CN108470797A - The preparation method of colored crystal-silicon battery slice - Google Patents
The preparation method of colored crystal-silicon battery slice Download PDFInfo
- Publication number
- CN108470797A CN108470797A CN201810264617.2A CN201810264617A CN108470797A CN 108470797 A CN108470797 A CN 108470797A CN 201810264617 A CN201810264617 A CN 201810264617A CN 108470797 A CN108470797 A CN 108470797A
- Authority
- CN
- China
- Prior art keywords
- coating process
- preparation
- silicon battery
- battery slice
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 19
- 239000010703 silicon Substances 0.000 title claims abstract description 19
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000000576 coating method Methods 0.000 claims abstract description 25
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 17
- 229910000077 silane Inorganic materials 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910002804 graphite Inorganic materials 0.000 claims description 12
- 239000010439 graphite Substances 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 6
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Hybrid Cells (AREA)
Abstract
The invention discloses a kind of preparation methods of colored crystal-silicon battery slice, it is characterised in that it obtains the cell piece appearance color needed according to the combination of different process times, silane flow rate and ammonia flow.New type colorful cell piece coating process provided by the invention, do not increase process in conventional batteries technique, by controlling silicon nitrogen ratio and coating process time, the uniformity and consistency of film color are significantly improved, process controllability, repeatability and yield rate are greatly enhanced.
Description
Technical field
The invention belongs to photovoltaic technology field, are specifically related to a kind of making of novel crystal silicon solar colour cell piece
Technique.
Background technology
On the one hand colored solar solar panel can absorb the luminous energy of different colours sunlight in sunlight spectrum, therefore its
The face sun can not be had at work.On the other hand, colored solar battery is to use many architects, contractor
Requirement, they wish solar cell other than environmental protection and energy saving, can also there is a perfect knot with their building, building
It closes.
At present using the adjustment coating process time, the mode of film thickness is controlled to prepare colored cell piece.But this method is used,
Film Color uniformity is poor between piece, and process repeatability is poor and yield rate is low.
Invention content
The present invention is directed to problems of the prior art, proposes a kind of preparation method of colored crystal-silicon battery slice, its root
The cell piece appearance color needed is obtained according to the combination of different process times, silane flow rate and ammonia flow.
Preferably, it comprises the concrete steps that：
Step 1：It is required according to film colored appearance, sets coating process；
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
Specifically, in step 1, the coating process time is set as 650S, and control silane flow rate is 1000sccm, ammonia flow
3000sccm obtains golden plating film outward appearance.
Specifically, in step 1, the coating process time is set as 1000S, and control silane flow rate is 1000sccm, ammonia flow
3000sccm is measured, green plating film outward appearance is obtained.
Specifically, in step 1, the coating process time is set as 650S, and control silane flow rate is 1000sccm, ammonia flow
4500sccm obtains light yellow plating film outward appearance.
Specifically, in step 1, the coating process time is set as 1000S, and control silane flow rate is 1000sccm, ammonia flow
6000sccm is measured, red plating film outward appearance is obtained.
Preferably, in step 4, operation pressure 1800mTorr, duty ratio 4：35.
Beneficial effects of the present invention
New type colorful cell piece coating process provided by the invention does not increase process in conventional batteries technique, passes through control
Silicon nitrogen ratio and coating process time, the uniformity and consistency of film color are significantly improved, process controllability, repeatability and yield rate obtain
To being greatly improved.
Specific implementation mode
With reference to embodiment, the invention will be further described, and but the scope of the present invention is not limited thereto：
Embodiment 1：
Step 1：To obtain the solar battery sheet of colden visual appearance, setting coating process is specifically as shown in table 1：
Table 1：Exterior membrane color technical recipe
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set, and sets operation pressure
1800mTorr, duty ratio 4:35；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
Embodiment 2：
Step 1：To obtain the solar battery sheet of green appearance, setting coating process is specifically as shown in table 2：
Table 2：Exterior membrane color technical recipe
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set, and sets operation pressure
1800mTorr, duty ratio 4：35；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
Embodiment 3：
Step 1：To obtain the solar battery sheet of pale yellow colored appearance, setting coating process is specifically as shown in table 3：
Table 3：Exterior membrane color technical recipe
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set, and sets operation pressure
1800mTorr, duty ratio 4：35；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
Embodiment 4：
Step 1：To obtain the solar battery sheet of red appearance, setting coating process is specifically as shown in table 4：
Table 4：Exterior membrane color technical recipe
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set, and sets operation pressure
1800mTorr, duty ratio 5：35；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
Comparative example：
Implemented with reference to specification [0009] section embodiment part of Chinese invention (104952978 A of notification number CN).
It is final to obtain three parts of embodiments of the application with silicon chip made from comparative example in appearance yield rate and solid colour disposition
Condition contrast table is as shown in table 5：
Table 5：Contrast experiment's effect table
| Production quantity | Homochromy quantity | Qualification rate | |
| Embodiment 1 | 216 | 214 | 99.07% |
| Embodiment 2 | 216 | 210 | 97.22% |
| Embodiment 3 | 216 | 208 | 96.30% |
| Embodiment 4 | 216 | 210 | 97.22% |
| Comparative example | 216 | 171 | 79.17% |
Specific embodiment described herein is only to be illustrated to spirit of that invention.Technology belonging to the present invention is led
The technical staff in domain can make various modifications or additions to the described embodiments or replace by a similar method
In generation, however, it does not deviate from the spirit of the invention or beyond the scope of the appended claims.
Claims (7)
1. it is a kind of colour crystal-silicon battery slice preparation method, it is characterised in that it according to the different process times, silane flow rate and
The combination of ammonia flow obtains the cell piece appearance color needed.
2. the preparation method of colour crystal-silicon battery slice according to claim 1, it is characterised in that comprise the concrete steps that：
Step 1：It is required according to film colored appearance, sets coating process；
Step 2：The silicon chip of plated film will be needed to be inserted into graphite boat, into plated film boiler tube；
Step 3：Boiler tube vacuumizes and constant temperature is to 450 DEG C；
Step 4：It is passed through silane and ammonia, and plated film is carried out according to the coating process that step 1 is set；
Step 5：After boiler tube cleaning vacuumizes, back pressure goes out boat；
Step 6：After graphite boat cools, cell piece unloads boat.
3. the preparation method of colour crystal-silicon battery slice according to claim 2, it is characterised in that in step 1, coating process
Time is set as 650S, and control silane flow rate is 1000sccm, ammonia flow 3000sccm, obtains golden plating film outward appearance.
4. the preparation method of colour crystal-silicon battery slice according to claim 2, it is characterised in that in step 1, coating process
Time is set as 1000S, and control silane flow rate is 1000sccm, ammonia flow 3000sccm, obtains green plating film outward appearance.
5. the preparation method of colour crystal-silicon battery slice according to claim 2, it is characterised in that in step 1, coating process
Time is set as 650S, and control silane flow rate is 1000sccm, ammonia flow 4500sccm, obtains light yellow plating film outward appearance.
6. the preparation method of colour crystal-silicon battery slice according to claim 2, it is characterised in that in step 1, coating process
Time is set as 1000S, and control silane flow rate is 1000sccm, ammonia flow 6000sccm, obtains red plating film outward appearance.
7. according to the preparation method of claim 2-6 any one of them colour crystal-silicon battery slices, it is characterised in that in step 4,
Operation pressure 1800mTorr, duty ratio 4:35.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810264617.2A CN108470797A (en) | 2018-03-28 | 2018-03-28 | The preparation method of colored crystal-silicon battery slice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810264617.2A CN108470797A (en) | 2018-03-28 | 2018-03-28 | The preparation method of colored crystal-silicon battery slice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108470797A true CN108470797A (en) | 2018-08-31 |
Family
ID=63264859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810264617.2A Pending CN108470797A (en) | 2018-03-28 | 2018-03-28 | The preparation method of colored crystal-silicon battery slice |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108470797A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115036387A (en) * | 2021-02-22 | 2022-09-09 | 赫里欧新能源科技（上海）有限公司 | Color solar chip preparation method based on power generation building material application |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102244143A (en) * | 2011-06-27 | 2011-11-16 | 光为绿色新能源有限公司 | Preparation method of crystalline silicon solar cell |
| CN106847997A (en) * | 2017-01-19 | 2017-06-13 | 英利能源（中国）有限公司 | Colored solar cell piece, preparation method, battery component and PECVD device |
-
2018
- 2018-03-28 CN CN201810264617.2A patent/CN108470797A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102244143A (en) * | 2011-06-27 | 2011-11-16 | 光为绿色新能源有限公司 | Preparation method of crystalline silicon solar cell |
| CN106847997A (en) * | 2017-01-19 | 2017-06-13 | 英利能源（中国）有限公司 | Colored solar cell piece, preparation method, battery component and PECVD device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115036387A (en) * | 2021-02-22 | 2022-09-09 | 赫里欧新能源科技（上海）有限公司 | Color solar chip preparation method based on power generation building material application |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104211444B (en) | The preparation method of transmutation Sorghum pigment fancy glaze | |
| CN104393107B (en) | A kind of high square resistance crystal silicon cell low pressure diffusion technique | |
| CN101982888B (en) | Manufacturing method of colour solar cell | |
| CN102005502B (en) | Method for improving phosphorus diffusion uniformity of solar cell | |
| CN103274761B (en) | Cu-Mn-Fe-Cr cobalt-free black ceramic pigment and preparation method thereof | |
| CN109713084A (en) | A kind of method of sheet resistance uniformity in improvement solar battery diffusion technology | |
| CN104882516A (en) | High-temperature low-pressure method for silicon wafer diffusion | |
| CN102244143B (en) | Preparation method of crystalline silicon solar cell | |
| CN108470797A (en) | The preparation method of colored crystal-silicon battery slice | |
| CN102916086A (en) | Diffusing process of low-square resistance crystalline silicon cell | |
| CN203071081U (en) | Petaliform solar cell | |
| CN102931289B (en) | Preparation method of flower piece solar cell | |
| CN104241449A (en) | Technology for manufacturing polycrystalline silicon solar cells | |
| CN101494253B (en) | Heavy diffusion and light diffusion technology for manufacturing selective emitter solar battery | |
| CN102544238B (en) | Multi-diffusion manufacturing method for polycrystalline silicon wafer | |
| CN108455681B (en) | Method for preparing iron oxide yellow pigment by using iron and aluminum-containing industrial wastewater | |
| CN106847997B (en) | Colored solar cell piece, preparation method, battery component and PECVD device | |
| CN105655448B (en) | A kind of efficiently colored polycrystalline solar cell and preparation method thereof | |
| CN103304184A (en) | Weather-proof natural artificial face brick paint and preparation method thereof | |
| CN107540237A (en) | A kind of manufacture method of sunshade heat-absorption coated mass colouring F green glass | |
| CN106433457A (en) | Modified casein-gelatin-containing solar energy heat absorbing coating material | |
| CN102270701A (en) | One-step diffusion process of silicon solar cell with selective emitter | |
| CN106277818A (en) | A kind of Novel sunlight controls coated glass and preparation technology thereof | |
| CN212783477U (en) | Solar cell backboard and solar cell module | |
| CN107352814A (en) | A kind of Ford indigo plant coated glass and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180831 |