CN108413881A - Thickness detecting method and device and thickness imaging sensor - Google Patents

Thickness detecting method and device and thickness imaging sensor Download PDF

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Publication number
CN108413881A
CN108413881A CN201711326813.XA CN201711326813A CN108413881A CN 108413881 A CN108413881 A CN 108413881A CN 201711326813 A CN201711326813 A CN 201711326813A CN 108413881 A CN108413881 A CN 108413881A
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prime
value
induction electrode
electrode sub
thickness
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CN108413881B (en
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戚务昌
张凯
曲传伟
杜忺峰
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Weihai Hualing Opto Electronics Co Ltd
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Weihai Hualing Opto Electronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of thickness detecting method and device and thickness imaging sensors.Wherein, this method includes:Obtain the value of electrical signals of each induction electrode sub-prime induction determinand in thickness imaging sensor, wherein thickness imaging sensor includes multiple induction electrode sub-primes;Obtain the correction parameter values of each induction electrode sub-prime, wherein the correction parameter values of each induction electrode sub-prime are related to the corresponding sensitivity value of induction electrode sub-prime;The value of electrical signals for incuding determinand to corresponding induction electrode sub-prime by the correction parameter values of each induction electrode sub-prime is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.The present invention solves the larger technical problem of detection error of thickness imaging sensor in the related technology.

Description

Thickness detecting method and device and thickness imaging sensor
Technical field
The present invention relates to field of image sensors, in particular to a kind of thickness detecting method and device and thickness Imaging sensor.
Background technology
Laminar article, such as paper, bill, plastic film, textile fabric on-line continuous thickness measure, in its product Production, in detection process in increasingly consequence.Currently, the Thickness sensitivity technology that every profession and trade uses includes mainly making Sheet type article is tested with technologies such as hall device, reflection-type ultrasonic wave, ultrasonic, the induction, eddy current types of transmission-type Thickness.In addition in paper money discrimination field, currency counting and detecting machine, cleaning-sorting machine, ATM machine are come true to bank note also by the Thickness sensitivity to bank note Puppet is differentiated, and financial field also all uses the detection mode of pinch roller mostly, judges bank note thickness by measuring pinch roller gap Degree.But above-mentioned Thickness sensitivity technology as online measuring technique in use, its detection device volume structure is big, of high cost And the low major defect of precision limits the application of these technologies.
In order to solve the problems, such as detection device volume structure is excessive, of high cost and precision is low etc., a kind of point is developed at present High, small, the contactless thickness imaging sensor of resolution, main includes the public electrode and detecting electrode being oppositely arranged, Wherein, between public electrode and detecting electrode between be divided into the transmission channel of object to be detected, and by being connected with detecting electrode Detection circuit detect electrical signal of reaction of the article to be detected by detecting electrode during transmission channel.Since this is newly developed Thickness imaging sensor detecting electrode detection part be mainly end to end word order Thickness sensitivity chip, because This reduces cost, and can ensure precision while reducing volume, can also be according to the Demand Design test section of precision The number of chips of part.But due to being evenly distributed with the small induction electrode sub-prime of induction field on each Thickness sensitivity chip, The response speed of each induction sub-prime can not possibly be completely the same, and there is systematic error, sensitivity may have prodigious difference, because This, when thickness imaging sensor is when detecting uniform thickness object, the heterogeneity of each sub-prime response speed will have a direct impact on The quality of the acquired image of thickness imaging sensor.
For the technical problem that the detection error of thickness imaging sensor in the related technology is larger, not yet propose have at present The solution of effect.
Invention content
An embodiment of the present invention provides a kind of thickness detecting method and device and thickness imaging sensors, at least to solve The certainly larger technical problem of the detection error of thickness imaging sensor in the related technology.
One side according to the ... of the embodiment of the present invention, provides a kind of thickness detecting method, and this method includes:Obtain thickness The value of electrical signals of each induction electrode sub-prime induction determinand in imaging sensor, wherein thickness imaging sensor includes multiple Induction electrode sub-prime;Obtain the correction parameter values of each induction electrode sub-prime, wherein the correction parameter of each induction electrode sub-prime Value is related to the corresponding sensitivity value of induction electrode sub-prime;By the correction parameter values of each induction electrode sub-prime to corresponding induced electricity The value of electrical signals of pole sub-prime induction determinand is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
Further, the correction parameter values for obtaining each induction electrode sub-prime include:Obtain each induction electrode sub-prime sense Answer the first value of electrical signals that the sample of first thickness obtains;The sample for obtaining each induction electrode sub-prime induction second thickness obtains The second value of electrical signals;The difference for calculating the first value of electrical signals and the second value of electrical signals of each induction electrode sub-prime, obtains each The sensitivity value of induction electrode sub-prime;The sensitivity value of multiple induction electrode sub-primes is normalized, each induction electrode element is obtained The correction parameter values of son.
Further, to the sensitivity value of multiple induction electrode sub-primes be normalized including:By normalizing numerical value to more The sensitivity of a induction electrode sub-prime is normalized, wherein normalization numerical value is in the sensitivity value of multiple induction electrode sub-primes Maximum value or default value.
Further, obtaining the value of electrical signals that the sample of each induction electrode sub-prime induction targets thickness obtains includes:It is logical Cross the sample that thickness imaging sensor detects multiple target thickness;Determine each induction targets thickness of each induction electrode sub-prime The value of electrical signals that sample obtains obtains multiple value of electrical signals of each induction electrode sub-prime;Calculate each induction electrode sub-prime The average value of multiple value of electrical signals obtains the value of electrical signals of the sample of each induction electrode sub-prime induction targets thickness.
Further, determinand is incuded to corresponding induction electrode sub-prime by the correction parameter values of each induction electrode sub-prime Value of electrical signals be corrected including:The electric signal of each induction electrode sub-prime is swept in sky according to thickness imaging sensor Value determines that the sky of corresponding induction electrode sub-prime sweeps value of electrical signals;By each induction electrode sub-prime incude determinand value of electrical signals with Sky is swept value of electrical signals and is subtracted each other, and the value of electrical signals to be corrected of each induction electrode sub-prime is obtained;Pass through each induction electrode sub-prime Correction parameter values are corrected the value of electrical signals to be corrected of corresponding induction electrode sub-prime, obtain the thickness of each induction electrode sub-prime Spend pixel value.
Another aspect according to the ... of the embodiment of the present invention additionally provides a kind of thickness detection apparatus, the thickness detection apparatus packet It includes:First acquisition unit incudes the value of electrical signals of determinand for obtaining each induction electrode sub-prime in thickness imaging sensor, Wherein, thickness imaging sensor includes multiple induction electrode sub-primes;Second acquisition unit, for obtaining each induction electrode sub-prime Correction parameter values, wherein the correction parameter values of each induction electrode sub-prime are related with the correspondence sensitivity value of induction electrode sub-prime; Unit is corrected, incudes the electricity of determinand to corresponding induction electrode sub-prime for the correction parameter values by each induction electrode sub-prime Signal value is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
Further, second acquisition unit includes:First acquisition module, for obtaining each induction electrode sub-prime induction the The first value of electrical signals that the sample of one thickness obtains;Second acquisition module, for obtaining each induction electrode sub-prime induction second The second value of electrical signals that the sample of thickness obtains;First computing module, the first telecommunications for calculating each induction electrode sub-prime Number value and the second value of electrical signals difference, obtain the sensitivity value of each induction electrode sub-prime;Second computing module, for multiple senses It answers the sensitivity value of electrode sub-prime to be normalized, obtains the correction parameter values of each induction electrode sub-prime.
Further, the second computing module includes:Computational submodule, for by normalizing numerical value to multiple induction electrodes The sensitivity of sub-prime is normalized, wherein normalization numerical value be multiple induction electrode sub-primes sensitivity value in maximum value or Default value.
Further, the first acquisition module and the second acquisition module obtain each induction electrode sub-prime induction targets thickness The value of electrical signals that sample obtains includes:The sample of multiple target thickness is detected by thickness imaging sensor;Determine each induction The value of electrical signals that the sample of each induction targets thickness of electrode sub-prime obtains, obtains multiple electric signals of each induction electrode sub-prime Value;It is thick to obtain each induction electrode sub-prime induction targets for the average value for calculating multiple value of electrical signals of each induction electrode sub-prime The value of electrical signals of the sample of degree.
Further, correction unit includes:Third acquisition module, for being swept in sky according to thickness imaging sensor The value of electrical signals of each induction electrode sub-prime determines that the sky of corresponding induction electrode sub-prime sweeps value of electrical signals;Third computing module is used Value of electrical signals is swept with sky to subtract each other, obtain each induction electrode element in the value of electrical signals that each induction electrode sub-prime is incuded to determinand The value of electrical signals to be corrected of son;Correction module, for the correction parameter values by each induction electrode sub-prime to corresponding induced electricity The value of electrical signals to be corrected of pole sub-prime is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
Another aspect according to the ... of the embodiment of the present invention additionally provides a kind of thickness imaging sensor, the thickness image sensing Device includes:Detection part includes the public electrode and detecting electrode of relative spacing setting, shape between public electrode and detecting electrode At the transmission channel of determinand, detecting electrode includes at least one detecting electrode chip being arranged in order along transmission channel, each At least one induction electrode sub-prime is provided on detecting electrode chip;Memory, the school for storing each induction electrode sub-prime Positive parameter value, wherein the correction parameter values of each induction electrode sub-prime are related to the corresponding sensitivity value of induction electrode sub-prime;Processing Device is connect with detection part and memory, for the correction parameter values by each induction electrode sub-prime to corresponding induced electricity The value of electrical signals of pole sub-prime induction is corrected, and obtains thickness pixel value.
Further, which further includes:Sampling module is connected between detection part and processor, Value of electrical signals for being sensed to each induction electrode sub-prime is sampled and is sent to processor.
Further, memory is additionally operable to store the sky of each induction electrode sub-prime and sweeps value of electrical signals, wherein sky sweeps telecommunications Number value is the value of electrical signals that thickness imaging sensor sweeps corresponding induction electrode sub-prime in sky, and processor is additionally operable to will be each The value of electrical signals of induction electrode sub-prime induction determinand is swept value of electrical signals with sky and is subtracted each other, and obtain each induction electrode sub-prime waits for school Electrical signals value, and by the correction parameter values of each induction electrode sub-prime to the electric signal to be corrected of corresponding induction electrode sub-prime Value is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
In embodiments of the present invention, incude determinand by obtaining each induction electrode sub-prime in thickness imaging sensor Value of electrical signals, wherein thickness imaging sensor includes multiple induction electrode sub-primes;Obtain the correction ginseng of each induction electrode sub-prime Numerical value, wherein the correction parameter values of each induction electrode sub-prime are related to the corresponding sensitivity value of induction electrode sub-prime;By each The value of electrical signals that the correction parameter values of induction electrode sub-prime incude determinand to corresponding induction electrode sub-prime is corrected, and is obtained every The thickness pixel value of a induction electrode sub-prime solves the larger skill of the detection error of thickness imaging sensor in the related technology Art problem, and then realize the technique effect for the detection error that can reduce thickness imaging sensor.
Description of the drawings
Attached drawing described herein is used to provide further understanding of the present invention, and is constituted part of this application, this hair Bright illustrative embodiments and their description are not constituted improper limitations of the present invention for explaining the present invention.In the accompanying drawings:
Fig. 1 is a kind of flow chart of optional thickness detecting method according to the ... of the embodiment of the present invention;
Fig. 2 is the schematic diagram for the sample that a kind of optional thickness detecting method according to the ... of the embodiment of the present invention uses;
Fig. 3 is the flow chart of another optional thickness detecting method according to the ... of the embodiment of the present invention;
Fig. 4 is the flow chart of another optional thickness detecting method according to the ... of the embodiment of the present invention;
Fig. 5 is the flow chart of another optional thickness detecting method according to the ... of the embodiment of the present invention;
Fig. 6 is the flow chart of another optional thickness detecting method according to the ... of the embodiment of the present invention;
Fig. 7 is a kind of schematic diagram of optional thickness detection apparatus according to the ... of the embodiment of the present invention;
Fig. 8 is a kind of schematic diagram of optional thickness imaging sensor according to the ... of the embodiment of the present invention;
Fig. 9 is the schematic diagram of another optional thickness imaging sensor according to the ... of the embodiment of the present invention.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects It encloses.
It should be noted that term " first " in description and claims of this specification and above-mentioned attached drawing, " Two " etc. be for distinguishing similar object, without being used to describe specific sequence or precedence.It should be appreciated that using in this way Data can be interchanged in the appropriate case, so as to the embodiment of the present invention described herein can in addition to illustrating herein or Sequence other than those of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that cover It includes to be not necessarily limited to for example, containing the process of series of steps or unit, method, system, product or equipment to cover non-exclusive Those of clearly list step or unit, but may include not listing clearly or for these processes, method, product Or the other steps or unit that equipment is intrinsic.
This application provides a kind of embodiments of thickness detecting method.
Fig. 1 is a kind of flow chart of optional thickness detecting method according to the ... of the embodiment of the present invention, as shown in Figure 1, the party Method includes the following steps:
Step S101 obtains the value of electrical signals of each induction electrode sub-prime induction determinand in thickness imaging sensor, In, thickness imaging sensor includes multiple induction electrode sub-primes;
Step S102 obtains the correction parameter values of each induction electrode sub-prime, wherein the correction of each induction electrode sub-prime Parameter value is related to the corresponding sensitivity value of induction electrode sub-prime;
Step S103 incudes determinand by the correction parameter values of each induction electrode sub-prime to corresponding induction electrode sub-prime Value of electrical signals be corrected, obtain the thickness pixel value of each induction electrode sub-prime.
Induction electrode sub-prime also referred to as incudes sub-prime, sub-prime, for incuding determinand and generating electric signal, value of electrical signals Size it is related to the thickness of determinand.
In the scheme that step S102 is provided, the step of correction parameter values for obtaining each induction electrode sub-prime, includes:It obtains The first value of electrical signals for taking the sample of each induction electrode sub-prime induction first thickness to obtain;Obtain each induction electrode sub-prime sense Answer the second value of electrical signals that the sample of second thickness obtains;Calculate the first value of electrical signals and the second electricity of each induction electrode sub-prime The difference of signal value obtains the sensitivity value of each induction electrode sub-prime;The sensitivity value of multiple induction electrode sub-primes is normalized, Obtain the correction parameter values of each induction electrode sub-prime.
It should be noted that the first value of electrical signals of each induction electrode sub-prime can be corresponding induction electrode sub-prime pair the Second value of electrical signals of the mean value for the value of electrical signals that the sample of one thickness is repeatedly incuded, each induction electrode sub-prime can be The mean value for the value of electrical signals that corresponding induction electrode sub-prime repeatedly incudes the sample of second thickness.It is more than the in first thickness In the case of two thickness, the difference of the first value of electrical signals and the second value of electrical signals that calculate each induction electrode sub-prime is to calculate each First value of electrical signals of induction electrode sub-prime subtracts the second value of electrical signals.In the case where second thickness is more than first thickness, meter The difference of the first value of electrical signals and the second value of electrical signals of calculating each induction electrode sub-prime is calculate each induction electrode sub-prime the Two value of electrical signals subtract the first value of electrical signals.
Wherein, the sensitivity value of multiple induction electrode sub-primes is normalized and may include:By normalizing numerical value to more The sensitivity of a induction electrode sub-prime is normalized, wherein normalization numerical value is in the sensitivity value of multiple induction electrode sub-primes Maximum value or default value.
Optionally, obtaining the value of electrical signals that the sample of each induction electrode sub-prime induction targets thickness obtains may include: The sample of multiple target thickness is detected by thickness imaging sensor;Determine each induction targets thickness of each induction electrode sub-prime The obtained value of electrical signals of sample, obtain multiple value of electrical signals of each induction electrode sub-prime;Calculate each induction electrode sub-prime Multiple value of electrical signals average value, obtain the value of electrical signals of the sample of each induction electrode sub-prime induction targets thickness.
In the scheme that step S103 is provided, by the correction parameter values of each induction electrode sub-prime to corresponding induction electrode Sub-prime induction determinand value of electrical signals be corrected including:According to thickness imaging sensor each induced electricity is swept in sky The value of electrical signals of pole sub-prime determines that the sky of corresponding induction electrode sub-prime sweeps value of electrical signals, specifically, each induction electrode sub-prime Sky sweeps the average value that value of electrical signals can be the value of electrical signals swept by multiple sky.The induction of each induction electrode sub-prime is waited for The value of electrical signals of survey object is swept value of electrical signals with sky and is subtracted each other, and the value of electrical signals to be corrected of each induction electrode sub-prime is obtained;By every The correction parameter values of a induction electrode sub-prime are corrected the value of electrical signals to be corrected of corresponding induction electrode sub-prime, obtain each The thickness pixel value of induction electrode sub-prime.
After obtaining thickness pixel value by step S103, it is thick that image data display can be used as by thickness pixel value Image is spent, thickness image can show the thickness of determinand according to the size of pixel value, intuitively show the thickness of determinand Degree variation.
The thickness detecting method provided the embodiment with reference to a kind of specific implementation mode is further explained It is described as follows:
A kind of thickness image sensor data correction specimen page as shown in Figure 2 is made for the sample as two thickness, The specimen page specifically has following feature and effect:
(1) the experiment paper of uniform thickness is used, so that the consistent induction electrode sub-prime of sensitivity can detect obtain in theory Obtain identical electrical signal of reaction;
(2) n standard rubber band in homogeneous thickness is pasted at interval on experiment paper, and the thickness of every adhesive tape is all different;
It (3), or even should not since to treat the testing requirements of adhesion glue band or foreign matter on detection article relatively low for the occasion having Adhesive tape foreign bodies detection is sought, breakage is only detected, as textile fabric detects;Some detection occasions this is required it is relatively high, such as bill, paper Coin detection etc., examination criteria require to detect a few micrometers of rank adhesive tape foreign matters;The specimen page is directed to different detection demands, It is corrected using different adhesive tapes.
Using the adhesive tape of different-thickness, different correction coefficient (correction parameter values) can be obtained, the adhesive tape of use is thinner, obtains The correction coefficient arrived is bigger.
The thickness detecting method that the embodiment provides is as shown in Figures 3 to 6, specifically:
As shown in figure 3, in step s 201, acquiring M rows respectively and correcting image of the specimen page without adhesive tape (first thickness) region Data (the first value of electrical signals) Vn(i, j) and image data (the second value of electrical signals) V for having adhesive tape (second thickness) regiont(i, J), wherein i=1,2,3 ... M, j=1,2,3 ... N, i are the line number of image data, and j is the columns of image data.N is thickness The number for the induction electrode sub-prime that degree imaging sensor includes.In order to eliminate the influence of random noise, it is proposed that the value of M is larger Some, for example, taking M >=4.
As shown in figure 3, in step S202, sky is carried out by thickness imaging sensor and is swept, wherein it refers to that transmission is logical that sky, which is swept, There is no any object to be detected in road, obtains thickness imaging sensor and sweep each induction electrode sub-prime scanning M in sky The capable empty total number obtains j-th of induction electrode sub-prime and is scanning the empty total number of the i-th row according to V according to (sky sweeps value of electrical signals)d(i, j), Wherein, i=1,2,3 ... M, j=1,2,3 ... N.The sky for calculating each induction electrode sub-prime sweeps data mean value AveVd(j)。
As shown in figure 3, in step S203, the correction coefficient K of each induction electrode sub-prime of calculated thickness imaging sensor (j), specifically, as shown in figure 4, step S203 includes:
Step S301, calculate separately each sub-prime without adhesive tape image data Vn(i, j), the V for having adhesive tape image datat(i, J) mean value AveVn(j)、AveVt(j);To there is adhesive tape mean value to be made the difference with no tape data mean value, obtain sensitivity AveDev (j)= AveVt(j)-AveVn(j), and the maximum value AveDev (q) of the difference is found, wherein q indicates that corresponding induced electricity occurs for maximum value Columns residing for the sub-prime of pole;
Step S302 passes through the correction coefficient K of each induction electrode sub-prime of following formula calculated thickness imaging sensor (j):K (j)=AveDev (q)/AveDev (j), or, K (j)=predetermined target value/AveDev (j).Wherein, AveDev (q) is The maximum value of all induction electrode sub-prime sensitivity values, when using formula K (j)=AveDev (q)/AveDev (j), meaning is The sensitivity value of each induction electrode sub-prime of thickness imaging sensor is normalized according to maximum sensitivity value, q points correspond to sub-prime Sensitivity do not adjust, can directly show the initial data of thickness image.Predetermined target value (default value) can be Value determines according to actual conditions, in thickness detecting method provided in an embodiment of the present invention, image data can be gray-scale map Picture, image light and shade information is shown by the size of gray value, and to 8 gray level images, pixel value is exactly its ash Angle value, tonal range of the gray value from black to white are the range of (0-255) and predetermined target value.In general, goal-selling Value is according under determining public electrode pulse voltage, and detecting certain thickness standard specimen page, (thickness of standard specimen page can be corresponding It is larger) when choose a Suitable assays result desired value, can also be according to actual conditions, by goal-selling setting value For maximum value 255, but in order to ensure certain Thickness sensitivity surplus, the numerical value close to 255 is generally taken, for example, 217.It is adopting When being normalized with predetermined target value, normalized meaning is the sense to each induction electrode sub-prime of thickness imaging sensor Angle value is normalized according to predetermined target value, and thickness imaging sensor each incudes the sensitivity of sub-prime and can be adjusted at this time It is whole.
The thickness detecting method that the embodiment provides by correcting the adhesive tape of different-thickness on specimen page when being corrected, meeting Obtain different correction coefficient.For example, passing through thickness on correction specimen page as shown in Figure 2 different standard rubber band 1 and standard rubber It is different as the correction coefficient for thering is adhesive tape region to obtain with 2.Tape thickness on the correction specimen page of use is thinner, obtains Correction coefficient will be bigger.Illustrating by taking p-th of induction sub-prime of thickness imaging sensor as an example, the correction adhesive tape of use is thinner, Its obtained AveDev (p) will be smaller.According to correction coefficient K (j) calculation formula it is found that the correction system of the induction sub-prime at this time Number K (p) will be bigger, and Thickness sensitivity will be more sensitive.
As shown in figure 3, after executing step S203, step S204 is executed, according to each induction sub-prime correction coefficient, to obtaining The image data taken is corrected.Specifically, as shown in figure 5, the step of correcting includes:
Step S401, thickness imaging sensor carry out image data acquiring to be corrected, it is assumed that the xth of thickness imaging sensor A collected sample magnitude of induction electrode sub-prime is f (x).
Step S402 calculates Ud(x)=f (x)-AveVd(x), that is, often scanning a line, each induction electrode sub-prime is adopted Sample data will subtract its sky and sweep data mean value, to eliminate corresponding deviation;
Step S403 treats image correcting data according to induction electrode sub-prime columns according to formula F (x)=Ud(x)×K (x) it is corrected, obtains the final pixel data value F (x) after image rectification.
To select predetermined target value as normalizing numerical value, the thickness detecting method calculated thickness of embodiment offer Process as shown in fig. 6, including:
Step S501, the thickness coefficient γ detected according to accepted standard tape thickness D (λ) and predetermined target value calculating= D (λ)/predetermined target value, wherein λ=1,2,3 ... n.
Step S502 calculates specific detectable substance thickness D=γ × F (x) using image data F (x) after correction.
It should be noted that attached drawing flow chart though it is shown that logical order, but in some cases, can be with Shown or described step is executed different from sequence herein.
Present invention also provides a kind of embodiments of thickness detection apparatus.
Fig. 7 is a kind of schematic diagram of optional thickness detection apparatus according to the ... of the embodiment of the present invention, as shown in fig. 7, the dress It sets including first acquisition unit 10, second acquisition unit 20 and correction unit 30, wherein first acquisition unit is for obtaining thickness The value of electrical signals of each induction electrode sub-prime induction determinand in imaging sensor, wherein thickness imaging sensor includes multiple Induction electrode sub-prime;Second acquisition unit is used to obtain the correction parameter values of each induction electrode sub-prime, wherein each induced electricity The correction parameter values of pole sub-prime are related to the corresponding sensitivity value of induction electrode sub-prime;Unit is corrected to be used to pass through each induction electrode The value of electrical signals that the correction parameter values of sub-prime incude determinand to corresponding induction electrode sub-prime is corrected, and obtains each induced electricity The thickness pixel value of pole sub-prime.
As an alternative embodiment, second acquisition unit includes:First acquisition module, for obtaining each induction The first value of electrical signals that the sample of electrode sub-prime induction first thickness obtains;Second acquisition module, for obtaining each induced electricity The second value of electrical signals that the sample of pole sub-prime induction second thickness obtains;First computing module, for calculating each induction electrode The difference of the first value of electrical signals and the second value of electrical signals of sub-prime obtains the sensitivity value of each induction electrode sub-prime;Second calculates mould Block is normalized for the sensitivity value to multiple induction electrode sub-primes, obtains the correction parameter values of each induction electrode sub-prime.
As an alternative embodiment, the second computing module includes:Computational submodule, for by normalizing numerical value The sensitivity of multiple induction electrode sub-primes is normalized, wherein normalization numerical value is the sensitivity value of multiple induction electrode sub-primes In maximum value or default value.
As an alternative embodiment, the first acquisition module and the second acquisition module obtain each induction electrode sub-prime The value of electrical signals that the sample of induction targets thickness obtains includes:The sample of multiple target thickness is detected by thickness imaging sensor This;It determines the value of electrical signals that the sample of each induction targets thickness of each induction electrode sub-prime obtains, obtains each induction electrode Multiple value of electrical signals of sub-prime;The average value for calculating multiple value of electrical signals of each induction electrode sub-prime, obtains each induced electricity The value of electrical signals of the sample of pole sub-prime induction targets thickness.
As an alternative embodiment, correction unit includes:Third acquisition module, for according to thickness image sensing The value of electrical signals that device sweeps each induction electrode sub-prime in sky determines that the sky of corresponding induction electrode sub-prime sweeps value of electrical signals;The Three computing modules, the value of electrical signals for each induction electrode sub-prime to be incuded to determinand are swept value of electrical signals with sky and are subtracted each other, obtain The value of electrical signals to be corrected of each induction electrode sub-prime;Correction module, for the correction parameter by each induction electrode sub-prime Value is corrected the value of electrical signals to be corrected of corresponding induction electrode sub-prime, obtains the thickness pixel of each induction electrode sub-prime Value.
Above-mentioned device may include processor and memory, and said units can be stored in storage as program unit In device, above procedure unit stored in memory is executed by processor to realize corresponding function.
Memory may include computer-readable medium in volatile memory, random access memory (RAM) and/ Or the forms such as Nonvolatile memory, such as read-only memory (ROM) or flash memory (flashRAM), memory includes at least one storage Chip.
Present invention also provides a kind of embodiments of thickness imaging sensor.
Fig. 8 is a kind of schematic diagram of optional thickness imaging sensor according to the ... of the embodiment of the present invention, as shown in figure 8, should Thickness imaging sensor includes detection part 100, memory 200 and processor 300, wherein between detection part 100 includes opposite Every the public electrode 101 and detecting electrode 102 of setting, the transmission of determinand is formed between public electrode 101 and detecting electrode 102 Channel, detecting electrode 102 include at least one detecting electrode chip being arranged in order along transmission channel, each detecting electrode chip On be provided at least one induction electrode sub-prime, specifically, orientation and the determinand of at least one detecting electrode chip Transmission direction is vertical;Memory 200 is used to store the correction parameter values of each induction electrode sub-prime, wherein each induction electrode The correction parameter values of sub-prime are related to the corresponding sensitivity value of induction electrode sub-prime;Processor 300 and detection part 100 and memory 200 connections, the electric signal for being incuded to corresponding induction electrode sub-prime by the correction parameter values of each induction electrode sub-prime Value is corrected, and obtains thickness pixel value.
Further, which further includes sampling module, is connected between detection part and processor, is used It is sampled in the value of electrical signals sensed to each induction electrode sub-prime and is sent to processor.
Further, memory is additionally operable to store the sky of each induction electrode sub-prime and sweeps value of electrical signals, wherein sky sweeps telecommunications Number value is the value of electrical signals that thickness imaging sensor sweeps corresponding induction electrode sub-prime in sky, and processor is additionally operable to will be each The value of electrical signals of induction electrode sub-prime induction determinand is swept value of electrical signals with sky and is subtracted each other, and obtain each induction electrode sub-prime waits for school Electrical signals value, and by the correction parameter values of each induction electrode sub-prime to the electric signal to be corrected of corresponding induction electrode sub-prime Value is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
Fig. 9 is the schematic diagram of another optional thickness imaging sensor according to the ... of the embodiment of the present invention, as shown in figure 9, The thickness imaging sensor includes detection unit 601 (detection part), collecting unit 602 (sampling module), computing unit 603 (processor), storage unit 604 (memory), control and execution unit 605, image processing unit 606, interface unit 607, In:
Detection unit 601 includes mainly public electrode and detecting electrode, and each induction electrode sub-prime of detection unit 601 is logical The initial voltage signals such as detected correction specimen page are crossed as correction foundation;Collecting unit 602 for acquisition correction specimen page data, For the empty total number according to (sky sweeps value of electrical signals) and image data to be corrected, the part contains modulus (A/D) conversion portions, i.e., will be initial Analog voltage signal is converted to digital signal;Computing unit 603 is used to calculate the correction of each induction electrode sub-prime of detecting electrode Coefficient (correction parameter values);Storage unit 604 empty sweeps that data mean value, whether there is or not the maximum value of the equal value difference of adhesive tape and schools for storing Positive coefficient;Control and execution unit 605 provide the signals such as clock for each unit, control operational order and execute relative program; Image processing unit 606 utilizes searched correction coefficient, empty total number evidence to treat image correcting data and be corrected;Interface unit 607 transmission datas are simultaneously communicated with other external equipments 608.
The method and step that Thickness sensitivity is executed using the thickness imaging sensor that the embodiment provides is as follows:
Using detection unit 601 detect respectively M rows as shown in Figure 2 correct specimen page without adhesive tape region, have adhesive tape region And sky is swept, and is obtained each induction sub-prime and is corresponded to analog voltage signal data under the condition of scanning;The selection of calibration standard adhesive tape It can be determined according to testing requirements.
Utilize collecting unit 602 comprising A/D conversion circuits, by processes such as sampling, quantization and codings, by above-mentioned nothing Adhesive tape region has adhesive tape region and sky to sweep corresponding analog voltage signal to be converted to digital signal data Vn(i, j), Vt(i, j)、Vd(i, j), wherein i=1,2,3 ... M, j=1,2,3 ... N, i are the line number of image data, and j is the row of image data Number, maximum value are the points N of thickness imaging sensor.
Computing unit 603 is corrected the calculating of each item data such as coefficient according to the data that collecting unit is sent;Its First to M row data Vn(i, j), Vt(i, j), Vd(i, j) takes row average value, obtains three class mean data of each induction sub-prime AveVn(j)、AveVt(j)、AveVd(j), and AveDev (j)=AveV is calculatedt(j)-AveVn(j), and the difference is found most Big value AveDev (q);Secondly, further according to control and the instruction of execution unit 605, give goal-selling Value Data, respectively according to Correction coefficient calculation formula K (j)=AveDev (q)/AveDev (j) and K (j)=predetermined target value/AveDev (j) is obtained each Two groups of correction coefficient of a induction sub-prime.
In this implementation column, the image for being usually noted image light and shade information is gray level image.For 8 gray-scale maps Picture, pixel value are exactly its gray value, and tonal range of the gray value from black to white is (0-255), that is, predetermined target value Range.The goal-selling numerical value can be obtained by interface unit 607 from external equipment 608 by software set.Generally For, predetermined target value chooses one according under determining public electrode pulse voltage when detecting certain thickness standard specimen page Goal-selling setting value can also be maximum value 255, but be according to actual conditions by the desired value of a Suitable assays result Guarantee certain Thickness sensitivity surplus generally takes 217 close to white.
Storage unit 604 is empty for storing two groups of correction coefficient for respectively incuding sub-prime obtained by computing unit 603, each sub-prime It sweeps data mean value and whether there is or not the maximum value AveDev (q) of the equal value difference of adhesive tape, these data are stored according to certain rule, Prevent the loss of these data, convenient follow-up use.The storage unit generally use erasable memory, such as EEPROM, FLASH etc..And it is the variation to prevent product from application environment occurring in use to use the purpose of erasable memory And lead to the change of properties of product, such as temperature change may cause temperature drift that the output data generation for incuding sub-prime is centainly changed The variation caused by force majeure factor such as become, at this time can by re-calibrating, to facilitate the write-in of new correction related data, Ensure the precision of thickness imaging sensor.
Control and execution unit 605 are the cores of the thickness imaging sensor, can be controlled from operating unit etc. Other operational orders that unit is not shown in figure in structure coordinate the communication and work of other each units.Read the program in ROM And execute relative program by workspace of RAM;Based on basic frequency, which can be generated by crystal oscillator, can also be led to It crosses interface unit 607 and comes from external equipment, on the basis of the frequency, generate the various clock signals needed for unit, timing is believed Number;In terms of image rectification, the major function of the unit further includes empty to each induction sub-prime according to the clock number of scan line It sweeps data mean value and corresponding correction coefficient is addressed, to be supplied to 606 correct data of image processing unit.For choosing that One group of correction coefficient, can be set by operating software, i.e., obtained from external equipment 608 by the interface unit 607.
The major function of image processing unit 606 is treated image correcting data and is passed over using storage unit 604 The related datas such as correction coefficient are corrected.It is stored when completing correction specimen page digital independent, correction coefficient calculating and related data After operation, which can normally be detected, and image processing unit is supplied to by collecting unit 602 The data of 606 images to be corrected, it is assumed that x-th of induction collected signal of sub-prime of thickness imaging sensor is after A/D is converted It is f (x) to obtain numerical value.Image processing unit 606 calculates Ud (x)=f (x)-AveV firstd(x), i.e., a line is often scanned, each The corresponding data of induction sub-prime will subtract its sky and sweep data mean value, to eliminate corresponding deviation;Then to obtaining data according to sense Answer sub-prime columns according to formula F (x)=Ud(x) × K (x) is corrected, and obtains final data F (x) after image rectification.
The function of interface unit 607 is mainly responsible for the image data of equipment transmission to the periphery, and is responsible for thickness image sensing Device is communicated with external equipment, for example image read command, scan command, corrective command and correction coefficient choose order etc..
It is corresponding to correct once be corrected when the thickness imaging sensor provided by the embodiment is detected Data change will be saved, according to the thickness of standard rubber band used in correction, after correction and predetermined target value, at software Reason, it is easy to obtain the specific precise thickness of object to be detected, be as follows:
First, according to correction accepted standard tape thickness D (λ) (λ=1,2,3 ... n), predetermined target value calculate detection Thickness coefficient γ=D (λ)/predetermined target value;
Secondly, using image data F (x) after correction, specific detectable substance thickness D=γ × F (x) are calculated.
The sequence of above-mentioned the embodiment of the present application can not represent the quality of embodiment.
In above-described embodiment of the application, all emphasizes particularly on different fields to the description of each embodiment, do not have in some embodiment The part of detailed description may refer to the associated description of other embodiment.In several embodiments provided herein, it should be appreciated that It arrives, disclosed technology contents can be realized by another way.
Wherein, the apparatus embodiments described above are merely exemplary, for example, the unit division, can be one Kind of division of logic function, formula that in actual implementation, there may be another division manner, such as multiple units or component can combine or It is desirably integrated into another system, or some features can be ignored or not executed.Another point, it is shown or discussed it is mutual it Between coupling, direct-coupling or communication connection can be INDIRECT COUPLING or communication link by some interfaces, unit or module It connects, can be electrical or other forms.
In addition, each functional unit in each embodiment of the application can be integrated in a processing unit, it can also It is that each unit physically exists alone, it can also be during two or more units be integrated in one unit.Above-mentioned integrated list The form that hardware had both may be used in member is realized, can also be realized in the form of SFU software functional unit.
If the integrated unit is realized in the form of SFU software functional unit and sells or use as independent product When, it can be stored in a computer read/write memory medium.Based on this understanding, the technical solution of the application is substantially The all or part of the part that contributes to existing technology or the technical solution can be in the form of software products in other words It embodies, which is stored in a storage medium, including some instructions are used so that a computer Equipment (can be personal computer, server or network equipment etc.) execute each embodiment the method for the application whole or Part steps.And storage medium above-mentioned includes:USB flash disk, read-only memory (ROM, Read-Only Memory), arbitrary access are deposited Reservoir (RAM, Random Access Memory), mobile hard disk, magnetic disc or CD etc. are various can to store program code Medium.
The above is only the preferred embodiment of the application, it is noted that for the ordinary skill people of the art For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered It is considered as the protection domain of the application.

Claims (13)

1. a kind of thickness detecting method, which is characterized in that the thickness detecting method includes:
Obtain the value of electrical signals of each induction electrode sub-prime induction determinand in thickness imaging sensor, wherein the thickness chart As sensor includes multiple induction electrode sub-primes;
Obtain the correction parameter values of each induction electrode sub-prime, wherein the correction parameter values of each induction electrode sub-prime with it is corresponding The sensitivity value of induction electrode sub-prime is related;
The electric signal of the determinand is incuded to corresponding induction electrode sub-prime by the correction parameter values of each induction electrode sub-prime Value is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
2. according to the method described in claim 1, it is characterized in that, obtaining the correction parameter values packet of each induction electrode sub-prime It includes:
Obtain the first value of electrical signals that the sample of each induction electrode sub-prime induction first thickness obtains;
Obtain the second value of electrical signals that the sample of each induction electrode sub-prime induction second thickness obtains;
The difference for calculating first value of electrical signals and second value of electrical signals of each induction electrode sub-prime, obtains each induction The sensitivity value of electrode sub-prime;
The sensitivity value of the multiple induction electrode sub-prime is normalized, the correction parameter of each induction electrode sub-prime is obtained Value.
3. according to the method described in claim 2, it is characterized in that, returning to the sensitivity value of the multiple induction electrode sub-prime One change include:
The sensitivity of the multiple induction electrode sub-prime is normalized by normalizing numerical value, wherein the normalization numerical value For the maximum value or default value in the sensitivity value of the multiple induction electrode sub-prime.
4. according to the method described in claim 2, it is characterized in that, obtaining the sample of each induction electrode sub-prime induction targets thickness Originally the value of electrical signals obtained includes:
The sample of the repeatedly target thickness is detected by the thickness imaging sensor;
It determines that each induction electrode sub-prime incudes the value of electrical signals that the sample of the target thickness obtains every time, obtains each induction Multiple value of electrical signals of electrode sub-prime;
The average value for calculating multiple value of electrical signals of each induction electrode sub-prime obtains each induction electrode sub-prime and incudes the mesh Mark the value of electrical signals of the sample of thickness.
5. according to the method described in claim 1, it is characterized in that, by the correction parameter values of each induction electrode sub-prime to right Answer induction electrode sub-prime incude the determinand value of electrical signals be corrected including:
The value of electrical signals for sweeping each induction electrode sub-prime in sky according to the thickness imaging sensor determines corresponding induction The sky of electrode sub-prime sweeps value of electrical signals;
The value of electrical signals that each induction electrode sub-prime is incuded to the determinand is swept value of electrical signals with the sky and is subtracted each other, and obtains each The value of electrical signals to be corrected of induction electrode sub-prime;
School is carried out to the value of electrical signals to be corrected of corresponding induction electrode sub-prime by the correction parameter values of each induction electrode sub-prime Just, the thickness pixel value of each induction electrode sub-prime is obtained.
6. a kind of thickness detection apparatus, which is characterized in that the thickness detection apparatus includes:
First acquisition unit incudes the electric signal of determinand for obtaining each induction electrode sub-prime in thickness imaging sensor Value, wherein the thickness imaging sensor includes multiple induction electrode sub-primes;
Second acquisition unit, the correction parameter values for obtaining each induction electrode sub-prime, wherein each induction electrode sub-prime Correction parameter values are related to the corresponding sensitivity value of induction electrode sub-prime;
Unit is corrected, for the correction parameter values by each induction electrode sub-prime to being waited for described in corresponding induction electrode sub-prime induction The value of electrical signals for surveying object is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
7. device according to claim 6, which is characterized in that the second acquisition unit includes:
First acquisition module incudes the first electric signal that the sample of first thickness obtains for obtaining each induction electrode sub-prime Value;
Second acquisition module incudes the second electric signal that the sample of second thickness obtains for obtaining each induction electrode sub-prime Value;
First computing module, first value of electrical signals for calculating each induction electrode sub-prime and second value of electrical signals Difference, obtain the sensitivity value of each induction electrode sub-prime;
Second computing module is normalized for the sensitivity value to the multiple induction electrode sub-prime, obtains each induced electricity The correction parameter values of pole sub-prime.
8. device according to claim 7, which is characterized in that second computing module includes:
Computational submodule, for the sensitivity of the multiple induction electrode sub-prime to be normalized by normalizing numerical value, wherein The normalization numerical value is maximum value or default value in the sensitivity value of the multiple induction electrode sub-prime.
9. device according to claim 7, which is characterized in that first acquisition module and second acquisition module obtain The value of electrical signals that the sample of each induction electrode sub-prime induction targets thickness obtains is taken to include:
The sample of the repeatedly target thickness is detected by the thickness imaging sensor;
It determines that each induction electrode sub-prime incudes the value of electrical signals that the sample of the target thickness obtains every time, obtains each induction Multiple value of electrical signals of electrode sub-prime;
The average value for calculating multiple value of electrical signals of each induction electrode sub-prime obtains each induction electrode sub-prime and incudes the mesh Mark the value of electrical signals of the sample of thickness.
10. device according to claim 6, which is characterized in that the correction unit includes:
Third acquisition module, the telecommunications for sweeping each induction electrode sub-prime in sky according to the thickness imaging sensor Number value determines that the sky of corresponding induction electrode sub-prime sweeps value of electrical signals;
Third computing module, the value of electrical signals for each induction electrode sub-prime to be incuded to the determinand sweep telecommunications with the sky Number value is subtracted each other, and the value of electrical signals to be corrected of each induction electrode sub-prime is obtained;
Correction module, for the correction parameter values by each induction electrode sub-prime to the electricity to be corrected of corresponding induction electrode sub-prime Signal value is corrected, and obtains the thickness pixel value of each induction electrode sub-prime.
11. a kind of thickness imaging sensor, which is characterized in that the thickness imaging sensor includes:
Detection part includes the public electrode and detecting electrode of relative spacing setting, the public electrode and the detecting electrode Between formed determinand transmission channel, the detecting electrode includes at least one detection being arranged in order along the transmission channel Electrode chip is provided at least one induction electrode sub-prime on each detecting electrode chip;
Memory, the correction parameter values for storing each induction electrode sub-prime, wherein the correction ginseng of each induction electrode sub-prime Numerical value is related to the corresponding sensitivity value of induction electrode sub-prime;
Processor is connect with the detection part and the memory, for the correction parameter by each induction electrode sub-prime The value of electrical signals that value incudes corresponding induction electrode sub-prime is corrected, and obtains thickness pixel value.
12. thickness imaging sensor according to claim 11, which is characterized in that the thickness imaging sensor also wraps It includes:
Sampling module is connected between the detection part and the processor, for being sensed to each induction electrode sub-prime Value of electrical signals sampled and be sent to the processor.
13. thickness imaging sensor according to claim 11, which is characterized in that it is each that the memory is additionally operable to storage The sky of induction electrode sub-prime sweeps value of electrical signals, wherein it is that the thickness imaging sensor sweeps feelings in sky that the sky, which sweeps value of electrical signals, The value of electrical signals of induction electrode sub-prime is corresponded under condition, the processor is additionally operable to incude each induction electrode sub-prime described to be measured The value of electrical signals of object is swept value of electrical signals with the sky and is subtracted each other, and obtains the value of electrical signals to be corrected of each induction electrode sub-prime, and lead to The correction parameter values for crossing each induction electrode sub-prime are corrected the value of electrical signals to be corrected of corresponding induction electrode sub-prime, obtain The thickness pixel value of each induction electrode sub-prime.
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