CN108489873A - The device and method of particle in a kind of detection pipeline - Google Patents
The device and method of particle in a kind of detection pipeline Download PDFInfo
- Publication number
- CN108489873A CN108489873A CN201810393816.3A CN201810393816A CN108489873A CN 108489873 A CN108489873 A CN 108489873A CN 201810393816 A CN201810393816 A CN 201810393816A CN 108489873 A CN108489873 A CN 108489873A
- Authority
- CN
- China
- Prior art keywords
- pipeline
- transparent window
- particle
- light
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title claims abstract description 66
- 238000001514 detection method Methods 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000008859 change Effects 0.000 claims abstract description 15
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000010521 absorption reaction Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000009738 saturating Methods 0.000 claims 2
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000009527 percussion Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of device and methods of particle in detection pipeline, by the way that the first transparent window and the second transparent window are respectively set in the opposite sides of pipe side wall, and light is emitted into pipeline by the first transparent window using light source, when there is particle by the region in the gas of pipeline, the effective light path of transmitted ray after particle changes, the light intensity of the transmitted ray detected by the second transparent window so as to cause photoelectric detection module changes, thus it can determine the amounts of particles passed through in pipeline according to the change frequency of light intensity；Meanwhile the size of particle can be found out according to the variation of light intensity magnitude；The present invention can solve the problems, such as that the prior art can not be to accurately being detected in pipeline by the quantity of particle and size, and have apparatus structure simple, lower-cost advantage.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing technology fields, more particularly, to a kind of detectable semiconductor gas
Body conveys the device and method of particle in cleaning piping.
Background technology
High-purity special gas is as essential special gas in the manufacture of semiconductor such as doping, extension, etching, ion implanting
Body (process gas) is the important source material for making precise electronic component product.
Process gas in manufacture of semiconductor is all conveyed by cleaning piping.With the process gas of certain pressure
It is constantly conveyed in cleaning piping, these special gas can generate inner wall of the pipe certain percussion, make in pipeline
The degree of roughness of wall surface can be more and more obvious, and cause the particle generated in gas medium also just more and more.
Grain diameter in above-mentioned gas medium is all Nano grade, and 16nm technology generations are had developed in semiconductor technology
When following, the influence of the particle that is generated in cleaning piping to processing procedure can be more and more obvious.
Currently, the particle detections in cleaning piping are and to be sent to special equipment by taking a random sample in one end of pipeline
It goes to measure.However, this detection device is expensive, use cost is high.Moreover, in the prior art, the inspection of traditional particle
It is to utilize light scattering principle to survey all, and the light intensity by scattering light finds out the size of grain diameter.When the grain size of particle is less than light source
Detection wavelength when, for scattering light mainly caused by Rayleigh scattering, scattered light intensity will be according to the reduction of grain diameter
The speed of 10 6 powers reduces.In this way, when the grain size of particle is tens nanometers, scattered light intensity can be carried on the back very little, signal
Scape noise is flooded, to limit the detectability of detecting instrument.
Therefore, it is badly in need of finding a kind of new detection method for nano particle in semi-conductor gas conveying cleaning piping.
Invention content
It is an object of the invention to overcome drawbacks described above of the existing technology, a kind of dress detecting particle in pipeline is provided
It sets and method.
To achieve the above object, technical scheme is as follows：
The present invention provides a kind of devices of particle in detection pipeline, including：
One first transparent window and one second transparent window, are connected in the opposite sides of pipe side wall, for passing through
Light；
One light source is connected at the radial side of pipeline, emits light into pipeline for passing through the first transparent window；
One photoelectric detection module is connected at the radial other side of pipeline, for by the detection of the second transparent window by the
One transparent window enters the light intensity of pipeline and the transmitted ray after air in pipeline；
One signal processing module, the light intensity for being detected to photoelectric detection module carry out signal conversion and export；
Wherein, the first transparent window, pipeline, the second transparent window, photodetection are passed sequentially through by the light that light source is sent out
Module and signal processing module form a complete light path；When thering is particle to pass through in the gas of pipeline, make across particle
When transmitted ray effective light path afterwards changes, the change for the light intensity value that signal processing module is detected according to photoelectric detection module
Change number and size, determines the amounts of particles passed through in pipeline and granular size.
Preferably, first transparent window and the second transparent window are embedded in the opposite sides of pipe side wall respectively,
The light source and photoelectric detection module are connected to pipeline diametrically each by the first transparent window and the second transparent window
Side.
Preferably, first transparent window and the second transparent window are divided into the opposite sides of a connecting pipe component,
The connecting pipe component is connected between two sections of pipelines, and the light source and photoelectric detection module are each by connecting tube group
The first transparent window and the second transparent window on part are connected to the diametrically side of pipeline.
Preferably, first transparent window and the second transparent window are closed with translucent material respectively.
Preferably, the translucent material is the square that the length of side is 3~5cm.
Preferably, the light source, the first transparent window and the second transparent window, photoelectric detection module are in straight line light
On the road.
Preferably, the light source is semiconductor laser, and the photoelectric detection module is light intensity absorption device, at the signal
It is the signal converter and computer being connected to manage module.
The present invention also provides a kind of methods of particle in detection pipeline, include the following steps：
Step S01：Using a light source, from the radial side of pipeline and light is emitted into pipeline by the first transparent window
Line；
Step S02：Using a photoelectric detection module, from the radial other side of pipeline and by the second transparent window detection by
First transparent window enters the light intensity of pipeline and the transmitted ray after air in pipeline；
Step S03：Using a signal processing module, signal conversion and defeated is carried out to the light intensity that photoelectric detection module detects
Go out；
Wherein, the light that light source is sent out is made to pass sequentially through the first transparent window, pipeline, the second transparent window, photodetection
Module and signal processing module form a complete light path；When thering is particle to pass through in the gas of pipeline, make across particle
When transmitted ray effective light path afterwards changes, the light intensity value that is detected according to photoelectric detection module by signal processing module
Change frequency and size, determine the amounts of particles passed through in pipeline and granular size.
Preferably, the light is laser.
Preferably, the wavelength of the laser is 500nm~700nm.
It can be seen from the above technical proposal that the present invention in the opposite sides of pipe side wall by being respectively set first thoroughly
Bright window and the second transparent window, and light is emitted into pipeline by the first transparent window using light source, when the gas of pipeline
In when having particle by the region, the effective light path of the transmitted ray after particle changes, so as to cause photodetection
The light intensity for the transmitted ray that module is detected by the second transparent window changes, thus can according to the change frequency of light intensity,
Determine the amounts of particles passed through in pipeline；Meanwhile the size of particle can be found out according to the variation of light intensity magnitude.The present invention solves
The prior art can not be and simple with apparatus structure to passing through the quantity of particle in pipeline and the problem of size is accurately detected
It is single, lower-cost advantage.
Description of the drawings
Fig. 1 be a preferred embodiment of the present invention a kind of detection pipeline in particle apparatus structure schematic diagram.
Specific implementation mode
Below in conjunction with the accompanying drawings, the specific implementation mode of the present invention is described in further detail.
It should be noted that in following specific implementation modes, when embodiments of the present invention are described in detail, in order to clear
Ground indicates the structure of the present invention in order to illustrate, spy does not draw to the structure in attached drawing according to general proportion, and has carried out part
Amplification, deformation and simplified processing, therefore, should avoid in this, as limitation of the invention to understand.
In specific implementation mode of the invention below, referring to Fig. 1, Fig. 1 is one kind of a preferred embodiment of the present invention
Detect the apparatus structure schematic diagram of particle in pipeline.As shown in Figure 1, the present invention a kind of detection pipeline in particle device, packet
Include first transparent window 3 being coupled with a pipeline 1 to be detected and second transparent window 4, a light source 2, one
Several chief components such as a photoelectric detection module 5 and a signal processing module.
It please refers to Fig.1.Pipeline 1 to be detected can be the semiconductor cleaning piping 1 for conveying process gas.Semiconductor
The general material of industry can be used in cleaning piping 1, as 316L stainless steels (00Cr17Ni14Mo2) are made.Cleaning piping 1
One end can be picked out from area distribution boxes (VDB) to be come, and the other end of cleaning piping 1 can access on valve distributor box (VMB).In pipe
It is respectively arranged with the first transparent window 3 and the second transparent window 4 in the opposite sides of any position among 1 side wall of road, for leading to
It crosses the first transparent window 3 and is passed through light into pipeline 1, and pass through 4 pass-out light of the second transparent window.
As an optional embodiment, the first transparent window 3 and the second transparent window 4 can be separately positioned on a company
In the opposite sides of take over component 6；The connection of connecting pipe component 6 is mounted between two segment pipes 1 again.
As another optional embodiment, the first transparent window and the second transparent window can be also embedded respectively in pipeline
In the opposite sides of side wall (figure omits).
Light source 2 installs the radial side for being connected to pipeline 1, and the radial direction that photoelectric detection module 5 is connected at pipeline 1 is another
Side.Also, light source 2 and photoelectric detection module 5 can be transparent each by the first transparent window 3 and second on connecting pipe component 6
Window 4 is connected to the diametrically side of pipeline 1.Alternatively, light source and photoelectric detection module 5 can also be each by being embedded in pipeline
The first transparent window 3 and the second transparent window 4 on 1 side wall are connected to the diametrically side of pipeline 1.
Light source 2 is used to emit light into pipeline 1 by the first transparent window 3；Photoelectric detection module 5 is used to pass through second
The detection of transparent window 4 is entered the light intensity of pipeline 1 and the transmitted ray after gas in pipeline 1 by the first transparent window 3.
Signal processing module (figure omits) is connected with photoelectric detection module 5；Signal processing module is used for photodetection mould
The light intensity that block 5 detects carries out signal conversion and exports.The light sent out by light source 2 passes sequentially through the first transparent window 3, cleaning
Pipeline 1, the second transparent window 4, photoelectric detection module 5 and signal processing module form a complete light path.Work as gas
In there is particle to pass through, when the effective light path of the transmitted ray after particle being made to change, signal processing module can be according to light
The change frequency and size for the light intensity value that electric detecting module detects, determine the amounts of particles passed through in pipeline 1 and granular size.
First transparent window 3 and the second transparent window 4 can in the opposite sides of 1 side wall of pipeline symmetry arrangement.
First transparent window 3 and the second transparent window 4 can be closed with translucent material respectively.First transparent window, 3 He
Second transparent window 4 uses transparent material, can guarantee the transmission of light.
As an optional embodiment, translucent material can be the square of 3~5cm of the length of side.
Light source 2, the first transparent window 3 and the second transparent window 4, photoelectric detection module 5 are to be in straight line light path
Mode arrange.
As a preferred embodiment, semiconductor laser 2 may be used in light source 2；It can be to using semiconductor laser 2
Emit laser in pipeline 1.Light intensity absorption device 5 may be used in photoelectric detection module 5.Signal processing module, which may be used, to be connected
Signal converter and computer.Wherein, signal converter is connected with light intensity absorption device 5；Signal converter can be to light intensity absorption
The light intensity that device 5 detects carries out photoelectric signal transformation, and converting the light intensity that light intensity absorption device 5 detects to readable light intensity believes
Number, and export to computer, computer can calculate and determine according to model data according to the change frequency and size of light intensity value
Go out the amounts of particles passed through in pipeline 1 and granular size.
Semiconductor laser 2, light intensity absorption device 5, signal converter and computer etc. all can be used and can purchase in the market
General commodity assembled.
Below by specific implementation mode and Fig. 1 is combined, the method for particle in a kind of detection pipeline of the present invention is carried out
It is described in detail.
It please refers to Fig.1.The method of particle, can be used in a kind of above-mentioned detection pipeline in a kind of detection pipeline of the present invention
The device of particle.The method of particle may include following steps in detection pipeline：
Step S01：Using a light source, from the radial side of pipeline and light is emitted into pipeline by the first transparent window
Line.
The light source 2 of the radial side of semiconductor cleaning piping 1, such as semiconductor laser 2 are connected to using above-mentioned installation,
Emit laser beam into pipeline 1 by the first transparent window 3.The wavelength of laser can be 500nm~700nm；It is selected in experiment
Wavelength be 660nm semiconductor laser 2 be used as light source, with into pipeline 1 launch wavelength be the laser of 660nm.
Step S02：Using a photoelectric detection module, from the radial other side of pipeline and by the second transparent window detection by
First transparent window enters the light intensity of pipeline and the transmitted ray after air in pipeline.
The available light intensity absorption module mounted on the radial other side of semiconductor cleaning piping 1, such as light intensity absorption device 5,
Come detect pipeline 1 is entered by the first transparent window 3, pass through across air in pipeline and by the second transparent window 4 after transmitted light
The laser intensity signal of line.
Step S03：Using a signal processing module, signal conversion is carried out to the light intensity detected and is exported, when in gas
There is particle to pass through, when the transmitted ray effective light path after particle being made to change, according to the change frequency of light intensity value and greatly
It is small, determine the amounts of particles passed through in pipeline and granular size.
The available signal processing module being connect with light intensity absorption device 5, such as the signal converter being connected may be used
With computer as signal processing module, and signal converter is connected with light intensity absorption device 5.
In this way, the laser sent out by semiconductor laser 2 can be made, pass sequentially through the first transparent window 3, cleaning piping 1,
Second transparent window 4, light intensity absorption device 5 and signal converter form a complete light path.Light is from cleaning piping 1
The first transparent window 3 it is incident, when having particle by this region in the gas passed through in pipeline 1, make the transmission after particle
It when the effective light path of light changes, then comes out from the second transparent window 4, so that it may be detected by light intensity absorption device 5；Signal turns
Photoelectric signal transformation can be carried out to the laser intensity that light intensity absorption device 5 detects by changing device, and the light intensity that light intensity absorption device 5 is detected turns
Readable light intensity signal value is turned to, and is exported to computer；The change for the light intensity value that computer is detected further according to light intensity absorption device 5
Change number, and the amounts of particles for determining to pass through in pipeline 1 can be calculated according to model data；Meanwhile it can also be according to light intensity absorption
The variation size for the light intensity value that device 5 detects calculates the granular size for determining to pass through in pipeline 1.
To sum up, the present invention in the opposite sides of pipe side wall by being respectively set the first transparent window and the second transparency window
Mouthful, and light is emitted into pipeline by the first transparent window using light source, when thering is particle to pass through the region in the gas of pipeline
When, the effective light path of the transmitted ray after particle changes, and passes through the second transparency window so as to cause photoelectric detection module
The light intensity for the transmitted ray that mouth detects changes, thus can determine passed through in pipeline according to the change frequency of light intensity
Grain number amount；Meanwhile the size of particle can be found out according to the variation of light intensity magnitude.The present invention solves the prior art can not be to pipe
The problem of accurately being detected by the quantity of particle and size in road, and, lower-cost advantage simple with apparatus structure.
Above is merely a preferred embodiment of the present invention, embodiment be not to limit the present invention scope of patent protection,
Therefore equivalent structure variation made by every specification and accompanying drawing content with the present invention, similarly should be included in the present invention's
In protection domain.
Claims (10)
1. the device of particle in a kind of detection pipeline, which is characterized in that including：
One first transparent window and one second transparent window, are connected in the opposite sides of pipe side wall, for passing through light；
One light source is connected at the radial side of pipeline, emits light into pipeline for passing through the first transparent window；
One photoelectric detection module is connected at the radial other side of pipeline, for saturating by first by the detection of the second transparent window
Bright window enters the light intensity of pipeline and the transmitted ray after air in pipeline；
One signal processing module, the light intensity for being detected to photoelectric detection module carry out signal conversion and export；
Wherein, the first transparent window, pipeline, the second transparent window, photoelectric detection module are passed sequentially through by the light that light source is sent out
And signal processing module, form a complete light path；When thering is particle to pass through in the gas of pipeline, make after particle
When transmitted ray effective light path changes, the variation time for the light intensity value that signal processing module is detected according to photoelectric detection module
Number and size, determine the amounts of particles passed through in pipeline and granular size.
2. the device of particle in detection pipeline according to claim 1, which is characterized in that first transparent window and the
Two transparent windows are embedded in the opposite sides of pipe side wall respectively, and the light source and photoelectric detection module are saturating each by first
Bright window and the second transparent window are connected to the diametrically side of pipeline.
3. the device of particle in detection pipeline according to claim 1, which is characterized in that first transparent window and the
Two transparent windows are divided into the opposite sides of a connecting pipe component, the connecting pipe component be connected at two sections of pipelines it
Between, the light source and photoelectric detection module each by connecting pipe component the first transparent window and the second transparent window connect
In the diametrically side of pipeline.
4. the device of particle in the detection pipeline according to claim 1-3 any one, which is characterized in that described first thoroughly
Bright window and the second transparent window are closed with translucent material respectively.
5. the device of particle in detection pipeline according to claim 4, which is characterized in that the translucent material is that the length of side is
The square of 3~5cm.
6. the device of particle in detection pipeline according to claim 1, which is characterized in that the light source, the first transparency window
Mouth and the second transparent window, photoelectric detection module are in straight line light path.
7. the device of particle in detection pipeline according to claim 1, which is characterized in that the light source is semiconductor laser
Device, the photoelectric detection module are light intensity absorption device, and the signal processing module is the signal converter and computer being connected.
8. a kind of method of particle in detection pipeline, which is characterized in that include the following steps：
Step S01：Using a light source, from the radial side of pipeline and light is emitted into pipeline by the first transparent window；
Step S02：Using a photoelectric detection module, detected by first from the radial other side of pipeline and by the second transparent window
Transparent window enters the light intensity of pipeline and the transmitted ray after air in pipeline；
Step S03：Using a signal processing module, signal conversion is carried out to the light intensity that photoelectric detection module detects and is exported；
Wherein, the light that light source is sent out is made to pass sequentially through the first transparent window, pipeline, the second transparent window, photoelectric detection module
And signal processing module, form a complete light path；When thering is particle to pass through in the gas of pipeline, make after particle
When transmitted ray effective light path changes, pass through the change for the light intensity value that signal processing module is detected according to photoelectric detection module
Change number and size, determines the amounts of particles passed through in pipeline and granular size.
9. the method for particle in detection pipeline according to claim 8, which is characterized in that the light is laser.
10. the method for particle in detection pipeline according to claim 9, which is characterized in that the wavelength of the laser is
500nm~700nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810393816.3A CN108489873A (en) | 2018-04-27 | 2018-04-27 | The device and method of particle in a kind of detection pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810393816.3A CN108489873A (en) | 2018-04-27 | 2018-04-27 | The device and method of particle in a kind of detection pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108489873A true CN108489873A (en) | 2018-09-04 |
Family
ID=63313337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810393816.3A Withdrawn CN108489873A (en) | 2018-04-27 | 2018-04-27 | The device and method of particle in a kind of detection pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108489873A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2459966A1 (en) * | 1979-06-22 | 1981-01-16 | Thery Jean Francois | APPARATUS FOR DETERMINING THE HISTOGRAM OF PARTICULATE SIZES OR PARTICULARLY BLOOD GLOBULES |
| JP2000292340A (en) * | 1999-04-08 | 2000-10-20 | Nikkiso Co Ltd | Grain size sensor |
| CN201063015Y (en) * | 2007-06-27 | 2008-05-21 | 上海理工大学 | Apparatus for measuring permeance ratio of particle using microseism method |
| CN203053826U (en) * | 2013-02-28 | 2013-07-10 | 山东中实易通集团有限公司 | Test circuit of laser particle size analyzer |
| CN104677789A (en) * | 2015-03-05 | 2015-06-03 | 江苏苏净集团有限公司 | Nanoparticle counting detection device and method |
-
2018
- 2018-04-27 CN CN201810393816.3A patent/CN108489873A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2459966A1 (en) * | 1979-06-22 | 1981-01-16 | Thery Jean Francois | APPARATUS FOR DETERMINING THE HISTOGRAM OF PARTICULATE SIZES OR PARTICULARLY BLOOD GLOBULES |
| JP2000292340A (en) * | 1999-04-08 | 2000-10-20 | Nikkiso Co Ltd | Grain size sensor |
| CN201063015Y (en) * | 2007-06-27 | 2008-05-21 | 上海理工大学 | Apparatus for measuring permeance ratio of particle using microseism method |
| CN203053826U (en) * | 2013-02-28 | 2013-07-10 | 山东中实易通集团有限公司 | Test circuit of laser particle size analyzer |
| CN104677789A (en) * | 2015-03-05 | 2015-06-03 | 江苏苏净集团有限公司 | Nanoparticle counting detection device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205640252U (en) | A optical fiber detection leakage system for regional normal atmospheric temperature fluid pipeline | |
| CN108205867A (en) | A kind of incipient fire smoke detection method for having interference particle identification ability | |
| CN202814915U (en) | Pipeline flux leakage corrosion detector probe and pipeline flux leakage corrosion detector | |
| CN103140882A (en) | Evaluation of scattered light signals in an optical alarm system and evaluating both a weighted smoke density signal and a weighted dust/steam density signal | |
| US11187661B2 (en) | Detecting black powder levels in flow-lines | |
| JP2022526987A (en) | Geothermal production monitoring system and related methods | |
| CN1963449A (en) | Testing method for serum density of serum pot or fume desulfurating absorption tower | |
| CN104848810B (en) | Symmetrical expression ball-and-socket sphere diameter pneumoelectric measuring instrument | |
| CN106483052A (en) | A kind of PM2.5 detector based on light scattering method | |
| CN104677789B (en) | A kind of nano particle counting and detecting device and detection method | |
| CN108489873A (en) | The device and method of particle in a kind of detection pipeline | |
| CN104568688B (en) | Simple PM2.5 detector device | |
| US10012628B2 (en) | Multifunctional particle analysis device and method of calibrating the same | |
| US9018608B1 (en) | Optical sensor for detecting liquid | |
| CN204461956U (en) | A kind of flue dust monitor for low emission | |
| CN109073566B (en) | Method and system for detecting plates for microelectronics or optics by laser doppler effect | |
| JP2011095022A (en) | Particle sensor | |
| CN106290259A (en) | A kind of double light path surface scattering high range transmissometer | |
| CN104849724A (en) | Measurement method and apparatus for laser radar ratio of aerosol | |
| CN208125570U (en) | A kind of atmosphere particle concentration detection device based on laser differential detection | |
| JP2002022643A (en) | Particle size distribution-measuring apparatus | |
| CN204705568U (en) | Based on the blow device of flue dust monitor | |
| CN207816768U (en) | A kind of nanometer of sub-micron test device | |
| CN202648678U (en) | Optical fiber probe and compound liquid optical fiber concentration meter using same | |
| CN205642614U (en) | Xenon lamp ray detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180904 |
|
| WW01 | Invention patent application withdrawn after publication |