CN108490341A - Microchip transfer system and method - Google Patents
Microchip transfer system and method Download PDFInfo
- Publication number
- CN108490341A CN108490341A CN201810293002.2A CN201810293002A CN108490341A CN 108490341 A CN108490341 A CN 108490341A CN 201810293002 A CN201810293002 A CN 201810293002A CN 108490341 A CN108490341 A CN 108490341A
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- microchip
- magnetic
- solenoid
- electrode
- pick device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Abstract
The invention discloses a kind of microchip transfer systems, include the storing unit for placing microchip, the pick device for picking up microchip, the electrical testing device for testing microchip and the reception device for receiving microchip；The electrical testing device includes test electrode and test circuit；One end of the test electrode is connect with the test circuit, and the other end is free end；The microchip includes chip electrode；It further include carrier；The electrical testing device is fixedly mounted on the carrier with the pick device；The free end of the test electrode is connect when the pick device picks up the microchip with the chip electrode；The present invention is by the way that pick device and electrical testing device to be fixedly mounted on carrier, make electrical testing device that need not carry out positioning operation, the electric property that the microchip of pick device pickup can be tested reduces the positioning of electrical testing device and is not allowed to cause the risk of error.
Description
Technical field
The present invention relates to microchip transfer techniques fields, and in particular to a kind of microchip transfer system and method.
Background technology
Microchip refers to that size reaches micron-sized chip.Microchip can generally be turned after manufacture is completed
It moves, is transferred in reception device, form array.How microchip to be transferred to from donor substrate on reception substrate is ability
Field technique personnel's problem to be solved.
The patent of invention of Publication No. CN106601657A discloses a kind of transfer device of microcomponent, transfer method, system
Method, apparatus and electronic equipment, the wherein transfer system of microcomponent are made, including：Main pick device, for picking up or discharging infinitesimal
Part；There is test device test platform and a series of test circuits, the platform surface to be equipped with a series of test electrodes, with
The test circuit connection；First load plate, for placing original microcomponent array；Second load plate receives substrate for placing；
During carrying out transfer microcomponent using the transfer system, using the main pick device pickup microcomponent and move it to
On the platform of test device, microcomponent is tested using the test device, is picked up the main pick device according to test result
Qualified microcomponent, which is released to, in microcomponent receives on substrate.
Although above-mentioned patent can realize the transfer and test of microcomponent, but still have the following disadvantages：Test device not with master
Pick device is set together, and needs by positioning re-test microcomponent.Test device positioning will definitely not increase test device and deposit
In the risk of test error.
The patent of invention of Publication No. CN107425101A discloses a kind of micro-led chip flood tide transfer
Method, including：Make several first Micro LED chips, the P-type electrode of the first Micro LED chips and N-type electrode the same side
For synonyms pole；Setting P-type electrode fixed block and N-type on the position of first Micro LED chips are installed on drive circuit board
The opposite side of electrode fixed block, P-type electrode fixed block and P-type electrode is synonyms pole, N-type electrode fixed block and N-type electrode
Opposite side is synonyms pole；Drive circuit board and several first Micro LED chips are put into same solution, the first Micro
LED chip is fixedly mounted on drive circuit board under the magnetic force.
Although above-mentioned patent can realize the huge transfer of micro-led chip, but still have the following disadvantages：Different
The P-type electrodes of first Micro LED chips is synonyms pole with N-type electrode, may be attracted each other together, and then cannot be by
P-type electrode fixed block on drive circuit board attracts with N-type electrode fixed block.
Invention content
First purpose of the present invention is intended to provide a kind of microchip transfer system, and electrical testing device is made to be filled in pickup
It sets after having picked up microchip, the electric property of microchip can be tested without positioning.
In order to realize first purpose of the present invention, this invention takes the following technical solutions：
Microchip transfer system includes the storing unit for placing microchip, for picking up picking up for microchip
Device is taken, the electrical testing device for testing microchip and the reception device for receiving microchip；The electricity
Test device includes test electrode and test circuit；One end of the test electrode is connect with the test circuit, the other end
For free end；The microchip includes chip electrode, it is characterised in that：It further include carrier；The electrical testing device and institute
Pick device is stated to be fixedly mounted on the carrier；Picked up in the pick device described micro- in the free end of the test electrode
It is connect with the chip electrode when cake core；The test circuit is exported when the test electrode is connect with the chip electrode
Electric signal gives the chip electrode.
Further, the pick device includes magnetic suction nozzle；The microchip includes magnetic pin；The magnetism is drawn
Foot is the magnetic pin of tool of the microchip；The magnetism suction nozzle has and the magnetic when picking up the microchip
The property different magnetism of pin；The magnetism suction nozzle has magnetism identical with the magnetism pin when discharging the microchip
Or magnetic disappearance；The test electrode is connect when microchip with the chip electrode described in the magnetic nozzle pick.
Further, the magnetic suction nozzle includes power circuit and solenoid；The power circuit and the solenoid
Form closed circuit；The power circuit can export the electric current of different directions to the solenoid, and the solenoid is made to generate
Attract the magnetic force of the magnetic pin or repel the magnetic force of the magnetic pin, so that the pick device is picked up described miniature
The microchip being picked described in chip or release, or, the power circuit can be with output current or stopping output current to institute
Solenoid is stated, the solenoid is made to generate the magnetic force for attracting the magnetic pin or stop generating the magnetic for attracting the magnetic pin
Power allows the pick device to pick up the microchip or the release microchip；The test electrode is in the spiral shell
When spool picks up the microchip, it is connect with the chip electrode.
Further, the test electrode is inserted into the solenoid；The chip electrode is the magnetism of the microchip
Pin；The test electrode connects in the solenoid pickup magnetic pin, i.e. chip electrode with the chip electrode
It connects；The test electrode is disconnected with the chip electrode in the solenoid release magnetic pin, the i.e. chip electrode
Open connection.
Further, the test electrode is metal material, for enhancing the solenoidal magnetism.
Further, the magnetic suction nozzle further includes metal core；The metal core is inserted into the solenoid, for enhancing
State solenoidal magnetism.
Further, the magnetic pin of the microchip has same magnetic.
Further, the storing unit has magnetism identical with the magnetic pin of the microchip.
Further, further include at least one dispenser；The dispenser is for transporting the pick device pickup
Qualified microchip；The dispenser can overturn the qualified microchip of the pick device pickup, make described
The chip electrode of the qualified microchip of pick device pickup is opposite with the reception device.
Further, the dispenser includes the vacuum slot that can be translated and overturn；The vacuum slot passes through true
Empty pressure adsorption or the qualified microchip of the release pick device pickup.
Further, the dispenser is the mechanical arm that can be translated and overturn；The mechanical arm can capture
Or the qualified microchip of the release pick device pickup.
Further, further include optical testing device；The optical testing device is used to detect the light of the microchip
Learn performance.
Further, the storing unit includes vibrating mechanism；The vibrating mechanism prevents the minicore by vibration
Piece is accumulated.
Second object of the present invention is intended to provide a kind of microchip transfer based on the microchip transfer system
Method makes electrical testing device after pick device has picked up microchip, and microchip can be tested without positioning
Electric property.
In order to realize second object of the present invention, this invention takes the following technical solutions：
A kind of microchip transfer method, includes the following steps：(1) pick device pick up microchip, test electrode with
Chip electrode connects；(2) electric property of test circuit output electrical signal detection microchip；(3) electric property has been picked up not
The pick device of qualified microchip discharges the underproof microchip of electric property.
Further, the pick device includes magnetic suction nozzle；The microchip includes magnetic pin；The step
(1) the magnetic suction nozzle of pick device generates the magnetism different from the magnetic pin of microchip in, attracts the magnetism of microchip
Pin, and then microchip is picked up, test electrode is connect with chip electrode；The magnetic suction nozzle of pick device in the step (3)
Magnetism identical with the magnetic pin of microchip is generated, it is mutually exclusive with the magnetic pin of microchip, and then discharge electricity
The underproof microchip of performance, or, the magnetic of the magnetic suction nozzle of pick device disappears, release electric property is underproof miniature
Chip.
Further, the magnetic suction nozzle includes power circuit and solenoid；Power circuit exports in the step (1)
Electric current makes solenoid generate the magnetism different from the magnetic pin of microchip close to one end of microchip to solenoid, inhales
Draw the magnetic pin of microchip, and then pick up microchip, test circuit is connect with chip electrode；
The power circuit output that the pick device of the underproof microchip of electric property has been picked up in the step (3) is another
The electric current in one direction gives the solenoid of the pick device, make the solenoid of the pick device close to one end of microchip generate with
The identical magnetism of magnetic pin of microchip, it is mutually exclusive with microchip magnetism pin, and then discharge corresponding minicore
Piece, or, the power circuit for having picked up the pick device of the underproof microchip of electric property in the step (3) stops output
Electric current gives the solenoid of the pick device, makes solenoidal magnetic disappearance, and then discharge corresponding microchip.
Further, the test electrode of the electrical testing device is inserted into the solenoid of the magnetic suction nozzle；It is described miniature
The magnetic pin of chip is the chip electrode of the microchip；The test electricity being set in the step (1) inside solenoid
Pole is connect when solenoid picks up microchip with the chip electrode of the microchip.
Further, the test electrode is metal material, for enhancing the solenoidal magnetic force.
Further, the transfer system further includes optical testing device；Between the step (2) and the step (3)
Further include step (21) and step (22)；The step (21) is optical performance test；Light has been picked up in the step (22)
The pick device for learning the underproof microchip of performance discharges the underproof microchip of optical property.
Further, the transfer system further includes dispenser；What the dispenser can be overturn and be translated
Action；Further include step (4) after the step (3)；The step (4) is dispatching step；The step (4) includes following step
Suddenly：Dispenser receives the qualified microchip of pick device pickup；Dispenser carries out rotary movement, and pick device is made to pick up
The chip electrode of the qualified microchip taken is towards reception device；The qualified minicore that dispenser picks up pick device
Piece is transported to corresponding position in reception device, then discharges corresponding position on the reception device.
Further, the dispenser is the vacuum slot that can be translated and overturn；The vacuum slot passes through vacuum
Pressure adsorption or the qualified microchip of the release pick device pickup.
Further, the dispenser is the mechanical arm that can be translated and overturn；The mechanical arm can capture
Or the qualified microchip of the release pick device pickup.
Advantageous effect of the present invention：
The present invention tests the free end of electrode by the way that pick device and electrical testing device to be fixedly mounted on carrier
It is connect with chip electrode when pick device picks up microchip；Make electrical testing device that need not carry out positioning operation, so that it may
To test the electric property of the microchip of pick device pickup, reduces the positioning of electrical testing device and be not allowed to cause the wind of error
Danger.Further, when the present invention is by the magnetic pin of magnetic nozzle pick microchip, test electrode connects with chip electrode
It connects, when pick device pickup microchip may be implemented, test electrode is connect with chip electrode.Further, the present invention passes through
Test electrode is inserted into inside solenoid, when solenoid pickup microchip not only may be implemented, tests electrode and chip electrode
Connection, and the volume of carrier can be reduced, further, the present invention is inserted by using the test electrode that metal material makes
Inside solenoid, solenoidal magnetism can be enhanced.Further, the magnetic pin magnetism having the same of microchip, keeps away
Exempt to attract each other between microchip.Further, storing unit has the magnetism different from the magnetic pin of microchip, makes
The magnetic pin of microchip picks up microchip convenient for pick device towards pick device by magnetic force.Further, this hair
The bright qualified microchip that can be picked up pick device by dispenser is transported to corresponding position in reception device, and
And dispenser can overturn microchip, make the chip electrode of microchip towards reception device.
Description of the drawings
In order to illustrate the embodiments of the present invention more clearly, simple Jie is done to attached drawing needed in the embodiment below
It continues.The accompanying drawings in the following description be only the present invention in embodiment, for those of ordinary skill in the art for, do not paying
Under the premise of going out creative work, other accompanying drawings are can also be obtained according to these attached drawings.
Fig. 1 is the overall schematic of one microchip transfer system of the embodiment of the present invention；
Fig. 2 is the integrality figure of one pick device of embodiment of the present invention pickup microchip；
Fig. 3 is the integrality figure of one optical testing device of embodiment of the present invention test microchip；
Fig. 4 is the integrality figure of one dispenser of embodiment of the present invention pickup microchip；
Fig. 5 is that one dispenser of the embodiment of the present invention picks up the integrality figure overturn after microchip；
Fig. 6 is the monolithic that microchip is transported to corresponding position in reception device by one dispenser of the embodiment of the present invention
State figure；
Fig. 7 is the integrality figure of two pick device of embodiment of the present invention pickup microchip；
Description of the drawings：10, storing unit；20, the first power supply；30, second source；40, optical testing device；50, dispatching
Device；60, reception device；70, microchip；80, carrier；21, power circuit；22, solenoid；23, metal core；31, test
Circuit；32, test electrode；71, chip electrode；72, magnetic pin；711, the first chip electrode；712, the second chip electrode.
Specific implementation mode
Below in conjunction with the accompanying drawings, the present invention will be described in detail.
In order to make the purpose of the present invention, technical solution, advantage be more clearly understood, with reference to the accompanying drawings and embodiments to this
Invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, not
For limiting the present invention.
Embodiment 1
Such as Fig. 1, shown in 2,3,4,5, microchip transfer system includes storing unit 10, pick device, electrical testing dress
It sets, optical testing device 40, dispenser 50, reception device 60 and carrier 80.Pick device is fixed with electrical testing device
On carrier 80.In the present embodiment, there are one pick device and an electrical testing devices for setting on each carrier.
Storing unit 10 is for storing microchip 70 to be picked up.Pick device from the storing unit 10 for picking up
Microchip 70 is taken, or, the microchip 70 that release is picked.Electrical testing device is used to detect the miniature of pick device pickup
The electric property of chip 70.Electrical testing device detects that the electric property of the microchip 70 of pick device pickup is unqualified
When, pick device can discharge the underproof microchip of electric property 70.Optical testing device 40 is for detecting the pickup dress
Set the optical property of the microchip 70 of pickup.Optical testing device detects the optics of the microchip 70 of pick device pickup
When performance is unqualified, pick device can discharge the underproof microchip of optical property 70.Dispenser 50 will be for that will pick up dress
The qualified chip for setting pickup is transported to corresponding position in reception device 60.
In the present embodiment, qualified chip refers to the electric property and optical testing device 40 that electrical testing device detects
The qualified microchip 70 of the optical property detected.
In other embodiments, if microchip transfer system does not include optical detection apparatus 40, qualified chip refers to electricity
Learn the chip for the electric property qualification that test device detects.
Such as Fig. 1, shown in 2, in the present embodiment, multiple microchips 70 are placed in storing unit 10；Microchip turns
Shifting system includes multiple carriers 80, i.e., multiple pick devices, is shifted for realizing the flood tide of microchip 70.Multiple carriers are fixed
When connection, pick device on multiple carriers is moved integrally with the overall movement of multiple carriers；Multiple carriers are independently set
When setting, pick device being individually moved with multiple carriers on multiple carriers.Multiple carriers refer at least
Two carriers, multiple pick devices refer at least two pick devices.In other embodiments, microchip transfer system also may be used
To include a pick device.
In the present embodiment, storing unit 10 is material disc；Microchip 70 is micro-led chip；Receive dress
It is drive circuit board to set 60.In other embodiments, microchip 70 or diode, transistor and ic core
Piece etc..Wherein, material disc is the plate-like device for placing microchip 70；Light-emitting diode chip for backlight unit is that one kind can be electric energy
It is converted into the semiconductor diode of luminous energy, micro-led chip is that size reaches micron-sized light emitting diode；It is miniature
After light emitting diode completes, it is typically necessary and is transferred on drive circuit board.
Such as Fig. 1, shown in 2,3,4, pick device includes power circuit 21 and solenoid 22.Solenoid 22 is coiled multiple times
Conducting wire will produce magnetic field inside solenoid 22 when there is electric current by solenoid 22, when the current vanishes by solenoid 22
When, the magnetic field inside solenoid 22 can also disappear.Power circuit 21 is electrically connected with solenoid 22, for output current to solenoid
22, and when power circuit 21 is output to the current direction of solenoid 22 and changes, the magnetic direction inside solenoid 22 can also change.
Such as Fig. 1, shown in 2,3,4, in the present embodiment, pick device includes two solenoids being connected in series with 22；Power supply
Circuit 21 includes the first power supply 20；Two ports 1,2 of first power supply 20 are electrically connected with the free end of two solenoids 22 respectively,
Output current gives two solenoids 22 being connected in series with.Wherein, the free end of solenoid 22 refer to a solenoid 22 not with
22 concatenated one end of another solenoid.
Pick device pickup microchip 70 principle be：Microchip 70 includes magnetic pin, and solenoid 22 is close to micro-
One end of cake core 70 has different magnetism, according to the magnet principle that there is a natural attraction between the sexes, spiral shell from the magnetic pin of microchip 70
Spool 22 can attract microchip 70 by magnetic force, and then pick up microchip 70.Pick device discharges microchip 70
Principle is：Solenoid 22 becomes magnetism identical with the magnetic pin of microchip 70 close to one end of microchip 70, according to
The attracting principle of the magnet same sex, solenoid 22 and microchip 70 are mutually exclusive, and then discharge microchip 70.Wherein, magnetic
Pin is the pin for having magnetic microchip 70.According to the right-hand screw rule of electromagnetic induction, solenoid 22 is close to miniature
The magnetism of 70 one end of chip is determined by the current direction that power circuit 21 is exported to solenoid 22.
Such as Fig. 1, shown in 2,3,4, if the port 1 of the first power supply 20 is anode, port 2 is cathode, the electricity of the first power supply 20
Stream flows out the first power supply 20 from port 1, the first power supply 20 is flowed into from port 2, according to right-hand screw rule, it is known that solenoid 22 leans on
One end of nearly microchip 70 is the poles N, and one end far from microchip 70 is the poles S；If the port 1 of the first power supply is cathode, end
Mouth 2 is anode, and the electric current of the first power supply 20 flows out the first power supply 20 from port 2, the first power supply 20 is flowed into from port 1, according to the right side
Hand screw rule, it is known that solenoid 22 is the poles N close to one end of microchip 70, and one end far from microchip 70 is the poles S.
In the present embodiment, the magnetic pin of microchip 70 to be picked up has same magnetic, mutually exclusive, avoids putting
The microchip 70 in storing unit 10 is set, because magnetic pin has different magnetic attractings together, is unfavorable for picking up
Device picks up microchip 70.
In the present embodiment, storing unit 10 is identical as the magnetism of magnetic pin of microchip 70.It is same due to magnet
The principle that property is repelled each other, the magnetic pin of microchip 70 pick up minicore towards pick device, convenient for pick device by magnetic force
The magnetic pin of piece 70, and then pick up microchip 70.
Such as Fig. 1, shown in 2,3,4, electrical testing device includes test circuit 31 and test electrode 32.Test circuit 31 with
Electrode 32 is tested to connect.The principle that electrical testing device detects the electric property of microchip 70 is as follows：Microchip 70 includes
Chip electrode 71, when pick device picks up the magnetic pin of microchip 70 by solenoid 22, test electrode 32 and chip electricity
Pole 71 connects, and test circuit 31 exports electric signal to chip electrode 71 by testing electrode 32, and then tests microchip 70
Electric property.
Such as Fig. 1, shown in 2,3,4, in the present embodiment, electrical testing device includes two test electrodes 32；Microchip
70 chip electrode 71 includes the first chip electrode 711 and the second chip electrode 722, and two test electrodes 32 are inserted into two respectively
Solenoid 22, the first chip electrode 711 and the second chip electrode 722 are the magnetic pin of microchip 70.Solenoid 22 passes through
Magnetic force picks up the magnetic pin of microchip 70, i.e. when the first chip electrode 711 and the second chip electrode 722, two spiral shells of insertion
Two inside spool 22 test electrodes 32 respectively with the first chip electrode 711 of microchip 70 and the second chip electrode 722
Connection, electrical testing device need not carry out positioning operation, so that it may to test the electricity of the microchip 70 of pick device pickup
Performance, when reducing electrical testing device and being arranged independently of pick device, error caused by the positioning of electrical testing device is inaccurate.
Such as Fig. 1, shown in 2,3,4, in the present embodiment, test circuit 31 includes second source 30；The two of second source 30
A port 3,4 is connect with one end of two test electrodes 32 respectively.When solenoid 22 picks up microchip 70 by magnetic force, with the
Two test electrodes 32 that the ports 3 of two power supplys 30, port 4 connect respectively with the first chip electrode 711 and the second chip electrode
722 connections, 30 output voltage of second source test the electric property of microchip 70.
In the present embodiment, microchip 70 is micro-led；First chip electrode 711 is the poles P, the second chip
Electrode 722 is the poles N, or, the first chip electrode 711 is the poles N, the second chip electrode 722 is the poles P；Change second source 30 to export
Voltage direction the poles P, the poles N and test minicore of microchip 70 can be obtained according to the one-way conduction characteristic of diode
Whether whether the electrical parameter of piece 70 meets the requirements, i.e., qualified.The undesirable microchip of electrical parameter 70, which belongs to, not to be conformed to
The microchip 70 of lattice can be discharged by pick device.
Such as Fig. 1, shown in 2,3,4, when the port of second source 30 3 is anode, and port 4 is cathode, if microchip
70 is in the conduction state, then the first chip electrode 711 is the poles P, and the second chip electrode 712 is the poles N；If microchip 70 is in
Cut-off state, then the first chip electrode 711 is the poles N, and the second chip electrode 712 is the poles P.When the port of second source 30 3 is negative
Pole, when port 4 is anode, if microchip 70 is in the conduction state, the first chip electrode 711 is the poles N, the second chip electricity
Pole 712 is the poles P；If microchip 70 is in cut-off state, the first chip electrode 711 is the poles P, the second chip electrode 712
For the poles N.
In the present embodiment, the test electrode 32 of solenoid 22 is inserted by metal material, for example, iron work；Test electrode
32 are magnetized by the magnetic field inside solenoid 22, become magnet；The magnetic field and the magnetic field of solenoid 22 for testing electrode 32 are overlapped mutually,
The magnetic field intensity of solenoid 22 is increased, that is, increases the magnetic force that solenoid 22 acts on microchip 70.As shown in figure 3, light
The lower section that test device 40 is set to pick device is learned, the optical property of the microchip 70 for detecting pick device pickup.
Optical testing device 40 can test whether the optical parameters such as the spectrum, wavelength and brightness of microchip 70 meet the requirements, i.e.,
It is whether qualified.The undesirable microchip of optical parameter 70 belongs to underproof microchip 70, can be released by pick device
It puts.Optical testing device 40 can be with detector, spectrometer or integrating sphere etc..
Such as Fig. 4, shown in 5,6, dispenser 50 is located at the lower section of pick device, the qualification for picking up pick device
Microchip 70 overturns 180 °, makes the chip electrode 71 and 60 phase of reception device of the qualified microchip 70 of pick device pickup
It is right, and the qualified microchip 70 of pick device pickup is transported to corresponding position, i.e. dispenser in reception device 60
50 are able to carry out the action of overturning and translation.
In the present embodiment, qualified microchip 70 refers to the electric property and optic test of electrical testing device detection
The qualified microchip 70 of the optical property that device 40 detects.
In other embodiments, microchip transfer system does not include optical testing device 40, qualified microchip 70
Refer to the microchip 70 of the electric property qualification of electrical testing device detection.
Such as Fig. 4, shown in 5,6, in the present embodiment, microchip transfer system includes multiple dispensers 50, for carrying
The transfer efficiency of high microchip 70.Wherein, multiple dispensers 50 refer to include at least two dispensers 50.In other realities
It applies in example, microchip transfer system may include a dispenser 50.
Such as Fig. 4, shown in 5,6, in the present embodiment, dispenser 50 is that can carry out overturning and the vacuum suction of translation motion
Mouth.After pick device releases electrical parameter and/or the underproof microchip of optical parameter 70, pick device starts to release
Qualified microchip 70 is put, vacuum slot adsorbs the qualified microchip 70 that pick device picks up by vacuum pressure, then
180 ° are overturn along perpendicular to the direction of contact device 60, makes the chip electrode 71 of qualified microchip 70 towards reception device
60.Towards after reception device 60, vacuum slot can not only connect the chip electrode 71 of qualified microchip 70 being parallel to
It is translated in the plane of receiving apparatus 60, qualified microchip 70 is transported to corresponding position, and can be along parallel
It is rotated in the in-plane of reception device 60, qualified microchip 70 is made to be put according to the poles P and the respective sequence of the poles N
It puts.
A kind of microchip transfer method, includes the following steps：(1) pick device pick up microchip, test electrode with
Chip electrode connects；(2) electric property of test circuit output electrical signal detection microchip；(3) electric property has been picked up not
The pick device of qualified microchip discharges the underproof microchip of electrical parameter.
Such as Fig. 1, shown in 2,3,4,5, in this embodiment, the magnetic pin of microchip 70 is chip electrode 71；Test electricity
The inside of solenoid 22 is inserted into pole 32, and tests electrode 32 and made for metal material, and such as iron work can enhance solenoid 22
It is magnetic；21 output current of power circuit makes solenoid 22 and test electrode 71 close to minicore to solenoid 22 in step (1)
One end of piece 70 generates the magnetism different from the magnetic pin of microchip 70, attracts the chip electrode 71 of microchip 70, into
And while picking up microchip 70, so that test electrode 32 is connect with chip electrode 71；Step has picked up electric property in (3)
The power circuit 21 of the pick device of underproof microchip 70 changes the direction of output current, makes corresponding solenoid 22 and surveys
Identical with the chip electrode 71 of microchip 70 magnetism of one end generation for trying close the microchip 70 of electrode 32, and it is described micro-
Cake core 70 is mutually exclusive, and then discharges corresponding microchip 70.
In other embodiments, the pick device of the underproof microchip of electric property 70 has been picked up in step (3)
Power circuit 21 stops output current, makes corresponding solenoid 22 and tests the magnetic disappearance of electrode 32, and then discharges corresponding micro-
Cake core 70.
In other embodiments, the test electrode 32 being inserted into inside solenoid 22 cannot be magnetized in magnetic field；Power supply electricity
Road 21 forms magnetic suction nozzle with solenoid 22；21 output current of power circuit makes solenoid 22 lean on to solenoid 22 in step (1)
One end of nearly microchip 70 generates the magnetism different from the magnetic pin of microchip 70, attracts the chip electricity of microchip 70
Pole 71, and then while picking up microchip 70, test electrode 32 is made to be connect with chip electrode 71；Pickup in step (3)
The power circuit 21 of the pick device of the underproof microchip of electric property 70 changes the direction of output current, makes corresponding helical
Pipe 22 generates magnetism identical with the chip electrode 71 of microchip 70 close to one end of microchip 70, with the microchip
70 is mutually exclusive, and then discharges corresponding microchip 70.
As shown in figure 3, in the present embodiment, the transfer system of microchip includes optical testing device 40.Microchip
Transfer method the step of (2) and step (3) between further include step (21) and step (22)；Step (21) is optical property
Test；The pick device release optical property that the underproof microchip of optical property has been picked up in step (22) is underproof micro-
Cake core.
The transfer system of microchip includes dispenser 50 and reception device 60.Dispenser 50 can be overturn
With the action of translation.It further include dispatching step (4) after the step of transfer method of microchip (3).Dispensing step (4) includes
Following steps：Dispenser 50 receives the qualified microchip 70 of pick device pickup；Dispenser 50 carries out rotary movement,
Make the chip electrode 71 of the qualified microchip 70 that pick device picks up towards reception device 60；Dispenser 50 fills pickup
The qualified microchip 70 for setting pickup is transported to corresponding position in reception device 60, then discharges the phase in reception device 60
The position answered.
Such as Fig. 4, shown in 5, in the present embodiment, dispenser 50 is the vacuum slot that can be translated and overturn.Vacuum is inhaled
Mouth adsorbs by vacuum pressure or discharges the qualified microchip of the pick device pickup.
Embodiment 2
As shown in fig. 7, the difference between this embodiment and the first embodiment lies in：The test electrode 32 of electronic test equipment is without inserting
Enter the solenoid 22 of pick device.The magnetic suction nozzle of pick device includes power circuit 21, solenoid 22 and insertion solenoid
22 metal core 23, metal core 23 is by metal material, such as iron work；Microchip 70 includes two magnetic pins 72；Minicore
The first chip electrode 711 and the second chip electrode 712 of piece 70 are not magnetic pins without magnetism.
When the magnetic suction nozzle of pick device attracts the magnetic pin 72 of microchip 70 by magnetic force, the of microchip 70
One chip electrode 711 is connect with two test electrodes 32 of electronic test equipment respectively with the second chip electrode 712, electrical testing
Device need not carry out positioning operation, so that it may to test the electric property of the microchip 70 of pick device pickup, reduce electricity
When test device is arranged independently of pick device, error caused by the positioning of electrical testing device is inaccurate.
In the present embodiment, pick device includes two solenoids 22.In other embodiments, solenoid in pick device
22 number may be greater than any integer equal to one.The number of solenoid 22 can be designed according to specific requirements.
In the present embodiment, solenoid 22 is internally provided with metal core 23.Metal core 23 is generally iron core, and effect is can
To enhance the magnetic field intensity inside solenoid 22.
21 output current of power circuit makes solenoid 22 to solenoid 22 in the step of transfer method of microchip (1)
And metal core 23 generates the magnetism different from the magnetic pin of microchip 70 close to one end of microchip 70, attracts miniature
The chip electrode 71 of chip 70, and then while picking up microchip 70, test electrode 32 is made to be connect with chip electrode 71；Step
Suddenly the power circuit 21 that the pick device of the underproof microchip of electric property 70 has been picked up in (3) changes the side of output current
To making corresponding solenoid 22 and metal core 23 be generated and the chip electrode 71 of microchip 70 close to one end of microchip 70
Identical magnetism, it is mutually exclusive with the microchip 70, and then discharge corresponding microchip 70.
In other embodiments, 22 inside of solenoid does not have metal core 23.Power circuit 21 forms magnetism with solenoid 22
Suction nozzle.The size of current that power circuit 21 exports is adjusted, the magnetic field intensity inside solenoid 22 can also be adjusted.
21 output current of power circuit makes solenoid 22 to solenoid 22 in the step of transfer method of microchip (1)
The magnetism different from the magnetic pin of microchip 70 is generated close to one end of microchip 70, attracts the chip of microchip 70
Electrode 71, and then while picking up microchip 70, test electrode 32 is made to be connect with chip electrode 71；Pickup in step (3)
The power circuit 21 of the pick device of the underproof microchip of electric property 70 changes the direction of output current, makes corresponding spiral shell
Spool 22 generates magnetism identical with the chip electrode 71 of microchip 70 close to one end of microchip 70, with the minicore
Piece 70 is mutually exclusive, and then discharges corresponding microchip 70.
In the present embodiment, microchip 70 includes two magnetic pins 72.In other embodiments, in microchip 70
The number of magnetic pin 72 may be greater than any integer equal to one.Magnetic pin 72 can be set according to specific requirements
Meter.
Embodiment 3
The difference between this embodiment and the first embodiment lies in：Dispenser 50 is the machinery that can execute translation and rotary movement
Arm.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (22)
1. microchip transfer system includes the storing unit for placing microchip, the pickup for picking up microchip
Device, the electrical testing device for testing microchip and the reception device for receiving microchip；The electricity is surveyed
Trial assembly is set including test electrode and test circuit；One end of the test electrode is connect with the test circuit, and the other end is
Free end；The microchip includes chip electrode, it is characterised in that：It further include carrier；The electrical testing device with it is described
Pick device is fixedly mounted on the carrier；Picked up in the pick device described miniature in the free end of the test electrode
It is connect with the chip electrode when chip；The test circuit exports electricity when the test electrode is connect with the chip electrode
Signal gives the chip electrode.
2. microchip transfer system according to claim 1, it is characterised in that：The pick device includes magnetic inhales
Mouth；The microchip includes magnetic pin；The magnetism pin is the magnetic pin of tool of the microchip；The magnetic
Property suction nozzle when picking up the microchip with the magnetism different from the magnetic pin；The magnetism suction nozzle is described in release
There is identical magnetic with the magnetic pin or magnetic disappearance when microchip；The test electrode is picked up in the magnetic suction nozzle
It takes and is connect with the chip electrode when microchip.
3. microchip transfer system according to claim 2, it is characterised in that：The magnetism suction nozzle includes power circuit
And solenoid；The power circuit is with the solenoid group at closed circuit；The power circuit can export different directions
Electric current give the solenoid, so that the solenoid is generated the magnetic force for attracting the magnetic pin or repel the magnetic pin
Magnetic force allows the pick device to pick up the microchip being picked described in the microchip or release, or, the power supply
Circuit can give the solenoid with output current or stopping output current, so that the solenoid is generated and attract the magnetic pin
Magnetic force stops generating the magnetic force for attracting the magnetic pin, and the pick device is allow to pick up the microchip or release
The microchip；The test electrode is connect when the solenoid picks up the microchip with the chip electrode.
4. microchip transfer system according to claim 3, it is characterised in that：The test electrode is inserted into the helical
Pipe；The chip electrode is the magnetic pin of the microchip；The test electrode picks up the magnetism in the solenoid
When pin, i.e. chip electrode, it is connect with the chip electrode；The test electrode discharges the magnetism in the solenoid and draws
When foot, the i.e. chip electrode, disconnected with the chip electrode.
5. microchip transfer system according to claim 4, it is characterised in that：The test electrode is metal material,
For enhancing the solenoidal magnetism.
6. microchip transfer system according to claim 3, it is characterised in that：The magnetism suction nozzle further includes metal
Core；The metal core is inserted into the solenoid, for enhancing the solenoidal magnetism.
7. according to the microchip transfer system described in claim 2-6 any one, it is characterised in that：The microchip
Magnetic pin has same magnetic.
8. microchip transfer system according to claim 7, it is characterised in that：The storing unit have with it is described micro-
The identical magnetism of magnetic pin of cake core.
9. according to the microchip transfer system described in claim 1-6 any one, it is characterised in that：Further include at least one
Dispenser；The dispenser is used to transport the qualified microchip of the pick device pickup；The dispenser can
To overturn the qualified microchip of the pick device pickup, make the core of the qualified microchip of the pick device pickup
Plate electrode is opposite with the reception device.
10. microchip transfer system according to claim 9, it is characterised in that：The dispenser includes that can put down
The vacuum slot for moving and overturning；The vacuum slot adsorbs by vacuum pressure or discharges the qualification of the pick device pickup
Microchip.
11. microchip transfer system according to claim 9, it is characterised in that：The dispenser is that can translate
With the mechanical arm of overturning；The mechanical arm can capture or discharge the qualified microchip of the pick device pickup.
12. according to the microchip transfer system described in claim 1-6 any one, it is characterised in that：Further include that optics is surveyed
Trial assembly is set；The optical testing device is used to detect the optical property of the microchip.
13. according to the microchip transfer system described in claim 1-6 any one, it is characterised in that：The storing unit
Including vibrating mechanism；The vibrating mechanism prevents the microchip from accumulating by vibration.
14. the microchip transfer method of the transfer system using microchip described in claim 1, which is characterized in that packet
Include following steps：(1) pick device picks up microchip, and test electrode is connect with chip electrode；(2) test circuit exports telecommunications
Number detection microchip electric property；(3) the pick device release electricity of the underproof microchip of electric property has been picked up
The underproof microchip of performance.
15. according to the transfer method of microchip described in claim 14, it is characterised in that：The pick device includes magnetic inhales
Mouth；The microchip includes magnetic pin；The magnetic suction nozzle of pick device generates the magnetic with microchip in the step (1)
Property the different magnetism of pin, attract the magnetic pin of microchip, and then pick up microchip, test electrode connects with chip electrode
It connects；The magnetic suction nozzle of pick device generates magnetism identical with the magnetic pin of microchip in the step (3), with minicore
The magnetic pin of piece is mutually exclusive, and then discharges the underproof microchip of electric property, or, the magnetic suction nozzle of pick device
Magnetism disappears, and discharges the underproof microchip of electric property.
16. microchip transfer method according to claim 15, it is characterised in that：The magnetism suction nozzle includes power supply electricity
Road and solenoid；Power circuit output current makes the one end of solenoid close to microchip to solenoid in the step (1)
The magnetism different from the magnetic pin of microchip is generated, attracts the magnetic pin of microchip, and then pick up microchip, surveys
Examination circuit is connect with chip electrode；
The power circuit for the pick device for having picked up the underproof microchip of electric property in the step (3) exports another party
To electric current give the solenoid of the pick device, make the solenoid of the pick device close to one end of microchip generate with it is miniature
The identical magnetism of magnetic pin of chip, it is mutually exclusive with microchip magnetism pin, and then corresponding microchip is discharged,
Or, the power circuit for having picked up the pick device of the underproof microchip of electric property in the step (3) stops output electricity
It flows to the solenoid of the pick device, makes solenoidal magnetic disappearance, and then discharge corresponding microchip.
17. microchip transfer method according to claim 16, it is characterised in that：The test of the electrical testing device
Electrode is inserted into the solenoid of the magnetic suction nozzle；The magnetic pin of the microchip is the chip electrode of the microchip；
The test electrode inside solenoid is set in the step (1) when solenoid picks up microchip, with the microchip
Chip electrode connection.
18. microchip transfer method according to claim 17, it is characterised in that：The test electrode is metal material
Material, for enhancing the solenoidal magnetic force.
19. according to the microchip transfer method described in claim 14-18 any one, it is characterised in that：The transfer system
System further includes optical testing device；Further include step (21) and step (22) between the step (2) and the step (3)；
The step (21) is optical performance test；The pickup of the underproof microchip of optical property has been picked up in the step (22)
Device discharges the underproof microchip of optical property.
20. according to the microchip transfer method described in claim 14-18 any one, which is characterized in that the transfer system
System further includes dispenser；The action that the dispenser can be overturn and be translated；It further include step after the step (3)
Suddenly (4)；The step (4) is dispatching step；The step (4) includes the following steps：Dispenser receives pick device pickup
Qualified microchip；Dispenser carries out rotary movement, makes the chip electricity of the qualified microchip of pick device pickup
Pole is towards reception device；The qualified microchip that pick device picks up is transported to corresponding position in reception device by dispenser
It sets, then discharges corresponding position on the reception device.
21. microchip transfer method according to claim 20, it is characterised in that：The dispenser is that can translate
With the vacuum slot of overturning；The vacuum slot adsorbs by vacuum pressure or discharges the micro- of the qualification of the pick device pickup
Cake core.
22. microchip transfer method according to claim 20, it is characterised in that：The dispenser is that can translate
With the mechanical arm of overturning；The mechanical arm can capture or discharge the qualified microchip of the pick device pickup.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810293002.2A CN108490341B (en) | 2018-03-30 | 2018-03-30 | Microchip transfer system and method |
| PCT/CN2018/089747 WO2019184085A1 (en) | 2018-03-30 | 2018-06-04 | Microchip transfer system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810293002.2A CN108490341B (en) | 2018-03-30 | 2018-03-30 | Microchip transfer system and method |
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| CN108490341B CN108490341B (en) | 2019-10-08 |
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| WO (1) | WO2019184085A1 (en) |
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| CN109273565A (en) * | 2018-10-15 | 2019-01-25 | 华映科技（集团）股份有限公司 | A kind of transfer method of micro- light-emitting diode chip for backlight unit |
| CN109449100A (en) * | 2018-10-16 | 2019-03-08 | 广东工业大学 | A kind of the flood tide transfer method and device of electronic component |
| CN109541439A (en) * | 2018-12-10 | 2019-03-29 | 通富微电子股份有限公司 | A kind of method of adjustment of chip testing feedstock direction, detection device, adjustment system |
| CN109548396A (en) * | 2018-11-29 | 2019-03-29 | 上海九山电子科技有限公司 | The flood tide transfer system and method for micro-led chip |
| CN109927403A (en) * | 2019-04-19 | 2019-06-25 | 云谷（固安）科技有限公司 | The production method and transfer method of a kind of transfer device, transfer device |
| CN110707015A (en) * | 2019-10-21 | 2020-01-17 | 京东方科技集团股份有限公司 | Detection substrate and manufacturing method and detection method thereof |
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| CN111292631A (en) * | 2018-11-21 | 2020-06-16 | 昆山工研院新型平板显示技术中心有限公司 | Micro light-emitting diode display panel and preparation method thereof |
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Also Published As
| Publication number | Publication date |
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| CN108490341B (en) | 2019-10-08 |
| WO2019184085A1 (en) | 2019-10-03 |
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