CN108489609A - A kind of FTIR measures the wide range bearing calibration of photodetector response - Google Patents
A kind of FTIR measures the wide range bearing calibration of photodetector response Download PDFInfo
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- CN108489609A CN108489609A CN201810089435.6A CN201810089435A CN108489609A CN 108489609 A CN108489609 A CN 108489609A CN 201810089435 A CN201810089435 A CN 201810089435A CN 108489609 A CN108489609 A CN 108489609A
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- 230000004044 response Effects 0.000 title claims abstract description 61
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 title claims abstract description 11
- 238000001228 spectrum Methods 0.000 claims abstract description 63
- 230000003595 spectral effect Effects 0.000 claims abstract description 16
- 238000001157 Fourier transform infrared spectrum Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 abstract description 16
- 238000012937 correction Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 8
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 6
- 238000012360 testing method Methods 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000005457 Black-body radiation Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
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- General Physics & Mathematics (AREA)
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Abstract
The invention discloses the wide range bearing calibrations that a kind of FTIR measures photodetector response, this method is using based on the pyroelectric detector with wide spectral range flat response as FTIR spectrum instrument standard configuration, it obtains the detector and amplifying circuit and the response under different scanning speed is combined to selected light and beam splitter, extract related data and fit the frequency response characteristic of the detector and amplifying circuit.The original output characteristics combined to specific light source and beam splitter using this frequency response characteristic is corrected to get to its actual output characteristics.Using this reality output characteristic after correcting as background spectrum, you can the photodetector original response spectrum to measuring gained carries out reference operation, the photodetector real response spectrum after being corrected.It is the standard configuration of FTIR spectrum instrument in view of pyroelectric detector and is responded with wide range, thus the method is pervasive and wide range, different light sources and beam splitter combination suitable for various FTIR spectrum instrument.
Description
Technical field
The invention belongs to semiconductor optoelectronic spectral ranges, specially a kind of pervasive to Fourier transform infrared (FTIR) light
Spectrometer measures the method that gained photodetector response carries out broad spectral range correction.
Background technology
Semiconductor photo detector (PD) and its focal plane arrays (FPA) (FPA) device have important application in numerous areas, and
Its response spectrum is all extremely paid close attention in all these applications.Conventional PD or FPA all there are one continuous response wave length scope,
The size responded within this range can change namely responsiveness has a spatial distribution, this spatial distribution or response spectrum need
Be obtained through actual measurement, and with series of advantages Fourier transform infrared (FTIR) spectrometer have become measure PD or
The preferred instrument of FPA devices, especially in infrared band.
Although the detector optogalvanic spectra directly measured by FTIR spectrum instrument contains its spectral response information, but not
The real response spectrum of detector, and greatly differ from each other in many cases with real response spectrum, this is mainly due to instruments
The output characteristics (including light source and beam splitter and other component) of itself is not perfectly flat smooth, and also there are one specific spectrum for itself
Caused by distribution.It is referred to as computing equipment function correction method, standard detector to solve the problems, such as that people also have been developed in this respect
It transmits the correlation-correcteds method such as correction method, thus obtains the real response spectrum of detector.These all achieve certain effect,
But also there is also many problems.Such as：For computing equipment function correction method, infrared light supply is simulated using Formula of the blackbody radiation
Output, need set a blackbody radiation temperature, such one side infrared light supply is not the ideal black-body of single temperature, and this
The setting of temperature is artificial rather than obtained by practical measurement, on the other hand the temperature of practical infrared light supply will necessarily there are one
Distribution, it is difficult to single temperature simulation；In addition, the beam splitter response characteristic needed for computing equipment function correction method nor reality
It surveys, these all inevitably introduce certain error.For another example：The basis that standard detector transmits correction method is based on the standard by calibration
Detector, therefore correcting range can only limit within the response range of this standard detector, different wave bands needs different
The continuous linking of standard detector, wave band is also had any problem, this makes application in many occasions all be very limited.Quantum type
During photodetector is still evolving, some devices with wide range response have also occurred, such as respond to visible light wave range
The InGaAs detectors of expansion.It is exactly that must solve the problems, such as to carry out spectral response characterization to such broad spectrum device.
Invention content
Based on problem mentioned above, innovative the proposing of the present invention provides a kind of pervasive to Fourier transform infrared
(FTIR) method that photodetector response carries out broad spectral range correction obtained by spectrometer measurement, can realize to broadband range
Interior photodetector carries out spectral response correction.
Bearing calibration concrete operation step of the present invention is：
1) by measuring pyroelectric detector and amplifying circuit to selected light and beam splitter combination in different scanning speed
Under response, then extract related data and fit the analytic frequency response characteristic of this detector and amplifying circuit；
2) pyroelectric detector that is obtained according to step 1) and amplifying circuit analytic frequency response characteristic to specific light source and
The original output characteristics of beam splitter combination is corrected, to obtain the FTIR spectrum instrument under this specific light source and beam splitter combination
Reality output characteristic namely real background spectrum；
3) according to step 2) obtain using this spectrometer reality output characteristic after correcting as background spectrum, to measuring institute
The original response spectrum of the photodetector obtained carries out reference operation, you can the photodetector real response light after being corrected
Spectrum.
It is the standard configuration of FTIR spectrum instrument in view of pyroelectric detector and is responded with wide range, thus the method can be applied to respectively
Kind of FTIR spectrum instrument, and be suitable for different light sources and the wide spectral region of beam splitter combined covering, thus be it is pervasive and
Wide range.To be suitble to middle infrared band, the standard configuration pyroelectric detector of FTIR spectrum instrument is existing often to be visited for the DTGS comprising KBr windows
Device is surveyed, below with regard to abbreviation DTGS detectors.DTGS detectors are flat as a kind of thermal detector, the spectral response of itself
, it is unrelated with wavelength, and KBr windows infrared band and transmitance of near-infrared and visible light wave range in entire are also flat
Straight, therefore DTGS detectors can consider and be in response to the device unrelated with wavelength, but its response is then straight with the frequency of optical signal
Connect correlation.
To further illustrate the present invention, Fig. 1 is shown uses DTGS detectors and amplifying circuit under different scanning speed
Original background spectrum of the FTIR spectrum instrument measured under specific light source and beam splitter combination, hollow square is follow-up fitting in figure
Selected data point.As seen from Figure 1, with the raising of sweep speed, by DTGS detectors/amplifier combination under each wave number
The output measured is all to reduce, and reality output should be constant, and here it is the frequencies by DTGS detectors and amplifying circuit
Caused by response.To the measurement result of Fig. 1, for the frequency range for covering wider, in the 9000cm-1 and 3000cm- of low frequency end
It is extracted relative response data on these wave number points of the 1 and 15000cm-1 of front end for being fitted, chooses this 3 wave numbers
Putting has preferable representativeness, also avoids error caused by absorption band of water vapor possibility.To the data of extraction using 9000cm-1 as base
Plinth makes itself and 9000cm-1 intermediate frequency models after the data of low frequency end 3000cm-1 and front end 15000cm-1 are carried out whole lifting
Data trend coincidence is enclosed, using Fourier frequency fF, the linear relationship fF=2v ν between index glass sweep speed v and wave number ν are obtained
The data for fitting expanded to one group of low-and high-frequency end are as shown in Figure 2.Nonlinear fitting is used to obtain the final product to this group of data
To Analytic solving curve shown in Fig. 2, there can be good effect with better simply second order polynomial fit reciprocal.With Fig. 2 institutes
The fitting function obtained can export (such as Fig. 1) to the instrument under a certain invisible scanning speed and be corrected, that is, do reference operation, i.e.,
The reality output characteristic namely real background spectrum of instrument can be obtained.
After obtaining the real background spectrum under a certain sweep speed, with this to the photoelectricity that is measured under same sweep speed herein
Detector original spectrum does reference operation to get the photodetector real response spectrum to after correcting, as shown in Figure 3.It is right
Routinely to be measured under wave number coordinate and operation for FTIR spectrum measures, wave number coordinate be converted into wavelength coordinate still by
It is conventional to carry out.Sampling other methods are also shown in Fig. 3 and demarcate the i.e. so-called standard spectral data of detector response spectrum obtained
As a means of comparing.
The advantage of the invention is that：
A. bearing calibration of the invention is all based on measured data, and unique assumed condition thinks pyroelectric detector
Response is unrelated with wavelength, this is also consistent with actual conditions, therefore can obtain good calibration result.
B. bearing calibration of the invention only need to carry out one group of survey to same spectrometer (the DTGS detectors for including its configuration)
Amount fitting can easily obtain the frequency response characteristic of required DTGS detectors and amplifying circuit, instrumental correction step thereafter
It is rapid to be all based on the background spectrum that thus characteristic obtains thus easy to operate.
C. the background spectrum after correcting also includes the interference such as water vapor absorption, therefore carries out reference with this and can substantially eliminate finally
Corresponding interference in response spectrum.
D. bearing calibration of the invention is applicable since its principle combines different light sources and beam splitter, is
Pervasive, wide wave-length coverage can be covered；
Description of the drawings
Fig. 1 is to be existed using the FTIR spectrum instrument that DTGS detectors and its mating amplifying circuit measure under different scanning speed
Halogen tungsten lamp (white light) light source and the lower original background spectrum of quartzy beam splitter combination, in figure hollow square be subsequently be fitted selected by
Data point.
Fig. 2 is the frequency of the DTGS detectors and amplifying circuit that are fitted using the data point extracted from Fig. 1
Rate response characteristic.
Fig. 3 is to measure the primary photoelectric current spectrum (fine line) of obtained Si and InGaAs detectors and using present invention side
Detector real response spectrum (heavy line) after method correction；Figure orbicular spot thus the nominal data of two detectors namely for than
Compared with normal data, data have been carried out normalized in figure.
Specific implementation mode
The specific implementation mode of the present invention is described in detail below in conjunction with the accompanying drawings.
Embodiment 1：Wave scalable InGaAs detector
As shown in the lower part of Figure 3, the Wave scalable InGaAs detector of an existing standard spectral data has been carried out original
Optogalvanic spectra is tested, and bearing calibration using the present invention has carried out response spectrum correction.The long wave cut-off wavelength of this device is about
2.5 μm are fronts into optical detector, and the response of shortwave end is expanded to visible light wave range, therefore it is (white that halogen tungsten lamp is used in measuring
Light) light source is combined with quartzy beam splitter, so that spectrometer has stronger shortwave to export, extremely may be used to cover therefrom infrared shortwave end
Light-exposed wide spectral range.Changing sweep speed first under fixed aperture, gain parameter, (such as 0.1581cm/s is extremely
Totally 7 grades of 1.8988cm/s) measure one group of original background spectrum (as shown in Figure 1), when measurement for ensure the quality of data can be used compared with
More scanning times (such as 64 times)；Due to not containing fine spectral information generally for detector measurement, can be used relatively low
Resolution ratio (such as 16cm-1) to shorten time of measuring；Again with scanning constant speed (such as 0.4747cm/s, reality under identical conditions
Border can be selected as needed) measure this Wave scalable InGaAs device primary photoelectric current spectrum, then from this group of original background
Data needed for spectrum test extracting data carry out the frequency characteristic fitting of DTGS detectors and amplifying circuit, obtain its frequency spy
The analytic parameter of property.Reference operation is done to the original background spectrum under 0.4747cm/s sweep speeds with this frequency characteristic and obtains reality
Border background spectrum, then do reference operation with the original response spectrum of this real background spectrum versus wavelength extension InGaAs devices, i.e.,
The real response spectrum of device is obtained, finally to the spectrum under wave number coordinate is converted into wavelength coordinate to get thick to the lower parts Fig. 3
Real response spectrum after correction shown in line, filament is to measure gained original spectrum in figure, the standard spectrum of dot device thus,
For comparing.The quality of data is should be noted in the process so that operation can carry out and result is reliable, to front end (and low frequency end)
Due to instrument output it is too low caused by (such as 15770- near He-Ne laser wavelengths inside low quality data and spectrometer
The sections 15820cm-1) on bounce data can be blocked or be deleted.Since this spectrum test all pertains only to the opposite of response
Value, there is no need to the absolute figure of focused data, multiplication and division and normalization operation can at any time be carried out to facilitate data processing.
Embodiment 2：Si detectors
As shown in the tops Fig. 3, primary photoelectric current spectrum is carried out for a Si detectors of an existing standard spectral data and has been surveyed
Examination, bearing calibration using the present invention have carried out response spectrum correction.The long wave cut-off wavelength of this detector is about 1 μm of front
Into optical device, the response of shortwave end is expanded to visible light wave range, therefore still uses halogen tungsten lamp (white light) light source and quartz point in measuring
Beam device combines, so that spectrometer has stronger shortwave to export.Change sweep speed first (such as under fixed aperture, gain parameter
0.1581cm/s to 1.8988cm/s7 grades) measure one group of original background spectrum (as shown in Figure 1), to ensure data matter when measurement
More scanning times (such as 64 times) can be used in amount；Due to not containing fine spectral information generally for detector measurement, because
This can be used lower resolution ratio (such as 16cm-1) to shorten time of measuring；Again under identical conditions with scanning constant speed (such as
0.4747cm/s actually can be selected as needed) the primary photoelectric current spectrum that measures this Si detector, then from this original back of the body of group
Data needed for scape spectrum test extracting data carry out the frequency characteristic fitting of DTGS detectors and amplifying circuit, obtain its frequency
The analytic parameter of characteristic (is noticed that this process is identical with embodiment 1, therefore need to only be carried out to same instrument primary such
Operation).Reference operation is done to the original background spectrum under 0.4747cm/s sweep speeds with this frequency characteristic and obtains real background
Spectrum, then reference operation is done to get to the reality of detector to the original response spectrum of Si detectors with this real background spectrum
Response spectrum, finally to the spectrum under wave number coordinate is converted into wavelength coordinate to get to after being corrected shown in the thick line of the tops Fig. 3
Real response spectrum, filament is to measure gained original spectrum in figure, the standard spectrum of dot device thus, for comparing.Herein
The quality of data is should be noted in the process so that operation can carry out and result is reliable, to front end (and low frequency end) since instrument exported
Inside low quality data caused by low and spectrometer near He-Ne laser wavelengths on (such as sections 15770-15820cm-1)
Bounce data can be blocked or be deleted.Since this spectrum test all pertains only to the relative value of response, there is no need to attention numbers
According to absolute figure, multiplication and division and normalization operation can at any time carry out to facilitate data processing.
Claims (1)
1. a kind of FTIR measures the wide range bearing calibration of photodetector response.The wide range bearing calibration is using as FTIR light
Based on the pyroelectric detector with wide spectral range flat response of spectrometer standard configuration, meter is measured and is fitted by practical
It calculates to obtain the background spectrum needed for tuning detector response spectrum, then the background spectrum is utilized to obtain photodetector to be measured
Real response spectrum；It is characterized in that the bearing calibration includes the following steps：
1) selected light and beam splitter are combined under different scanning speed by measuring pyroelectric detector and amplifying circuit
Then the analytic frequency response characteristic that related data fits this detector and amplifying circuit is extracted in response；
2) pyroelectric detector and amplifying circuit analytic frequency response characteristic obtained according to step 1) is to specific light source and beam splitting
The original output characteristics of device combination is corrected, to obtain the reality of the FTIR spectrum instrument under this specific light source and beam splitter combination
Border output characteristics；
3) according to step 2) obtain using this spectrometer reality output characteristic after correcting as background spectrum, to measuring gained
The original response spectrum of photodetector carries out reference operation, you can the photodetector real response spectrum after being corrected.
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| CN201810089435.6A CN108489609B (en) | 2018-01-30 | 2018-01-30 | A kind of wide range bearing calibration of FTIR measurement photodetector response |
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| CN109781259A (en) * | 2018-12-29 | 2019-05-21 | 华中科技大学 | A kind of associated method for accurately measuring aerial sports Small object infrared spectroscopy of map |
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