CN108470824A - A kind of heat safe multilayer piezoelectric ceramic actuator and its preparation method and application - Google Patents
A kind of heat safe multilayer piezoelectric ceramic actuator and its preparation method and application Download PDFInfo
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Abstract
The invention discloses a kind of heat safe multilayer piezoelectric ceramic actuators and its preparation method and application.Piezoceramics layer in the piezoelectric actuator includes piezoceramic material and sintering aid, and the piezoceramic material is that general formula is xBiScO3‑(1‑x)PbTiO3Scandium acid bismuth lead titanates binary piezoceramic material.The preparation method includes：1) bismuth source, scandium source, lead source and titanium source are mixed, is crushed, obtains raw mixture, calcined, obtain calcinated powder material；2) sintering aid is mixed with calcinated powder material, is crushed, obtained mixture is molded to obtain piezoelectric ceramics diaphragm；3) electrode obtains the piezoelectric actuator after the obtained piezoelectric ceramics membrane layer with interior electrode is folded, fires, prepares external electrode and polarized in prepared by piezoelectric ceramics diaphragm surface.The piezoelectric actuator is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Description
Technical field
The invention belongs to piezoelectric actuator technical field, be related to a kind of heat safe multilayer piezoelectric ceramic actuator and
Preparation method and use.
Background technology
In recent years, with the fast development of the modern industries such as aerospace, petrochemical industry, the metallurgical and energy, satellite, guided missile
Automatically control, the fields such as oil well supersonic sounding and auto industry engine fuel monitoring conditions for equipment use is proposed it is new
Requirement.Find the piezoelectric ceramics material with excellent in performance such as remarkable piezoelectric constant, high ferroelectrie Curie temperature and big strains
Material, and be successfully applied in heat safe actuator be urgent and great the challenging meaning of the task.
Currently, the most PZT base piezoelectric ceramics of commercial value, due to ingredient and structure, Curie temperature (Tc) is about
350 DEG C, in block piezoelectric material, the unpolarizing caused by hot activation, operating temperature range is no more than Curie's temperature
The half (R.C.Turner, et al, Appl.Acoust.41,299 (1994)) of degree.And it is activated applied to conventional piezoelectric ceramics
The PZT base ceramic material Curie temperature of device is only 200 DEG C even lower, is not particularly suited for hot environment.
Novel scandium acid bismuth-lead titanates (BiScO3-PbTiO3) high-temperature piezoelectric ceramics, compared to other lead base piezoelectric ceramics materials
Material, shows high-curie temperature (TC~450 DEG C) and high piezoelectric constant (d33~450pC/N), exactly a kind of great potential and suitable
Close the ceramic material (R.E.Eitel, et al, Jpn.J.Appl.Phys.41,2099 (2002)) used under high temperature environment.
But multilayer piezoelectric ceramic actuation device is in the production process, the technique of generally use tape casting multilayer co-firing, i.e., it will be ceramic
Casting films are with electrode material layer poststack simultaneously in high-temperature calcination.Current most popular electrode material is silver or silver-palladium metal
Electrode, silver-palladium metal electrode temperature in use is higher but expensive, about 960 DEG C of the silver electrode material fusing point of advantage of lower cost,
And scandium acid bismuth-lead titanate piezoelectric ceramics sintering temperature be more than 1000 DEG C (I.Sterianou, et al,
Appl.Phys.Lett.87,299 (2005)), it is difficult to by the silver of scandium acid bismuth-lead titanate piezoelectric ceramics and advantage of lower cost
Electrode is conjointly employed in piezoelectric actuator.
Therefore, cost of manufacture is relatively low and can be that this field urgently solves in the multilayer piezoelectric ceramic actuator that hot environment uses
Certainly the problem of.
Invention content
Aiming at the above shortcomings existing in the prior art, the purpose of the present invention is to provide a kind of heat safe multi-layer piezoelectrics
Ceramic actuator and its preparation method and application.Heat safe multilayer piezoelectric ceramic actuator provided by the invention is suitable for 25 DEG C
It is a kind of refractory ceramics device haveing excellent performance to 300 DEG C of operating temperature range, before there is application well in multinomial field
Scape.Preparation method provided by the invention is effectively dropped while using scandium acid bismuth-lead titanates binary system high temperature piezoceramics
Sintering temperature and low realizes and makes piezoelectric actuator with silver electrode cofiring.
In order to achieve the above object, the present invention uses following technical scheme：
In a first aspect, the present invention provides a kind of piezoelectric actuator, the piezoelectric ceramics in the piezoelectric actuator
Layer includes piezoceramic material and sintering aid, and the piezoceramic material is that general formula is xBiScO3-(1-x)PbTiO3Scandium acid
Bismuth-lead titanates binary piezoceramic material, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4.
Piezoelectric actuator provided by the invention is multilayer piezoelectric ceramic actuator, contains scandium acid in piezoceramics layer
Bismuth-lead titanates binary piezoceramic material, because this piezoelectric ceramics has very high Curie temperature (TC~450 DEG C), so
The operating temperature that can effectively improve piezoelectric actuator using such ceramic material reaches 25 DEG C -300 DEG C of model
It encloses；Also contain sintering aid in piezoceramics layer, passes through the phase interaction of sintering aid and scandium acid bismuth-lead titanates binary piezoceramic material
With, it can be substantially reduced the sintering temperature of ceramic layer, it can but fusing point more cheap with price also relatively low silver electrode
Cofiring, heat-resisting quantity provided by the invention is good to obtaining, and the piezoelectric actuator that price is relatively low.
In the present invention, the piezoceramic material is that general formula is xBiScO3-(1-x)PbTiO3Scandium acid bismuth-lead titanates two
First piezoceramic material, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4, for example, x is 0.3,0.31,0.32,
0.33,0.34,0.35,0.36,0.37,0.38,0.39 or 0.4 etc., it is not limited to cited numerical value, the numberical range
Other interior unrequited numerical value are equally applicable.It is because of scandium acid bismuth-lead titanates binary in the value range using this x value range
There are best piezoelectric properties for piezoceramic material.
It is used as currently preferred technical solution below, but not as the limitation to technical solution provided by the invention, leads to
Following preferred technical solution is crossed, can preferably reach and realize the technical purpose and advantageous effect of the present invention.
As currently preferred technical solution, the piezoceramics layer in the piezoelectric actuator is by piezoelectric ceramics material
Material and sintering aid composition, the piezoceramic material is that general formula is xBiScO3-(1-x)PbTiO3Scandium acid bismuth-lead titanates binary
Piezoceramic material, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4, for example, x is 0.3,0.31,0.32,
0.33,0.34,0.35,0.36,0.37,0.38,0.39 or 0.4 etc., it is not limited to cited numerical value, the numberical range
Other interior unrequited numerical value are equally applicable.Piezoelectric actuator can obtain better effect in such cases.
Preferably, the actuator includes the piezoceramics layer being laminated, the interior electrode between piezoceramics layer and divides
Two external electrodes of the piezoceramics layer offside that Wei Yu be laminated, described two external electrodes are respectively outside the first external electrode and second
Electrode, the interior electrode are made of electrode in first and the second inner electrode, in first electrode be connected with the first external electrode connection but
It is not connected to the second external electrode, connection is connected with the second external electrode but is not connected to the first external electrode for the second inner electrode, in described first
Electrode is alternately arranged with the second inner electrode in comb teeth-shaped.
In the present invention, " first " and " second " in described first in electrode and the second inner electrode only carries out area to name
Point, it is not that the quantity of inner electrode is limited.
Preferably, the interior electrode is silver electrode.Silver electrode is used in the present invention, it, can be with compared to silver-palladium metal electrode
The cost of piezoelectric actuator is reduced, making it more has industry application value.
Preferably, the dispatch from foreign news agency extremely silver electrode.
As currently preferred technical solution, the sintering aid includes CuO, B2O3Or Li2CO3In any one or
At least two combination, it is typical but be non-limiting combination and have：CuO and B2O3Combination, B2O3And Li2CO3Combination, CuO
And Li2CO3Combination etc..
Preferably, in the piezoceramics layer (1), the quality of sintering aid is the 0.05wt%- of piezoceramic material quality
0.15wt%, for example, 0.05wt%, 0.06wt%, 0.07wt%, 0.08wt%, 0.09wt%, 0.1wt%, 0.11wt%,
0.12wt%, 0.13wt%, 0.14wt% or 0.15wt% etc., it is not limited to cited numerical value, in the numberical range
Other unrequited numerical value are equally applicable, preferably 0.1wt%.In the present invention, the addition of sintering aid can reduce piezoelectric ceramics
The sintering temperature of material scandium acid bismuth-lead titanates can be combined with low melting point electrode material (such as silver electrode material), with stream
The technique for prolonging molding multilayer co-firing carries out the preparation of actuator；But excessive sintering aid, which is added, can reduce piezoceramic material
Quality, and then the piezoelectric actuator quality of preparation is made to deteriorate, the displacement for being embodied in piezoelectric actuator declines
Obviously.This range of the 0.05wt%-0.15wt% that the present invention provides can reach both the sintering temperature for reducing piezoceramic material
Degree reduces again smaller effect for its quality, wherein when the quality of sintering aid is piezoceramic material quality
When 0.1wt%, effect is especially good.
Second aspect, the present invention provide a kind of preparation method of piezoelectric actuator as described in relation to the first aspect, the side
Method includes the following steps：
(1) bismuth source, scandium source, lead source and titanium source are mixed, is crushed, obtains raw mixture, it is mixed to calcine the raw material
Object is closed, calcinated powder material is obtained；The bismuth source, scandium source, lead source and titanium source addition meet the element mole of Bi, Sc, Pb and Ti
Amount meets general formula xBiScO3-(1-x)PbTiO3Proportioning, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4；
(2) sintering aid is mixed with step (1) described calcinated powder material, be crushed, obtain mixture, by obtained mixture at
Type obtains piezoelectric ceramics diaphragm；
(3) electrode in prepared by piezoelectric ceramics diaphragm surface, the obtained piezoelectric ceramics membrane layer with interior electrode is folded,
After firing, preparing external electrode and polarized, the piezoelectric actuator is obtained.
In preparation method provided by the invention, make actuator because high-temperature piezoelectric ceramics scandium acid bismuth-lead titanates is used
Product has high-curie temperature (Tc~450 DEG C), is suitable for 25 DEG C to 300 DEG C of operating temperature range.By by sintering aid and
Calcinated powder material is mixed and is crushed so that subsequent processes can reduce the sintering temperature of high-temperature piezoelectric ceramics scandium acid bismuth-lead titanates
Degree, makes it low melting point electrode material (such as silver electrode material) cofiring relatively cheap with price, is caused meeting piezoelectric ceramics
The high temperature resistant of dynamic device reduces production cost while requirement.
As currently preferred technical solution, in step (1), the bismuth source includes Bi2O3；
Preferably, in step (1), the scandium source includes Sc2O3；
Preferably, in step (1), the lead source includes PbO；
Preferably, in step (1), the titanium source includes TiO2。
As currently preferred technical solution, in step (1), the broken method is wet ball grinding.
Preferably, in step (1), the temperature of the calcining is 750 DEG C -800 DEG C, for example, 750 DEG C, 760 DEG C, 770 DEG C,
780 DEG C, 790 DEG C or 800 DEG C etc., it is not limited to cited numerical value, other interior unrequited numerical value of the numberical range are same
Sample is applicable in.
Preferably, in step (1), time of the calcining is 1 hour to 3 hours, for example, 1 hour, 1.5 hours, it is 2 small
When, 2.5 hours or 3 hours etc., it is not limited to cited numerical value, other unrequited numerical value are same in the numberical range
It is applicable in, preferably 2 hours.
As currently preferred technical solution, in step (2), the sintering aid includes CuO, B2O3、Li2CO3In appoint
It anticipates a kind of or at least two combinations, typical but unrestricted new combination has：CuO and B2O3Combination, B2O3And Li2CO3's
Combination, CuO and Li2CO3Combination etc..
Preferably, in step (2), the addition of the sintering aid is the 0.05wt%-0.15wt% of calcinated powder material quality,
Such as 0.05wt%, 0.06wt%, 0.07wt%, 0.08wt%, 0.09wt%, 0.1wt%, 0.11wt%, 0.12wt%,
0.13wt%, 0.14wt% or 0.15wt% etc., it is not limited to cited numerical value, other are unrequited in the numberical range
Numerical value it is equally applicable, preferably 0.1wt%.
Preferably, in step (2), the method that sintering aid is mixed with step (1) described calcinated powder material is that sintering aid is added
Into step (1) described calcinated powder material.
Preferably, in step (2), the broken method is wet ball grinding.
Preferably, in step (2), the molding method is molded for the tape casting.
As currently preferred technical solution, in step (3), prepare in the method for electrode be method for printing screen.
Preferably, in step (3), the interior electrode is silver electrode.Silver electrode is used in the present invention, compared to silver-porpezite
Belong to electrode, the cost of piezoelectric actuator can be reduced, making it more has industry application value.
Preferably, in step (3), the temperature of the firing is 800 DEG C -950 DEG C, for example, 800 DEG C, 810 DEG C, 820 DEG C,
830 DEG C, 840 DEG C, 850 DEG C, 860 DEG C, 870 DEG C, 880 DEG C, 890 DEG C, 900 DEG C, 910 DEG C, 920 DEG C, 930 DEG C, 940 DEG C or 950
DEG C etc., it is not limited to cited numerical value, other interior unrequited numerical value of the numberical range are equally applicable.The temperature range
Not only high temperature piezoceramics scandium acid bismuth-lead titanates can be sintered, but also will not be by low melting point electrode material (such as silver electrode material
Material) fusing, be conducive to finally obtain functional and lower-cost piezoelectric actuator.
Preferably, in step (3), time of the firing is 1 hour to 3 hours, for example, 1 hour, 1.5 hours, it is 2 small
When, 2.5 hours or 3 hours etc., it is not limited to cited numerical value, other unrequited numerical value are same in the numberical range
It is applicable in, preferably 2 hours.
Preferably, step (3) described dispatch from foreign news agency extremely silver electrode.
As the further preferred technical solution of the method for the invention, the described method comprises the following steps：
(1) by Bi2O3, Sc2O3, PbO and TiO2Mixing carries out wet ball grinding, raw mixture is obtained, at 750 DEG C -800
The raw mixture is calcined at DEG C 2 hours, obtain calcinated powder material；Wherein, Bi2O3, Sc2O3, PbO and TiO2Addition meet
The element mole of Bi, Sc, Pb and Ti meet general formula xBiScO3-(1-x)PbTiO3Proportioning, wherein x and (1-x) are represented and are rubbed
That ratio, and 0.3≤x≤0.4；
(2) sintering aid is added in step (1) described calcinated powder material, wet ball grinding flows obtained mixture
The method of prolonging is molded to obtain piezoelectric ceramics diaphragm；The sintering aid includes CuO, B2O3、Li2CO3In any one or at least two
Combination, the addition of the sintering aid are the 0.1wt% of calcinated powder material quality；
(3) Ag inner electrode is prepared on piezoelectric ceramics diaphragm surface with method for printing screen, will obtained with interior electrode
Piezoelectric ceramics membrane layer is folded, is fired 2 hours at 800 DEG C -950 DEG C, external electrode is prepared after firing and is polarized, and obtains described
Piezoelectric actuator.
The third aspect, the present invention provide a kind of purposes of piezoelectric actuator as described in relation to the first aspect, the piezoelectricity pottery
Porcelain actuator is automatically controlled for satellite, guided missile automatically controls, oil well supersonic sounding or auto industry engine fuel are supervised
Control.
Compared with the prior art, the present invention has the advantages that：
(1) heat safe multilayer piezoelectric ceramic actuator provided by the invention has high-curie temperature (Tc is about 450 DEG C),
Suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low, functional, and relative shift is big, is adapted for each
Kind commercial Application；
(2) preparation method provided by the invention is using the same of scandium acid bismuth-lead titanates binary system high temperature piezoceramics
When, using the interaction of sintering aid and scandium acid bismuth-lead titanates binary system high temperature piezoceramics, effectively reduce sintering temperature
Degree is realized and makes piezoelectric actuator with silver electrode cofiring, and the same of the applicable working temperature of piezoelectric actuator is being improved
When, the cost of production is controlled, industrialization prospect is good.
Description of the drawings
Fig. 1 is the structural schematic diagram for the piezoelectric actuator that 1 sample number into spectrum of the embodiment of the present invention is 3, wherein 1 is piezoelectricity
Ceramic layer, 2 be electrode in first, and 3 be the first external electrode, and 4 be the second inner electrode, and 5 be the second external electrode；
Fig. 2 be 1 sample number into spectrum of the embodiment of the present invention be 3 piezoelectric actuator at 25 DEG C, 100 DEG C, 200 DEG C and 300
Electric field strength-relative displacement curve figure under DEG C operating temperature.
Specific implementation mode
For the present invention is better described, it is easy to understand technical scheme of the present invention, below further specifically to the present invention
It is bright.But following embodiments is only the simple example of the present invention, does not represent or limit the scope of the present invention, this
Invention protection domain is subject to claims.
It is present invention typical case but non-limiting embodiment below：
Embodiment 1
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process of the present embodiment is as follows：
(1) by Bi2O3, Sc2O3, PbO and TiO2By component 0.3BiScO3-0.7PbTiO3Mol ratio weighs, and wet method
Obtained mixture powder is heated up and calcines (pre-burning) by ball milling, and temperature is 750 DEG C to 800 DEG C, keeps the temperature 2 hours, obtains calcining powder
Material；
(2) the sintering aid CuO of the 0.1wt% of calcinated powder material quality is added in the calcinated powder material that step (1) obtains, and wet
Method ball milling is molded through the tape casting obtained mixture to obtain ceramic diaphragm；
(3) ceramic diaphragm that step (2) obtains is obtained into the ceramic diaphragm for being printed on internal silver electrode through screen printing, it will
It is printed on the ceramic layered membrane wafer stack of internal silver electrode pattern, 2 hours are kept the temperature under 800 DEG C to 950 DEG C ranges and is fired, firing
Multi-layer ceramics obtains piezoelectric actuator through making silver-colored external electrode, polarization.
Micro-displacement is carried out in 40kV/cm electric field strengths to the actuator at 25 DEG C and measures examination.
In the sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics 0.3BiScO3-0.7PbTiO3With help
Agent CuO compositions are burnt, the quality of sintering aid is the 0.1wt% of high temperature piezoceramics quality, and interior electrode is silver electrode.This implementation
The specific test parameters and results of property for sample 1, sample 2 and the sample 3 that example obtains are listed in table 1.Wherein calcined temperature is step 1
Middle powder calcination temperature, sintering temperature are multi-layer ceramics firing temperature in step 3, and density is that multi-layer ceramics is burnt into density, relatively
Displacement is the permillage of displacement and device integral thickness of the actuator under 25 DEG C, 40kV/cm electric field strengths.Following each realities
Apply parameter and behavioral definition all same in example.
Fig. 1 is the structural schematic diagram for the piezoelectric actuator that sample number into spectrum is 3 in the present embodiment, and the piezoelectric ceramics causes
Dynamic device includes piezoceramics layer 1, the interior electrode between piezoceramics layer 1 and the piezoelectric ceramics for being located at stacking of stacking
Two external electrodes of 1 offside of layer, described two external electrodes are respectively the first external electrode 3 and the second external electrode 5, the interior electrode by
Electrode 2 and the second inner electrode 4 form in first, and electrode 2 connects with the conducting of the first external electrode 3 but is not connected to the second dispatch from foreign news agency in first
Pole 5, the second inner electrode 4 are connected connection with the second external electrode 5 but are not connected to the first external electrode 3, electrode 2 and second in described first
Interior electrode 4 is alternately arranged in comb teeth-shaped.In the piezoelectric actuator sample, electrode 2 and the second inner electrode 4 have more in first
A, " first " and " second " only distinguishes name, rather than to the limitation of its quantity.The piezoelectric actuator sample
Interior number of electrodes and the ceramic number of plies in product are not limited to the number of plies shown in figure.
In the present embodiment, the sample that number is 1 and 2, structure with number be 3 piezoelectric actuator sample it is identical.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Fig. 2 is sample number into spectrum is 3 in the present embodiment piezoelectric actuator in 25 DEG C, 100 DEG C, 200 DEG C and 300 DEG C works
Electric field strength-relative displacement curve figure at a temperature of work, it can be seen from this figure that this piezoelectric actuator is in 40kV/cm electricity
0.8 ‰ relative displacement is generated under field intensity effect, and performance is kept approximately constant in 25 DEG C of -300 DEG C of working environments.
Embodiment 2
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid Li2CO3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3With sintering aid Li2CO3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for sample 4, sample 5 and the sample 6 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 3
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid B2O3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3With sintering aid B2O3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 7 and sample 8 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 4
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid CuO-Li2CO3, the wherein additive amount of CuO is the 0.05wt%, Li of calcinated powder material quality2CO3's
Additive amount is the 0.05wt% of calcinated powder material quality.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3, sintering aid CuO and sintering aid Li2CO3The quality of composition, CuO is high temperature piezoceramics matter
The 0.05wt% of amount, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multilayer
The structure of piezoelectric actuator sample is identical as the sample of embodiment 1.Sample 9 that the present embodiment obtains and sample 10 it is specific
Test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 5
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid B2O3-Li2CO3, wherein B2O3Additive amount be calcinated powder material quality 0.05wt%, Li2CO3's
Additive amount is the 0.05wt% of calcinated powder material quality.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3, sintering aid B2O3With sintering aid Li2CO3Composition, B2O3Quality be high temperature piezoceramics matter
The 0.05wt% of amount, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multilayer
The structure of piezoelectric actuator sample is identical as the sample of embodiment 1.The tool for the sample 11 and sample 12 that the present embodiment obtains
Body test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 6
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid CuO-B2O3, the wherein additive amount of CuO is the 0.05wt%, B of calcinated powder material quality2O3Addition
Amount is the 0.05wt% of calcinated powder material quality.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3, sintering aid CuO and sintering aid B2O3The quality of composition, CuO is high temperature piezoceramics quality
0.05wt%, B2O3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multi-layer piezoelectric
The structure of ceramic actuator sample is identical as the sample of embodiment 1.The specific examination of sample 13 and sample 14 that the present embodiment obtains
It tests parameter and the performance test results is listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 7
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (2), sintering aid CuO-B2O3-Li2CO3, the wherein additive amount of CuO is the 0.03wt%, B of calcinated powder material quality2O3
Additive amount be calcinated powder material quality 0.03wt%, Li2CO3Additive amount be calcinated powder material quality 0.03wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.3BiScO3-0.7PbTiO3, sintering aid CuO, sintering aid B2O3With sintering aid Li2CO3The quality of composition, CuO is high-temperature piezoelectric
The 0.03wt% of ceramic material quality, B2O3Quality be high temperature piezoceramics quality 0.03wt%, Li2CO3Quality
For the 0.03wt% of high temperature piezoceramics quality, interior electrode is silver electrode, the structure of multilayer piezoelectric ceramic actuator sample
It is identical as the sample of embodiment 1.The specific test parameters and the performance test results of sample 15 and sample 16 that the present embodiment obtains
It is listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 8
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process reference embodiment 1 of the present embodiment, difference lies in,
In step (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3It is formed with sintering aid CuO, the quality of sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 17 and sample 18 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 9
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid is
Li2CO3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3With sintering aid Li2CO3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 19 and sample 20 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 10
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid B2O3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3With sintering aid B2O3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 21 and sample 22 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 11
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid CuO-
Li2CO3, the wherein additive amount of CuO is the 0.05wt%, Li of calcinated powder material quality2CO3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3, sintering aid CuO and sintering aid Li2CO3The quality of composition, CuO is high temperature piezoceramics
The 0.05wt% of quality, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, it is more
The structure of layer piezoelectric actuator sample is identical as the sample of embodiment 1.Sample 23 that the present embodiment obtains and sample 24
Specific test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 12
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid B2O3-
Li2CO3, wherein B2O3Additive amount be calcinated powder material quality 0.05wt%, Li2CO3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3, sintering aid B2O3With sintering aid Li2CO3Composition, B2O3Quality be high temperature piezoceramics
The 0.05wt% of quality, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, it is more
The structure of layer piezoelectric actuator sample is identical as the sample of embodiment 1.Sample 25 that the present embodiment obtains and sample 26
Specific test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 13
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid CuO-
B2O3, the wherein additive amount of CuO is the 0.05wt%, B of calcinated powder material quality2O3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3, sintering aid CuO and sintering aid B2O3The quality of composition, CuO is high temperature piezoceramics matter
The 0.05wt% of amount, B2O3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multilayer pressure
The structure of electroceramics actuator sample is identical as the sample of embodiment 1.Sample 27 that the present embodiment obtains and sample 28 it is specific
Test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 14
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.36BiScO3-0.64PbTiO3, in step (2), sintering aid CuO-
B2O3-Li2CO3, the wherein additive amount of CuO is the 0.03wt%, B of calcinated powder material quality2O3Additive amount be calcinated powder material quality
0.03wt%, Li2CO3Additive amount be calcinated powder material quality 0.03wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.36BiScO3-0.64PbTiO3, sintering aid CuO, sintering aid B2O3With sintering aid Li2CO3The quality of composition, CuO is high-temperature high-pressure
The 0.03wt% of electroceramics material quality, B2O3Quality be high temperature piezoceramics quality 0.03wt%, Li2CO3Matter
Amount is the 0.03wt% of high temperature piezoceramics quality, and interior electrode is silver electrode, the knot of multilayer piezoelectric ceramic actuator sample
Structure is identical as the sample of embodiment 1.The specific test parameters and performance test knot for the sample 29 and sample 30 that the present embodiment obtains
Fruit is listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 15
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3It is formed with sintering aid CuO, the quality of sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 31 and sample 32 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 16
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid Li2CO3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3With sintering aid Li2CO3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 33 and sample 34 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 17
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid B2O3。
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3With sintering aid B2O3The quality of composition, sintering aid is high temperature piezoceramics quality
0.1wt%, interior electrode are silver electrode, and the structure of multilayer piezoelectric ceramic actuator sample is identical as the sample of embodiment 1.This implementation
The specific test parameters and the performance test results for the sample 35 and sample 36 that example obtains are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 18
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid CuO-
Li2CO3, the wherein additive amount of CuO is the 0.05wt%, Li of calcinated powder material quality2CO3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3, sintering aid CuO and sintering aid Li2CO3The quality of composition, CuO is high temperature piezoceramics matter
The 0.05wt% of amount, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, it is more in electrodes be silver electrode, layer
The structure of piezoelectric actuator sample is identical as the sample of embodiment 1.The tool for the sample 37 and sample 38 that the present embodiment obtains
Body test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 19
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid B2O3-
Li2CO3, wherein B2O3Additive amount be calcinated powder material quality 0.05wt%, Li2CO3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3, sintering aid B2O3With sintering aid Li2CO3Composition, B2O3Quality be high temperature piezoceramics matter
The 0.05wt% of amount, Li2CO3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multilayer
The structure of piezoelectric actuator sample is identical as the sample of embodiment 1.The tool for the sample 39 and sample 40 that the present embodiment obtains
Body test parameters and the performance test results are listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 20
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid CuO-
B2O3, the wherein additive amount of CuO is the 0.05wt%, B of calcinated powder material quality2O3Additive amount be calcinated powder material quality
0.05wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3, sintering aid CuO and sintering aid B2O3The quality of composition, CuO is high temperature piezoceramics quality
0.05wt%, B2O3Quality be high temperature piezoceramics quality 0.05wt%, interior electrode be silver electrode, multi-layer piezoelectric
The structure of ceramic actuator sample is identical as the sample of embodiment 1.The specific examination of sample 41 and sample 42 that the present embodiment obtains
It tests parameter and the performance test results is listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 21
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of the present embodiment is with reference to embodiment 1, and difference lies in steps
Suddenly in (1), the group of high temperature piezoceramics is divided into 0.4BiScO3-0.6PbTiO3, in step (2), sintering aid CuO-
B2O3-Li2CO3, the wherein additive amount of CuO is the 0.03wt%, B of calcinated powder material quality2O3Additive amount be calcinated powder material quality
0.03wt%, Li2CO3Additive amount be calcinated powder material quality 0.03wt%.
In the multilayer piezoelectric ceramic actuator sample that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics
0.4BiScO3-0.6PbTiO3, sintering aid CuO, sintering aid B2O3With sintering aid Li2CO3The quality of composition, CuO is high-temperature piezoelectric
The 0.03wt% of ceramic material quality, B2O3Quality be high temperature piezoceramics quality 0.03wt%, Li2CO3Quality
For the 0.03wt% of high temperature piezoceramics quality, interior electrode is silver electrode, the structure of multilayer piezoelectric ceramic actuator sample
It is identical as the sample of embodiment 1.The specific test parameters and the performance test results of sample 43 and sample 44 that the present embodiment obtains
It is listed in table 1.
The each sample that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
The test parameters and results of property table of 1 embodiment 1- embodiments of table, 21 each sample
* relative displacement：Thousand points of displacement of the actuator under 25 DEG C, 40kV/cm electric field strengths and device integral thickness
Than.
As can be seen from the above table, the relative displacement maximum of piezoelectric actuator provided by the invention has up to 0.80 ‰
Standby commercial applications are worth.
Embodiment 22
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process of the present embodiment is as follows：
(1) by Bi2O3, Sc2O3, PbO and TiO2By component 0.3BiScO3-0.7PbTiO3Mol ratio weighs, and wet method
Obtained mixture powder is heated up and calcines (pre-burning) by ball milling, and temperature is 780 DEG C, keeps the temperature 1 hour, obtains calcinated powder material；
(2) the sintering aid CuO of the 0.05wt% of calcinated powder material quality is added in the calcinated powder material that step (1) obtains, and
Wet ball grinding is molded through the tape casting obtained mixture to obtain ceramic diaphragm；
(3) ceramic diaphragm that step (2) obtains is obtained into the ceramic diaphragm for being printed on internal silver electrode through screen printing, it will
It is printed on the ceramic layered membrane wafer stack of internal silver electrode pattern, 3 hours are kept the temperature under 900 DEG C of ranges and is fired, the multilayer pottery of firing
Porcelain obtains piezoelectric actuator through making silver-colored external electrode, polarization.
Micro-displacement is carried out in 40kV/cm electric field strengths to the actuator at 25 DEG C and measures examination.
In the product that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics 0.3BiScO3-0.7PbTiO3With help
Agent CuO compositions are burnt, the quality of sintering aid is the 0.05wt% of high temperature piezoceramics quality, and interior electrode is silver electrode.
The density for the piezoelectric actuator product that the present embodiment obtains is 6.76g/cm3, the temperature at 25 DEG C and 40kV/
Micro-displacement is carried out in cm electric field strengths and measures examination relative displacement, and the relative displacement of the present embodiment product is 0.51 ‰.
The product that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Embodiment 23
The heat safe multilayer piezoelectric ceramic actuating implement body preparation process of the present embodiment is as follows：
(1) by Bi2O3, Sc2O3, PbO and TiO2By component 0.3BiScO3-0.7PbTiO3Mol ratio weighs, and wet method
Obtained mixture powder is heated up and calcines (pre-burning) by ball milling, and temperature is 760 DEG C, keeps the temperature 3 hours, obtains calcinated powder material；
(2) the sintering aid CuO of the 0.15wt% of calcinated powder material quality is added in the calcinated powder material that step (1) obtains, and
Wet ball grinding is molded through the tape casting obtained mixture to obtain ceramic diaphragm；
(3) ceramic diaphragm that step (2) obtains is obtained into the ceramic diaphragm for being printed on internal silver electrode through screen printing, it will
It is printed on the ceramic layered membrane wafer stack of internal silver electrode pattern, 1 hour is kept the temperature under 900 DEG C of ranges and is fired, the multilayer pottery of firing
Porcelain obtains piezoelectric actuator through making silver-colored external electrode, polarization.
Micro-displacement is carried out in 40kV/cm electric field strengths to the actuator at 25 DEG C and measures examination.
In the product that the present embodiment obtains, ceramic layer 1 is by high temperature piezoceramics 0.3BiScO3-0.7PbTiO3With help
Agent CuO compositions are burnt, the quality of sintering aid is the 0.15wt% of high temperature piezoceramics quality, and interior electrode is silver electrode.
The density for the piezoelectric actuator product that the present embodiment obtains is 6.69g/cm3, the temperature at 25 DEG C and 40kV/
Micro-displacement is carried out in cm electric field strengths and measures examination relative displacement, and the relative displacement of the present embodiment product is 0.53 ‰.
The product that the present embodiment obtains is suitable for 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low.
Comparative example 1
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of this comparative example is with reference to embodiment 1, and difference lies in steps
Suddenly in (2), the sintering aid CuO of the 0.005wt% of calcinated powder material quality is added so that finally obtained piezoelectric actuator production
In product, the quality of sintering aid is the 0.005wt% of high temperature piezoceramics quality.
As a result the density of obtained piezoelectric actuator is less than 5.50g/cm3, ceramic sintering temperature not up to cause
Densification temperature.And prepared actuator can not polarize under specified electric field, which can not use.
Comparative example 2
The specific preparation process of high temperature resistance multilayer piezoelectric actuator of this comparative example is with reference to embodiment 1, and difference lies in steps
Suddenly in (2), the sintering aid CuO of the 2wt% of calcinated powder material quality is added so that finally obtained piezoelectric actuator product
In, the quality of sintering aid is the 2wt% of high temperature piezoceramics quality.
As a result the density of obtained piezoelectric actuator is about 6.00g/cm3, the temperature at 25 DEG C and 40kV/cm
Micro-displacement is carried out in electric field strength and measures examination relative displacement, and the relative displacement of this comparative example product is about 0.45 ‰, and the performance is low
In embodiment 1 so that its commercial application value declines.
Based on the above embodiments with comparative example it is found that heat safe multilayer piezoelectric ceramic actuator provided by the invention is applicable in
In 25 DEG C to 300 DEG C of operating temperature range, and cost is relatively low；Preparation method provided by the invention is using scandium acid bismuth-titanium
While lead plumbate binary system high temperature piezoceramics, sintering aid and scandium acid bismuth-lead titanates binary system high-temperature piezoelectric ceramics are utilized
The interaction of material effectively reduces sintering temperature under suitable sintering aid additive amount, realizes to make with silver electrode cofiring and press
Electroceramics actuator.Comparative example does not have scheme using the present invention, thus can not obtain the effect of the present invention.
Applicant states that the present invention illustrates detailed process equipment and the technological process of the present invention by above-described embodiment,
But the invention is not limited in above-mentioned detailed process equipment and technological processes, that is, it is above-mentioned detailed not mean that the present invention has to rely on
Process equipment and technological process could be implemented.Person of ordinary skill in the field it will be clearly understood that any improvement in the present invention,
The addition of equivalence replacement and auxiliary element to each raw material of product of the present invention, the selection etc. of concrete mode all fall within the present invention's
Within protection domain and the open scope.
Claims (10)
1. a kind of piezoelectric actuator, which is characterized in that the piezoceramics layer (1) in the piezoelectric actuator includes pressure
Electroceramics material and sintering aid, the piezoceramic material are that general formula is xBiScO3-(1-x)PbTiO3Scandium acid bismuth-lead titanates
Binary piezoceramic material, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4.
2. piezoelectric actuator according to claim 1, which is characterized in that the piezoelectricity in the piezoelectric actuator
Ceramic layer (1) is made of piezoceramic material and sintering aid, and the piezoceramic material is that general formula is xBiScO3-(1-x)
PbTiO3Scandium acid bismuth-lead titanates binary piezoceramic material, wherein x and (1-x) represent molar ratio, and 0.3≤x≤
0.4；
Preferably, the actuator include stacking piezoceramics layer (1), the interior electrode positioned at piezoceramics layer (1) between with
Two external electrodes of piezoceramics layer (1) offside of stacking are located at, described two external electrodes are respectively the first external electrode (3)
With the second external electrode (5), the interior electrode is made of electrode (2) in first and the second inner electrode (4), in first electrode (2) with
The first external electrode (3) conducting connects but is not connected to the second external electrode (5), and the second inner electrode (4) connects with the second external electrode (5) conducting
The first external electrode (3) is connect but is not connected to, electrode (2) is alternately arranged with the second inner electrode (4) in comb teeth-shaped in described first；
Preferably, the interior electrode is silver electrode；
Preferably, the dispatch from foreign news agency extremely silver electrode.
3. piezoelectric actuator according to claim 1 or 2, which is characterized in that the sintering aid includes CuO, B2O3Or
Li2CO3In any one or at least two combination；
Preferably, in the piezoceramics layer (1), the quality of sintering aid is the 0.05wt%- of piezoceramic material quality
0.15wt%, preferably 0.1wt%.
4. according to the preparation method of claim 1-3 any one of them piezoelectric actuators, which is characterized in that the method
Include the following steps：
(1) bismuth source, scandium source, lead source and titanium source are mixed, are crushed, obtain raw mixture, calcines the raw mixture,
Obtain calcinated powder material；The bismuth source, scandium source, lead source and titanium source addition meet the element mole of Bi, Sc, Pb and Ti and meet
General formula xBiScO3-(1-x)PbTiO3Proportioning, wherein x and (1-x) represent molar ratio, and 0.3≤x≤0.4；
(2) sintering aid is mixed with step (1) described calcinated powder material, is crushed, obtains mixture, obtained mixture is molded
To piezoelectric ceramics diaphragm；
(3) electrode in prepared by piezoelectric ceramics diaphragm surface, the obtained piezoelectric ceramics membrane layer with interior electrode is folded, burning
After making, preparing external electrode and polarized, the piezoelectric actuator is obtained.
5. preparation method according to claim 4, which is characterized in that in step (1), the bismuth source includes Bi2O3；
Preferably, in step (1), the scandium source includes Sc2O3；
Preferably, in step (1), the lead source includes PbO；
Preferably, in step (1), the titanium source includes TiO2。
6. preparation method according to claim 4 or 5, which is characterized in that in step (1), the broken method is wet
Method ball milling；
Preferably, in step (1), the temperature of the calcining is 750 DEG C -800 DEG C；
Preferably, in step (1), the time of the calcining is 1 hour to 3 hours, preferably 2 hours.
7. according to claim 4-6 any one of them methods, which is characterized in that in step (2), the sintering aid include CuO,
B2O3、Li2CO3In any one or at least two combination；
Preferably, in step (2), the addition of the sintering aid is the 0.05wt%-0.15wt% of calcinated powder material quality, preferably
For 0.1wt%；
Preferably, in step (2), the method that sintering aid is mixed with step (1) described calcinated powder material is that sintering aid is added to step
Suddenly in (1) described calcinated powder material；
Preferably, in step (2), the broken method is wet ball grinding；
Preferably, in step (2), the molding method is molded for the tape casting.
8. according to claim 4-7 any one of them methods, which is characterized in that in step (3), the method for preparing interior electrode is
Method for printing screen；
Preferably, in step (3), the interior electrode is silver electrode；
Preferably, in step (3), the temperature of the firing is 800 DEG C -950 DEG C；
Preferably, in step (3), the time of the firing is 1 hour to 3 hours, preferably 2 hours；
Preferably, in step (3), the dispatch from foreign news agency extremely silver electrode.
9. according to claim 4-8 any one of them methods, which is characterized in that the described method comprises the following steps：
(1) by Bi2O3, Sc2O3, PbO and TiO2Mixing carries out wet ball grinding, raw mixture is obtained, at 750 DEG C -800 DEG C
It calcines the raw mixture 2 hours, obtains calcinated powder material；Wherein, Bi2O3, Sc2O3, PbO and TiO2Addition meet Bi,
The element mole of Sc, Pb and Ti meet general formula xBiScO3-(1-x)PbTiO3Proportioning, wherein x and (1-x) are represented mole
Ratio, and 0.3≤x≤0.4；
(2) sintering aid is added in step (1) described calcinated powder material, wet ball grinding, the tape casting is carried out to obtained mixture
Molding obtains piezoelectric ceramics diaphragm；The sintering aid includes CuO, B2O3、Li2CO3In any one or at least two group
It closes, the addition of the sintering aid is the 0.1wt% of calcinated powder material quality；
(3) Ag inner electrode is prepared on piezoelectric ceramics diaphragm surface with method for printing screen, the piezoelectricity with interior electrode that will be obtained
Ceramic diaphragm is laminated, and is fired 2 hours at 800 DEG C -950 DEG C, external electrode is prepared after firing and is polarized, the piezoelectricity is obtained
Ceramic actuator.
10. according to the purposes of claim 1-3 any one of them piezoelectric actuators, which is characterized in that the piezoelectricity pottery
Porcelain actuator is automatically controlled for satellite, guided missile automatically controls, oil well supersonic sounding or auto industry engine fuel are supervised
Control.
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