CN108426538A - A kind of 3D Shap feature detection systems and method - Google Patents
A kind of 3D Shap feature detection systems and method Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention discloses a kind of 3D Shap feature detection systems and method, system include automatic carrier, the optical microscopy imaging system with longitudinal chromatic aberration, port number N >=4 narrow-band multispectral imaging sensor, control unit and image analyzing unit；The objective table is electrically connected with described control unit, and described image analytic unit is electrically connected respectively with the multi-optical spectrum image sensor and control unit, and the optical microscopy imaging system is mechanically coupled with the multi-optical spectrum image sensor.The present invention can obtain several narrow-band spectrum images that the spatial positions body surface XY are calibrated naturally and focus degree is different with single exposure, using mating such as defocusing blurring degree algorithm and mating auto focusing method, can full automatic acquisition body surface 3D patterns, i.e., the depth Z information of arbitrary spatial position XY；The present invention has extensively using value advanced manufacture cutter, accurate sample or parts surface pattern quick online detection.
Description
Technical field
The present invention relates to digital micro-analysis fields, and in particular to a kind of 3D Shap feature detection systems and method.
Background technology
Currently, 3D Shape measures are formerly more next into the application in manufacture cutter, accurate sample and parts surface Shape measure
More extensive, still, existing 3D Shap feature detection systems and method are often through color camera (color image sensor) and colour killing
Poor optical microscopy imaging system realizes to have the shortcomings that as follows：1. when using color camera, the spectral response curve measured is only
When 3 (it is 3 that can survey wave band number) 2. use color camera, due to color camera wave band wider distribution, (in spectrum sky
Between) spectral response curve overlapping each other；3. existing achromatism optics micro imaging system involves great expense, if it is disappearing again
Then cost costly, causes testing cost excessively high to color shift optical micro imaging system.
Invention content
It is an object of the invention to overcome the deficiency of the prior art, a kind of 3D Shap feature detection systems and method are provided, it can be with
Single exposure obtains several narrow-band spectrum images that the spatial positions body surface XY are calibrated naturally and focus degree is different；It uses
Mating defocusing blurring degree algorithm and mating auto focusing method, can full automatic acquisition body surface 3D patterns, that is, appoint
The depth Z information of meaning spatial position XY.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of 3D Shap feature detection systems, including objective table, optical microscopy imaging system, multi-optical spectrum image sensor, control
Unit and image analyzing unit, which is characterized in that the objective table is electrically connected with described control unit, described image analytic unit
It is electrically connected respectively with the multi-optical spectrum image sensor and control unit, the optical microscopy imaging system and the multispectral figure
As sensor mechanism is connected；
The optical microscopy imaging system is the optical microscopy imaging system with longitudinal chromatic aberration, the optical microscopy imaging system
System lighting source be transmitted light source, with object glass collar around oblique fire light source or other do not pass through the epi-illumination light source of object lens；
The multi-optical spectrum image sensor includes an optical filter and a black white image sensor, the optical filter
It is tightly attached in effective opto-electronic conversion plane of the black white image sensor；The optical filter includes that several array periods are set
The optical filter macroelement set；Each optical filter macroelement includes N number of spatial position non-overlapping copies, each through optical band
The optical narrow-band micro-filtration mirror unit for differing and not overlapping each other；And each optical filter macroelement covering integer institute
State the pixel of black white image sensor；Wherein, N >=4；
The objective table is motorized subject table, is moved along at least one direction under electric control.
Preferably, the multi-optical spectrum image sensor opto-electronic conversion plane is placed on the optical microscopy imaging system camera lens
Imaging surface on, and the same optical axis of the two.
Preferably, the number that the optical filter macroelement presses periodic arrangement in the horizontal is M1 >=10, in the longitudinal direction
By number M2 >=10 of periodic arrangement.
Preferably, each optical filter macroelement includes 4 optical narrow-band micro-filtration mirror units, respectively：Penetrating band
The first band optical narrow-band micro-filtration mirror unit that centre wavelength is λ 1, bandwidth is δ λ 1；Penetrating band centre wavelength is λ 2, bandwidth δ
The second band optical narrow-band micro-filtration mirror unit of λ 2；It is penetrating with the third wave band optical narrow-band that centre wavelength is λ 3, bandwidth is δ λ 3
Micro-filtration mirror unit；It is penetrating with centre wavelength be λ 4, the 4th wave band optical narrow-band micro-filtration mirror unit that bandwidth is δ λ 4.
Preferably, the value range of the λ 1 is 440-470 nanometers；The value range of the λ 2 is 470-540 nanometers；Institute
The value range for stating λ 3 is 540-610 nanometers；The value range of the λ 4 is 610-680 nanometers.
Preferably, the penetrating band light transmittance of each optical narrow-band micro-filtration mirror unit is higher than 80%, and cut-off wave band is less than
0.1%；The light transmittance of each optical narrow-band micro-filtration mirror unit is higher than 80% mistake less than 1% from preventing belt to penetrating band
It crosses section bandwidth and is less than 10 nanometers；The euphotic zone non-overlapping copies of each optical narrow-band micro-filtration mirror unit.It should be noted that
For each filter only there are one saturating passband on spectrum axis, saturating passband both sides are respectively preventing belt there are one impermeable spectrum band.
Preferably, the object lens of the optical microscopy imaging system are different to the optical band image-forming range of different-waveband；By away from
Short-wave band respectively from the near to the remote with a distance from object lens, compared with short-wave band, intermediate wave band, compared with long-wave band and long-wave band；
The object lens of the optical microscopy imaging system to centre wavelength green band (such as near 540 nanometers) imaging
It does and optimizes, do not do special longitudinal achromat-design or processing.The green band is green wavelength.
A kind of 3D Shape measures method is included the following steps based on the 3D Shap feature detection systems：
Step a, described control unit control the objective table by the sample on objective table be moved to the optical microphotograph at
As in system imaging range；Described control unit controls the multi-optical spectrum image sensor exposure and obtains a secondary original image, institute
It states image analyzing unit and analyzes the multi-optical spectrum image sensor the obtained image of exposure every time, it is split as N >=4 online
Width narrow-band spectrum image, method for splitting are that the optics in all M1*M2 optical filter macroelements corresponding to first band is narrow
First band narrow-band spectrum image is sequentially formed with the pixel that micro-filtration mirror unit is covered；The M1*M2 optical filters are macro
The pixel covered corresponding to the optical narrow-band micro-filtration mirror unit of second band in unit sequentially forms second band narrow-band spectrum
Image；Similarly obtain third, the 4th ..., n band narrow-band spectrum image；
Step b calculates the defocusing blurring degree F of each narrow-band spectrum image in each position；The defocusing blurring degree F according to
Energy maximum value method, hill-climbing algorithm, gray grads method, point spread function radius, the spatial frequency domain analysis based on Fourier transformation
One or more of method calculated；
Step c, according to the relativity of above-mentioned N number of narrow-band spectrum image defocus fuzziness, control different narrow band wave band figure
The distance relation of the defocusing blurring degree F and known surface pattern object of picture obtain the depth of position XY corresponding to each pixel of image
Spend information Z；The defocusing blurring degree F is with object distance relationship：It is intermediate when object is on optical microscopy imaging system focal plane
Wave band defocuses minimum；When object is when far from optical microscopy imaging system focal plane, long-wave band defocuses minimum；When object is by dipped beam
When learning micro imaging system focal plane, short-wave band defocuses minimum.
Preferably, the method further include to known surface pattern object carry out scale, including：
Using the object of a known surface pattern as scale sample, object is placed on the objective table and to it
In green band imaging and focusing, described control unit controls the multi-optical spectrum image sensor exposure and obtains a secondary original image,
Image processing unit analyzes the multi-optical spectrum image sensor the obtained image of exposure every time, it is split as to the width of N >=4 online
Narrow-band spectrum image, method for splitting are by the optical narrow-band corresponding to first band in all M1*M2 optical filter macroelements
The pixel that micro-filtration mirror unit is covered sequentially is organized as first band narrow-band spectrum image；The M1*M2 optical filters are macro
The pixel covered corresponding to the optical narrow-band micro-filtration mirror unit of second band in unit is sequentially organized as second band narrow band light
Spectrogram picture；Similarly obtain third, the 4th ..., n band narrow-band spectrum image；
Defocusing blurring the degree F, the defocusing blurring degree F of each narrowband band image in each position are calculated according to energy most
One in big value method, hill-climbing algorithm, gray grads method, point spread function radius, the spatial frequency domain analysis based on Fourier transformation
Kind or a variety of methods are calculated；
Establish the correspondence of N number of spectrum picture defocusing blurring degree F and scale sample surface known altitude；Method for building up packet
Include interpolation method and or least square method.
Preferably, the step c further includes following automatic focus steps in real time：
More N number of narrow-band spectrum image defocus fuzziness F；If it is most clear that intermediate wave band narrow-band spectrum image focuses, stop
It is only automatic to focus；If short wavelength's narrow-band spectrum image has smaller defocusing blurring degree F than long wavelength's narrow-band spectrum image,
The point is in than the optical microscopy imaging system focusing surface closer proximity, and objective table is transported to apart from the farther direction of object lens
It is dynamic；If long wavelength's narrow-band spectrum image than short wavelength's narrow-band spectrum image there is smaller defocusing blurring degree F, the point to be in
Position more farther than focal plane moves objective table to away from object lens closer proximity.
Compared with prior art, the beneficial effects of the invention are as follows：
(1) multi-optical spectrum image sensor of present system includes an optical filter and a black white image sensor,
N >=4 spectral response curve can be generated；And spectral response curve is narrowband, and do not overlap each other (in spectral space)；
(2) the optical microscopy imaging system of present system is the optical microscopy imaging system with longitudinal chromatic aberration, therefore is made
Valence is low, can be effectively cost-effective；
(3) the method for the present invention can be obtained with single exposure body surface XY spatial positions calibrate naturally and focus degree not
Several same narrow-band spectrum images；Using mating such as defocusing blurring degree algorithm and mating auto focusing method, can entirely from
Dynamic acquisition body surface 3D patterns, i.e., the depth Z information of arbitrary spatial position XY；For advanced manufacture cutter, accurate sample
Or parts surface pattern quick online detection has extensively using value.
Invention is further described in detail with reference to the accompanying drawings and embodiments, but a kind of 3D Shape measures of the present invention
System and method is not limited to embodiment.
Description of the drawings
Fig. 1 is the structural schematic diagram of the 3D Shap feature detection systems of the embodiment of the present invention；
Fig. 2 is the narrow-band multispectral imaging sensor spectral response curve of the embodiment of the present invention and macro pixel map；
Fig. 3 is the color camera spectral response curve of the embodiment of the present invention and macro pixel map.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention is done furtherly
It is bright.Obviously, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
Described in Fig. 1, a kind of 3D Shap feature detection systems of the present invention, including multi-optical spectrum image sensor, optical microphotograph at
As system, image analyzing unit 3, control unit 4 and objective table 5；Multi-optical spectrum image sensor described in the present embodiment includes narrow
With multispectral camera 1, the optical microscopy imaging system is band aberration optical imaging system 2；The objective table 5 and the control
Unit 4 processed is electrically connected, and described image analytic unit 3 is electrically connected respectively with the narrow-band multispectral camera 1 and control unit 4,
The band aberration optical imaging system 2 is mechanically coupled with the narrow-band multispectral camera 1.Described control unit 4 and image point
Analysis unit 3 may operate in same terminal, can also operate in different terminals, and the terminal can be PC, specifically,
The present invention is not particularly limited.Sample to be tested 6 (object under test) is placed in electronic moveable stage 5, and control unit 4 can be with
Control 5 height and position of objective table so that 6 region surface to be measured of sample to be tested being placed on objective table 5 is in the topography measurement
In system working range.From lighting system 9 by the illumination light of plastics design, falls in week and be mapped on sample to be tested 6 from object lens side, quilt
The light that sample to be tested 6 reflects enters the band aberration optical imaging system 2 with aberration, by the pipe with aberration optical imaging system 2
Enter in narrow-band multispectral camera 1 after mirror 21.The image that narrow-band multispectral camera 1 is obtained by image transmitting circuit into
Enter image analyzing unit 3.The macro pixel 7 of each of narrow-band multispectral camera 1 includes at least N (N=4 shown in figure) a to not
With the sub-pixel of wave band sensitivity, corresponding photoelectric conversion efficiency (in the present embodiment, is shown as shown in Figure 2 with wavelength plot
The N=4 shown), the opto-electronic conversion wave band between sub-pixel does not overlap each other.It is shown in Figure 3, for it is used herein
Narrow-band multispectral camera 1 compare, provide certain KODAK color camera spectrum response curve and macro pixel (Bell's filter 8) figure.
Attached drawing 2 and attached drawing 3 difference lies in：Have color camera spectral response curve and there was only 3 (it is 3 that can survey wave band number), no
It is N >=4；2. having color camera wave band wider distribution, (in spectral space) is overlapped each other；And the narrowband mostly light of the present invention
It is narrowband to compose each macro pixel subelement spectral response curve of camera 1, and is not overlapped each other (in spectral space).
To sum up, compared with the prior art, the present invention has the advantages that：(1) prior art uses color camera, and
Color camera spectral response curve only has 3 (it is 3 that can survey wave band number), is not N >=4；(2) has color camera wave band point
Cloth is wider, and (in spectral space) is overlapped each other；And each macro pixel subelement light of narrow-band multispectral camera 1 of the present invention
It is narrowband to compose response curve, and is not overlapped each other (in spectral space)；(3) prior art optical imaging system is mainly used and is made
The expensive achromatism optical imaging system of high price, the even more expensive apochromatism optical imaging system of cost, and the present invention adopts
With (Z-direction) band aberration optical imaging system 2, thus low cost.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of 3D Shap feature detection systems, including objective table, optical microscopy imaging system, multi-optical spectrum image sensor, control list
Member and image analyzing unit, which is characterized in that the objective table is electrically connected with described control unit, described image analytic unit and
The multi-optical spectrum image sensor and control unit are electrically connected respectively, the optical microscopy imaging system and the multispectral image
Sensor mechanism is connected；
The optical microscopy imaging system is the optical microscopy imaging system with longitudinal chromatic aberration, and the optical microscopy imaging system is shone
Mingguang City source be transmitted light source, with object glass collar around oblique fire light source or other do not pass through the epi-illumination light source of object lens；
The multi-optical spectrum image sensor includes that an optical filter and a black white image sensor, the optical filter are close to
In effective opto-electronic conversion plane of the black white image sensor；The optical filter includes what several array periods were arranged
Optical filter macroelement；Each optical filter macroelement includes N number of spatial position non-overlapping copies, through each not phase of optical band
Optical narrow-band micro-filtration mirror unit that is same and not overlapping each other；And each optical filter macroelement covering integer is described black
The pixel of white imaging sensor；Wherein, N >=4；
The objective table is motorized subject table, is moved along at least one direction under electric control.
2. 3D Shap feature detection systems according to claim 1, which is characterized in that the multi-optical spectrum image sensor photoelectricity turns
It changes plane to be placed on the imaging surface of the optical microscopy imaging system camera lens, and the same optical axis of the two.
3. 3D Shap feature detection systems according to claim 1, which is characterized in that the optical filter macroelement is in the horizontal
It is M1 >=10 by the number of periodic arrangement, presses number M2 >=10 of periodic arrangement in the longitudinal direction.
4. 3D Shap feature detection systems according to claim 1, which is characterized in that each the optical filter macroelement includes
4 optical narrow-band micro-filtration mirror units, respectively：It is penetrating micro- with the first band optical narrow-band that centre wavelength is λ 1, bandwidth is δ λ 1
Filter unit；It is penetrating with the second band optical narrow-band micro-filtration mirror unit that centre wavelength is λ 2, bandwidth is δ λ 2；Penetrating band center
The third wave band optical narrow-band micro-filtration mirror unit that wavelength is λ 3, bandwidth is δ λ 3；Penetrating with centre wavelength is λ 4, bandwidth is δ λ 4
4th wave band optical narrow-band micro-filtration mirror unit.
5. 3D Shap feature detection systems according to claim 4, which is characterized in that the value range of the λ 1 is 440-470
Nanometer；The value range of the λ 2 is 470-540 nanometers；The value range of the λ 3 is 540-610 nanometers；The value of the λ 4
Ranging from 610-680 nanometers.
6. 3D Shap feature detection systems according to claim 1, which is characterized in that each optical narrow-band micro-filtration mirror unit
Penetrating band light transmittance be higher than 80%, cut-off wave band be less than 0.1%；The light transmittance of each optical narrow-band micro-filtration mirror unit from
Preventing belt is less than 10 nanometers to penetrating band less than 1% higher than 80% transition section bandwidth；Each optical narrow-band micro-filtration
The euphotic zone non-overlapping copies of mirror unit.
7. 3D Shap feature detection systems according to claim 1, it is characterised in that：
The object lens of the optical microscopy imaging system are different to the optical band image-forming range of different-waveband；By the distance apart from object lens
Short-wave band respectively from the near to the remote, compared with short-wave band, intermediate wave band, compared with long-wave band and long-wave band；
The object lens of the optical microscopy imaging system, which do centre wavelength in the imaging of green band, to be optimized, and is not done special longitudinal direction and is disappeared
Aberration designs or processing.
8. a kind of 3D Shape measures method, which is characterized in that described in any one of claim 1 to 7 claim
3D Shap feature detection systems, include the following steps：
Step a, described control unit control the objective table and the sample on objective table are moved to the optical microscopy imaging system
It unites in areas imaging；Described control unit controls the multi-optical spectrum image sensor exposure and obtains a secondary original image, the figure
The multi-optical spectrum image sensor is analyzed as analytic unit and exposes obtained image every time, and it is narrow that it is split as N >=4 online
Band spectrum image, method for splitting are that the optical narrow-band in all M1*M2 optical filter macroelements corresponding to first band is micro-
The pixel that filter unit is covered sequentially forms first band narrow-band spectrum image；By the M1*M2 optical filter macroelements
In correspond to the pixel that is covered of optical narrow-band micro-filtration mirror unit of second band and sequentially form second band narrow-band spectrum image；
Similarly obtain third, the 4th ..., n band narrow-band spectrum image；
Step b calculates the defocusing blurring degree F of each narrow-band spectrum image in each position；The defocusing blurring degree F is according to energy
In maximum value process, hill-climbing algorithm, gray grads method, point spread function radius, the spatial frequency domain analysis based on Fourier transformation
One or more kinds of methods are calculated；
Step c, according to the relativity of above-mentioned N number of narrow-band spectrum image defocus fuzziness, control different narrow is with band image
The distance relation of defocusing blurring degree F and known surface pattern object obtain the depth letter of position XY corresponding to each pixel of image
Cease Z；The defocusing blurring degree F is with object distance relationship：When object is on optical microscopy imaging system focal plane, intermediate wave band
Defocus minimum；When object is when far from optical microscopy imaging system focal plane, long-wave band defocuses minimum；When object is aobvious close to optics
When micro- imaging system focal plane, short-wave band defocuses minimum.
9. 3D Shape measures method according to claim 8, which is characterized in that the method further includes to known surface shape
Looks object carries out scale, including：
Using the object of a known surface pattern as scale sample, object is placed on the objective table and to it green
Color wave band imaging and focusing, described control unit control the multi-optical spectrum image sensor exposure and obtain a secondary original image, image
Processing unit analyzes the multi-optical spectrum image sensor the obtained image of exposure every time, it is split as to the width of N >=4 narrowband online
Spectrum picture, method for splitting are by the optical narrow-band micro-filtration corresponding to first band in all M1*M2 optical filter macroelements
The pixel that mirror unit is covered sequentially is organized as first band narrow-band spectrum image；By the M1*M2 optical filter macroelements
In correspond to the pixel that is covered of optical narrow-band micro-filtration mirror unit of second band and sequentially organize as second band narrow band light spectrogram
Picture；Similarly obtain third, the 4th ..., n band narrow-band spectrum image；
The defocusing blurring degree F of each narrowband band image in each position is calculated, the defocusing blurring degree F is according to Energy maximum value
Method, hill-climbing algorithm, gray grads method, point spread function radius, based on Fourier transformation spatial frequency domain analysis in one kind or
The a variety of methods of person calculate；
Establish the correspondence of N number of spectrum picture defocusing blurring degree F and scale sample surface known altitude；Method for building up includes inserting
Value method and or least square method.
10. 3D Shape measures method according to claim 8, which is characterized in that the step c further include it is following in real time from
Dynamic focus steps：
More N number of narrow-band spectrum image defocus fuzziness F；If intermediate wave band narrow-band spectrum image focusing is most clear, stop certainly
It is dynamic to focus；If short wavelength's narrow-band spectrum image has smaller defocusing blurring degree F, the point than long wavelength's narrow-band spectrum image
It is in than the optical microscopy imaging system focusing surface closer proximity, objective table is moved to apart from the farther direction of object lens；
If long wavelength's narrow-band spectrum image than short wavelength's narrow-band spectrum image there is smaller defocusing blurring degree F, the point to be in ratio
The farther position of focal plane moves objective table to away from object lens closer proximity.
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