CN106296970A - The detecting system of thin film and detection method - Google Patents
The detecting system of thin film and detection method Download PDFInfo
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- CN106296970A CN106296970A CN201610657275.1A CN201610657275A CN106296970A CN 106296970 A CN106296970 A CN 106296970A CN 201610657275 A CN201610657275 A CN 201610657275A CN 106296970 A CN106296970 A CN 106296970A
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- 238000001514 detection method Methods 0.000 title claims abstract description 320
- 239000010409 thin film Substances 0.000 title claims abstract description 50
- 230000035945 sensitivity Effects 0.000 claims abstract description 132
- 238000006243 chemical reaction Methods 0.000 claims abstract description 129
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- 239000010408 film Substances 0.000 claims abstract description 73
- 238000012937 correction Methods 0.000 claims description 103
- 230000003190 augmentative effect Effects 0.000 claims description 80
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- RNQBLUNNAYFBIW-NPULLEENSA-M hexadecyl(trimethyl)azanium (2S)-2-(6-methoxynaphthalen-2-yl)propanoate Chemical compound COc1ccc2cc(ccc2c1)[C@H](C)C([O-])=O.CCCCCCCCCCCCCCCC[N+](C)(C)C RNQBLUNNAYFBIW-NPULLEENSA-M 0.000 description 1
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Classifications
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- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
- G07D7/06—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency using wave or particle radiation
- G07D7/12—Visible light, infrared or ultraviolet radiation
- G07D7/128—Viewing devices
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
- G07D7/04—Testing magnetic properties of the materials thereof, e.g. by detection of magnetic imprint
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- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
- G07D7/16—Testing the dimensions
- G07D7/164—Thickness
Abstract
This application provides detecting system and the detection method of thin film.This detecting system includes Multifunction Sensor, AD conversion unit and control unit, wherein, Multifunction Sensor includes three detector units, being optical detection unit, magnetic detection unit and Thickness sensitivity unit respectively, three detector units are for carrying out optical detection, magnetic detection and Thickness sensitivity respectively to each scanning element on film to be measured；The input of AD conversion unit electrically connects with the outfan of the outfan of optical detection unit, the outfan of magnetic detection unit and Thickness sensitivity unit, and AD conversion unit for being separately converted to the digital signal of correspondence by the output signal of three detector units；Control unit electrically connects with Multifunction Sensor and AD conversion unit, is used for controlling Multifunction Sensor and works with AD conversion unit.This detecting system can detect three kinds of physical quantitys of thin film simultaneously, and makes detecting system can produce the image of different physical characteristics of equal resolution.
Description
Technical field
The application relates to the detection field of thin film, in particular to detecting system and the detection method of a kind of thin film.
Background technology
In financial field, cash inspecting machine, ATM, cleaning-sorting machine are mainly by optics, and magnetic and three kinds of modes of thickness are to bank note
The true and false carries out differentiating and screening, and corresponding three kinds of modes, on the market the most respectively by optical image sensor, magnetic detection device
Being implemented separately with thickness detection apparatus, the physical quantity detected due to these three mode is different, the difference of detection method so that three kinds
The output data type that thing mode measurement obtains is different with form, causes the processing means exporting data more complicated；It addition, three
The resolution planting the detection of physical quantity correspondence is different so that does not has corresponding relation between the three kinds of physical quantity data measured, is unfavorable for
Follow-up discriminating and screening.
Therefore, a kind of detecting system that can simultaneously generate three kinds of identical thin film testing images of resolution and side are needed badly
Method.
Summary of the invention
The main purpose of the application is to provide detecting system and the detection method of a kind of thin film, to generate three kinds of resolution
Identical thin film testing image.
To achieve these goals, according to an aspect of the application, it is provided that the detecting system of a kind of thin film, this detection
System includes: Multifunction Sensor, including three detector units, is optical detection unit, magnetic detection unit and thickness respectively
Detector unit, three above-mentioned detector units for each scanning element on film to be measured is carried out respectively optical detection, magnetic detection with
Thickness sensitivity；AD conversion unit, the input of above-mentioned AD conversion unit and the outfan of above-mentioned optical detection unit, magnetic
The outfan of detector unit and the outfan electrical connection of Thickness sensitivity unit, above-mentioned AD conversion unit is for above-mentioned by three
The output signal of detector unit is separately converted to the digital signal of correspondence；Control unit, with above-mentioned Multifunction Sensor and on
State AD conversion unit electrical connection, be used for controlling above-mentioned Multifunction Sensor and work with above-mentioned AD conversion unit.
Further, said detecting system also includes: correcting unit, input and the outfan of above-mentioned AD conversion unit
Electrical connection, the control end of above-mentioned correcting unit electrically connects with above-mentioned control unit, and above-mentioned correcting unit is for turning above-mentioned modulus
The digital signal changing unit output makes corrections.
Further, above-mentioned correcting unit includes: augmenting factor acquisition module, with the outfan of above-mentioned AD conversion unit
Electrical connection, above-mentioned augmenting factor acquisition module is for obtaining the correction system of each above-mentioned detector unit corresponding to each above-mentioned scanning element
Number；Computing module, electrically connects with above-mentioned augmenting factor acquisition module, and above-mentioned computing module uses each above-mentioned augmenting factor to above-mentioned
Each digital signal of AD conversion unit output makes corrections, and above-mentioned augmenting factor turns with above-mentioned modulus when detecting above-mentioned film to be measured
Change the digital signal one_to_one corresponding of unit output.
Further, above-mentioned augmenting factor acquisition module includes: primary data acquisition module, is used for obtaining each above-mentioned detection
The primary data of each scanning element of unit, above-mentioned primary data includes the first primary data and the second primary data, above-mentioned optics
First primary data of detector unit is optics the first primary data L1MN, the second primary data of above-mentioned optical detection unit is
Optics the second primary data L2MN, the first primary data of above-mentioned magnetic detection unit is magnetic the first primary data M1MN, above-mentioned
Second primary data of magnetic detection unit is magnetic the second primary data M2MN, the first initial number of above-mentioned Thickness sensitivity unit
According to for thickness the first primary data T1MN, the second primary data of above-mentioned Thickness sensitivity unit is thickness the second primary data T2MN,
Wherein, M Yu N represents line order number and the row ordinal number of each above-mentioned scanning element respectively, and wherein, the light source of above-mentioned optical detection unit is not sent out
Light time, the digital signal that the optical detection data with each above-mentioned scanning element of above-mentioned AD conversion unit output are corresponding is above-mentioned light
Learn the first primary data L1MN, during above-mentioned light source luminescent, scan the optics sample film of the focal point of above-mentioned optical detection unit
After, the digital signal that the optical detection data with each above-mentioned scanning element of above-mentioned AD conversion unit output are corresponding is above-mentioned optics
Second primary data L2MN, above-mentioned optics sample film is the blank sheet of paper without word Yu image, above-mentioned magnetic detection unit scan magnetic
After sample film, the lowest numeric that the magnetic detection data with each above-mentioned scanning element of above-mentioned AD conversion unit output are corresponding is believed
Number it is above-mentioned magnetic the first primary data M1MN, after above-mentioned magnetic detection unit scan above-mentioned magnetic sample film, above-mentioned modulus turns
Maximum number signal corresponding to the magnetic detection data with each above-mentioned scanning element changing unit output is that above-mentioned magnetic second is initial
Data M2MN, the surface configuration of above-mentioned magnetic sample film has the rectangular magnetic bar at multiple interval, above-mentioned Multifunction Sensor not to have
When placing any thin film, the digital signal that the Thickness sensitivity data of above-mentioned AD conversion unit output are corresponding is above-mentioned thickness first
Primary data T1MN, after above-mentioned Thickness sensitivity unit scan thickness sample film, it is above-mentioned with each that above-mentioned AD conversion unit exports
The second primary data T that digital signal is above-mentioned Thickness sensitivity unit that the Thickness sensitivity data of scanning element are corresponding2MN, above-mentioned thickness
Degree sample film is thin film in uniform thickness；Augmenting factor computing module, uses formula K1MN=predetermined gray value/(L2MN-L1MN)
It is calculated optics augmenting factor K1MN, use formula K2MN=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor
K2MN, use formula K3MN=predetermined gray value/(T2MN-T1MN) it is calculated thickness augmenting factor K3MN。
Further, above-mentioned computing module includes: optical computing module, uses formula (LMN-L1MN)×K1MNTo above-mentioned LMN
Make corrections, wherein, above-mentioned LMNAfter scanning above-mentioned film to be measured for above-mentioned optical detection unit, the output of above-mentioned AD conversion unit
The digital signal corresponding with the optical detection data of each above-mentioned scanning element；Magnetic computing module, uses formula (MMN-M1MN)×K2MN
To above-mentioned MMNMake corrections, wherein, above-mentioned MMNAfter the above-mentioned film to be measured of above-mentioned magnetic detection unit scan, above-mentioned analog digital conversion
The digital signal corresponding to the magnetic detection data with each above-mentioned scanning element of unit output；THICKNESS CALCULATION module, uses formula
(TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo above-mentioned TMNMake corrections, wherein, above-mentioned TMNSweep for above-mentioned Thickness sensitivity unit
Retouching after above-mentioned survey film, the numeral that the Thickness sensitivity data with each above-mentioned scanning element of above-mentioned AD conversion unit output are corresponding is believed
Number, above-mentioned TSFor skew gray value.
Further, said detecting system includes: memory element, is electrically connected with above-mentioned correcting unit and above-mentioned control unit
Connect, be used for storing above-mentioned augmenting factor and above-mentioned primary data.
Further, said detecting system also includes: D/A conversion unit, with above-mentioned magnetic detection unit, above-mentioned thickness
Detector unit, said memory cells and above-mentioned control unit all electrically connect, and above-mentioned D/A conversion unit is for by after correction
The digital signal that magnetic reference voltage is corresponding is converted to voltage signal and inputs to above-mentioned magnetic detection unit, and above-mentioned digital-to-analogue
Converting unit is for being converted to voltage signal by digital signal corresponding for the thickness reference voltage after above-mentioned correction and inputting supreme
Stating in Thickness sensitivity unit, wherein, the magnetic reference voltage after above-mentioned correction is defeated in time detecting above-mentioned magnetic detection unit
The signal gone out is corrected, and the thickness reference voltage after above-mentioned correction is the letter of output in time detecting above-mentioned Thickness sensitivity unit
Number it is corrected.
Further, above-mentioned correcting unit also includes: magnetic reference voltage correction module, uses formula MRMMN=MM+(MM-
MMMN), calculate the digital signal M that the magnetic reference voltage after correction is correspondingRMMN, wherein, above-mentioned MMFor magnetic reference voltage VMRight
The digital signal answered, above-mentioned MMMNFor when not placing any thin film, the magnetic detection voltage V of each above-mentioned scanning elementMMNCorresponding
Digital signal；Thickness reference voltage correction module, uses formula TRTMN=TT+(TT-T1MN), calculate the thickness benchmark after correction
Voltage TRTMN, wherein, above-mentioned TTFor thickness reference voltage VTCorresponding digital signal, above-mentioned T1MNFor thickness the first primary data,
Above-mentioned thickness the first primary data is when above-mentioned Multifunction Sensor does not place any thin film, the thickness of each above-mentioned scanning element
Detection voltage V1MNCorresponding digital signal.
Another aspect according to the application, it is provided that the detection method of a kind of thin film, this detection method includes: step S1,
Use Multifunction Sensor three detector units each scanning element on film to be measured is carried out respectively optical detection, magnetic detection with
Thickness sensitivity, three above-mentioned detector units are respectively optical detection unit, magnetic detection unit and Thickness sensitivity unit；Step
S2, is separately converted to the digital signal of correspondence by the output signal of three above-mentioned detector units.
Further, above-mentioned detection method also includes: step S3, is mended the digital signal obtained in above-mentioned steps S2
Just.
Further, before above-mentioned steps S3, above-mentioned detection method also includes: step A, obtains each scanning element corresponding
The augmenting factor of each above-mentioned detector unit, above-mentioned augmenting factor makes corrections for the digital signal obtaining above-mentioned steps S2.
Further, above-mentioned steps A includes: step A1, obtains the primary data of each above-mentioned detector unit, above-mentioned initial number
According to including optics the first primary data L1MN, optics the second primary data L2MN, magnetic the first primary data M1MN, at the beginning of magnetic second
Beginning data M2MN, thickness the first primary data T1MN, thickness the second primary data T2MN, wherein, M Yu N represents the row of scanning element respectively
Ordinal number and row ordinal number, wherein, when the light source of above-mentioned optical detection unit is the most luminous, the optics inspection of above-mentioned optical detection unit output
The digital signal that survey data obtain after analog-to-digital conversion is above-mentioned optics the first primary data L1MN, during above-mentioned light source luminescent, scanning
After the optics sample film of the focal point of above-mentioned optical detection unit, the optical detection data of each above-mentioned scanning element are through analog-to-digital conversion
After digital signal be above-mentioned optics the second primary data L2MN, after above-mentioned magnetic detection unit scan magnetic sample film, each on
Stating the magnetic detection data of the scanning element lowest numeric signal after analog digital conversion is above-mentioned magnetic the first primary data M1MNOn,
After stating magnetic detection unit above-mentioned magnetic scanning sample film, the magnetic detection data of each above-mentioned scanning element are after analog-to-digital conversion
Maximum number signal is above-mentioned magnetic the second primary data M2MN, when above-mentioned Multifunction Sensor does not place any thin film, on
The Thickness sensitivity data digital signal after analog-to-digital conversion stating the output of Thickness sensitivity unit is above-mentioned thickness the first primary data
T1MN, during above-mentioned Thickness sensitivity unit scan thickness sample film, the Thickness sensitivity data of each above-mentioned scanning element are after analog-to-digital conversion
The second primary data T that digital signal is above-mentioned Thickness sensitivity unit2MN；Step A2, utilizes above-mentioned primary data to calculate above-mentioned
Augmenting factor, uses formula K1MN=predetermined gray value/(L2MN-L1MN) it is calculated optics augmenting factor K1MN, use formula K2MN
=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor K2MN, use formula K3MN=predetermined gray value/(T2MN-
T1MN) it is calculated thickness augmenting factor K3MN。
Further, above-mentioned steps S3 includes: use formula (LMN-L1MN)×K1MNTo above-mentioned LMNMake corrections, wherein,
Above-mentioned LMNAfter scanning above-mentioned film to be measured for above-mentioned optical detection unit, the light with each above-mentioned scanning element of output after analog digital conversion
Learn the digital signal that detection data are corresponding；Use formula (MMN-M1MN)×K2MNTo above-mentioned MMNMake corrections, wherein, above-mentioned MMNFor
After the above-mentioned film to be measured of above-mentioned magnetic detection unit scan, the magnetic detection number with each above-mentioned scanning element of output after analog digital conversion
According to corresponding digital signal；Use formula (TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo above-mentioned TMNMake corrections, wherein,
Above-mentioned TMNFor above-mentioned Thickness sensitivity unit scan after above-mentioned survey film, the thickness with each above-mentioned scanning element of output after analog digital conversion
The digital signal that degree detection data are corresponding, above-mentioned TSFor skew gray value.
Further, above-mentioned detection method also includes: the storing process to above-mentioned augmenting factor Yu above-mentioned primary data.
Further, before above-mentioned steps S1, above-mentioned detection method also includes: be corrected magnetic reference voltage also
Input in above-mentioned magnetic detection unit, output when above-mentioned magnetic detection unit is detected by the above-mentioned magnetic reference voltage after correction
Signal is corrected；Thickness reference voltage is corrected and is inputted the above-mentioned thickness in above-mentioned Thickness sensitivity unit, after correction
When above-mentioned Thickness sensitivity unit is detected by degree reference voltage, the signal of output is corrected.
Further, the above-mentioned process being corrected magnetic reference voltage includes: input to above-mentioned magnetic detection unit
Above-mentioned magnetic reference voltage VM；When above-mentioned Multifunction Sensor does not place any thin film, start above-mentioned magnetic detection unit,
Above-mentioned magnetic detection unit exports multiple magnetic detection voltage VMMN；By above-mentioned VMWith above-mentioned VMMNIt is respectively converted into digital signal MM
With MMMN, use formula MRMMN=MM+(MM-MMMN), the digital signal that magnetic reference voltage above-mentioned after calculating correction is corresponding
MRMMN；By above-mentioned MRMMNBe converted to voltage signal VRMMN, the above-mentioned process being corrected thickness reference voltage includes: to above-mentioned
Thickness sensitivity unit inputs above-mentioned thickness reference voltage VT；When above-mentioned Multifunction Sensor does not place any thin film, start
Above-mentioned Thickness sensitivity unit, above-mentioned Thickness sensitivity unit exports multiple Thickness sensitivity voltage V1MN；By above-mentioned VTWith above-mentioned V1MNPoint
Be not converted to digital signal TTWith T1MN, use formula TRTMN=TT+(TT-T1MN), calculate the above-mentioned thickness reference voltage after correction
Corresponding digital signal TRTMN；By above-mentioned TRTMNBe converted to voltage signal VRTMN。
The technical scheme of application the application, three detections in the Multifunction Sensor that in detecting system, control unit controls
Unit so that these three detector unit can detect three kinds of physical quantitys of thin film simultaneously, three kinds of physical quantitys are entered by AD conversion unit
The data process that row is similar, simplifies data processing hardware device so that detecting system can produce the difference of equal resolution
The image of physical characteristic.
Accompanying drawing explanation
The Figure of description of the part constituting the application is used for providing further understanding of the present application, and the application shows
Meaning property embodiment and explanation thereof are used for explaining the application, are not intended that the improper restriction to the application.In the accompanying drawings:
Fig. 1 shows the structural representation of the detecting system of a kind of exemplary embodiment offer according to the application；
Fig. 2 shows the structural representation of the detecting system of a kind of embodiment offer of the application；
Fig. 3 shows the structural representation of the detecting system of another embodiment offer of the application；And
Fig. 4 shows the structural representation of the detecting system of the another kind of embodiment offer of the application.
Wherein, above-mentioned accompanying drawing includes the following drawings labelling:
1, Multifunction Sensor；2, AD conversion unit；3, correcting unit；4, control unit；5, memory element；6, digital-to-analogue
Converting unit.
Detailed description of the invention
It it is noted that described further below is all exemplary, it is intended to provide further instruction to the application.Unless it is another
Indicating, all technology used herein and scientific terminology have usual with the application person of an ordinary skill in the technical field
The identical meanings understood.
It should be noted that term used herein above merely to describe detailed description of the invention, and be not intended to restricted root
Illustrative embodiments according to the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when using term " to comprise " in this manual and/or " bag
Include " time, it indicates existing characteristics, step, operation, device, assembly and/or combinations thereof.
As background technology is introduced, obtain three kinds of film graphics that resolution is identical simultaneously, present applicant proposes one
Plant detecting system and the detection method of thin film.
In a kind of typical embodiment of the application, it is proposed that the detecting system of a kind of thin film, as it is shown in figure 1, this inspection
Examining system includes Multifunction Sensor 1 and AD conversion unit 2 and control unit 4, and wherein, Multifunction Sensor includes three
Detector unit, is optical detection unit, magnetic detection unit and Thickness sensitivity unit respectively, and three above-mentioned detector units are for right
Each scanning element on film to be measured carries out optical detection, magnetic detection and Thickness sensitivity respectively；The input of above-mentioned AD conversion unit 2
The outfan with outfan, the outfan of magnetic detection unit and the Thickness sensitivity unit of above-mentioned optical detection unit is held to be electrically connected
Connecing, above-mentioned AD conversion unit 2 for being separately converted to the digital signal of correspondence by the output signal of three above-mentioned detector units；
Control unit 4 electrically connects with above-mentioned Multifunction Sensor 1 and above-mentioned AD conversion unit 2, is used for controlling above-mentioned multi-functional biography
Sensor 1 works with above-mentioned AD conversion unit 2.
Three detector units in the Multifunction Sensor that in detecting system in the application, control unit controls so that three
Individual detector unit can detect three kinds of physical quantitys of thin film simultaneously, and three kinds of physical quantitys are carried out at similar data by AD conversion unit
Reason, simplifies data processing hardware device so that detecting system can produce the image of the different physical characteristics of equal resolution.
Multifunction Sensor in the application includes optical detection unit, the magnetic detection list being arranged on same substrate
Unit and Thickness sensitivity unit.
Wherein, optical detection unit include optical lens, the light source of optical lens side, be arranged on above lens transparent
Plate, being arranged on the wiring board below lens and at least one row's photoelectric conversion chip, wherein, photoelectric conversion chip is arranged on circuit
It is positioned at the underface of lens on plate, the surface of photoelectric conversion chip is provided with row's photosensitive window, the merit of photoelectric conversion chip
Can be that photosensitive window is photosensitive, and convert optical signals into the signal of telecommunication.
Magnetic detection unit be provided with in being included in common framework permanent magnet, permanent magnet be arranged over circuit base plate, letter
Number processing chip and be arranged at least one row of circuit base plate upper surface and feel magnetic chip, signal processing chip comprises logic with shift
Transfer function and differential amplification function, the sense magnetic chip of circuit base plate upper surface and the top of signal processing chip are equipped with without magnetic
The protection board of property.When band magnetic original copy changes through sense magnetic chip, the magneto-resistor of sense magnetic chip, so that sense magnetic chip
Voltage output changes.
Thickness sensitivity unit is provided with circuit base plate, is arranged on circuit base plate at least one row in being included in common framework
Charge inducing chip and the public electrode being arranged on circuit base plate.Wherein, the length of public electrode and at least one row's sensing
The total length of electric charge chip is corresponding, and the top of public electrode and row's charge inducing chip is equipped with protection board.In common electrical
Extremely going up making alive, public electrode forms electric field with charge inducing chip chamber, and charge inducing chip is charged, when original copy is through faradism
Time above lotus chip, the dielectric constant between charge inducing chip and public electrode changes, the electricity of charge inducing chip sensing
Lotus quantity changes, so that the voltage output of charge inducing chip changes.
In the number of the photoelectric conversion chip in optical detection unit in this Multifunction Sensor, magnetic detection unit
The sense number of magnetic chip and Thickness sensitivity unit in the number of charge inducing chip the most identical, and, adjacent photo turns
The interval changing the interval feeling magnetic chip in the interval of chip, adjacent magnetic detector unit and adjacent charge inducing chip is homogeneous
With, i.e. photoelectric conversion chip, sense magnetic chip and photoelectric conversion chip one_to_one corresponding so that the resolution phase of three detector units
With, and, the output of three detector units is all voltage, and output format is identical.
AD conversion unit in the application can include an analog-digital converter, it is also possible to include multiple analog digital conversion
Device, each analog-digital converter can be parallel A/D converter, it is also possible to be serial analog-digital converter.Those skilled in the art can
To select suitable analog-digital converter as the case may be.
The resolution of above-mentioned each analog-digital converter is at least 8, the analog electrical signal that so can detection be obtained
Be converted at least from 0 to 255 256 centrifugal pumps altogether.Those skilled in the art can select suitable resolution according to practical situation
The analog-digital converter of rate.
So that the data that detecting system obtains are more true with the final image obtained accurately, as in figure 2 it is shown, this Shen
Preferably said detecting system please also include correcting unit 3, the input of this correcting unit 3 and the output of above-mentioned AD conversion unit
End electrical connection, the control end of above-mentioned correcting unit electrically connects with above-mentioned control unit, and above-mentioned correcting unit is for by above-mentioned modulus
The digital signal of converting unit output makes corrections.
Correcting unit can be any processor, such as ARM, DSP or FPGA of the prior art.This area skill
Art personnel can select suitable processor as correcting unit according to practical situation.
In the another kind of embodiment of the application, above-mentioned correcting unit includes augmenting factor acquisition module and computing module, its
In, augmenting factor acquisition module electrically connects with the outfan of above-mentioned AD conversion unit, and above-mentioned augmenting factor acquisition module is used for
Obtain the augmenting factor of each above-mentioned detector unit corresponding to each above-mentioned scanning element；Computing module and above-mentioned augmenting factor acquisition module
Electrical connection, each digital signal that above-mentioned computing module uses each above-mentioned augmenting factor to export above-mentioned AD conversion unit is mended
Just, above-mentioned augmenting factor and the digital signal one_to_one corresponding of above-mentioned AD conversion unit output when detecting above-mentioned film to be measured.
In the another embodiment of the application, above-mentioned augmenting factor acquisition module includes primary data acquisition module and correction
Coefficients calculation block, wherein, primary data acquisition module is used for obtaining the primary data of each scanning element of each above-mentioned detector unit,
Above-mentioned primary data includes the first primary data and the second primary data, and the first primary data of above-mentioned optical detection unit is light
Learn the first primary data L1MN, the second primary data of above-mentioned optical detection unit is optics the second primary data L2MN, above-mentioned magnetic
First primary data of property detector unit is magnetic the first primary data M1MN, the second primary data of above-mentioned magnetic detection unit
For magnetic the second primary data M2MN, the first primary data of above-mentioned Thickness sensitivity unit is thickness the first primary data T1MNOn,
The second primary data stating Thickness sensitivity unit is thickness the second primary data T2MN, wherein, M Yu N represents each above-mentioned scanning respectively
The line order number of point and row ordinal number.
Above-mentioned augmenting factor computing module uses formula K1MN=predetermined gray value/(L2MN-L1MN) it is calculated optics correction
COEFFICIENT K1MN, use formula K2MN=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor K2MN, use formula K3MN
=predetermined gray value/(T2MN-T1MN) it is calculated thickness augmenting factor K3MN。
Those skilled in the art can select suitable predetermined gray value according to practical situation.
In a preferred embodiment of the present application, when the resolution of analog-digital converter is 8, predetermined gray value take 50～
Any one numeral between 255.
Wherein, when the light source of above-mentioned optical detection unit is the most luminous, after starting optical detection unit, above-mentioned analog digital conversion list
The digital signal that the optical detection data with each above-mentioned scanning element of unit's output are corresponding is above-mentioned optics the first primary data L1MN,
During above-mentioned light source luminescent, after optical detection unit scans the optics sample film of its focal point, above-mentioned AD conversion unit exports
Digital signal corresponding to the optical detection data with each above-mentioned scanning element be above-mentioned optics the second primary data L2MN.Above-mentioned light
Learning sample film is the blank sheet of paper without word Yu image.
After magnetic detection unit scan magnetic sample film, above-mentioned AD conversion unit output with each above-mentioned scanning element
Lowest numeric signal corresponding to magnetic detection data is above-mentioned magnetic the first primary data M1MN, above-mentioned magnetic detection unit scan
After above-mentioned magnetic sample film, the magnetic detection data with each above-mentioned scanning element of above-mentioned AD conversion unit output are corresponding
Big digital signal is above-mentioned magnetic the second primary data M2MN.The surface configuration of above-mentioned magnetic sample film has the square at multiple interval
Shape magnetic strips.
When Multifunction Sensor does not place any thin film, start Thickness sensitivity unit scan, above-mentioned analog digital conversion list
The digital signal that the Thickness sensitivity data with each above-mentioned scanning element of unit's output are corresponding is above-mentioned thickness the first primary data T1MN,
After above-mentioned Thickness sensitivity unit scan thickness sample film, above-mentioned AD conversion unit output with each above-mentioned scanning element thickness
The second primary data T that digital signal is above-mentioned Thickness sensitivity unit that degree detection data are corresponding2MN, above-mentioned thickness sample film
For thin film in uniform thickness.
In order to more accurately the detection data of three detector unit outputs of Multifunction Sensor be maked corrections, above-mentioned
Computing module includes: optical computing module, magnetic computing module and THICKNESS CALCULATION module.
Above-mentioned optical computing module uses formula (LMN-L1MN)×K1MNTo above-mentioned LMNMake corrections, wherein, above-mentioned LMNFor
After above-mentioned optical detection unit scans above-mentioned film to be measured, the optics with each above-mentioned scanning element of above-mentioned AD conversion unit output is examined
Survey the digital signal that data are corresponding.
Magnetic computing module uses formula (MMN-M1MN)×K2MNTo above-mentioned MMNMake corrections, wherein, above-mentioned MMNFor above-mentioned
After the above-mentioned film to be measured of magnetic detection unit scan, the magnetic detection number with each above-mentioned scanning element of above-mentioned AD conversion unit output
According to corresponding digital signal.
THICKNESS CALCULATION module uses formula (TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo above-mentioned TMNMake corrections, its
In, above-mentioned TMNFor above-mentioned Thickness sensitivity unit scan after above-mentioned survey film, above-mentioned sweeping with each of above-mentioned AD conversion unit output
The digital signal that the Thickness sensitivity data of described point are corresponding.Due to TMN-T1MNThe result drawn is probably negative value, and negative value is at image
In be difficult to show, therefore, in order to show test result more accurately, use skew gray value TSImprove result of calculation so that meter
Calculate result more than 0.
Owing to Thickness sensitivity unit of the prior art has two kinds, one is when Multifunction Sensor does not place any treating
During the thin film detected, the voltage of Thickness sensitivity unit output is about close to about 0V, and at this moment, THICKNESS CALCULATION module uses (TMN-
T1MN)×K3MNTo above-mentioned TMNMake corrections, another kind of when Multifunction Sensor does not place any thin film to be detected, thickness
The voltage of detector unit output is about at about VDD/2, and at this moment, THICKNESS CALCULATION module uses formula (TMN-T1MN)+TSTo above-mentioned
TMNMake corrections, above-mentioned TSFor skew gray value, this value is relevant with the thickness property of testing film, and, the size of this value is
Set according to actual needs, be used to promote result of calculation.
General TSBetween 50～200.Those skilled in the art can set suitable T according to practical situationSValue.
In the another embodiment of the application, as it is shown on figure 3, said detecting system includes memory element 5, this memory element
5 electrically connect with above-mentioned correcting unit 3 and control unit 4, and this unit is used for storing above-mentioned augmenting factor and above-mentioned primary data.
Further, when needing augmenting factor to make corrections the detection data after analog digital conversion with above-mentioned primary data, storage is single
The primary data of storage is inputted to correcting unit 3 by unit 5 with augmenting factor.
Above-mentioned memory element can be the storage that any one of the prior art can realize the application memory action
Device, those skilled in the art can select suitable memorizer as memory element according to practical situation, such as, can select
Eeprom memory or FLASH memory.
So that correction magnetic detection unit and the reference voltage of Thickness sensitivity unit, even if magnetic detection unit is each
Scanning element is not when Multifunction Sensor places any thin film, and the output of each sense magnetic chip of magnetic detection unit is equal to same
Magnitude of voltage, makes the output of each charge inducing chip of Thickness sensitivity unit equal to same magnitude of voltage simultaneously.As shown in Figure 4, this Shen
Preferably said detecting system please also include D/A conversion unit 6, this D/A conversion unit 6 and above-mentioned magnetic detection unit, above-mentioned
Thickness sensitivity unit and above-mentioned control unit 4 all electrically connect, and above-mentioned D/A conversion unit 6 is for by the magnetic after above-mentioned correction
The digital signal that reference voltage is corresponding is converted to voltage signal and inputs to above-mentioned magnetic detection unit, and above-mentioned digital-to-analogue conversion
Unit 6 for being converted to voltage signal and inputting to above-mentioned thickness by digital signal corresponding for the thickness reference voltage after above-mentioned correction
In degree detector unit, wherein, the magnetic reference voltage after above-mentioned correction is output in time detecting above-mentioned magnetic detection unit
Signal is corrected, and the signal of output in time detecting above-mentioned Thickness sensitivity unit of the thickness reference voltage after above-mentioned correction enters
Row correction.
D/A conversion unit in the application can include a digital to analog converter, it is also possible to include multiple digital-to-analogue conversion
Device, each digital to analog converter can be parallel digital to analog converter, it is also possible to be serial digital to analog converter.Those skilled in the art can
To select suitable digital to analog converter as the case may be.
The resolution of above-mentioned each digital to analog converter is at least 8, the analog electrical signal that so can detection be obtained
Be converted at least from 0 to 255 256 centrifugal pumps altogether.Those skilled in the art can select suitably number according to practical situation
Weighted-voltage D/A converter.
In the another kind of embodiment of the application, above-mentioned correcting unit also includes magnetic reference voltage correction module and thickness base
Quasi-voltage correction module.
Wherein, magnetic reference voltage correction module uses formula MRMMN=MM+(MM-MMMN), calculate the magnetic base after correction
The digital signal M that quasi-voltage is correspondingRMMN, wherein, above-mentioned MMFor magnetic reference voltage VMCorresponding digital signal, above-mentioned MMMNFor
When not placing any thin film, the magnetic detection voltage V of each above-mentioned scanning elementMMNCorresponding digital signal.
Thickness reference voltage correction module uses formula TRMN=TT+(TT-T1MN), calculate the thickness reference voltage after correction
TRTMN, wherein, above-mentioned TTFor thickness reference voltage VTCorresponding digital signal, above-mentioned T1MNFor thickness the first primary data, above-mentioned
Thickness the first primary data T1MNFor when not placing any thin film, the Thickness sensitivity voltage V of each above-mentioned scanning element1MNCorresponding
Digital signal.
The voltage V that above-mentioned exportable first primary data of thickness reference voltage correction module is corresponding1MNAt VDD/2
The Thickness sensitivity unit of left and right.
In the typical embodiment of another of the application, it is proposed that the detection method of a kind of thin film, this detection method bag
Include: step S1, use Multifunction Sensor three detector units each scanning element on film to be measured is carried out respectively optical detection,
Magnetic detection and Thickness sensitivity, three above-mentioned detector units are respectively optical detection unit, magnetic detection unit and Thickness sensitivity
Unit；Step S2, is separately converted to the digital signal of correspondence by the output signal of three above-mentioned detector units.
Above-mentioned detection method can detect three kinds of physical quantitys of thin film simultaneously, and three kinds of physical quantitys are entered by AD conversion unit
The data process that row is similar, simplifies data processing hardware device so that detecting system can produce the difference of equal resolution
The image of physical characteristic.
In order to obtain detecting more accurately image, the preferred above-mentioned detection method of the application also includes: step S3, will
The digital signal obtained in above-mentioned steps S2 makes corrections.
In the another kind of embodiment of the application, before above-mentioned steps S3, above-mentioned detection method also includes: step A, obtains
The augmenting factor of each above-mentioned detector unit that each scanning element is corresponding, above-mentioned augmenting factor is for the numeral obtaining above-mentioned steps S2
Signal makes corrections, the corresponding augmenting factor of the optical detection data of each scanning element of film to be measured, each magnetic
The all corresponding augmenting factor of detection data, each Thickness sensitivity data also corresponding augmenting factor, say, that each
All corresponding three augmenting factors of scanning element.The scanning element that the augmenting factor of optical detection unit is corresponding to optical detection unit scanning
The detection data obtained make corrections, and the scanning element that magnetic detection unit scan is corresponding is obtained by the augmenting factor of magnetic detection unit
To detection data make corrections, the scanning element that Thickness sensitivity unit scan is corresponding is obtained by the augmenting factor of Thickness sensitivity unit
Detection data make corrections.
In order to more efficiently make corrections the data of detection, in a kind of embodiment of the application, above-mentioned steps A includes:
Step A1, obtains the primary data of each above-mentioned detector unit, and above-mentioned primary data includes optics the first primary data L1MN, optics
Second primary data L2MN, magnetic the first primary data M1MN, magnetic the second primary data M2MN, thickness the first primary data T1MN、
Thickness the second primary data T2MN, wherein, M Yu N represents line order number and the row ordinal number of scanning element respectively；Step A2, utilize above-mentioned at the beginning of
Beginning data calculate above-mentioned augmenting factor, use formula K1MN=predetermined gray value/(L2MN-L1MN) it is calculated optics augmenting factor
K1MN, use formula K2MN=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor K2MN, use formula K3MN=pre-
Determine gray value/(T2MN-T1MN) it is calculated thickness augmenting factor K3MN。
Predetermined gray value can take any one numeral between 0～255.Those skilled in the art can be according to actual feelings
Condition selects suitable predetermined gray value.
In a preferred embodiment of the present application, when the resolution of analog-digital converter is 8, predetermined gray value take 50～
Any one numeral between 255.
Wherein, when the light source of above-mentioned optical detection unit is the most luminous, startup optical detection unit carries out empty scanning and obtains
Optical detection data, each photoelectric conversion chip can detect optical detection data, optical detection data are carried out mould
Number obtains the digital signal of correspondence after converting, these digital signals are above-mentioned optics the first primary data L1MN, above-mentioned optics second
Primary data L2MNDuring for above-mentioned light source luminescent, after the optics sample film of the focal point scanning above-mentioned optical detection unit, each on
State the optical detection data (the optical detection data that i.e. each photoelectric conversion chip must detect) of scanning element through analog-to-digital conversion
After digital signal.
After above-mentioned magnetic detection unit scan magnetic sample film, the magnetic detection data of each above-mentioned scanning element turn through modulus
Lowest numeric signal after changing is above-mentioned magnetic the first primary data M1MN；Above-mentioned magnetic detection unit above-mentioned magnetic scanning sample
After thin film, each sense magnetic chip of magnetic detection unit can export magnetic detection data, the magnetic detection of each above-mentioned scanning element
Data maximum number signal after analog-to-digital conversion is above-mentioned magnetic the second primary data M2MN。
When above-mentioned Multifunction Sensor is not put into detecting thin film, start Thickness sensitivity unit, each charge inducing core
Sheet all can export Thickness sensitivity data, and the Thickness sensitivity data of each above-mentioned scanning element digital signal after analog-to-digital conversion is
Above-mentioned thickness the first primary data T1MN, when above-mentioned Thickness sensitivity unit scan thickness sample film, each charge inducing chip obtains
To digital signal after analog-to-digital conversion of the Thickness sensitivity data of each above-mentioned scanning element of correspondence be above-mentioned Thickness sensitivity unit
Second primary data T2MN。
Above-mentioned steps S3 includes: use formula (LMN-L1MN)×K1MNTo above-mentioned LMNMaking corrections, wherein, above-mentioned optics is examined
After surveying the above-mentioned film to be measured of unit scan, each photoelectric conversion chip exports corresponding with an each detecting electrode optical detection
Data, it is L that these optical detection data export the digital signal of correspondence after analog digital conversionMN；Use formula (MMN-M1MN)×
K2MNTo above-mentioned MMNMake corrections, wherein, after the above-mentioned film to be measured of above-mentioned magnetic detection unit scan, each sense magnetic chip output with
Corresponding one magnetic detection data of each detecting electrode, these magnetic detection data export the numeral of correspondence after analog digital conversion
Signal is above-mentioned MMN；Use formula (TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo above-mentioned TMNMake corrections, wherein, above-mentioned
Thickness sensitivity unit scan is after above-mentioned survey film, and each charge inducing chip exports the Thickness sensitivity number corresponding with each scanning element
According to, the digital signal that these Thickness sensitivity data obtain after analog-to-digital conversion is designated as TMN.Above-mentioned TSFor skew gray value.
In order to more efficiently make corrections detection data, the preferred above-mentioned detection method of the application also includes: to above-mentioned benefit
Positive coefficient and the storing process of above-mentioned primary data.These storage data can be with ready access upon use.
In another embodiment of the application, before above-mentioned steps S1, above-mentioned detection method also includes: to magnetic reference
Voltage is corrected and inputs in above-mentioned magnetic detection unit, and the above-mentioned magnetic reference voltage after correction is to above-mentioned magnetic detection list
During unit's detection, the signal of output is corrected；Thickness reference voltage is corrected and inputs in above-mentioned Thickness sensitivity unit,
When above-mentioned Thickness sensitivity unit is detected by the above-mentioned thickness reference voltage after correction, the signal of output is corrected.
Expectation voltage when not detecting any object of setting, usually power supply it is actually needed according to magnetic reference voltage
The half of voltage.
Expectation voltage when not detecting any object of setting, usually power supply it is actually needed according to thickness reference voltage
The half of voltage, or slightly above 0V voltage.
In the another embodiment of the application, the above-mentioned process being corrected magnetic reference voltage includes: to above-mentioned magnetic
Property detector unit input above-mentioned magnetic reference voltage VM；When above-mentioned Multifunction Sensor does not place any detection thin film, open
Dynamic above-mentioned magnetic detection unit, above-mentioned magnetic detection unit exports multiple magnetic detection voltage VMMN；By above-mentioned VMWith above-mentioned VMMN
It is respectively converted into digital signal MMWith MMMN, use formula MRMMN=MM+(MM-MMMN), magnetic reference electricity above-mentioned after calculating correction
The digital signal M that pressure is correspondingRMMN；By above-mentioned MRMMNBe converted to voltage signal VRMMN。
The above-mentioned process being corrected thickness reference voltage includes: input above-mentioned thickness base to above-mentioned Thickness sensitivity unit
Quasi-voltage VT；When above-mentioned Multifunction Sensor does not place any thin film, starting above-mentioned Thickness sensitivity unit, above-mentioned thickness is examined
Survey unit and export multiple Thickness sensitivity voltage V1MN；By above-mentioned VTWith above-mentioned V1MNIt is respectively converted into digital signal TTWith T1MN, use
Formula TRTMN=TT+(TT-T1MN), calculate the digital signal T that the above-mentioned thickness reference voltage after correction is correspondingRMN。
So that those skilled in the art can clearly understand the technical scheme of the application, below with reference to tool
The scheme of the application is illustrated by the embodiment of body.
Embodiment 1
In figure, 3 is the structured flowchart of detecting system, and wherein Multifunction Sensor 1 includes optical detection unit, magnetic detection
Unit and Thickness sensitivity unit.Wherein, the resolution of three detector units is 100DPI, and three detector units all only have a line
(detection chip in optical detection unit is photoelectric conversion chip to detection chip, and the detection chip in magnetic detection unit is sense
Magnetic chip, the detection chip in Thickness sensitivity unit is charge inducing chip), and a line detection chip of these three detector unit
Number be 720.
The clock frequency that control unit 4 controls three detector units is identical, and wherein, optical detection unit light source is monochromatic.
AD conversion unit 2 is the parallel A/D converter of three input 8, three inputs respectively with optical detection unit,
The outfan electrical connection of magnetic detection unit and Thickness sensitivity unit, this analog-digital converter is for simultaneously by three detector units
Output signal is converted to digital signal.
Correcting unit 3 is realized by FPGA, and including augmenting factor acquisition module and computing module, augmenting factor acquisition module is used
In calculating augmenting factor, computing module detection data after calculating correction.Wherein, augmenting factor acquisition module includes initially
Data acquisition module and augmenting factor computing module.Computing module includes optical computing module, magnetic computing module and thickness gauge
Calculate module.Memory element is realized by EEPROM, for correction data and the benefit of three each detection chip of detector unit of storage
Positive coefficient.Control unit is also realized by FPGA, is used for controlling each unit collaborative work.
The workflow of the detecting system of this thin film is:
First, the primary data acquisition module in correcting unit is utilized to obtain augmenting factor with computing module.
For optical detection unit, the light source of the optical detection unit that control unit 4 controls Multifunction Sensor 1 does not works,
Optical detection unit sky scans a line, obtains data line, AD conversion unit 2 be converted to the digital signal of 8, this numeral
Signal is optics the first primary data L11N(L1MNIn M=1, be therefore L11N, wherein, N=1,2 ..., 720), initial number
Optics the first primary data L is obtained according to acquisition module11N。
Placing white reference original copy (optics sample film) at optical detection unit focal position, control unit 4 controls light
Source point is bright scans a line again, obtains the optical detection data of scanning element, then by optical detection data through analog digital conversion be numeral
Signal, this digital signal is optics the second primary data L21N(L2MNIn M=1, be therefore L21N, wherein, N=1,2 ...,
720), primary data acquisition module obtains optics the second primary data L21N。
Correcting unit 3 uses formula K11N=217/ (L21N-L11N) each detection chip of calculating optical detector unit is corresponding
Optics augmenting factor K11N, by K11NWith L11NIt is stored in memory element 5.
For magnetic detection unit, control unit 4 controls the magnetic detection unit dynamic scan magnetic of Multifunction Sensor 1
Sample film (prints the magnetic ink of one fixed width) in this sample film, it is thus achieved that magnetic detection data, and uses analog digital conversion
Unit is converted into digital signal, correcting unit 3 calculate each detection chip maximum numeral in this scanning process
Signal and lowest numeric signal, wherein, lowest numeric signal is magnetic the first primary data M11N, maximum number signal is magnetic
Second primary data M21N。
Use formula K2MN=217/ (M21N-M11N) it is calculated magnetic augmenting factor K21N, by K21NWith M11NIt is stored in
In storage unit 5.
For Thickness sensitivity unit, when not detecting thin film, control unit 4 controls Thickness sensitivity unit scan one line number
According to, obtain Thickness sensitivity data, use AD conversion unit that Thickness sensitivity data are converted into digital signal, these digital signals
For thickness the first primary data T11N。
Place thickness sample film in detecting system, scan this thin film, it is thus achieved that a line Thickness sensitivity data, by Thickness sensitivity
Data are converted into digital signal, and these digital signals are referred to as thickness the second primary data T21N。
Augmenting factor computing module uses formula K31N=217/ (T21N-T11N) it is calculated thickness augmenting factor K31NCalculate
By the first primary data T after completing11NWith K31NStore in memory element 5.
Secondly, use three detector units in Multifunction Sensor film to be measured is carried out Thickness sensitivity, optical detection with
Magnetic detection.
Being put into by determinand in detecting system, control unit 4 controls three detector units of Multifunction Sensor and sweeps simultaneously
Retouching determinand, three detector units are all sequentially output 720 data of respective a line under clock signal drives.With each detection
The detection data instance of first detection chip of unit, the optical detection data of first detection chip of optical detection unit
(to reply one scanning element optical detection data), the magnetic detection data of first detection chip of magnetic detection unit and
The Thickness sensitivity data of Thickness sensitivity unit the first detection chip export to AD conversion unit 2 under a clock drives simultaneously
In, three data are converted to digital signal by AD conversion unit 2, the optics inspection of the first detection chip in optical detection unit
The digital signal surveying data corresponding is designated as L11, number that the magnetic detection data of the first detection chip in magnetic detection unit are corresponding
Word signal is designated as M11, the digital signal that the Thickness sensitivity data of the first detection chip of Thickness sensitivity unit are corresponding is designated as T11。
Finally, the digital signal using correcting unit to export AD conversion unit makes corrections.
Above-mentioned three kinds of digital signals detecting data corresponding are delivered in correcting unit, and start (opens the electricity of system every time
Source) time, correcting unit 3 read from memory element 5 three the first primary datas corresponding to detector unit each detection chip with
Augmenting factor, uses formula (L11-L111)×K111To above-mentioned L11Make corrections, use formula (M11-M131)×K211To above-mentioned M11
Make corrections, use formula (T11-T131)×K311To above-mentioned T11Make corrections.
So circulation is until the 720th clock, after correcting unit 3 completes to calculate three each self-corresponding corrections of detector unit
Data, i.e. optical detection unit correction after data be (LMN-L1MN)×K1MN, data (M after the correction of magnetic detection unitMN-
M1MN)×K2MN, after the correction of Thickness sensitivity unit, data are (TMN-T1MN)×K3MN, scan multirow the most continuously, representative can be generated
The briliancy image of three kinds of physical quantitys, wherein, M is the line order number of scanning element, and N is the row sequence number of scanning element.
Embodiment 2
Difference from Example 1 is that the light source of optical detection unit is 5 kinds, respectively HONGGUANG, green glow, blue light, red
Outer light and ultraviolet light, and the clock frequency of optical detection unit is 5 times of clock frequency of magnetic detection unit.Magnetic detection list
Unit is identical with the clock frequency of Thickness sensitivity unit.
Due to the difference of clock frequency, AD conversion unit is made up of two analog-digital converters, single channel analog-digital converter
Input electrically connects with the outfan of optical detection unit, two inputs of two-way analog-digital converter respectively with magnetic detection list
The outfan electrical connection of unit and Thickness sensitivity unit.The light source of optical detection unit is 5 kinds herein, i.e. to divide same scanning element
Do not light 5 kinds of photoscanning 5 times, owing to the clock frequency of optical detection unit is 5 times of Thickness sensitivity unit, i.e. optical detection list
5 kinds of light of unit scan a line successively needed for time and Thickness sensitivity unit scan a line required for time identical.This embodiment
Magnetic detection unit is identical with embodiment 1 with the data processing method of Thickness sensitivity unit, and here is omitted.
The flow chart of data processing of optical detection unit is below mainly described.During optical detection unit correction, control unit 4 is controlled
The light source of the optical detection unit of Multifunction Sensor 1 processed does not works, and optical detection unit sky scans a line, obtains data line,
Be converted to the digital signal of 8 by AD conversion unit 2, this digital signal is optics the first primary data L11N(L1MNIn M=
1, therefore it is L11N, wherein, N=1,2 ..., 720), primary data acquisition module obtains optics the first primary data L11N。
Then, placing white reference original copy (optics sample film) at optical detection unit focal position, control unit 4 is controlled
Light source igniting HONGGUANG processed scans a line again, obtains the optical detection data of scanning element, then optical detection data is turned through modulus
Being changed to digital signal, this digital signal is HONGGUANG optics the second primary data L21NR(L2MNRIn M=1, be therefore L21NR, its
In, N=1,2 ..., 720, the last letter in subscript characterizes different light sources, should during due to light source be HONGGUANG,
Represent with " R "), primary data acquisition module obtains HONGGUANG optics the second primary data L21NR。
Use formula K11NR=217/ (L21NR-L11N) calculate HONGGUANG optics augmenting factor K11NR。
So circulation is until the 720th clock, after correcting unit 3 completes to calculate three each self-corresponding corrections of detector unit
Data.
Placing white reference original copy (optics sample film) at optical detection unit focal position, control unit 4 controls light
Source point viride nitens light scans a line again, obtains the optical detection data of scanning element, then by optical detection data through analog digital conversion is
Digital signal, this digital signal is green glow optics the second primary data L21NR(L2MNGIn M=1, be therefore L21NG, wherein, N=
1,2 ..., 720, the last letter in subscript characterizes different light sources, should during due to light source be green glow, with " G "
Represent), primary data acquisition module obtains green glow optics the second primary data L21NG.Use formula K11NG=217/ (L21NG-
L11N) calculate.
Same method is used to obtain blue light optical augmenting factor K11NB, infrared optics augmenting factor K11NIRWith ultraviolet light light
Learn augmenting factor K11NP.Above-mentioned all of augmenting factor and the first primary data are stored in memory element.
When scanning film to be measured, control unit controls magnetic detection unit and Thickness sensitivity unit in Multifunction Sensor simultaneously
Outward, optical detection unit and AD conversion unit corresponding to optical detection unit and subsequent process circuit are individually controlled so that it is
Work under faster clock reference.Magnetic detection unit or Thickness sensitivity unit scan data line, corresponding optical detection list
Unit HONGGUANG, green glow, blue light, infrared light, ultraviolet light respectively scan data line, and the data after number conversion cell translation are respectively
For digital signal corresponding to the HONGGUANG optical detection data of above-mentioned scanning element to LMNR, numeral corresponding to green glow optical detection data
Signal LMNG, digital signal L corresponding to infrared light optical detection dataMNIR, blue light optical detection digital signal corresponding to data
LMNBAnd ultraviolet optics detection digital signal corresponding to data is to LMNP.Use formula (LMNR-L1MN)×K1MNRTo LMNIRMend
Just, formula (L is usedMNG-L1MN)×K1MNGTo LMNIGMake corrections, use formula (LMNB-L1MN)×K1MNBTo LMNIBMend
Just, formula (L is usedMNIR-L1MN)×K1MNIRTo LMNIIRMake corrections, use formula (LMNP-L1MN)×K1MNPTo LMNIPMend
Just.
So scan multirow continuously, i.e. can get 5 images that 5 kinds of light of optical detection unit are corresponding, 1 magnetic detection list
Unit's image, 1 Thickness sensitivity cell picture.
Embodiment 3
Difference from Example 2 is, the same magnetic detection of the clock frequency of optical detection unit in Multifunction Sensor
Unit and Thickness sensitivity unit identical, but optical detection unit is five tunnels outputs, one No. five analog-digital converter and optics
Detector unit is corresponding.Optical detection unit 5 tunnel exports so that scan the time needed for 5 coloured light and magnetic detection unit and thickness
Time needed for degree detector unit scans a line is identical, and No. five analog-digital converters export conversion data at faster speed to correction
Carrying out correction process in unit 3, it each makes corrections and data processing method is with embodiment 2, and here is omitted.
Embodiment 4
As shown in Figure 4, the difference with embodiment 3 is the structured flowchart of detecting system, adds a digital-to-analogue conversion list
Unit 6, major function is magnetic detection unit and the reference voltage of each scanning element of Thickness sensitivity unit in correction Multifunction Sensor,
Reduce the deviation caused between each scanning element due to discreteness.Correcting unit also includes magnetic reference voltage correction module and thickness
Voltage correction module.
Having two 8 figure place weighted-voltage D/A converters in D/A conversion unit, a digital to analog converter electrically connects with magnetic detection unit,
Another digital to analog converter electrically connects with Thickness sensitivity unit.Magnetic detection unit and the benchmark of each scanning element of Thickness sensitivity unit
The trimming process of voltage is as follows.
Set magnetic detection unit when not detecting film to be measured each scanning element output reference as VM, Thickness sensitivity unit is not
Detecting each scanning element output reference during film to be measured is VT, control unit 4 controls digital to analog converter output fixed voltage VMExamine to magnetic
Survey unit, control digital to analog converter output fixed voltage VTTo Thickness sensitivity unit, start magnetic detection unit and thickness simultaneously
Detector unit is scanning data line when Multifunction Sensor does not place detection any thin film, turns through corresponding analog-digital converter
Being changed to digital signal, the data line of magnetic detection unit is designated as VM1N, the data line of Thickness sensitivity unit is designated as V11N。
Magnetic reference voltage correction module uses formula MRM1N=MM+(MM-MM1N) (i.e. formula MRMMN=MM+(MM-MMMN) take
Formula corresponding during M=1) calculate the digital signal M that the magnetic reference voltage after correcting is correspondingRM1N, thickness reference voltage corrects
Module uses formula TRT1N=TT+(TT-T11N) (i.e. formula TRTMN=TT+(TT-T1MN) take formula corresponding during M=1), calculate school
Thickness reference voltage T after justRT1N, by digital signal M corresponding for the magnetic reference voltage after correctionRM1NWith the thickness after correction
Reference voltage TRT1NStorage is in the memory unit.
During subsequent detection, increase following control, i.e. magnetic detection unit and Thickness sensitivity unit is sequentially output often
While the data of individual scanning element, control unit 4 controls digital to analog converter and exports the magnetic reference that each magnetic detection point is corresponding
Voltage signal VRM1NTo magnetic detection unit, control unit 4 controls digital to analog converter and exports the thickness that each Thickness sensitivity point is corresponding
Degree reference voltage signal VRT1NIn Thickness sensitivity unit, the output of all magnetic detection unit with Thickness sensitivity unit is carried out
Correction.
Magnetic detection unit and the follow-up detection process of Thickness sensitivity unit are same as in Example 1 with data handling procedure,
Here is omitted.
As can be seen from the above description, the application the above embodiments achieve following technique effect:
1) three detector units in the Multifunction Sensor that in the detecting system, in the application, control unit controls, make
Obtaining these three detector unit and can detect three kinds of physical quantitys of thin film simultaneously, three kinds of physical quantitys are carried out similar by AD conversion unit
Data process, and simplify data processing hardware device so that detecting system can produce the different physical characteristics of equal resolution
Image.
2) detection method, in the application can detect three kinds of physical quantitys of thin film simultaneously, and AD conversion unit is to three kinds
Physical quantity carries out similar data and processes, and simplifies data processing hardware device so that detecting system can produce identical resolution
The image of the different physical characteristics of rate.
The foregoing is only the preferred embodiment of the application, be not limited to the application, for the skill of this area
For art personnel, the application can have various modifications and variations.All within spirit herein and principle, that is made any repaiies
Change, equivalent, improvement etc., within should be included in the protection domain of the application.
Claims (16)
1. the detecting system of a thin film, it is characterised in that described detecting system includes:
Multifunction Sensor, including three detector units, is optical detection unit, magnetic detection unit and Thickness sensitivity list respectively
Unit, three described detector units for carrying out optical detection, magnetic detection and thickness inspection respectively to each scanning element on film to be measured
Survey；
AD conversion unit, the input of described AD conversion unit and the outfan of described optical detection unit, magnetic detection
The outfan of unit and the outfan electrical connection of Thickness sensitivity unit, described AD conversion unit is for by three described detections
The output signal of unit is separately converted to the digital signal of correspondence；And
Control unit, electrically connects with described Multifunction Sensor and described AD conversion unit, is used for controlling described multi-functional
Sensor works with described AD conversion unit.
Detecting system the most according to claim 1, it is characterised in that described detecting system also includes:
Correcting unit, input electrically connects with the outfan of described AD conversion unit, the control end of described correcting unit and institute
Stating control unit electrical connection, described correcting unit is for making corrections the digital signal that described AD conversion unit exports.
Detecting system the most according to claim 2, it is characterised in that described correcting unit includes:
Augmenting factor acquisition module, electrically connects with the outfan of described AD conversion unit, and described augmenting factor acquisition module is used
In the augmenting factor obtaining each described detector unit corresponding to each described scanning element；And
Computing module, electrically connects with described augmenting factor acquisition module, and described computing module uses each described augmenting factor to institute
The each digital signal stating AD conversion unit output makes corrections, described augmenting factor and described modulus when detecting described film to be measured
The digital signal one_to_one corresponding of converting unit output.
Detecting system the most according to claim 3, it is characterised in that described augmenting factor acquisition module includes:
Primary data acquisition module, for obtaining the primary data of each scanning element of each described detector unit, described primary data
Including the first primary data and the second primary data, the first primary data of described optical detection unit is optics the first initial number
According to L1MN, the second primary data of described optical detection unit is optics the second primary data L2MN, described magnetic detection unit
First primary data is magnetic the first primary data M1MN, the second primary data of described magnetic detection unit is at the beginning of magnetic second
Beginning data M2MN, the first primary data of described Thickness sensitivity unit is thickness the first primary data T1MN, described Thickness sensitivity list
Second primary data of unit is thickness the second primary data T2MN, wherein, M Yu N represent respectively the line order number of each described scanning element with
Row ordinal number,
Wherein, when the light source of described optical detection unit is the most luminous, described AD conversion unit output with each described scanning element
Digital signal corresponding to optical detection data be described optics the first primary data L1MN, during described light source luminescent, scanning is described
After the optics sample film of the focal point of optical detection unit, the light with each described scanning element of described AD conversion unit output
The digital signal learning detection data corresponding is described optics the second primary data L2MN, described optics sample film be without word with
The blank sheet of paper of image,
After described magnetic detection unit scan magnetic sample film, described AD conversion unit output with each described scanning element
Lowest numeric signal corresponding to magnetic detection data is described magnetic the first primary data M1MN, described magnetic detection unit scan
After described magnetic sample film, the magnetic detection data with each described scanning element of described AD conversion unit output are corresponding
Big digital signal is described magnetic the second primary data M2MN, the surface configuration of described magnetic sample film has the square at multiple interval
Shape magnetic strips,
When described Multifunction Sensor does not place any thin film, the Thickness sensitivity data of described AD conversion unit output are corresponding
Digital signal be described thickness the first primary data T1MN, after described Thickness sensitivity unit scan thickness sample film, described mould
The digital signal that the Thickness sensitivity data with each described scanning element of number conversion unit output are corresponding is described Thickness sensitivity unit
The second primary data T2MN, described thickness sample film is thin film in uniform thickness；And
Augmenting factor computing module, uses formula K1MN=predetermined gray value/(L2MN-L1MN) it is calculated optics augmenting factor
K1MN, use formula K2MN=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor K2MN, use formula K3MN=pre-
Determine gray value/(T2MN-T1MN) it is calculated thickness augmenting factor K3MN。
Detecting system the most according to claim 4, it is characterised in that described computing module includes:
Optical computing module, uses formula (LMN-L1MN)×K1MNTo described LMNMake corrections, wherein, described LMNFor described optics
After detector unit scans described film to be measured, the optical detection data pair with each described scanning element of described AD conversion unit output
The digital signal answered；
Magnetic computing module, uses formula (MMN-M1MN)×K2MNTo described MMNMake corrections, wherein, described MMNFor described magnetic
After detector unit scans described film to be measured, the magnetic detection data pair with each described scanning element of described AD conversion unit output
The digital signal answered；And
THICKNESS CALCULATION module, uses formula (TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo described TMNMake corrections, wherein, institute
State TMNFor described Thickness sensitivity unit scan after described survey film, described AD conversion unit output with each described scanning element
The digital signal that Thickness sensitivity data are corresponding, described TSFor skew gray value.
Detecting system the most according to claim 4, it is characterised in that described detecting system includes:
Memory element, electrically connects with described correcting unit and described control unit, is used for storing described augmenting factor with described
Primary data.
Detecting system the most according to claim 6, it is characterised in that described detecting system also includes:
D/A conversion unit, with described magnetic detection unit, described Thickness sensitivity unit, described memory element and described control
Unit all electrically connects,
Described D/A conversion unit is for being converted to voltage signal also by digital signal corresponding for the magnetic reference voltage after correction
In input extremely described magnetic detection unit, and described D/A conversion unit is for corresponding by the thickness reference voltage after described correction
Digital signal be converted to voltage signal and input in described Thickness sensitivity unit, wherein, the magnetic reference after described correction
Voltage signal of output in time detecting described magnetic detection unit is corrected, and the thickness reference voltage after described correction is used
In time detecting described Thickness sensitivity unit, the signal of output is corrected.
Detecting system the most according to claim 7, it is characterised in that described correcting unit also includes:
Magnetic reference voltage correction module, uses formula MRMMN=MM+(MM-MMMN), calculate the magnetic reference voltage pair after correction
The digital signal M answeredRMMN, wherein, described MMFor magnetic reference voltage VMCorresponding digital signal, described MMMNFor not placing
During any thin film, the magnetic detection voltage V of each described scanning elementMMNCorresponding digital signal；
Thickness reference voltage correction module, uses formula TRTMN=TT+(TT-T1MN), calculate the thickness reference voltage after correction
TRTMN, wherein, described TTFor thickness reference voltage VTCorresponding digital signal, described T1MNFor thickness the first primary data, described
Thickness the first primary data is when described Multifunction Sensor does not place any thin film, the Thickness sensitivity of each described scanning element
Voltage V1MNCorresponding digital signal.
9. the detection method of a thin film, it is characterised in that described detection method includes:
Step S1, uses three detector units of Multifunction Sensor that each scanning element on film to be measured is carried out optics inspection respectively
Survey, magnetic detection and Thickness sensitivity, three described detector units are respectively optical detection unit, magnetic detection unit and thickness inspection
Survey unit；And
Step S2, is separately converted to the digital signal of correspondence by the output signal of three described detector units.
Detection method the most according to claim 9, it is characterised in that described detection method also includes:
Step S3, makes corrections the digital signal obtained in described step S2.
11. detection methods according to claim 10, it is characterised in that before described step S3, described detection method
Also include:
Step A, obtains the augmenting factor of each described detector unit corresponding to each scanning element, and described augmenting factor is for described step
The digital signal that rapid S2 obtains makes corrections.
12. detection methods according to claim 11, it is characterised in that described step A includes:
Step A1, obtains the primary data of each described detector unit, and described primary data includes optics the first primary data L1MN、
Optics the second primary data L2MN, magnetic the first primary data M1MN, magnetic the second primary data M2MN, thickness the first primary data
T1MN, thickness the second primary data T2MN, wherein, M Yu N represents line order number and the row ordinal number of scanning element respectively,
Wherein, when the light source of described optical detection unit is the most luminous, the optical detection data warp of described optical detection unit output
The digital signal obtained after analog-to-digital conversion is described optics the first primary data L1MN, during described light source luminescent, scan described optics
After the optics sample film of the focal point of detector unit, the optical detection data of each described scanning element numeral after analog-to-digital conversion
Signal is described optics the second primary data L2MN,
After described magnetic detection unit scan magnetic sample film, the magnetic detection data of each described scanning element are after analog digital conversion
Lowest numeric signal be described magnetic the first primary data M1MN, magnetic scanning sample film described in described magnetic detection unit
After, the magnetic detection data of each described scanning element maximum number signal after analog-to-digital conversion is described magnetic the second primary data
M2MN,
When described Multifunction Sensor does not place any thin film, the Thickness sensitivity data warp of described Thickness sensitivity unit output
Digital signal after analog-to-digital conversion is described thickness the first primary data T1MN, described Thickness sensitivity unit scan thickness sample is thin
During film, the Thickness sensitivity data of each described scanning element digital signal after analog-to-digital conversion is the second of described Thickness sensitivity unit
Primary data T2MN；And
Step A2, utilizes described primary data to calculate described augmenting factor, uses formula K1MN=predetermined gray value/(L2MN-L1MN)
It is calculated optics augmenting factor K1MN, use formula K2MN=predetermined gray value/(M2MN-M1MN) it is calculated magnetic augmenting factor
K2MN,Use formula KMN=predetermined gray value/(T2MN-T1MN) it is calculated thickness augmenting factor KMN。
13. detection methods according to claim 12, it is characterised in that described step S3 includes:
Use formula (LMN-L1MN)×K1MNTo described LMNMake corrections, wherein, described LMNScan for described optical detection unit
After described film to be measured, the digital signal that the optical detection data with each described scanning element of output are corresponding after analog digital conversion；
Use formula (MMN-M1MN)×K2MNTo described MMNMake corrections, wherein, described MMNFor described magnetic detection unit scan
After described film to be measured, the digital signal that the magnetic detection data with each described scanning element of output are corresponding after analog digital conversion；With
And
Use formula (TMN-T1MN)×K3MNOr (TMN-T1MN)+TSTo described TMNMake corrections, wherein, described TMNFor described thickness
Degree detector unit scans after described survey film, and after analog digital conversion, the Thickness sensitivity data with each described scanning element of output are corresponding
Digital signal, described TSFor skew gray value.
14. detection methods according to claim 12, it is characterised in that described detection method also includes:
Storing process to described augmenting factor Yu described primary data.
15. detection methods according to claim 10, it is characterised in that before described step S1, described detection method
Also include:
Magnetic reference voltage is corrected and inputs in described magnetic detection unit, the described magnetic reference voltage pair after correction
During the detection of described magnetic detection unit, the signal of output is corrected；And
Thickness reference voltage is corrected and inputs in described Thickness sensitivity unit, the described thickness reference voltage after correction
When detecting described Thickness sensitivity unit, the signal of output is corrected.
16. detection methods according to claim 15, it is characterised in that
The described process being corrected magnetic reference voltage includes:
Described magnetic reference voltage V is inputted to described magnetic detection unitM；
When described Multifunction Sensor does not place any thin film, start described magnetic detection unit, described magnetic detection list
Unit exports multiple magnetic detection voltage VMMN；
By described VMWith described VMMNIt is respectively converted into digital signal MMWith MMMN, use formula MRMMN=MM+(MM-MMMN), calculate school
The digital signal M that magnetic reference voltage described after just is correspondingRMMN；
By described MRMMNBe converted to voltage signal VRMMN,
The described process being corrected thickness reference voltage includes:
Described thickness reference voltage V is inputted to described Thickness sensitivity unitT；
When described Multifunction Sensor does not place any thin film, start described Thickness sensitivity unit, described Thickness sensitivity list
Unit exports multiple Thickness sensitivity voltage V1MN；
By described VTWith described V1MNIt is respectively converted into digital signal TTWith T1MN, use formula TRTMN=TT+(TT-T1MN), calculate school
The digital signal T that described thickness reference voltage after just is correspondingRTMN；
By described TRTMNBe converted to voltage signal VRTMN。
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