CN108422667B

CN108422667B - Protective gas supply system

Info

Publication number: CN108422667B
Application number: CN201810439822.8A
Authority: CN
Inventors: 熊孝经; 郑华
Original assignee: Suzhou Beifeng Intelligent Technology Co ltd
Current assignee: Suzhou Beifeng Intelligent Technology Co ltd
Priority date: 2018-05-09
Filing date: 2018-05-09
Publication date: 2023-10-31
Anticipated expiration: 2038-05-09
Also published as: CN108422667A

Abstract

The shielding gas supply system comprises a gas input module and a gas output module which are oppositely arranged in a target area, wherein shielding gas flows from the gas input module to the gas output module to form a shielding gas zone, and the turbulence degree of the shielding gas is in a preset range so that turbulent eddies of the shielding gas are all positioned in the shielding gas zone. The protective gas supply system provided by the invention is used for forming the protective gas with ideal turbulence degree in the target area, providing the functions of oxidation protection and purging cleaning for the selective laser sintering process, reducing the diffuse flying phenomenon of pollutants and ensuring the sintering processing efficiency.

Description

Protective gas supply system

Technical Field

The invention belongs to the technical field of additive manufacturing, and particularly relates to a protective gas supply system.

Background

Additive manufacturing (Additive Manufacturing, AM) commonly known as 3D printing is a manufacturing technology for manufacturing solid objects by integrating computer-aided design, material processing and forming technology, taking digital model files as the basis, stacking special metal materials, nonmetal materials and medical biological materials layer by layer through a software and numerical control system in the modes of extrusion, sintering, melting, photo-curing, spraying and the like.

Among them, selective laser sintering (Selective Laser Sintering) is an important additive manufacturing method. The principle is that the laser beam selectively sinters the powder material layer by layer according to the layering section information, and the superfluous powder is removed after the complete sintering, so as to obtain the required part.

During the selective laser sintering process, the continuous powder material layer generates considerable amounts of soot, volatiles and aerosols, which are mixed with the flying powder fines, blocking the optical path of the laser beam and affecting the sintering efficiency. Particularly, the supply of the protective gas in the processing chamber further causes the mixing and flying of smoke dust, volatile matters, atomized matters and powder fine scraps, and seriously reduces the sintering processing efficiency.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention provides a protective gas supply system which is used for forming protective gas with ideal turbulence degree in a target area, providing the functions of oxidation protection and purging cleaning for the selective laser sintering process, reducing the diffuse flying phenomenon of pollutants and ensuring the sintering processing efficiency.

The aim of the invention is achieved by the following technical scheme:

the shielding gas supply system comprises a gas input module and a gas output module which are oppositely arranged in a target area, wherein shielding gas flows from the gas input module to the gas output module to form a shielding gas zone, and the turbulence degree of the shielding gas is in a preset range so that turbulent eddies of the shielding gas are all positioned in the shielding gas zone.

As an improvement of the above technical solution, the gas input module and the gas output module are kept coaxially opposite.

As a further improvement of the above-mentioned technical solution, the cross-sectional dimension of the shielding gas strip is kept constant along the flow direction of the shielding gas.

As a further improvement of the above technical solution, a driving pressure is formed between the gas input module and the gas output module, the driving pressure is not less than atmospheric pressure, and the turbulence of the shielding gas is within the preset range under the driving pressure.

As a further improvement of the above technical solution, the gas input module is configured to introduce a source gas and adjust turbulence of the source gas, so as to output the shielding gas.

As a further improvement of the above technical solution, the gas input module includes:

a deflector converter for adjusting the turbulence of the source gas to obtain a controlled gas;

and a shunt output device for shunting the controlled gas to output the shielding gas.

As a further improvement of the above technical solution, the gas input module further includes a fluid mixer, the fluid mixer is configured to achieve uniform mixing of the source gas to obtain a mixed gas, and the flow guiding converter reduces turbulence of the mixed gas to a preset range to obtain the controlled gas.

As a further improvement of the above technical solution, the gas output module is configured to pump out the shielding gas at the end of the shielding gas band, and reduce the turbulence of the shielding gas that is being pumped out.

As a further improvement of the above technical solution, the shielding gas supply system further includes an auxiliary input module, where the auxiliary input module is configured to input an auxiliary gas, the auxiliary gas flows in a directional manner to form an auxiliary gas band, the auxiliary gas band and the shielding gas band are distributed in the target area in an inner layer manner, and the auxiliary gas and the flowing direction of the shielding gas have a non-zero included angle.

As a further improvement of the above technical solution, the auxiliary gas is opposite to the flow direction of the shielding gas, and flows in the direction reverse to the end of the auxiliary gas belt to be converged into the shielding gas belt.

The beneficial effects of the invention are as follows:

the gas input module and the gas output module are oppositely arranged in the target area, so that a protective gas and a protective gas band are formed between the gas input module and the gas output module, the turbulence degree of the protective gas is in a preset range, and the turbulence vortex of the protective gas is positioned in the protective gas band, so that the directional sweeping of smoke dust, volatile matter atomized matters and powder fine powder is realized, the flying and diffusion of pollutants are avoided, the target area is kept clean, the laser light path is coherent, and the laser sintering efficiency is effectively ensured.

In order to make the above objects, features and advantages of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of a shielding gas supply system according to embodiment 1 of the present invention;

FIG. 2 is a schematic perspective view of a gas input module of a shielding gas supply system according to embodiment 2 of the present invention;

FIG. 3 is a schematic cross-sectional view of a gas input module of a shielding gas supply system provided in embodiment 2 of the present invention;

fig. 4 is a perspective schematic view showing a first structure of a flow guiding converter of a gas input module of a shielding gas supply system according to embodiment 2 of the present invention;

FIG. 5 is an isometric view of a second configuration of a flow-guiding converter of a gas input module of a shielding gas supply system according to embodiment 2 of the present invention;

fig. 6 is a schematic perspective view showing a second structure of a flow guiding converter of a gas input module of a shielding gas supply system according to embodiment 2 of the present invention;

FIG. 7 is an exploded schematic view of a split flow output of a gas input module of a shielding gas supply system provided in embodiment 2 of the present invention;

FIG. 8 is a schematic cross-sectional view of a shunt output device of a gas input module of a shielding gas supply system provided in embodiment 2 of the present invention;

FIG. 9 is an isometric view of a fluid mixer of a gas input module of a shielding gas supply system provided in embodiment 2 of the present invention;

FIG. 10 is a schematic cross-sectional view of a fluid mixer of a gas input module of a shielding gas supply system provided in embodiment 2 of the present invention;

FIG. 11 is a schematic perspective view of a gas remover of a gas output module of a shielding gas supply system provided in embodiment 3 of the present invention;

fig. 12 is an isometric view of an auxiliary input device of an auxiliary input module of a shielding gas supply system according to embodiment 4 of the present invention.

Description of main reference numerals:

1000-shielding gas supply system, P (a) -gas input module, 0100-deflector converter, 0110-deflector housing, 0111-deflector input, 0112-deflector chamber, 0113-deflector output, 0120-deflector vane, 0200-deflector output, 0210-deflector body, 0211-deflector chamber, 0220-deflector grid, 0221-transverse grid, 0222-longitudinal grid, 0223-deflector grid, 0300-fluid mixer, 0310-mixer housing, 0311-front wall, 0312-rear wall, 0313-peripheral wall, 0314-mixing chamber, 0320-fluid input, 0330-fluid output, 0331-deflector aperture, 0340-mounting ear, P (b) -gas output module, 1100-gas deflector, 1110-deflector housing, 1111-deflector input, 1111 a-deflector grid, 1112-deflector chamber, 1113-deflector output, 1110-deflector vane, P (c) -auxiliary input module, 2120-auxiliary input housing, 2130-auxiliary input, 2110-auxiliary input.

Detailed Description

In order to facilitate an understanding of the present invention, a more complete description of the shielding gas supply system will now be provided with reference to the associated drawings. Preferred embodiments of the shielding gas supply system are shown in the drawings. However, the shielding gas supply system may be implemented in many different forms and is not limited to the embodiments described herein. Rather, the purpose of these embodiments is to provide a more thorough and complete disclosure of the shielding gas supply system.

It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the shielding gas supply system is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Example 1

Referring to fig. 1, the present embodiment discloses a shielding gas supply system 1000, which includes a gas input module P (a) and a gas output module P (b) disposed opposite to each other in a target area, wherein shielding gas flows from the gas input module P (a) to the gas output module P (b) to form a shielding gas zone, and the turbulence of the shielding gas is within a preset range so that turbulent eddies of the shielding gas are all located in the shielding gas zone. The shielding gas is inert gas (such as argon) or non-reactive gas (such as nitrogen) in additive manufacturing according to actual processing requirements.

Generally, the target area is disposed within the vessel. The target area is illustratively a process chamber. The gas input module P (a) and the gas output module P (b) are disposed at two ends of the target area. Obviously, the shielding gas band can play a role in protecting and cleaning the whole target area.

The shielding gas having a turbulence within a preset range has the following characteristics: firstly, the shielding gas has turbulent flow characteristic, so that the shielding gas is fully mixed with pollutants (such as smoke dust, volatile matters, fine powder materials and the like) and then discharged, and the cleaning of the processing chamber is realized; second, the turbulence of the shielding gas should be lower than that which would cause the diffusion of the contaminants throughout the target area to avoid diffusion of the contaminants. Further, the turbulent vortex of the protective gas is positioned in the protective gas zone, so that pollutants are always kept in the protective gas zone, the directional discharge of the pollutants is ensured, and the phenomena of flying and rolling caused by the vortex are avoided.

The preset range can be calculated or tested according to the characteristics of the processing chamber of a specific application, the required flow rate of the shielding gas and other parameters. Illustratively, the shielding gas may have a turbulence level of no more than 5% at a low turbulence level.

The gas input module P (a) is used for introducing the shielding gas into the target area, and the gas output module P (b) is used for discharging the shielding gas and pollutants therein from the target area, namely, completing the single purging process. Illustratively, the gas input module P (a) is held coaxially opposite the gas output module P (b). The two are opposite to each other, so that the protective gas is blown vertically and positively.

The cross-sectional dimensions of the shielding gas strip are illustratively kept constant along the flow direction of the shielding gas. In other words, the action range of the shielding gas belt is basically kept stable, and the turbulence of the shielding gas caused by severe change is avoided, so that the stable purging action is ensured. For example, the output end of the gas input module P (a) and the input end of the gas output module P (b) have the same shape and size, and are kept opposite in the forward direction to achieve the constant shielding gas band.

Illustratively, a driving pressure is formed between the gas input module P (a) and the gas output module P (b) to achieve a directional flow of the shielding gas. The driving pressure is not less than the atmospheric pressure, and the turbulence of the shielding gas is in a preset range under the driving pressure. The driving pressure is limited to 10, which is different from some processing chambers ^-2 To 10 ^-7 The partial pressure flow environment of Torr can provide a flow of inert gas or non-reactive gas at a pressure slightly higher than atmospheric pressure by the shielding gas supply system 1000, which effectively reduces the difficulty in realizing the gas environment in the processing chamber and is easy to realize with remarkable economy.

Illustratively, the gas input module P (a) is configured to introduce a source gas and adjust the turbulence of the source gas to output a shielding gas. The source gas can be directly introduced from a gas source, or can be introduced after being regulated by other gas path regulating elements. It should be appreciated that the shielding gas output by the gas flow input module is directly used to purge the continuous powder material layer of the process chamber.

Example 2

Referring to fig. 2 to 3 in combination, on the basis of embodiment 1, this embodiment further discloses protection of a gas input module P (a). The turbulence level adjustment of the source gas by the gas input module P (a) may be implemented in various manners, and the gas input module P (a) includes a diversion converter 0100 and a diversion output 0200 connected in a sequential gas path. The diverter 0100 is configured to adjust the turbulence of the source gas to produce a controlled gas, and the diverter output 0200 is configured to divert the controlled gas to output a shielding gas.

Referring to fig. 4, the deflector switch 0100 comprises a deflector housing 0110. The diversion shell 0110 is provided with a diversion input end 0111, a diversion cavity 0112 and a diversion output end 0113 which are communicated in sequence to form a channel for flowing source gas. The connection part of the diversion input end 0111, the diversion cavity 0112 and the diversion output end 0113 is in smooth transition, and the wall surface of the diversion cavity 0112 is smooth and continuous, so that the along-path loss of source gas is reduced, and the turbulence phenomenon is reduced. The flow cross section of the flow guiding shell 0110 increases from the flow guiding input end 0111 to the flow guiding output end 0113, so that the flow speed of the source gas decreases, and the Turbulence Level of the source gas is controlled in a lower range to obtain the controlled gas.

The configuration of the guide chamber 0112 is varied, and exemplary guide chamber 0112 has a flat chamber configuration. The thickness dimension of the flat cavity structure (i.e., the distance between the front and rear walls of the deflector housing 0110) is small, so that the through-flow cross section is in a long and narrow profile. With this configuration, the flow range and flow direction of the controlled gas output by the flow guiding chamber 0112 are highly controllable.

The width of the flat cavity structure increases gradually from the diversion input end 0111 to the diversion output end 0113, so that the increasing purpose of the through flow section is realized, and the diversion output end 0113 forms a flat port structure. Similarly, the flat-mouth structure has a smaller width dimension, forming an elongated output face. Exemplary elongated output surfaces include elongated oval, elongated rectangular, and the like.

Wherein, the appearance of flat cavity structure is various. The flat cavity configuration has a triangular projection profile in its thickness direction, for example. In other words, the cross section taken by a plane normal to the thickness direction of the flat cavity structure has a triangular shape. The base of the triangle is located on the deflector output 0113 and the vertex opposite the base is located on the deflector input 0111.

The flat cavity structure has a symmetrical structure along the width direction, and a diversion input end 0111 and a diversion output end 0113 are formed at two ends of the symmetrical axis. In other words, the flat cavity structure, the fluid-guiding input end 0111 and the fluid-guiding output end 0113 have a central coaxial relationship. For example, in the case of the aforementioned triangular projection profile, the triangle is an isosceles triangle.

Illustratively, a plurality of guide vanes 0120 are disposed in the guide chamber 0112, wherein the guide vanes 0120 extend from the guide input end 0111 to the guide output end 0113, and the guide chamber 0112 is divided into a plurality of guide flow channels by the guide vanes 0120. The source gas enters the diversion flow channel to form a plurality of diversion bodies to realize diversion. Any split fluid is restricted by the flow guide flow channel where the split fluid is positioned, so that the turbulence is further reduced, and the control degree of source gas is enhanced. Wherein, the guide vane 0120 can be made of different materials such as metal or plastic, and has a thin-wall strip structure.

Illustratively, the plurality of guide vanes 0120 are distributed in an array along the gradual size direction of the guide chamber 0112, the guide vanes 0120 are respectively connected with the front wall and the rear wall of the guide chamber 0112, and the flow cross section of any guide flow channel increases gradually from the guide input end 0111 to the guide output end 0113. In other words, the plurality of flow guiding channels are sequentially adjacent to each other along the gradual size direction of the flow guiding cavity 0112. The gradual change of the size of the flow guiding cavity 0112 refers to the size that causes the flow cross section to increase gradually from the flow guiding input end 0111 to the flow guiding output end 0113. For example, in the flat cavity configuration described above, the graded dimension of the baffle cavity 0112 is its width.

The array rule of the guide vanes 0120 is determined according to the specific structure of the guide cavity 0112, so that the aim of reducing the turbulence of source gas is fulfilled. Illustratively, the plurality of guide vanes 0120 have the same included angle of distribution therebetween. In other words, the guide vanes 0120 are uniformly distributed along the same distribution arc. In the flat cavity structure with the symmetrical structure, the circle center of the distribution circular arc is positioned on the symmetrical axis of the flat cavity structure. Further, the normal line of the plane where the distribution circular arc is located is along the thickness direction of the flat cavity structure.

The plurality of guide vanes 0120 form a circular arc distribution structure at one end of the guide vanes close to the guide input end 0111, so that the input end of the guide flow channel is smoother, the obstruction and loss during flow division are further reduced, and the turbulence is further reduced.

Illustratively, the guide vane 0120 and a side wall surface of the guide cavity 0112 closest to the guide vane have consistent variation trend, so that the surface of each guide flow channel is smoother, and the smooth flow of the split fluid is ensured. For example, in a flat cavity configuration with curved side walls, the guide vane 0120 has an arc surface, and the undulation rule of the arc surface is consistent with the side wall of the guide cavity 0112 on the same side.

It should be noted that the shapes of the diversion input 0111 and the diversion output 0113 are various, and generally adapt to the shape of the external element connected with them. Illustratively, the deflector input end 0111 has a circular arc shape and has a concentric relationship with a circular arc distribution structure formed by arranging the ends of the deflector blades 0120. Referring to fig. 5-6 in combination, another exemplary embodiment of the baffle input 0111 may be a conduit extending axially along the baffle chamber 0112.

Additionally, the deflector housing 0110 may take on a variety of shapes. Illustratively, the baffle housing 0110 has a thin-walled housing structure that conforms to the shape of the baffle chamber 0112. In this configuration, the size of the deflector housing 0110 is relatively compact, while the dead weight is effectively reduced.

Illustratively, the diverter 0100 and the diverter 0200 have uniform thickness dimensions to ensure that the fluid remains substantially smooth in the thickness direction, thereby substantially uniform distribution across the width of the shielding gas during delivery, and ensuring a uniform purge.

Referring to fig. 7-8 in combination, the main body of the shunt output device 0200 includes an output device body 0210, wherein the output device body 0210 has a through-flow chamber 0211 for allowing controlled gas to flow therethrough. It can be understood that the through-flow chamber 0211 penetrates through the output body 0210, and forms an input end and an output end at the openings of the two ends.

Wherein, the through-flow cavity 0211 has a non-zero included angle between the input end (i.e. the split input end) and the output end (i.e. the split output end) to realize the direction conversion of the controlled gas. The magnitude of the non-zero included angle is dependent upon the specific steering requirements, and illustratively the included angle between the split input and split output is a right angle.

A flow dividing grill 0220 having a plurality of flow dividing grills 0223 is provided inside the flow passing chamber 0211 for realizing the division of the controlled gas. The through-flow grid 0223 extends along the flow direction of the controlled gas, and keeps both ends penetrating. When the controlled gas encounters the flow dividing grids 0220, the controlled gas is divided by the flow dividing grids 0223 to form a plurality of flow dividing bodies, and flow dividing is achieved. Any split flow is constrained by the flow grid 0223 where it is located, further concentrating to reduce turbulence, enhancing the degree of controlled gas control to obtain shielding gas.

The flow-dividing grill 0220 has a plurality of structural manners, and the flow-dividing grill 0220 includes lateral grills 0221 and longitudinal grills 0222, as an example. The transverse bars 0221 and the longitudinal bars 0222 are staggered, so that a plurality of through-flow grids 0223 are formed. It is understood that the number of the transverse bars 0221 and the number of the longitudinal bars 0222 may be one to plural, and respectively abut against the side walls of the through-flow cavities 0211 to form a plurality of rows of through-flow grids 0223.

Illustratively, the output end of the flow-splitting grille 0220 is located at the flow-splitting output end of the flow-through cavity 0211. In other words, the output end of the shunt grid is the shunt output end. The split flow formed in each through-flow grid 0223 by splitting through the split-flow grid 0220 is directly output without being intersected, so that the shielding gas output by the split-flow output device 0200 is split-flow gas, and has ideal turbulence and control degree.

Illustratively, the through-flow grids 0223 have a parallel relationship, so that the flow directions of the split fluid are guaranteed to be strictly consistent, and ideal purging and protecting of the target area are achieved. In one example, the transverse webs 0221 have a parallel relationship with each other. In another example, longitudinal webs 0222 have a parallel relationship with each other.

Exemplarily, the through-flow lumen 0211 has a flat curved lumen configuration. The width dimension of the flat curved cavity is larger than the thickness dimension, and the thickness dimension (i.e. the distance between the front wall and the rear wall of the output device body 0210) is smaller, so that the through-flow section is in a long and narrow profile. Meanwhile, the length dimension of the flat bending cavity structure is bent along the thickness direction of the flat bending cavity structure, so that the direction change of controlled gas is realized.

Under the structure, the purging range of the shielding gas output by the through-flow cavity 0211 has stronger controllability. The shielding gas output by the shunt output device 0200 is concentrated in the required protection and cleaning range, and the protection effect is concentrated and the diffusion of pollutants is avoided.

The flat curved cavity is illustratively rounded at the curve. In other words, the flat curved cavity has a circular arc curvature, and performs a better guiding function on the controlled gas, so as to avoid impact influence and keep the turbulence of the shielding gas within a preset range.

Illustratively, a plurality of splitter blades are disposed within the plenum 0211, the splitter blades extending from a splitter input to an input of the splitter grille 0220, the plenum 0211 being divided into a plurality of flow-directing channels by the splitter blades. Illustratively, in applications where the through-flow lumen 0211 has a flat lumen configuration, the splitter blades are arrayed parallel to one another along the width of the flat lumen configuration. In this configuration, the controlled gas inputted from the split input terminal is split secondarily, further enhancing the splitting effect. It is understood that any flow guide channel may correspond to the plurality of flow through grids 0223 to achieve secondary flow splitting.

Referring to fig. 9 to 10 in combination, the gas input module P (a) further includes a fluid mixer 0300 disposed at the front end of the flow-guiding converter 0100, wherein the fluid mixer 0300 is used for uniformly mixing the source gas to obtain a mixed gas, and the flow-guiding converter 0100 reduces the turbulence of the mixed gas to a preset range to obtain a controlled gas. Here, the source gas in the aforementioned flow-guiding converter 0100 is a mixed gas.

The main body of the fluid mixer 0300 comprises a mixer housing 0310, and a mixing chamber 0314 is provided in the mixer housing 0310, which is the main place for mixing the source gases. The mixer housing 0310 includes a front wall 0311, a rear wall 0312 and a peripheral wall 0313, the front wall 0311 and the rear wall 0312 being disposed opposite to each other and connected by the peripheral wall 0313, and the three surrounding a mixing chamber 0314.

A fluid inlet 0320 is provided in the front wall 0311 to feed source gases into the mixing chamber 0314. Since the front wall 0311 is opposite to the rear wall 0312, the fluid input end 0320 is opposite to the rear wall 0312, so that the source gas input from the fluid input end 0320 impacts the rear wall 0312, thereby increasing the velocity gradient of the source gas or causing the source gas to form turbulence, and simultaneously, the flow direction is changed. Thus, the source gases are mixed in the mixing chamber 0314 in a split manner, and have a strong vortex caused by turbulence, so that the source gases are sufficiently mixed, and the molecular distribution of the source gases is ensured to be more uniform, thereby forming a mixed gas.

The angle between the fluid input end 0320 and the rear wall 0312 depends on the practical application environment, and the extending direction of the fluid input end 0320 and the rear wall 0312 are perpendicular to each other, so that the input source gas vertically impinges on the surface of the rear wall 0312, and the turbulence is further increased to enhance the mixing effect.

Wherein, the peripheral wall 0313 is provided with a fluid output end 0330 for outputting a mixed gas. Wherein the fluid input 0320 is disposed perpendicular to the fluid output 0330. Here, the direction of the fluid output end 0330 is relatively close to the surface direction of the rear wall 0312, so that the flow of the mixed gas after the mixed turning is smooth during the output, and the mixed gas always has a uniform molecular structure.

Illustratively, fluid input 0320 has a cylindrical nozzle configuration for increasing the negative pressure of the source gas and injecting the source gas onto rear wall 0312. In other words, the fluid input 0320 has a cylindrical configuration, accelerating the source gas under the Bernoulli effect. In combination with the area difference between the fluid input end 0320 and the mixing chamber 0314, a better jet flow effect occurs when the source gas leaves the fluid input end 0320, and the turbulence after impacting the rear wall 0312 is further improved, so as to promote the mixing effect of the source gas.

Illustratively, mixing chamber 0314 has a cylindrical cavity structure with fluid input 0320 disposed coaxially with the cylindrical cavity structure. In other words, the front wall 0311 and the rear wall 0312 are kept parallel and perpendicular to the peripheral wall 0313, respectively, and the inner surface of the peripheral wall 0313 is a cylindrical surface. In coaxial relationship, the impingement point of the source gas on the rear wall 0312 is centered. The resulting mixed gas with a certain turbulence after impact leaves the mixing chamber 0314 through the fluid outlet 0330 towards the component of the fluid outlet 0330; the other components are rotated at a high speed by the action of the inner surface of the peripheral wall 0313, and are further vortex-mixed and output through the fluid output end 0330. The cylindrical cavity structure has special cyclotron effect, and the turbulence of the mixed gas is improved.

Illustratively, the mixing chamber 0314 has a flat cavity structure with a thickness that is the spacing between the front wall 0311 and the rear wall 0312. The thickness dimension of the flat cavity structure is smaller, so that the distance between the fluid output end 0330 and the rear wall 0312 is smaller, the ideal speed of the sprayed source gas before impact is ensured to be kept all the time, no attenuation occurs, and a better impact mixing effect is obtained. Further, for the mixing chamber 0314 with a flat cylindrical cavity structure, the mixed gas flows more intensively, and the cyclotron effect is more remarkable.

Illustratively, the direction of extension of the fluid input 0320 coincides with the thickness direction of the flat cavity structure. Wherein the extension direction of the fluid input end 0320 is consistent with the flow direction of the source gas. Under the aforementioned configuration, the source gas vertically impacts the rear wall 0312 in the forward direction, and the energy is more concentrated.

As described above, the fluid output end 0330 penetrates the inside and outside of the peripheral wall 0313, so that the mixed gas in the mixing chamber 0314 is discharged. Illustratively, the fluid output 0330 includes a plurality of serially disposed flow dividing gate holes 0331, with any one of the flow dividing gate holes 0331 being perpendicular to the fluid input 0320. The flow dividing grid holes 0331 are used for realizing the flow division of the mixed gas, gathering the mixed gas, reducing the turbulence and enhancing the control degree of the mixed gas.

Illustratively, the flow dividing gate holes 0331 are distributed along the outer contour array of the peripheral wall 0313 within a range of distribution central angles, and the arc subtended by the distribution central angles is centered on the center of the mixing chamber 0314. For example, in the above cylindrical cavity structure, the flow dividing grid holes 0331 are distributed along the outer circumference arc of the peripheral wall 0313, so that the flow dividing effect is more ideal, the flow dividing hierarchical structure is remarkable, and the turbulence of the mixed gas is further reduced.

The range of the distribution central angle depends on the actual need, and the angle range of the distribution central angle is 70-90 degrees exemplarily. In this range, the distribution grid holes 0331 act at different positions in sequence, and the distribution hierarchical structure is ideal.

Illustratively, mounting ears 0340 for external connection are provided on the peripheral wall 0313 of the mixer housing 0310. The mounting lug 0340 is used for being connected and fixed with an external element, so that the fluid mixer 0300 and the external element are tightly mounted, and the connection tightness of the flow channel is ensured. In one embodiment, the number of mounting ears 0340 is 2 and symmetrically disposed on either side of the fluid output 0330. Thus, the mixed gas of the fluid output end 0330 can be uniformly output to the external element, and the flow channel is smooth and smooth.

Illustratively, the output end of the fluid mixer 0300 (i.e., the fluid output end 0330) is directly abutted with the diversion input end 0111, and a conduit is not required to be arranged, so that the state stability of the mixed gas is ensured. In other words, the fluid output 0330 and the fluid guide input 0111 have matching shapes, so as to realize a close fitting connection.

Illustratively, the fluid mixer 0300, the deflector switch 0100, and the shunt output 0200 have uniform thickness dimensions to ensure that the fluid remains substantially smooth in the thickness direction, thereby substantially uniform distribution across the width of the shielding gas during output, ensuring uniform purging.

Example 3

On the basis of embodiment 1 or 2, this embodiment further discloses a gas output module P (b). The gas output module P (b) is illustratively configured to pump out the shielding gas at the end of the shielding gas ribbon and reduce the turbulence of the shielding gas being exhausted. For example, the gas output module P (b) is connected to a pumping device (such as an air pump, etc.), and actively pumps out the shielding gas. Meanwhile, the gas output module P (b) can also reduce the turbulence of the shielding gas at the tail end of the shielding gas belt, avoid the occurrence of vortex in the discharging process of the shielding gas, and further ensure the stability of the turbulence of the shielding gas belt in the processing chamber. It should be appreciated that the turbulence of the shielding gas exhaust process does not directly affect the turbulence of the shielding gas within the process chamber, but rather serves an improvement.

Referring to fig. 11, the gas output module P (b) exemplarily includes a gas remover 1100, and the gas remover 1100 includes a drain housing 1110. The exhaust casing 1110 has an exhaust input 1111, an exhaust chamber 1112, and an exhaust output 1113, which are sequentially connected to form a channel for the flow of source gas. Wherein the junction of the exhaust input 1111, the exhaust chamber 1112 and the exhaust output 1113 is smoothly transited, and the wall surface of the exhaust chamber 1112 is smoothly continuous, so as to reduce turbulence and reduce vortex phenomenon.

Illustratively, the exhaust input 1111 is provided with an exhaust barrier 1111a for diverting and slowing down the exhaust shielding gas to reduce the turbulence of the shielding gas. Wherein the through-flow cross section of the exhaust casing 1110 decreases from the exhaust input 1111 to the exhaust output 1113, so that the shielding gas gradually converges for discharge.

Illustratively, the exhaust inlet 1111 is disposed perpendicular to the exhaust outlet 1113 to allow the shielding gas to be changed in 90 ° direction during the exhaust process, and the gas remover 1100 may be more compactly disposed at the side of the processing chamber to compress the space occupation.

The drainage lumens 1112 are of a wide variety of configurations, and the drainage lumens 1112 have a flat lumen configuration, for example. The thickness dimension of the flat cavity configuration (i.e., the distance between the front and rear walls of the drainage housing 1110) is small, resulting in a flow cross-section having a narrow profile. With this configuration, the flow range and the flow direction of the controlled gas output from the discharge chamber 1112 are highly controllable.

The width of the flat cavity structure increases gradually from the drainage input end 1111 to the drainage output end 1113, so that the increasing purpose of the through flow section is achieved, and the drainage output end 1113 forms a flat port structure. Similarly, the flat-mouth structure has a smaller width dimension, forming an elongated output face. Exemplary elongated output surfaces include elongated oval, elongated rectangular, and the like.

Wherein, the appearance of flat cavity structure is various. The flat cavity configuration has a triangular projection profile in its thickness direction, for example. In other words, the cross section taken by a plane normal to the thickness direction of the flat cavity structure has a triangular shape. The base of the triangle is located at the drain output 1113 and the vertex opposite the base is located at the drain input 1111.

The flat cavity structure has a symmetrical structure along the width direction, and a drainage input 1111 and a drainage output 1113 are formed at two ends of the symmetrical axis. In other words, the flat cavity configuration, the exhaust input 1111, and the exhaust output 1113 have a central coaxial relationship. For example, in the case of the aforementioned triangular projection profile, the triangle is an isosceles triangle.

Illustratively, a plurality of drainage vanes 1120 are disposed in the drainage chamber 1112, wherein the drainage vanes 1120 extend from the drainage input 1111 to the drainage output 1113, and the drainage chamber 1112 is divided into a plurality of flow channels by the drainage vanes 1120. The shielding gas enters the diversion flow passage to form a plurality of diversion bodies to realize diversion. Any split fluid is constrained by the flow-guiding flow channel in which it is located, further concentrated to reduce turbulence, and converged at the discharge output 1113, thereby enhancing the degree of controllability of the source gas. Wherein the drainage vane 1120 can be made of different materials such as metal or plastic, and has a thin-walled strip structure.

Example 4

Referring to fig. 1, the present embodiment further discloses an auxiliary input module P (c) based on any one of embodiments 1-3. The shielding gas supply system 1000 further includes an auxiliary input module P (c) for inputting an auxiliary gas, wherein the auxiliary gas flows in a directional manner to form an auxiliary gas band, the auxiliary gas band and the shielding gas band are distributed in an inner layer in the target area, and a flow direction of the auxiliary gas and the shielding gas has a non-zero included angle. The auxiliary gas is the same as the protective gas in composition, depending on the actual application.

It will be appreciated that the auxiliary input module P (c) is used to clean the upper region of the shielding gas band that is difficult to cover, achieving full coverage of the target region. Through the sweeping of the upper area, the consistency of a laser light path can be further ensured, the optical surface of the laser source can not be accumulated with pollutants, and the cleaning of the laser source is ensured to prolong the service life.

The assist gas is illustratively reversed in flow direction from the shielding gas and merges into the shielding gas strip with the reversal of flow direction at the end of the assist gas strip. In other words, after the purging of the upper region is completed, the assist gas flows in the reverse direction and is introduced into the shield gas zone, and is discharged together with the shield gas zone through the gas output module P (b), thereby simplifying the structure of the shield gas supply system 1000. Specifically, the flow direction of the assist gas may be as shown by Z in fig. 1.

Referring to fig. 12, the auxiliary input module P (c) includes an auxiliary input device 2100, and the auxiliary input device 2100 has an auxiliary input housing 2110 and an auxiliary input 2120 and an auxiliary output 2130 both disposed on the auxiliary input housing 2110. The auxiliary input 2100 has a variety of structures, such that the auxiliary output 2130 and the drain input 1111 have different structural dimensions, such as the same, long and narrow, and short. The auxiliary input device 2100 may take the form of the gas input module P (a), or may take the form of the flow-guiding converter 0100 alone, or may take other forms.

Further, the auxiliary input module P (c) is configured to reduce turbulence of the auxiliary gas, so that the turbulence of the auxiliary gas is within a corresponding preset range, and the turbulence vortex of the auxiliary gas is located in the shielding gas zone.

Exemplarily, the auxiliary input 2100 is disposed in the same side as the gas remover 1100, and the auxiliary input 2100 is located at an upper end of the gas remover 1100. Further, a baffle plate is provided on the side close to the gas input module P (a) in the target area, and the direction of the assist gas is reversed.

Any particular values in all examples shown and described herein are to be construed as merely illustrative and not a limitation, and thus other examples of exemplary embodiments may have different values.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

The above examples merely represent a few embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the present invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of the invention should be assessed as that of the appended claims.

Claims

1. The shielding gas supply system is characterized by comprising a gas input module and a gas output module which are oppositely arranged in a target area, wherein shielding gas flows from the gas input module to the gas output module to form a shielding gas zone, and the turbulence degree of the shielding gas is in a preset range so that turbulent eddies of the shielding gas are all positioned in the shielding gas zone; the gas input module and the gas output module are kept coaxially opposite; the cross-sectional dimension of the shielding gas strip is kept constant along the flow direction of the shielding gas;

the auxiliary input module is used for inputting auxiliary gas, the auxiliary gas flows directionally to form an auxiliary gas zone, the auxiliary gas zone and the protective gas zone are distributed in an inner layer in the target area, and the auxiliary gas and the flow direction of the protective gas have non-zero included angles; the auxiliary gas flows in the opposite direction to the flow direction of the protective gas, and flows into the protective gas zone after reversing the direction at the tail end of the auxiliary gas zone.

2. The shielding gas supply system according to claim 1, wherein a driving pressure is formed between the gas input module and the gas output module, the driving pressure being not less than an atmospheric pressure, and a turbulence of the shielding gas being within the preset range at the driving pressure.

3. The shielding gas supply system of claim 1, wherein the gas input module is configured to introduce a source gas and adjust a turbulence of the source gas to output the shielding gas.

4. A shielding gas supply system according to claim 3, wherein the gas input module comprises:

5. The shielding gas supply system of claim 4, wherein the gas input module further comprises a fluid mixer for achieving uniform mixing of the source gases to obtain a mixed gas, and wherein the flow-directing converter reduces turbulence of the mixed gas to a predetermined range to obtain the controlled gas.

6. The shielding gas supply system of claim 1, wherein the gas output module is configured to pump shielding gas from an end of the shielding gas strip and reduce turbulence of the exhausted shielding gas.