating energy-transmission optic fibre uses single mode optical fiber, fiber lengths to be determined by formula (1),
Wherein L is energy-transmission optic fibre length, and λ is transmission optical maser wavelength, and n is the refractive index of energy-transmission optic fibre, d33For the pressure of piezoelectric ceramics Electric strain constant, VmTo load the maximum modulation voltage on piezoelectric ceramics, D is the diameter of ceramic structures, dpFor piezoelectric ceramics Thickness.
9. the high resonant frequency fibre optic phase modulator according to claim 1 based on piezoelectric ceramics, it is characterised in that:Institute It states piezoelectric ceramics electrode and uses transmission pressure, voltage can be born and be more than maximum modulation voltage V of the load on piezoelectric ceramicsm
10. a kind of production method of the high resonant frequency fibre optic phase modulator based on piezoelectric ceramics, it is characterised in that:It first will pressure Electroceramics electrode welding is on piezoelectric ceramics;Then between piezoelectric ceramics being folded in two ceramic structures, a class is formed Cylinder;Finally energy-transmission optic fibre solid matter is wrapped on class cylinder outer surface, and is fixed energy-transmission optic fibre using ultraviolet glue On cylinder outer surface.
CN201810588982.9A 2018-06-08 2018-06-08 High resonant frequency optical fiber phase modulator based on piezoelectric ceramics Pending CN108508594A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110308551A (en) * 2019-08-02 2019-10-08 南京邮电大学 A kind of optics of liquids phase converter that can be automatically controlled
CN112799175A (en) * 2021-04-14 2021-05-14 国开启科量子技术(北京)有限公司 Optical fiber interference device and quantum communication equipment
CN112909717A (en) * 2021-02-10 2021-06-04 河北大学 A adjustable dual wavelength double-circuit output fiber laser for BOTDA

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3205798A1 (en) * 1982-02-18 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Fibre-optic phase modulator
JPS6246209A (en) * 1985-08-22 1987-02-28 ハネウエル・インコーポレーテッド Phase modulator for optical fiber sensor
EP0257209A2 (en) * 1986-08-21 1988-03-02 TELDIX GmbH Circuit arrangement for producing a phase modulation in an optical fibre
FR2921482A1 (en) * 2007-09-26 2009-03-27 Phosylab Sarl MULTIMODE OPTICAL FIBER OPTICAL TRANSDUCER, COUPLING MODES, METHOD FOR PRODUCING THE SAME
CN101532838A (en) * 2009-04-09 2009-09-16 浙江大学 Triaxial integration resonant mode optical fiber gyro for optical path multiplexing
CN101561564A (en) * 2009-05-07 2009-10-21 上海交通大学 Mechanical precise adjustable optical fibre delay device
CN102621713A (en) * 2012-03-22 2012-08-01 南京大学 Rapid tunable microfiber ring resonator
CN102946041A (en) * 2012-11-26 2013-02-27 中国人民解放军国防科学技术大学 Tunable single-polarization Brillouin erbium-doped optical fiber laser with super narrow linewidth
CN104777556A (en) * 2015-04-29 2015-07-15 中国科学院半导体研究所 Piezoelectric ceramic photoelectric link microwave signal true time delay control device
CN105301699A (en) * 2015-11-27 2016-02-03 北京信息科技大学 Fiber time delaying device
CN205103491U (en) * 2015-11-19 2016-03-23 北京信息科技大学 High accuracy optic fibre on a large scale postpones adjusting device
CN205754054U (en) * 2016-05-24 2016-11-30 江苏联能电子技术有限公司 Vibrating device based on high piezoelectric characteristic ceramic material
CN106526903A (en) * 2016-12-02 2017-03-22 山东省科学院激光研究所 Polarization controller
CN107247346A (en) * 2017-07-26 2017-10-13 东北林业大学 Light intensity modulator based on optical resonator
CN208444084U (en) * 2018-06-08 2019-01-29 中国人民解放军国防科技大学 High resonant frequency optical fiber phase modulator based on piezoelectric ceramics

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3205798A1 (en) * 1982-02-18 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Fibre-optic phase modulator
JPS6246209A (en) * 1985-08-22 1987-02-28 ハネウエル・インコーポレーテッド Phase modulator for optical fiber sensor
EP0214081A2 (en) * 1985-08-22 1987-03-11 Honeywell Inc. Phase modulator for fiber-optic sensors
US4703287A (en) * 1985-08-22 1987-10-27 United Technologies Corporation Phase modulator for fiber-optic sensors
EP0257209A2 (en) * 1986-08-21 1988-03-02 TELDIX GmbH Circuit arrangement for producing a phase modulation in an optical fibre
EP0257209B1 (en) * 1986-08-21 1992-09-09 TELDIX GmbH Circuit arrangement for producing a phase modulation in an optical fibre
US20100303404A1 (en) * 2007-09-26 2010-12-02 Phosylab Transducer with multimodal optical fibre and mode coupling and method for making same
FR2921482A1 (en) * 2007-09-26 2009-03-27 Phosylab Sarl MULTIMODE OPTICAL FIBER OPTICAL TRANSDUCER, COUPLING MODES, METHOD FOR PRODUCING THE SAME
CN101532838A (en) * 2009-04-09 2009-09-16 浙江大学 Triaxial integration resonant mode optical fiber gyro for optical path multiplexing
CN101561564A (en) * 2009-05-07 2009-10-21 上海交通大学 Mechanical precise adjustable optical fibre delay device
CN102621713A (en) * 2012-03-22 2012-08-01 南京大学 Rapid tunable microfiber ring resonator
CN102946041A (en) * 2012-11-26 2013-02-27 中国人民解放军国防科学技术大学 Tunable single-polarization Brillouin erbium-doped optical fiber laser with super narrow linewidth
CN104777556A (en) * 2015-04-29 2015-07-15 中国科学院半导体研究所 Piezoelectric ceramic photoelectric link microwave signal true time delay control device
CN205103491U (en) * 2015-11-19 2016-03-23 北京信息科技大学 High accuracy optic fibre on a large scale postpones adjusting device
CN105301699A (en) * 2015-11-27 2016-02-03 北京信息科技大学 Fiber time delaying device
CN205754054U (en) * 2016-05-24 2016-11-30 江苏联能电子技术有限公司 Vibrating device based on high piezoelectric characteristic ceramic material
CN106526903A (en) * 2016-12-02 2017-03-22 山东省科学院激光研究所 Polarization controller
CN107247346A (en) * 2017-07-26 2017-10-13 东北林业大学 Light intensity modulator based on optical resonator
CN208444084U (en) * 2018-06-08 2019-01-29 中国人民解放军国防科技大学 High resonant frequency optical fiber phase modulator based on piezoelectric ceramics

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110308551A (en) * 2019-08-02 2019-10-08 南京邮电大学 A kind of optics of liquids phase converter that can be automatically controlled
CN110308551B (en) * 2019-08-02 2021-03-02 南京邮电大学 Electrically controlled liquid optical phase modulator
CN112909717A (en) * 2021-02-10 2021-06-04 河北大学 A adjustable dual wavelength double-circuit output fiber laser for BOTDA
CN112799175A (en) * 2021-04-14 2021-05-14 国开启科量子技术(北京)有限公司 Optical fiber interference device and quantum communication equipment

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