CN108411277B - A kind of method and apparatus of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film - Google Patents
A kind of method and apparatus of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film Download PDFInfo
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- CN108411277B CN108411277B CN201810381981.7A CN201810381981A CN108411277B CN 108411277 B CN108411277 B CN 108411277B CN 201810381981 A CN201810381981 A CN 201810381981A CN 108411277 B CN108411277 B CN 108411277B
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C30B28/00—Production of homogeneous polycrystalline material with defined structure
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Abstract
The invention discloses a kind of method and apparatus of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, by providing a reactor open at one end, using under atmospheric pressure environment electromagnetic induction heating liquid carbon source realization can be facilitated quickly to prepare graphene film in metal surface large area in metal surface fast-growth polycrystalline graphite alkene.The infiltration of steam, oxygen, acid group plasma can be effectively prevented in prepared polycrystalline graphite alkene film, substantially increase the chemical preservation corrosion energy of metal, the service life of metal is greatly improved, solves the problems, such as the combination of corrosion-inhibiting coating preparation process complexity, film and metal surface.In addition, the influence that the ultra-thin polycrystalline graphite ene coatings of growth are not big to metallicity.
Description
Technical field
The present invention relates to field of preparation of graphene, especially a kind of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film
Method and apparatus.
Background technique
Corrosion is the great influence of the fields such as emerging ocean engineering, engineering on an island equipment, installation security and service life
One of factor, especially tropical ocean development and infrastructure construction, are faced with severe corrosion crisis, make China's Important Project and
The sustainable development of equipment is affected.Graphene is the most thin two-dimension nano materials of current nature, barrier and shielding properties
It is very excellent.Impact-resistant mechanical property can be enhanced and to the shielding barrier property of medium by introducing graphene, especially
The infiltration of military service metal surface medium corrosion-resistant (water, chloride ion, oxygen etc.) in tropical marine atmospheres environment can be significantly improved
Ability improves the anti-corrosion life of metal while metal surface protection thickness is greatly reduced spending, and allows the metal materials such as steel
" resisting " under tropical ocean environment with high salt, high humidity and high temperature invasion, improve the service life of equipment, reduce economic loss.
The preparation method of graphene mainly has at present: 1) mechanical stripping method: obtained graphene is small-sized, generally exists
Between 10-100um；2) SiC epitaxial growth method: cost of material is higher, and equipment cost is also very high, it is also difficult to which growth is too large-sized
Graphene；3) graphite oxide reduction method: graphene defect is very more, and electricity, mechanical property are all poor；4) chemical vapor deposition
Method: transfer is problem, and growth needs vacuum environment, and the period is long.The CVD method in the above several ways
Being can be in metal surface growth in situ graphene, but A cautionary note on graphene anti-corrosion
The graphene of coatings document report chemical vapour deposition technique growth is conductive, adds instead in long-term corrosive environment
Speed promotes electrochemical corrosion and makes graphene worse as the antiseptic property of anti-corrosion material.
In consideration of it, the flux that the purpose of the present invention is generated by electromagnetic induction under normal pressure is to internal metal induction coil
It is quickly heated with metal, the solution with phenyl ring is formed in reactor by thermal evaporation and mixes saturation with atmosphere in reactor
Mixed vapour with phenyl ring is in this, as carbon source.Graphene polycrystal film is formed in sample surfaces fast-growth.Polycrystal film by
Barrier properties between crystal boundary make the film of preparation overcome in long-term corrosive environment graphene surface due to forceful electric power is led
Accelerate the influence of promotion electrochemical corrosion.Improve the anticorrosion ability of metal.
Summary of the invention
It is an object of the invention in view of the shortcomings of the prior art, providing one kind in the direct fast-growth graphite in metal surface
The preparation method and device of alkene anti-corrosion thin layer.This method directly under normal pressure using electromagnetic induction heating containing phenyl ring solution (benzene,
Chlorobenzene, toluene etc.) in metal surface fast-growth polycrystalline graphite alkene film；Prepared polycrystalline graphite alkene film can effectively be prevented
The infiltration of sealing vapour, oxygen, acid group plasma substantially increases the chemical preservation corrosion energy of metal, greatly improves metal
Service life.In addition, the influence that the ultra-thin polycrystalline graphite ene coatings of growth are not big to metallicity.
To achieve the above object, the present invention adopts the following technical scheme:
A kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, comprising the following steps:
S01: selecting metal sample as freshly prepd metal sample or pass through pretreated old metal sample, spare；
S02: provide a reactor open at one end, and in the reactor be arranged an interlayer, by reactor be divided into every
Part below layer above section and interlayer, the interlayer centre are equipped with a thin through-hole, are connected to upper and lower two spaces；It is reacting
The outer wall of device around logical cooling circulating water hollow metal induction coil, and below the interlayer of reactor part first place it is solid
It is closed metal induction heating coil；
S03: after the liquid containing phenyl ring of predetermined amount is partially added below the interlayer of reactor as carbon source, in atmospheric pressure environment
The hollow metal induction coil both ends indirect current of lower outer wall；
S04: the solid closure metal induction heating coil of part generates induced current and is warming up to 40-300 below interlayer
DEG C heating carbon source, when saturated vapor be full of reactor when, be put into solid closure metal rapidly in the interlayer above section of reactor
Load coil；
S05: the solid closure metal induction heating coil of interlayer above section generates induced current heating response device, inside
When portion's temperature is to 400 DEG C -1150 DEG C, the upper end opening of reactor is adjacent to metal sample surface that step S01 is got ready or rapidly
Metal sample to be processed is sent into from the top of the solid closure metal induction heating coil of interlayer above section；
S06: after reaction carries out 4-50 seconds, the hollow metal induction coil of outer wall stops plus alternating current, moves reaction rapidly
The solid closure metal induction heating coil of device interlayer above section；
S07: metal sample is cooled to room temperature in saturation carbon source vapor；
S08: reactor is removed or is taken out prepared sample from metal sample surface.
The preprocessing process of old metal sample described in step S01 are as follows: first pass through 1000 mesh, 2000 mesh and 3000 mesh gold
Phase sand paper successively carries out sample surfaces polishing and removes removing oxide layer, then after being cleaned with ethyl alcohol and deionized water, is dried with nitrogen.
In step S02, the reactor be corundum, quartz, porcelain, any material preparation in silicon carbide reaction
Device.
The hollow metal induction coil that the logical cooling circulating water of reactor outer wall is wound on described in step S02 is by metal
Induction coil made of copper；Solid closure metal induction heating coil described in step S02 and S04 is by one in tungsten and titanium
Kind or load coil made of two kinds.
It being capable of opposite sliding between the outer wall of the coil and reactor of reactor outer wall and inside.
It as the liquid containing phenyl ring of carbon source include one of benzene, chlorobenzene and toluene described in step S03 or a variety of.
Ratio between the surface area of the metal sample and the volume of the liquid containing phenyl ring as carbon source is 1:(0.04-
0.5) cm2/ml。
Alternating current described in step S03 is intermediate frequency or high frequency alternating current.
By the open end of mobile reactor, in the position on metal sample surface, to change, to need to grow graphene anti-corrosion thin
The specimen surface positions and area of film, to obtain large-area graphene anti-corrosion film；The metal sample surface shape of growth can be with
It is arbitrary.
The load coil of two internal upper and lower levels is coil-induced by the same outer induction, generates respectively different
Induced current forms two different heating warm areas.
A kind of device of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, including a reaction open at one end
Device is equipped with an interlayer in the reactor, reactor is divided into interlayer above section and interlayer or less part, reactor bottom
Fill the liquid containing phenyl ring as carbon source；It is equipped with a thin through-hole among the interlayer, is connected to upper and lower two spaces；It is reacting
The outer wall of device is wound with the hollow metal induction coil of logical cooling circulating water；Solid closure metal sense there are two being set in inside reactor
Heating coil is answered, interlayer above section and interlayer or less part are located at；Metal sample is closed from the solid of interlayer above section
The top of alloy category load coil, which is sent into reactor, carries out growth in situ.
The beneficial effects of the present invention are: compared to the preparation of existing graphene anti-corrosion film, the present invention has equipment letter
The advantages that single, heating location and area are controllable, sample surfaces shape can various, directly grow metallic substrates wide variety.This
The infiltration of steam, oxygen, acid group plasma can be effectively prevented in the prepared polycrystalline graphite alkene film of invention, substantially increases gold
The chemical preservation corrosion energy of category, greatly improves the service life of metal.In addition, the ultra-thin polycrystalline graphite ene coatings pair of growth
The not big influence of metallicity.
Detailed description of the invention
Fig. 1 is the apparatus structure schematic diagram of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film of the present invention；In figure,
1. reactor open at one end, the hollow metal induction coil of 2. logical cooling circulating waters, 3. solid closure metal induction heatings
Coil, 4. metal samples, 5. have the interlayer of thin through-hole connection, and 6. solid closure metal induction heating coils, 7. are used as carbon
The liquid containing phenyl ring in source；
Fig. 2 is grown 10 seconds for 1000 DEG C by electromagnetic induction heating benzole soln on copper surface in the embodiment of the present invention 1
Raman figure；
Fig. 3 is grown 10 seconds by electromagnetic induction heating benzole soln at 1000 DEG C of Pure Iron Surface in the embodiment of the present invention 2
Raman figure；
Fig. 4 be in the embodiment of the present invention 1 naked copper surface (left figure) and using electromagnetic induction heating benzole soln on copper surface
Sample surfaces (right figure) after 1000 DEG C of growths, 10 seconds graphene films corrode 7 days comparison knots in 3.5% sodium chloride solution
Fruit；
Fig. 5 be in the embodiment of the present invention 2 naked iron surface (left figure) and using electromagnetic induction heating benzole soln in iron surface
Sample surfaces (right figure) after 1000 DEG C of growths, 10 seconds graphene films corrode 7 days comparison knots in 3.5% sodium chloride solution
Fruit.
Specific embodiment
Below in conjunction with specific embodiment, the present invention will be further described, but the present invention is not limited only to these embodiments.
A kind of device of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, as shown in Figure 1, including that an one end is opened
Mouthful reactor 1, an interlayer 5 is equipped in the reactor, reactor is divided into interlayer above section and interlayer or less part,
Reactor bottom fills the liquid containing phenyl ring 7 as carbon source；It is equipped with a thin through-hole among the interlayer 5, is connected to upper and lower two
Space；The hollow metal induction coil 2 of logical cooling circulating water is wound in the outer wall of reactor；It is real there are two being set in inside reactor
The heart is closed metal induction heating coil, is located at the solid closure metal induction heating coil 3 and interlayer of interlayer above section
The solid closure metal induction heating coil 6 of following part；Metal sample 4 incudes from the solid closure metal of interlayer above section
The top of heating coil 3, which is sent into reactor 1, carries out growth in situ.From the top of heating coil 3 be sent into reactor 1 in or
It is directly exactly surface of the metal sample surface directly against solid metal load coil 3.It (namely is being not necessarily intended to put
In inside, it can be metal surface and be adjacent in the growth of the surface of coil)
A kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, comprising the following steps:
S01: metal sample is that freshly prepd metal sample or old sample first pass through 1000 mesh, 2000 mesh, 3000 mesh gold
Phase sand paper successively carries out sample surfaces polishing and removes removing oxide layer, after being cleaned with ethyl alcohol, deionized water, is dried with nitrogen；
S02: provide a reactor open at one end, and in the reactor be arranged an interlayer, by reactor be divided into every
Part below layer above section and interlayer, the interlayer centre are equipped with a thin through-hole, are connected to upper and lower two spaces；It is reacting
The outer wall of device around logical cooling circulating water hollow metal induction coil, and below the interlayer of reactor part first place it is solid
It is closed metal induction heating coil；
S03: predetermined amount is partially added below the interlayer of reactor, and (metal sample waits for long film surface product and carbon source volume ratio
For 1:0.04-0.5cm2/ ml) liquid containing phenyl ring (such as benzene, chlorobenzene, toluene etc. are one or more) as after carbon source, in normal pressure
Outer wall hollow metal induction coil both ends indirect current (frequency 400-320000Hz) under environment；
S04: the solid closure metal induction heating coil of part generates induced current heating (set temperature below interlayer
40-300 DEG C) carbon source is heated, when being saturated carbon source vapor full of reactor, it is put into reality rapidly in the interlayer above section of reactor
The heart is closed metal induction heating coil；Induced electricity is formed on the solid closure metal induction heating coil of interlayer above section
Stream, rises rapidly temperature in reaction vessel region；
S05: when heating response device makes internal temperature to preset temperature (400 DEG C -1150 DEG C), the upper end of reactor is opened
Mouth is adjacent to the metal sample surface of long film or rapidly above the solid closure metal induction heating coil of interlayer above section
It is sent into metal sample to be processed；It grows to obtain graphene in corresponding metal surface area；
S06: after reaction carries out a predetermined time (4-50 seconds), the hollow metal induction coil of outer wall stops plus alternating current,
Move the solid closure metal induction heating coil of reactor interlayer above section rapidly；The step makes system cool down rapidly,
Be conducive to the formation of polycrystalline graphite alkene；
S07: metal sample is cooled to room temperature in the saturation carbon source vapor of low temperature；Guarantee the life of high quality polycrystalline graphite alkene
It is long；
S08: reactor is removed or is taken out prepared sample, polycrystalline graphite alkene film is in metal from metal sample surface
Sample surfaces growth is completed.
Embodiment 1
The first step, after preparation copper foil (99.8% 0.025mm thickness Ai Erfa company) is cleaned with ethyl alcohol, deionized water, nitrogen
Air-blowing is dry；
Second step provides a corundum reactor open at one end, has an interlayer in reactor, by reactor be divided into interlayer with
Part below upper part and interlayer, the interlayer centre are equipped with a thin through-hole, are connected to upper and lower two spaces；Outside reactor
Wall is wound with the hollow copper induction coil with cooling circulating water, and solid closure tungsten sense is first placed in part below the interlayer of reactor
Answer heating coil；
Benzene liquid (99.8% Aladdin) is partially added below the interlayer of reactor and is used as after carbon source (wait grow for third step
Film sample copper surfaces are long-pending and carbon source volume ratio is 1cm2: 0.1ml), the hollow copper induction coil two of outer wall under atmospheric pressure environment
End passband rate is 10000Hz alternating current；
4th step, the hollow copper induction coil of part is warming up to 100 DEG C of heating carbon sources below interlayer, when saturated vapor fills
When full reactor, it is put into solid closure tungsten load coil rapidly in the interlayer above section of reactor；
5th step, the solid closure tungsten load coil of interlayer above section generate induced current heating reaction
Device incudes the solid closure tungsten that copper foil is put into interlayer above section when internal temperature reaches default 1000 DEG C of temperature and spends
Heating coil；
6th step, after reaction carries out heating in 10 seconds, the hollow copper induction coil of outer wall stops plus alternating current, moves rapidly anti-
Answer the solid closure tungsten load coil of device interlayer above section；
7th step, sample copper surfaces are cooled to room temperature in the saturation carbon source vapor of low temperature；
8th step will take out the prepared copper foil sample that grown graphene in corundum reactor；The Raman of product is surveyed
Examination is as shown in Figure 2, it can be seen that is to have the apparent peak G and the peak 2D, growth is polycrystalline graphene；
Copper foil do not grow and growth polycrystalline graphite alkene film is corroded seven in 3.5% sodium chloride solution by the 9th step
It, scanning electron microscope is as shown in Figure 4；There is serious pit-hole in the copper foil corrosion rear surface for not growing graphene film, and grows
The copper foil of polycrystalline graphite alkene film has apparent anti-corrosion effect.
Embodiment 2
The first step, Fe piece (promise new material (Beijing) Technology Co., Ltd. in 99.95% 0.1mm), sample first passes through
1000 mesh, 2000 mesh, 3000 mesh abrasive paper for metallograph successively carry out sample surfaces polishing and remove removing oxide layer, clear with ethyl alcohol, deionized water
After washing, it is dried with nitrogen；
Second step provides a corundum reactor open at one end, has an interlayer in reactor, by reactor be divided into interlayer with
Part below upper part and interlayer, the interlayer centre are equipped with a thin through-hole, are connected to upper and lower two spaces；Outside reactor
Wall is wound with the copper induction coil with cooling circulating water, and part below the interlayer of reactor is first placed solid closure tungsten induction and added
Heat coil；
Third step, the benzene liquid being partially added below the interlayer of reactor (99.8% Aladdin) be used as carbon source after (to
Long film Fe piece surface area of sample and carbon source volume ratio are 1cm2: 0.1ml), the hollow copper induction coil of outer wall under atmospheric pressure environment
Both ends passband rate is 10000Hz alternating current；
4th step, the hollow copper induction coil of part is warming up to 100 DEG C of heating carbon sources below interlayer, when saturated vapor fills
When full reactor, it is put into solid closure tungsten load coil rapidly in the interlayer above section of reactor；
5th step makes internal temperature in the solid closure tungsten load coil heating response device of interlayer above section
When spending to 1000 DEG C of default temperature, iron plate is put into the solid closure tungsten load coil of interlayer above section；
6th step, after reaction carries out heating in 10 seconds, the hollow copper induction coil of outer wall stops plus alternating current, moves rapidly anti-
Answer the solid closure tungsten load coil of device interlayer above section；
7th step, Fe piece sample surfaces are cooled to room temperature in the saturation carbon source vapor of low temperature；
8th step will grown the iron plate sample of graphene prepared by taking-up in corundum reactor；The Raman of product is tested
As shown in Figure 3, it can be seen that be to have the apparent peak G and the peak 2D, growth is polycrystalline graphene；
Iron plate do not grow and growth polycrystalline graphite alkene film is corroded seven in 3.5% sodium chloride solution by the 9th step
It, scanning electron microscope is as shown in Figure 5；There is big corrosion pit-hole in the iron plate corrosion rear surface for not growing graphene film, and grows
The iron plate surface corrosion rear surface of polycrystalline graphite alkene film only has and its slight corrosion occurs, and shows apparent anti-corrosion effect
Fruit.
Above-listed preferred embodiment, has been further described the object, technical solutions and advantages of the present invention, is answered
Understand, the foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention.It is all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, it is characterised in that: the following steps are included:
S01: selecting metal sample as freshly prepd metal sample or pass through pretreated old metal sample, spare；
S02: provide a reactor open at one end, and in the reactor be arranged an interlayer, by reactor be divided into interlayer with
Part below upper part and interlayer, the interlayer centre are equipped with a thin through-hole, are connected to upper and lower two spaces；In reactor
Around the hollow metal induction coil for leading to cooling circulating water, and below the interlayer of reactor, solid closure is first placed in part to outer wall
Metal induction heating coil；
S03: after the liquid containing phenyl ring of predetermined amount is partially added below the interlayer of reactor as carbon source, under atmospheric pressure environment,
Hollow metal induction coil both ends indirect current of the outer wall of reactor around logical cooling circulating water；
S04: the solid closure metal induction heating coil generation induced current of part is warming up to 40-300 DEG C and adds below interlayer
Hot carbon source is put into rapidly solid closure metal induction in the interlayer above section of reactor when saturated vapor is full of reactor
Heating coil；
S05: the solid closure metal induction heating coil of interlayer above section generates induced current heating response device, in internal temperature
When spending to 400 DEG C -1150 DEG C, by the upper end opening of reactor be adjacent to metal sample surface that step S01 is got ready or rapidly from every
Metal sample to be processed is sent into the top of the solid closure metal induction heating coil of layer above section；
S06: after reaction carries out 4-50 second, the hollow metal induction coil of outer wall stops plus alternating current, rapidly shifting fall reactor every
The solid closure metal induction heating coil of layer above section；
S07: metal sample is cooled to room temperature in saturation carbon source vapor；
S08: reactor is removed or is taken out prepared sample from metal sample surface.
2. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
It is: the preprocessing process of old metal sample described in step S01 are as follows: first pass through 1000 mesh, 2000 mesh and 3000 mesh metallographics
Sand paper successively carries out sample surfaces polishing and removes removing oxide layer, then after being cleaned with ethyl alcohol and deionized water, is dried with nitrogen.
3. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
Be: in step S02, the reactor be corundum, quartz, porcelain, any material preparation in silicon carbide reactor.
4. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
Be: the hollow metal induction coil that the logical cooling circulating water of reactor outer wall is wound on described in step S02 is by metallic copper
Manufactured induction coil；Solid closure metal induction heating coil is by one of tungsten and titanium described in step S02 and S04
Or load coil made of two kinds.
5. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
It is: being capable of opposite sliding between the outer wall of the coil and reactor of reactor outer wall and inside.
6. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
It is: as the liquid containing phenyl ring of carbon source includes one of benzene, chlorobenzene and toluene described in step S03 or is a variety of.
7. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
Be: the ratio between the surface area of the metal sample and the volume of the liquid containing phenyl ring as carbon source is 1:(0.04-0.5)
cm2/ml。
8. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
Be: alternating current described in step S03 is intermediate frequency or high frequency alternating current.
9. a kind of method of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film according to claim 1, feature
It is: needs to grow graphene anti-corrosion film in the position on metal sample surface by the open end of mobile reactor to change
Specimen surface positions and area, to obtain large-area graphene anti-corrosion film.
10. a kind of device of metal surface growth in situ polycrystalline graphite alkene anti-corrosion film, it is characterised in that: opened including an one end
Mouthful reactor, an interlayer is equipped in the reactor, reactor is divided into interlayer above section and interlayer or less part, instead
Device bottom is answered to fill the liquid containing phenyl ring as carbon source；It is equipped with a thin through-hole among the interlayer, is connected to upper and lower two skies
Between；The hollow metal induction coil of logical cooling circulating water is wound in the outer wall of reactor；It is solid there are two being set in inside reactor
It is closed metal induction heating coil, is located at interlayer above section and interlayer or less part；Metal sample is from interlayer with top
The top of the solid closure metal induction heating coil divided, which is sent into reactor, carries out growth in situ.
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| CN110359087B (en) * | 2019-07-11 | 2020-05-29 | 浙江博蓝特半导体科技股份有限公司 | Silicon carbide single crystal growth apparatus and method for producing silicon carbide single crystal |
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