CN108458785A - Spectral detection component and preparation method thereof, spectrometer - Google Patents

Spectral detection component and preparation method thereof, spectrometer Download PDF

Info

Publication number
CN108458785A
CN108458785A CN201810097073.5A CN201810097073A CN108458785A CN 108458785 A CN108458785 A CN 108458785A CN 201810097073 A CN201810097073 A CN 201810097073A CN 108458785 A CN108458785 A CN 108458785A
Authority
CN
China
Prior art keywords
substrate
electrode
detection component
bandpass filter
photoelectric detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810097073.5A
Other languages
Chinese (zh)
Inventor
周小康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yungu Guan Technology Co Ltd
Original Assignee
Yungu Guan Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yungu Guan Technology Co Ltd filed Critical Yungu Guan Technology Co Ltd
Priority to CN201810097073.5A priority Critical patent/CN108458785A/en
Publication of CN108458785A publication Critical patent/CN108458785A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The present invention discloses a kind of spectral detection component and preparation method thereof, spectrometer, and wherein spectral detection component includes:Substrate;Linear bandpass filter transmits different monochromatic light it includes having several regions, each region;Photoelectric detector, for detecting monochromatic light and forming light detection circuit with optical signal processor.Linear bandpass filter and photoelectric detector can be integrated on substrate by the present invention so that and integrated substrate is whole more exquisite, therefore can largely reduce space, so that it is more small and exquisite using the spectrometer of spectral detection component, it is carried convenient for user.

Description

Spectral detection component and preparation method thereof, spectrometer
Technical field
The present invention relates to optical fields, and in particular to a kind of spectral detection component and preparation method thereof, spectrometer.
Background technology
Spectrometer (Spectroscope) is that the scientific instrument that the photodegradation of complicated component is spectrum line are utilized spectrometer It can measure the spectral component of body surface reflection or transmitting light.Spectrometer can develop to the crawl of optical information, with photographic negative, Or computerized automatic display numerical value instrument shows and analyzes, which kind of element contained in article to predict.Therefore, spectrometer is wide It is applied in the detection of air pollution, water pollution, food hygiene, metal industry etc. generally.
Traditional spectrometer is usually fabricated by grating, photosensitive element and optical system in the prior art, due to each Optical grating element or photosensitive element its own volume it is larger, the body of spectrometer entirety is caused when forming spectrometer with optical system Not only very huge but also weight is also very big for product, therefore not only its dimensional footprint is larger for spectrometer in the prior art, but also It is more heavy.
Invention content
Therefore, technical problems to be solved of the embodiment of the present invention are spectrometer in the prior art not only its space hold Area is larger, but also more heavy.
For this purpose, an embodiment of the present invention provides following technical solutions:
The embodiment of the present invention provides a kind of spectral detection component, including:
The spectral detection component includes substrate, linear bandpass filter and photoelectric detector, and three arranges according to stacking The mode of cloth is arranged;Wherein, the photoelectric detector is for detecting the monochromatic light transmitted by linear bandpass filter, and sends out letter Number.
Optionally, the substrate is transparent substrate.
Optionally, the substrate is between the linear bandpass filter and the photoelectric detector.
Optionally, the substrate stacking is set on the linear bandpass filter.
Optionally, the substrate be flexible base board and be set to below the photoelectric detector.
Optionally, the photoelectric detector includes the first electrode layer, photosensitive material layer and the second electrode lay being stacked.
Optionally, the first electrode layer is several transparent electrodes being intervally arranged, and the second electrode lay is reflection electricity Pole.
Optionally, the photosensitive material layer includes organic photosensitive material and quantum dot and perovskite light-sensitive material and inorganic light One or more are made in quick material.
The embodiment of the present invention provides a kind of preparation method of spectral detection component, includes the following steps:
One substrate is provided;
Linear bandpass filter is prepared in the side of the substrate;
Photoelectric detector is prepared in the other side of substrate,
Alternatively, the photoelectric detector is set between the substrate and the linear bandpass filter,
Alternatively, the photoelectric detector is formed on the linear bandpass filter.
Optionally, the photoelectric detector for preparing is made by the steps:
First electrode layer is prepared, the first electrode layer includes several transparent electrodes being intervally arranged;
Photosensitive material is prepared in the light-sensitive material for covering the gap between the first electrode layer and the first electrode layer The bed of material;
The second electrode lay is deposited in the photosensitive material layer.
The embodiment of the present invention provides a kind of spectrometer, including the spectral detection component.
Technical solution of the embodiment of the present invention, has the following advantages that:
The present invention discloses a kind of spectral detection component and preparation method thereof, spectrometer, and wherein spectral detection component includes:Base Plate;Linear bandpass filter transmits different monochromatic light it includes having several regions, each region;Photoelectric detector, for examining It surveys monochromatic light and forms light detection circuit with optical signal processor.The present invention can be by linear bandpass filter and photoelectric detector collection At on substrate so that integrated substrate is whole more exquisite, therefore can largely reduce space, so that using The spectrometer of spectral detection component is more small and exquisite, is carried convenient for user.
Description of the drawings
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor It puts, other drawings may also be obtained based on these drawings.
Fig. 1 is the first structure block diagram of spectral detection component in the embodiment of the present invention 1;
Fig. 2 is the structural schematic diagram of the linear bandpass filter of spectral detection component in the embodiment of the present invention 1;
Fig. 3 is the second structure diagram of spectral detection component in the embodiment of the present invention 2;
Fig. 4 is the third structure diagram of spectral detection component in the embodiment of the present invention 3;
Fig. 5 is the flow chart of the preparation method of spectral detection component in the embodiment of the present invention 4.
Specific implementation mode
The technical solution of the embodiment of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described Embodiment be a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is general The every other embodiment that logical technical staff is obtained without making creative work belongs to what the present invention protected Range.
In the description of the embodiment of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, It is merely for convenience of the description embodiment of the present invention and simplifies to describe, not indicating or implying the indicated device or element must have There is specific orientation, with specific azimuth configuration and operation, therefore is not considered as limiting the invention.In addition, term " the One ", " second ", " third " are used for description purposes only, and are not understood to indicate or imply relative importance.
In the description of the embodiment of the present invention, it should be noted that unless otherwise clearly defined and limited, term " peace Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection;It can be mechanical connection, can also be electrical connection;Can be directly connected, can also indirectly connected through an intermediary, It can also be the connection inside two elements, can be wirelessly connected, can also be wired connection.For the common skill of this field For art personnel, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
As long as in addition, technical characteristic involved in invention described below different embodiments non-structure each other It can be combined with each other at conflict.
Embodiment 1
The embodiment of the present invention provides a kind of spectral detection component, as shown in Figure 1, respectively including:Substrate 11, the filter of linear band logical Mating plate 12 and photoelectric detector 13;Substrate 11 herein is transparent substrates, is located at linear bandpass filter 12 and Photoelectric Detection Between device 13, therefore in Fig. 1, linear bandpass filter 12 and photoelectric detector 13 are located at the both sides of substrate 11, center line Property bandpass filter 12, is arranged in the side of substrate 11, different monochromatic light is transmitted it includes having several regions, each region; Photoelectric detector 13 is arranged in the other side of substrate 11, for detecting monochromatic light and forming light detection with optical signal processor 14 Circuit.Photoelectric detector 13 includes first electrode layer 131, photosensitive material layer 132 and the second electrode lay 133 being stacked, Middle first electrode layer 131 be several transparent electrodes being intervally arranged, photosensitive material layer 132 include covering first electrode layer 131 and The light-sensitive material in the gap between first electrode layer 131, first electrode layer 131 are electrically connected with optical signal processor 14, the second electricity Pole layer 133 is reflecting electrode, and public electrode and optical signal as first electrode layer 131 in the outside of photoelectric detector 13 is arranged Processor 14 forms measure loop for collecting photo-signal.
Specifically, substrate 11 among the above can be glass substrate or flexible base board, and glass substrate and flexible base board are distinguished It is the substrate 11 made of two kinds of different translucent materials, is generally available to prepare organic electroluminescence device (OLED device), Substrate 11 in Fig. 1 is glass substrate.Linear bandpass filter (linear variable filter, LVF) 12, can be from compound The monochromatic light of a certain wave band is isolated in light, and the linear bandpass filter 12 in the present embodiment is its each different spaces position The bandwidth region of different light transmission passages can be corresponded to by setting, and have the function of light splitting, such as:As shown in Fig. 2, No. 1 Regional Representative purple Light, wave-length coverage 380nm-470nm, No. 2 Regional Representative's blue lights, wave-length coverage 470nm-505nm, No. 3 regions Represent green light, wave-length coverage 505nm-530nm, No. 4 Regional Representative's sodium yellows, wave-length coverage 530nm-610nm, No. 5 Regional Representative's orange-colored lights, wave-length coverage 610nm-640nm, No. 6 Regional Representative's red lights, wave-length coverage are 640nm-780nm.Therefore wave-length coverage is known as visible light in the monochromatic light of 380nm-780nm, respectively by it is red, orange, yellow, green, green, The spectrum of blue, purple seven kinds of colors composition.12 its each different spatial of linear bandpass filter can correspond in the present embodiment The bandwidth region of different light transmission passages not merely only represents the wave-length coverage that every number region is transmitted in Fig. 2 certainly, adjacent Bandwidth region can be set as 10nm or smaller through the difference of wavelength.Spectral detection component not only can be in the present embodiment The visible light for detecting red, orange, yellow, green, blue, blue, purple, can also detect sightless ultraviolet light and infrared light, therefore linear band logical Optical filter 12 is typically used in miniature spectrometer and imaging spectrometer, average saturating in passband frequently with linear variable filter It penetrates rate and is more than 60%, average transmittance is less than 0.1% outside channel, base panel length 10mm;Linear bandpass filter in the present embodiment Piece 12 is exactly to apply in spectrometer.Linear bandpass filter 12 in the present embodiment is arranged in the side of substrate 11, herein Side can be expressed as the front of substrate 11, can also be the reverse side of substrate 11.Linear bandpass filter 12 is arranged in substrate 11 Side, and photoelectric detector 13 is arranged in the other side of substrate 11.If linear bandpass filter 12 is arranged in substrate 11 Front, then photoelectric detector 13 reverse side in substrate 11 is just set.First electrode layer 131 in photoelectric detector 13 is arranged in light The inside of photodetector 13 includes several euphotic electrodes in first electrode layer 131, thus first electrode can be ITO electrode or IZO electrodes, each first electrode are arranged setting one by one according to same intervals, and the shape of each first electrode is strip, the The width and spacing of one electrode can be adjusted according to the characteristic of linear bandpass filter 12, and the representative width range of the two exists For 0.1 μ nm between 1mm, the shape of first electrode is not limited to strip, can also be other shapes, each first electrode difference Corresponding to the bandwidth channel that each region is arranged on substrate 11, then each first electrode, which is euphotic electrode, to be collected simultaneously Different photo-signals.Photosensitive material layer 132 in photoelectric detector 13 is by organic photosensitive material or quantum dot or calcium titanium One or more of compositions in mine light-sensitive material or inorganic light-sensitive material, in Fig. 1 it can be seen that photosensitive material layer 132 includes covering The light-sensitive material in gap between first electrode layer 131 and first electrode layer 131, photosensitive material layer 132 include having light The photoactive substance of quick material, therefore it is with photosensitization, absorbs the list of the different wave length by the transmission of linear bandpass filter 12 Coloured light, the monochromatic optical signal of difference for transmiting linear bandpass filter 12 are changed into electric signal.In photoelectric detector 13 The second electrode lay 133 is arranged in the outside of photosensitive material layer 132, optical signal processor 14 be electrically connected with first electrode layer 131 with The second electrode lay 132 formed measure loop, the second electrode lay 133 as in first electrode layer 131 several first electrodes it is public Electrode and 131 collected both photo-signal of first electrode layer.The photoelectric current that the second electrode lay 133 collects its first electrode is believed Photosensitive material layer 132 number is reflected to so that photosensitive material layer 132 absorbs more monochromatic light, and then improves luminous efficiency.Second Electrode layer 133 is used as reflecting electrode, therefore the second electrode lay 133 is Ag, and the high metal electrode of Al isoreflectances is made.Light herein Signal processor 14 is equivalent to optical signal and reads chip, and the spectrum of the monochromatic optical signal of detected different wave length is read out, Certain optical signal processor 14 can also carry out digital independent respectively using logic circuit or computer.First electrode layer 131 with For the second electrode lay 133 respectively as the anode and cathode of photoelectric detector 13, optical signal is radiated at light through first electrode layer 131 In quick material layer 132, photosensitive material layer 132 will generate photoelectric current, and photoelectric current is by first electrode layer 131 and the second electrode lay 133 It collects, finally flows through optical signal processor 14 and constitute complete light detection circuit.By spectral detection component in this present embodiment with Based on substrate 11, substrate 11 has good light transmittance, thus its thickness is smaller, compared with to save space, and linear band logical filter Mating plate 12 and photoelectric detector 13 are separately positioned on the both sides of substrate 11, and setting is more close, therefore further saves not Few space.Substrate 11, linear bandpass filter 12 and photoelectric detector 13, are equivalent on the both sides for being integrally disposed in substrate 11, And photoelectric detector 13 integrally disposed first electrode layer 131, photosensitive material layer 132 and the second electrode lay 133, therefore this implementation The overall volume of spectral detection component in example can be effectively reduced, therefore reduce its whole occupied space.
Embodiment 2
The embodiment of the present invention provides a kind of spectral detection component, as shown in figure 3, respectively including:Substrate 11, the filter of linear band logical Mating plate 12 and photoelectric detector 13;Substrate 11 herein be transparent substrates, be located at linear bandpass filter 12 top and with The top contact of linear bandpass filter 12, in figure 3, linear bandpass filter 12 and photoelectric detector 13 are located at substrate 11 the same side, and linearly bandpass filter 12 is between substrate 11 and photoelectric detector 13, wherein linear bandpass filter 12 include several regions, and each region transmits different monochromatic light;Photoelectric detector 13 is also disposed at the same side of substrate 11 It is contacted with the bottom of linear bandpass filter 12, for detecting monochromatic light and forming light detection circuit with optical signal processor 14. Photoelectric detector 13 includes first electrode layer 131, photosensitive material layer 132 and the second electrode lay 133 being stacked, wherein first Electrode layer 131 is several transparent electrodes being intervally arranged, and photosensitive material layer 132 includes covering first electrode layer 131 and the first electricity The light-sensitive material in the gap between pole layer 131, first electrode layer 131 are electrically connected with optical signal processor 14, the second electrode lay 133 For reflecting electrode, public electrode and optical signal processor as first electrode layer 131 in the outside of photoelectric detector 13 are set 14 formation measure loops are for collecting photo-signal.
Specifically, substrate 11 among the above can be glass substrate or flexible base board, and glass substrate and flexible base board are distinguished It is the substrate 11 made of two kinds of different translucent materials, is generally available to prepare organic electroluminescence device (OLED device), Substrate 11 in Fig. 3 is glass substrate.Linear bandpass filter (linear variable filter, LVF) 12, can be from compound The monochromatic light of a certain wave band is isolated in light, and the linear bandpass filter 12 in the present embodiment is its each different spaces position The bandwidth region of different light transmission passages can be corresponded to by setting, and have the function of light splitting, such as:As shown in Fig. 2, No. 1 Regional Representative purple Light, wave-length coverage 380nm-470nm, No. 2 Regional Representative's blue lights, wave-length coverage 470nm-505nm, No. 3 regions Represent green light, wave-length coverage 505nm-530nm, No. 4 Regional Representative's sodium yellows, wave-length coverage 530nm-610nm, No. 5 Regional Representative's orange-colored lights, wave-length coverage 610nm-640nm, No. 6 Regional Representative's red lights, wave-length coverage are 640nm-780nm.Therefore wave-length coverage is known as visible light in the monochromatic light of 380nm-780nm, respectively by it is red, orange, yellow, green, green, The spectrum of blue, purple seven kinds of colors composition.12 its each different spatial of linear bandpass filter can correspond in the present embodiment The bandwidth region of different light transmission passages not merely only represents the wave-length coverage that every number region is transmitted in Fig. 2 certainly, adjacent Bandwidth region can be set as 10nm or smaller through the difference of wavelength.Spectral detection component not only can be in the present embodiment The visible light for detecting red, orange, yellow, green, blue, blue, purple, can also detect sightless ultraviolet light and infrared light, therefore linear band logical Optical filter 12 is typically used in miniature spectrometer and imaging spectrometer, average saturating in passband frequently with linear variable filter It penetrates rate and is more than 60%, average transmittance is less than 0.1% outside channel, base panel length 10mm;Linear bandpass filter in the present embodiment Piece 12 is exactly to apply in spectrometer.Linear bandpass filter 12 in the present embodiment is arranged in the side of substrate 11, herein Side can be expressed as the front of substrate 11, can also be the reverse side of substrate 11.Linear bandpass filter 12 is arranged in substrate 11 Side, and the same side that photoelectric detector 13 is also disposed at substrate 11 is contacted with the bottom of linear bandpass filter 12.If Linear bandpass filter 12 is arranged in the front of substrate 11, then photoelectric detector 13 is also just arranged in the front of substrate 11.Photoelectricity First electrode layer 131 in detector 13 is arranged in the inside of photoelectric detector 13, first electrode layer 131 comprising several thoroughly Optoelectronic pole, therefore first electrode can be ITO electrode or IZO electrodes, each first electrode is arranged setting one by one according to same intervals, And the shape of each first electrode is strip, and the width and spacing of first electrode can be according to the characteristics of linear bandpass filter 12 It is adjusted, for the representative width range of the two in 0.1 μ nm between 1mm, the shape of first electrode is not limited to strip, also may be used To be other shapes, each first electrode corresponds respectively to the bandwidth channel that each region is arranged on substrate 11, and then each One electrode, which is euphotic electrode, can be collected simultaneously different photo-signals.Photosensitive material layer 132 in photoelectric detector 13 It is made of one or more in organic photosensitive material or quantum dot or perovskite light-sensitive material or inorganic light-sensitive material, in Fig. 3 In it can be seen that photosensitive material layer 132 includes being covered in light in the gap between first electrode layer 131 and first electrode layer 131 Quick material, photosensitive material layer 132 include the photoactive substance for having light-sensitive material, therefore it is absorbed with photosensitization by linear The monochromatic light for the different wave length that bandpass filter 12 transmits, the monochromatic optical signal of difference for transmiting linear bandpass filter 12 It is changed into electric signal.The second electrode lay 133 in photoelectric detector 13 is arranged at the outside of photosensitive material layer 132, optical signal Reason device 14 is electrically connected with first electrode layer 131 forms measure loop with the second electrode lay 132, and the second electrode lay 133 is used as first The public electrode of several first electrodes and 131 collected both photo-signal of first electrode layer in electrode layer 131.The second electrode lay The photo-signal that its first electrode is collected is reflected to photosensitive material layer 132 so that photosensitive material layer 132 absorbs more by 133 Monochromatic light, and then improve luminous efficiency.The second electrode lay 133 is used as reflecting electrode, therefore the second electrode lay 133 is Ag, and Al etc. is anti- The high metal electrode of rate is penetrated to be made.Optical signal processor 14 herein is equivalent to optical signal and reads chip, by detected different waves The spectrum of long monochromatic optical signal is read out, and certain optical signal processor 14 can also utilize logic circuit or computer to distinguish Carry out digital independent.First electrode layer 131 is with the second electrode lay 133 respectively as the anode and cathode of photoelectric detector 13, light Signal is radiated at through first electrode layer 131 in photosensitive material layer 132, and photosensitive material layer 132 will generate photoelectric current, photoelectric current quilt First electrode layer 131 and the second electrode lay 133 are collected, and are finally flowed through optical signal processor 14 and are constituted complete light detection circuit.By Spectral detection component in this present embodiment based on substrate 11, substrate 11 have good light transmittance, thus its thickness compared with It is small, compared with to save space, and linear bandpass filter 12 and photoelectric detector 13 are separately positioned on the same side of substrate 11, set It sets more closely, therefore further saves many spaces.Substrate 11, linear bandpass filter 12 and photoelectric detector 13, phase When on the same side for being integrally disposed in substrate 11, and photoelectric detector 13 integrally disposed first electrode layer 131, photosensitive material The bed of material 132 and the second electrode lay 133, they are in close contact respectively can largely save much room, therefore this implementation The overall volume of spectral detection component in example can be effectively reduced, therefore reduce its whole occupied space.
Embodiment 3
The embodiment of the present invention provides a kind of spectral detection component, as shown in figure 4, respectively including:Substrate 11, the filter of linear band logical Mating plate 12 and photoelectric detector 13;Substrate 11 herein is flexible base board, is located at the bottom of photoelectric detector 13 and and photoelectricity The bottom of detector 13 contacts, and in Fig. 4, linear bandpass filter 12 and photoelectric detector 13 are located at the same of substrate 11 Side, and photoelectric detector 13 is located between substrate 11 and linear bandpass filter 12, wherein linear bandpass filter 12 includes Several regions, each region transmit different monochromatic light;Photoelectric detector 13 is also disposed at the same side and the linear tape of substrate 11 The bottom of pass filter 12 contacts, for detecting monochromatic light and forming light detection circuit with optical signal processor 14.Photoelectric Detection Device 13 includes first electrode layer 131, photosensitive material layer 132 and the second electrode lay 133 being stacked, wherein first electrode layer 131 be several transparent electrodes being intervally arranged, and photosensitive material layer 132 includes covering first electrode layer 131 and first electrode layer 131 Between gap light-sensitive material, first electrode layer 131 is electrically connected with optical signal processor 14, and the second electrode lay 133 is reflection Electrode, the second electrode lay 132 form measure loop with optical signal processor 14 as the public electrode of first electrode layer 131 and are used for Collect photo-signal.
Specifically, substrate 11 among the above can be glass substrate or flexible base board, and glass substrate and flexible base board are distinguished It is the substrate 11 made of two kinds of different translucent materials, is generally available to prepare organic electroluminescence device (OLED device), Substrate 11 in Fig. 4 is flexible base board.Linear bandpass filter (linear variable filter, LVF) 12, can be from compound The monochromatic light of a certain wave band is isolated in light, and the linear bandpass filter 12 in the present embodiment is its each different spaces position The bandwidth region of different light transmission passages can be corresponded to by setting, and have the function of light splitting, such as:As shown in Fig. 2, No. 1 Regional Representative purple Light, wave-length coverage 380nm-470nm, No. 2 Regional Representative's blue lights, wave-length coverage 470nm-505nm, No. 3 regions Represent green light, wave-length coverage 505nm-530nm, No. 4 Regional Representative's sodium yellows, wave-length coverage 530nm-610nm, No. 5 Regional Representative's orange-colored lights, wave-length coverage 610nm-640nm, No. 6 Regional Representative's red lights, wave-length coverage are 640nm-780nm.Therefore wave-length coverage is known as visible light in the monochromatic light of 380nm-780nm, respectively by it is red, orange, yellow, green, green, The spectrum of blue, purple seven kinds of colors composition.12 its each different spatial of linear bandpass filter can correspond in the present embodiment The bandwidth region of different light transmission passages not merely only represents the wave-length coverage that every number region is transmitted in Fig. 2 certainly, adjacent Bandwidth region can be set as 10nm or smaller through the difference of wavelength.Spectral detection component not only can be in the present embodiment The visible light for detecting red, orange, yellow, green, blue, blue, purple, can also detect sightless ultraviolet light and infrared light, therefore linear band logical Optical filter 12 is typically used in miniature spectrometer and imaging spectrometer, average saturating in passband frequently with linear variable filter It penetrates rate and is more than 60%, average transmittance is less than 0.1% outside channel, base panel length 10mm;Linear bandpass filter in the present embodiment Piece 12 is exactly to apply in spectrometer.Linear bandpass filter 12 in the present embodiment is arranged in the side of substrate 11, herein Side can be expressed as the front of substrate 11, can also be the reverse side of substrate 11.Linear bandpass filter 12 is arranged in substrate 11 Side, and the same side that photoelectric detector 13 is also disposed at substrate 11 is contacted with the bottom of linear bandpass filter 12.If Linear bandpass filter 12 is arranged in the front of substrate 11, then photoelectric detector 13 is also just arranged in the front of substrate 11.Photoelectricity Include several euphotic electrodes in 131 first electrode layer 131 of first electrode layer in detector 13, therefore first electrode can be ITO electrode or IZO electrodes, each first electrode are arranged setting one by one according to same intervals, and the shape of each first electrode For strip, the width and spacing of first electrode can be adjusted according to the characteristic of linear bandpass filter 12, and the typical case of the two is wide Range is spent in 0.1 μ nm between 1mm, the shape of first electrode is not limited to strip, can also be other shapes, and each first Electrode corresponds respectively to the bandwidth channel that each region is arranged on substrate 11, and then each first electrode is that euphotic electrode can It is collected simultaneously different photo-signals.Photosensitive material layer 132 in photoelectric detector 13 is by organic photosensitive material or quantum One or more of compositions in point or perovskite light-sensitive material or inorganic light-sensitive material, in Fig. 4 it can be seen that photosensitive material layer 132 Including the light-sensitive material being covered in the gap between first electrode layer 131 and first electrode layer 131, photosensitive material layer 132 is wrapped The photoactive substance with light-sensitive material is included, therefore it absorbs the difference by the transmission of linear bandpass filter 12 with photosensitization The monochromatic light of wavelength, the monochromatic optical signal of difference for transmiting linear bandpass filter 12 are changed into electric signal.At optical signal Reason device 14 is electrically connected with first electrode layer 131 forms measure loop with the second electrode lay 132, and the second electrode lay 133 is used as first The public electrode of several first electrodes and 131 collected both photo-signal of first electrode layer in electrode layer 131.The second electrode lay The photo-signal that its first electrode is collected is reflected to photosensitive material layer 132 so that photosensitive material layer 132 absorbs more by 133 Monochromatic light, and then improve luminous efficiency.The second electrode lay 133 is used as reflecting electrode, therefore the second electrode lay 133 is Ag, and Al etc. is anti- The high metal electrode of rate is penetrated to be made.Optical signal processor 14 herein is equivalent to optical signal and reads chip, by detected different waves The spectrum of long monochromatic optical signal is read out, and certain optical signal processor 14 can also utilize logic circuit or computer to distinguish Carry out digital independent.First electrode layer 131 is with the second electrode lay 133 respectively as the anode and cathode of photoelectric detector 13, light Signal is radiated at through first electrode layer 131 in photosensitive material layer 132, and photosensitive material layer 132 will generate photoelectric current, photoelectric current quilt First electrode layer 131 and the second electrode lay 133 are collected, and are finally flowed through optical signal processor 14 and are constituted complete light detection circuit. By spectral detection component in this present embodiment based on substrate 11, substrate 11 has good light transmittance, thus its thickness It is smaller, compared with to save space, and linear bandpass filter 12 and photoelectric detector 13 are separately positioned on the same side of substrate 11, Setting is more close, therefore further saves many spaces.Substrate 11, linear bandpass filter 12 and photoelectric detector 13, It is equivalent on the same side for being integrally disposed in substrate 11, and it is the integrally disposed first electrode layer 131 of photoelectric detector 13, photosensitive Material layer 132 and the second electrode lay 133, they are in close contact respectively can largely save much room, therefore this reality Applying the overall volume of the spectral detection component in example can be effectively reduced, therefore reduce its whole occupied space.
Embodiment 4
The embodiment of the present invention provides a kind of preparation method of spectral detection component, as shown in figure 5, including the following steps:
S51, a substrate is prepared.Substrate herein is generally made of translucent material, is used as transmitted light and prepares spectrum Detection components prepare substrate.
S52, linear bandpass filter is prepared in the side of substrate.Pass through high temperature here with chemical vapor deposition (CVD) Gas phase reaction occurs to carry out preparing linear bandpass filter in side, that is, front or back of substrate, in linear bandpass filter Several regions are set, and each region can transmit the monochromatic light of different wave length respectively, and linear bandpass filter (LVF) is working When, LVF plays the role of space light splitting.Linear bandpass filter its small volume prepared in a substrate using technique, and Technique is quite fine, therefore linear bandpass filter looks very exquisite.
S53, photoelectric detector is prepared in the other side of substrate;Alternatively, in the same side of substrate and linear bandpass filter Base contact surface on prepare photoelectric detector.
It is above-mentioned to prepare photoelectric detector in the other side of substrate and include the following steps:
The first step prepares first electrode layer, and first electrode layer includes several transparent electrodes being intervally arranged.If it is in base Linear bandpass filter is prepared in the first side (front) of plate, then prepares photoelectric detector in the second side of substrate (reverse side), And the first electrode layer for preparing photoelectric detector forms strip pattern, each strip pattern difference by etching technics on substrate Each different zones of corresponding linear bandpass filter, therefore it can collect the monochromatic light of linear bandpass filter different range wavelength Corresponding photo-signal, several first electrodes are euphotic electrode, and euphotic electrode is ITO electrode or IZO electrodes, as conductive Anode has high transmitance to light.
Second step prepares light-sensitive material in the light-sensitive material for covering the gap between first electrode layer and first electrode layer Layer.In the first electrode layer etched, pass through wet method or vapor deposition between the gap between covering first electrode and first electrode Mode prepares photosensitive material layer, and photosensitive material layer herein is by organic photosensitive material or quantum dot or perovskite light-sensitive material or nothing One or both of machine light-sensitive material forms.The photosensitive material layer of preparation includes the photoactive substance for having light-sensitive material, therefore its With photosensitization, luminance signal can be converted to electric signal.
Third walks, and the second electrode lay is deposited in photosensitive material layer.The second electrode lay is as first electrode layer several The public electrode of one electrode, the photoelectric current with the conversion of first electrode layer collected both photosensitive material layer, then reflects photoelectric current To photosensitive material layer so that photosensitive material layer absorbs more monochromatic optical signals.Optical signal processor among the above is optical reading Chip has multiple feelers, can by welding be attached first electrode and optical signal processor, at optical signal Reason device can read the monochromatic spectral value of difference of first electrode reception.
It is above-mentioned to prepare photoelectric detector also on base contact surface of the same side of substrate with linear bandpass filter and include Following steps:
The first step prepares first electrode layer, and first electrode layer includes several transparent electrodes being intervally arranged.If it is in base Linear bandpass filter is prepared in the first side (front) of plate, then prepares photoelectric detector in the same side of substrate (front), And the first electrode layer for preparing photoelectric detector forms strip pattern, each strip pattern difference by etching technics on substrate Each different zones of corresponding linear bandpass filter, therefore it can collect the monochromatic light of linear bandpass filter different range wavelength Corresponding photo-signal, several first electrodes are euphotic electrode, and euphotic electrode is ITO electrode or IZO electrodes, as conductive Anode has high transmitance to light.
Second step prepares light-sensitive material in the light-sensitive material for covering the gap between first electrode layer and first electrode layer Layer.In the first electrode layer etched, pass through wet method or vapor deposition between the gap between covering first electrode and first electrode Mode prepares photosensitive material layer, and photosensitive material layer herein is by organic photosensitive material or quantum dot or perovskite light-sensitive material or nothing One or both of machine light-sensitive material forms.The photosensitive material layer of preparation includes the photoactive substance for having light-sensitive material, therefore its With photosensitization, luminance signal can be converted to electric signal.
Third walks, and the second electrode lay is deposited in photosensitive material layer.The second electrode lay is as first electrode layer several The public electrode of one electrode, the photoelectric current with the conversion of first electrode layer collected both photosensitive material layer, then reflects photoelectric current To photosensitive material layer so that photosensitive material layer absorbs more monochromatic optical signals.Optical signal processor among the above is optical reading Chip has multiple feelers, can by welding be attached first electrode and optical signal processor, at optical signal Reason device can read the monochromatic spectral value of difference of first electrode reception.
The preparation method of spectral detection component in the embodiment of the present invention, as shown in figure 3, in the same side of substrate and linearly Photoelectric detector is prepared on the base contact surface of bandpass filter makes linear bandpass filter be located at substrate and photoelectric detector Between.
The preparation method of spectral detection component in the embodiment of the present invention, as shown in figure 4, in the same side of substrate and linearly Photoelectric detector is prepared on the base contact surface of bandpass filter makes photoelectric detector be located at linear bandpass filter and substrate Between.
Embodiment 5
The embodiment of the present invention provides a kind of spectrometer, including the spectral detection in embodiment 1 or embodiment 2 or embodiment 3 Component.Spectrometer in the present embodiment is made of spectral detection component, since spectral detection component is based on the basis of substrate 11 On be prepared, by substrate 11, linear bandpass filter 12, photoelectric detector 13 and photoelectric detector 13 include first electricity Pole layer 131,133 concentrated setting of photosensitive material layer 132 and the second electrode lay, technique small and exquisite exquisiteness are largely reduced Whole volume and weight, therefore carried convenient for user, the spectrometer in the present embodiment are not necessarily to compared with utilizing light in technology Grid, photosensitive element and optical system are constituted, therefore spectrometer volume in the prior art is excessively huge, largely occupies phase When big space, and but also the weight of spectrometer further increases, and the spectrometer in the present embodiment is by being prepared Spectral detection component, structure is not only more exquisite, but also is carried convenient for user.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or It changes still within the protection scope of the invention.

Claims (10)

1. a kind of spectral detection component, which is characterized in that the spectral detection component includes substrate, linear bandpass filter and light Photodetector, and three is arranged in the way of being laminated and arranging;Wherein, the photoelectric detector is filtered for detecting by linear band logical The monochromatic light of mating plate transmission, and send out signal.
2. spectral detection component according to claim 1, which is characterized in that the substrate is transparent substrate.
3. spectral detection component according to claim 2, which is characterized in that the substrate is located at the linear bandpass filter Between piece and the photoelectric detector.
4. spectral detection component according to claim 2, which is characterized in that the substrate stacking is set to the linear tape On pass filter.
5. spectral detection component according to claim 1, which is characterized in that the substrate is flexible base board and is set to institute It states below photoelectric detector.
6. spectral detection component according to claim 1, which is characterized in that the photoelectric detector includes being stacked First electrode layer, photosensitive material layer and the second electrode lay.
7. spectral detection component according to claim 6, which is characterized in that the first electrode layer is several is intervally arranged Transparent electrode, the second electrode lay be reflecting electrode.
8. spectral detection component according to claim 6, which is characterized in that the photosensitive material layer includes organic photosensitive material One or more are made in material and quantum dot and perovskite light-sensitive material and inorganic light-sensitive material.
9. a kind of preparation method of spectral detection component, which is characterized in that include the following steps:
One substrate is provided;
Linear bandpass filter is prepared in the side of the substrate;
Photoelectric detector is prepared in the other side of the substrate, alternatively, the photoelectric detector is formed in the substrate and described Between linear bandpass filter, alternatively, the photoelectric detector is formed on the linear bandpass filter.
10. the preparation method of spectral detection component according to claim 9, which is characterized in that the preparation Photoelectric Detection Device is made by the steps:
First electrode layer is prepared, the first electrode layer includes several transparent electrodes being intervally arranged;
Photosensitive material layer is prepared in the light-sensitive material for covering the gap between the first electrode layer and the first electrode layer;
The second electrode lay is deposited in the photosensitive material layer.
CN201810097073.5A 2018-01-31 2018-01-31 Spectral detection component and preparation method thereof, spectrometer Pending CN108458785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810097073.5A CN108458785A (en) 2018-01-31 2018-01-31 Spectral detection component and preparation method thereof, spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810097073.5A CN108458785A (en) 2018-01-31 2018-01-31 Spectral detection component and preparation method thereof, spectrometer

Publications (1)

Publication Number Publication Date
CN108458785A true CN108458785A (en) 2018-08-28

Family

ID=63239197

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810097073.5A Pending CN108458785A (en) 2018-01-31 2018-01-31 Spectral detection component and preparation method thereof, spectrometer

Country Status (1)

Country Link
CN (1) CN108458785A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020194146A1 (en) * 2019-03-26 2020-10-01 3M Innovative Properties Company Sensor array spectrometer
WO2021128646A1 (en) * 2019-12-24 2021-07-01 北京理工大学 Spectrally-resolved detection assembly and manufacturing method

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101350893A (en) * 2007-07-19 2009-01-21 鸿富锦精密工业(深圳)有限公司 Image Sensor and Camera Module
CN102148281A (en) * 2010-02-05 2011-08-10 中国科学院物理研究所 Ultraviolet light detector with fast response, high sensitivity and low noise
CN102498374A (en) * 2009-08-25 2012-06-13 Nec软件系统科技有限公司 Optical unit
US20130258332A1 (en) * 2010-11-22 2013-10-03 Yokogawa Electric Corporation Microscope spectrometer, optical axis shift correction device, spectroscope and microscope using same
CN103968949A (en) * 2013-02-04 2014-08-06 清华大学 Polarized light detecting system
CN103968948A (en) * 2013-02-04 2014-08-06 清华大学 Polarized light detection method
CN104155268A (en) * 2014-06-06 2014-11-19 桂林电子科技大学 Portable ammonium nitrogen fluorescence detector
CN104797911A (en) * 2012-11-13 2015-07-22 Jds尤尼弗思公司 Portable spectrometer
CN106506929A (en) * 2016-12-23 2017-03-15 维沃移动通信有限公司 A camera module and mobile terminal
CN107546319A (en) * 2017-08-28 2018-01-05 电子科技大学 A kind of pyroelectric infrared detector and preparation method thereof

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101350893A (en) * 2007-07-19 2009-01-21 鸿富锦精密工业(深圳)有限公司 Image Sensor and Camera Module
CN102498374A (en) * 2009-08-25 2012-06-13 Nec软件系统科技有限公司 Optical unit
CN102148281A (en) * 2010-02-05 2011-08-10 中国科学院物理研究所 Ultraviolet light detector with fast response, high sensitivity and low noise
US20130258332A1 (en) * 2010-11-22 2013-10-03 Yokogawa Electric Corporation Microscope spectrometer, optical axis shift correction device, spectroscope and microscope using same
CN104797911A (en) * 2012-11-13 2015-07-22 Jds尤尼弗思公司 Portable spectrometer
CN103968949A (en) * 2013-02-04 2014-08-06 清华大学 Polarized light detecting system
CN103968948A (en) * 2013-02-04 2014-08-06 清华大学 Polarized light detection method
CN104155268A (en) * 2014-06-06 2014-11-19 桂林电子科技大学 Portable ammonium nitrogen fluorescence detector
CN106506929A (en) * 2016-12-23 2017-03-15 维沃移动通信有限公司 A camera module and mobile terminal
CN107546319A (en) * 2017-08-28 2018-01-05 电子科技大学 A kind of pyroelectric infrared detector and preparation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020194146A1 (en) * 2019-03-26 2020-10-01 3M Innovative Properties Company Sensor array spectrometer
CN113614587A (en) * 2019-03-26 2021-11-05 3M创新有限公司 Sensor array spectrometer
US20220178749A1 (en) * 2019-03-26 2022-06-09 3M Innovative Properties Company Sensor array spectrometer
CN113614587B (en) * 2019-03-26 2023-12-29 3M创新有限公司 Sensor array spectrometer
US12066329B2 (en) 2019-03-26 2024-08-20 3M Innovative Properties Company Sensor array spectrometer
WO2021128646A1 (en) * 2019-12-24 2021-07-01 北京理工大学 Spectrally-resolved detection assembly and manufacturing method

Similar Documents

Publication Publication Date Title
JP7086239B2 (en) Variable optical filter and wavelength-selective sensor based on it
Yang et al. Ultraviolet and near‐infrared dual‐band selective‐harvesting transparent luminescent solar concentrators
KR101300411B1 (en) Multi-spectrum photosensitive device and manufacturing method thereof
CN206400202U (en) Optical module
CN106941779A (en) Integrated constraint mode spectrum/angular transducer
CN102804005A (en) Interference Filters With High Transmission And Large Rejection Range For Mini-spectrometer
CN208314806U (en) imaging device
CN108458785A (en) Spectral detection component and preparation method thereof, spectrometer
US20120187513A1 (en) Light sensor having ir cut and color pass interference filter integrated on-chip
CN212624089U (en) Fingerprint Sensing System
JP2008522418A (en) Multi-color high sensitivity device for color image detection
US20240047494A1 (en) Micro spectrum chip based on units of random shapes
CN109887944A (en) All-day imaging detector with multifunctional window and preparation method thereof
CN111564483A (en) Display device
US20170102323A1 (en) Bolometer with high spectral sensitivity
US20170241836A1 (en) Apparatus for spectrometrically capturing light with a photodiode which is monolithically integrated in the layer structure of a wavelength-selective filter
WO2021001182A1 (en) Meta-surface photodetector
CN112840187B (en) Multispectral imaging sensor with crosstalk limiting device
CN104236714B (en) A kind of spectrum sensor of detection of a target band strength
US10446112B2 (en) Electronic devices having light sensors with thin-film filters
CN109411504A (en) OLED screen body and optical fingerprint identification device as fingerprint identification device light source
JP2018528438A (en) Optical sensor with narrow angle response
CN110687068B (en) An infrared detector and infrared gas sensor
JPH0433147B2 (en)
CN208908222U (en) A kind of LED encapsulation structure

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20180828

RJ01 Rejection of invention patent application after publication