CN108447593A - The patterned preparation method and applications of metal micro-nano material transparent conductive film - Google Patents

The patterned preparation method and applications of metal micro-nano material transparent conductive film Download PDF

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Publication number
CN108447593A
CN108447593A CN201810184783.1A CN201810184783A CN108447593A CN 108447593 A CN108447593 A CN 108447593A CN 201810184783 A CN201810184783 A CN 201810184783A CN 108447593 A CN108447593 A CN 108447593A
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nano material
metal micro
conductive film
transparent conductive
nano
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CN108447593B (en
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邱业君
陈亚男
张立文
闫勇
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Suzhou City-State Dali Material Technology Co Ltd
Shenzhen Graduate School Harbin Institute of Technology
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Suzhou City-State Dali Material Technology Co Ltd
Shenzhen Graduate School Harbin Institute of Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0016Apparatus or processes specially adapted for manufacturing conductors or cables for heat treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

The present invention provides a kind of patterned preparation method and applications of metal micro-nano material transparent conductive film, is related to the preparation field of metal micro-nano material transparent conductive film.Polar solvent containing metal micro-nano material is specifically coated on flexible membrane by the preparation method, after dry hydrophily processing, using with the polar solvent drafting arbitrary graphic pattern for having certain viscosity with flexible membrane, the most microwave treatment afterwards through 0.3GHz 300GHz.Applied microwave interacts with the polar molecule on metal micro-nano material and causes heating effect, and then realizes and heat metal micro-nano material up to fusing, and effectively improves the performance of metal micro-nano material transparent conductive film.The preparation method is not necessarily to additional printing coating procedure, and required preparation processing time is short is efficient, it can be achieved that large-scale continuous production, is suitble to industrialized production.

Description

The patterned preparation method and applications of metal micro-nano material transparent conductive film
Technical field
The present invention relates to the preparation fields of metal micro-nano material transparent conductive film, and more particularly to a kind of metal micro-nano The rice patterned preparation method and applications of material transparent conductive film.
Background technology
In today of information age, the too busy to get away miscellaneous electronic device of our daily life, and with height The transparent conductive film (TCF) of electric conductivity and the high grade of transparency is most important for the performance of various electronic devices.Such as it is touch screen, flat The electronic devices such as plate TV, electronic reader, smart mobile phone, intelligent glass, organic solar batteries and liquid crystal display, all from Do not open transparent conductive material.In all transparent conductive materials, tin indium oxide (ITO) be it is most common in Current electronic industry, ITO is due to the frangible and brittleness of itself, in flexible display, flexible touch screen, flexible solar battery, flexible transistor It all cannot be satisfied the application requirement of these devices with fields such as flexible super capacitors.
More and more people, which start further investigation, can replace ITO novel transparent conductive materials, such as metal micro-nano material Expect transparent conductive film, carbon nanotube (CNT), graphene and conducting polymer etc..Metal Nano structure is due to its unique light Electrical property and potential application in transparent conductive film and great concern is caused in 10 years.And in various metal nanometer lines In, due to the good electric conductivity of metallic silver, nano silver wire (AgNWs) transparent conductive film has excellent light transmission rate, and conductive Performance, before all being had a wide range of applications in the fields such as solar cell, transparent heater part, flexible touch screen, Flexible Displays Scape.
Wherein, nano silver wire transparent conductive film patterning is the last important ring for being successfully applied to every field Section.With the development of modern science and technology, it is wide that the micro Process or patterning of micron and nanoscale surface have caused people General concern.The chance of many modern technologies development all derive from new microstructures Successful construct or existing structure it is small-sized Change.Surface patterning technique is in microelectronic industry, chemistry and biological substance microanalysis, biochip, micro-volume reactor, combination The applying for fields such as synthesis and MEMS increases promptly.Transparent conductive film in optoelectronic devices, as touch screen, The application value of liquid crystal display, light emitting diode and solar cell etc. becomes " star " in numerous materials.
The mode of existing transparent conductive film surface etch pattern mainly has silk-screen printing, nano impression, plasma to carve Erosion and laser ablation etc., but process above is more complicated, it is desirable that it is high, it is of high cost and not environmentally.Therefore present invention is generally directed to silver Nano wire transparent conductive film does example and illustrates to study, but metal micro-nano material is not limited to nano silver wire.
Invention content
The purpose of the present invention is to provide a kind of microwaves to be used in metal micro-nano material transparent conductive film patterning The application for changing metal micro-nano material electrical circuit, is handled metal micro-nano material using microwave, and it is micro- to change metal Nano material electrical circuit.
Another object of the present invention is to provide a kind of patterned preparation sides of metal micro-nano material transparent conductive film Method causes heating effect with interacting in the polar molecule on metal micro-nano material by microwave, and then realizes to gold Belong to micro Nano material heating until fusing, effectively improves the performance of nano silver wire transparent conductive film.Simultaneously the preparation method without Need additional printing coating procedure, required preparation processing time is short efficient, it can be achieved that large-scale continuous production, is suitble to work Industry metaplasia is produced.
The present invention solves its technical problem using following technical scheme to realize.
The present invention proposes that a kind of microwave is micro- for changing metal in metal micro-nano material transparent conductive film patterning The application of nano material electrical circuit.
The present invention proposes a kind of patterned preparation method of metal micro-nano material transparent conductive film, and it is micro- will to contain metal The polar solvent of nano material is coated on the surface of flexible membrane and it is saturating to obtain modified metal micro Nano material after dry hydrophily processing Bright conductive film.
Using having, sticking polar solvent is arbitrary in the surface rendering of modified metal micro Nano material transparent conductive film After pattern, the microwave treatment through 0.3GHz-300GHz.
Wherein, it is to be with the angle of wetting of modified metal micro Nano material transparent conductive film to have sticking polar solvent 10 ° -50 ° of polar solvent controls angle of wetting by having the different viscosities of sticking polar solvent, and then adjusts pattern center line Thickness and pattern size.
Preferably, metal micro-nano material is Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga Or at least one of the nano wire of its alloy or its metal oxide, micro wire, nanotube and micron tube.
It is highly preferred that metal micro-nano material be Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga or the nano wire of its alloy or its metal oxide, micro wire, nanotube or micron tube.
Patterned preparation method and applications of metal micro-nano material transparent conductive film in the embodiment of the present invention Advantageous effect is:
Wave thermal effect should indicate that the pace of change of microwave oven intracavitary electromagnetic field is up to 24.5 hundred million times per second, acts on film The polar molecule on surface is allowed to 24.5 hundred million times/second that swing back and forth, and is generated because the wheel of high speed between polar molecule puts fricting movement High fever, to achieve the purpose that heating.With thering is the polar solvent of certain viscosity being coated with metal micro-nano material with film The surface of transparent conductive film form the pattern of arbitrary shape size, wherein polar molecule driven by electromagnetic wave, and each second turns Twenties00000000 circles, the rotation and friction of high frequency, temperature drastically increases in the short time, and metal micro-nano material can't stand high temperature because resistance to With regard to fusing, to form target pattern on metal micro-nano material transparent conductive film.
Meanwhile using microwave metal micro-nano material transparent conductive film patterning in for changing metal micro-nano material Expect that electrical circuit, the accuracy of the pattern of finally obtained metal micro-nano material-nano silver wire transparent conductive film are up to 40um or more.
And there is better electric conductivity through metal micro-nano material transparent conductive film produced by the present invention, by The independent response of microwave and metal micro-nano storeroom and the contact performance for improving junction between nano wire, can effectively reduce and connect Get an electric shock resistance, and then reduction film sheet resistance values.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the preparation principle schematic diagram that the present invention makes metal micro-nano material-flexible transparent conductive film matrix;
Fig. 2 is the flow chart of metal micro-nano material-patterned preparation method of nano silver wire transparent conductive film;
Fig. 3 is the surface SEM figures for showing metal micro-nano material-nano silver wire transparent conductive film obtained in embodiment 1;
Fig. 4 is the table for showing metal micro-nano material-nano silver wire transparent conductive film after microwave treatment in embodiment 1 Face SEM schemes;
Fig. 5 (a) is the angle of wetting schematic diagram for the polar solvent that embodiment 2 provides;
Fig. 5 (b) is the SEM for pattern metal micro Nano material-nano silver wire transparent conductive film that embodiment 2 provides Figure;
Fig. 6 (a) is the angle of wetting schematic diagram for the polar solvent that embodiment 3 provides;
Fig. 6 (b) is the SEM for pattern metal micro Nano material-nano silver wire transparent conductive film that embodiment 3 provides Figure;
Fig. 7 is the SEM figures for pattern metal micro Nano material-nano silver wire transparent conductive film that embodiment 4 provides;
Fig. 8 is the SEM figures for pattern metal micro Nano material-nano silver wire transparent conductive film that embodiment 5 provides;
Fig. 9 is the SEM figures for pattern metal micro Nano material-nano silver wire transparent conductive film that embodiment 6 provides.
Specific implementation mode
It in order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below will be in the embodiment of the present invention Technical solution be clearly and completely described.The person that is not specified actual conditions in embodiment, builds according to normal condition or manufacturer The condition of view carries out.Reagents or instruments used without specified manufacturer is the conventional production that can be obtained by commercially available purchase Product.
It to the patterned preparation method of metal micro-nano material transparent conductive film of the embodiment of the present invention and its answers below With being specifically described.
The present invention provides microwave in metal micro-nano material transparent conductive film patterning for changing metal micro-nano The application of material electrical circuit.
Specifically, metal micro-nano material is Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga Or at least one of the nano wire of its alloy or its metal oxide, micro wire, nanotube and micron tube, preferably, metal Micro Nano material is Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga or its alloy or its metal oxygen Nano wire, micro wire, nanotube or the micron tube of compound.Wherein, it should be noted that in the present invention, alloy or its metal Its in oxide refers to metal Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In or Ga.
Since silver has excellent electric conductivity, it is preferable that in preferred embodiments of the present invention, metal micro-nano material is Nano wire, micro wire, nanotube or the micron tube of silver, silver alloy or silver oxide, it is highly preferred that metal micro-nano material is received for silver Rice noodles, with good electric conductivity, while nano silver wire transparent conductive film has excellent light transmission rate and electric conductivity.
Specifically, microwave metal micro-nano material transparent conductive film patterning in for changing metal micro-nano material Being carried out in application, the patterned preparation method of metal micro-nano material transparent conductive film for example can be used for electrical circuit, needs To illustrate that microwave metal micro-nano material transparent conductive film patterning in for changing metal micro-nano material electricity Remaining method in addition to preparation method provided by the invention also can be used when the application of circuit.
Specifically, the polar solvent containing metal micro-nano material is coated on to the surface of flexible membrane, is dried at hydrophily After reason, modified metal micro Nano material transparent conductive film is obtained;Using having, sticking polar solvent is micro-nano in modified metal After the surface rendering arbitrary graphic pattern of material transparent conductive film, the microwave treatment through 0.3GHz-300GHz;Wherein, there is viscosity Polar solvent be 10 ° -50 ° with the angle of wetting of modified metal micro Nano material transparent conductive film polar solvent, pass through Have the different viscosities control angle of wetting of sticking polar solvent, and then adjust the thickness of pattern center line and the size of pattern, The metal micro-nano material of corresponding position, such as nano silver wire are fused by the interaction between microwave and polar solvent, To form specific pattern.The preparation method is not necessarily to additional printing coating procedure, required preparation processing time is short, efficiency Height is suitble to industrialized production, it can be achieved that large-scale continuous production.
Specifically, it the present invention also provides a kind of patterned preparation method of metal micro-nano material transparent conductive film, asks Referring to Fig.2, it includes:
S1., polar solvent containing metal micro-nano material is coated on to the surface of flexible membrane, after dry hydrophily processing, Obtain modified nano silver wire transparent conductive film.
Wherein, optionally, metal micro-nano material be Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, At least one of In, Ga or the nano wire of its alloy or its metal oxide, micro wire, nanotube and micron tube, preferably, Metal micro-nano material is Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga or its alloy or its gold Belong to nano wire, micro wire, nanotube or the micron tube of oxide.Due to silver have excellent electric conductivity, it is preferable that the present invention compared with In good embodiment, metal micro-nano material is nano wire, micro wire, nanotube or the micron tube of silver, silver alloy or silver oxide, It is highly preferred that metal micro-nano material is nano silver wire, with good electric conductivity, while nano silver wire transparent conductive film has Excellent light transmission rate and electric conductivity.
Wherein, optionally, metal micro-nano material can be prepared voluntarily, can also market purchase, by metal micro-nano material After material is prepared as finely dispersed metal micro-nano material suspension, preferably by metal micro-nano material centrifugation-ultrasonic disperse Technique clean after, be scattered in polar solvent, convenient for follow-up coating, while effectivelying prevent the interference of impurity.
Wherein, the solvent of the polar solvent containing metal micro-nano material herein can be formamide, trifluoroacetic acid, six Methyl phosphamide, methanol, ethyl alcohol, acetic acid, isopropanol, pyridine, tetramethylethylenediamine, acetone, formamide, trifluoroacetic acid, oil Ether or ethyl acetate etc. do not do specific restriction herein.
Polar solvent containing metal micro-nano material is coated on to the surface of flexible membrane, wherein the mode of coating can be with For czochralski method, or rubbing method ensures that the polar solvent containing metal micro-nano material is uniformly coated on flexible membrane Surface.The concrete mode of coating can refer to the prior art.This field staff can determine according to actual demand and be coated with Metal micro-nano material polar solvent thickness.
In preferred embodiments of the present invention, flexible membrane is flexible plastic film, it is preferable that flexible membrane be selected from polyester film, Polyvinyl alcohol film or Kapton.Referring to Fig. 1, flexible membrane is laid in bottom plate using scraper, it is convenient for subsequent operation.
Drying includes naturally dry, drying, nitrogen drying etc..It is dry preferably in drum in preferred embodiments of the present invention It is dry in wind drying box.
The surface of the flexible membrane for being coated with the polar solvent containing metal micro-nano material after drying is carried out hydrophilic Property processing, optionally, hydrophily processing includes UV ozone processing, coats hydrophilic nano SO2, plasma cause polyethylene Film is grafted the methods of acrylic acid, coating surfactant or the modification of low temperature atomsphere plasma surface.
S2. the surface rendering using the sticking polar solvent of tool in modified metal micro Nano material transparent conductive film is appointed After intention case, the microwave treatment through 0.3GHz-300GHz obtains the metal micro-nano material transparent conductive thin with target pattern Film.
It that is to say, be used as " ink " in modified metal micro Nano material transparent conductive film by having sticking polar solvent Surface draw the pattern of arbitrary shape and size.
Specifically, it is to have certain glue with modified metal micro Nano material transparent conductive film to have sticking polar solvent Property polar solvent, the angle of wetting of sticking polar solvent and modified metal micro Nano material transparent conductive film is 10 °- 50 °, angle of wetting is controlled by the polar solvents of different viscosities, so adjust target pattern center line thickness and pattern it is big It is small.
Preferably, with modified metal micro Nano material transparent conductive film with the polar solvent packet for having certain viscosity Include water, methanol, ethyl alcohol, isopropanol, normal propyl alcohol, n-butanol, sec-butyl alcohol, ethylene glycol, propylene glycol, glycerine, acetic acid, acetic acid second Ester, propyl acetate, butyl acetate, acetone, butanone, toluene, dimethylbenzene, tetrahydrofuran, N,N-dimethylformamide, formic acid, vinegar Acid, propionic acid, butyric acid, valeric acid, acid, succinic acid, glutaric acid, hexanedioic acid, succinic acid diisobutyl ester, glutaric acid diisobutyl ester and At least one of hexanedioic acid diisobutyl ester.
Due to controlling angle of wetting by having the different viscosities of sticking polar solvent, and then adjust the thickness of pattern center line And the size of pattern, therefore in preferred embodiments of the present invention, it further includes for changing viscosity to have sticking polar solvent Auxiliary agent, the viscosity for have sticking polar solvent is changed by the addition of auxiliary agent, and then control angle of wetting, in adjusting pattern The thickness of line and the size of pattern.
Optionally, auxiliary agent includes PVP, methylcellulose, hydroxypropyl methyl cellulose, sodium carboxymethylcellulose, vinyl Triethoxysilane, vinyltrimethoxysilane, vinyl three (β alkene methoxy ethoxy) silane, γ propyls Oxysilane, aminopropyl triethoxysilane, 3- aminopropyl trimethoxysilanes, 3- glycydoxy trimethoxies Silane, γ trimethacrylate acyloxy propyl trimethoxy silicane, tri- mercaptopropyltriethoxysilanes of γ, N- β-aminoethyl-γ- At least one in aminopropyltriethoxy dimethoxysilane, zirconate, titanate esters, aluminium zirconate, Aluminate and rare-earth coupling agent Kind.
In preferred embodiments of the present invention, the modified metal micro Nano material transparent conductive film after arbitrary graphic pattern is drawn, Such as in microwave radiation reactor, the microwave treatment through 0.3GHz-300GHz.
Preferably, the condition of microwave treatment is:1us-100s is handled under conditions of microwave power is 1mW-200W.
It is highly preferred that the condition of microwave treatment is:1-50s is handled under conditions of microwave power is 5-100W.
It holds, wave thermal effect should indicate that, the pace of change of microwave oven intracavitary electromagnetic field is up to 24.5 hundred million times per second, is acted on The polar molecule of film surface is allowed to 24.5 hundred million times/second that swing back and forth, due to the wheel of high speed between polar molecule puts fricting movement High fever is generated, to achieve the purpose that heating.With having certain viscosity with modified metal micro Nano material transparent conductive film Polar solvent forms the pattern of arbitrary shape, wherein polarity point on the surface of modified metal micro-nano material transparent conductive film Son is driven by electromagnetic wave, turns twenties00000000 circles each second, the rotation and friction of high frequency, temperature drastically increases in the short time, Yin Na Rice noodles can't stand that high temperature just fuses because resistance to, to form target pattern on metal micro-nano material transparent conductive film.
Meanwhile using microwave in metal micro-nano material-nano silver wire transparent conductive film patterning for changing gold Belong to micro Nano material-nano silver wire electrical circuit, finally obtained metal micro-nano material-nano silver wire transparent conductive film The accuracy of pattern is up to 40um or more.
And there is better electric conductivity through metal micro-nano transparent conductive film produced by the present invention, by microwave Independent response with metal micro-nano storeroom and the contact performance for improving metal micro-nano storeroom junction, can effectively drop Low contact resistance, and then reduce film sheet resistance values.
The feature and performance of the present invention are described in further detail with reference to embodiments.
It should be noted that in following embodiment provided by the invention, metal micro-nano material-nano silver wire electrically conducting transparent The resistance of film is measured by four-point probe SDZ-SZT-2A, and resistance finds out the number mean value of measured value;The surface of conductive film And the pattern made is shown by scanning electron microscope HITACHIS-4700.
Embodiment 1
Metal micro-nano material-nano silver wire transparent conductive film matrix, is made by following methods:
(1) polyhydric alcohol solutions for configuring certain molecular weight PVP first are placed on heating and magnetic agitation in water-bath, make it It is completely dissolved, is cooled to room temperature.Configure AgNO3Polyhydric alcohol solutions, be placed on magnetic stirring apparatus and make it completely dissolved.Match simultaneously Certain density NaCl solution is set, is made it completely dissolved.When the mixing of solution, it should be noted that the sequence of charging:To centainly it divide first The polyhydric alcohol solutions and AgNO of son amount PVP3Polyhydric alcohol solutions mixing, stirred evenly with glass bar, be then added at normal temperatures A certain amount of NaCl solution, stirs evenly.
Uniformly mixed solution is transferred in reactor, prepares nano silver wire using the hot method of alcohol, it is preferred that obturator System, can block the oxygen in air.Closed container can generally select the memory prepared by heat safe polytetrafluoroethylene material And the stainless steel cauldron of periphery.What it is to reaction system offer energy is electric drying oven with forced convection.It is placed on upon completion of the reaction dry Make its decline natural cooling with drying box temperature in dry case, unreacted ion is made further to react.The AgNWs of generation Solution in contain organic matter PVP and HNO3, other impurity such as AgCl need to be centrifuged with organic matter and inorganic matter It goes out.
(2) obtained nano silver is configured to the Nano silver solution of 10mg/mL, the nano silver of a concentration of 10mg/mL is molten Liquid and concentration 95.57wt% ethanol solutions are mixed according to certain mass ratio.The suspension of gained is mixed on eddy blending machine It closes 10 minutes, to obtain finely dispersed suspension.The suspension is coated to accurate laboratory coater ACMM-450 soft Property film on, flexible base board is transferred on air dry oven dry solidification 20-40 minutes gained.
The surface SEM figures of nano silver wire transparent conductive film matrix are tested, as shown in Figure 3.It can obtain according to fig. 3, silver nanoparticle Line transparent conductive film matrix is the transparent conductive film of grid distribution.As shown in figure 4, Fig. 4 is preparation side provided by the invention The surface SEM figures of microwaved rear nano silver wire transparent conductive film made from method;According to fig. 3 and Fig. 4 is compared, and can be obtained, micro- Wave effectively fuses nano silver wire, effectively changes metal micro-nano line electrical circuit.
Embodiment 2
A kind of pattern metal micro Nano material-nano silver wire transparent conductive film, is made by following methods:
The surface of nano silver wire transparent conductive film matrix prepared by embodiment 1 carries out hydrophily processing, after having handled The rapid mixing polar solvent with certain viscosity using PVP and water configuration is that " ink " draws target pattern, is then put down It is put into microwave equipment and microwave heating is carried out to the film, by the interaction between microwave and polar solvent by corresponding position Silver wire fusing, you can prepare corresponding pattern.
Test it is microwaved after patterning nano silver wire transparent conductive film surface SEM figure, as shown in Fig. 5 (b). The angle of wetting of polar solvent in testing example 3, as shown in Fig. 5 (a).
Embodiment 3
A kind of pattern metal micro Nano material-nano silver wire transparent conductive film, is made by following methods:
The surface of nano silver wire transparent conductive film matrix prepared by embodiment 1 carries out hydrophily processing, after having handled The rapid mixing polar solvent with certain viscosity using sodium carboxymethylcellulose and water configuration is that " ink " draws target pattern, Then it is kept flat in microwave equipment and microwave heating is carried out to the film, pass through the interaction between microwave and polar solvent The silver wire of corresponding position is fused, you can prepare corresponding pattern.
Test it is microwaved after patterning nano silver wire transparent conductive film surface SEM figure, as shown in Fig. 6 (b), The angle of wetting of polar solvent in testing example 3, as shown in Fig. 6 (a).By the comparison of Fig. 5 (a) and Fig. 6 (a) it is found that not Same polarity solution is different to the angle of wetting of film, and then controls angle of wetting by the polar solvent of different viscosities to adjust the thick of line Arbitrary graphic pattern can be presented on nano silver wire transparent conductive film in thin and pattern size, microwave.
Embodiment 4
A kind of pattern metal micro Nano material-nano silver wire transparent conductive film, the patterned gold provided with embodiment 2 Belong to differing only in for micro Nano material-nano silver wire transparent conductive film, drawn pattern is different.
The surface resistivity of test pattern nano silver wire transparent conductive film and the figure of surface SEM, as a result such as Fig. 7 institutes Show.
Embodiment 5
A kind of pattern metal micro Nano material-nano silver wire transparent conductive film, the patterned gold provided with embodiment 2 Belong to differing only in for micro Nano material-nano silver wire transparent conductive film, drawn pattern is different.
The surface resistivity of test pattern nano silver wire transparent conductive film and the figure of surface SEM, as a result such as Fig. 8 institutes Show.
Embodiment 6
A kind of pattern metal micro Nano material-nano silver wire transparent conductive film, the patterned gold provided with embodiment 3 Belong to differing only in for micro Nano material-nano silver wire transparent conductive film, drawn pattern is different.
The surface resistivity of test pattern nano silver wire transparent conductive film and the figure of surface SEM, as a result such as Fig. 9 institutes Show.
Test example
Pattern metal micro Nano material-nano silver wire transparent conductive film that testing example 2-6 is provided respectively is micro- The sheet resistance value of wave before and after the processing.The results are shown in Table 1.
1 test result of table
It can be obtained by table 1, after microwaved, the sheet resistance values of nano silver wire transparent conductive film significantly reduce.
To sum up, it the patterned preparation method of metal micro-nano material transparent conductive film of the embodiment of the present invention and its answers With using microwave for changing metal micro-nano material electricity electricity in metal micro-nano material transparent conductive film patterning Road, the accuracy of the pattern of finally obtained metal micro-nano material transparent conductive film are up to 40um or more, while by The independent response of microwave and metal micro-nano storeroom and the contact performance for improving junction between nano wire, can effectively reduce and connect Get an electric shock resistance, and then reduction film sheet resistance values, which is not necessarily to additional printing coating procedure, when required preparation is handled Between it is short, it is efficient, it can be achieved that large-scale continuous production, be suitble to industrialized production.
Embodiments described above is a part of the embodiment of the present invention, instead of all the embodiments.The reality of the present invention The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of the selected implementation of the present invention Example.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts Every other embodiment, shall fall within the protection scope of the present invention.

Claims (10)

1. microwave is in metal micro-nano material transparent conductive film patterning for changing metal micro-nano material electrical circuit Application.
2. application according to claim 1, which is characterized in that the metal micro-nano material be Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga or the nano wire of its alloy or its metal oxide, micro wire, nanotube and At least one of micron tube;
Preferably, the metal micro-nano material be the Ag, it is the Au, the Cu, the Pt, the Fe, the Co, described Ni, the W, the Al, the Ti, the Sb, the Pb, the Sn, the Zn, the In, the Ga or its alloy or its Nano wire, micro wire, nanotube or the micron tube of metal oxide.
3. a kind of patterned preparation method of metal micro-nano material transparent conductive film, which is characterized in that it is micro- metal will to be contained The polar solvent of nano material is coated on the surface of flexible membrane and it is saturating to obtain modified metal micro Nano material after dry hydrophily processing Bright conductive film;
Using having, sticking polar solvent is arbitrary in the surface rendering of the modified metal micro Nano material transparent conductive film After pattern, the microwave treatment through 0.3GHz-300GHz;
Wherein, the angle of wetting of the sticking polar solvent of tool and the modified metal micro Nano material transparent conductive film is 10 ° -50 °, the angle of wetting is controlled by the different viscosities of the sticking polar solvent of tool, and then adjust in the pattern The size of the thickness of line and the pattern;
The metal micro-nano material is Ag, Au, Cu, Pt, Fe, Co, Ni, W, Al, Ti, Sb, Pb, Sn, Zn, In, Ga or its conjunction At least one of nano wire, micro wire, nanotube and the micron tube of gold or its metal oxide;
Preferably, the metal micro-nano material be the Ag, it is the Au, the Cu, the Pt, the Fe, the Co, described Ni, the W, the Al, the Ti, the Sb, the Pb, the Sn, the Zn, the In, the Ga or its alloy or its Nano wire, micro wire, nanotube or the micron tube of metal oxide.
4. preparation method according to claim 3, which is characterized in that the condition of microwave treatment is:It is in microwave power 1us-100s is handled under conditions of 1mW-200W.
5. preparation method according to claim 3, which is characterized in that the condition of microwave treatment is:It is 5- in microwave power 1-50s is handled under conditions of 100W.
6. according to the preparation method described in claim 3-5 any one, which is characterized in that the sticking polar solvent of tool Including water, methanol, ethyl alcohol, isopropanol, normal propyl alcohol, n-butanol, sec-butyl alcohol, ethylene glycol, propylene glycol, glycerine, acetic acid, acetic acid second Ester, propyl acetate, butyl acetate, acetone, butanone, toluene, dimethylbenzene, tetrahydrofuran, N,N-dimethylformamide, formic acid, vinegar Acid, propionic acid, butyric acid, valeric acid, acid, succinic acid, glutaric acid, hexanedioic acid, succinic acid diisobutyl ester, glutaric acid diisobutyl ester and At least one of hexanedioic acid diisobutyl ester.
7. according to the preparation method described in claim 3-5 any one, which is characterized in that the sticking polar solvent of tool Further include for changing the auxiliary agent of its viscosity.
8. preparation method according to claim 7, which is characterized in that the auxiliary agent includes PVP, methylcellulose, hydroxypropyl Ylmethyl cellulose, sodium carboxymethylcellulose, vinyltriethoxysilane, vinyltrimethoxysilane, three (β of vinyl Alkene methoxy ethoxy) silane, γ propyls oxysilane, aminopropyl triethoxysilane, 3- aminopropyl trimethoxies Base silane, 3- glycidyl ether oxypropyltrimethoxysilanes, γ trimethacrylate acyloxy propyl trimethoxy silicane, γ Three mercaptopropyltriethoxysilanes, N- β-aminoethyl-γ-aminopropyltriethoxy dimethoxysilane, zirconate, titanate esters, aluminium zirconium At least one of acid esters, Aluminate and rare-earth coupling agent.
9. preparation method according to claim 3, which is characterized in that the flexible membrane is flexible plastic film;
Preferably, the flexible membrane is selected from polyester film, polyvinyl alcohol film or Kapton.
10. preparation method according to claim 3, which is characterized in that hydrophily processing include UV ozone handle, Coat hydrophilic nano SO2, plasma cause polyethylene film grafting acrylic acid, coating surfactant or Cryogenic air etc. Ion surface modification.
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CN103392387A (en) * 2011-02-25 2013-11-13 东京毅力科创株式会社 Film forming method and film forming device
CN104766675A (en) * 2015-03-11 2015-07-08 中山大学 Application of microwaves in preparation of transparent conductive films
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